13818052251816

13818052251816
MS52XX-C&T
SMD Pressure Sensor
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1, 4, and 7 bar absolute pressure range
Piezoresistive silicon micromachined sensor
Surface mount 6.2 x 6.4 mm
LCP plastic cap for easy connection
Uncompensated
Optional trimmed offset
Low noise, high sensitivity, high linearity
DESCRIPTION
The MS52xxC&T SMD pressure sensor series is designed for industrial pressure sensor systems with highest
demands on resolution, accuracy and reliability. The device consists of a silicon micromachined pressure sensor
die mounted on a 6.2 x 6.4 mm ceramic carrier protected by a plastic cap. The MS2xxC&T SMD can be
delivered with many different sensitivities and linearities. When you have a need, please feel free to ask us.
Untrimmed offset
Full scale pressure
1 bar
4 bar
7 bar
Product code
MS5201-CP
MS5204-CP
MS5207-CP
Trimmed offset
Full scale
span
240 mV
225 mV
392 mV
FEATURES
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Low cost SMD ceramic package
Small size
High reliability, low drift
-40 °C to +125 °C operation range
Trimmed offset available
Simple to interface with nozzle port
DA52xxCT_004
0052xxCT1642 ECN1873
Linearity
Product code
±0.15 % FS
±0.15 % FS
±0.15 % FS
MS5201-TP
MS5204-TP
Full scale
span
On request
225 mV
Offset at
1013 mbar
On request
17 mV
APPLICATIONS
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Absolute pressure sensor systems
High resolution altimeters, variometers
Barometers
Engine controls
Industrial applications
Pressure monitoring systems
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MS52XX-C&T
SMD Pressure Sensor
PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
PIN DESCRIPTION
Pin Name
OUTGND
VS+
OUT+
Pin No
1
2
3
4
Function
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure MS5201-CP
MS5204-TP
MS5207-CP
Symbol
VS+
TS
Conditions
Ta = 25 °C
P
Ta = 25 °C
Min
-40
Max
20
+125
5
21
21
Unit
V
°C
Notes
bar
1
NOTES
1) The MS52xx-C&T is aimed for air pressure applications. There is no gel protection on the silicon
sensing element.
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MS52XX-C&T
SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS
UNTRIMMED VERSIONS
MS5201-CP
MS5207-CP
All ranges
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
190
190
0
322
46
-40
-40
3.0
+2'400
-1'500
-80
Typ
240
240
±0.15
392
56
±0.15
0
0.3
3.4
2'900
-1'900
-
Max
1
290
290
±0.4
7
462
66
±0.4
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
Bar
mV
mV/bar
% FS
1, 6
Bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating
pressure range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
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MS52XX-C&T
SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS (CONT.)
TRIMMED VERSION
MS5204-TP
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Pressure offset at 1013 mbar
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
200
-40
15
3.0
+2'400
-1'500
-80
Typ
225
56
±0.15
17
0.3
3.4
2'900
-1'900
-
Max
4
250
±0.4
125
19
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
Bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating
pressure range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
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MS52XX-C&T
SMD Pressure Sensor
APPLICATION INFORMATION
GENERAL
The MS52xxC&T is a miniaturized absolute pressure sensor series which has been designed for surface
mounting applications. Its main advantages are the high reliability of the semiconductor sensor and a design
which makes it suitable for applications requiring small-scale and cost-efficient solutions.
The sensor element of the MS52xxC&T consists of a micromachined silicone membrane with borosilicate glass
wafer-bonded under vacuum to the backside for reference pressure. Implanted resistors make use of the piezoresistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing
best-offset stability making the part suitable for direct PCB assembly.
Typical applications for this miniaturized pressure sensor MS52xxC&T are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive
and household applications, consumer electronics and pneumatics.
Full scale
pressure
1 bar
Untrimmed Versions
Variometer, Altimeter, Barometer
4 bar
7 bar
Electronic scale
Trimmed Versions
Engine control, Industrial Applications, Pressure
monitoring systems
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LIGHT SENSITIVITY
The MS52xxC&T is sensitive to sunlight, especially to infrared light sources. This is due to the strong photo
effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final
product the sensor cannot be exposed to direct light during operation. This can be achieved for instance by
placing mechanical parts with holes in such that light cannot pass.
CONNECTION TO PCB
The package outline of the module allows the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS52xxC&T ceramic substrate with glue or Globtop-like
material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS54XX has been manufactured under cleanroom conditions. Each device has been inspected for
cleanness. It is therefore recommended to assemble the sensor under class 10’000 or better conditions. Should
this not be possible, it is recommended to protect the sensor opening during assembly from entering particles
and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” shall be used. Cleaning might damage
the sensor.
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MS52XX-C&T
SMD Pressure Sensor
RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS52xx on a printed circuit board
PACKAGE OUTLINES
Fig. 1: Device package outlines of MS52xx-C&T
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MS52XX-C&T
SMD Pressure Sensor
ORDERING INFORMATION
Product code
MS5201-CP
MS5204-TP
MS5207-CP
Product
SMD Pressure sensor, 1 bar, untrimmed
SMD Pressure sensor, 4 bar, trimmed
SMD Pressure sensor, 7 bar, untrimmed
Art. No
325201004-00
325204000-00
325207000-00
FACTORY CONTACT
NORTH AMERICA
Measurement Specialties
45738 Northport Loop West
Fremont, CA 94538
Tel: +1 800 767 1888
Fax: +1 510 498 1578
e-mail: pfg.cs.amer chameasspec.com
Website: www.meas-spec.com
EUROPE
MEAS Switzerland Sàrl
Ch. Chapons-des-Prés 11
CH-2022 Bevaix
Tel: +41 32 847 9550
Fax: + 41 32 847 9569
e-mail: sales.chameas-spec.com
Website: www.meas-spec.com
ASIA
Measurement Specialties (China), Ltd.
No. 26 Langshan Road
Shenzhen High-Tech Park (North)
Nanshan District, Shenzhen, 518057
China
Tel: +86 755 3330 5088
Fax: +86 755 3330 5099
e-mail: pfg.cs.asiaameas-spec.com
Website: www.meas-spec.com
The information in this sheet has been carefully reviewed and is believed to be accurate; however, no responsibility is assumed for
inaccuracies. Furthermore, this information does not convey to the purchaser of such devices any license under the patent rights to the
manufacturer. Measurement Specialties, Inc. reserves the right to make changes without further notice to any product herein. Measurement
Specialties, Inc. makes no warranty, representation or guarantee regarding the suitability of its product for any particular purpose, nor does
Measurement Specialties, Inc. assume any liability arising out of the application or use of any product or circuit and specifically disclaims
any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different
applications. All operating parameters must be validated for each customer application by customer’s technical experts. Measurement
Specialties, Inc. does not convey any license under its patent rights nor the rights of others.
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