Edwards_TS75_Product_Manual

Edwards_TS75_Product_Manual
D395-93-880
Issue A Original
Instruction Manual
T-Station 75
Description
Item
Number
Description
Item
Number
T-Station 75W NW40 200-230 V 50/60 Hz
TS75W1001
T-Station 75D NW40 200-230 V 50/60 Hz
TS75D1001
T-Station 75W NW40 100-120 V 50/60 Hz
TS75W1002
T-Station 75D NW40 100-120 V 50/60 Hz
TS75D1002
T-Station 75W ISO63 200-230 V 50/60 Hz
TS75W2001
T-Station 75D ISO63 200-230 V 50/60 Hz
TS75D2001
T-Station 75W ISO63 100-120 V 50/60 Hz
TS75W2002
T-Station 75D ISO63 100-120 V 50/60 Hz
TS75D2002
T-Station 75W CF63 200-230 V 50/60 Hz
TS75W3001
T-Station 75D CF63 200-230 V 50/60 Hz
TS75D3001
T-Station 75W CF63 100-120 V 50/60 Hz
TS75W3002
T-Station 75D CF63 100-120 V 50/60 Hz
TS75D3002
Declaration of Conformity
We,
Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
T-Station 75
TS75 - XX–00X
The material numbers cover a family of products where the
following features may vary:- turbomolecular pump inlet flanges,
electrical supply and backing pumps.
Backing pumps:
E2M1.5
XDD1
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
ENISO12100:2010
EN1012-2:1996+A1:2009
EN61010-1: 2010
EN61326-1:2013
(Class B Emissions,
Industrial Immunity)
EN50581:2012
Safety of machinery. General principles for design. Risk
assessment and risk reduction
Compressors and Vacuum Pumps. Safety Requirements. Vacuum
Pumps
Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements
Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2006/42/EC
2014/35/EU
2014/30/EU
2011/65/EU
Machinery Directive
Low Voltage Directive
Electromagnetic Compatibility (EMC) Directive
Restriction of Certain Hazardous Substances (RoHS) Directive
16.07.2015, Eastbourne
Larry Marini, Senior Technical Manager
Date and Place
This product has been manufactured under a quality management system certified to ISO 9001:2008
P200-05-980 – Issue D
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
D395-93-880 Issue A
gea/0147/03/11
Section
Page
1
Introduction ....................................................................................... 1
1.1
1.2
1.2.1
1.2.2
Scope and definitions ................................................................................................... 1
Description ................................................................................................................ 2
Overview .................................................................................................................. 2
General description of the T-Station major components .......................................................... 2
2
Technical data .................................................................................... 4
2.1
2.2
2.3
2.4
2.5
2.6
2.7
General .................................................................................................................... 4
Operating and storage data ............................................................................................ 4
Electrical connections ................................................................................................... 4
Electrical data ............................................................................................................ 7
Pumping media ........................................................................................................... 8
Materials exposed to gases pumped .................................................................................. 9
Vent gas specification and vent control data ....................................................................... 9
3
Installation ....................................................................................... 11
3.1
3.2
3.3
3.4
3.5
3.6
3.7
3.8
3.9
3.9.1
3.9.2
3.10
Safety ..................................................................................................................... 11
Unpack and inspect .....................................................................................................11
Locate the T-Station ...................................................................................................12
Bench-top fixing ........................................................................................................12
Fill the rotary pump with oil .......................................................................................... 12
Connect the T-Station to your vacuum system ..................................................................... 13
Connect to your exhaust extraction system ........................................................................ 13
Connect the electrical supply ......................................................................................... 14
Configure the T-Station ................................................................................................14
Turbo pump delay ......................................................................................................14
Connecting a vacuum gauge .......................................................................................... 15
Commissioning the installation ....................................................................................... 16
4
Operation ........................................................................................ 17
4.1
4.2
4.3
4.3.1
4.3.2
4.3.3
4.3.4
4.3.5
4.3.6
4.4
4.5
Control panel description .............................................................................................17
Start up ................................................................................................................... 17
Menu structure ..........................................................................................................18
Turbo screen ............................................................................................................. 19
Gauge screen ............................................................................................................ 20
Vent valve screen .......................................................................................................21
Turbo set-point screen .................................................................................................21
Calibrate gauge screen ................................................................................................23
Units screen ............................................................................................................. 24
Gas-ballast control (E2M1.5) .......................................................................................... 25
Electrical supply failure ...............................................................................................25
5
Maintenance ..................................................................................... 26
5.1
5.2
5.3
5.4
5.5
5.6
Safety .................................................................................................................... 26
Maintenance plan ......................................................................................................26
Inspect the hoses, pipelines and connections ...................................................................... 27
Fault-finding ............................................................................................................. 27
Error numbers ...........................................................................................................28
Factory default settings ...............................................................................................29
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page i
Contents
Contents
D395-93-880 Issue A
Contents
6
Storage and disposal ........................................................................... 30
6.1
6.2
Storage ................................................................................................................... 30
Disposal ................................................................................................................... 30
7
Spares and accessories ......................................................................... 31
7.1
7.2
7.3
7.3.1
7.3.2
Introduction ............................................................................................................. 31
Spares ..................................................................................................................... 31
Accessories ............................................................................................................... 31
TAV vent-valve and vent-port adaptor (for DX turbo pump) .....................................................31
Outlet mist filter (for E2M1.5 rotary vacuum pump) ..............................................................31
Index .............................................................................................. 33
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure
1
2
3
4
5
6
7
8
Page
Components of the T-Station .......................................................................................... 3
Equipment dimensions (mm) ........................................................................................... 5
Pin connections for a 15-way sub-miniature ‘D’ type socket ..................................................... 6
Pin connections for an 8-way RJ45 .................................................................................... 6
Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full
rotational speed) 10
Turbomolecular pump start delay with XDD1 diaphragm pump ................................................. 15
Front panel display .....................................................................................................17
Menu Structure ..........................................................................................................18
Tables
Table
1
2
3
4
5
6
7
8
9
Page
Turbo pump connector pin-out ........................................................................................ 6
Active gauge connector pin-out ....................................................................................... 7
Electrical data ............................................................................................................ 7
T-Station technical data ................................................................................................ 9
Vent gas specification and vent control .............................................................................. 9
Checklist of components ...............................................................................................11
Front panel symbols and their functions ............................................................................ 17
Menu items ............................................................................................................... 17
Fault finding ............................................................................................................. 27
Associated publications
Publication title
Diaphragm Pump - XDD1
Rotary Vane Pump - E2M0.7 / E2M1.5
Turbomolecular Pumps - EXT75DX / EXT255DX
Page ii
Publication number
A746-02-885
A371-32-880
B722-40-880
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Introduction
1.1
Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards T-Station. You must use
the T-Station as specified in this manual.
Read this manual before you install and operate the T-Station. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Details of the Supplementary Publications is provided at the end of the Contents list of this manual. These
Supplementary Publications can be accessed from the CD manual which is supplied with your T-Station.
The Supplementary Publications you receive also contain WARNING and CAUTION instructions. When you install and
operate the T-Station, you must refer to these Supplementary Publications and obey all of the WARNING and CAUTION
instructions which they contain.
The following IEC warning labels appear on the product and in the manual:
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
The units used throughout this manual conform to the SI international system of units of measurement.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 1
Introduction
1
D395-93-880 Issue A
Introduction
1.2
Description
1.2.1
Overview
The T-Station is a small compact fully automatic pumping system which is suitable for a wide range of vacuum
applications. The T-Station can be supplied with either an XDD1 oil free diaphragm pump or an E2M1.5 rotary vane
pump, both system variants use an EXT75DX turbomolecular pump.
The T-Station is controlled by an easy to use touch pad control module. A single gauge input included can be
connected to a range of Edwards active gauges allowing for pressure measurement and or control management of
the turbomolecular pump.
The compact size of the T-Station is ideal for use on bench-tops or suitable mobile platforms. The open system
configuration allows easy maintenance of the main pump components.
1.2.2
General description of the T-Station major components
For the general description of the major components used on the T-Station, click on (CD) the appropriate instruction
manual reference against each product type.
Diaphragm pump
XDD1
A746-02-885
Rotary vane pumps
E2M0.7 / E2M1.5
A371-32-880
Turbomolecular pumps
EXT75DX / EXT255DX
B722-40-880
Page 2
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Introduction
Figure 1 - Components of the T-Station
1. E2M1.5 gas-ballast control
2. Backing pump oil mist filter (optional
accessory not supplied)
3. Turbomolecular pump inlet
4. Backing pump
5. TAV vent valve (optional accessory not
supplied)
6. Turbomolecular pump connector
7. Vacuum gauge input
8. T-Station control unit
9. Mains input (fused refer to Section 2.3)
10. Backing pump mains connector
11. T-Station lifting handles
12. T-Station fixing points for bench top
mounting (refer to Section 3.4)
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 3
D395-93-880 Issue A
Technical data
2
Technical data
Note:
The operating, storage conditions and performance of the T-Station may depends on the type of backing
pump fitted to the T-Station; refer to the technical data in the appropriate supplementary publications.
2.1
General
Dimensions
Refer to Figure 2
Electrical data
Refer to Table 3 - Electrical data
Degree of protection (to IEC34-5: 1981)
IP20
Mass
XDD1 combination
E2M1.5 combination
2.2
17 kg max
21 kg max
Operating and storage data
Ambient operating temperature range
12 °C to 40 °C
Ambient storage temperature range
-30 °C to 70 °C
Maximum operating altitude
2000 m max
Equipment type
Indoor use only
Pollution degree
2
Maximum ambient operating humidity
Max 90% RH non cond at 40 °C
Sound level
56 dB(A)
Maximum outlet pressure
XDD1 pump
E2M1.5 pump
1.1 bar absolute (1.1 x 105 Pa)
1.5 bar absolute (1.5 x 105 Pa)
Maximum permitted external magnetic field
5 mT (DX turbo)
2.3
Electrical connections
Electrical supply (refer to Figure 1 item 9)
Inlet plug type
Integral fuse rating
IEC60320
10 A Type T, 20 mm
Backing pump (refer to Figure 1 item 10)
Outlet socket type
IEC60320
Turbomolecular pump (refer to Figure 1 item 6)
Connector type
Power supply
Maximum output power
15-way sub-miniature ‘D’ type socket
24 V d.c. nominal
80 W
Active gauge (refer to Figure 1 item 7)
Connector type
Power supply
Maximum power rating
RJ45 8-way
24 V d.c. nominal
4W
Page 4
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Technical data
Figure 2 - Equipment dimensions (mm)
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 5
D395-93-880 Issue A
Technical data
Figure 3 - Pin connections for a 15-way sub-miniature ‘D’ type socket
Table 1 - Turbo pump connector pin-out
Pin
Function
1
Power supply positive
2
Signal common
3
Start signal output
4
RS232 Tx
5
Serial enable output
6
Power supply positive
7
RS232 Rx
8
Power supply common
9
Speed signal input
10
Screen
11
Power supply positive
12
Screen
13
Power supply common
14
Power supply common
15
Normal signal input
Figure 4 - Pin connections for an 8-way RJ45
Page 6
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Technical data
Table 2 - Active gauge connector pin-out
Pin
2.4
Function
1
Power supply positive
2
Power supply common
3
Signal input
4
Identification
5
Signal common
6
Control line 1
7
Control line 2
8
N/C
Electrical data
If your T-Station uses an E2M1.5, the motor start-up current is drawn for less than one second, so you must use slowblow fuses to prevent unnecessary fuse failure when the pump starts. If you use the pump at temperatures lower
than 12 °C (53.6 °F), the start-up current will be drawn for longer; this may cause the motor thermal overload device
to open.
Table 3 - Electrical data
Pump combination
XDD1 / EXT75DX
E2M1.5 / EXT75DX
Current (A)
Supply Voltage
50/60 Hz
Full load
Start
100
3.1
-
120
2.6
-
200
1.6
-
230
1.35
-
100
4.7
13.6
120
3.92
12.0
200
2.2
6.4
230
1.9
5.7
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Power (W)
310
470
430
Page 7
D395-93-880 Issue A
Technical data
2.5
Pumping media
WARNING
Vent dangerous gases and gas mixtures safely, do not expose people to these gases. If pumping
hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/
vapour.
WARNING
Do not use the turbo pump to pump pyrophoric or explosive gas mixtures, as it is not suitable for
this purpose. The pump and its connections are not designed to contain an explosion.
WARNING
Do not expose any part of the human body to vacuum.
CAUTION
Do not use the turbo pump to pump gases containing more than 20% oxygen unless the pump is gas purged. If
you do, the lubricant will polymerise and the pump may fail prematurely.
CAUTION
Do not use a turbo pump to pump mercury vapour and do not allow mercury (for example, from a McLeod gauge)
to come into contact with the pump. If you do, the pump rotor may corrode and fail.
Note:
Concentrations of gases may be modified by the compression of the pump.
The turbo turbo pump is designed to pump the following residual gases normally used in high-vacuum systems:

Air

Carbon dioxide

Methane

Neon

Propane

Krypton

Butane

Helium

Carbon monoxide

Ethane

Nitrogen

Argon

Hydrogen
You can use the pump to pump oxygen and water vapour, subject to the following conditions:

Oxygen - when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by
volume. Refer to the EXT75DX instruction manual (B722-40-880) for Purge gas specification. However, if the
pump is not purged, the oxygen concentration must be less than 20% by volume.

Water vapour - you must ensure that vapour does not condense inside the pump.
Page 8
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Table 4 - T-Station technical data
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
N2
61 l s-1
61 l s-1
42 l s-1
He
57 l s-1
57 l s-1
49 l s-1
H2
53 l s-1
53 l s-1
48 l s-1
> 1 x 1011
> 1 x 1011
> 1 x 1011
Parameter
Inlet pumping speed:
Inlet compression ratio:
N2
106
He
1x
H2
5 x 104
106
1 x 106
5 x 104
5 x 104
1x
Ultimate pressure:
with rotary vane backing pump *
< 5 x 10-9 mbar < 5 x 10-10 mbar < 5 x 10-9 mbar
with diaphragm backing pump †
< 5 x 10-8 mbar
*
†
2.6
< 5 x 10-9 mbar
< 5 x 10-8 mbar
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump.
Ultimate pressure 48 hours after bakeout with backing pressure < 5 mbar (500 Pa).
Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth
magnets, silicon nitride, phenolic resin, carbon-fibre reinforced epoxy resin, fire retardant polypropylene,
polyamide and PVC.
2.7
Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent with dry, clean gases. Refer to the DX
turbo pump manual (B722-40-880) for the vent valve connection and refer to Section 4.3.3 of this manual for a
description of the vent options available on the T-Station and how to configure them.
Table 5 - Vent gas specification and vent control
Vent gas specification and control
Reference data
Vent gas
Dry air, nitrogen, argon and other inert gases
Maximum dew point at atmospheric pressure
-22 °C
Maximum size of particulates
1 μm
Maximum concentration of oil
0.1 parts per million
Recommended time for rotational speed to reach 50%
> 15 seconds
Maximum allowed rate of pressure rise
Refer to Figure 5
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 9
Technical data
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.
D395-93-880 Issue A
Technical data
Figure 5 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at
full rotational speed)
Page 10
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Installation
3.1
Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.

When you refer to a manual supplied as a Supplementary Publication, you must obey all of the WARNING and
CAUTION instructions in the manual.

A suitably trained and supervised technician must install the T-Station.

Check that all the required parts are available and of the correct type before you start work.

Ensure that the installation technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.

Isolate the other components in your system from the electrical supply so that they cannot be operated
accidentally.

Do not reuse O-rings and Co-Seals if they are damaged.

Dispose of components, grease and oil safely (refer to Section 6).

Take care to protect sealing-faces from damage.

We recommend you leak-test the system after installation is complete.
3.2
Unpack and inspect
Remove the outer cover and all packing materials, remove the protective covers from the inlet and outlet ports,
inspect the system for any damage. If the T-Station is damaged, notify your supplier and the carrier in writing within
three days; state your order number and invoice number. Retain all packing materials for inspection. Do not use the
T-Station if it is damaged. Check that your package contains the items listed in Table 6. If any item is missing, notify
your supplier within three days.
If the T-Station is not to be used immediately, replace the protective covers. Store the T-Station in suitable
conditions as described in Section 6.1.
Table 6 - Checklist of components
Qty
Description
Check ()
1
T-Station

1
T-Station CD instruction manual P450-00-000

1
Ultragrade 15 oil 1 ltr (supplied only with E2M1.5)

1
Inlet seal (either trapped O-ring, Co-seal or copper compression gasket suitable for
the inlet-flange type)

1
Connector (24 V) - for driving accessories from Podule socket

1
Inlet-strainer

© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 11
Installation
3
D395-93-880 Issue A
Installation
3.3
Locate the T-Station
WARNING
Heavy objects can cause muscle strain or back injury. The mass of the T-Station will differ
depending on the model supplied, refer to Section 2.1 for the equipment mass.
WARNING
Important: The turbo pump used on the T-Station stores a large amount of kinetic energy when it
is running at full speed. In the unlikely event of a malfunction (rotor seizure), the stored energy
could cause a slight movement of the T-Station platform. If the T-Station is operating on a benchtop, we advise that the following steps should be taken:
Position the T-Station at least 10-15 cm away from the edge of the bench-top and adjacent
devices.
and or,
Tether or fix the T-Station to your bench-top, see Section 3.4.
CAUTION
When locating the T-Station, care should be taken not to restrict the ventilation grid located under the base of
the T-Station. Failing to observe this may result in over heating of the turbomolecular pump.
3.4
Bench-top fixing
There are two M8 fixing points located at the rear of the T-Station base (refer to Figure 1, item 12). Using suitable
brackets or straps (not supplied), we recommend that you should secure the T-Station to your bench-top to prevent
excessive movement in the unlikely event of a pump failure. Please note, we cannot provide straps or brackets as
we unable to determine the best type fixing for your bench-top location. We recommend you should source or
fabricate these fixings locally.
3.5
Fill the rotary pump with oil
If the T-Station uses an E2M1.5 rotary vane pump, you must fill it with the correct quantity of oil (supplied with the
equipment) before you operate the equipment. For further information refer to the EM Rotary Vane Pump manual
A371-32-880.
Fill the pump with oil as described below.
1. Remove the oil filler-plug.
2. Pour oil into the pump until the oil-level just reaches the MAX mark on the bezel at the top of the sight-glass. If
the oil-level goes above the MAX mark, remove the drain-plug and drain the excess oil from the pump.
3. After a few minutes, recheck the oil-level. If the oil-level is now below the MAX mark, pour more oil into the
pump.
4. Refit the oil filler-plug. Tighten the plug firmly by hand. Do not over tighten.
Page 12
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Connect the T-Station to your vacuum system
WARNING
Connect the turbo pump inlet to your vacuum system before applying power to the T-Station. This
will ensure that the pump cannot operate accidentally causing injury.
WARNING
If you install your vacuum system directly onto the T-Station, the weight of the system must be no
more than 10 kg and the centre of gravity must be positioned laterally within the bounds of the
base plate. If this is not the case, the vacuum system must be supported to ensure that the
T-Station does not topple.
The turbo pump can be securely fixed to the vacuum system via the inlet-flange. Make sure that the pump-inlet and
all components fitted to the pump-inlet are clean and dust-free. If the pump-inlet is not kept clean, the pump-down
time may be increased.

If the pump has a CF flange, use the copper compression gasket supplied with the pump and use a full
complement of bolts to connect the inlet-flange of the pump to the vacuum system.

If the pump has an ISO flange, use a minimum of four claw clamps (each torque to 10 Nm) to connect the
inlet-flange of the pump to the vacuum system. Alternatively, use a rotatable collar and the combined inlet
screen and trapped O-ring supplied with the pump to connect the inlet-flange of the pump to the vacuum
system; use a full complement of bolts with the rotatable collar.

If the pump has an NW flange, use the centring ring supplied with the pump and a metal NW clamp to
connect the inlet-flange of the pump to the vacuum system.
All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure that no torques or other forces
are transmitted to the pump from the vacuum system or the associated pipelines.
3.7
Note:
Connect to your exhaust extraction system
This section applies to E2M1.5 versions only.
WARNING
Vent dangerous gases and gas mixtures safely, do not expose people to these gases. If pumping
hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/
vapour.
The exhaust system must be configured so that the maximum pressure at the pump outlet does not exceed 0.5 bar
gauge (1.5 bar absolute, 1.5 x 105 Pa) at full pump throughput. Make sure that the exhaust pipeline cannot become
blocked. If you have an exhaust- isolation valve, make sure that you cannot operate the pump with the valve closed.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 13
Installation
3.6
D395-93-880 Issue A
Installation
3.8
Connect the electrical supply
WARNING
Ensure that the electrical installation of the T-Station conforms with your local and national safety
requirements. It must be connected to a suitably fused and protected electrical supply and a
suitable earth point.
CAUTION
Always make the electrical connections to the T-Station after the equipment has been installed on your vacuum
system. Always disconnect the electrical supply from the T-Station before removing the equipment from the
vacuum system.
Check that your electrical supply is suitable for this equipment. Refer to Table 3 for the electrical requirements for
this equipment. Make the electrical connection to the T-Station using a cable fitted with an IEC60320 connector. A
range of suitable cables is available from your supplier.
3.9
Configure the T-Station
As supplied from the factory, the T-Station will control the system as follows:
System start is selected:

The TAV vent valve will close*.

The backing pump will turn on.

The turbomolecular pump will start accelerating up to full rotational speed.
System off is selected:

The backing pump will turn off.

The turbomolecular pump drive will turn off and the pump will start to decelerate.

The TAV vent valve will open fully from 50% of full rotational speed*.
* This operation refers to systems which have been fitted with an Edwards TAV vent valve (optional accessory). For
more vent options refer to Section 4.3.3.
3.9.1
Turbo pump delay
The T-Station can be configured to delay the turbo pump after the backing pump has started (refer to Section 4.3.4),
this is helpful to prevent the turbomolecular pump from accelerating under high pressure for a prolonged period if
the volume being pumped is greater than 2 litres. This option is especially useful if your T-Station uses an XDD1
diaphragm pump. Below the chart shows the recommended delay period for a turbo / XDD1 pump combination.
Page 14
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Installation
Figure 6 - Turbomolecular pump start delay with XDD1 diaphragm pump
3.9.2
Connecting a vacuum gauge
CAUTION
Do not connect Barocel capacitance manometers to the T-Station gauge connector. Doing so will result in
damage to the gauge and will invalidate the warranty.
A single compatible active gauge can be fitted to the T-Station. Fit the gauge using an Edwards active gauge cable
into the gauge connector located on the side of the controller housing (refer to Figure 1). For active gauge control
and set-up refer to Section 4.3.2.
The following Edwards active gauges are suitable for use with the T-Station:

APG100 Active Pirani vacuum gauge

APGX-H Active Linear Convection gauge

AIM-X Active Inverted Magnetron gauge

WRG-S Active Wide Range gauge

ASG Active Strain gauge
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 15
D395-93-880 Issue A
Installation
3.10
Commissioning the installation
After you have installed the T-Station, use the following procedure to test the system.
1. Make sure that all the electrical connections are secure.
2. Switch on the electrical supply and your exhaust-extraction system (if available).
3. To operate the system press the START/STOP key. Check that the equipment operates as described in
Section 3.9.
4. Check that the turbo pump reaches normal speed. If the pump inlet is valved or capped off, it should take
approximately 100 - 150 seconds for the turbo to reach normal speed. If you have attached a vacuum chamber to
the pump inlet, this time may take longer.
5. To turn OFF the system, press the START/STOP key followed by the ENTER key to confirm. Check that the
equipment closes down as described in Section 3.9.
For full operational details and how to navigate using the front panel control key pad refer to Section 4.3.
Page 16
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Operation
WARNING
Do not attempt to move the T-Station while the Turbo pump is rotating. Doing so may cause severe
damage to the pump and could cause injury.
CAUTION
To familiarise yourself with the vacuum pumps installed on your T-Station, it is advisable to read the relevant
instruction manuals (refer to Section 1.2.2).
4.1
Control panel description
Figure 7 - Front panel display
Table 7 - Front panel symbols and their functions
Key pad symbol
Name
Function
START / STOP
Turns the pumps on and off.
Returns to Turbo Menu Screen.
ENTER
Selects or confirms current menu option.
Controls active gauges.
NEXT
Moves to next menu.
Scrolls through menu options.
The LEDs along the top of the T-Station display indicate which menu screen is currently being shown on the numeric
display. To move to the next menu item press the NEXT key, and to return to the Turbo menu press the START/STOP
key. The available items are listed in order in Table 8.
Table 8 - Menu items
Turbo screen
Gauge screen
Vent valve screen
Turbo set-point (TSP) screen
Calibrate gauge screen
Units screen
4.2
Start up
When you apply power to the T-Station all LEDs in the display will light for 2 seconds to confirm operation. The
software version will then be displayed for a further 2 seconds. If you need to contact Edwards for support regarding
the T-Station, please have this software version number available.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17
Operation
4
D395-93-880 Issue A
Operation
4.3
Menu structure
Figure 8 shows the view screen shortcuts and menu structure for the T-Station control display. They also give an
indication as to what buttons will take you within the menu layout.
Figure 8 - Menu Structure
Or
Turbo
Started
Turbo
Page 18
Stop Turbo
Gauge
Gauge
On/Off
Vent
Change Vent
Option
TSP
Change TSP
option
CAL
Calibrate
Gauge
Units
Change
Units
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Turbo screen
When the Turbo screen is selected, the Turbo LED is lit and the speed of the turbomolecular pump is displayed in
percentage of full speed. If no turbo pump is connected the display shows "---".
Or
Turbo
Started
Turbo
4.3.1.1
Stop Turbo
Starting the pumps
When the START/STOP key is pressed, both the turbo and backing pumps start. The display shows the turbo pump is
accelerating by flashing the top left portion of the percentage sign. When the turbo reaches normal speed (>80%
default) the percentage sign stops flashing and remains steady.
If a Turbo Set-point has been set, only the backing pump starts when the START/STOP key is pressed. The TSP LED
flashes until the set-point has been reached. Once the set-point has been reached the turbo pump starts and the
TSP LED turns OFF. If no Turbo Set-point has been set, the TSP LED remains OFF.
4.3.1.2
Stopping the pumps
To stop the pumps press the START/STOP key; the display will show "Stop" for three seconds. Press the ENTER key
within that time to stop the pumps. If the ENTER key has not been pressed, or the START/STOP or NEXT keys are
pressed, the display returns to Turbo speed and the pumps remain running.
When the Turbo is decelerating the bottom right portion of the percentage sign flashes until the turbo pump has
completely stopped.
4.3.1.3
Turbo screen key actions
Keys
Short Press
Long Press
START
START the Turbo, or
Initialise Turbo STOP sequence, or
Cancel Turbo STOP, or
force Turbo STOP when in Error
-
ENTER
Acknowledge Turbo STOP
Fault code display when in Error
NEXT
Go to Gauge Screen, or
Cancel Turbo STOP
Scroll through menu screens
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19
Operation
4.3.1
D395-93-880 Issue A
Operation
4.3.2
Gauge screen
When the Gauge screen is selected, the Gauge LED is lit and the gauge pressure reading is displayed in the selected
units. If no gauge is connected the display shows "---".
Turbo
4.3.2.1
Gauge
Gauge
On/Off
Connecting a gauge
When a gauge is first connected the display shows "ID" followed by a number to identify the new gauge. If the gauge
is an ASG, the display then goes to ASG Range Select, otherwise the display reverts to showing the pressure reading.
If the gauge type is not supported the display shows "???". When no gauge is connected the display shows "---".
4.3.2.2
ASG range select
When an ASG is connected the display changes to select the ASG range. 1000 mbar is assumed by default, and the
display flashes "1.0 3". Press the NEXT key to select between 1000 and 2000 mbar, then press the ENTER key to
confirmed the selection.
4.3.2.3
Gauge ON/OFF control
Gauges which support ON/OFF control (e.g. AIM gauges) can be turned ON and OFF using the ENTER key. When first
connected the gauge is in the OFF state and the display shows "OFF". When the gauge is turned on the display will
show "Str" whilst the gauge is starting up, and will then display pressure.
4.3.2.4
Gauge screen key actions
Keys
Short Press
Long Press
START
Go to Turbo Screen
-
ENTER
ON/OFF control of supported gauge or
Acknowledge Error
-
NEXT
Go to Vent Control Screen
Scroll through menu screens
Page 20
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Vent valve screen
If you have a TAV solenoid vent valve connected to the turbo pump podule the operation of the valve is controlled
by the vent valve screen. When the Vent Valve screen is selected, the Vent LED is lit and the current vent valve
control setting is displayed. The default is "50%". The Vent Valve menu is not available if the Turbo is running.
To change the vent valve setting press the ENTER key, then use the NEXT key to choose between 50%, Ctrld and FAN.
Press the ENTER key again to confirm the selection.
50%
The vent valve will open when the speed of the turbo pump has dropped to 50%
Ctrld
Controlled venting from 100% to 50% full rotational speed; vent valve opens fully below 50%
Fan
The socket on the turbo pump podule is permanently powered so the vent valve will remain closed.
This can also be used to provide power to an air cooler (e.g. ACX75) for remote mounting the turbo
pump.
Turbo
4.3.3.1
Vent
Change
Vent option
Vent valve screen key actions
Keys
Short Press
Long Press
START
Go to Turbo Screen
-
ENTER
Enter edit mode, or confirm selection
-
NEXT
Next vent option, or
go to TSP Control Screen
Scroll through vent options in edit mode
or Scroll through menu screens
4.3.4
Turbo set-point screen
The Turbo Set-Point screen is used to configure the start delay of the turbo pump. When the Turbo Set-point screen
is selected, the TSP LED is lit and the current set-point is displayed. The default is "OFF". The Turbo Set-point menu
is not available if the Turbo is running or the selected units are Volts.
To change the turbo set-point press the ENTER key, then use the NEXT key to choose between off, time delay and
pressure set-point. Press the ENTER key again to confirm the selection.
When time delay is selected the display will show the delay time in seconds. The default time is 120 s. This means
that the turbo pump will start after a delay of 120 s from when the START key is pressed. To change the value of
the delay time press and hold the ENTER key to start number entry mode.
If you have an Active Gauge connected to your system you can use the pressure set-point to start the turbo pump
once the pressure has fallen below the set-point value. When pressure is selected the display shows the set-point
pressure. The default Pressure is "5.0 0" mbar shown as an exponential. To change the pressure set-point, press and
hold the ENTER key to start number entry mode.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21
Operation
4.3.3
D395-93-880 Issue A
Operation
Note:
If you set the Turbo Set-Point to pressure but do not connect a gauge then the turbo pump will not start.
Turbo
TSP
Change TSP
option
Number
Entry Mode
4.3.4.1
Number entry mode
When the ENTER key is pressed and held on either the time or pressure option number entry mode is entered. The
first digit starts flashing, and the time or pressure can be edited.
Press the NEXT key to adjusts the value, then press the ENTER key to confirm the digit and then move on to the second
digit, which is adjusted similarly. The ENTER key confirms the digit and then moves to the final digit of the Time setpoint, or the exponent of the pressure set-point. The exponent of the pressure set-point is adjusted as a single value
in the range -10 to +6.
The final press of ENTER confirms the complete number and returns to showing the set-point value. The TSP is set
after the complete number is entered.
Page 22
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Operation
TSP
Edit digit 1
Edit digit 2
Edit digit 3
or Exp
Number Entry Mode
4.3.4.2
TSP screen key actions
Keys
Short Press
Long Press
START
Go to Turbo Screen
-
ENTER
Enter edit mode, or confirm selection
Enter Number Entry mode
NEXT
Next TSP option,
Next number or
Go to Gauge Calibration Screen
Scroll through TSP options in edit mode,
Scroll through numbers in Number entry
or Scroll through menu screens
4.3.5
Calibrate gauge screen
When the Calibrate Gauge screen is selected, the Gauge LED and the CAL LED are lit together. The numeric display
is blank. The Calibrate Gauge menu is not available for gauges which do not support calibration.
When the ENTER key is pressed the action depends on gauge type:
WRG or APGX: The calibration command is sent to the gauge and the display shows "CALd" for 3 seconds.
ASG: The calibration functions as a zero offset adjustment. The pressure currently displayed is saved as the zero
offset and is subtracted from all future readings. The display shows "CALd" for 3s to confirm the action. You can
cancel the offset adjustment by pressing the ENTER key again. The display shows "OFF" for 3s to confirm that the
offset adjustment has been removed.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23
D395-93-880 Issue A
Operation
Turbo
4.3.5.1
CAL
Calibrate
Gauge
Calibrate screen key actions
Keys
Short Press
Long Press
START
Go to Turbo Screen
-
ENTER
Calibrate gauge
-
NEXT
Go to Units screen
Scroll through menu screens
4.3.6
Units screen
When the Units screen is selected, the menu LEDs are unlit and the currently selected Units LED is lit. The numeric
display is blank.
To change the units press the ENTER key and use the NEXT key to choose between mbar, Torr, Pa and voltage. Press
the ENTER key again to confirm the selection. Note that when voltage is selected the display shows " 0.000".
When the units are changed, the set-point values will be converted to the new units. For example, if a set-point
threshold is entered as 1.0 x10-3 mbar and the units are changed to Torr, then the value will be displayed as
7.5 x 10-4 Torr.
Turbo
4.3.6.1
Units
Change
Units
Units screen key actions
Keys
Short Press
Long Press
START
Go to Turbo Screen
-
ENTER
Enter edit mode, or confirm selection
-
NEXT
Next Units option, or
go to Turbo screen
Scroll through Units in edit mode,
or Scroll through menu screens
Page 24
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Gas-ballast control (E2M1.5)
Use the gas-ballast control (Figure 1, item 1) to change the amount of air (or inert gas) introduced into the low
vacuum stage of the pump. Use of the gas-ballast will prevent the condensation of vapours in the pump; the
condensates would contaminate the oil.
Use the gas-ballast control closed:

to achieve ultimate vacuum

to pump dry gases.
Turn the gas-ballast control six turns anti-clockwise to open it fully. Use the gas-ballast control open:

to pump high concentrations of condensable vapour

to decontaminate the oil.
When you operate the pump with the gas-ballast control open, there will be an increased rate of oil loss from the
pump.
4.5
Electrical supply failure
WARNING
If the power supply fails when the pump is running, the impeller could continue to spin for
approximately 10 minutes. The control circuit may not give any indication that the impeller is still
running.
If the electrical supply to the T-Station fails when the Turbo pump is rotating, the motor of the pump is used as a
generator. The regenerated power is used to maintain the control system and the display.
As the pump rotational speed decreases, the motor's ability to generate power also decreases until it is no longer
able to maintain power to the control system. This will occur at speeds below 50% full rotational speed. Therefore
you will not have any indication about pump rotational speed, yet the impeller may still be turning.
When the power is reinstated after a power failure, the behaviour of the T-Station will depend on the length of time
the pump was without power: if the power is reinstated before regenerative power has ceased the system will restart; if the power is reinstated after regenerative power has ceased the system will not re-start.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25
Operation
4.4
D395-93-880 Issue A
Maintenance
5
Maintenance
5.1
Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.

When you refer to a manual supplied as a Supplementary Publication, you must obey all of the WARNING and
CAUTION instructions in the manual.

A suitably trained and supervised technician must maintain the T-Station.

Allow the pumps to cool to a safe temperature before you start maintenance work.

Check that all the required parts are available and of the correct type before you start work.

Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated components in a fume-cupboard.

Isolate the T-Station and other components in the system from the electrical supply so that they cannot be
operated accidentally.

Do not reuse O-rings and Co-Seals if they are damaged.

Dispose of components, grease and oil safely (refer to Section 6).

Protect sealing-faces from damage.

Leak-test the system after maintenance and seal any leaks found if you have disconnected any vacuum or
exhaust pipeline connections.
5.2
Maintenance plan
WARNING
If for any reason the turbo pump is removed from the T-Station platform, it is important to retain
and re-use the same fixing screws. If you have lost or cannot re-use any of these screws, you must
use the following type M5 X 12 mm CAP HD high tensile class 12.9. If you fail to follow this warning
and the turbo pump seizes, the stored energy in the turbo pump may cause some or all of the
screws to fail, this may result in the turbo pump being ejected from the T-Station base.
The following documents list the minimum maintenance operations necessary to maintain the T-Station in normal
use.
Diaphragm pump
XDD1
A746-02-885
Rotary vane pumps
E2M0.7 / E2M1.5
A371-32-880
Turbomolecular pumps
EXT75DX / EXT255DX
B722-40-880
More frequent maintenance may be necessary if the T-Station has been used to pump corrosive or abrasive gases and
vapour. If necessary, adjust the maintenance plan according to your experience.
Page 26
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Inspect the hoses, pipelines and connections
1. Inspect all of the electrical connections and check that they are secure. Tighten any loose connections.
2. Inspect all of the electrical cables and check that they are not damaged and have not overheated. Replace or
repair any damaged or overheated cable.
3. Inspect all of the vacuum and exhaust connections and check that they are secure. Tighten any loose
connections.
4. Inspect all of the vacuum and exhaust pipelines and check that they are not corroded or damaged and that they
do not leak. Replace or repair any corroded or damaged component and seal any leaks found.
5.4
Fault-finding
For additional information about fault-finding of the pumps used on your T-Station, refer to Section 1.2.2
Table 9 - Fault finding
Symptom
Check
Action
The T-station has
failed to start
Has the electrical supply fuse blown?
If so, replace the fuse. Refer to Section 2.3
for the correct fuse rating.
Is the operating voltage correct?
Ultimate pressure
cannot be reached
Is the pressure limited by water vapour?
Check your voltage supply matches the
T-Station voltage requirements. Refer to the
electrical rating label located at the rear of
the T-Station.
Bake the chamber or run the system for a
duration until the vacuum improves.
Are any of the vacuum gauges contaminated? If so, clean or replace them.
Is the pumping speed insufficient (due to
Increase the conductance or reduce the
poor conductance between the pump and the volume.
gauge or too large a chamber)?
Is the backing pressure too high?
>10 mbar (1x103 Pa) To check, use a vacuum
gauge directly on the turbo pump inlet (no
volume) and run the backing pump only.
If so, check the backing pipeline for leaks.
The backing pump may need servicing.
Is the high vacuum area of the
system contaminated?
If so, clean the high vacuum system.
Check the rest of your system for leaks and
contamination.
If found, repair the leaks and clean the
contamination.
Remove the pump from the system and test
the ultimate pressure of the pump alone.
If inlet pressure is poor, check the pump for
contamination and refer to Section 5 of the
turbo pump manual. Leak-test the pump. If
the leak rate >1x10-7 mbar l s-1
(1x10-5 Pa l s-1) contact your supplier or
Edwards.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 27
Maintenance
5.3
D395-93-880 Issue A
Maintenance
Table 9 - Fault finding (continued)
Symptom
Check
The backing pump
is noisy
Refer to the fault finding section of the
Backing pump manual. See Section 1.2.2.
Action
The backing pump
is leaking oil
The turbo pump is
very noisy or there
is excessive
vibration or both
5.5
Refer to the fault finding section of the Turbo
manual. See Section 1.2.2.
Error numbers
If an error is detected by the controller the display will show "Err" followed by a number. Refer to the table below
for a description of the error together with likely causes and suggested remedies.
Table 10 - Error numbers
Error
Number
Meaning
Possible cause/remedy
Controller errors
1
EEPROM error
The internal EEPROM checksum has failed. All user settings will
revert to the factory default.
2
ID reference error
The reference used for identifying gauges is incorrect. Please
remove all gauge connection, turn the electrical supply off and on,
and wait for 30 seconds before connecting gauges.
Gauge errors
11
Gauge voltage too high
The voltage from a gauge is too high. The gauge may be defective.
12
Gauge voltage too low
The voltage from a gauge is too low. The gauge may be defective.
21
WRG Pirani failure
22
WRG magnetron short
23
WRG striker fail
Errors specific to WRG. Please refer to the WRG manual for details.
Press the ENTER key to clear the error from, the display once the
fault has been corrected.
24
WRG magnetron not struck
25
APGX filament failure
26
APGX cal err
27
APGXH tube not fitted
Errors specific to APGX. Please refer to the APGX manual for details.
Press the ENTER key to clear the error from, the display once the
fault has been corrected.
Pump errors
41
Page 28
Turbo pump fault
Inspect the LEDs on the turbo pump podule for status information.
For more detailed fault codes, press and hold the ENTER key (whilst
Err41 is showing) to display the turbo pump system status word.
The lower 16 bits of the status word are displayed in hexadecimal.
Press the START / STOP key to clear the error message.
Refer to the instruction manual of the turbo pump for detailed faultfinding.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Factory default settings
If you need to return the T-Station to the factory default settings follow these steps:
1. Remove the mains power from the T-Station
2. Press the NEXT key and hold it down whilst you re-apply mains power. Continue holding down the NEXT key until
"Err01" is displayed.
3. Remove and re-apply mains power. The factory defaults will now be set.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29
Maintenance
5.6
D395-93-880 Issue A
Storage and disposal
6
Note:
6.1
Storage and disposal
We recommend that you avoid long-term storage of the T-Station. If you will store the system for several
months, refer to the Supplementary Publications in Section 1.2.2 for storage condition of the pump
combination you have installed on your T-Station.
Storage
Use the following procedure to store the T-Station:
1. Shut down the T-Station as described in Section 4.3.1.2.
2. Isolate the T-Station from the electrical supply and disconnect it from the vacuum system.
3. Drain the oil from the backing pump (only applicable to the E2M1.5 rotary vane pump) as described in the
instruction manual, (refer to Section 1.2.2).
4. Place protective covers over the inlet and outlet-flanges.
5. For the fastest pump-down after the T-Station is re-installed, seal the turbomolecular pump inside a plastic bag
together with a suitable desiccant.
6. Store the T-Station in cool, dry conditions until required for use.
6.2
Disposal
Dispose of the T-Station and any components safely in accordance with all local and national safety and
environmental requirements.
Particular care must be taken with components which have been contaminated with dangerous process substances.
For instruction on draining the oil from the E2M1.5 rotary vane pump refer to the instruction manual for the pump.
Rotary vane pumps
Page 30
E2M0.7 / E2M1.5
A371-32-880
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Spares and accessories
7.1
Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A. and a worldwide network of
distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards
training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each
part required:

Model and Item Number of your equipment

Serial number (if any)

Item Number and description of the part.
Fit accessories as described in the Supplementary Publications and in the instruction manual supplied with the
accessory.
7.2
Spares
The spares available for the turbo pump and backing pumps are listed in the CD instruction manuals supplied with
your equipment.
Pump spares:
Turbomolecular pumps
EXT75DX / EXT255DX
B722-40-880
Diaphragm pump
XDD1
A746-02-885
Rotary vane pumps
E2M0.7 / E2M1.5
A371-32-880
7.3
Accessories
7.3.1
TAV vent-valve and vent-port adaptor (for DX turbo pump)
A solenoid-operated vent-valves is available for system venting. The valve is a 24 V d.c., normally-open and can be
driven by the turbo pump podule. The solenoid-valve is fitted in place of the manual-valve, or alternatively can be
fitted with an adaptor (supplied with the valve) and can be used with any suitable NW10 flanged port on your vacuum
system.
Product
Item Number
TAV5 vent-valve
7.3.2
B580-66-010
Outlet mist filter (for E2M1.5 rotary vacuum pump)
The outlet mist filter separates and traps oil droplets in the pump outlet to prevent oil mist discharge.
Product
EMF3 Outlet mist filter
Item Number
A462-20-000
For all other Accessories such as Gauges, Active cables and Mains leads, refer to the T-Station ordering information
in the Edwards product catalogue.
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 31
Spares and accessories
7
D395-93-880 Issue A
This page has been intentionally left blank.
Page 32
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D395-93-880 Issue A
Index
Index
A
L
Active gauge connector pin-out .........................7
ASG range select ......................................... 20
Locate the T-Station .................................... 12
B
Bench-top fixing ......................................... 12
C
Calibrate gauge screen ................................. 23
Calibrate screen key actions ........................... 24
Cautions .....................................................1
Checklist of components ............................... 11
Commissioning the installation ........................ 16
Components of the T-Station ............................3
Configure the T-Station ................................ 14
Connect the electrical supply ......................... 14
Connect the T-Station to your vacuum system ..... 13
Connect to your exhaust extraction system ......... 13
Connecting a gauge ..................................... 20
Connecting a vacuum gauge ........................... 15
Control panel description .............................. 17
D
Description .................................................2
E
Electrical connections ....................................4
Electrical data .............................................7
Electrical supply failure ................................ 25
Error numbers ............................................ 28
F
Factory default settings ................................ 29
Fault finding .............................................. 27
Fault-finding ............................................. 27
Fill the rotary pump with oil .......................... 12
Front panel display ...................................... 17
Front panel symbols and their functions ............. 17
G
Gas-ballast control (E2M1.5) ........................... 25
Gauge ON/OFF control ................................. 20
Gauge screen ............................................. 20
Gauge screen key actions .............................. 20
General .....................................................4
I
Inspect the hoses, pipelines and connections ....... 27
Installation ............................................... 11
Introduction ................................................1
M
Maintenance ............................................. 26
Maintenance plan ....................................... 26
Materials exposed to gases pumped ....................9
Menu items ............................................... 17
Menu structure .......................................... 18
N
Normal/abnormal operation ............................. 4
Number entry mode .................................... 22
O
Operating and storage data ............................. 4
Operation ................................................. 17
P
Pin connections for an 8-way RJ45 .....................6
Pumping media ............................................ 8
S
Safety ................................................ 11, 26
Scope and definitions ..................................... 1
Spares and accessories ................................. 31
Start up ................................................... 17
Starting the pumps ...................................... 19
Stopping the pumps ..................................... 19
Storage and disposal .................................... 30
T
TAV vent-valve and vent-port adaptor (for DX turbo
pump) ..................................................... 31
Technical data ............................................. 4
TSP screen key actions ................................. 23
T-Station technical data ................................. 9
Turbo pump connector pin-out .........................6
Turbo pump delay ....................................... 14
Turbo screen ............................................. 19
Turbo screen key actions .............................. 19
Turbo set point-screen ................................. 21
U
Units screen .............................................. 24
Units screen key actions ............................... 24
Unpack and inspect ..................................... 11
V
Vent gas specification and vent control ...............9
Vent gas specification and vent control data ......... 9
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 33
D395-93-880 Issue A
Index
Vent valve screen ....................................... 21
Vent valve screen key actions ......................... 21
W
Warnings ....................................................1
Page 34
© Edwards Limited 2011. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
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