2600A Series Data Sheet
Scalable, integrated source and measure solutions
• Combines a power supply, true
current source, 6.5-digit DMM,
arbitrary waveform generator,
V or I pulse generator with
measurement, electronic load,
and trigger controller – all in
one instrument
• Family of products offers wide
dynamic range: 1fA to 50A and
1μV to 200V
• 20,000 rdg/s provides faster
test times and ability to capture
transient device behavior
• Precision timing and channel
synchronization (<500ns)
• USB port for saving data and
test scripts
• LXI Class C compliance supports
high speed data transfer and
enables quick and easy remote
testing, monitoring, and
troubleshooting
• Software:
–– TSP® Express for quick and
easy I-V test (embedded)
–– ACS Basic Edition for
semiconductor component
characterization (optional)
CONNECT DUT
System SourceMeter Instruments
®
Series 2600A System SourceMeter instruments are Keithley’s latest I-V source measurement unit
(SMU) instruments for use as either bench-top I-V characterization tools or as building block components of multi-channel I-V test systems. For bench-top use, Series 2600A instruments feature an
embedded TSP Express Software Tool that allows users to quickly and easily perform common I-V
tests without programming or installing software. For system level applications, the Series 2600A’s
Test Script Processor (TSP) architecture, along with other new capabilities such as parallel test execution and precision timing, provides the highest throughput in the industry, lowering the cost of test.
To simplify the testing, verification, and analysis of semiconductor components, the optional ACS
Basic Edition software is also available.
CONFIGURE Test
COLLECT Data
HI
SMU A
Step VG
Measure IG
SMU B
Sweep VD
Measure ID
LO
SMU INSTRUMENTS
LO
Performing nested sweeps to characterize a transistor with TSP Express is quick and easy. Data can be exported to a .csv file for use with
spreadsheet applications such as Excel.
Quick and Easy Lab and
Bench-Top Use
Each Series 2600A SourceMeter instrument
is a complete I-V measurement solution with
unmatched ease of use, capability, and flexibility.
They simplify the process of making high-performance measurements.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
The TSP Express Software Tool quickly sets up
and runs basic and advanced tests, including:
nested step/sweeps, pulse sweeps, and custom
sweeps for device characterization applications.
The resulting data can be viewed in graphical or
tabular format and exported to a .csv file for use
with spreadsheet applications.
A
G R E A T E R
TSP Express runs on a PC connected to the
SourceMeter instrument via an Ethernet cable
(provided with the instrument). The intuitive
user interface resides on the built-in LXI web
page, so no software installation is needed.
M E A S U R E
O F
C O N F I D E N C E
Scalable, integrated source and measure solutions
Series 2600A
System SourceMeter Instruments
Simplify Semiconductor Component
Test, Verification, and Analysis
The optional ACS Basic Edition software maximizes the
productivity of customers who perform packaged part characterization during development, quality verification, or failure
analysis, with:
• Rich set of easy-to-access test libraries
• Script editor for fast customization of existing tests
• Data tool for comparing results quickly
• Formulator tool that analyzes captured curves and provides
a wide range of math functions
For more information about the ACS Basic Edition software,
please refer to the ACS Basic Edition data sheet.
Unmatched Throughput and Flexibility
for High Performance I-V Test Systems
When you need to acquire data on a packaged part quickly, the wizard-based user
TSP technology provides remarkable capabilities when a Series interface of ACS Basic Edition makes it easy to find and run the test you want, like
this common FET curve trace test.
2600A is integrated as part of a multi-channel I-V test system.
For example, the embedded scripting capability allows test
PC instead of the instrument itself. Testing multiscripts to be run by the instrument. Test scripts are complete test programs based on an easy to use
ple devices at the same time means dramatically
but highly efficient and compact scripting language called Lua <www.lua.org>. Since test scripts
improved test throughput and reduced overall
can contain any sequence of routines that are executable by conventional programming languages
cost of test.
(including decision making algorithms), this feature allows entire tests to be managed by the instrument without sending readings back to a PC for decision making. This eliminates the delays caused
When all or some of your test requirements
by GPIB traffic congestion and greatly improves overall test times.
change, your Series 2600A system can be reconfigured via software without rewiring. The interAlso, TSP technology offers “mainframe-less channel expansion.” The TSP-Link channel expansion
nal software can match the different pin layouts
bus (which uses a 100 Base T Ethernet cable) allows multiple Series 2600A and other TSP instruof the devices-under-test to the appropriate SMU
ments to be connected in a master-slave configuration and behave as one integrated system. TSP-Link
technology supports up to 32 units or 64 SMU instrument channels per GPIB or IP address, making it instrument-per-pin configurations.
easy to scale a system to fit the particular requirements of an application.
Tight Timing and Synchronization
Parallel Test Capability
Today’s test engineers are challenged with
testing increasingly more complex and more
The Series 2600A takes system level performance to a new height with parallel testing capability. This
feature tests multiple devices in parallel to meet the high throughput requirements of production test sensitive devices that require precise timing
and ­synchronization. Whether you need to
and advanced semiconductor lab applications.
synchronize electrical and optical tests for an
This parallel testing capability enables each instrument in the system to run its own complete test
sequence, creating a fully multi-threaded test environment. Hence, the number of tests that can be
<500ns
running in parallel on a Series 2600A system can be as many as the number of instruments in the
­system. In contrast, most conventional test systems run a single thread test, usually on the ­controller
Test 1
running
Test 2
running
Test 3
running
SMU1
SMU2
SMU3
GPIB or Ethernet
TSP-Link
To
Device 1
To
Device 2
All channels in the system are synchronized
to under 500ns.
Parallel testing with the Series 2600A
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
SMU4
To
Device 3
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Scalable, integrated source and measure solutions
®
SMU INSTRUMENTS
Scalable, integrated source and measure solutions
Series 2600A
Ordering Information
SMU INSTRUMENTS
Scalable, integrated source and measure solutions
2601A
2602A
2611A
2612A
2635A
2636A
2651A
Single-channel System
SourceMeter Instrument
(3A DC, 10A Pulse)
Dual-channel System
SourceMeter Instrument
(3A DC, 10A Pulse)
Single-channel System
SourceMeter Instrument
(200V, 10A Pulse)
Dual-channel System
SourceMeter Instrument
(200V, 10A Pulse)
Single-channel System
SourceMeter Instrument
(1fA, 10A Pulse)
Dual-channel System
SourceMeter Instrument
(1fA, 10A Pulse)
Single-channel System
SourceMeter Instrument
(2000W, 50A Pulse)
Accessories Supplied
2600-ALG-2
Low Noise Triax Cable
with Alligator Clips,
2m (6.6 ft.) (two
supplied with 2636A,
one with 2635A)
2600-Kit Mating Screw
Terminal Connectors
with strain relief
and covers (2601A/
2602A/2611A/2612A)
CA-180-3A
TSP-Link/Ethernet
Cable (two per unit)
TSP Express Software Tool
(embedded)
Test Script Builder Software
(supplied on CD)
ACS Basic Edition Software
(optional)
System SourceMeter Instruments
®
optoelectronic component or ensure that the same stress times are applied to the different pins of
an advanced semiconductor device, providing precision timing and synchronization between SMU
instrument channels (and external instruments) has become a critical requirement.
A high performance trigger model that is hardware driven allows timing at each source-measure step
to be tightly controlled. It also synchronizes the operations between SMU instrument channels and/
or external instrumentation at hardware speeds of <500ns.
Third-generation SMU Instrument
Design Ensures Faster Test Times
Based on the proven architecture of earlier Series 2600 instruments, the Series 2600A’s new SMU instrument design enhances
test speed in several ways. For example, while earlier designs
used a parallel current ranging topology, the Series 2600A uses
a patented series ranging topology, which provides faster and
smoother range changes and outputs that settle more quickly.
The Series 2600A SMU instrument design supports two modes
of operation for use with a variety of loads. In normal mode,
the SMU instrument provides high bandwidth performance for
maximum throughput. In high capacitance (high-C) mode, the
SMU instrument uses a slower bandwidth to provide robust performance with higher capacitive loads.
Each Series 2600A SMU instrument channel offers a highly flexible, four-quadrant source coupled with precision voltage and
current meters. Each channel can be configured as a:
• Precision power supply
• True current source
• DMM (DCV, DCI, ohms, and power with 6½-digit resolution)
• Electronic load (with sink mode capability)
• V or I pulse generator (Pulse width: 100μs and longer)
• V or I waveform generator
Current arbitrary waveforms
maximum output update rates:
12,500 samples/second.
Voltage arbitrary waveforms
maximum output update rates:
20,000 samples/second.
All analog-to-digital (A/D) converters in Series 2600A instruments are both high speed and high
precision for maximum flexibility. The two A/D converters per channel (one for I, one for V) can run
simultaneously, providing precise source-readback without sacrificing test throughput. These A/D
converters offer the versatility of programmable integration rates, allowing you to optimize for either
high speed (>20,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC setting) measurements.
In addition to the high speed or high resolution modes, the Model 2651A offers a digitizing measurement mode that enables 1µs per point sampling. See the Model 2651A on page 26 for more information.
Digital I/O Interface
A back panel port on every Series 2600A instrument provides 14 bits of universal digital I/O to link
the instrument to a variety of popular component handlers and/or probe stations. These digital I/O
lines are compatible with the triggering technology of Keithley’s earlier Trigger-Link instruments.
These lines simplify integrating Series 2600A instruments into systems that employ other electrical,
mechanical, optical, or RF equipment.
TSP-Link Trigger Lines
The TSP-Link bus supports dedicated trigger lines that provide synchronous operations between multiple Series 2600A instruments (and other TSP instruments, such as Series 3700 DMM/Switch Systems)
without the need for additional trigger connections.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Scalable, integrated source and measure solutions
Series 2600A
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
®
Built-in Contact Check Function
The Contact Check function makes it simple to verify good device-under-test connections quickly and
easily before an automated test sequence begins. This eliminates the measurement errors and false
product failures associated with contact fatigue, breakage, contamination, loose or broken connections, relay failures, etc.
Powerful Software Tools
In addition to the embedded TSP Express and optional ACS Basic Edition software, the free Test
Script Builder software tool is provided to help users create, modify, debug, and store TSP test
scripts. Table 1 describes key features of Series 2600A software tools.
Complete Automated System Solutions
While the ACS Basic Edition software only supports component characterization tests, wafer and cassette level testing can be performed
by Keithley’s ACS Integrated Test Systems. ACS systems are highly
configurable, instrument-based systems that generally include a
number of Series 2600A instruments. These systems are designed for
semiconductor device characterization, reliability/WLR, parametric,
and component functional testing.
The flexible software architecture of ACS Basic Edition allows configuring
systems with a wide range of controllers and test fixtures, as well as the
exact number of SourceMeter instruments the application requires.
Scalable, integrated source and measure solutions
Typical Applications
I-V functional test and
characterization of a
wide range of devices,
including:
• Discrete and passive
components
–– Two-leaded –
Sensors, disk
drive heads, metal
oxide varistors
(MOVs), diodes,
zener diodes,
sensors, capacitors,
thermistors
–– Three-leaded –
Small signal bipolar
junction transistors
(BJTs), field-effect
transistors (FETs),
and more
• Simple ICs – Optos,
drivers, switches,
sensors
• Integrated devices –
small scale integrated
(SSI) and large scale
integrated (LSI)
–– Analog ICs
–– Radio frequency
integrated circuits
(RFICs)
–– Application specific integrated
circuits (ASICs)
–– System on a chip (SOC) devices
• Optoelectronic devices such as lightemitting diodes (LEDs), laser diodes,
high brightness LEDs (HBLEDs),
vertical cavity surface-emitting lasers
(VCSELs), displays
• Wafer level reliability
–– NBTI, TDDB, HCI, electromigration
• Solar Cells
• Batteries
System SourceMeter Instruments
Example ACS Integrated
Test System
Table 1. Series 2600A software tools
Feature/
Functionality
Description
Supported
hardware
Supported
buses
ACS Basic Edition
Semiconductor characterization
software for component test,
verification, and analysis
TSP Express
Test Script
Builder (TSB)
Quick Start Tool for fast and easy
Custom script
I-V testing, primarily for bench writing tool for TSP
and lab users
instruments
24xx, 26xxA, 4200-SCS, 237
26xxA
26xxA, 37xx
GPIB, Ethernet
Ethernet only
GPIB, RS-232,
Ethernet
Functionality
Intuitive, wizard-based GUI,
Rich set of test libraries
Data
management
Formulator tool with wide range
of math functions
Installation
Optional purchase
A
G R E A T E R
M E A S U R E
Linear/Log Sweeps, Pulsing,
Custom sweeps, Single point
source-measures. Note: Uses
new 2600A’s new API’s for
precision timing and channel
synchronization
.csv export, basic curve
tracing (no math formula or
analysis support)
Not necessary.
Embedded in the instrument.
O F
C O N F I D E N C E
Custom scripts with
total flexibility
N/A
Free Download or
CD Install on PC.
SMU INSTRUMENTS
Scalable, integrated source and measure solutions
Series 2600A
Series 2600A
System SourceMeter Instruments
®
Cables and Connectors
2600-BAN
Banana Test Leads/Adapter Cable. For a single
2601A/2602A/2611A/2612A SMU instrument channel
2600-KIT
Extra screw terminal connector, strain relief, and cover for a single SourceMeter
channel (one supplied with 2601A/2611A, two with 2602A/2612A)
2600-TRIAX
Triax Adapter. For a single 2601A/2602A/2611A/2612A SMU instrument channel
7078-TRX-*
3-Slot, Low Noise Triax Cable. For use with 2600-TRIAX Adapter
7078-TRX-GND 3-Slot male triax to BNC adapter (guard removed)
8606
High Performance Modular Probe Kit. For use with 2600A-BAN
SC-200
Shielded Twisted Pair Cable. Recommended for general-purpose
use with Series 2600A System SourceMeter instruments
Digital I/O, Trigger Link, and TSP-Link
2600-TLINK
Digital I/O to TLINK Adapter Cable, 1m
CA-126-1
Digital I/O and Trigger Cable, 1.5m
CA-180-3A
CAT5 Crossover Cable for TSP-Link and direct Ethernet connection (two supplied)
GPIB Interfaces and Cables
7007-1
Double Shielded GPIB Cable, 1m (3.3 ft.)
7007-2
Double Shielded GPIB Cable, 2m (6.6 ft.)
KPCI-488LPA
IEEE-488 Interface/Controller for the PCI Bus
KPXI-488
IEEE-488 Interface Board for the PXI Bus
KUSB-488B
IEEE-488 USB-to-GPIB Interface Adapter
Switching
Series 3700
DMM/Switch Systems
707A
Semiconductor Switching Matrix Mainframe
7001
Switch Control Mainframe
Rack Mount Kits
4299-1
Single Rack Mount Kit with front and rear support
4299-2
Dual Rack Mount Kit with front and rear support
4299-5
1U Vent Panel
Software
ACS-BASIC
Component Characterization Software
Extended Warranties
2601A-EW
1 Year Extended Warranty for Model 2601A
2602A-EW
1 Year Extended Warranty for Model 2602A
2611A-EW
1 Year Extended Warranty for Model 2611A
2612A-EW
1 Year Extended Warranty for Model 2612A
2635A-EW
1 Year Extended Warranty for Model 2635A
2636A-EW
1 Year Extended Warranty for Model 2636A
Calibration and Verification
2600-STD-RES Calibration Standard 1GW Resistor for Models 2635A and 2636A
+10A
Scalable, integrated source and measure solutions
+5A
+3A
+1.5A
+1A
DC
0A
Pulse
–1A
–1.5A
–3A
–5A
–10A
–40V
–35V
–20V
–6V 0V +6V
+20V
+35V
+40V
Models 2601A and 2602A I-V capability
+10A
+1.5A
+1A
+0.1A
0A
–0.1A
DC
Pulse
–1A
–1.5A
–10A
–200V –180V
–20V
–5V
0V
+5V
+20V
+180V +200V
SMU INSTRUMENTS
Models 2611A and 2612A I-V capability
*See page 27 for Model 2651A accessories.
+10A
+50A
+1.5A
+1A
+20A
+0.1A
0A
–0.1A
+10A
+5A
0A
–5A
–10A
DC
Pulse
–1A
–1.5A
Pulse
only
–20A
–10A
–200V –180V
DC and
Pulse
–50A
–20V
–5V
0V
+5V
+20V
+180V +200V
–40V
Models 2635A and 2636A I-V capability
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
–20V
–10V
0V
+10V
+20V
Model 2651A I-V capability
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
+40V
Scalable, integrated source and measure solutions
ACCESSORIES AVAILABLE*
In the first and third quadrants, Series 2600A instruments operate as a
source, delivering power to a load. In the second and fourth quadrants,
they operate as a sink, dissipating power internally.
System SourceMeter Instruments
®
ADDITIONAL SOURCE SPECIFICATIONS
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
100mV, 1V Ranges: <50µs typical.
6V Range: <100µs typical.
40V Range 10: <150µs typical.
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Values below for Iout × R load = 1V
unless noted.
3A Range: <80µs typical (current less than 2.5A, R load >2W).
1A–10mA Ranges: <80µs typical (R load >6W).
1mA Range: <100µs typical.
100µA Range: <150µs typical.
10µA Range: <500µs typical.
1µA Range: <2.5ms typical.
100nA Range: <25ms typical.
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.
REMOTE SENSE OPERATING RANGE 11:
Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
40V Range: Max. output voltage = 42V – total voltage drop across source leads (maximum 1W
per source lead).
6V Range: Max. output voltage = 8V – total voltage drop across source leads (maximum 1W per
source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into an 100kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
with source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time
for additional test conditions.
This document contains specifications and supplemental information for the Models 2601A and
2602A System SourceMeter® instruments. Specifications are the standards against which the
Models 2601A and 2602A are tested. Upon leaving the factory, the 2601A and 2602A meet these
specifications. Supplemental and typical values are non-­warranted, apply at 23°C, and are provided
solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2601A
and 2602A) or SourceMeter CHANNEL B (2602A) terminals under the following conditions:
1. 23°C ± 5°C, <70% relative humidity
2.After 2 hour warm-up
3. Speed normal (1 NPLC)
4. A/D auto-zero enabled
5. Remote sense operation or properly zeroed local operation
6.Calibration period = 1 year
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
100.000mV
  5 µV
0.02% +250µV
1.00000V
 50 µV
0.02% +400µV
6.00000V
 50 µV
0.02% + 1.8 mV
40.0000V
500 µV
0.02% + 12 mV
Typical Noise
(peak-peak)
0.1Hz–10Hz
 20 µV
 50 µV
100 µV
500 µV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 40.4W per channel maximum.
±40.4V @ ±1.0A, ±6.06V @ ±3.0A, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 6V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 10nA. Accuracy same as current source.
OVERSHOOT: <±(0.1% + 10mV) typical. Step size = 10% to 90% of range, resistive load,
maximum ­current limit/compliance.
GUARD OFFSET VOLTAGE: <4mV typical. Current <10mA.
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating
information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating
information.
6. 10A range accessible only in pulse mode.
7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating
information.
9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 100mV range add an additional 60mV of uncertainty.
10.Add 150μs when measuring on the 1A range.
11.Add 50μV to source accuracy specifications per volt of HI lead drop.
Current Source Specifications
CURRENT PROGRAMMING ACCURACY
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + amps)
100.000nA
1 pA
0.06% + 100 pA
1.00000µA
10 pA
0.03% + 800 pA
10.0000 µA
100 pA
0.03% + 5 nA
100.000µA
1 nA
0.03% + 60 nA
1.00000mA
10 nA
0.03% + 300 nA
10.0000mA
100 nA
0.03% + 6µA
100.000mA
1 µA
0.03% + 30µA
1.00000A 5
10 µA
0.05% + 1.8mA
10 µA
0.06% + 4mA
3.00000A 5
5,
6
100 µA
0.5  % + 40mA (typical)
10.0000A
Typical Noise
(peak-peak)
0.1Hz–10Hz
5 pA
25 pA
60 pA
3 nA
6 nA
200 nA
600 nA
70 µA
150 µA
SMU INSTRUMENTS
Series 2600A specifications
SPECIFICATION CONDITIONS
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 8: 40.4W per channel maximum.
±1.01A @ ±40.0V , ±3.03A @ ±6.0V , four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 10mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load; see Current Source
Output Settling Time for additional test conditions).
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
Series 2600A specifications
2601A
2602A
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
2601A
2602A
System SourceMeter Instruments
®
SOURCE SPECIFICATIONS (continued)
METER SPECIFICATIONS
VOLTAGE MEASUREMENT ACCURACY 16, 17
PULSE SPECIFICATIONS
Maximum
Pulse Width 12
DC, no limit
DC, no limit
100 ms
4 ms
1.8 ms
Maximum
Duty Cycle 13
100%
100%
25%
4%
1%
Range
100.000mV
1.00000V
6.00000V
40.0000V
3
Range
3
2
2
0A
1
DC
Pulse
–1A
–1.5A
Pulse
2
2
3
–5A
4
–10A
–40V
–35V
–20V
–6V 0V +6V
+35V
+20V
Pulse Level
90%
Start toff
10%
t
SMU INSTRUMENTS
on
off
13.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equations in the reference manual for more information.
14.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
2W
2W
7W
27 W
27 W
2W
7W
2W
6V
20 V
35 V
40 V
1.5 A
3A
5A
10 A
0.2%
1%
0.5%
0.1%
0.1%
0.2%
0.5%
0.5%
150µs
200µs
500µs
400µs
1.5ms
150µs
500µs
200µs
10%
ton
toff
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
1 (1.2) ms
5% + 10 W
4 (5) ms
36 (42) ms
5% + 1 W
5% + 0.3 W
1A–3A
Ranges
0.01%
0.05%
1.1 %
18.Applies when in single channel display mode.
19.High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
20.Applies when in single channel display mode.
21.Four-wire remote sense only with current meter mode selected. Voltage measure set to 100mV or 1V range only.
22.10A range accessible only in pulse mode.
23.Compliance equal to 100mA.
24.High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
25.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
Start toff
10%
MEDIUM
SLOW
16.Add 50µV to source accuracy specifications per volt of HI lead drop.
17.De-rate accuracy specifications for NPLC setting < 1 by increasing error term.
Add appropriate % of range term using table below.
100mV
1V–40V
100nA
1μA–100mA
NPLC Setting
Range
Ranges
Range
Ranges
0.1
0.01%
0.01%
0.01%
0.01%
0.01
0.08%
0.07%
0.1%
0.05%
0.001
0.8 %
0.6 %
1%
0.5 %
90%
Bias Level
FAST
NOTES
Pulse Level
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600A Reference Manual.
15.Times measured from the start of pulse to the start off-time; see figure below.
Start ton
0.05% + 100 pA
0.025% + 500 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5µA
0.02% + 20µA
0.03% + 1.5 mA
0.05% + 3.5 mA
0.4% +
25 mA (typical)
ADDITIONAL METER SPECIFICATIONS
10%
t
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Maximum Measurement
Time To Memory
For 60Hz (50Hz)
Speed
12.Times measured from the start of pulse to the start off-time; see figure below.
Bias Level
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
100 µA
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
Contact Check 25
+40V
NOTES
Start ton
Voltage
Burden 21
Current Measure Settling Time (Time for measurement to settle after a Vstep) 23: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for Vout = 1V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 24: ±(0.15 × accuracy specification/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Pulse
3
–3A
Default Display
Resolution 20
100.000nA
1.00000µA
10.0000µA
100.000µA
1.00000mA
10.0000mA
100.000mA
1.00000A
3.00000A
10.0000A 22
4
+1.5A
+1A
>10 GW
>10 GW
>10 GW
>10 GW
CURRENT MEASUREMENT ACCURACY 17
+10A
+3A
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +150µV
0.015% +200µV
0.015% + 1mV
0.015% + 8mV
Input
Resistance
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 15: ±5µs.
pulse width jitter: 2µs (typical).
Quadrant Diagram:
+5A
Default Display
Resolution 18
  1 µV
  10 µV
  10 µV
100 µV
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Series 2600A specifications
Series 2600A specifications
Region
1
1
2
3
4
Maximum
Current Limit
1 A @40 V
3 A @ 6 V
1.5 A @40 V
5 A @35 V
10 A @20 V
2601A
2602A
System SourceMeter Instruments
®
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 10GW in parallel with 3300pF.
Noise, 10Hz–20MHz (6V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot: <400mV + 0.1% of larger range (typical).
Overshoot into a 100kW load, 20MHz BW.
NOTES
26.High Capacitance Mode specifications are for DC measurements only.
27.100nA range is not available in High Capacitance Mode.
28.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
29.Part of KI Factory scripts. See reference manual for details.
GENERAL
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model
topology.
RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, ­parity
type, and flow control (RTS/CTS hardware or none). When not programmed as the active
host interface, the SourceMeter instrument can use the RS-232 interface to control other
­instrumentation.
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to
trigger and communicate with each other.
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.2.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:
Unknown.
DIGITAL I/O INTERFACE:
+5V Pin
600mA
Solid State
Fuse
5.1kW
100W
(on DIGITAL I/O
connector)
(on DIGITAL I/O
connector)
Chassis
Ground
*
To output stage
Rear Panel
USB: USB 1.0 Host Controller (Memory Stick I/O).
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when rack
mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in ×
93⁄8 in × 17½ in).
WEIGHT: 2601A: 4.75kg (10.4 lbs). 2602A: 5.50kg (12.0 lbs).
ENVIRONMENT: For indoor use only.
Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
Read by
firmware
Written by
firmware
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
See pages 24 and 25 for measurement speeds and other specifications.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
Read by firmware
+220V Supply
–220V Supply
10kΩ
GND Pin
(on DIGITAL I/O
connector)
Coil
Resistance
145Ω ±10%
INTERLOCK Pin
+5VDC
(on DIGITAL I/O
connector)
Digital I/O Pin
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.
5V Power Supply Pin: Limited to 600mA, solid state fuse protected.
Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must be
externally applied to this pin to ensure 200V operation. This signal is pulled down to chassis ground with a 10kW resistor. 200V operation will be blocked when the INTERLOCK
signal is <0.4V (absolute minimum –0.4V). See figure below:
Series 2600A specifications
Voltage Source Output Settling Time: Time required to reach 0.1% of final value after
source level command is processed on a fixed range. Current limit = 1A.
Voltage Source Range
Settling Time with Cload = 4.7μF
100mV
200 μs (typical)
1 V
200 μs (typical)
6 V
200 μs (typical)
40 V 7 ms (typical)
Current Measure Settling Time: Time required to reach 0.1% of final value after voltage
source is stabilized on a fixed range. Values below for Vout = 1V unless noted.
Current Measure Range
Settling Time
3 A – 1 A
<120 μs (typical) (R load > 2W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100 μA
< 3 ms (typical)
10 μA
< 230 ms (typical)
1 μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 29: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
SMU INSTRUMENTS
Series 2600A specifications
HIGH CAPACITANCE MODE 26, 27, 28
2611A
2612A
System SourceMeter Instruments
®
ADDITIONAL SOURCE SPECIFICATIONS
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to within reach 0.1% of final value
after source level command is processed on a fixed range.
Range
Settling Time
200mV
<50 μs (typical)
2 V
<50 μs (typical)
20 V
<110 μs (typical)
200 V <700 μs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for Iout · R load = 2V unless noted.
Current Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load > 6W)
100 mA – 10 mA
<80 μs (typical)
1 mA
<100 μs (typical)
100 μA
<150 μs (typical)
10 μA
<500 μs (typical)
1 μA
<2 ms (typical)
100 nA
<20 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.
REMOTE SENSE OPERATING RANGE 11: Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test conditions.
This document contains specifications and supplemental information for the Models 2611A and
2612A System SourceMeter® instruments. Specifications are the standards against which the
Models 2611A and 2612A are tested. Upon leaving the factory the 2611A and 2612A meet these
specifications. Supplemental and typical values are non-­warranted, apply at 23°C, and are provided
solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611A and
2612A) or SourceMeter CHANNEL B (2612A) terminals under the following conditions:
1. 23°C ± 5°C, <70% relative humidity.
2.After 2 hour warm-up.
3. Speed normal (1 NPLC).
4. A/D auto-zero enabled.
5. Remote sense operation or properly zeroed local sense operation.
6.Calibration period = 1 year.
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
200.000mV
   5 µV
0.02% + 375µV
2.00000V
  50 µV
0.02% + 600µV
20.0000V
500 µV
0.02% + 5 mV
200.000V
  5 mV
0.02% + 50 mV
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
20 µV
50 µV
300 µV
2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 20V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 10nA. Accuracy is the same as current source.
OVERSHOOT: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maximum c­ urrent limit/compliance.
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Accuracy specifications do not include connector leakage. Derate accuracy by Vout/2E11 per °C when operating
between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15·Vout/2E11) per °C when operating <18°C and >28°C.
6. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.
7. 10A range accessible only in pulse mode.
8. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
9. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.
10.For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
11.Add 50μV to source accuracy specifications per volt of HI lead drop.
Current Source Specifications
SMU INSTRUMENTS
CURRENT PROGRAMMING ACCURACY 5
Range
100.000nA
1.00000µA
10.0000µA
100.000µA
1.00000mA
10.0000mA
100.000mA
1.00000A 6
1.50000A 6
10.0000A 6, 7
Programming
Resolution
2 pA
20 pA
200 pA
2 nA
20 nA
200 nA
2 µA
20 µA
50 µA
200 µA
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.06% +100 pA
0.03% +800 pA
0.03% + 5 nA
0.03% + 60 nA
0.03% +300 nA
0.03% + 6µA
0.03% + 30µA
0.05% + 1.8mA
0.06% + 4mA
0.5% + 40mA (typical)
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
5 pA
25 pA
60 pA
3 nA
6 nA
200 nA
600 nA
70 µA
150 µA
PULSE SPECIFICATIONS
Region
1
1
2
3 14
4
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 8: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 9: 30.3W per channel maximum.
±1.515A @ ±20V , ±101mA @ ±200V , four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 10: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% (typical). Step size = 10% to 90% of range, resistive load; see Current
Source Output Settling Time for additional test conditions.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
Maximum
Current Limit
100mA @200 V
1.5 A @ 20 V
1 A @180 V
1 A @200 V
10 A @ 5 V
Maximum
Pulse Width 12
DC, no limit
DC, no limit
8.5 ms
2.2 ms
1 ms
Maximum
Duty Cycle 13
100%
100%
1%
1%
2.2%
MINIMUM PROGRAMMABLE PULSE WIDTH 15, 16: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 16: ±5µs.
pulse width jitter: 2µs (typical).
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Series 2600A specifications
Series 2600A specifications
SPECIFICATION CONDITIONS
2611A
2612A
System SourceMeter Instruments
®
SOURCE SPECIFICATIONS (continued)
METER SPECIFICATIONS
PULSE SPECIFICATIONS (continued)
VOLTAGE MEASUREMENT ACCURACY 17, 18
Quadrant Diagram:
+10A
Range
200.000mV
2.00000V
20.0000V
200.000V
4
3
2
+0.1A
0A
–0.1A
DC
Pulse
2
–1A
–1.5A
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 20: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
2
1
2
3
Pulse
3
CURRENT MEASUREMENT ACCURACY 18, 21
Pulse
4
Range
100.000nA
1.00000µA
10.0000µA
100.000µA
1.00000mA
10.0000mA
100.000mA
1.00000A
1.50000A
10.0000A 24
–10A
–200V –180V
–20V
0V
–5V
+5V
+20V
+180V +200V
NOTES
12.Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
toff
13.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C.
See power equations in the reference manual for more information.
14.Voltage source operation with 1.5 A current limit.
15.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
5V
20 V
180 V
200 V (1.5 A Limit)
100 mA
1A
1A
10 A
0.5 W
200 W
180 W
200 W
200 W
200 W
180 W
0.5 W
1%
0.2%
0.2%
0.2%
1%
1%
0.2%
0.5%
300 μs
200 μs
5 ms
1.5 ms
200 μs
500 μs
5 ms
300 μs
Start toff
10%
ton
toff
FAST
1 (1.2) ms
5% + 10 W
MEDIUM
4 (5) ms
5% + 1 W
SLOW
36 (42) ms
5% + 0.3 W
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
90%
10%
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
ADDITIONAL METER SPECIFICATIONS
Pulse Level
Bias Level
Maximum Measurement
Time to Memory
For 60Hz (50Hz)
Speed
16.Times measured from the start of pulse to the start off-time; see figure below.
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.06% + 100 pA
0.025% + 500 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5µA
0.02% + 20µA
0.03% + 1.5mA
0.05% + 3.5mA
0.4% +
25mA (typical)
Voltage
Burden 23
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Contact Check 27
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600A Reference Manual.
Start ton
Default Display
Resolution 22
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
100 µA
Current Measure Settling Time (Time for measurement to settle after a Vstep) 25: Time
required to reach 0.1% of final value after source level command is processed on a fixed range.
Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 26: ±(0.15 × accuracy specfication)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
10%
ton
>10 GW
>10 GW
>10 GW
>10 GW
Series 2600A specifications
3
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +225µV
0.02% + 350µV
0.015% + 5mV
0.015% + 50mV
Input
Resistance
SMU INSTRUMENTS
Series 2600A specifications
+1.5A
+1A
Default Display
Resolution 19
1µV
10µV
100µV
1mV
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
2611A
2612A
System SourceMeter Instruments
®
METER SPECIFICATIONS (continued)
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model
topology.
RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, ­parity
type, and flow control (RTS/CTS hardware or none). When not programmed as the active
host interface, the SourceMeter instrument can use the RS-232 interface to control other
­instrumentation.
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments
to trigger and communicate with each other.
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.2.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:
Unknown.
DIGITAL I/O INTERFACE:
NOTES
17.Add 50µV to source accuracy specifications per volt of HI lead drop.
18.De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term
using table below.
Series 2600A specifications
NPLC Setting
0.1
0.01
0.001
200mV
Range
0.01%
0.08%
0.8 %
2V–200V
Ranges
0.01%
0.07%
0.6 %
100nA
Range
0.01%
0.1%
1%
1μA–100mA
Ranges
0.01%
0.05%
0.5 %
1A–1.5A
Ranges
0.01%
0.05%
1.1 %
19.Applies when in single channel display mode.
20.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
21.Accuracy specifications do not include connector leakage. De-rate accuracy by Vout/2E11 per °C when operating
between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15 * Vout/2E11) per °C when operating <18° and >28°C.
22.Applies when in single channel display mode.
23.Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or
2V range only.
24.10A range accessible only in pulse mode.
25.Compliance equal to 100mA.
26.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
27.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
Digital I/O Pin
100W
+5VDC
5.1kW
(on DIGITAL I/O
connector)
Voltage Source Output Settling Time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Current limit = 1A.
Voltage Source Range
Settling Time with Cload = 4.7μF
200mV
600 μs (typical)
2 V
600 μs (typical)
20 V
1.5 ms (typical)
200 V 20 ms (typical)
Current Measure Settling Time: Time required to reach within 0.1% of final value after
voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.
Current Measure Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load >6W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100 μA
< 3 ms (typical)
10 μA
< 230 ms (typical)
1 μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 31: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 30GW in parallel with 3300pF.
Noise, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot (for 20V range and below): <400mV + 0.1%
of larger range (typical). Overshoot into a 200kW load, 20MHz BW.
Read by
firmware
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.
5V Power Supply Pin: Limited to 600mA, solid state fuse protected.
Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must
be externally applied to this pin to ensure 200V operation. This signal is pulled down
to chassis ground with a 10kW resistor. 200V operation will be blocked when the
INTERLOCK signal is <0.4V (absolute minimum –0.4V). See figure below:
Coil
Resistance
145Ω ±10%
INTERLOCK Pin
(on DIGITAL I/O
connector)
Read by firmware
+220V Supply
–220V Supply
10kΩ
Chassis
Ground
*
NOTES
SMU INSTRUMENTS
600mA
Solid State
Fuse
(on DIGITAL I/O
connector)
HIGH CAPACITANCE MODE 28, 29, 30
To output stage
Rear Panel
USB: USB 1.0 Host Controller (Memory Stick I/O).
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when
rack mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in
× 93⁄8 in × 17½ in).
WEIGHT: 2611A: 4.75kg (10.4 lbs). 2612A: 5.50kg (12.0 lbs).
ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
28.High Capacitance Mode specifications are for DC measurements only.
29.100nA range is not available in High Capacitance Mode.
30.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
31.Part of KI Factory scripts, See reference manual for details.
See pages 24 and 25 for measurement speeds
and other specifications.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
+5V Pin
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Series 2600A specifications
GENERAL
System SourceMeter Instruments
®
ADDITIONAL SOURCE SPECIFICATIONS
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
Range
Settling Time
200mV
<50 μs (typical)
2 V
<50 μs (typical)
20 V
<110 μs (typical)
200 V <700 μs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for Iout · R load = 2V unless noted.
Current Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load > 6W)
100 mA – 10 mA
<80 μs (typical)
1 mA
<100 μs (typical)
100 μA
<150 μs (typical)
10 μA
<500 μs (typical)
1 μA
<2 ms (typical)
100 nA
<20 ms (typical)
10 nA
<40 ms (typical)
1 nA
<150 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC.
REMOTE SENSE OPERATING RANGE 10:Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test condtions.
This document contains specifications and supplemental information for the Models 2635A and
2636A System SourceMeter® instruments. Specifications are the standards against which the
Models 2635A and 2636A are tested. Upon leaving the factory the 2635A and 2636A meet these
specifications. Supplemental and typical values are non-­warranted, apply at 23°C, and are provided
solely as u­ seful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2635A
and 2636A) or SourceMeter CHANNEL B (2636A) terminals under the following conditions:
1. 23°C ± 5°C, <70% relative humidity.
2.After 2 hour warm-up
3. Speed normal (1 NPLC)
4. A/D auto-zero enabled
5. Remote sense operation or properly zeroed local sense operation
6.Calibration period = 1 year
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
200.000mV
   5 µV
0.02% + 375µV
2.00000V
  50 µV
0.02% + 600µV
20.0000V
500 µV
0.02% + 5 mV
200.000V
  5 mV
0.02% + 50 mV
Typical Noise
(peak-peak)
0.1Hz–10Hz
20 µV
50 µV
300 µV
2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV pk-pk (typical), <3mV rms (typical), 20V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 100pA. Accuracy is the same as current source.
OVERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load,
maximum current limit/compliance).
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
PULSE SPECIFICATIONS
Region
1
1
2
3 13
4
Current Source Specifications
CURRENT PROGRAMMING ACCURACY
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + amps)
1.00000nA 20fA
0.15% + 2 pA
10.0000nA 200fA
0.15% + 5 pA
100.000nA 2pA
0.06% + 50 pA
1.00000µA 20pA
0.03% +700 pA
10.0000µA 200 pA
0.03% + 5 nA
100.000µA 2 nA
0.03% + 60 nA
1.00000mA 20 nA
0.03% + 300 nA
10.0000mA 200 nA
0.03% + 6µA
100.000mA 2µA
0.03% + 30µA
20µA
0.05% + 1.8mA
1.00000A 5 50µA
0.06% + 4mA
1.50000A 5 200µA
0.5  % + 40mA (typical)
10.0000A 5, 6 Typical Noise
(peak-peak)
0.1Hz–10Hz
800fA
2pA
5pA
25pA
60 pA
3 nA
6 nA
200 nA
600 nA
70µA
150µA
Maximum
Pulse Width 11
DC, no limit
DC, no limit
8.5 ms
2.2 ms
1 ms
Maximum
Duty Cycle 12
100%
100%
1%
1%
2.2%
MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for
settled source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 15: ±5µs.
pulse width jitter: 50µs (typical).
Quadrant Diagram:
+10A
4
+1.5A
+1A
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 8: 30.3W per channel maximum.
±1.515A @ ±20V, ±101mA @ ±200V, four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load, maximum ­
current limit/compliance; see Current Source Output Settling Time for additional
test ­conditions).
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
Maximum
Current Limit
100mA @200 V
1.5 A @ 20 V
1 A @180 V
1 A @200 V
10 A @ 5 V
Series 2600A specifications
Series 2600A specifications
SPECIFICATION CONDITIONS
3
+0.1A
0A
–0.1A
–1A
–1.5A
3
2
2
DC
1
Pulse
2
2
3
Pulse
3
4
–10A
–200V –180V
A
G R E A T E R
–20V
–5V
0V
M E A S U R E
+5V
O F
+20V
+180V +200V
C O N F I D E N C E
Pulse
SMU INSTRUMENTS
2635A
2636A
System SourceMeter Instruments
®
SOURCE SPECIFICATIONS (continued)
METER SPECIFICATIONS
NOTES
VOLTAGE MEASUREMENT ACCURACY 16, 17
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.
6. 10A range accessible only in pulse mode.
7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power
derating information.
9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
10.Add 50μV to source accuracy specifications per volt of HI lead drop.
11.Times measured from the start of pulse to the start off-time; see figure below.
Range
200.000mV
2.00000V
20.0000V
200.000V
Range
100.00pA 22, 23
1.00000nA 22, 24
10.0000nA
100.000nA
1.00000µA
10.0000µA
100.000µA
1.00000mA
10.0000mA
100.000mA
1.00000A
1.50000A
10.0000A 25
Start toff
10%
10%
ton
toff
12.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equations in the Reference Manual for more information.
13.Voltage source operation with 1.5 A current limit.
14.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
0.5 W
200 W
180 W
200 W
200 W
200 W
180 W
0.5 W
5V
20 V
180 V
200 V (1.5 A Limit)
100 mA
1A
1A
10 A
1%
0.2%
0.2%
0.2%
1%
1%
0.2%
0.5%
300 μs
200 μs
5 ms
1.5 ms
200 μs
500 μs
5 ms
300 μs
Pulse Level
Maximum Measurement
Time to Memory
For 60Hz (50Hz)
Speed
90%
Start toff
10%
Voltage
Burden 21
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.15% + 120 fA
0.15% + 240 fA
0.15% +
3 pA
0.06% + 40 pA
0.025% + 400 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5µA
0.02% + 20µA
0.03% + 1.5mA
0.05% + 3.5mA
0.4  % + 25mA
Contact Check 28
15.Times measured from the start of pulse to the start off-time; see figure below.
Bias Level
Default Display
Resolution 20
1fA
10fA
100fA
1pA
10pA
100 pA
1nA
10nA
100nA
1µA
10µA
10µA
100µA
Current Measure Settling Time (Time for measurement to settle after a Vstep) 26: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 27: ±(0.15 × accuracy specfication)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600A Reference Manual.
Start ton
>1014 W
>1014 W
>1014 W
>1014 W
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +225µV
0.02% + 350µV
0.015% + 5mV
0.015% + 50mV
CURRENT MEASUREMENT ACCURACY 17
90%
Bias Level
Input
Resistance
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Pulse Level
Start ton
Default Display
Resolution 18
1µV
10µV
100µV
1mV
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST
1 (1.2) ms
5% + 10 W
MEDIUM
4 (5) ms
5% + 1 W
SLOW
36 (42) ms
5% + 0.3 W
10%
ton
toff
ADDITIONAL METER SPECIFICATIONS
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >1014W.
SMU INSTRUMENTS
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Series 2600A specifications
Series 2600A specifications
2635A
2636A
2635A
2636A
System SourceMeter Instruments
®
METER SPECIFICATIONS (continued)
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model
topology.
RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, ­parity
type, and flow control (RTS/CTS hardware or none). When not programmed as the active
host interface, the SourceMeter instrument can use the RS-232 interface to control other
­instrumentation.
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments
to trigger and communicate with each other.
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.2.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:
Unknown.
DIGITAL I/O INTERFACE:
NOTES
16.Add 50µV to source accuracy specifications per volt of HI lead drop.
17.De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term
using table below.
200mV
Range
0.01%
0.08%
0.8 %
2V–200V
Ranges
0.01%
0.07%
0.6 %
100nA
Range
0.01%
0.1%
1%
1μA–100mA
Ranges
0.01%
0.05%
0.5 %
1A–1.5A
Ranges
0.01%
0.05%
1.1 %
18.Applies when in single channel display mode.
19.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
20.Applies when in single channel display mode.
21.Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or
2V range only.
22.10-NPLC, 11-Point Median Filter, <200V range, measurements made within 1 hour after zeroing. 23°C ± 1°C
23.Under default specification conditions: ±(0.15% + 750fA).
24.Under default specification conditions: ±(0.15% + 1pA).
25.10A range accessible only in pulse mode.
26.Delay factor set to 1. Compliance equal to 100mA.
27.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
28.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
600mA
Solid State
Fuse
Digital I/O Pin
100W
+5VDC
(on DIGITAL I/O
connector)
HIGH CAPACITANCE MODE 29, 30, 31
5.1kW
(on DIGITAL I/O
connector)
Voltage Source Output Settling Time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Current limit = 1A.
Voltage Source Range
Settling Time with Cload = 4.7μF
200mV
600 μs (typical)
2 V
600 μs (typical)
20 V
1.5 ms (typical)
200 V 20 ms (typical)
Current Measure Settling Time: Time required to reach within 0.1% of final value after
voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.
Current Measure Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load >6W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100 μA
< 3 ms (typical)
10 μA
< 230 ms (typical)
1 μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 32: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 30GW in parallel with 3300pF.
Noise, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot (for 20V range and below): <400mV + 0.1%
of larger range (typical). Overshoot into a 200kW load, 20MHz BW.
Read by
firmware
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.
5V Power Supply Pin: Limited to 600mA, solid state fuse protected.
Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must
be externally applied to this pin to ensure 200V operation. This signal is pulled down
to chassis ground with a 10kW resistor. 200V operation will be blocked when the
INTERLOCK signal is <0.4V (absolute minimum –0.4V). See figure below:
Coil
Resistance
145Ω ±10%
INTERLOCK Pin
(on DIGITAL I/O
connector)
Read by firmware
+220V Supply
–220V Supply
10kΩ
Chassis
Ground
*
To output stage
Rear Panel
USB: USB 1.0 Host Controller (Memory Stick I/O).
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when
rack mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in
× 93⁄8 in × 17½ in).
WEIGHT: 2635A: 4.75kg (10.4 lbs). 2636A: 5.50kg (12.0 lbs).
ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
NOTES
29.High Capacitance Mode specifications are for DC measurements only.
30.100nA range and below are not available in high capacitance mode.
31.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
32.Part of KI Factory scripts. See reference manual for details.
See pages 24 and 25 for measurement speeds
and other specifications.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
+5V Pin
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
SMU INSTRUMENTS
Series 2600A specifications
NPLC Setting
0.1
0.01
0.001
Series 2600A specifications
GENERAL
Series 2600A
System SourceMeter Instruments
®
Applicable to Models 2601A, 2602A, 2611A, 2612A, 2635A, and 2636A.
See page 28 for Model 2651A specifications.
Measurement Speed Specifications 1, 2, 3
A/D Converter
Speed
0.001 NPLC
0.001 NPLC
0.01 NPLC
0.01 NPLC
0.1 NPLC
0.1 NPLC
1.0 NPLC
1.0 NPLC
Trigger Origin
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Measure
To Memory Using
User Scripts
20000 (20000)
8100 (8100)
5000 (4000)
3650 (3200)
580 (490)
560 (470)
59 (49)
58 (48)
Measure
To Gpib Using
User Scripts
10500 (10500)
7100 (7100)
4000 (3500)
3400 (3000)
560 (475)
450 (460)
59 (49)
58 (49)
Source Measure
To Memory Using
User Scripts
7000 (7000)
5500 (5500)
3400 (3000)
3000 (2700)
550 (465)
545 (460)
59 (49)
59 (49)
Source Measure
To Gpib Using
User Scripts
6200 (6200)
5100 (5100)
3200 (2900)
2900 (2600)
550 (460)
540 (450)
59 (49)
59 (49)
Source Measure
To Memory Using
Sweep API
12000 (12000)
11200 (11200)
4200 (3700)
4150 (3650)
575 (480)
570 (480)
59 (49)
59 (49)
Source Measure
To Gpib Using
Sweep API
5900 (5900)
5700 (5700)
3100 (2800)
3050 (2775)
545 (460)
545 (460)
59 (49)
59 (49)
Maximum SINGLE MEASUREMENT RATES (operations per second) FOR 60Hz (50Hz):
A/D Converter
Speed
0.001 NPLC
0.01 NPLC
0.1 NPLC
1.0 NPLC
Trigger Origin
Measure
To Gpib
Source Measure
To Gpib
Source Measure
Pass/Fail
To Gpib
Internal
Internal
Internal
Internal
1900 (1800)
1450 (1400)
450 (390)
58 (48)
1400 (1400)
1200 (1100)
425 (370)
57 (48)
1400 (1400)
1100 (1100)
425 (375)
57 (48)
Maximum Measurement RANGE CHANGE RATE: <150µs for ranges >10µA, typical. When changing to or from a range ≥1A, maximum rate is <450µs, typical.
Maximum SOURCE Range CHANGE RATE: <2.5ms for ranges >10µA, typical. When changing to or from a range ≥1A, maximum rate is <5.2ms, typical.
Maximum SOURCE FUNCTION CHANGE RATE: <1ms, typical.
COMMAND PROCESSING TIME: Maximum time required for the output to begin to change following the receipt of the smux.source.levelv or smux.source.leveli command. <1ms typical.
NOTES
1. Tests performed with a 2602A, 2612A, or 2636A on Channel A using the following equipment: PC Hardware (Pentium® 4 2.4GHz, 512MB RAM, National Instruments PCI-GPIB). Driver (NI-486.2 Version 2.2 PCI-GPIB). Software
(Microsoft® Windows® 2000, Microsoft Visual Studio 2005, VISA version 4.1).
2. Exclude current measurement ranges less than 1mA.
3. 2635A/2636A with default measurement delays and filters disabled.
TRIGGERING AND SYNCHRONIZATION
SPECIFICATIONS
Triggering:
Trigger in to trigger out: 0.5μs, typical.
Trigger in to source change:4 10 μs, typical.
Trigger Timer accuracy: ±2μs, typical.
Source change4 after LXI Trigger: 280μs, typical.
Synchronization:
Single-node synchronized source change:4 <0.5μs, typical.
Multi-node synchronized source change:4 <0.5μs, typical.
NOTES
SMU INSTRUMENTS
4. Fixed source range, with no polarity change.
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Series 2600A specifications
Series 2600A specifications
Maximum SWEEP OPERATION RATES (operations per second) FOR 60Hz (50Hz):
Series 2600A
System SourceMeter Instruments
®
Applicable to Models 2601A, 2602A, 2611A, 2612A, 2635A, and 2636A.
See page 28 for Model 2651A specifications.
FRONT PANEL INTERFACE: Two-line vacuum fluorescent display (VFD) with keypad and rotary knob.
Display:
• Show error messages and user defined messages
• Display source and limit settings
• Show current and voltage measurements (6.5-digit to 4.5-digit)
• View measurements stored in dedicated reading buffers
Keypad Operations:
• Change host interface settings
• Save and restore instrument setups
• Load and run factory and user defined test scripts (i.e. sequences) that prompt for input
and send results to the display
• Store measurements into dedicated reading buffers
PROGRAMMING: Embedded Test Script Processor (TSP) accessible from any host interface. Responds
to individual instrument control commands. Responds to high speed test scripts comprised of
instrument control commands and Test Script Language (TSL) statements (e.g. branching, looping,
math, etc.). Able to execute high speed test scripts stored in memory without host intervention.
Minimum Memory Available: 16MB (approximately 250,000 lines of TSL code).
Test Script Builder: Integrated development environment for building, running, and managing
TSP scripts. Includes an instrument console for communicating with any TSP enabled instrument in an interactive manner. Requires:
• VISA (NI-VISA included on CD)
• Microsoft .NET Framework (included on CD)
• Keithley I/O Layer (included on CD)
• Pentium III 800MHz or faster personal computer
• Microsoft Windows 98, NT, 2000, or XP
Software Interface: TSP Express (embedded), Direct GPIB/VISA, READ/WRITE for VB, VC/C++,
LabVIEW, LabWindows/CVI, etc.
READING BUFFERS: Dedicated storage area(s) reserved for measurement data. Reading buffers
are arrays of measurement elements. Each element can hold the following items:
• Measurement
• Measurement status
• Timestamp
• Source setting (at the time the measurement was taken)
• Range information
Two reading buffers are reserved for each SourceMeter channel. Reading buffers can be filled
using the front panel STORE key and retrieved using the RECALL key or host interface.
Buffer Size, with timestamp and source setting: >60,000 samples.
Buffer Size, without timestamp and source setting: >140,000 samples.
Each SourceMeter instrument has two TSP-Link connectors to facilitate chaining instruments
together.
• Once SourceMeter instruments are interconnected via TSP-Link, a computer can access all
of the resources of each SourceMeter instrument via the host interface of any SourceMeter
instrument.
• A maximum of 32 TSP-Link nodes can be interconnected. Each SourceMeter instrument
consumes one TSP-Link node.
TIMER: Free running 47-bit counter with 1MHz clock input. Reset each time instrument powers
up. Rolls over every 4 years.
Timestamp: TIMER value automatically saved when each measurement is triggered.
Resolution: 1µs.
Accuracy: ±100ppm.
Model 2602A/2612A rear panel
(Single channels 2601A, 2611A, 2635A not shown)
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
Model 2636A rear panel
A
G R E A T E R
M E A S U R E
Series 2600A specifications
SYSTEM EXPANSION: The TSP-Link expansion interface allows TSP enabled instruments to
­trigger and communicate with each other. See figure below:
SMU INSTRUMENTS
Series 2600A specifications
SUPPLEMENTAL INFORMATION
O F
C O N F I D E N C E
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertisement