Oil Diffusion Pumps (англ.)

Oil Diffusion Pumps (англ.)
174.01.02
Excerpt from the
Leybold Vacuum Full Line Catalog 2005
Product Section C11
Edition May 2005
C11
DIP
Oil Diffusion Pumps
3000 - 50000 l x s-1
Oils, Baffles, Accessories,
Adsorption Traps
vacuum
Back to Contents
Oil Diffusion Pumps
Contents
General
Operating Principle of Fluid Entrainment Vacuum Pumps . . . . . . . . . C11.03
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C11.03
General, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.04
Attainable Ultimate Pressures with Oil Diffusion Pumps . . . . . . . . . . C11.05
Pump Fluids for Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.06
Overwiew Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.07
Products
DIP Pumps, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.08
Accessories
Astrotorus Baffles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.12
Monitoring Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.14
Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . C11.16
C11 2
Leybold Vacuum Full Line Catalog 2005
Back to Contents
General
Oil Diffusion Pumps
Operating Principle of Fluid
Entrainment Vacuum Pumps
The main components of diffusion
pumps, the operation of which relies
on vapor-phase pump fluids are:
■ Cooled pump body with intake
and exhaust ports
■ System of nozzles
■ Pump boiler
In the case of diffusion pumps a
pump fluid contained in a boiler is
heated to such an extent that it is
vaporized. The vapor is then forced
through nozzles within the pump. The
nozzles are generally designed in
such a way, that they accelerate the
vapor to a speed exceeding the
speed of sound (Laval nozzles), thus
creating a high speed vapor jet. The
vapor is then deflected by the
nozzles at a specific angle onto the
pump body. The pump body is
cooled, so that the vaporized pump
fluid condenses and is returned
back to the boiler as a liquid. The
pumping action of diffusion pumps
and fluid entrainment pumps in
general is based on the transporting
capacity of the vapor jet.
The gas which is to be pumped is
compressed sufficiently at the forevacuum port so that it can be
pumped out by a backing pump.
00
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IP
D
IP
50
30
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D
IP
D
IP
D
IP
20
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12
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IP
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Applications and Accessories
Application
Vacuumcoating
■
■
■
■
■
■
Research and development
■
■
■
■
■
■
Metallurgy/furnaces
■
■
■
■
■
■
Mechanical engineering
■
■
■
■
■
■
Accessories
Page
Pump fluids
C11.06
■
■
■
■
■
■
Astrotorus baffle
C11.12
■
■
■
■
■
■
Water flow monitor
C11.14
■
■
■
■
■
■
Over-temperature protection switch
C11.15
■
■
■
■
■
■
Contact thermometer
C11.15
■
■
■
■
■
■
Resistance thermometer Pt 100
C11.15
■
■
■
■
■
■
Adsorption trap
C11.16
For generating an oil-free vacuum with oil-sealed backing pumps
3 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
General
General
Diffusion Pumps
Compared to other fluid entrainment
pumps the density of the vapor in the
boiler and in the vapor jet is fairly low
so that the gas molecules may almost
completely diffuse into the vapor jet.
Thus most of the molecules which
enter the vapor jet are also pumped
out.
For this reason, the pumping speed
of diffusion pumps is extremely high
with respect to the in-take area and
constant – starting at an inlet
pressure of approximately 10-3 mbar
(0.75 x 10-3 Torr) down to very low
pressures – as within the pressure
range the vapor jet is not influenced
in any way by the pressure within the
vacuum vessel.
HM
VM 2
BV
4
5
3
6
VM 1
2
7
1
1
2
3
4
5
6
7
HM
VM1
VM2
BV
Operating
Oil Diffusion Pumps
Forevacuum
In all cases diffusion pumps require a
sufficiently sized backing pump (see
Technical Data). The size and type of
forevacuum pump depends on the
operating conditions and the
quantities of gas which are to be
pumped.
1. Continuous operation at operating
pressures above 10-4 mbar
(0.75 x 10-4 Torr) – large
quantities of gas.
2. Continuous operation at operating
pressures below 10-4 mbar
(0.75 x 10-4 Torr) – smaller
quantities of gas.
In applications which rely on diffusion
pumps, the vacuum chamber must
be connected via a valve (3) and a
roughing line directly to the backing
pump. This is done so that the
vacuum chamber may be preevacuated by the backing pump
down to a pressure where the
diffusion pump can take over. Until
the high vacuum valve (4) opens,
both diffusion pump and pump fluid
are preserved. Before venting the
vacuum chamber the forevacuum
valve (2) and the high vacuum valve
(4) must be closed, whereby the
diffusion pump remains in the ready
status.
Pumping Speed
The pumping speed of any pump is
equivalent to the volume throughput
through the intake opening of a
pump. In the case of diffusion pumps
the pumping speed for lighter gases
is higher compared to heavier gases.
Backstreaming of the
Pump Fluid
Undesirable backstreaming of
molecules from the pump fluid is
caused by the effect that some
molecules are able to leave the vapor
jet and thus do not arrive at the
cooled pump body. Because of
collisions between each other and
due to reflection at the pump body,
these molecules are then able to
move in the direction of the vacuum
chamber.
For DIP pumps the backstreaming
effect amounts only to a few µg
per cm2 of intake area per minute.
Backstreaming may be almost
completely suppressed by including
a cold cap baffle or an additional
Astrotorus baffle.
Backstreaming of Oil in
the Case of Diffusion
Pumps
■ Pump without baffle
approx. 1 x 10-2 mg x cm-2 x min-1
■ Pump with cold cap baffle
approx. 1 x 10-3 mg x cm-2 x min-1
Two-stage rotary vane vacuum pump
Forevacuum valve
Rough vacuum valve
High vacuum valve
Baffle
Oil diffusion pump
Adsorption trap
High vacuum gauge
Forevacuum gauge/diffusion pump
Forevacuum gauge/roughing line
Venting valve
■ Pump with Astrotorus baffle
(T = 10 °C (50 °F))
approx. 1 x 10-5 mg x cm-2 x min-1
The values stated were measured at
the ultimate pressure and apply to
DIFFELEN normal. When using
DC 705 the values may improve on
average by one order of magnitude.
Diagram of a pump system with diffusion pump
C11 4
Leybold Vacuum Full Line Catalog 2005
Back to Contents
General
Oil Diffusion Pumps
Attainable Ultimate
Pressure
The attainable ultimate pressure for a
particular vacuum system depends
not only on the type and pumping
speed rating of the diffusion pump,
but also on the vapor pressure of the
pump fluid, shape and temperature
of the baffle, leaks at connecting
flanges or welded joints and the
condition of the surfaces within the
vacuum chamber. When excluding all
effects which contribute to an
increase in pressure within the
vacuum chamber due to leaks and
contamination of the vacuum
chamber walls, it will be possible to
attain the ultimate pressures stated in
the table “Attainable Ultimate
Pressures with Oil Diffusion Pumps
(DIP)” given in section “General”.
■ Water-cooled cold cap baffle as a
integral part of the diffusion pump
together with a water-cooled
Astrotorus baffle which may be
installed as an additional
component on the high vacuum
flange of the diffusion pump.
In practice the following combination
has been found to work very well
when needing a low vacuum free of
oil vapors.
Sealing Methods
Cooling
For ultimate pressures down to
10-8 mbar (0.75 x 10-8 Torr) bakeout
temperatures of up to 150 °C (302 °F)
are sufficient. FPM (FPM = Fluor
caoutchouc, temperature resistant up
to 150 °C (302 °F)) sealing rings or
ultra sealing rings made of aluminum
must be used.
In order to prevent pressure
variations, ultra sealing rings must be
used in the connections, between
diffusion pump and baffle.
10-8
Ultimate pressures below
mbar
(0.75 x 10-8 Torr) require bakeout
temperatures up to 400 °C (752 °F).
However, it is only necessary to bake
out the vacuum chamber to 400 °C
(752 °F) and to maintain a temperature gradient across the baffle or the
cold trap so that a temperature of
150 °C (302 °F) is not exceeded at
the intake flange of the pump.
In this way, it is still acceptable to use
FPM sealing rings or ultra sealing
rings made of aluminium.
The cooling water temperature
should not exceed 25 °C (77 °F) at
the intake and 30 °C (86 °F) at the
discharge, otherwise sufficient
condensation of the pump fluid cannot be ensured. When connecting the
cooling system of the pump and the
baffle in series, the cooling water
must always be made to flow through
the baffle first and then through the
diffusion pump, because the
attainable ultimate pressure in the
vacuum chamber depends strongly
on the condensation temperature of
the pump fluid in the baffle.
Attainable Ultimate Pressures with Oil Diffusion Pumps DIP
Attainable Ultimate
Pressure 1)
DIFFELEN
normal
(or DC 704)
DIFFELEN
ultra
DC 705
Polyphenylether
ULTRALEN
6 x 10-7 (4.5 x 10-7)
4.0 x 10-7 (3.0 x 10-7)
4.0 x 10-7 (3.0 x 10-7)
Without baffle
mbar (Torr) 1.5 x 10-6 (1.1 x 10-6)
With cold cap baffle
mbar (Torr)
With Astrotorus baffle
mbar (Torr) 1.5 x 10-7 (1.1 x 10-7) 3.0 x 10-8 (2.3 x 10-8)
1)
5 x 10-7 (3.8 x 10-7)
3.0 x 10-7 (2.3 x 10-7)
1.5 x 10-7 (1.1 x 10-7) 1.0 x 10-7 (0.75 x 10-7)
1.5 x 10-8 (1.1 x 10-8)
1.5 x 10-8 (1.1 x 10-8)
Attained in consideration of the notes given under “Sealing Methods” in the section “General” and after degassing the connected vacuum chamber for several
hours at 200 °C (392 °F)
5 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
General
Pump Fluids for
Diffusion Pumps
Mineral Oil Pump Fluid
DIFFELEN
Pump fluids for oil diffusion pumps
must exhibit a low vapor pressure at
room temperature and must be able
to resist thermal decomposition and
oxidization to a large extent. Surface
tension of the pump fluids must be
high to reduce creep of oil films. They
must be chemically inert, exhibit high
flash point and evaporation heat must
be low. Moreover, the pump fluids
should permit high pumping speeds
over a wide range of pressures and
be cost-effective.
The various types of this kind of
pump fluid are closely toleranced
fractions of a high quality base
product distilled with particular care.
During the distillation process the
pressure and temperature conditions
are maintained continuously within
close limits, so that individual
fractions are obtained which are of
consistent quality.
One type of pump fluid alone cannot
meet these comprehensive requirements. It is therefore required to
select a pump fluid according to the
operating pressure and the requirements of the application in each
case.
The pump fluids given below are
subjected to an extensive series of
tests in our factory laboratories under
conditions commonly encountered in
practice by diffusion pumps.
We recommend the use of the pump
fluids specifically qualified by
Leybold, since only this will ensure
that the specifications will be met by
our diffusion pumps in practice.
Equally we recommend the use of
qualified pump fluids to attain the
optimum oil change intervals and
prevent the accumulation of
unwanted deposits.
■ DIFFELEN normal is the most
frequently used pump fluid. It is
the ideal pump fluid for high
vacuum applications. The
attainable ultimate pressure is
below 10-7 mbar (0.75 x 10-7 Torr).
■ DIFFELEN ultra is used in
connection with ultrahigh vacuum
pump systems. With a watercooled baffle the attainable
ultimate pressure is about
10-8 mbar (0.75 x 10-8 Torr).
Polyphenylether
Silicone Oil
Silicone oil differs from DIFFELEN oil
in that silicone oil is a defined
chemical compound which is
extremely resistant to decomposition.
Because of the extremely low vapor
pressure, silicone oil is especially
well suited as a pump fluid in
diffusion pumps. Even after a great
number of air inrushes, silicone oil
will remain unaffected by aging even
when subjected to mass spectrometric analysis.
DC 704 is a pump fluid for high
vacuum and ultra high vacuum
applications with stringent requirements concerning resistance against
oxidization and decomposition.
DC 705 is a special pump fluid (an
organic silicon compound) for ultrahigh vacuum applications which
require an extremely low vapor
pressure together with stringent
requirements concerning resistance
against oxidization and decomposition.
ULTRALEN is a high-quality pump
fluid based on a polyphenylether for
operation in the high vacuum range.
It excels through its very high
resistance against oxidation, thermal
decomposition and chemical attack,
and exhibits an exceptionally low
vapour pressure.
Material safety data sheets are available upon request for professional users from:
Email „safety-data@leyboldvac.de“ or from the Internet „www.leybold.com/safety-data“.
C11 6
Leybold Vacuum Full Line Catalog 2005
Back to Contents
General
Oil Diffusion Pumps
Overview Pump Fluids
Mineral Oil/DIFFELEN
Technical Data
Vapor pressure at 20 °C (68 °F)
normal
mbar (Torr)
4x
10-9
(3 x
ultra
10-9)
4x
10-11
(3 x 10-11)
Middle molecular weight
g/mol
510
600
Flash point
°C (°F)
> 258 (> 496)
> 270 (> 518)
Dyn. viscosity at 25 °C (77 °F)
mPas
200
220
Kin. viscosity at 40 °C (104 °F)
mm2/s
100
110
g/ml
0.87
0.87
Density at 20 °C (68 °F)
Mineral Oil/DIFFELEN
Ordering Information
normal
ultra
0.5 l (0.47 qts)
Part No. 176 73
Part No. 176 71
5.0 l (4.7 qts)
Part No. 176 72
–
Silicone Oil
Technical Data
Vapor pressure at 20 °C (68 °F)
mbar (Torr)
DC 704
DC 705
Polyphenylether
ULTRALEN
3 x 10-8 (2.8 x 10-8)
4 x 10-10 (3 x 10-10)
3 x 10-10 (2.3 x 10-10)
Middle molecular weight
g/mol
485
545
450
Flash point
°C (°F)
221 (430)
243 (469)
288 (611)
Dyn. viscosity at 25 °C (77 °F)
mPas
47
190
2900
Kin. viscosity at 40 °C (104 °F)
mm2/s
24
66
370
1.07 1)
1.09 1)
1.20
Density at 20 °C (68 °F)
Ordering Information
0.05 l (0.047 qts)
g/ml
Silicone Oil
DC 704
DC 705
Polyphenylether
ULTRALEN
–
–
Part No. 155 72
Part No. 176 96
–
5.0 l (4.7 qts)
Part No. 500 600
2)
–
–
1.0 gal (DC 704 CA)
Part No. 981 98 069
–
–
5.0 gal (DC 704 CP)
Part No. 981 98 070
–
–
0.5 l (0.47 qts)
1)
At 25 °C (77 °F)
2)
5 kg (11.4 lbs)
Part No. 176 94
Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data given here can not be taken as assured data
7 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
3000 - 50 000 l · s-1
Oil Diffusion Pumps
DIP Pumps, Water-Cooled
The DIP range of pumps was
developed for operation in industrial
systems. Excellent vacuum performance data combined with the
inherent ruggedness of this kind of
pump, make our diffusion pumps
pumps a reliable component in high
and medium vacuum applications.
DIP 12 000
Advantages to the User
■ High pumping speeds in the fine
and high vacuum ranges
■ Low attainable ultimate pressure
■ Integrated, water-cooled cold cap
baffle guarantees low oil backstreaming rates into the vacuum
chamber
■ Low oil losses (even at high gas
throughputs) by integrated watercooled forevacuum baffle
■ High forevacuum resistance even
at reduced heating power
■ The heating cartridges are
accessible from the outside via
heating inserts which are built into
the boiler. This ensures a quick
exchange of single heating
cartridges (even when the pump is
hot)
■ A separate automatic circuit
breaker for each heating cartridge
ensures a high level of electrical
safety
Typical Applications
■ A standard built-in thermostat acts
as an thermal overload switch and
ensures that the heating cartridges
can not overheat
■ All pumps are prepared for installation with an over-temperature
switch (optional) for checking the
cooling water circuit, and a
contact thermometer (optional) to
monitor the operating temperature
of the diffusion pump
■ Indication of the oil level by sightglass permits simple checking of
the current oil level
■ All DIP pumps are delivered with
their inside chamber cleaned in
such a manner that it is free of oil.
The inside is evacuated. In the
condition as delivered, the pumps
may be also operated with silicone
oil
C11 8
The diffusion pumps from the DIP
range are used in coating systems,
vacuum melting and drying systems
as well as in vacuum furnaces in the
area of metallurgy.
Supplied Equipment
The DIP pumps are supplied ready
for connection but without the filling
of pump fluid.
The inside of the pump is cleaned
before delivery to such an extent that
it is free of oil. The inside is
evacuated. High and forevacuum
flanges are equipped with gaskets
and centering rings having shipping
flanges and complete with clamping
components.
Leybold Vacuum Full Line Catalog 2005
Back to Contents
3000 - 50 000 l · s-1
d
d1
Oil Diffusion Pumps
d
d1
DN
d
d1
DN
h2 h3
h2 h3
h1
h1
DN1
h
h
DN
h2 h3
h1
h
DN1
DN1
h4
h4
h4
d3
G1/4"
d2
d3
G3/8"
G3/8"
d4
G3/8"
d5
d4
a
1
d5
a
b
b
1
a1
G1/2"
b1
d2
d3
a1
G1/2"
b1
b
1
b1
a
DIP
DN
DN1
a
a1
b
b1
d
d1
d2
d3
d4
d5
Quantity
of holes
3 000
250 ISO-K
63 ISO-K
240 (9.45)
250.5 (9.86)
443 (17.44)
276 (10.87)
290 (11.42)
261 (10.28)
–
278 (10.94)
–
–
8 000
400 ISO-K
63 ISO-K
350 (13.78)
375.5 (14.78)
643 (25.31)
373 (14.69)
450 (17.72)
400 (15.75)
405 (15.94)
530 (20.87)
–
–
12 000
500 ISO-K
100 ISO-K
420 (16.54)
432 (17)
775 (30.51)
460 (18.11)
550 (21.65)
50119.72)
506 (19.92)
630 (24.80)
–
–
20 000
630 ISO-F
100 ISO-K
540 (21.26)
496 (19.53)
920 (36.22)
540 (21.26)
750 (29.53)
651 (25.63)
636 (25.04)
760 (29.92)
720 (28.35)
14 (0.55)
30 000
800 ISO-F
160 ISO-K
600 (23.62)
536 (21.10)
1090 (42.91)
630 (24.8)
920 (36.22)
800 (31.5)
716 (28.19)
840 (33.07)
890 (35.04)
14 (0.55)
50 000
1000 ISO-F
160 ISO-K
800 (31.5)
636 (25.04)
1290 (50.79)
730 (28.74)
1120 (44.09)
1000 (39.37)
916 (36.06)
1040 (40.94)
1090 (42.91)
14 (0.55)
–
–
–
20
24
32
h
h1
h2
h3
h4
a
a1
a2
a3
560 (22.05)
250 (9.84)
68 (2.68)
75 (2.95)
45 (1.77)
45 °
20 °
–
–
785 (30.91)
400 (15.75)
88 (3.46)
102 (4.02)
68 (2.68)
30 °
30 °
–
–
940 (37)
470 18.5)
92 (3.62)
106 (4.17)
68 (2.68)
30 °
30 °
–
–
1130 (44.49)
620 (24.41)
97 (3.82)
110 (4.33)
74 (2.91)
30 °
30 °
–
–
1450 (57.09)
870 (34.25)
102 (4.02)
116 (4.57)
70 (2.76)
20 °
30 °
–
–
1880 (74.02)
1275 (50.2)
102 (4.02)
116 (4.57)
70 (2.76)
25 °
45 °
25 °
15 °
d
d1
DN
h2 h 3
h1
h
DN 1
h4
L EY B O L D
d3
a
d2
d4
d5
G3/8"
3
b
2
1
a1
b1
G1/2"
Dimensional drawing for the DIP 3000 [top left], DIP 8000 to DIP 20 000 [top middle], DIP 30 000 [top right] and DIP 50 000 [bottom right];
Dimensions in brackets ( ) are in inch
10 5
DIP 50000
DIP 30000
DIP 20000
l x s-1
Pumping speed
DIP 12000
10 4
DIP 8000
DIP 3000
10 3
8
6
4
2
2
10
10 -6
2
4
6 8
10 -5
10 -4
10 -3
mbar
10 -2
Intake pressure
Pumping speed characteristics of the DIP pumps as a function of intake pressure
9 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
3000 - 50 000 l · s-1
Oil Diffusion Pumps
Technical Data
High vacuum/forevacuum connection
Pumping speed for air
below 1 x 10-4 mbar
DN
DIP 3 000
DIP 8 000
DIP 12 000
250 ISO-K/63 ISO-K
400 ISO-K/63 ISO-K
500 ISO-K/100 ISO-K
3 000
8 000
12 000
1)
l x s-1
<
to
(0.75 x 10-2 to 0.75 x 10-7)
<
to
(0.75 x 10-2 to 0.75 x 10-7)
< 10-2 to 10-7
(0.75 x 10-2 to 0.75 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
Max. permissible forevacuum pressure
mbar (Torr)
6 x 10-1 (4.5 x 10-1)
6 x 10-1 (4.5 x 10-1)
6 x 10-1 (4.5 x 10-1)
Pump fluid filling, min. / max.
1.0 / 1.4 (1.1 / 1.5)
1.7 / 3.4 (1.8 / 3.6)
2.4 / 5.3 (2.5 / 5.6)
230 ~ 1 Ph
230 ~ 1 Ph
–
400 ~ 3 Ph Y
460 ~ 3 Ph Y
230 ~ 3 Ph V
400 ~ 3 Ph Y
460 ~ 3 Ph Y
230 ~ 3 Ph V
2.4
4.8
7.2
2
6
9
< 25
< 25
< 25
160 (0.7)
20 (0.09)
6 (87)
290 (1.28)
30 (0.13)
6 (87)
500 (2.2)
50 (0.22)
6 (87)
2
2
2
Operating range
mbar
(Torr)
Ultimate total pressure 2)
mbar (Torr)
l (qts)
Mains connection
Standard EURO, 50/60 Hz
Standard Americas, 50/60 Hz
Special, 50/60 Hz
V
V
V
Heating power
kW
Number of heating cartridges
Heating up time
Cooling water (minimum)
for pump 3)
for cold cap baffle
Max. supply pressure
min
l x h-1 (gal/min)
l x h-1 (gal/min)
bar (psig)
Number of cooling circuits
(including cold cap baffle)
10-2
10-7
10-2
10-7
Cooling water connection
for pump
for cold cap baffle
G (BPS)
G (BPS)
3/8"
1/4"
1/2"
3/8"
1/2"
3/8"
Weight, approx.
kg (lbs)
29 (64)
70 (154)
102 (225)
TRIVAC D 65 B + W 251
DK 200 + W 251
DK 200 + W 501
TRIVAC D 25 B
TRIVAC D 65 B + W 251
TRIVAC D 65 B + W 251
DIP 3 000
DIP 8 000
DIP 12 000
Part No. 222 10
Part No. 222 10
–
Part No. 222 20
Part No. 500 670
Part No. 500 649
Part No. 222 25
Part No. 500 591
Part No. 500 651
Astrotorus baffle
Part No. 227 50
Part No. 227 60
Part No. 227 65
Water flow monitor
LR 10
LR 20
Part No. 122 82
–
Part No. 122 82
–
–
Part No. 122 83
Over-temperature protection switch
Part No. 122 84
Part No. 122 84
Part No. 122 84
Contact thermometer
Part No. 218 81
Part No. 218 81
Part No. 218 81
Part No. 200 02 958
Part No. 200 02 958
Part No. 200 02 958
Recommended backing pump 4)
at operating pressures
> 10-4 mbar (> 0.75 x 10-4 Torr)
at operating pressures
< 10-4 mbar (< 0.75 x 10-4 Torr)
Ordering Information
Oil diffusion pump
Standard EURO
Standard Americas
Special
Resistance thermometer Pt 100 sensor
Pump fluid
1)
2)
3)
4)
5)
5)
see “Pump Fluids for Diffusion Pumps” in section “General”
Measured to DIN 28 427 with DIFFELEN normal as the pump fluid
Measured to DIN 28 427 with DIFFELEN normal as the pump fluid. With pump fluids DC 705 and FPM gaskets the DIP pumps - when equipped with watercooled baffles and after running a suitable degassing processes - are capable of attaining pressures below 1 x 10-8 mbar (0.75 x 10-8 Torr)
The required quantity of cooling water refers to DT = 10 °C (50 °F). The discharge temperature should not exceed 30 °C (86 °F)
Single- or two-stage rotary vane (TRIVAC; SV) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with Roots vacuum pumps
(RUVAC) in pump systems
Oil must be puchased separately
C11 10
Leybold Vacuum Full Line Catalog 2005
Back to Contents
3000 - 50 000 l · s-1
Oil Diffusion Pumps
Technical Data
High vacuum/forevacuum connection
Pumping speed for air
below 1 x 10-4 mbar
DN
DIP 20 000
DIP 30 000
DIP 50 000
630 ISO-F/100 ISO-K
800 ISO-F/160 ISO-K
1000 ISO-F/160 ISO-K
20 000
30 000
50 000
1)
l x s-1
<
to
(0.75 x 10-2 to 0.75 x 10-7)
<
to
(0.75 x 10-2 to 0.75 x 10-7)
< 10-2 to 10-7
(0.75 x 10-2 to 0.75 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
< 5 x 10-7 (6.7 x 10-7)
Max. permissible forevacuum pressure
mbar (Torr)
6 x 10-1 (4.5 x 10-1)
6 x 10-1 (4.5 x 10-1)
6 x 10-1 (4.5 x 10-1)
Pump fluid filling, min. / max.
5.0 / 9.0 (5.3 / 9.5)
7.0 / 15.0 (7.4 / 15.9)
12.0 / 25.0 (12.7 / 26.4)
400 ~ 3 Ph Y
460 ~ 3 Ph Y
230 ~ 3 Ph ∆
400 ~ 3 Ph Y
460 ~ 3 Ph Y
230 ~ 3 Ph ∆
400 ~ 3 Ph Y
460 ~ 3 Ph Y
230 ~ 3 Ph ∆
12
18
24
12
18
24
< 25
< 30
< 30
600 (2.6)
60 (0.26)
6 (87)
900 (4.0)
80 (0.35)
6 (87)
1500 (6.6)
150 (0.66)
6 (87)
2
3
3
Operating range
mbar
(Torr)
Ultimate total pressure 2)
mbar (Torr)
l (qts)
Mains connection
Standard EURO, 50/60 Hz
Standard Americas, 50/60 Hz
Special, 50/60 Hz
V
V
V
Heating power
kW
Number of heating cartridges
Heating up time
Cooling water (minimum)
for pump 3)
for cold cap baffle
Max. supply pressure
min
l x h-1 (gal/min)
l x h-1 (gal/min)
bar (psig)
Number of cooling circuits
(including cold cap baffle)
10-2
10-7
10-2
10-7
Cooling water connection
for pump
for cold cap baffle
G (BPS)
G (BPS)
1/2"
3/8"
1/2"
3/8"
1/2"
3/8"
Weight, approx.
kg (lbs)
172 (379)
296 (653)
560 (1235)
SV 200 + W 501
SV 300 + W 1001
SV 630 + W 2001
TRIVAC D 65 B + W 251
DK 200 + W 251
DK 200 + W 501
DIP 20 000
DIP 30 000
DIP 50 000
Part No. 222 30
Part No. 500 882
Part No. 500 652
Part No. 222 35
Part No. 500 665
Part No. 500 653
Part No. 222 40
Part No. 500 728
Part No. 500 654
Astrotorus baffle
Part No. 227 70
Part No. 227 75
Part No. 227 80
Water flow monitor
LR 20
Part No. 122 83
Part No. 122 83
Part No. 122 83
Over-temperature protection switch
Part No. 122 84
Part No. 122 84
Part No. 122 84
Contact thermometer
Part No. 218 81
Part No. 218 81
Part No. 218 81
Part No. 200 02 958
Part No. 200 02 958
Part No. 200 02 958
Recommended backing pump 4)
at operating pressures
> 10-4 mbar (> 0.75 x 10-4 Torr)
at operating pressures
< 10-4 mbar (< 0.75 x 10-4 Torr)
Ordering Information
Oil diffusion pump
Standard EURO
Standard Americas
Special
Resistance thermometer Pt 100 sensor
Pump fluid 5)
1)
2)
3)
4)
5)
see “Pump Fluids for Diffusion Pumps” in section “General”
Measured to DIN 28 427 with DIFFELEN normal as the pump fluid
Measured to DIN 28 427 with DIFFELEN normal as the pump fluid. With pump fluids DC 705 and FPM gaskets the DIP pumps - when equipped with watercooled baffles and after running a suitable degassing processes - are capable of attaining pressures below 1 x 10-8 mbar (0.75 x 10-8 Torr)
The required quantity of cooling water refers to DT = 10 °C (50 °F). The discharge temperature should not exceed 30 °C (86 °F)
Single- or two-stage rotary vane (TRIVAC; SV) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with Roots vacuum pumps
(RUVAC) in pump systems
Oil must be puchased separately
11 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
Accessories
Astrotorus Baffles
The cooling inserts of the astrotorus
baffles are made of copper, whereas
the housing and the connection
flange are made of standard steel.
Section through an astrotorus baffle
DN
d
d1
DN
d
d1
DN
d2
24
h
140
h1
57
d2
a
Hose nozzle, 14 mm dia.
24
a
Hose nozzle, 14 mm dia.
250 ISO-K mm
in.
400 ISO-K mm
in.
500 ISO-K mm
in.
630 ISO-F mm
in.
800 ISO-F mm
in.
1000 ISO-F mm
in.
DN
b
30°
1
a
b
ød
265
10.4
362
14.25
412
16.22
440
17.32
546
21.5
599
23.58
30
0.18
120
4.72
120
4.72
–
–
–
–
–
–
416
16.4
512
20.2
612
24.1
750
29.53
920
36.22
1120
44.09
Quantity h
250 ISO-K mm
in.
400 ISO-K mm
in.
500 ISO-K mm
in.
630 ISO-F mm
in.
800 ISO-F mm
in.
1000 ISO-F mm
in.
–
–
–
20
20
24
24
32
32
h1
ø d1
ø d2
290
–
11.4
–
450
–
17.7
–
550
–
21.7
–
720
14
28.35 0.55
890
14
35.04 0.55
1090 14
42.91 0.55
a
a1
195
97
–
–
7.68 3.82
–
–
193
96
–
–
7.6 3.78
–
–
193
96
–
–
7.6 3.78
–
–
140
–
18 °
9°
5.5
–
18 °
9°
140
–
15 °
7,5 °
5.5
–
15 °
7,5 °
140
– 11.25 ° 5.625 °
5.5
– 11.25 ° 5.625 °
Dimensional drawing for the astrotorus baffle ISO-K (left) and ISO-F (right)
C11 12
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Accessories
Oil Diffusion Pumps
Technical Data
A s t ro t o r u s B a ff l e s
Connection to pump
DIP
3 000
8 000
12 000
HV connection flanges
DN
250 ISO-K
400 ISO-K
500 ISO-K
%
30
30
30
3 000
9 000
12 000
25 (55.2)
30 (66.2)
65 (143.5)
Throttling of the pumping speed,
approx.
Conductance
Weight
l x s-1
kg (lbs)
A s t ro t o r u s B a ff l e s
Ordering Information
Astrotorus baffle
0250 ISO-K
0400 ISO-K
0500 ISO-K
Part No. 227 50
–
–
–
Part No. 227 60
–
–
–
Part No. 227 65
A s t ro t o r u s B a ff l e s
Technical Data
Connection to pump
DIP
20 000
30 000
50 000
HV connection flanges
DN
630 ISO-F
800 ISO-F
1000 ISO-F
%
30
30
30
18 000
28 000
50 000
120 (264.9)
170 (375.3)
190 (419.4)
Throttling of the pumping speed,
approx.
Conductance
Weight
l x s-1
kg (lbs)
Ordering Information
Astrotorus baffle
0630 ISO-F
0800 ISO-F
1000 ISO-F
A s t ro t o r u s B a ff l e s
Part No. 227 70
–
–
–
Part No. 227 75
–
–
–
Part No. 227 80
13 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
Accessories
Monitoring Instruments
Protection against
Overheating
Water flow monitors are installed in
the cooling water return section of the
diffusion pump. When the cooling
water throughput drops below a
certain level, either the heater in the
diffusion pump is switched off or a
warning light or signal is triggered,
depending of the type of circuit.
Type LR 10
Type LR 20
for 60 to 600 l x h-1
(3.78 to 37.8 gal/min)
for 600 to 2400 l x h-1
(37.8 to 151.2 gal/min)
The water throughput may be set
within the limits stated with a high
degree of reproducibility.
Water flow monitors may be installed
in any orientation.
Max. switching capacity:
100 VA (230 V, 50/60 Hz).
a
M 12 x 1,5
R 3/4"
LR 10
LR 20
c1
c
l2
l1
a
M6 x 8
l3
a b
l
mm
in.
≈l
l1
l2
l3
b
c
c1
230
9.06
102 - 112
4.02 - 4.41
72
2.83
46
1.81
62
2.44
20
0.79
15
0.59
Dimensional drawing for the water flow monitors LR 10 and LR 20
Ordering Information
Water flow monitor
LR 10
LR 20
* Only LR 10
Water Flow Monitors
Part No. 122 82
Part No. 122 83
Protection against
Power Failure
A SECUVAC valve (see Product
Section C14 “Vacuum Valves”) must
be installed in the forevacuum line in
order to prevent damage to the
diffusion pump or the pump fluid in
the event of a power failure affecting
backing pumps which are not
equipped with an automatic isolation
valve. Rotary vane vacuum pumps
from the TRIVAC B Series are
equipped with an automatic safety
valve (intake isolation valve) as
standard.
Protection against
Pressure Increases in the
Forevacuum Line
For protection against a pressure
increase in the forevacuum line which
is not caused by a power failure you
may use our vacuum gauges which
offer an adjustable switching
threshold (see Product Section C16
“Total Pressure Gauges”).
C11 14
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Accessories
Temperature dependant
Switching Components for
Automatic Pump System
Control
The operational status of the diffusion
pump depends on the temperature of
the pump fluid in the pump boiler.
Through temperature dependent
switching components which are
inserted into the pump boiler it is
possible to monitor the operational
status of the diffusion pump and
signal its status to a process
controller.
Oil Diffusion Pumps
Contact thermometer with a range
from 0 to 400 °C (752 °F). Through a
trailing pointer two switching
thresholds may be set up
independently. The current oil
temperature and the thresholds
which have been set up can be read
off at the location of the diffusion
pump. The contacting thermometer is
not suited for remote signalling of
temperatures.
The lower threshold indicates that the
diffusion pump has cooled down to
such an extent that the backing
pump and the cooling water supply
may be switched off.
a1
b
a
200
For this, the diffusion pump requires
two thresholds.Depending on the
type of pump, the upper threshold
should be between 180 and 200 °C
(356 and 392 °F) and the lower
threshold between 90 and 100 °C
(194 and 212 °F).
The upper threshold indicates that
the diffusion pump is ready for
operation and thus actuates certain
devices, for example opening of the
high vacuum valve ahead of the
diffusion pump.
Resistance thermometer Pt 100
sensor. The measurement range of
this sensor depends on the
temperature display unit used by the
customer where also the required
thresholds are set up. The Pt 100
sensor is ideal for remote signalling
of temperatures.
150
250
100
300
50
350
0
400
a2
c
a3
30°
d2 d3
d1
d
l1
l
a
mm
in.
a1
95
3.74
a2
119.5 17.5
4.70 0.69
a3
b
c
ld
l d1
l d2
l d3
l
l1
62
2.44
101.5
4.00
92
3.62
14
0.55
12
0.47
9
0.35
G 1/2
G 1/2
170
6.70
33
1.30
Dimensional drawing for the contact thermometer
l3
d2
d
d3
d1
l1
Over-temperature protection
switches are used to monitor the
temperature of the cooling water in
the cooling water circuit of the
diffusion pumps. When the
temperature rises to unacceptably
high levels (for example when the
cooling water supply fails) the heater
in the diffusion pump is switched off
(correct electrical connection to the
main supply is required). The use of
over-temperature protection switches
avoids unnecessary alarms that may
be triggered by contaminated water
when only a water flow monitor is
used. The over-temperature protection switch is screwed on to a contact
plate which is soldered to the cooling
pipe on the pump’s body.
Max. switching current: 5 A (230 V,
50/60 Hz)
l4
l2
l
mm
in.
ld
l d1
l d2
l d3
l
l1
l2
l3
l4
12
0.47
6
0.24
G 1/2
G 1/2
22
0.87
230
9.06
115
4.53
170
6.69
25
0.98
30
1.18
Dimensional drawing for the resistance thermometer Pt 100 sensor
Ordering Information
Monitoring Instruments
Over-temperature protection switch
Part No. 122 84
Contact thermometer
(Measurement range 0 to 400 °C
(32 to 752 °F),
Rating at 220 V AC: 250 mA
[resistive load],
Part No. 218 81
Weight: 1.7 kg (3.7 lbs))
Resistance thermometer Pt 100 sensor
Part No. 200 02 958
15 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
Accessories
Adsorption Traps with Aluminum Oxide Insert
Adsorption traps are used in all those
cases where a vacuum free of oil is
to be produced with the aid of
oil-sealed vacuum pumps.
Adsorption trap (left) and inserts (right)
Advantages to the User
d
■ Backstreaming of oil is reduced
by 99 %
DN
■ Long service life
■ High conductance
h
a1
■ Filling can be easily exchanged
h1
■ Improvement in the ultimate
pressure attained by backing
pumps by one order of magnitude
a
DN
■ Stainless steel housing and insert
■ NBR gasket
Mass number
Typical Applications
■ Product of an oil-free vacuum
Supplied Equipment
Residual gas spectrum; top ahead of a rotary
vacuum pump, bottom ahead of a rotary vacuum
pump with adsorption trap
16 KF mm
in.
25 KF mm
in.
40 KF mm
in.
DN
a
a1
ød
82
3.23
102
4.02
132
5.19
82
3.23
102
4.02
65
2.56
135
5.31
175
6.89
235
9.25
h
h1
147 32
5.79 1.25
155 33
6.10 1.26
160 20
6.3 0.79
Dimensional drawing for the adsorption traps
■ Complete with insert
■ Without adsorbent
Adsorption Traps
Technical Data
16 KF
25 KF
40 KF
4 (3.0)
6 (4.5)
12 (9.0)
3
3
3
l (qts)
0.5 (0.53)
1.0 (1.06)
2.0 (2.1)
kg (lbs)
1.3 (2.9)
1.3 (2.9)
4.0 (8.8)
10-2
Conductance at
mbar (Torr)
mbar x l x s-1 (Torr x l x sec)
Service live with Al oxide
Al oxide filling
Weight, approx.
Months
Ordering Information
Adsorption Traps
16 KF
25 KF
40 KF
Adsorption trap
Part No. 854 14 Part No. 854 15 Part No. 854 16
Activated aluminum oxide, 2 l
(approx. 1.5 l (approx. 1.1 kg (2.4 lbs))
Part No. 854 10 Part No. 854 10 Part No. 854 10
C11 16
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Oil Diffusion Pumps
Notes
17 C11
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Sales and Service Net Worldwide
Germany
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-221-347 1234
Fax:
+49-221-347 1245
sales@leybold.com
Leybold Vacuum GmbH
Sales Area North/East
Branch office Berlin
Buschkrugallee 33
1. Obergeschoss
D-12359 Berlin
Phone: +49-30-435 609 0
Fax:
+49-30-435 609 10
sales.berlin@leybold.com
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch office Munic
Karl-Hammerschmidt-Strasse 38
D-85609 Aschheim/Dornach
Phone: +49-89-357 33 90
Fax:
+49-89-357 33 933
sales.muenchen@leybold.com
service.muenchen@leybold.com
Leybold Vacuum GmbH
Sales Area West
Branch office Cologne
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1270
Fax:
+49-221-347 1291
sales.koeln@leybold.com
Leybold Vacuum GmbH
Service Center
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1439
Fax:
+49-221-347 1945
service@leybold.com
Leybold Vacuum GmbH
Mobile after sales service
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1765
Fax:
+49-221-347 1944
kundendienst@leybold.com
Leybold Vacuum
Dresden GmbH
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-351-88 55 00
Fax:
+49-351-88 55 041
info@leybold-dresden.de
www.leybold-dresden.de
Europe
Belgium
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax:
+32-2-720 83 38
sales.belgium@leybold.com
Service:
Phone: +32-2-711 00 82
Fax:
+32-2-720 83 38
service.belgium@leybold.com
France
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. de Courtaboeuf, B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax:
+33-1-69 07 57 38
sales.france@leybold.com
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès - B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone: +33-4-75 82 33 00
Fax:
+33-4-75 82 92 69
marketing.valence@leybold.fr
Great Britain
Leybold Vacuum UK Ltd.
Waterside Way, Plough Lane
GB-London SW17 0HB
Sales:
Phone: +44-20-8971 7000
Fax:
+44-20-8971 7001
sales@leybold.com
Service:
Phone: +44-20-8971 7030
Fax:
+44-20-8971 7003
service@leybold.com
Italy
Leybold Vacuum Italia S.p.A.
8, Via Trasimeno
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax:
+39-02-27 20 96 41
sales@leybold.it
Service:
Phone: +39-02-27 22 31
Fax:
+39-02-27 20 96 41
service@leybold.it
Field Service Base
Z.I.Le Capanne
I-05021 Acquasparta (TR)
Phone: +39-0744-93 03 93
Fax:
+39-0744-94 42 87
service@leybold.it
Hotline
Sales: +49-221-347 1234
Service: +49-221-347 1765
Asia
Netherlands
P.R. China
Japan
Leybold Vacuum Nederland B.V.
Computerweg 7
NL-3542 DP Utrecht
Sales and Service:
Phone: +31-346-58 39 99
Fax:
+31-346-58 39 90
sales.netherlands@leybold.com
service.netherlands@leybold.com
Spain
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400, China
Sales and Service:
Phone: +86-22-2697 0808
Fax:
+86-22-2697 4061
Fax:
+86-22-2697 2017
leybold@leybold.com.cn
Leybold Vacuum
Japan Co., Ltd.
Head Office
Tobu A.K. Bldg. 4th Floor
23-3, Shin-Yokohama
3-chome
Kohoku-ku, Yokohama-shi
Kanagawa-ken 222-0033
Sales:
Phone: +81-45-4713330
Fax:
+81-45-4713323
Leybold Vacuum España S.A.
C/. Huelva, 7
E-08940 Cornella de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 46 16
Fax:
+34-93-666 43 70
sales.spain@leybold.com
Service:
Phone: +34-93-666 49 51
Fax:
+34-93-685 40 10
Leybold Vacuum (Tianjin)
Equipment Manufacturing Co., Ltd.
Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400, China
Phone: +86-22-2697 0808
Fax:
+86-22-2697 4061
Fax:
+86-22-2697 2017
leybold@leybold.com.cn
Leybold Vacuum
Japan Co., Ltd.
Osaka Branch Office
MURATA Bldg. 7F
2-7-53, Nihi-Miyahara
Yodogawa-ku
Osaka-shi 532-0004
Sales:
Phone: +81-6-6393-5211
Fax:
+81-6-6393-5215
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Chaoyang District
Beijing 100004, China
Sales and Service:
Phone: +86-10-6590-7607
Fax:
+86-10-6590-7622
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical S.C.
Tsukuba Minami Daiichi
Kogyo Danchi
21, Kasumi-no-Sato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298-89-2841
Fax:
+81-298-89-2838
Sweden
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax:
+46-31-68 39 39
info@leybold.se
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Switzerland
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-1-308 40 50
Fax:
+41-1-302 43 73
sales@leybold.ch
Service:
Phone: +41-1-308 40 62
Fax:
+41-1-308 40 60
America
USA
Leybold Vacuum USA Inc.
5700 Mellon Road
Export, PA 15632
info@leyboldvacuum.com
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax:
+1-724-733-1217
Pacific, Mountain,
Alaskan & Hawaiian time zones
Phone: +1-480-752-9191
Fax:
+1-480-752-9494
Service:
Phone: +1-724-327-5700
Fax:
+1-724-733-3799
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Shanghai Branch:
Add: No. 33, 76 Futedong San
Rd., Waigaoqiao FTZ ,
Shanghai 200131, China
Sales and Service:
Phone: +86-21-5064-4666
Fax:
+86-21-5064-4668
leybold_sh@leybold.com.cn
Leybold Vacuum (Tianjin)
Guangzhou Branch:
Add: G/F,#301 Building,
110 Dongguangzhuang Rd.
Tianhe District,
Guangzhou 510610, China
Sales:
Phone: +86-20-8723-7873
Phone: +86-20-8723-7597
Fax:
+86-20-8723-7875
leybold_gz@leybold.com.cn
India
Leybold Vacuum India Pvt Ltd.
A-215 Road No. 30
MIDC Wagle Industrial Estate
Thane(W) - 400 604 Maharashtra
India
Sales and Service:
Phone: +91-22-2581 2929
Fax:
+91-22-2581 2626
ivt2004@yahoo.com
Korea
Leybold Vacuum Korea Ltd.
#761-4, Yulkeum-ri,
SungHwan-eup, Cheonan-City
Choongchung-Namdo,
330-807, Korea
Sales:
Phone: +82-41-580-4420
Fax:
+82-41-588-3737
Service:
Phone: +82-41-580-4415
Fax:
+82-41-588-3737
Singapore
Leybold Vacuum
Singapore Pte Ltd.
No.1, International
Business Park,
B1-20B, The Synergy
Singapore 609917
Sales and Service:
Phone: +65-66652910
Fax:
+65-65668202
vacuum@leyboldvac.com.sg
Taiwan
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chung-Hsin Rd., Chu-Tung
Hsin-Chu, Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-5833988
Fax:
+886-3-5833999
LV_07318_2005
05.05
sales@leybold.com
service@leybold.com
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-221 347- 0
Fax:
+49-221 347-1250
info@leybold.com
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