Industrial Microscopes
Industrial Microscopes LV150/150A/100D
Industrial Microscopes
Specifications and equipment are subject to change without any notice or obligation
on the part of the manufacturer. May 2005.
©2005 NIKON CORPORATION
WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS
CAREFULLY BEFORE USING YOUR EQUIPMENT.
NIKON CORPORATION
Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku,
Tokyo 100-8331, Japan
www.nikon.com/
NIKON INSTECH CO., LTD.
NIKON INSTRUMENTS EUROPE B.V.
NIKON INSTRUMENTS INC.
Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku,
Kawasaki, Kanagawa 210-0005, Japan
phone: +81-44-223-2175 fax: +81-44-223-2182
http://www.nikon-instruments.jp/eng/
P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands
phone: +31-20-44-96-222 fax: +31-20-44-96-298
http://www.nikon-instruments.com/
1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306
http://www.nikonusa.com/
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FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33
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Printed in Japan (0505-15)T
En
Code No. 2CE-KVKH-1
This brochure is printed on recycled paper made from 40% used material.
Semiconductors
MEMS
Materials
Extend
Your
Vision
Versatility
• Printer heads
• Micro sensors
• Optical switches
• GMR heads for HDD
IC Packages
• Bare wafers
• Lithography process
• Probe, test processes
• Post-dicing
• Macromolecules, monomeric materials
• Organic/inorganic materials
• Polymers
• Thin film
• Magnetic materials
• Crystals
• Metallography
• LF/TAB
• WL-CSP
• QFP
• SIP
• BGA, CSP, FC
Versatility
Extend Your Vision
Casts and Parts
Optical Performance
Improved Performance
• OA equipment parts
• Cell phones, PDAs, DSC, PC parts
• Automobiles, aeronautics
A versatile microscope system with a modular design
PCB
Precision
Molds
FPD
Improved
Basic
Performance
Optical
Performance
• Medium/small PCB
• FPC
• Interposer substrates
2
Display Devices
• Precision molds
• LCD, color filters
• Polarizing filters
• Organic EL
• CCD
• LCOS
• CMOS
• DMD
3
Versatility
The modular design of the Eclipse LV series
allows an unprecedented level of versatility. The
Eclipse LV series offers flexibility that enables it
to cover a wide variety of products and
applications, extending from development and
quality control to inspection in the manufacturing
process. Users will recognize the superb
performance of the Eclipse LV series when
inspecting semiconductors, FPD, packages,
electronics substrates, materials (material
science), medical devices, cast/metallic/ceramic
parts, precision molds, MEMS, telecommunications devices, and a wide variety of other
samples.
Accepts Thicker Samples
The maximum sample height can be increased to 82mm from
47mm by inserting the LV-CR Column Riser 35 between the
main body and arm of the microscope. This feature is useful
for viewing the surfaces of precision molds, optical materials
and other thick samples.
Dia Base Unit for Diascopic
Illumination
Users can select suitable models based on sample and stage
stroke. All stages are highly durable with their triple-plate design.
In the Eclipse LV series, the LV-DIA Dia Base is available for
diascopic illumination OEM use. Users can now take full
advantage of the modular design. A UN2 transformer is used
for the power supply.
Compact Industrial Stage: LV-S32 3x2 Stage
The newly designed LV-S32 3x2 is a compact stage for
industrial microscopes. Its triple-plate design ensures
durability, stability and ease of
use, even when heavy samples
such as metallic materials are
observed. The standard glass
plate makes this stage suitable
for episcopic and diascopic
LV-S32 3x2 Stage
illumination.
82mm
47mm
Extensive Range of Industrial Stages and
Accessories
Roll-out section
Roll-in section
Tape-suction
section
Tape-transport
section
Stage section
Stroke: 75 x 50 mm
Without column riser
With column riser
An example of LV-DIA Dia Base used in a tape sample inspection system
Modular Design
Non-Nikon Stages (LV150 or LV150A
only)
Use of non-Nikon stages, such as the Suruga Seiki B23-60CR,
in combination with the LV-SUB Substage 2 allows the
microscope to handle thicker samples of up to 116.5 mm,
thereby enabling the observation of fiber ends and other
tools.
LV-S64 6x4 Stage
Stroke: 150 x 100 mm
LV-S6 6x6 Stage
Stroke: 150 x 150 mm
LV-DIA Bia Base
LV-SUB Stage
(exclusive for LV150/LV150A)
LV-SUB Substage 2
(exclusive for LV150/LV150A)
Combination of LV-150 with LV-SUB Substage 2
and Suruga Seiki B23-60CR stage
L-S6WH Wafer Holder
(for LV-S6 6x6 Stage)
L-S6PL ESD Plate
(for LV-S6 6x6 Stage)
LV150 standard combination
Versatility
LV-S32PL ESD Plate
(for LV-S32 3x2 Stage)
LV-S32SGH Slideglass Holder
(for LV-S32 3x2 Stage)
Appropriate holder and substage are selected based on
sample and stage combination.
5
Extend Your Vision
Optical Performance
A wide variety of observation methods are available with the Eclipse LV series. Observation with first-order
red compensator, UV polarizing, and epi-fluorescence observation with UV excitation, in addition to
brightfield, darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and doublebeam interferometry are all possible. A new high-intensity, low power-consumption 12V-50W halogen light
source has been developed.
Improved Transmission Rate for UV
Wavelength
xtend Your Vision
The LV-UEPI universal epi-illuminator enables
brightfield, darkfield, simple polarizing and DIC
observations. Field and aperture diaphragms are
automatically opened when the observation is switched
from brightfield to darkfield, and return to their original
position when switched back to brightfield.
High-Intensity 12V-50W Halogen
Light Source:
LV-LH50PC Precentered
Lamphouse
Although the LV-LH50PC Precentered Lamphouse
is 12V-50W, the brightness is equivalent to or
higher than that of 12V-100W. The low powerconsumption halogen light source contributes to
the compact design of the microscope while also
being friendly to the environment. Defocus
induced by heat from the illuminator is
substantially reduced.
• Brightfield
• Darkfield
• Simple polarizing
• DIC
The transmission rate in the UV wavelength range has been
improved for the new CFI LU Plan Fluor series. These objective
lenses are suitable for various research, analysis and
examination needs, while maintaining Nikon’s commitment to
high NA and long working distance. Only one kind of objective
lens is needed for brightfield, darkfield, simple polarizing,
observation with first-order red compensator, DIC and UV epifluorescence observations. These objective lenses, which offer
high resolution and easy-to-use performance, can be combined
not only with microscopes but also with other equipment for
even greater versatility.
CFI60 LU Plan Fluor EPI series
Objective Lenses with Correction Ring
CFI L Plan EPI CR series
CFI60 LU Plan Fluor BD series
The CFI60 series now includes the CFI L Plan EPI CR series to
cope with the thinner coverglass used in liquid crystal displays,
and highly integrated, and dense devices. Coverglass correction
can be continuously made from 0 mm up to 1.2 mm (0-0.7 mm
and 0.6-1.3 mm for 100x) with the correction ring. The 100x
objective lens offers 0.85 high NA, while enabling high-contrast
imaging of cells and patterns without being affected by the
coverglass.
ptical Performance
Universal Epi-Illuminator: LV-UEPI
CFI LU Plan Fluor series
CFI60 L Plan EPI CR series of objective lenses
with correction ring
Environment Friendly
Universal Epi-Illuminator 2: LV-UEPI2
The LV-UEPI2 universal episcopic illuminator is
equipped with advanced optics suitable for a wide variety
of observation methods—brightfield, darkfield, DIC and
epi-fluorescence. It allows the operator to concentrate on
the observation by automatically maintaining optimal
illumination conditions for the aperture diaphragm,
shutter, filters, including diffuser and ND filter.
Optimal Illumination Function
Field
diaphragm
Aperture
diaphragm
Shutter
BF
Any diameter
Any diameter
Open
Insert
DF
Open
Open
Open
Insert
FL1
Any diameter
Any diameter
Open
—
FL2
Any diameter
Any diameter
Open
—
The eco glass used in the CFI LU Plan Fluor and L Plan EPI CR
series does not contain harmful substances such as lead and
arsenic.
UV-cut
filter
Without correction (50x)
CFI60 Series Objectives
Model
CFI L Plan EPI
CFI LU Plan Fluor EPI
New
CFI LU Plan EPI ELWD
CFI L Plan EPI SLWD
CFI LU Plan Apo EPI
• Brightfield
• Darkfield
• Simple polarizing
• Observation with first-order red compensator
• DIC
• Epi-fluorescence (UV excitation possible)
• UV polarizing epi-fluorescence
6
With correction at 0.7 mm (50x)
CFI L Plan Apo EPI WI
Model
CFI L Plan EPI CR
CFI L Plan EPI CR
CFI L Plan EPI CRA
CFI L Plan EPI CRB
New
New
New
New
Magnification
2.5X
5X
10X
20X
50X
100X
20X
50X
100X
20X
50X
100X
100X
150X
150X
NA
0.075
0.15
0.30
0.45
0.80
0.90
0.40
0.55
0.80
0.35
0.45
0.70
0.95
0.95
1.25
Magnification
20x
50x
100x
100x
Working Distance (mm)
8.8
23.5
17.5
4.5
1.0
1.0
13.0
10.1
3.5
24.0
17.0
6.5
0.4
0.3
0.25
NA (mm)
0.45
0.7
0.85
0.85
Model
CFI LU Plan Fluor BD
New
CFI LU Plan BD ELWD
CFI LU Plan Apo BD
Working Distance (mm)
10.9-10.0
3.9-3.0
1.2-0.85
1.3-0.95
Magnification
5X
10X
20X
50X
100X
20X
50X
100X
100X
150X
NA
0.15
0.30
0.45
0.80
0.90
0.40
0.55
0.80
0.90
0.90
Working Distance (mm)
18.0
15.0
4.5
1.0
1.0
13.0
9.8
3.5
0.51
0.4
Glass Thickness Correction Range
0-1.2mm
0-1.2mm
0-0.7mm
0.6-1.3mm
7
Observation Methods
Improved Performance
Overall performance has been improved with better durability and rigidity.
Tilting Trinocular Eyepiece Tube
Simple Polarizing
Brightfield
In addition to simple
polarizing, a lambda plate
can be inserted into the
optical path to achieve firstorder red compensator
observation. This is useful
for liquid crystal
inspections (when used in
combination with the LVUEPI 2).
The antiflare design applied
to the objective lenses and
light source ensures bright,
and high-contrast images.
Thorough ESD Protection
mproved Performance
Darkfield
Nikon’s unique “Fly-eye
Lens” used in the darkfield
illuminator yields a
threefold increase in
brightness over previous
models. This allows highsensitivity detection of
defects and height gaps in
samples.
LV-TT2 Tilting Trinocular Eyepiece
Tube
The newly developed LV-TT2 tilting trinocular
eyepiece tube (erect image) offers comfort to all
users, regardless of their stature or viewing
positions. The optical path changeover of
100:0/20:80 allows simultaneous use of monitor.
Nomarski DIC
*C-mount adapter 0.55x can be directly mounted to LV-TT2
and LV-TI3 for the DS-2M series.
Highly Durable Motorized Nosepiece
The use of structural analysis during the design process
has improved rigidity and anti-vibration parameters to
yield clear images even at high magnification.
Manual Nosepiece
A variety of manual control nosepieces are
available to suit all needs.
C-N6 Nosepiece
(Brightfield)
L-NBD5 Nosepiece
(Bright/darkfield)
LV-PO
Polarizer
LV-FLAN
FL Analyzer
LV-P
Plate
Epi-Fluorescence
UV, V, BV, B or G excitation
fluorescence filter blocks can
be selected. This method is
perfect for the observation of
OLED, ion migration and
other substrate uses.
L-DIC DIC Prism (standard)
L-DIHC DIC Prism (high contrast)
Brightfield
Epi-fluorescence B-2A
Standard or high contrast DIC
sliders can be selected to suit
the sample. This method is
useful for the surface
observations of various
devices and precision molds.
Highly Rigid, Vibration-Free Body
The LV-NU5A motorized universal quintuple
nosepiece durability has been dramatically
improved compared to its predecessor and can be
used with the LV150A. In combination with the LVNCNT motorized nosepiece controller, it can also
be used in other devices.
L-AN
Analyzer
All parts of the microscope that might be touched,
including the body, tube and stage, have been
insulated. This improves anti-contamination and
prevents samples from being harmed by
electrostatic, thereby improving yields.
Electrostatic decay time: 1000-10V, within 0.2 sec.
LV-NU5A Nosepiece
YM-PO
Polarizer
YM-PO L-AN
L-DIC
L-DIHC
Polarizer Analyzer DIC Prism High-contrast
DIC Prism
LV-UVPO
Polarizer
Fluorescence filter blocks
Double-Beam Interferometry Equipment
(measures nano scale height gaps)
LV-FLAN FL
Analyzer
Diascopic Illumination
Diascopic illumination is
used to observe optical
parts, FPD and other samples
that transmit light.
Michelson (TI) and Mirau (DI)
types of episcopic doublebeam interferometry can be
carried out. A filar micrometer
eyepiece can be used to
examine or measure samples
while avoiding direct contact.
L-NU5 Nosepiece
(Universal)
Condenser
Episcopic double-beam Interferometry Equipment TI/DI
8
9
Applications
(Episcopic Illumination Type)
LV-TI3 Trinocular Tube
A trinocular tube with an
optical path changeover
of 100:0/0:100.
Semiconductor (wafers)
Semiconductor (wafers)
MEMS (optical switch)
Brightfield
Darkfield
Brightfield
Micro Bump
Compact Disc (CD)
Image Sensors (CCD)
Brightfield
Simple polarizing
Brightfield
PCB (ion migration)
PCB (ion migration)
Precision Mold
Brightfield
Epi-fluorescence
DIC
LV-LH50PC Precentered Lamphouse
A low power-consumption 12V-50W
halogen light source equivalent to or
higher than the 12V-100W type.
CFI-Series Eyepiece
LV-UEPI
An illuminator that can be
used for brightfield,
darkfield, simple
polarizing and DIC
observations.
LV150/LV150A
The LV150 and LV150A
microscopes are used for
episcopic illumination.
LV-NU5A Nosepiece
A universal motorized
nosepiece that is 10 times
more durable than its
predecessors.
CFI LU Plan Fluor Series
These objective lenses feature
high NA, long working distances
and improved transmission rate
in the UV range.
LV-S6 6x6 Stage
An episcopic illumination
stage capable of inspecting
150mm wafers. (With 6”
wafer holder)
L150A controls
Motorized nosepiece controls
10
11
Applications
(Episcopic/Diascopic Illumination Type)
LCD (color filter)
LCD (conductive particle)
Test Reticle
Diascopic brightfield
DIC
Diascopic brightfield
Spodumene
Carbon Paper
Nodular Graphite Cast Iron
DIC
Brightfield
DIC
Tourmaline
Tourmaline
Tourmaline
Brightfield
DIC
Double-beam interferometry
LV-TT2 Tilting Trinocular Tube
The LV-TT2 is a tilting trinocular tube
that has an optical path changeover of
100:0/20:80.
LV-LH50PC 12V-50W Lamphouse
A low power-consumption 12V-50W
halogen light source equivalent to or
higher than the 12V-100W type.
CFI-Series Eyepiece
LV-UEPI2
The LV-UEPI2 illuminator
enables brightfield,
darkfield, DIC, simple
polarizing, and UV
excitation epi-fluorescence
observations.
LV100D
The LV100D microscope is
capable of episcopic and
diascopic illumination.
Nosepiece
Selectable from C-N6
(brightfield), L-NBD5
(bright/darkfield) and LNU5 (universal) nosepieces.
CFI LU Plan Fluor Series
These objective lenses feature
high NA, long working distances
and improved transmission rate
in the UV range.
LV-S32 3x2 Stage
This small, industrial-use
stage has a triple-plate
design and can be used for
episcopic and diascopic
illumination.
12
13
Eyepiece Tubes
Illuminators
Double Port
Polarizing/DIC accessories
Observation with First-Order Red
Compensator
Simple Polarizing
LV-TT2 Tilting Trinocular Eyepiece Tube
LV-TI3 Trinocular
Eyepiece Tube
LV-UEPI
Eyepieces
Model
F.O.V.
Remarks
CFI 10x
22
CFI 10xM
22
Photomask included
CFI 10xCM: for C-TE binocular ergo tube
22
Crosshairs and micrometer included
CFI 12.5x
16
CFI 15x
14.5
CFI UW 10x
25
CFI UW 10xM
25
Photomask included
Mirometer eyepiece 10xN
20
Stroke 10 mm
Main scale: 0.1 mm/increments
Sub scale: 0.01 mm/increments
Nosepieces
Y-IDP Double Port
(Ratio 100:0/55:45)
Y-IDP Double Port 0/100
(Ratio 100:0/0:100)
YM-PO
Polarizer
L-AN
Analyzer
LV-PO
Polarizer
UV Polarizing with EpiFluorescence
LV-FLAN FL
Analyzer
LV-P
Plate
DIC
LV-UEPI2
LV-UV PO UV Polarizer
IN
L-DIHC DIC
Prism HC
OUT
0
100
YM-PO L-AN
L2-DIC
Polarizer Analyzer DIC Prism
100
0
Substages (LV150/LV150A)
C-N6 Nosepiece
(Brightfield)
L-NBD5 Nosepiece
(Bright/darkfield)
L-NU5
Nosepiece
(Universal)
LV-NU5A Motorized
Nosepiece (Universal)
LV-SUB Stage
Objective Lenses
LV-SUB Stage 2
Stages
CFI LU PLAN FLUOR EPI series
CFI L PLAN EPI CR series
LV-S6 6x6 Stage
LV-S64 6x4 Stage
LV-S32 3x2 Stage
Holders
CFI LU PLAN FLUOR BD series
For LV-S6 6x6 Stage
For LV-S32 3x2 Stage
Objective Adapters
LU Objective
Adapter M32-25
C-OA 15mm Adapter
L-S6WH Wafer
Holder
Diascopic Illumination Condensers
L-S6PL ESD Plate
14
Slide
Achromat
2-100x
C-C Abbe
C-C Achro
LV-S32SGH
Slideglass Holder
Eyepiece Micrometer
Grid Micrometer
Micrometers
Objective Micrometer
LWD
Achromat
LV-S32PL
ESD Plate
Darkfield
(Dry)
ACCESSORIES
15
Digital Cameras for Microscopes
Ultrahigh-definition Digital Camera
The Digital Sight series is a powerful imaging system for monitoring/capturing images taken under brightfield,
darkfield, DIC, epi-fluorescence, and other observation methods.
The DXM1200F produces true-to-life, extremely high-quality images with up to approximately 12 million output pixels. It meets
the demanding requirements of professional users and is excellent for image analysis in the advanced R&D fields.
PC-Connection Type
Standalone Type
This type requires connection to PC and allows
observation on a PC monitor, image capture,
measurement and analysis when the special
application software ACT-2U is used.
This type comes with an LCD monitor, making it
convenient for on-screen monitoring without PC and
in applications that require long/multiple exposures.
Real-time imaging Camera—DS-2Mv-L1
• Live image display at 30fps max.
• Image size: 1600 x 1200 pixels
• 6.3” TFT monitor
• Analog RGB output
• CompactFlash card slot
• USB mass-storage-class
compatible
• Direct print function (Pict
bridge compatible)
optional*1
• Ethernet (100BASE/TX) port*2
Real-time imaging Camera—DS-2Mv-U1
• Live image display at 12fps (800 x 560)
• Image size: 1600 x 1200 pixels
• PC connection via USB2.0
• Dedicated application software—ACT-2U
• Approx. 12 million output pixels comparable to highend film cameras, thanks to Nikon’s exclusive microstep high-density imaging technology
• Live image display at a frame rate of 12 fps max.
• The wide exposure latitude produces true-to-life
images regardless of brightness level.
Camera Control Software
ACT-1
*1: A CP900DC dedicated printer
and C-mount adapter are
necessary. Provided with real 10
mode (10X printing).
Minimizes fatigue during large-volume and
extended time shooting.
Dedicated camera control
software ACT-2U
*2: FTP Client/Server, HTTP Server Telnet Server functions provided.
Camera Control Software for DS-L1/DS-U1
Scene mode—optimal imaging with a single mouse click
Optimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily perform
photography of the highest level.
All essential sections, including live image preview, captured image window, thumbnail, and image
capture parameter setting panel, are simultaneously
displayed on a single screen, enabling users to easily
understand image capture procedures. The size of the
parameter setting panel has been reduced to leave more
space for image display.
Metal/Ceramics
Wafer/IC Chip
A host of measuring tools
Scale
Point to line distance
Intersection angle
Area (DS-U1 only)
XY Scale
Screen pattern
(crossline, circle)
Cross scale
(DS-L1 only)
ACT-2U
The optional ACT-2U software offers the following
arrays of convenient measurement tools.
Two-point distance
Circumference/diameter
Scale
Area
Point to line distance
XY Scale
Intersection angle
Screen pattern (crossline, circle)
PCB
Two-point distance
Option: Camera Control Software
Circumference/diameter
*Dedicated ACT-2U camera control software is necessary when using the DS-U1.
Camera Heads
Select the best type to match your sample and use.
For brightfield, darkfield, DIC observations
For fluorescence observations
(that require long exposure)
DS-2MBW
DS-5M
DS-2MBWc
• Image size: 1600 x 1200 pixels
• 15 fps (30 max.)
• Superb movie
• Image size: 2560 x 1920 pixels
• True-to-life recording of minute
images
• Image size: 1600 x 1200 pixels
• Image size: 2560 x 1920 pixels
• Sensitivity approx. 5 times greater • Includes a Peltier device
than predecessors
• Brilliant images with minimum noise
• Includes a Peltier device
• Brilliant images with minimum noise
16
DS-5Mc
Digital Camera
17
Dimensional diagrams
LV150A/LV150
LV-TI3 Trinocular
Tube ESD
95.5
LV-TT2 Tilting
Trinocular Tube
LV-CR Column Riser 35
118
100
153
155
IN
OUT
0
100
0
114
100
φ10
65.5
φ60
φ50
137
100
0
78.1
35
75
98.5
104
20°
73.7
54.5
82
92.5
103
118
OUT
0
5
134.5
IN
100
φ51
φ51
67
202.5
250
456.8
267.0
LV-S6 6x6 Stage
LV100D
31
φ52
.3
20°
96.8
36
326
66
E.P.
60
341
90
264.6
138
E.P.
193
387.2
.3
59
508.5
192.7
205
95.5
LV-S32 3x2 Stage
LV-S64 6x4 Stage
129
140.5
299
227
181
JAPAN
317
40
31
217
357
317
326
140.5
45.5
φ34
φ34
140.5
109
109
92
193
140.5
45.5
φ34
25.5
391
45.5
495
129
31
25.5
25.5
299
109
JAPAN
25.5
25.5
φ34
134
84
134
φ34
205.5
188
205.5
φ34
188
174
111
186
174
JAPAN
341
76
LV-SUB Stage 2
LV-SUB Stage
250
LV-S32PL
ESD Plate
151
94
LV-S32SGH Slide
Glass Holder
50
410.5
370
106
120
30
88
88
74
50
74
54
25.5
110
122
66
26.5
336
295
8-M4
LV-UEPI2 Universal Epi-Illuminator 2
4-M4
LV-UEPI Universal Epi-Illuminator
100
70
122
96
5
4.7
4
26.5
13
30.5
35
(39)
4
45°
100
φ48
81.3
φ
40
113.3
300.5
LV-NU5A
Nosepiece
57
65
5
57
φ21
16
29
25
61
276
12
13
60
54
40
100
130
φ48
79.3
76.5
LV-NCNT Nosepiece
Controller
LV-DIA Dia Dase
250
100
φ48
105
65
5
φ62
φ60
127
167.5
88
127
71
(89)
48
95
79.3
115
111
55
116
73.5
341
367
φ21
16
105
61
48
φ43.5
300.5
φ
25
250
10°
Cable length 220mm
(cord bush exit to connector exit)
40
81.3
95
130
93.7
28
113.3
55.7
69
15
276
149
)
(182
60
45°
φ
40
Cable length 220mm
(cord bush exit to connector exit)
13
54
15°Cable length
160mm
25.5
171.5
410.5
370
110
110
336
295
171.5
φ51
φ51
18
19
Polarizers/Analyzers/Plate
YM-PO Polarizer
LV-PO Polarizer
85.4
79
Main specifications
LV-UVPO Polarizer
L-AN Analyzer
85.4
79
90
30
30
30
30
7.5
7.5
6.5
LV150/150A
6.5
85.4
79
Main body
Focusing mechanism
LV-P Plate
LV-FLAN FL Analyzer
Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage),
82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control built-in transformer
Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, with
refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece
C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece
(universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, with
flare prevention)
Episcopic illuminator
LV-U EPI
12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover;
ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable
Episcopic illuminator
LV-U EPI2
12V-50W high-intensity halogen lamp; 120W high-intensity mercury-fiber illuminator (with brightness control,
no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter
(NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable
Objective Lenses
Eyepiece tube
LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted
image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)
CFI LU PLAN FLUOR
Stage
LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate)
LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate)
LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination)
Eyepiece
CFI eyepiece series
Objective lens
CFI60 series
Electrostatic decay time
1000-10V, within 0.2 sec.
Power consumption
1.2A/75W
Weight
Approx. 8.6kg
47
10
λp
30
45°
±'
late
dire
30 ction
113.5
3
6.5
90
CFI LU Plan Fluor EPI 5X
CFI LU Plan Fluor EPI 10X
CFI LU Plan Fluor EPI 20X
CFI LU Plan Fluor EPI 50X
CFI LU Plan Fluor EPI 100X
φ30
φ29
φ29
φ23.8
47.5
100X /
3.5
30°
4.5
90 A
WD 1.0
W.D.=1
45°
φ8.5
φ9
L.U
60
80 A
WD 1.0
40°
4.5
2.3
φ17.5
59
47.5
50X /
45°
W.D.=1
45 A
WD 4.5
50°
JAPAN
L.U
60
20X /
59
L.U
55.5
60
W.D.=17.5
42.5
WD 17.5
φ20
JAPAN
JAPAN
30 A
60
L.U
30° 10X /
60
15A
WD 23.5
W.D.=23.5
5X /
M25x0.75
M25x0.75
JAPAN
L.U
45°
φ23.8
M25x0.75
5
JAPAN
36.5
φ23.8
M25x0.75
5
5
M25x0.75
φ30
φ23.8
W.D.=4.5
φ23.8
φ29
φ8.8
φ17.5
φ21.8
φ18
φ21.8
φ24
φ24
LV100D
CFI LU PLAN FLUOR BD
Main body
5
0.5
80 A
WD 1.0
°
90 A
WD 1.0
°
35
3
3
35
W.D.=4.5
100X /
54
50X /
59
59
WD 4.5
φ26.2
φ33.5
φ25
L.U
L.U
45 A
60
51
55.5
20X /
(φ28.4)
φ37
Focusing mechanism
(φ28.4)
φ37
CFI L PLAN EPI 100XCRA
φ35.5
φ34
φ29.5
φ28.5
φ23.8
M25x0.75-6g
(0.7)
(0.7)
M25x0.75
φ35.5
φ34
φ29.5
φ28.5
CFI L PLAN EPI 100XCRB
C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece
(universal quintuple, with flare prevention)
Episcopic illuminator
LV-U EPI
12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover;
f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable
Episcopic illuminator
LV-U EPI2
12V-50W high-intensity halogen lamp; 120W high-intensity mercury-fiber illuminator (with brightness control,
no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter
(NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable
Diascopic illuminator
12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters
(ND8, NCB11) insertable
Eyepiece tube
LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted
image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)
Stage
LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate)
LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)
Eyepiece
CFI eyepiece series
Objective lens
CFI60 series
Electrostatic decay time
1000-10V, within 0.2 sec.
Power consumption
1.2A/75W
Weight
Approx. 9.4kg
M25x0.75
(1
6°
)
φ27
φ32.5
60.3
L
100X / 0.35
JAPAN
φ14.5
φ19.8
φ24.8
φ27
φ32.5
0.9(CG)
22
26°6.5 45
°
13
14.3
φ11.5
φ19.8
φ24.8
1.8 6.4
JAPAN
0.3(CG)
100X / 0.35
58.2
60.1
(1
6°
)
25°6.5 45
°
13 14.3
58.7
22
6.2
L
W.D.=1.2
φ13
φ18.8
φ23.3
φ26
φ31.5
W.D.=1.1
JAPAN
25
60.2
50X / 0.70
30°
L
0.6(CG)
°
56.1
°)
(7
45
3.1
φ20
φ31.5
W.D.=3.5
JAPAN
3 6.5 15.5
20X /0.45
(45
°)
L
60.2
°
0.6(CG)
11
13 14.5
5
5
(0.5)
φ33.5
φ32
φ29
φ27
φ23.8
5
(0.5)
φ35
φ33.5
φ29.5
φ27.5
5
5 11.7 10.8
49.1
21.1
W.D.=10.5
20
CFI L PLAN EPI 50XCR
Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, with
refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece
CFI L PLAN EPI CR
CFI L PLAN EPI 20XCR
Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W
brightness control built-in transformer
JAPAN
JAPAN
L.U
45
°
3.95
60
45
30 A
WD 15
W.D.=15
JAPAN
10X /
φ27.6
φ35.5
0.5
0.2
L.U
45
°
15A
WD 18
JAPAN
60
5X /
W.D.=18
35
L.U
5
5
0.2
0.2
JAPAN
6.7
42
M32x0.75
40.4
(Over head screw)
φ40
φ35
M32x0.75
φ30.8
60
M32x0.75
CFI LU Plan Fluor BD 100X
40.4
(Over head screw)
φ40
φ35
φ30.8
M32x0.75
W.D.=1
φ36
φ34
φ30.8
CFI LU Plan Fluor BD 50X
60
M32x0.75
CFI LU Plan Fluor BD 20X
W.D.=1
φ36
φ34
φ30.8
5
φ36
φ34
φ30.8
CFI LU Plan Fluor BD 10X
54
CFI LU Plan Fluor BD 5X
21
System diagram
LV150/LV150A
LV100D
Camera Mount
Photomicrographic
System FX-III Series
Projection
Lenses
PLI 2x
PLI 2.5x
PLI 4x
PLI 5x
Eyepieces
DXM1200F
DS-5M DS-2M
ENG-mount CCTV Camera
L-W
10x
ESD
C-mount CCTV Camera
C-mount
Zooming
Adapter
ENG-mount ENG-mount
CCTV Adapter Zooming
Adapter
ENG-mount
CCTV Adapters
0.45x
0.6x
Relay
Lens 1x
C-mount
CCTV Adapters
0.35x
0.45x
C-mount Direct
0.6x
CCTV Adapter
0.7x
C-mount
CCTV Adapter
Relay
Lens
1x
Zooming
Lens
C-mount
CCTV
Adapter
VM2.54x
V-T Photo
Adapter
CFI
10x
Camera
Mount
カメラマウント
Filar Micrometer
10xN
C-CT
CFI Centering
15x Telescope
CFI
CFI
CFI
10xM 10xCM 12.5x
Photomicrographic
System FX-III Series
CFI UW CFI UW
10x M
10x
Adapter
C-mount
Adapter A
0.7x
F
C-mount
CCTV
Adapter
VM4x
E
F.N.ø22
Projection
Lenses
PLI 2x
PLI 2.5x
PLI 4x
PLI 5x
F.N.ø25
Filter Blocks and Sliders
C-FL Fluorescence
Filter Block
O
L-AN
Analyzer
P
DS-5M DS-2M
ENG-mount CCTV Camera
L-W
10x
ESD
C-mount CCTV Camera
ENG-mount ENG-mount
CCTV Adapter Zooming
Adapter
ENG-mount
CCTV Adapters
0.45x
0.6x
Relay
Lens 1x
C-mount
Zooming
Adapter
C-mount
CCTV Adapters
0.35x
0.45x
C-mount Direct
0.6x
CCTV Adapter
0.7x
C-mount
CCTV Adapter
Zooming
Lens
Relay
Lens
1x
C-mount
CCTV
Adapter
VM2.54x
V-T Photo
Adapter
YM-PO
Polarizer
Eyepieces
DXM1200F
R
C-CT
CFI Centering
15x Telescope
CFI
CFI
CFI
10xM 10xCM 12.5x
CFI UW CFI UW
10x M
10x
Adapter
C-mount
Adapter A
0.7x
F
C-mount
CCTV
Adapter
VM4x
E
F.N.ø22
C-FL Fluorescence
Filter Block
O
D-FB
L-AN
Analyzer
YM-PO
Polarizer
P
D-FB Excitation
Light Balancer
R
Q
D-FB
NCB Slider
LV-TV TV Tube
λ
S
LV-PO
Polarizer
LV-FLAN FL Analyzer
T
NCB Slider
NCB11
Q'
P'
C-mount
Adapter
0.55x
ND Slider
ND16
LV-TV TV Tube
ND4
T
Intermediate Modules
ND16
ND4
IN
LV-UVPO Polarizer
Intermediate Modules
Eyepiece
鏡筒Tubes
LV-TT2 Tilting
Trinocular Tube
E
F
F
Y-TB
Binocular Tube
C-ER Eyelevel Riser
E
F
LV-TI3 Trinocular
Tube ESD
0.5x 2nd
Objective
LV-UEPI Universal
Epi-Illuminator
Other Eclipse series eyepiece
tubes can be used.
Y-IDP Double Port (100:0 / 0:100)
LV-UEPI2
Universal
Epi-Illuminator 2
LV-TI3 Trinocular
Tube ESD
Y-IDP Double Port (100:0 / 55:45)
Y-IDP Double Port (100:0 / 0:100)
S
Q'
S
R
P'
O
I’
T
I
Q
LV-UEPI2
Universal
Epi-Illuminator 2
O
A
LV-UEPI Universal
Epi-Illuminator
P
R
P'
LV-CR Column Riser 35
B
Y-TB
Binocular Tube
C-ER Eyelevel Riser
E
F
Other Eclipse series eyepiece
tubes can be used.
I
Q
LV-TT2 Tilting
Trinocular Tube
E
F
F
Y-IDP Double Port (100:0 / 55:45)
P
I’
LV-CR Column Riser 35
S
C-SP Simple
Polarizing
Polarizer
LV-SUB Substage
Surugaseiki
B23-60CR
ND Slider
OUT
LV-λPλPlate
LV-UVPO Polarizer
Eyepiece Tubes
0.5x 2nd
Objective
λ
S
LV-PO
Polarizer
LV-FLAN FL Analyzer
IN
NCB11
Q'
P'
C-mount
Adapter
0.55x
OUT
LV-λPλPlate
F.N.ø25
Filter Blocks and Sliders
D-FB Excitation
Light Balancer
Q
CFI
10x
Filar Micrometer
10xN
Q'
T
A
B
C
S
Condensers
LV-SUB
Substage 2
DF (dry)
I
D-C
Abbe
C-C
Achromat
LWD
Achromat
Slide Achromat
2-100x
Lamphouses
LV-HL50W 12V-50W-LL
Halogen Lamp
C
LV-LH50PC
Precentered Lamphouse
Stages
Lamphouses
L-S6WH Wafer
Holder
L-S6PL
ESD Plate
LV-S32SGH
Slidegalss Holder
Stages
LV-S32PL
ESD Plate
I
I’
LV-S32SGH
Slidegalss Holder
12V-100W
Lamp
LV-HL50W 12V-50W-LL
Halogen Lamp
LV-S32PL
ESD Plate
LV-LH50PC
Precentered Lamphouse
D-LH 12V-100W Precentered
Lamphouse (Requires
TE2 External Power Supply)
POWER
LV-S6
6x6 Stage
LV-S64
6x4 Stage
LV-S32
3x2 Stage
MIN.
TE2-PS100W Power Supply
(YM-EPI3 3-pin extension
cord is required)
B
I
I’
POWER
MIN.
A
Adapter
LV-NU5A
Motorized
Nosepiece
L-NU5 U5
Nosepiece
L-NBD5 DB5
Nosepiece
C-N C-N6
Nosepiece
P-N P-N5
Nosepiece
A
I’
L-DIHC High
Contrast DIC Prism
Adapter
LV-NU5A
Motorized
Nosepiece
LV-NCNT
Nosepiece
Controller*
LU Plan Fluor
EPI Objective
LV-NCNT
Nosepiece
Controller Cable
10m
*Not necessary on the LV150A as the operation unit has been built into the main body.
22
L-NU5 U5
Nosepiece
L-NBD5 DB5
Nosepiece
C-N C-N6
Nosepiece
LV-HGFA
Fiber Adapter
Fiber
P-N P-N5
Nosepiece
External Light Source
LU Nosepiece
Adapter
M32-25
LU Nosepiece
Adapter
M32-25
LU Plan Fluor
BD Objective
MAX.
TE2-PS100W Power Supply
(YM-EPI3 3-pin extension
cord is required)
Nosepieces
External Light Source
L-DIHC High
Contrast DIC Prism
12V-100W
Lamp
D-LH 12V-100W Precentered
Lamphouse (Requires
TE2 External Power Supply)
Fiber
L-DIC DIC Prism
Nosepieces
LV-S32
3x2 Stage
B
I’
LV-HGFA
Fiber Adapter
L-DIC DIC Prism
LV-S64
6x4 Stage
MAX.
C-OA 15MM
Adapter
DI Objective
CFI L/LU
EPI P
Objective
LU Plan Fluor
BD Objective
TI Objective Adapter
LV-NCNT
Nosepiece
Controller*
LV-NCNT
Nosepiece
Controller Cable
10m
LU Plan Fluor
EPI Objective
C-OA 15MM
Adapter
CFI L/LU
EPI P
Objective
TI Objective Adapter
DI Objective
23
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