Aera_FC-DR980_leaflet_English

Aera_FC-DR980_leaflet_English
Dimensions
Catalog
1.5” IGS Model
1.125” IGS Model
■“T” Model
■“Y” Model
■“T” Model
Electrical Connections
FC-DR98x (D-sub 9pin)
1
VALVE OPEN /CLOSE
2
OUTPUT 0~5VDC
3
+15VDC
4
COMMON
5
-15VDC
6
CONTROL 0~5VDC
7
COMMON
8
COMMON
9
VALVE TEST PT.(0~4VDC)
DR980
BF
DR981
DR980
BM
DR981
Port-to-Port
STD
Compact
STD
Compact
STD
Compact
STD
Compact
P
92.0
79.8
92.0
79.8
92.0
79.8
92.0
79.8
L
105.0
92.8
105.0
92.8
105.0
92.8
105.0
92.8
h
(mm)
H
127.4
■“Y” Model
135.4
25.4
127.0
135.0
Aera® FC-DR980
1/4” VCR® Equivalent Fitting Model
Digital Mass Flow Products
Leading digital MFCs and MFMs,
providing superior versatility in various system
(mm)
Port-to-Port
DR980
(mm)
BW
H
FC-DR980(C)
127.0
FC-DR981(C)
135.0
http://www.hitachi-metals.co.jp
Headquarters
SEAVANS North Bldg., 2-1, Shibaura 1-chome, Minato-ku, Tokyo 105-8614, Japan
Tel +81-3-5765-4000 Fax +81-3-5765-8311
Piping Components Company
Fine Flow Division
2971-8 Ishikawa-cho,Hachioji-shi, Tokyo 192-0032, Japan
Tel +81-42-645-8753 Fax +81-42-660-0320
San Jose Office
1920 Zanker Road,San Jose, California 95112, U.S.A.
Tel +1-408-467-8900 Fax +1-408-467-8901
E-mail : [email protected]
Immermannstrasse 14-16,40210 Duesseldorf, Germany
Tel +49-211-16009-0 Fax +49-211-16009-29
E-mail : [email protected]
DR981
BA
DR980
DR981
P
L
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
H
127.4
135.4
127.0
135.0
Safety Precaution
Before using any of the products introduced in this catalog,
please read the respective user manuals thoroughly.
•Contents of this catalog is as of January 2012.
•The products and their specifications are subject to change without notice.
Please check the latest catalog, technical documents or specifications before your final design,
procurement or use of the products.
•Aera ® is a trademark of Hitachi Metals Ltd.
•VCR ® is a trademark of Swagelok Company Corporation.
•Troubles or damages caused by natural disaster or inevitable accident, caused by mishandling,
use or storage in an improper place, use out of the rated specifications and modification,
factors contamination and clog due to use of corrosive gas and reactive gas.
•Any trouble or damage that is outside of Hitachi Metals Ltd.’s control has no responsibility
(if it does not clarify where responsibility lies, warranty is to be determined whether or not
it costs regardless of the warranty period after deliberation.)
The addresses and contact points listed in this catalog are as of January 2012.
Because changes may occur, if the telephone or fax number you are
trying to reach is not in service, please contact us at the following.
Hitachi Metals, Ltd. (Corporate Communications Office)
Tel +81-3-5765-4076 Fax +81-3-5765-8312
E-mail : [email protected]
Catalog No. HL-K275
Printed in January 2012
(T-FT 3)
Aera® FC-DR980 series digital MFCs
(mass flow controllers) and MFMs (mass
flow meters) deliver performance excellence and operational versatility, resulting
in significant cost savings and ease of
use.
Benefits
▶Superior accuracy, repeatability,
and stability
▶Superior operational versatility
▶Superior reliability
Features
▶Multi-gas,multi-range selection*
▶Analog, analog/digital, and digital
modes
▶Piezoelectric control valves
▶Multiple alarm and diagnostic
capabilities
▶Metal seals, with a 1x10-10 leak
integrity
▶Electropolished and ultra-cleaned
gas-wetted surfaces
* Available in multi-gas, multi- range models
Specifications
High-quality electronic components and a robust design stand up to the effects of harsh operational
Further, less than 0.5% of units are returned within a year of shipment.
Multiple output options enable analog or digital control, for use with most
existing control and communication configurations. To suit your priorities
for value and functionality, this product line features both single-gas and
multi-gas, multi-range MFCs. Multi-gas, multi-range features lower costs
by dramatically reducing spare inventory requirements. For comprehensive monitoring and control capabilities, RS-485 communications (RS-232
with converter) , combined with a full range of diagnostic and alarm
functions, put operational parameters at your fingertips.
Superior Accuracy, Repeatability, and Stability
Algorithms unique to Aera MFCs provide very fast response between the
sensor and control valve. The result is better flow accuracy, repeatability,
and stability, with an actual-flow settling time of 1 sec.
Significant Cost Savings
Multi-gas, multi-range FC -DR980 MFCs reduce overall costs by minimizing
spare MFC inventory requirements. Just eight units can replace hundreds of
spares and part numbers. Single-gas MFCs require backup inventory for
each process gas. Multi-gas, multi-range FC-DR980 MFC models dramatically reduce such requirements because they can replace any other MFC
used in the process within the device’s mechanical limits, regardless of gas
type.
Superior Operational Versatility
Operational
Multi-gas, multi-r ange Aer a FC-DR980 series MFCs are easily
field-programmable to run various gas, for any range within the MFC’s
mechanical limits. For quick gas and full-scale reassignment, they store
calibration curves for up to four gases and ten calibration points for each
gas.
FC-DR981/DR981C Series
※1
Multi Gas Model (1) − 10 ∼ 30 sccm
Multi Gas Model (2) − 31 ∼ 100 sccm
Multi Gas Model (7) − 5,001 ∼ 10,000 sccm
Control Valve Type
Normally-open or normally-closed piezoelectric
Materials
Stainless steel, type 316L , 316, PCTFE
Standard Fittings
1/4″VCR®, 1.5" width IGS, 1.125" width IGS (C-seal or W-seal)
Surface Finish
Electropolished and ultra-cleaned to 5 Ra
Attitude Sensitivity
May be mounted in any position
Weight
1.2 kg (2.2 lb)
※1 Normally Closed Valve
Multi Gas Model (4) − 301 ∼ 1,000 sccm
Multi Gas Model (8) − 10,001 ∼ 30,000 sccm
Multi Gas Model (6) − 3,001 ∼ 5,000 sccm
Response Time
≤ ±1% of set point from 25 to 100% of full scale
In & Output Signal
≤ ± 0.25% of full scale from 2 to 25% of full scale
Repeatability
Digital/Service Port
≤ ± 0.15% of full scale
-10
-11
atm-cc/sec (He) maximum, 1x10
Pa・m /sec (He) maximum
1x10
Control Range
2 to 100% of full scale
Differential Pressure
7 to 40 psiD
Max Operating Pressure
70 psiG
Proof Pressure
145 psiG
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Alarm/Diagnostic Functions
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
50
45
40
35
30
25
20
15
10
5
0
FC-DR980/DR980C Series
Category
※1
Single Gas Model − 10 ∼ 5,000 sccm
Response Time
≤ 1.0 sec typical per SEMI E17-91 (all control range)
20
30
40
50
60
70
Set Point as % of Full-Scale Gas Flow
Figure 1. Digital vs. analog accuracy
80
FC-DR981/DR981C Series
100
Description
Codes
Mass flow controller (digital)
FC-D
・・・
・・・
・・・
・・・
・・・
・・・
・・・
RoHS Compliance
Compliant with RoHS directives
・・・
R
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
980
・・・
・・・
・・・
・・・
・・・
・・・
・・・
985
・・・
・・・
・・・
・・・
・・・
・・・
・・・
981
・・・
・・・
・・・
・・・
・・・
10 sccm to 5 slm
※1
Full-Scale Flow Range
Single Gas Model − 6 ∼ 50slm
6 to 50 slm
・・・
986
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
≤ ±0.25% of of full scale from 2 to 25% of full scale
Normally-closed piezoelectric
・・・
・・・
・・・
C
・・・
・・・
・・・
・・・
≤ ±0.15% of full scale
Top mounted connector
・・・
・・・
・・・
・・・
T
・・・
・・・
・・・
≤ ±1% of set opint from 25 to 100% of full scale
Control Valve Type
Connector
Side mounted pigtail connector
・・・
・・・
・・・
・・・
Y
・・・
・・・
・・・
1/4" VCR® compatible
・・・
・・・
・・・
・・・
・・・
4V
・・・
・・・
1.125" c-seal
・・・
・・・
・・・
・・・
・・・
BA
・・・
・・・
1.125" w-seal
・・・
・・・
・・・
・・・
・・・
BW
・・・
・・・
1.5" c-seal
・・・
・・・
・・・
・・・
・・・
BM
・・・
・・・
70 psiG
1.5" w-seal
・・・
・・・
・・・
・・・
・・・
BF
・・・
・・・
Proof Pressure
145 psiG
Customer specified Gas
・・・
・・・
・・・
・・・
・・・
・・・
N2
・・・
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Customer specified Full Scale
・・・
・・・
・・・
・・・
・・・
・・・
・・・
200
FC-D
R
980
C
4V
N2
200
Leak Integrity
Control Range
-10
1×10
atm-cc/sec (He) maximum, 1x10-11 Pa・m-3/sec (He) maximum
2 to 100% of full scale
10 to 40 psiD (5slm to 20slm nitrogen equivalent)
Differential Pressure
7 to 40 psiD
22 to 40 psiD (20slm to 30slm nitrogen equivalent)
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
Fittings
Gas Full-Scale Flow
Range (sccm or slm)
Single-Gas Example
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 200 sccm full-scale range)
※1 Normally Closed Valve
90
EIA standard, RS-485, two-wire, half-duplex, multi-drop with two RJ-11 connectors
・・・
Alarm/Diagnostic Functions
10
Analog Mode: 0 to 5 VDC
Product Type
Multi-Gas/Multi-Range
5
Digital Mode: 0 to 100%
Normally-open piezoelectric
FC-DR980 digital MFCs provide superior
accuracy compared to analog models.
2
2.1 W max
■ FC-DR980/FC-DR981 Series MFC
Full-Scale Ranges
Alarm/Diagnostic Functions
Digital
Analog
–15 VDC ±2% at 40 mA
30 to 40 psiD: Multi Gas (8)
※1 Normally Closed Valve
Max Operating Pressure
Choose from analog, analog/digital, and digital modes for operation
with any control system.
+15 VDC ±2% at 100 mA
Model and Suffix Codes
22 to 40 psiD: Multi Gas (7)
30 to 40 psiD (30slm to 50slm nitrogen equivalent)
Multi-Mode Operation
FC-DR981/DR981C Series ※1
※1 Normally Closed Valve
-3
Leak Integrity
Operational
Input Power
Power Consumption
≤ 1.0 sec typical per SEMI E17-91 (all control range)
Accuracy
FC-DR980/DR980C Series ※ 1
Electrical
Multi Gas Model (5) − 1,001 ∼ 3,000 sccm
Repeatability
FC-DR981/DR981C Series ※1
Multi Gas Model (3) − 101 ∼ 300 sccm
Full-Scale Ranges
Accuracy
Multi-Gas, Multi-Range Selection
FC-DR980/DR980C Series
※1
FC-DR980/DR980C Series ※ 1
Physical
demands, delivering superior, long-term, zero-drift stability—less than 0.5% of full-scale flow over one year.
Specifications
Error as % of Full-Scale Gas Flow
▶Significant cost savings
SUPERIOR RELIABILITY
MGMR (Please review full scale
range indicated in previous page
for Multi 1 ∼ 8)
Multi-Gas Example
・・・
・・・
・・・
・・・
FC-D
R
980
C
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 101 ∼ 300 sccm full-scale range)
※1 "T" and "Y" options are only for 985 and 986 compact MFC series
・・・
・・・
Multi
4V
Multi
1∼8
(10 sccm ∼
30 slm N2
Equivalent)
3
Aera® FC-DR980 series digital MFCs
(mass flow controllers) and MFMs (mass
flow meters) deliver performance excellence and operational versatility, resulting
in significant cost savings and ease of
use.
Benefits
▶Superior accuracy, repeatability,
and stability
▶Superior operational versatility
▶Superior reliability
Features
▶Multi-gas,multi-range selection*
▶Analog, analog/digital, and digital
modes
▶Piezoelectric control valves
▶Multiple alarm and diagnostic
capabilities
▶Metal seals, with a 1x10-10 leak
integrity
▶Electropolished and ultra-cleaned
gas-wetted surfaces
* Available in multi-gas, multi- range models
Specifications
High-quality electronic components and a robust design stand up to the effects of harsh operational
Further, less than 0.5% of units are returned within a year of shipment.
Multiple output options enable analog or digital control, for use with most
existing control and communication configurations. To suit your priorities
for value and functionality, this product line features both single-gas and
multi-gas, multi-range MFCs. Multi-gas, multi-range features lower costs
by dramatically reducing spare inventory requirements. For comprehensive monitoring and control capabilities, RS-485 communications (RS-232
with converter) , combined with a full range of diagnostic and alarm
functions, put operational parameters at your fingertips.
Superior Accuracy, Repeatability, and Stability
Algorithms unique to Aera MFCs provide the fastest response between the
sensor and control valve. The result is better flow accuracy, repeatability,
and stability, with an actual-flow settling time of 1 sec.
Significant Cost Savings
Multi-gas, multi-range FC -DR980 MFCs reduce overall costs by minimizing
spare MFC inventory requirements. Just eight units can replace hundreds of
spares and part numbers. Single-gas MFCs require backup inventory for
each process gas. Multi-gas, multi-range FC-DR980 MFC models dramatically reduce such requirements because they can replace any other MFC
used in the process within the device’s mechanical limits, regardless of gas
type.
Superior Operational Versatility
Operational
Multi-gas, multi-r ange Aer a FC-DR980 series MFCs are easily
field-programmable to run various gas, for any range within the MFC’s
mechanical limits. For quick gas and full-scale reassignment, they store
calibration curves for up to four gases and ten calibration points for each
gas.
FC-DR981/DR981C Series
※1
Multi Gas Model (1) − 10 ∼ 30 sccm
Multi Gas Model (2) − 31 ∼ 100 sccm
Multi Gas Model (7) − 5,001 ∼ 10,000 sccm
Control Valve Type
Normally-open or normally-closed piezoelectric
Materials
Stainless steel, type 316L , 316, PCTFE
Standard Fittings
1/4″VCR®, 1.5" width IGS, 1.125" width IGS (C-seal or W-seal)
Surface Finish
Electropolished and ultra-cleaned to 5 Ra
Attitude Sensitivity
May be mounted in any position
Weight
1.2 kg (2.2 lb)
※1 Normally Closed Valve
Multi Gas Model (4) − 301 ∼ 1,000 sccm
Multi Gas Model (8) − 10,001 ∼ 30,000 sccm
Multi Gas Model (6) − 3,001 ∼ 5,000 sccm
Response Time
≤ ±1% of set point from 25 to 100% of full scale
In & Output Signal
≤ ± 0.25% of full scale from 2 to 25% of full scale
Repeatability
Digital/Service Port
≤ ± 0.15% of full scale
-10
-11
atm-cc/sec (He) maximum, 1x10
Pa・m /sec (He) maximum
1x10
Control Range
2 to 100% of full scale
Differential Pressure
7 to 40 psiD
Max Operating Pressure
70 psiG
Proof Pressure
145 psiG
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Alarm/Diagnostic Functions
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
50
45
40
35
30
25
20
15
10
5
0
FC-DR980/DR980C Series
Category
※1
Single Gas Model − 10 ∼ 5,000 sccm
Response Time
≤ 1.0 sec typical per SEMI E17-91 (all control range)
20
30
40
50
60
70
Set Point as % of Full-Scale Gas Flow
Figure 1. Digital vs. analog accuracy
80
FC-DR981/DR981C Series
100
Description
Codes
Mass flow controller (digital)
FC-D
・・・
・・・
・・・
・・・
・・・
・・・
・・・
RoHS Compliance
Compliant with RoHS directives
・・・
R
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
980
・・・
・・・
・・・
・・・
・・・
・・・
・・・
985
・・・
・・・
・・・
・・・
・・・
・・・
・・・
981
・・・
・・・
・・・
・・・
・・・
10 sccm to 5 slm
※1
Full-Scale Flow Range
Single Gas Model − 6 ∼ 50slm
6 to 50 slm
・・・
986
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
≤ ±0.25% of of full scale from 2 to 25% of full scale
Normally-closed piezoelectric
・・・
・・・
・・・
C
・・・
・・・
・・・
・・・
≤ ±0.15% of full scale
Top mounted connector
・・・
・・・
・・・
・・・
T
・・・
・・・
・・・
≤ ±1% of set opint from 25 to 100% of full scale
Control Valve Type
Connector
Side mounted pigtail connector
・・・
・・・
・・・
・・・
Y
・・・
・・・
・・・
1/4" VCR® compatible
・・・
・・・
・・・
・・・
・・・
4V
・・・
・・・
1.125" c-seal
・・・
・・・
・・・
・・・
・・・
BA
・・・
・・・
1.125" w-seal
・・・
・・・
・・・
・・・
・・・
BW
・・・
・・・
1.5" c-seal
・・・
・・・
・・・
・・・
・・・
BM
・・・
・・・
70 psiG
1.5" w-seal
・・・
・・・
・・・
・・・
・・・
BF
・・・
・・・
Proof Pressure
145 psiG
Customer specified Gas
・・・
・・・
・・・
・・・
・・・
・・・
N2
・・・
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Customer specified Full Scale
・・・
・・・
・・・
・・・
・・・
・・・
・・・
200
FC-D
R
980
C
4V
N2
200
Leak Integrity
Control Range
-10
1×10
atm-cc/sec (He) maximum, 1x10-11 Pa・m-3/sec (He) maximum
2 to 100% of full scale
10 to 40 psiD (5slm to 20slm nitrogen equivalent)
Differential Pressure
7 to 40 psiD
22 to 40 psiD (20slm to 30slm nitrogen equivalent)
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
Fittings
Gas Full-Scale Flow
Range (sccm or slm)
Single-Gas Example
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 200 sccm full-scale range)
※1 Normally Closed Valve
90
EIA standard, RS-485, two-wire, half-duplex, multi-drop with two RJ-11 connectors
・・・
Alarm/Diagnostic Functions
10
Analog Mode: 0 to 5 VDC
Product Type
Multi-Gas/Multi-Range
5
Digital Mode: 0 to 100%
Normally-open piezoelectric
FC-DR980 digital MFCs provide superior
accuracy compared to analog models.
2
2.1 W max
■ FC-DR980/FC-DR981 Series MFC
Full-Scale Ranges
Alarm/Diagnostic Functions
Digital
Analog
–15 VDC ±2% at 40 mA
30 to 40 psiD: Multi Gas (8)
※1 Normally Closed Valve
Max Operating Pressure
Choose from analog, analog/digital, and digital modes for operation
with any control system.
+15 VDC ±2% at 100 mA
Model and Suffix Codes
22 to 40 psiD: Multi Gas (7)
30 to 40 psiD (30slm to 50slm nitrogen equivalent)
Multi-Mode Operation
FC-DR981/DR981C Series ※1
※1 Normally Closed Valve
-3
Leak Integrity
Operational
Input Power
Power Consumption
≤ 1.0 sec typical per SEMI E17-91 (all control range)
Accuracy
FC-DR980/DR980C Series ※ 1
Electrical
Multi Gas Model (5) − 1,001 ∼ 3,000 sccm
Repeatability
FC-DR981/DR981C Series ※1
Multi Gas Model (3) − 101 ∼ 300 sccm
Full-Scale Ranges
Accuracy
Multi-Gas, Multi-Range Selection
FC-DR980/DR980C Series
※1
FC-DR980/DR980C Series ※ 1
Physical
demands, delivering superior, long-term, zero-drift stability—less than 0.5% of full-scale flow over one year.
Specifications
Error as % of Full-Scale Gas Flow
▶Significant cost savings
SUPERIOR RELIABILITY
MGMR (Please review full scale
range indicated in previous page
for Multi 1 ∼ 8)
Multi-Gas Example
・・・
・・・
・・・
・・・
FC-D
R
980
C
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 101 ∼ 300 sccm full-scale range)
※1 "T" and "Y" options are only for 985 and 986 compact MFC series
・・・
・・・
Multi
4V
Multi
1∼8
(10 sccm ∼
30 slm N2
Equivalent)
3
Aera® FC-DR980 series digital MFCs
(mass flow controllers) and MFMs (mass
flow meters) deliver performance excellence and operational versatility, resulting
in significant cost savings and ease of
use.
Benefits
▶Superior accuracy, repeatability,
and stability
▶Superior operational versatility
▶Superior reliability
Features
▶Multi-gas,multi-range selection*
▶Analog, analog/digital, and digital
modes
▶Piezoelectric control valves
▶Multiple alarm and diagnostic
capabilities
▶Metal seals, with a 1x10-10 leak
integrity
▶Electropolished and ultra-cleaned
gas-wetted surfaces
* Available in multi-gas, multi- range models
Specifications
High-quality electronic components and a robust design stand up to the effects of harsh operational
Further, less than 0.5% of units are returned within a year of shipment.
Multiple output options enable analog or digital control, for use with most
existing control and communication configurations. To suit your priorities
for value and functionality, this product line features both single-gas and
multi-gas, multi-range MFCs. Multi-gas, multi-range features lower costs
by dramatically reducing spare inventory requirements. For comprehensive monitoring and control capabilities, RS-485 communications (RS-232
with converter) , combined with a full range of diagnostic and alarm
functions, put operational parameters at your fingertips.
Superior Accuracy, Repeatability, and Stability
Algorithms unique to Aera MFCs provide the fastest response between the
sensor and control valve. The result is better flow accuracy, repeatability,
and stability, with an actual-flow settling time of 1 sec.
Significant Cost Savings
Multi-gas, multi-range FC -DR980 MFCs reduce overall costs by minimizing
spare MFC inventory requirements. Just eight units can replace hundreds of
spares and part numbers. Single-gas MFCs require backup inventory for
each process gas. Multi-gas, multi-range FC-DR980 MFC models dramatically reduce such requirements because they can replace any other MFC
used in the process within the device’s mechanical limits, regardless of gas
type.
Superior Operational Versatility
Operational
Multi-gas, multi-r ange Aer a FC-DR980 series MFCs are easily
field-programmable to run various gas, for any range within the MFC’s
mechanical limits. For quick gas and full-scale reassignment, they store
calibration curves for up to four gases and ten calibration points for each
gas.
FC-DR981/DR981C Series
※1
Multi Gas Model (1) − 10 ∼ 30 sccm
Multi Gas Model (2) − 31 ∼ 100 sccm
Multi Gas Model (7) − 5,001 ∼ 10,000 sccm
Control Valve Type
Normally-open or normally-closed piezoelectric
Materials
Stainless steel, type 316L , 316, PCTFE
Standard Fittings
1/4″VCR®, 1.5" width IGS, 1.125" width IGS (C-seal or W-seal)
Surface Finish
Electropolished and ultra-cleaned to 5 Ra
Attitude Sensitivity
May be mounted in any position
Weight
1.2 kg (2.2 lb)
※1 Normally Closed Valve
Multi Gas Model (4) − 301 ∼ 1,000 sccm
Multi Gas Model (8) − 10,001 ∼ 30,000 sccm
Multi Gas Model (6) − 3,001 ∼ 5,000 sccm
Response Time
≤ ±1% of set point from 25 to 100% of full scale
In & Output Signal
≤ ± 0.25% of full scale from 2 to 25% of full scale
Repeatability
Digital/Service Port
≤ ± 0.15% of full scale
-10
-11
atm-cc/sec (He) maximum, 1x10
Pa・m /sec (He) maximum
1x10
Control Range
2 to 100% of full scale
Differential Pressure
7 to 40 psiD
Max Operating Pressure
70 psiG
Proof Pressure
145 psiG
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Alarm/Diagnostic Functions
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
50
45
40
35
30
25
20
15
10
5
0
FC-DR980/DR980C Series
Category
※1
Single Gas Model − 10 ∼ 5,000 sccm
Response Time
≤ 1.0 sec typical per SEMI E17-91 (all control range)
20
30
40
50
60
70
Set Point as % of Full-Scale Gas Flow
Figure 1. Digital vs. analog accuracy
80
FC-DR981/DR981C Series
100
Description
Codes
Mass flow controller (digital)
FC-D
・・・
・・・
・・・
・・・
・・・
・・・
・・・
RoHS Compliance
Compliant with RoHS directives
・・・
R
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
980
・・・
・・・
・・・
・・・
・・・
・・・
・・・
985
・・・
・・・
・・・
・・・
・・・
・・・
・・・
981
・・・
・・・
・・・
・・・
・・・
10 sccm to 5 slm
※1
Full-Scale Flow Range
Single Gas Model − 6 ∼ 50slm
6 to 50 slm
・・・
986
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
・・・
≤ ±0.25% of of full scale from 2 to 25% of full scale
Normally-closed piezoelectric
・・・
・・・
・・・
C
・・・
・・・
・・・
・・・
≤ ±0.15% of full scale
Top mounted connector
・・・
・・・
・・・
・・・
T
・・・
・・・
・・・
≤ ±1% of set opint from 25 to 100% of full scale
Control Valve Type
Connector
Side mounted pigtail connector
・・・
・・・
・・・
・・・
Y
・・・
・・・
・・・
1/4" VCR® compatible
・・・
・・・
・・・
・・・
・・・
4V
・・・
・・・
1.125" c-seal
・・・
・・・
・・・
・・・
・・・
BA
・・・
・・・
1.125" w-seal
・・・
・・・
・・・
・・・
・・・
BW
・・・
・・・
1.5" c-seal
・・・
・・・
・・・
・・・
・・・
BM
・・・
・・・
70 psiG
1.5" w-seal
・・・
・・・
・・・
・・・
・・・
BF
・・・
・・・
Proof Pressure
145 psiG
Customer specified Gas
・・・
・・・
・・・
・・・
・・・
・・・
N2
・・・
Temperature
15 ∼ 50°C (59° ∼ 122°F)
Customer specified Full Scale
・・・
・・・
・・・
・・・
・・・
・・・
・・・
200
FC-D
R
980
C
4V
N2
200
Leak Integrity
Control Range
-10
1×10
atm-cc/sec (He) maximum, 1x10-11 Pa・m-3/sec (He) maximum
2 to 100% of full scale
10 to 40 psiD (5slm to 20slm nitrogen equivalent)
Differential Pressure
7 to 40 psiD
22 to 40 psiD (20slm to 30slm nitrogen equivalent)
Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error
Fittings
Gas Full-Scale Flow
Range (sccm or slm)
Single-Gas Example
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 200 sccm full-scale range)
※1 Normally Closed Valve
90
EIA standard, RS-485, two-wire, half-duplex, multi-drop with two RJ-11 connectors
・・・
Alarm/Diagnostic Functions
10
Analog Mode: 0 to 5 VDC
Product Type
Multi-Gas/Multi-Range
5
Digital Mode: 0 to 100%
Normally-open piezoelectric
FC-DR980 digital MFCs provide superior
accuracy compared to analog models.
2
2.1 W max
■ FC-DR980/FC-DR981 Series MFC
Full-Scale Ranges
Alarm/Diagnostic Functions
Digital
Analog
–15 VDC ±2% at 40 mA
30 to 40 psiD: Multi Gas (8)
※1 Normally Closed Valve
Max Operating Pressure
Choose from analog, analog/digital, and digital modes for operation
with any control system.
+15 VDC ±2% at 100 mA
Model and Suffix Codes
22 to 40 psiD: Multi Gas (7)
30 to 40 psiD (30slm to 50slm nitrogen equivalent)
Multi-Mode Operation
FC-DR981/DR981C Series ※1
※1 Normally Closed Valve
-3
Leak Integrity
Operational
Input Power
Power Consumption
≤ 1.0 sec typical per SEMI E17-91 (all control range)
Accuracy
FC-DR980/DR980C Series ※ 1
Electrical
Multi Gas Model (5) − 1,001 ∼ 3,000 sccm
Repeatability
FC-DR981/DR981C Series ※1
Multi Gas Model (3) − 101 ∼ 300 sccm
Full-Scale Ranges
Accuracy
Multi-Gas, Multi-Range Selection
FC-DR980/DR980C Series
※1
FC-DR980/DR980C Series ※ 1
Physical
demands, delivering superior, long-term, zero-drift stability—less than 0.5% of full-scale flow over one year.
Specifications
Error as % of Full-Scale Gas Flow
▶Significant cost savings
SUPERIOR RELIABILITY
MGMR (Please review full scale
range indicated in previous page
for Multi 1 ∼ 8)
Multi-Gas Example
・・・
・・・
・・・
・・・
FC-D
R
980
C
(MFC, RoHS compliant, normally-closed valve, ¼" VCR® fittings, N2 gas, 101 ∼ 300 sccm full-scale range)
※1 "T" and "Y" options are only for 985 and 986 compact MFC series
・・・
・・・
Multi
4V
Multi
1∼8
(10 sccm ∼
30 slm N2
Equivalent)
3
Dimensions
Catalog
1.5” IGS Model
1.125” IGS Model
■“T” Model
■“Y” Model
■“T” Model
Electrical Connections
FC-DR98x (D-sub 9pin)
1
VALVE OPEN /CLOSE
2
OUTPUT 0~5VDC
3
+15VDC
4
COMMON
5
-15VDC
6
CONTROL 0~5VDC
7
COMMON
8
COMMON
9
VALVE TEST PT.(0~4VDC)
DR980
BF
DR981
DR980
BM
DR981
Port-to-Port
STD
Compact
STD
Compact
STD
Compact
STD
Compact
P
92.0
79.8
92.0
79.8
92.0
79.8
92.0
79.8
L
105.0
92.8
105.0
92.8
105.0
92.8
105.0
92.8
h
(mm)
H
127.4
■“Y” Model
135.4
25.4
127.0
135.0
Aera® FC-DR980
1/4” VCR® Equivalent Fitting Model
Digital Mass Flow Products
Leading digital MFCs and MFMs,
providing superior versatility in various system
(mm)
Port-to-Port
DR980
(mm)
BW
H
FC-DR980(C)
127.0
FC-DR981(C)
135.0
http://www.hitachi-metals.co.jp
Headquarters
SEAVANS North Bldg., 2-1, Shibaura 1-chome, Minato-ku, Tokyo 105-8614, Japan
Tel +81-3-5765-4000 Fax +81-3-5765-8311
Piping Components Company
Fine Flow Division
2971-8 Ishikawa-cho,Hachioji-shi, Tokyo 192-0032, Japan
Tel +81-42-645-8753 Fax +81-42-660-0320
San Jose Office
1920 Zanker Road,San Jose, California 95112, U.S.A.
Tel +1-408-467-8900 Fax +1-408-467-8901
E-mail : [email protected]
Immermannstrasse 14-16,40210 Duesseldorf, Germany
Tel +49-211-16009-0 Fax +49-211-16009-29
E-mail : [email protected]
DR981
BA
DR980
DR981
P
L
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
H
127.4
135.4
127.0
135.0
Safety Precaution
Before using any of the products introduced in this catalog,
please read the respective user manuals thoroughly.
•Contents of this catalog is as of January 2012.
•The products and their specifications are subject to change without notice.
Please check the latest catalog, technical documents or specifications before your final design,
procurement or use of the products.
•Aera ® is a trademark of Hitachi Metals Ltd.
•VCR ® is a trademark of Swagelok Company Corporation.
•Troubles or damages caused by natural disaster or inevitable accident, caused by mishandling,
use or storage in an improper place, use out of the rated specifications and modification,
factors contamination and clog due to use of corrosive gas and reactive gas.
•Any trouble or damage that is outside of Hitachi Metals Ltd.’s control has no responsibility
(if it does not clarify where responsibility lies, warranty is to be determined whether or not
it costs regardless of the warranty period after deliberation.)
The addresses and contact points listed in this catalog are as of January 2012.
Because changes may occur, if the telephone or fax number you are
trying to reach is not in service, please contact us at the following.
Hitachi Metals, Ltd. (Corporate Communications Office)
Tel +81-3-5765-4076 Fax +81-3-5765-8312
E-mail : [email protected]
Catalog No. HL-K275
Printed in January 2012
(T-FT 3)
Dimensions
Catalog
1.5” IGS Model
1.125” IGS Model
■“T” Model
■“Y” Model
■“T” Model
Electrical Connections
FC-DR98x (D-sub 9pin)
1
VALVE OPEN /CLOSE
2
OUTPUT 0~5VDC
3
+15VDC
4
COMMON
5
-15VDC
6
CONTROL 0~5VDC
7
COMMON
8
COMMON
9
VALVE TEST PT.(0~4VDC)
DR980
BF
DR981
DR980
BM
DR981
Port-to-Port
STD
Compact
STD
Compact
STD
Compact
STD
Compact
P
92.0
79.8
92.0
79.8
92.0
79.8
92.0
79.8
L
105.0
92.8
105.0
92.8
105.0
92.8
105.0
92.8
(mm)
H
h
127.4
■“Y” Model
135.4
25.4
127.0
135.0
Aera® FC-DR980
1/4” VCR® Equivalent Fitting Model
Digital Mass Flow Products
Leading digital MFCs and MFMs,
providing superior versatility in various system
(mm)
Port-to-Port
DR980
(mm)
BW
H
FC-DR980(C)
127.0
FC-DR981(C)
135.0
http://www.hitachi-metals.co.jp
Headquarters
SEAVANS North Bldg., 2-1, Shibaura 1-chome, Minato-ku, Tokyo 105-8614, Japan
Tel +81-3-5765-4000 Fax +81-3-5765-8311
Fine Flow Business Unit
210 Obuke, Asahi-cho, Mie-gun, Mie Pre.510-8102, Japan
Tel +81-59-377-3040 Fax +81-59-377-4575
San Jose Office
1920 Zanker Road, San Jose, California 95112, U.S.A.
Tel +1-408-467-8900 Fax +1-408-467-8901
E-mail : [email protected]
Immermannstrasse 14-16, 40210 Duesseldorf, Germany
Tel +49-211-16009-0 Fax +49-211-16009-29
E-mail : [email protected]
DR981
BA
DR980
DR981
P
L
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
Compact
79.8
92.8
STD
92.0
105.0
H
127.4
135.4
127.0
135.0
Safety Precaution
Before using any of the products introduced in this catalog,
please read the respective user manuals thoroughly.
•Contents of this catalog is as of March 2013.
•The products and their specifications are subject to change without notice.
Please check the latest catalog, technical documents or specifications before your final design,
procurement or use of the products.
•Aera ® is a trademark of Hitachi Metals Ltd.
•VCR ® is a trademark of Swagelok Company Corporation.
•Troubles or damages caused by natural disaster or inevitable accident, caused by mishandling,
use or storage in an improper place, use out of the rated specifications and modification,
factors contamination and clog due to use of corrosive gas and reactive gas.
•Any trouble or damage that is outside of Hitachi Metals Ltd.’s control has no responsibility
(if it does not clarify where responsibility lies, warranty is to be determined whether or not
it costs regardless of the warranty period after deliberation.)
The addresses and contact points listed in this catalog are as of March 2013.
Because changes may occur, if the telephone or fax number you are
trying to reach is not in service, please contact us at the following.
Hitachi Metals, Ltd. (Corporate Communications Office)
Tel +81-3-5765-4076 Fax +81-3-5765-8312
E-mail : [email protected]
Catalog No. HL-K275
Printed in January 2012
(T-HT 3)
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