GE50A MFC data sheet

GE50A MFC data sheet
W W W . M K S I N S T . C O M
Flow Solutions
Type GE50A
ELASTOMER SEALED, DIGITAL MASS FLOW CONTROLLER
The GE50A is a general purpose, elastomer sealed MFC well suited for a wide variety of
applications requiring flow control capability from 5 sccm to 50 slm FS, N2 equivalent. The
GE50A incorporates the latest in digital flow control electronics along with a well proven,
patented thermal sensor and mechanical design.
The GE50A digitally controlled MFC is available with either analog or digital I/O. The digital
control electronics utilize the latest in MKS control algorithms providing fast and repeatable
response to setpoint throughout the device control range. Typical response times are on the
order of 500 milliseconds. Included is a digital calibration that yields 1% of setpoint accuracy
on the calibration gas. The GE50A’s analog and digital I/O can easily be used to replace
those same I/O types of the 1179A MFCs. All GE50As include Modbus as an available
secondary I/O.
The GE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm
to 50 slm flow rate range enabling its use without the need to modify existing gas line
configurations. The design of the GE50A incorporates a minimal use of elastomers. There is
only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces
are of metal. The GE50A comes standard with Viton® seals along with options for Buna,
Neoprene® or Kalrez® allowing for the device’s use with gases requiring one of these
alternatives. The GE50A MFC is available with either a normally closed or a normally open
valve.
Features & Benefits
• Patented thermal sensor design provides exceptional zero stability
• Percent of setpoint accuracy (calibration gas) enables precise process control
• Embedded user interface provides the ability to
- Easily change device range and user gas reducing inventory requirements
- Monitor device functionality and collect performance data in-situ
US Patent No 5461913.
• Wide choice of digital (EtherCAT, DeviceNet, Profibus, & RS485) or analog (0 to 5 VDC or 4 to 20 mA) I/O
• CE Mark and RoHS Compliance – meeting requirements for the European Union
Performance
Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm
Maximum Inlet Pressure 150 psig (can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential (N2 F.S.)10 to 5000 sccm; 10 to 40 psid
(with atmospheric pressure at the MFC outlet)
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
Proof Pressure 1000 psig
Burst Pressure
1500 psig
Control Range 2% to 100% of F.S. (range on mech.)
Typical Accuracy (with N2 calibration gas)
± 1% of setpoint for 20 to 100% F.S.
± 0.2% of F.S. for 2 to 20% F.S.
Repeatability ± 0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero < 0.05% of F.S./°C
Span < 0.08% of Rdg./°C
Inlet Pressure Coefficient < 0.02% of Rdg./psi
Warm-up Time < 30 min
(to within 0.2% of F.S. of steady state performance)
Typical Controller Settling Time < 750 msec., typical above 5% F.S.
(per SEMI Guideline E-17-0600)
Operating Temperature Range (Ambient)
10°C to 50°C
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C (-4° to 149° F)
Mechanical
Fittings (compatible with) Swagelok® 4 VCR® male, Swagelok VCO® male, 1/4'' Swagelok compression seal, Swagelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Swagelok, 8 mm Swagelok
Leak Integrity
External (scc/sec He) < 1 x 10-09
Through closed valve Up to 10K valve <0.1% of FS at 40 psig to atmosphere 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel
Seals and Valve Seat
Viton, Buna-N, Neoprene, Kalrez
Surface Finish 16µ inch average Ra
Weight less than 3 lbs (1.4kg)
Electrical Analog I/O CE Compliant to EMC Directive 2004/108/EC
Input Power Required
Flow Input/Output Signal
Voltage (0 to 5 VDC)
Current (4 to 20 mA)
+15 to +24 VDC @ (< 4 watts)
15 pin Type ''D'' male, 9 pin Type ''D'' male
15 pin Type ''D'' male
Specifications (cont’d)
Digital I/O CE Compliant to EMC Directive 2004/108/EC
Digital I/O
DeviceNet™RS-485
Profibus®
EtherCAT®
Input Power
Required
+11 to +25 VDC per (< 4 watts)
+15 to +24 VDC (< 4 watts)
+24 VDC (< 5 watts)
+15 to +24 VDC (< 4 watts)
5 pin micro connnector
9 pin Type D male
9 pin Type D male (power)
2 x RJ-45 (comm.) male,
Connector
(power and comm.)
(power and comm.)
9 pin Type D female (comm.) M8 male, 5 pin (power)
Data Rate
4 positions: 125, 250, No switch
No switch
No switch
Switch/ Selection
500K (Default),
Set Data Rate via RS485 Set Data Rate via Profibus
(programmable
over network)
Comm. Rate(s)
125 Kbps
9.6 Kbps
9.6 Kbps to 12 Mbps
100 Mbps
250 Kbps
19.2 Kbps
500 Kbps
38.4 Kbps
MAC ID 2 switches, 10 positions; Switches/Addresses 0,0 to 6,3
1 to 254
Set address over RS485 2 switches, 10 positions Station Addresses
0,0 to 9,9
3 switches, 16 positions
Network Size
Up to 32 nodes
Up to 4095 nodes
Up to 64 nodes
Up to 99 nodes
Visual
LED Network (green/red) LED Comm (yellow)
LED Comm (green/red)
Indicators
LED Module (green/red)
LED Error (red)
LED Error (green/red)
LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)
Dimensional Drawing
Dimensional Drawing — DeviceNet and RS485 with VCR fittings*
*(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced).
Ordering Information
Ordering Code Example: GE50A013502R6V020
Code
Configuration
GE50A
Type MFC Mass Flow Controller GE50A
GE50A
Gas (Per Semi Standard E52-0703)
For example:
013 = Nitrogen = N2
013
013
029 = Ammonia = NH3
029
110 = Sulfur Hexafluoride = SF6
110
Flow Range Full Scale*
5 sccm
10 sccm
20 sccm
50 sccm
100 sccm
200 sccm
500 sccm
1000 sccm
2000 sccm
5000 sccm
10000 sccm
20000 sccm
30000 sccm
50000 sccm
500
101
201
501
102
202
502
502
103
203
503
104
204
304
504
Fittings (compatible with)
Swagelok 4 VCR male R
Swagelok 4 VCO male
G
1/4'' Swagelok
S
Swagelok 8 VCR male (for 10000 sccm N2 equivalent and above)
T
R
1/8'' Swagelok (for 1000 sccm N2 equivalent or below)
A
1/2'' Swagelok (for 10000 sccm N2 equivalent and above)
K
6 mm Swagelok
M
8 mm Swagelok
E
Connector
EtherCAT®
8
DeviceNet™
6
RS485 (uses 9 pin connector)
5
Profibus®
4
6
Analog 0 to 5 VDC (9 pin D connector)
A
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds
L
Analog 0 to 5 VDC (15 pin D connector)
B
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds
M
Analog 4 to 20 mA (15 pin D connector)
H
Seal Materials**
Viton
Buna-N
Neoprene
Kalrez
V
B
V
N
K
Valve Type
Normally Closed
Normally Open
Firmware
Unless otherwise specified, MKS will ship firmware revision current to date.
0
0
P
20
20
* The Full Scale Flowrate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten.
Example Flowrate code:
254 is 2.5 x 104 or 25000 sccm
153 is 1.5 x 103 or 1500 sccm
601 is 6.0 x 101 or 60 sccm
** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.
GE50 - 11/15
© 2012 MKS Instruments, Inc.
All rights reserved.
MKS Instruments, Inc.
Global Headquarters
MKS Instruments, Inc.
Flow Solutions
2 Tech Drive, Suite 201
Andover, MA 01810
Six Shattuck Road
Andover, MA 01810
Tel:978.645.5500
Tel: 800.227.8766 (in U.S.A.)
Web:www.mksinst.com
Tel:978.975.2350
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton®, Neoprene®, and Kalrez® are registered trademarks of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership,
Elgin, IL. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus International, Karlsruhe, Germany. EtherCAT® is a registered trademark of EtherCAT Technology Group,
Nuremberg, Germany.
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