W W W . M K S I N S T . C O M Flow Solutions Type GE50A ELASTOMER SEALED, DIGITAL MASS FLOW CONTROLLER The GE50A is a general purpose, elastomer sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N2 equivalent. The GE50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GE50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of setpoint accuracy on the calibration gas. The GE50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GE50As include Modbus as an available secondary I/O. The GE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations. The design of the GE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GE50A comes standard with Viton® seals along with options for Buna, Neoprene® or Kalrez® allowing for the device’s use with gases requiring one of these alternatives. The GE50A MFC is available with either a normally closed or a normally open valve. Features & Benefits • Patented thermal sensor design provides exceptional zero stability • Percent of setpoint accuracy (calibration gas) enables precise process control • Embedded user interface provides the ability to - Easily change device range and user gas reducing inventory requirements - Monitor device functionality and collect performance data in-situ US Patent No 5461913. • Wide choice of digital (EtherCAT, DeviceNet, Profibus, & RS485) or analog (0 to 5 VDC or 4 to 20 mA) I/O • CE Mark and RoHS Compliance – meeting requirements for the European Union Performance Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm Maximum Inlet Pressure 150 psig (can not exceed pressure differential requirement across MFC) Normal Operating Pressure Differential (N2 F.S.)10 to 5000 sccm; 10 to 40 psid (with atmospheric pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid Proof Pressure 1000 psig Burst Pressure 1500 psig Control Range 2% to 100% of F.S. (range on mech.) Typical Accuracy (with N2 calibration gas) ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S. Repeatability ± 0.3% of Reading Resolution 0.1% of Full Scale Temperature Coefficients Zero < 0.05% of F.S./°C Span < 0.08% of Rdg./°C Inlet Pressure Coefficient < 0.02% of Rdg./psi Warm-up Time < 30 min (to within 0.2% of F.S. of steady state performance) Typical Controller Settling Time < 750 msec., typical above 5% F.S. (per SEMI Guideline E-17-0600) Operating Temperature Range (Ambient) 10°C to 50°C Storage Humidity 0 to 95% Relative Humidity, non-condensing Storage Temperature -20° to 80°C (-4° to 149° F) Mechanical Fittings (compatible with) Swagelok® 4 VCR® male, Swagelok VCO® male, 1/4'' Swagelok compression seal, Swagelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Swagelok, 8 mm Swagelok Leak Integrity External (scc/sec He) < 1 x 10-09 Through closed valve Up to 10K valve <0.1% of FS at 40 psig to atmosphere 20K - 50K valve <1.0% of FS at 40 psig to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.) Wetted Materials Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel Seals and Valve Seat Viton, Buna-N, Neoprene, Kalrez Surface Finish 16µ inch average Ra Weight less than 3 lbs (1.4kg) Electrical Analog I/O CE Compliant to EMC Directive 2004/108/EC Input Power Required Flow Input/Output Signal Voltage (0 to 5 VDC) Current (4 to 20 mA) +15 to +24 VDC @ (< 4 watts) 15 pin Type ''D'' male, 9 pin Type ''D'' male 15 pin Type ''D'' male Specifications (cont’d) Digital I/O CE Compliant to EMC Directive 2004/108/EC Digital I/O DeviceNet™RS-485 Profibus® EtherCAT® Input Power Required +11 to +25 VDC per (< 4 watts) +15 to +24 VDC (< 4 watts) +24 VDC (< 5 watts) +15 to +24 VDC (< 4 watts) 5 pin micro connnector 9 pin Type D male 9 pin Type D male (power) 2 x RJ-45 (comm.) male, Connector (power and comm.) (power and comm.) 9 pin Type D female (comm.) M8 male, 5 pin (power) Data Rate 4 positions: 125, 250, No switch No switch No switch Switch/ Selection 500K (Default), Set Data Rate via RS485 Set Data Rate via Profibus (programmable over network) Comm. Rate(s) 125 Kbps 9.6 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 250 Kbps 19.2 Kbps 500 Kbps 38.4 Kbps MAC ID 2 switches, 10 positions; Switches/Addresses 0,0 to 6,3 1 to 254 Set address over RS485 2 switches, 10 positions Station Addresses 0,0 to 9,9 3 switches, 16 positions Network Size Up to 32 nodes Up to 4095 nodes Up to 64 nodes Up to 99 nodes Visual LED Network (green/red) LED Comm (yellow) LED Comm (green/red) Indicators LED Module (green/red) LED Error (red) LED Error (green/red) LED Power (green) LED Run (green) LED Error (red) LED Comm (green) Dimensional Drawing Dimensional Drawing — DeviceNet and RS485 with VCR fittings* *(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced). Ordering Information Ordering Code Example: GE50A013502R6V020 Code Configuration GE50A Type MFC Mass Flow Controller GE50A GE50A Gas (Per Semi Standard E52-0703) For example: 013 = Nitrogen = N2 013 013 029 = Ammonia = NH3 029 110 = Sulfur Hexafluoride = SF6 110 Flow Range Full Scale* 5 sccm 10 sccm 20 sccm 50 sccm 100 sccm 200 sccm 500 sccm 1000 sccm 2000 sccm 5000 sccm 10000 sccm 20000 sccm 30000 sccm 50000 sccm 500 101 201 501 102 202 502 502 103 203 503 104 204 304 504 Fittings (compatible with) Swagelok 4 VCR male R Swagelok 4 VCO male G 1/4'' Swagelok S Swagelok 8 VCR male (for 10000 sccm N2 equivalent and above) T R 1/8'' Swagelok (for 1000 sccm N2 equivalent or below) A 1/2'' Swagelok (for 10000 sccm N2 equivalent and above) K 6 mm Swagelok M 8 mm Swagelok E Connector EtherCAT® 8 DeviceNet™ 6 RS485 (uses 9 pin connector) 5 Profibus® 4 6 Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds L Analog 0 to 5 VDC (15 pin D connector) B Analog 0 to 5 VDC (15 pin D connector), Tied Grounds M Analog 4 to 20 mA (15 pin D connector) H Seal Materials** Viton Buna-N Neoprene Kalrez V B V N K Valve Type Normally Closed Normally Open Firmware Unless otherwise specified, MKS will ship firmware revision current to date. 0 0 P 20 20 * The Full Scale Flowrate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example Flowrate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm ** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas. GE50 - 11/15 © 2012 MKS Instruments, Inc. All rights reserved. MKS Instruments, Inc. Global Headquarters MKS Instruments, Inc. Flow Solutions 2 Tech Drive, Suite 201 Andover, MA 01810 Six Shattuck Road Andover, MA 01810 Tel:978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web:www.mksinst.com Tel:978.975.2350 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton®, Neoprene®, and Kalrez® are registered trademarks of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus International, Karlsruhe, Germany. EtherCAT® is a registered trademark of EtherCAT Technology Group, Nuremberg, Germany.