Omega FMA-7400/7500 Series Owner Manual

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The Omega product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Omega products and services, please contact your local Omega Engineering office listed on the inside front cover
of this manual or visit www.Omega.com.
Essential Instructions
Read before proceeding!
Omega Engineering designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed,
operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, operating and maintaining Omega Engineering products.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local
sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed this warning can result in
serious personal injury and / or damage to the equipment.
• If you do not understand any of the instructions, contact your Omega Engineering representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all
products to the proper electrical and pressure sources.
• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet
connections. If no leaks are present, bring the system up to the operating pressure.
• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement
parts specified by Omega Engineering . Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being
performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely drained.
Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
European Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
• The Specifications Section of this manual contains instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC.
• All Omega Engineering Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
European Electromagnetic Compatibility (EMC)
The Omega Engineering (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility
(EMC directive 2004/108/EC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Omega Engineering supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during
the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation.
Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize
metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged
components, even though they appear to function properly, exhibit early failure.
Contents
FMA-7400/7500 Series Devices
Paragraph
Number
Page
Number
Section 1 Introduction
1-1
Introduction ................................................................................................................................... 1-1
1-2
How to Use This Manual ................................................................................................................ 1-1
1-3
Product Support References ......................................................................................................... 1-2
1-4
Warning, Caution and Notice Statements ...................................................................................... 1-2
1-5
Product Warranty .......................................................................................................................... 1-2
1-6
How to Order an FMA-7400/7500 Series Device ........................................................................... 1-2
1-7
Industry Standard References ....................................................................................................... 1-2
1-8
FMA-7400/7500 Series Gas Table ................................................................................................. 1-2
1-9
Glossary of Terms and Acronyms .................................................................................................. 1-2
1-10
Description .................................................................................................................................... 1-3
1-11
Specifications for FMA-7400/7500 Series Devices ....................................................................... 1-6
Section 2 Installation
2-1
General .......................................................................................................................................... 2-1
2-2
Receipt of Equipment .................................................................................................................... 2-1
2-3
Recommended Storage Practice ................................................................................................... 2-2
2-4
Return Shipment ............................................................................................................................ 2-2
2-5
Transit Precautions ........................................................................................................................ 2-2
2-6
Removal from Storage ................................................................................................................... 2-2
2-7
Gas Connections ........................................................................................................................... 2-2
2-8
In-Line Filter .................................................................................................................................. 2-2
2-9
Mechanical Installation .................................................................................................................. 2-2
2-10
Flow Controller Installation Arrangement ........................................................................................ 2-3
2-11
Purge the Gas Supply Line Before FMA-7400/7500 Series Installation ......................................... 2-3
2-12
Position and Mount the FMA-7400/7500 Series ............................................................................ 2-4
2-13
Perform a Leak Test ...................................................................................................................... 2-4
2-14
Performance Checks ..................................................................................................................... 2-5
2-15
Zeroing Setup Process .................................................................................................................. 2-5
2-16
Zeroing the FMA-7400/7500 Series ............................................................................................... 2-6
2-17
Auto Shut-Off ................................................................................................................................. 2-6
2-18
Using the Configurator .................................................................................................................. 2-7
2-19
Electrical Connections ................................................................................................................... 2-8
2-19-1 Analog/RS485 Connections ........................................................................................................... 2-9
Section 3 Operation
3-1
General .......................................................................................................................................... 3-1
3-2
Theory of Operation for Flow Measurement ................................................................................... 3-1
Section 4 Maintenance & Troubleshooting
4-1
Overview ........................................................................................................................................ 4-1
4-2
Maintenance .................................................................................................................................. 4-1
4-3
Troubleshooting ............................................................................................................................. 4-2
4-4
Troubleshooting Checklist .............................................................................................................. 4-3
4-5
FMA-7400/7500 Series Troubleshooting Guide ............................................................................. 4-4
Section 5 Product Description Code ...................................................................................................... 5-1
Appendix A: FMA-7400/7500 Series Gas Table .......................................................................................A-1
Local Sales/Service Contact Information/Warranty, ..................................... Inside front Cover/InsideBack Cover
i
Contents
FMA-7400/7500 Series Devices
Figure
Number
1-1
1-2
1-3
2-1
2-2
2-3
2-4
2-5
2-6
3-1
FMA-7400/7500 Series Digital Thermal Mass Flow Device ............................................................ 1-1
Dimensions - FMA-7400/7500 ....................................................................................................... 1-9
Dimensions - FMA-7400-SS/7500-SS ........................................................................................... 1-9
Typical Gas Supply Arrangement ................................................................................................... 2-3
Zero Button Accessible at Top of Device ....................................................................................... 2-6
Cable Adapter ................................................................................................................................ 2-6
RS232/RS485 Converter (P/N A33231) ......................................................................................... 2-7
Diagnostic Port .............................................................................................................................. 2-7
FMA-7400/7500 Series with 15-Pin Analog Connector and Pin-Outs ............................................ 2-9
FMA-7400/7500 Series Operating Principles ................................................................................ 3-2
Table
Number
1-1
1-2
1-3
2-1
4-1
4-2
5-1
A-1
A-2
A-3
A-4
ii
Page
Number
Page
Number
Industry Standard References ....................................................................................................... 1-3
Terms and Acronyms ..................................................................................................................... 1-4
Specifications for FMA-7400/7500 Series ..................................................................................... 1-7
Gas and Flow Ranges - Configurable - N2 Equivalent .................................................................. 2-10
Environmental Factors ................................................................................................................... 4-3
FMA-7400/7500 Series Troubleshooting Guide ............................................................................. 4-4
FMA-7400/7500 Series Product Description Code Table .............................................................. 5-1
FMA-7400/7500 Series Gas Table - Codes 1-99, Bins SA40 to SA43 ........................................... A-1
FMA-7400/7500 Series Gas Table - Codes 108-5022, Bins SA40 to SA43 ................................... A-2
FMA-7400/7500 Series Gas Table - Codes 1-99, Bins SA44 to SA50 ........................................... A-3
FMA-7400/7500 Series Gas Table - Codes 108-5022, Bins SA44 to SA50 ................................... A-4
Section 1 Introduction
FMA-7400/7500 Series Devices
1-1 Introduction
The FMA-7400/7500 Series is a performance/value MFC platform
designed for OEM applications, delivering the following class leading
features:
• Process gas and flow range programmability, enabling customers to reconfigure the MFC for new gases and full scale flow rates for unparalleled process flexibility.
• A high-performance, corrosion-resistant flow measurement sensor
delivers improved reproducibility and stability.
• Elastomer (FMA-7400) and metal seal (FMA-7500) options enable
customers to select the optimum and most cost effective mix of products for their application.
• An independent service/diagnostic port enables on-tool reconfiguration/
optimization, data logging, and troubleshooting without having to
remove the MFC from the gas line.
1-2 How to Use This Manual
Figure 1-1 FMA-7400/7500 Series Digital Thermal Mass Flow Device
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain these thermal
mass flow devices. The manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A FMA-7400/7500 Series Gas Table
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
1-1
Section 1 Introduction
FMA-7400/7500 Series Devices
1-3 Product Support References
Refer to www.Omega.com for Omega sales and service locations and to
obtain other documents that support the FMA-7400/7500 Series.
1-4 Warning, Caution and Notice Statements
Warning, caution and notice statements are located throughout this manual
in the ANSI format. A WARNING statement indicates a potentially
hazardous situation which, if not avoided, COULD result in death or serious
injury. A CAUTION statement indicates a potentially hazardous situation
which, if not avoided, MAY result in minor or moderate injury. It may also be
used to alert against unsafe practices. A NOTICE statement describes
specific information that requires special attention.
1-5 Product Warranty
Product warranty information can be found on the inside back cover of
this manual.
1-6 How to Order an FMA-7400/7500 Series Device
Refer to Section 5.
1-7 Industry Standard References
Refer to Table 1-1.
1-8 FMA-7400/7500 Series Gas Table
Refer to Appendix A.
1-9 Glossary of Terms and Acronyms
Refer to Table 1-2
1-2
Section 1 Introduction
FMA-7400/7500 Series Devices
Table 1-1 Industry Standard References
Reference Number
MIL-STD-810
SEMI E12
SEMI E16
SEMI E17
SEMI E18
SEMI E27
SEMI E28
SEMI E52
SEMI E54
SEMI E56
SEMI E66
SEMI E67
SEMI E68
SEMI E69
SEMI E80
SEMI E16-90
SEMI F36
SEMI F44
SEMI F45
SEMI F47
SEMI S2
SEMI S9
SEMI S10
SEMI S12
Reference Description
Method 514.4, Category 1, Transportation Requirement
Method 516.4, Procedure 1, Functional Shock Test Requirement
Standard temperature and pressure
Guideline for determining and describing MFC leak rates
Guideline for MFC transient characteristics tests
Guideline for temperature specifications of the MFC
Standard for MFC and MFM linearity
Guideline for pressure specifications for the MFC
Practice for referencing gases used in digital MFCs
Sensor actuator network connections for DeviceNet
Test method for detemining accuracy, linearity, repeatability, short-term
reproducibility, hystereses of thermal MFCs
Test method for determining particle contribution by MFCs
Test method for determining reliabilty of MFCs
Test method for determining warm-up time of MFCs
Test method for reproducibilty and zero drift for thermal MFCs
Test method for determining attitude sensitivity of MFCs
Guidelines for determining and describing mass flow controllers leak rates
Guide for dimensions and connections of gas distribution components
Guideline for standardization of machined stainless steel weld fittings
Guideline for standardization of machined stainless steel reducing fittings
Specifications for semiconductor processing equipment
voltage sag immunity
Environmental, Health and Safety Guidelines
Dielectric testing
Risk assessment
Decontamination of fielded products
1-10 Description
Control
The FMA-7400/7500 Series brings together Omega high-performance,
ultra-fast T-rise flow sensor, high-speed ARM based digital architecture,
and a fast-acting diaphragm-free solenoid valve to deliver:
• Fast reproducible transitions between setpoints without overshoot or
ringing
• User-programmable ramp functions for processes requiring a slowramp in flow or time critical transitions
• Optional bubble tight shut down (elastomer valve seat)
MultiGas and MultiRange Configurability
The Omega MultiGas/MultiRange technology delivers exceptional
improvement in process gas accuracy for linear and non-linear gases. This
is achieved through advanced gas modeling and optimized through actual
gas testing. Omega MultiGas/MultiRange allows the device to be quickly
and easily configured for another gas and/or flow range without sacrificing
accuracy or rangability. Selecting a new gas automatically creates a new
calibration curve, establishes optimized PID settings for dynamic control,
automatically compensates for gas density effects, and ensures smooth
overshoot-free transitions between flow rates with excellent steady-state
1-3
Section 1 Introduction
FMA-7400/7500 Series Devices
Table 1-2 Terms and Acronyms
1-4
Term or Acronym
Definition
CSR
Customer Special Requirement.
CVD
Chemical Vapor Deposition.
DSP
Digital Signal Processor.
EPI Epitaxy (EPI).
A process technology where a pure silicon
crystalline structure is deposited or “grown” on a
bare wafer, enabling a high-purity starting point
for building the semiconductor device.
HBD
Horizontal Base Down.
HLD
Horizontal Label Down.
HLU
Horizontal Label Up.
HUD
Horizontal Upside Down.
FMA-7400/7500 Series
Multigas/MultiRange capable digital device.
F.S.
Full Scale.
LED
Light Emitting Diode.
MFC
Mass Flow Controller.
Configurator
I/O communication software package that
configures gas and flow ranges.
MultiGas/MultiRange
Technology
A physics-based calibration methodology that
enables gas and flow range configuration within
a defined standard configuration.
PID
Proportional Integral Derivative Controller.
PSIA
Pounds per Square Inch Absolute.
PSID
Pounds per Square Inch Differential.
PSIG
Pounds per Square Inch Gauge.
ROR
As pressure increases, flow increases at a
pressure rate of rise, or ROR.
HC
Standard Configuration w/ Hastelloy® sensors
(to reduce reaction to corrosive gases).
S.P.
Setpoint.
Step Technology
Enables fast set point control through a high
speed DSP.
VID
Vertical mounting attitude with inlet side facing
down.
VIU
Vertical mounting attitude with inlet side facing up.
Section 1 Introduction
FMA-7400/7500 Series Devices
stability. Omega MultiGas/MultiRange technology offers unparalleled
flexibility. An extensive gas database is provided and a single device can
be quickly programmed for thousands of different gas and flow range
combinations. Process benefits achieved include:
• Mass flow controller full scale full range can be rescaled down typically
by a factor of 3:1 with no impact on accuracy, turndown or leak by
specifications
• Optimum process and inventory flexibility resulting in dramatically
reduced inventory costs
• Fewer configurations/bin sizes required to support many different
processes
• Less down-time with rapid process recovery
Configurator Accessory Kits:
FMA745-CK
Basic Configurator Kit
(Includes software, Configurator Cable Assembly
2.5 mm, Converter 232/485)
FMA745-CK-P Basic Configurator Kit w/Power Supply and
Adaptor Cables
(Includes software, Configurator Cable Assembly
2.5 mm, Converter 232/485, Power Supply, 24 Vdc
with DB-15 female)
Advanced Thermal Measurement Sensor
Omega's high-performance thermal flow sensor brings together key design
elements to deliver the accurate, repeatable measurement under
challenging process conditions:
• Improved accuracy at elevated temperatures through isothermal
packaging and ambient temperature sensing and compensation
• Enhanced signal-to-noise performance enables improved low setpoint
accuracy
• A large bore, corrosion resistant, Hastelloy® C-22 sensor tube ensures
long life and reliability
• Optimized temperature profile for gases prone to thermal decomposition
• Onboard electronics store sensor calibration data for ease of service
1-5
Section 1 Introduction
FMA-7400/7500 Series Devices
Enhanced Diagnostics and User Interface
The mass flow controller is typically the most complex and critical
component in a gas delivery system, When dealing with toxic or reactive
gases, removing the MFC to access its functionality should be the last
resort. To address this, Omega FMA-7400/7500 Series devices include
self-diagnostics and an independent service port for in-situ device
evaluation and troubleshooting:
•
Embedded self-test routines at power-up
•
Independent RS485 service port that can be accessed while the MFC is
in operation for data logging and troubleshooting
•
A convenient Zero button to enable easy re-zeroing during scheduled
maintenance
Communication Interfaces
The FMA-7400/7500 Series supports 0-5 Vdc communication protocol.
RS485 is a multi-drop connection that allows a maximum of 32 devices for
RS485 on the same network.
1-11 Specifications for FMA-7400/7500 Series Devices
See Table 1-3 for specifications for the FMA-7400/7500 Series.
See Figures 1-2 and 1-3 for dimensions for the FMA-7400/7500 Series.
1-6
Section 1 Introduction
FMA-7400/7500 Series Devices
Table 1-3 Specifications for FMA-7400/7500 Series
P erformance
FMA
-7400/7500
FMA-7400/7500
FMA
-7400/7500-SS
FMA-7400/7500-SS
Full Scale Flow Range (N 2 Eq.)
3 sccm to 50 slm
Flow Accur
acy
Accuracy
+1% S.P. 35-100%, +0.35% F.S. 2-35%
Repeatability & Repr
oducibility
Reproducibility
< + 0.2% S.P.
Linearity
Response Time (Settling Time)
+ 0.5% F.S. (included in accuracy)
Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Con
tr
ol Range
Contr
trol
2-100%
Multi Flow
optional
Number of Bins
10 bins
Valve Shut Down
< 1% of F.S.
Zer
eroo Stability
< + 0.5% F.S. per year
Pr
essur
Pressur
essuree Coefficien
Coefficientt
0.03% per psi (0-50psi N 2)
Attitude Sensitivity
<0.25% span change @ 90O after rezeroing (N2 @ 50 psi)
Auto ZZer
er
o:
ero:
Auto shut-off:
Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to
zero. To accomplish, simply provide a zero set point.)
The Auto Shut-off feature closes the valve when the set point drops below 1.5% of full scale
Ratings
Oper
ating Temper
atur
Operating
emperatur
aturee Range
5-50OC (41-122OF)
Maximum Oper
ating Pr
essur
Operating
Pressur
essuree
150 psig (10 bar)
Design Pr
oof Pr
essur
Proof
Pressur
essuree
Differ
en
tial Pr
essur
Differen
ential
Pressur
essuree Range
Leak In
tegrity (External)
Integrity
4000 psig (275 bar)
3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
1x10 -9 atm. cc/sec He
1x10-10 atm. cc/sec He
Mec
hanical
Mechanical
Valve Type
Normally Closed, No Valve (Meter)
Primary Wetted Materials
Normally Closed, No Valve (Meter)
316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
External Seals
FKM
Metal
In
ternal Seals/V
alve Seat
Internal
Seals/Valve
FKM
PFA
Electrical
Diagnostic / Service PPort
ort
All variations have an RS485 Diagnostic/Service port via 2.5mm jack
In Rush Curr
en
t/P
ower
Curren
ent/P
t/Power
3.0A/8 Watts
1-7
Section 1 Introduction
FMA-7400/7500 Series Devices
Table 1-3 Specifications for FMA-7400/7500 Series (Continued)
RS485/
Analog
RS485/Analog
Digital Communication Pr
otocol:
Protocol:
Electrical Connection:
Analog I/O:
P ower:
FMA
-7400/7500
FMA-7400/7500
FMA
-7400/7500-SS
FMA-7400/7500-SS
S-Protocol (proprietary protocol based on HART command set)
1 x 15-pin Male Sub-D, (A)
0-5 V
+12 Vdc to +24 Vdc / normal operation 7 Watt max, Purge 8 Watt
Voltage Setpoin
Setpointt Input Specifications
Nominal Range:
0-5 Vdc
Full Range:
0-11 Vdc
Absolute Max.:
Input Impedence:
Requir
ed Maximum Sink Curr
en
t:
Required
Curren
ent:
25 V (Without damage)
192 kOhms
0.002 mA
Flow Output (V
oltage) Specifications
(Voltage)
Nominal Range:
Full Range:
Min. Load Resistance:
0-5 Vdc
-0.5 - 11 Vdc
1 kOhms
Alarm Output (Analog I/O versions only)*
Type:
Max. Closed (ON) Curr
en
t:
Curren
ent:
Open Collector
25 mA
Max. Open (off) Leakage:
1μA
Max. Open (off) Voltage:
30 Vdc
Valve Override Signal
(Analog I/O version only)
The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input
and controls the valve based upon the followingcriteria:
Valve Override Signal Drive Settings
(Analog I/O versions only)
Floating/Unconnected:
Instrument controls valve to command setpoint
VOR< 1.40 Vdc:
Valve Closed
1.70 Vdc< VOR< 2.90 Vdc:
Valve Normal
VOR>3.20 Vdc:
Valve Open
Valve Override Signal Specifications
(Analog I/O versions only)
Input Impedence:
Absolute Max. input:
800 kOhms
-25 Vdc<VOR<25 Vdc (Without damage)
Diagnostics & Display
Status Lights:
Alarms**:
Diagnostic / Service PPort:
ort:
MFC Health, Network Status
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
RS485 via 2.5mm jack
Compliance
En
vir
onmen
tal Compliance:
Envir
vironmen
onmental
1-8
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
General, Calibration Traceability
*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of
various alarm conditions.
**Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.
Section 1 Introduction
FMA-7400/7500 Series Devices
Figure 1-2 Dimensions - FMA-7400/7500
Figure 1-3 Dimensions - FMA-7400-SS/7500-SS
1-9
Section 1 Introduction
FMA-7400/7500 Series Devices
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
1-10
Section 2 Installation
FMA-7400/7500 Series Devices
2-1 General
This section provides installation instructions for the Omega FMA-7400/7500
Series Thermal Mass Flow Devices. The installation process consists of
purging the gas supply line prior to installation, unpacking and inspecting
the device, connecting the device to the gas supply line and testing for
leaks.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the local
carrier should be notified at once regarding their liability. A report should be
submitted to your nearest Product Service Department. See inside front
cover for contact information for all Omega service centers.
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare parts
are not discarded with the packing material. Inspect the contents for damaged
or missing parts.
2-3 Recommended Storage Practice
If intermediate or long-term storage of the device is required, it is
recommended that it be stored in accordance with the following conditions:
• Within the original shipping container.
• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,
7°C (45°F) minimum.
• Relative humidity 45% nominal, 60% maximum, 25% minimum.
2-4 Return Shipment
Prior to returning the device, it must be purged in accordance with the
following:
See inside back cover of this manual for additional information.
2-5 Transit Precautions
To safeguard against damage during transit, transport the device to the
installation site in the same container used for transportation from the
factory, if circumstances permit.
2-1
Section 2 Installation
FMA-7400/7500 Series Devices
2-6 Removal from Storage
Upon removal of the device from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the device has been
subject to storage conditions in excess of those recommended (refer to
"2-3 Recommended Storage Practice" on p. 2-1), it should be subjected
to a pneumatic pressure test in accordance with applicable vessel codes.
To maintain a device's clean integrity, this service should be performed by
the factory or one of the certified service centers.
2-7 Gas Connections
Prior to installation, ensure that all piping is clean and free from
obstructions. Install piping in such a manner that permits easy access to
the device if removal becomes necessary.
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
device to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
2-9 Mechanical Installation
The recommended installation procedure guidelines are as follows:
2-2
•
The device should be located in a clean, dry atmosphere relatively free
from shock and vibration.
•
Leave sufficient room for access to the user interface and MAC
ID and baud rate switches (if equipped) at the top of the device.
•
Install the device in such a manner that permits easy purge and
removal if the device requires servicing.
The FMA-7400/7500 Series also utilizes MultiGas/MultiRange technology that
allows the user to configure standard configurations ("SAs") or "blanks" for a
variety of pure gases and mixtures. As a result, MultiGas/MultiRange
technology enables the user to reduce unique inventory requirements.
Section 2 Installation
FMA-7400/7500 Series Devices
Figure 2-1 Typical Gas Supply Arrangement
2-10 Flow Controller Installation Arrangement
Typical gas supply arrangements are shown in Figure 2-1. FMA-7400/7500
Series devices are often arranged inside a gas panel. Configure standard
configurations ("SAs") or "blanks" for a variety of pure gases and mixtures.
As a result, MultiGas/MultiRange technology enables the user to reduce
unique inventory requirements
2-11 Purge the Gas Supply Line Before FMA-7400/7500 Series Installation
Before operating the FMA-7400/7500 Series, the gas supply line must be
completely purged with nitrogen or argon to ensure the line is free from
2-3
Section 2 Installation
FMA-7400/7500 Series Devices
toxic or flammable gases, contaminants, moisture, and oxygen. The purge
gas must be free of moisture and oxygen to less than 100 ppb. Purge the
gas lines as follows or in accordance with prescribed company and safety
procedures.
1. Shut off the process gas supply valve(s) upstream of the FMA-7400/
7500 Series. If such a valve is not available, shut the valve on the gas
panel. Tag the valve at this point to prevent accidental re-exposure of the
process gas to the gas line.
2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the
process gas. Cycle purging consists of evacuating to a low pressure
adequate to induce out-gassing and then purging to remove adhered
moisture and oxygen. If a toxic or reactive gas is present and a clogged
FMA-7400/7500 Series is suspected, then proceed with caution. Pump
down and purge the FMA-7400/7500 Series from both downstream and
upstream lines. If check valves are present in the gas line, both pumping
down and purging are required. Pumping down without purging is
inadequate. If a good vacuum source is not available, the FMA-7400/
7500 Series can be decontaminated by purge only.
3. Repeat the purge cycle several times within 2-4 hours to complete the
cleaning. For toxic and corrosive gasses, it is recommended to use 100120 cycles.
2-12 Position and Mount the FMA-7400/7500 Series
It is recommended that the MFC is re-zeroed with process gas following the
recommended procedure refer to Sections 2-15 and 2-16 for zeroing
process.
If your FMA-7400/7500 Series is configured with in-line fittings, secure the
FMA-7400/7500 Series block to the gas panel with two, 8-32-UNC-2B"
screws. Then connect the inlet/ outlet fittings to the gas supply line using
two wrenches. Tighten the fittings to manufacturer recommendations.
2-13 Perform a Leak Test
It is critical to leak test the gas supply lines and FMA-7400/7500 Series
connections before turning on the process gas supply after any new
installation. Check for leaks using a helium leak detector or any other
appropriate leak test method. Follow leak test specifications as defined by
integrator.
2-4
Section 2 Installation
FMA-7400/7500 Series Devices
2-14 Performance Checks
This section describes how to zero and sequence the FMA-7400/7500
Series devices for proper operation.
• The FMA-7400/7500 Series must be warmed up for at least 45 minutes.
• The active gas page must be correct.
2-15 Zeroing Setup Process
The following steps are required before the FMA-7400/7500 Series is
zeroed.
1. Place the FMA-7400/7500 under normal inlet operating pressure.
2. Make sure that the FMA-7400/7500 Series has been installed inside the
equipment (panel) for at least four hours and powered up at least one hour
prior to zeroing. This insures that the FMA-7400/7500 Series is in its "use
attitude" and is operating at normal temperature. If the FMA-7400/7500
Series is subjected to a vacuum purge for more than one minute, turn off
the FMA-7400/7500 Series (i.e., provide a zero setpoint) for a time period
of twice the vacuum purge time.
3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the
downstream shut-off valve (7). This eliminates a pressure drop across
the FMA-7400/7500 Series and subsequent leakage from the PID
control valve inside the FMA-7400/7500 Series.
4. Provide a 100% setpoint to the FMA-7400/7500 Series for no longer than
30 seconds. This equalizes the pressure across the PID control valve.
5. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any
pressure effects from the regulator (3).
6. Close the FMA-7400/7500 Series and wait two minutes.
7. Read the output signal of the FMA-7400/7500 Series in percent of full
scale. This output signal is the initial flow. The output signal should be
0.0 (± 0.1%). If the output signal is too high, re-zero the FMA-7400/7500
Series as described in Section 2-16.
2-5
Section 2 Installation
FMA-7400/7500 Series Devices
2-16 Zeroing the FMA-7400/7500 Series
1. Allow time for gas pressure to equalize across the MFC's internal control
valve to ensure gas movement.
2. Press and hold down the Zero button, shown in Figure 2-2, for a
minimum of 5 seconds.
2-17 Auto Shut-Off
The Auto Shut-off feature closes the FMA-7400/7500 Series' valve when the
set point drops below 1.5% of full scale. When the Auto Shut-off feature is
NOT chosen, then the FMA-7400/7500 Series' valve will shut off when the
set point drops below 0.5% of full scale.
Zero button
Figure 2-2 Zero Button Accessible at Top of Device
Figure 2-3 Cable Adaptor
2-6
Section 2 Installation
FMA-7400/7500 Series Devices
Figure 2-4 RS232/RS485 Converter
Diagnostic Port
Figure 2-5 Diagnostic Port
2-18 Using the Configurator
The Configurator application is used to configure the gas and range of the
FMA-7400/7500 Series devices.
The Configurator application allows communication to FMA-7400/7500
Series devices through personal computer with serial COM Port and a
Windows XP or Windows 7 operating system. It’s primary function is to
configure gas and flow ranges within defined standard configurations. Flow
ranges are configured to the Nitrogen equivalent.
Using the Configurator software, configure the gas and flow rate according
to Table 2-2.
The Configurator interfaces to the FMA-7400/7500 Series device through
RS485. There are various ways to connect the device regardless of device
configuration. Devices may be connected through the diagnostic port using
cables in one of the two Basic Configurator Kits.
Configurator Accessory Kits:
FMA745-CK
Basic Configurator Kit
(Includes software, Configurator Cable Assembly
2.5 mm, Converter 232/485)
FMA745-CK-P Basic Configurator Kit w/Power Supply and
Adaptor Cables
(Includes software, Configurator Cable Assembly
2.5 mm, Converter 232/485, Power Supply, 24 Vdc
with DB-15 Female)
2-7
Section 2 Installation
FMA-7400/7500 Series Devices
Connect the cable adapter 2.5-mm jack to the diagnostic port on the top of the
device. See Figure 2-5.
Connect the RS485 end of the converter to the 15-pin RS485 end of the Cable
Adapter.
Connect the RS232 end of the converter to the Serial Port of a laptop or PC.
The latest Configurator Software and Databases and Configurator manual are
available on the Omega Engineering website at: www.Omega.com/ftp/
FlowGroup/Products/. Please reference the Configurator manual for
installation and operation details. Download the Configurator software into your
computer from the Omega Engineering website www.Omega.com/ftp/
FlowGroup/Products/. Install the Configurator as described in the Configurator
manual and use the guide as a reference for operation details.
Table 2-1 Gas and Flow Ranges - Configurable - N2 Equivalent
Standard MG-MR Bin
Configurations
SA40
SA41
SA42
SA43
SA44
SA45
SA46
SA47
SA48
SA50
2-19 Electrical Connections
2-8
Flow Range
Code
010C
030C
092C
280C
860C
2.6L
7.2L
015L
030L
050L
Gas Flow Range
(N2 Equivalent)
3-10 sccm
11-30 sccm
31-92 sccm
93-280 sccm
281-860 sccm
861-2600 sccm
2601-7200 sccm
7201-15000 sccm
15001-30000 sccm
30001-40000 sccm
FMA Model
7402/7502
7403/7503
7404/7504
7405/7505
7406/7506
7407/7507
7408/7508
7409/7509
7410/7510
7411/7511
Section 2 Installation
FMA-7400/7500 Series Devices
2-19-1 Analog/RS485 Connections
The FMA-7400/7500 Series devices are available with the Analog/RS485
15-Pin D-Connector shown in Figure 2-6.
It is recommended that when using -15 Vdc & 0, the wiring hook-up should
be: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected to
Pin 5 (POWER SUPPLY(+12 to +24 VDC)).
Analog/RS485
15-Pin Connector
Figure 2-6 FMA-7400/7500 Series with 15-Pin Analog Connector and Pinouts
2-9
Section 2 Installation
FMA-7400/7500 Series Devices
THIS PAGE WAS
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2-10
Section 3 Operation
FMA-7400/7500 Series Devices
3-1 General
After the device has been properly installed in the process, it is ready for
operation. When initiating flow, slowly open any upstream shutoff valve to
avoid a flow surge. A bypass is helpful in bringing the flow on smoothly.
Avoid starting a pump to supply the device without the use of a valve
upstream of the device.
3-2 Theory of Operation for Flow Measurement
The thermal mass flow measurement system consists of two components:
the restrictor or bypass and the flow sensor. Figure 3-1 is a diagram of the
flow stream through the device, with an enlarged view of the flow sensor.
Gas flow entering the device is separated into two paths; one straight
through the restrictor and the other through the flow sensor.
The separation of the flow streams is caused by the restrictor. During flow
conditions, there will be a pressure differential across the restrictor that
forces gas to flow in the sensor.
The pressure difference caused by the restrictor varies linearly with total flow
rate. The sensor has the same linear pressure difference versus flow
relationship. The ratio of sensor flow to the flow through the restrictor
remains constant over the range of the device. The full scale flow rate of the
device is established by selecting a restrictor with the correct pressure
differential for the desired flow.
The flow sensor is a very narrow, thin-walled Hastelloy tube. This tube has
upstream and downstream temperature sensing and heating elements.
During no-flow conditions, the amount of heat reaching each temperature
sensor is equal, so temperatures T1 and T2 (Figure 3-1) are equal. Gas
flowing through the tube carries heat away from the upstream temperature
sensor and toward the downstream sensor. The temperature difference, T2
– T1, is directly proportional to the gas mass flow.
3-1
Section 3 Operation
FMA-7400/7500 Series Devices
Figure 3-1 FMA-7400/7500 Series Operating Principles
3-2
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
4-1 Overview
No routine maintenance is required on the Omega FMA-7400/7500 Series
devices. If an in-line filter is used, the filtering elements should be
periodically replaced or cleaned. Any precision unit such as a flow
controller requires occasional servicing, especially if it has been operating
for an extended period of time. If reactive gases are being used, it is
recommended that you send the device to Omega Engineering for cleaning
and recalibration. Please follow the instructions for removal, product
packaging and product return instructions found in Section 2 - Installation.
All active process instrumentation and equipment is subject to aging and
wear from their environment. This includes temperature, mechanical stress,
component tolerance shift, contaminant buildup, oxidation, and other
influences. The effects are gradual, but over time the changes can affect
the accuracy of even the best equipment. Therefore, it is recommended to
re-zero the device at 6 month intervals. Refer to Section 2-14 Performance
Checks for re-zeroing instructions.
4-2 Maintenance
4-1
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
4-3 Troubleshooting
This section includes a Troubleshooting Checklist and a FMA-7400/7500
Series Troubleshooting Guide that identifies symptoms, possible causes,
and corrective actions.
4-2
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
4-4 Troubleshooting Checklist
1. Check environmental factors that could affect changes to FMA-7400/
7500 Series performance. The most common environmental factors are
listed in Table 4-1.
2. Check supply voltage and check for a consistent ground.
3. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
4. Check FMA-7400/7500 Series voltage response by moving the setpoint
back and forth.
Observe for voltage changes.
Table 4-1 Environmental Factors
FMA-7400/7500 Series
Performance
Possible Causes
Inaccurate flow.
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Control problems. Can
Differential pressure not within operating range
not reach setpoint.
Inlet pressure not stable
Oscillation.
Zeroing problems, Indicated
Temperature shift (steady state or transient).
zero is not stable.
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
4-3
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
4-5 FMA-7400/7500 Series Troubleshooting Guide
Table 4-2 FMA-7400/7500 Series Troubleshooting Guide
Symptoms & Possible Causes
Corrective Action
1. No gas flow.
Is the gas supply turned on?
Check shut-off valve and pressure readout. Open
the gas supply.
Is the regulator turned on at the
correct operating pressure?
Turn off the regulator and reset it to the
recommended pressure as described in the
Data Sheet.
Are any upstream or downstream
shut-off valves closed, either by
the system or because of failure?
Verify that the valves are open and operating
properly.
Is the MOD LED light on the FMA-7400/7500
lit solid green?
Observe the LED display panel on top of the FMA-7400/7500
device to verify. If the LED light is not lit, cycle power the
to reboot device.
Is the commanded setpoint
at 0.00 Vdc?
Verify.
Has the valve been commanded
off by an active “valve closed” input?
Verify.
Confirm that pin 12 is not connected to DC common.
2. Flow out of range.
Is the gas inlet/outlet pressure differential
either too high or too low?
Verify that the pressure is correct for the gas
and range. If required, adjust inlet/outlet pressure
to achieve proper pressure reading.
NOTE: If the differential pressure is too high,
voltage to the valve will be zero, which is
abnormally low for the setpoint. If the
differential is too low, voltage to the valve will
be at its maximum value, which is abnormally
high for the set-point.
4-4
Is the MOD LED light on the FMA-7400/7500
lit solid green?
Observe the LED at the top of the FMA-7400/7500 device.
If the LED light is not lit, cycle power the device to
reboot.
Is the setpoint correct for the
required gas flow?
Verify the analog signal.
Is the device calibrated for the
particular gas?
Check the device side label. Run a
flow check to verify.
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
Table 4-2 FMA-7400/7500 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
Corrective Action
2. Flow out of range (Continuted).
Is the device zero correct?
Zero the device according to zeroing
procedure in Section 2-16. Verify leak check rates
are OK.
3. No gas control; flow is at or
above maximum.
Is the gas pressure across the device
too high?
Verify that the pressure is correct for the gas and
range. If required, adjust inlet/outlet pressure to
achieve proper pressure reading.
Are system valves open, or is the
purge input activated?
Verify.
Confirm that pin 12 is not connected to an active voltage
source.
Is the setpoint correct for the
required flow?
Verify.
4. No gas flow above some setpoint.
NOTE: When the setpoint is
increased beyond this point,
the FMA-7400/7500 Series signal remains at
some value lower than the set-point.
Is the gas inlet/outlet differential
pressure sufficient?
Verify that the pressure is correct for
the gas and range. If required, adjust
regulator to achieve proper pressure.
NOTE: If the pressure is too low,
the valve voltage to the FMA-7400/7500 Series
will be at its maximum output. This condition
will cause internal FMA valve heating and
inability to properly reach desired flow setpoints.
Is the FMA-7400/7500 Series calibrated for the
gas flow?
Check FMA-7400/7500 Series side label. Run a flow check
to verify. If flow is incorrect, replace the FMA-7400/7500 Series
with a unit that is calibrated properly.
4-5
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
Table 4-2 FMA-7400/7500 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
Corrective Action
5. No gas flow below some setpoint.
NOTE: When the setpoint is
decreased below this point, the
FMA-7400/7500 Series signal remains at
some value higher than the
setpoint.
Is the gas inlet/outlet differential
pressure too high?
Verify that the pressure is correct for
regulator to achieve proper pressure.
Is the FMA-7400/7500 Series leaking?
Check for contamination. Test the FMA-7400/7500 Series
for leak integrity. Replace the FMA-7400/7500 Series
if leakage is detected.
6. Gas flow oscillates.
Is the FMA-7400/7500 Series calibrated for the
gas flowing?
Check the FMA-7400/7500 Series side can label. Run
a flow check to verify. If flow is incorrect,
replace the FMA-7400/7500 Series.
Is there too much gas pressure
across the FMA-7400/7500 Series?
Verify that the pressure is correct for
this gas and range. If required, adjust
regulator to achieve proper pressure
reading.
Are inlet and outlet pressures stable?
If outlet pressure is unstable, check for
(no oscillation or hunting) a faulty vacuum pump,
or hunting at a downstream valve.
Check inlet pressure. A faulty
pressure regulator can make the
FMA-7400/7500 Series appear to oscillate.
Adjust inlet pressure up or down by 2
psig increments until hunting disappears.
Verify common gas pressure is
within range.
NOTE: Hunting or oscillation can be
contributed to multiple FMA-7400/7500 Series sharing
a common gas manifold. Therefore,
inspect gas delivery sources to
the gas box (for example;
sharing a common gas bottle and
calling for gas at the same time). Valve leak.
Unregulated gas pressure from Facilities.
4-6
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
Table 4-2 FMA-7400/7500 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
Corrective Action
7. Does not read correct FMA-7400/7500
Series zero reading.
Is the differential pressure across the
FMA-7400/7500 Series really zero?
Is the supply voltage within specified range?
Is the FMA-7400/7500 Series mounted in the proper
attitude? Is the flow output signal of the
FMA-7400/7500 Series really zero?
FMA-7400/7500 Series valve leakage.
Incorrect MFC zero.
8. Zero Drift.
Improper zero of the FMA-7400/7500 Series?
Excessive Valve leakage?
FMA-7400/7500 Series aging or sensor stabilization.
Zero is not correct.
9. Calibration Drift.
Gas box temperature too high?
Is it linear offset?
Zero is not correct.
10. FMA-7400/7500 Series indicates Overshoot.
If idle for an extended period of time,
high inlet pressure or contamination will cause
overshoot on first use.
Purge the line before operating.
11.Indicates the wrong full scale
value for FMA-7400/7500 Series.
Older version of Configurator used
to program FMA-7400/7500 Series.
Update Configurator. Refer to Section 2-18.
12. FMA-7400/7500 Series dumps large volume
of gas into chamber when setpoint is
commanded.
FMA-7400/7500 Series and pneumatic timing may
be offset. FMA-7400/7500 Series overshoots
Change the sequence.
13. Display output doesn’t match
FMA-7400/7500 Series flow output.
Cable resistance or read-out impedance causing
offset in the display.
Check cables and read out. Eliminate any ground loops.
4-7
Section 4 Maintenance & Troubleshooting
FMA-7400/7500 Series Devices
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
4-8
Section 5 Product Description Code
FMA-7400/7500 Series Devices
5-1 Product Description Code
Table 5-1 FMA-7400/7500 Series Product Description Code Table
Omega Model #
FMA-7502
FMA-7503
FMA-7504
FMA-7505
FMA-7506
FMA-7507
FMA-7508
FMA-7509
FMA-7510
FMA-7511
FMA-7402
FMA-7403
FMA-7404
FMA-7405
FMA-7406
FMA-7407
FMA-7408
FMA-7409
FMA-7410
FMA-7411
Description
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Full Scale
3 to 10 sccm
11 to 30 sccm
31 to 92 sccm
93 to 280 sccm
281 to 860 sccm
0.86 to 2.6 lpm
2.6 to 7.2 lpm
7.2 to 15 lpm
15 to 30 lpm
30 to 50 lpm
3 to 10 sccm
11 to 30 sccm
31 to 92 sccm
93 to 280 sccm
281 to 860 sccm
0.86 to 2.6 lpm
2.6 to 7.2 lpm
7.2 to 15 lpm
15 to 30 lpm
30 to 50 lpm
Valve
None
None
None
None
None
None
None
None
None
None
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
SealSeat
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
FKM/FKM
Bin Size
SA40
SA41
SA42
SA43
SA44
SA45
SA46
SA47
SA48
SA50
SA40
SA41
SA42
SA43
SA44
SA45
SA46
SA47
SA48
SA50
Standard: 1/4" Compression fitting, atmosphere downstream, RS485 0 to 5 V input/output and Ref Temperature 0C
FMA-7502-SS
FMA-7503-SS
FMA-7504-SS
FMA-7505-SS
FMA-7506-SS
FMA-7507-SS
FMA-7508-SS
FMA-7509-SS
FMA-7510-SS
FMA-7511-SS
FMA-7402-SS
FMA-7403-SS
FMA-7404-SS
FMA-7405-SS
FMA-7406-SS
FMA-7407-SS
FMA-7408-SS
FMA-7409-SS
FMA-7410-SS
FMA-7411-SS
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow meter
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
Mass flow controller
3 to 10 sccm
11 to 30 sccm
31 to 92 sccm
93 to 280 sccm
281 to 860 sccm
0.86 to 2.6 lpm
2.6 to 7.2 lpm
7.2 to 15 lpm
15 to 30 lpm
30 to 50 lpm
3 to 10 sccm
11 to 30 sccm
31 to 92 sccm
93 to 280 sccm
281 to 860 sccm
0.86 to 2.6 lpm
2.6 to 7.2 lpm
7.2 to 15 lpm
15 to 30 lpm
30 to 50 lpm
None
None
None
None
None
None
None
None
None
None
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
Normally Closed
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
316SS/PTFE
SA40
SA41
SA42
SA43
SA44
SA45
SA46
SA47
SA48
SA50
SA40
SA41
SA42
SA43
SA44
SA45
SA46
SA47
SA48
SA50
Standard for -SS: 1/4 VCR fitting, atmosphere downstream, RS485 0 to 5 V input/output and Ref Temperature 0C
Options: Fitting size/type, vacuum or Positive pressure downstream, different communications
or input/outputs,
Auto shut-off, Auto-zero, Non-standard ref temperature.
5-1
Section 5 Product Description Code
FMA-7400/7500 Series Devices
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
5-2
Appendix A: FMA-7400/7500 Series Gas Table
FMA-7400/7500 Series Devices
A-1 FMA-7400/7500 Series Gas Table
Table A-1 FMA-7400/7500 Series Gas Table - Codes 1-99, Bins SA40 to SA43
Min inlet pressure for vac.
exhaust (PSIA)
Gas Symbol
He
Ne
Ar
Kr
Xe
H2
Air
CO
HBr
HCl
N2
D2
O2
NO
HI
F2
Cl2
H2S
H2Se
CO2
N2O
CH4
NH3
PH3
SO2
CH3F
COS
AsH3
ClCN
C2H4
SiH4
C2H2
GeH4
COF2
BF3
CHF3
NF3
B2H6
COCl2
PF3
CF4
SiH2Cl2
C3H6-b)
BCl3
ClO3F
ClF3
C2H7N
SiF4
C3H8
C2F4
Si2H6
GeF4
Gas
Code
1
2
4
5
6
7
8
9
10
11
13
14
15
16
17
18
19
22
23
25
27
28
29
31
32
33
34
35
37
38
39
42
43
46
48
49
53
58
60
62
63
67
69
70
72
77
85
88
89
94
97
99
Gas Name
Elastomer seal FMA
Helium
Neon
Argon
Krypton
Xenon
Hydrogen
Air
Carbon Monoxide
Hydrogen Bromide
Hydrogen Chloride
Nitrogen
Deuterium
Oxygen
Nitric Oxide
Hydrogen Iodide
Fluorine
Chlorine
Hydrogen Sulfide
Hydrogen Selenide
Carbon Dioxide
Nitrous Oxide
Methane
Ammonia
Phosphine
Sulfur Dioxide
Methyl Fluoride
Carbonyl Sulfide
Arsine
Cyanogen Chloride
Ethylene
Silane
Acetylene
Germane
Carbonyl Fluoride
Boron Trifluoride
Fluoroform (Freon-23)
Nitrogen Trifluoride
Diborane
Phosgene
Phosphorus Trifluoride
Carbon Tetrafluoride (Freon-14)
Dichlorosilane
Propylene
Boron Trichloride
Perchloryl Fluoride
Chlorine Trifluoride
Dimethylamine
Silicon Tetrafluoride
Propane
Tetrafluoroethylene
DISILANE
Germanium Tetrafluoride
FKM
FKM
FKM
FKM
FKM
FKM
FKM
FKM
FKM
EPDM
FKM
FKM
FKM
FKM,Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
Perfluoroelastomer
Buna
FKM,Buna
FKM,Buna
Neoprene,EPDM
Perfluoroelastomer
EPDM
FKM
FKM
Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
FKM
FKM
Perfluoroelastomer
FKM,Perfluoroelastomer
PFA
Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
FKM
Perfluoroelastomer
Perfluoroelastomer
FKM,Perfluoroelastomer
FKM
FKM,Buna
-
SA40SA47
19.7
24.7
24.7
29.7
24.7
14.7
24.7
24.7
24.7
24.7
24.7
14.7
24.7
24.7
24.7
24.7
24.7
24.7
24.7
24.7
24.7
24.7
24.7
19.7
19.7
24.7
24.7
24.7
14.7
24.7
24.7
16.7
24.7
19.7
19.7
24.7
24.7
19.7
12.7
19.7
24.7
14.7
19.7
11.7
14.7
14.7
9.7
19.7
9.7
19.7
19.7
20.7
SA48
SA50
24.7
29.7
29.7
44.7
14.7
29.7
29.7
19.7
40.0
29.7
14.7
29.7
29.7
29.7
29.7
29.7
29.7
29.7
29.7
29.7
24.7
24.7
24.7
24.7
29.7
29.7
29.7
21.7
29.7
29.7
19.7
29.7
19.7
24.7
24.7
29.7
19.7
14.7
24.7
24.7
19.7
19.7
14.7
20.7
20.7
14.7
24.7
11.7
19.7
19.7
24.7
32.7
34.7
29.7
29.7
29.7
29.7
21.7
26.7
26.7
26.7
Min inlet pressure for atm.
exhaust (PSIA)
SA40SA47
21.3
25.1
25.1
29.7
25.1
18.4
25.1
25.1
25.1
25.1
25.1
18.4
25.1
25.1
25.1
25.1
25.1
25.1
25.1
25.1
25.1
25.1
25.1
21.3
21.3
25.1
25.1
25.1
18.4
25.1
25.1
19.4
25.1
21.3
21.3
25.1
25.1
21.3
17.4
21.3
25.1
18.4
21.3
17.0
18.4
18.4
16.3
21.3
16.3
21.3
21.3
22.0
SA40
SA41
SA42
SA43
SA48
SA50
Low
High
Low
High
Low
High
Low
High
25.1
29.7
14.7
44.7
5
5
5
4
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
14
14
14
11
6
10
10
10
8
10
10
10
10
10
5
9
6
8
7
7
7
8
8
7
6
7
7
6
5
6
6
6
6
5
5
5
5
4
3
4
4
3
4
3
4
4
3
4
3
3
3
3
15
15
15
12
7
11
11
11
9
11
11
11
11
11
6
10
7
9
8
8
8
9
9
8
7
8
8
7
6
7
7
7
7
6
6
6
6
5
4
5
5
4
5
4
5
5
4
5
4
4
4
4
42
42
42
32
19
30
30
30
25
30
30
30
30
30
15
27
19
25
22
22
21
23
24
22
17
22
20
18
15
17
18
18
17
17
16
16
15
12
11
14
13
10
12
10
12
11
11
11
10
10
10
10
43
43
43
33
20
31
31
31
26
31
31
31
31
31
16
28
20
26
23
23
22
24
25
23
18
23
21
19
16
18
19
19
18
18
17
17
16
13
12
15
14
11
13
11
13
12
12
12
11
11
11
11
128
129
130
100
58
92
92
92
77
92
92
94
92
92
46
83
57
76
66
69
65
71
73
67
52
67
60
55
46
54
56
57
53
53
50
48
46
38
35
42
40
29
36
31
38
35
34
34
32
31
30
30
129
130
131
101
59
93
93
93
78
93
93
95
93
93
47
84
58
77
67
70
66
72
74
68
53
68
61
56
47
55
57
58
54
54
51
49
47
39
36
43
41
30
37
32
39
36
35
35
33
32
31
31
400
400
400
300
178
280
280
280
235
280
280
280
280
280
141
254
173
232
202
209
200
215
223
205
157
204
183
170
142
163
170
170
161
160
150
145
140
116
106
129
121
89
110
94
114
107
101
103
100
100
92
92
29.7
18.4
29.7
29.7
40.0
29.7
18.4
29.7
29.7
29.7
29.7
29.7
29.7
29.7
29.7
29.7
25.1
25.1
25.1
25.1
29.7
29.7
29.7
22.7
29.7
29.7
21.3
29.7
21.3
25.1
25.1
29.7
21.3
18.4
25.1
25.1
21.3
21.3
18.4
22.0
22.0
18.4
25.1
17.0
21.3
21.3
25.1
21.3
32.7
34.7
29.7
29.7
29.7
29.7
22.7
26.8
26.8
26.8
For reference only, consult Omega Engineering.
A-1
Appendix A: FMA-7400/7500 Series Gas Table
FMA-7400/7500 Series Devices
Table A-2 FMA-7400/7500 Series Gas Table - Codes 108-5022, Bins SA40 to SA43
Min inlet pressure for
vac. exhaust (PSIA)
Gas Symbol
SiCl4
C3H9N
SF6
C2F6
WF6
C3F8
C4F8
C3F6
C2HF5
CH2F2
CH6Si
(CH3)3SiH
C5F8
C4F6
C4F6-q)
C5F8O
Si3H9N
10%GeH4/H2
10%PH3/H2
4.5%PH3/N2
20%O2/He
5%H2/N2
1%B2H6/H2
1%PH3/H2
3%B2H6/N2
3%H2/N2
30%He/O2
30%O2/He
4%H2/He
4%H2/N2
5%B2H6/Ar
50%PH3/SiH4
10%O2/He
2%SiH4/N2
5%B2H6/N2
.8%B2H6/N2
10%PH3/He
2%B2H6/N2
10%GeH4/Ar
5%H2/He
5%B2H6/He
15%B2H6/H2
3%C2H4/He
10%B2H6/Ar
2.7%C2H4/He
1%GeH4/H2
.5%GeH4/H2
2%PH3/H2
3.9%H2/N2
Gas
Code
108
109
110
118
121
128
129
138
155
160
185
190
266
270
297
354
368
509
516
528
536
542
557
563
595
597
603
604
606
607
615
632
649
653
654
662
674
695
698
762
766
820
878
881
897
898
910
916
930
Gas Name
Silicon Tetrachloride
Trimethylamine
Sulfur Hexafluoride
Hexafluoroethane (Freon-116)
Tungsten Hexafluoride
Perfluoropropane
Octafluorocyclobutane
Hexafluoropropylene
PENTAFLUOROETHANE (FREON-125)
Difluoromethane
Methylsilane (MONO)
Trimethylsilane (TMSi)
Octafluorocyclopentene
Hexafluoro-2-butyne
Hexafluoro Butadiene-1-3
Epoxyperfluorocyclopentene
Trisilylamine (TSA)
10%Germane/Hydrogen
10%Phosphine/Hydrogen
4.5%Phosphine/Nitrogen
20%Oxygen/Helium
5%Hydrogen/Nitrogen
1%Diborane Hydrogen
1%Phosphine/Hydrogen
3%Diborane/Nitrogen
3%Hydrogen/Nitrogen
30%Helium/Oxygen
30%Oxygen/Helium
4%Hydrogen/Helium
4%Hydrogen/Nitrogen
5%Diborane/Argon
50%Phosphine/Silane
10%Oxygen/Helium
2%SILANE/NITROGEN
5%Diborane/Nitrogen
.8%Diborane/Nitrogen
10%Phosphine/Helium
2%Diborane/Nitrogen
10%Germane/Argon
5%Hydrogen/Helium
5%Diborane/Helium
15%Diborane/Hydrogen
3%Ethylene/Helium
5%Diborane/Argon
2.7%Ethylene/Helium
1%Germane/Hydrogen
0.5%Germane/Hydrogen
2%Phosphine/Hydrogen
3.9%Hydrogen/Nitrogen
Elastomer seal FMA
Perfluoroelastomer
Perfluoroelastomer
FKM,EPDM
FKM,Buna
FKM
FKM
FKM,Buna
FKM
FKM
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
SA40SA47
8.7
6.7
19.7
19.7
9.7
19.7
19.7
19.7
19.7
24.7
9.7
6.7
9.7
9.7
14.7
19.7
6.0
20.7
14.7
20.7
19.7
24.7
24.7
19.7
20.7
24.7
24.7
19.7
19.7
24.7
24.7
16.7
19.7
19.7
24.7
24.7
14.7
24.7
24.7
19.7
14.7
14.7
19.7
24.7
19.7
20.7
20.7
21.7
24.7
24.7
24.7
24.7
29.7
29.7
19.7
29.7
29.7
19.7
16.7
14.7
19.7
29.7
19.7
20.7
20.7
21.7
29.7
SA48
8.7
19.7
19.7
11.7
19.7
19.7
19.7
19.7
29.7
14.7
14.7
14.7
19.7
7.2
20.7
14.7
29.7
29.7
29.7
29.7
19.7
29.7
29.7
29.7
29.7
19.7
29.7
SA50
20.7
SA48
SA41
SA42
SA43
25.1
25.1
25.1
29.7
29.7
21.3
29.7
29.7
21.3
19.4
18.4
21.3
29.7
21.3
22.0
22.0
22.7
29.7
Low
0
0
0
0
0
0
0
0
0
3
3
0
0
0
0
0
0
3
3
3
4
3
3
3
3
3
4
4
5
3
4
3
5
3
3
3
4
3
4
5
4
3
4
4
4
3
3
3
3
High
0
0
0
0
0
0
0
0
0
6
4
0
0
0
0
0
0
9
9
10
13
10
10
10
9
10
11
12
14
10
12
6
13
10
9
10
13
10
12
14
12
8
13
11
13
10
10
10
10
Low
3
3
3
3
3
3
3
3
3
7
5
3
3
3
3
3
3
10
10
11
14
11
11
11
10
11
12
13
15
11
13
7
14
11
10
11
14
11
13
15
13
9
14
12
14
11
11
11
11
High
6
8
8
8
5
5
5
6
8
19
12
7
5
6
6
4
6
28
28
30
38
30
30
30
29
30
33
37
41
30
38
20
41
30
28
30
40
30
38
41
38
25
40
35
40
30
30
30
30
Low
7
9
9
9
6
6
6
7
9
20
13
8
6
7
7
5
7
29
29
31
39
31
31
31
30
31
34
38
42
31
39
21
42
31
29
31
41
31
39
42
39
26
41
36
41
31
31
31
31
High
18
25
25
23
16
16
16
20
25
57
37
20
14
19
17
13
20
86
90
94
120
92
91
90
90
92
100
113
126
92
116
62
123
93
86
93
120
93
114
125
115
76
125
105
125
91
92
91
92
Low
19
26
26
24
17
17
17
21
26
58
38
21
15
20
18
14
21
87
91
95
121
93
92
91
91
93
101
114
127
93
117
63
124
94
87
94
121
94
115
126
116
77
126
106
126
92
93
92
93
High
56
78
77
71
50
50
50
60
77
174
111
62
44
57
52
40
60
260
275
280
360
280
270
273
270
280
301
345
400
280
353
190
380
280
262
280
370
280
350
400
350
230
375
320
377
275
280
275
280
314
16.0
21.3
21.3
17.0
21.3
21.3
21.3
21.3
29.7
18.4
18.4
18.4
21.3
15.6
22.0
18.4
29.7
29.7
29.7
29.7
21.3
29.7
29.7
29.7
29.7
21.3
29.7
SA50
SA40
22.0
10%B2H6/He
939
10%Diborane/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
11
12
34
35
103
104
30%C2H4/He
946
30%Ethylene/Helium
MIX-Check components
19.7
24.7
21.3
25.1
3
10
11
30
31
90
91
275
10%H2/He
950
10%Hydrogen/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
13
14
40
41
125
126
380
15%Hydrogen/Diborane
15%H2/B2H6
MIX-Check components
19.7
19.7
21.3
21.3
3
4
5
14
15
42
43
130
17%CH4/CO2
958
17%Methane/Carbon Dioxide
MIX-Check components
24.7
29.7
25.1
29.7
3
7
8
23
24
70
71
210
20%CH6Si/H2
962
953
20%Methylsilane (MONO)/Hydrogen
MIX-Check components
14.7
19.7
18.4
21.3
3
7
8
23
24
71
72
212
50%CH3SiHCl2/H2
965
50%Dichloromethylsilane/Hydrogen
MIX-Check components
11.7
13.7
17.0
17.9
3
4
5
14
15
42
43
130
20%GeH4/H2
978
20%Germane/Hydrogen
MIX-Check components
19.7
24.7
21.3
25.1
3
8
9
26
27
81
82
241
0.5%B2H6/He
COS-Special
979
5022
0.5%Diborane/Helium
Carbonyl Sulfide (Special)
MIX-Check components
-
14.7
24.7
19.7
29.7
18.4
25.1
21.3
29.7
5
3
14
7
15
8
42
20
43
21
130
60
131
61
400
183
For reference only, consult Omega Engineering.
A-2
Min inlet pressure for
atm. exhaust (PSIA)
SA40SA47
16.0
15.5
21.3
21.3
16.3
21.3
21.3
21.3
21.3
25.1
16.3
15.5
16.3
16.3
18.4
21.3
15.3
22.0
18.4
22.0
21.3
25.1
25.1
21.3
22.0
25.1
25.1
21.3
21.3
25.1
25.1
19.4
21.3
21.3
25.1
25.1
18.4
25.1
25.1
21.3
18.4
18.4
21.3
25.1
21.3
22.0
22.0
22.7
25.1
Appendix A: FMA-7400/7500 Series Gas Table
FMA-7400/7500 Series Devices
Table A-3 FMA-7400/7500 Series Gas Table - Codes 1-99, Bins SA44 to SA50
SA44
Gas Symbol
He
Ne
Ar
Kr
Xe
H2
Air
CO
HBr
HCl
N2
D2
O2
NO
HI
F2
Cl2
H2S
H2Se
CO2
N2O
CH4
NH3
PH3
SO2
CH3F
COS
AsH3
ClCN
C2H4
SiH4
C2H2
GeH4
COF2
BF3
CHF3
NF3
B2H6
COCl2
PF3
CF4
SiH2Cl2
C3H6-b)
BCl3
ClO3F
ClF3
C2H7N
SiF4
C3H8
C2F4
Si2H6
GeF4
Gas
Code
1
2
4
5
6
7
8
9
10
11
13
14
15
16
17
18
19
22
23
25
27
28
29
31
32
33
34
35
37
38
39
42
43
46
48
49
53
58
60
62
63
67
69
70
72
77
85
88
89
94
97
99
SA45
SA46
SA47
SA48
SA50
Gas Name
Elastomer seal FMA
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Helium
Neon
Argon
Krypton
Xenon
Hydrogen
Air
Carbon Monoxide
Hydrogen Bromide
Hydrogen Chloride
Nitrogen
Deuterium
Oxygen
Nitric Oxide
Hydrogen Iodide
Fluorine
Chlorine
Hydrogen Sulfide
Hydrogen Selenide
Carbon Dioxide
Nitrous Oxide
Methane
Ammonia
Phosphine
Sulfur Dioxide
Methyl Fluoride
Carbonyl Sulfide
Arsine
Cyanogen Chloride
Ethylene
Silane
Acetylene
Germane
Carbonyl Fluoride
Boron Trifluoride
Fluoroform (Freon-23)
Nitrogen Trifluoride
Diborane
Phosgene
Phosphorus Trifluoride
Carbon Tetrafluoride (Freon-14)
Dichlorosilane
Propylene
Boron Trichloride
Perchloryl Fluoride
Chlorine Trifluoride
Dimethylamine
Silicon Tetrafluoride
Propane
Tetrafluoroethylene
DISILANE
Germanium Tetrafluoride
FKM
FKM
FKM
FKM
FKM
FKM
FKM
FKM
FKM
EPDM
FKM
FKM
FKM
FKM,Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
Perfluoroelastomer
Buna
FKM,Buna
FKM,Buna
Neoprene,EPDM
Perfluoroelastomer
EPDM
FKM
FKM
Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
FKM
FKM
Perfluoroelastomer
FKM,Perfluoroelastomer
PFA
Perfluoroelastomer
Perfluoroelastomer
FKM
Perfluoroelastomer
FKM
Perfluoroelastomer
Perfluoroelastomer
FKM,Perfluoroelastomer
FKM
FKM,Buna
-
401
401
401
301
179
281
281
281
236
281
281
281
281
281
142
255
174
233
203
210
201
216
224
206
158
205
184
171
143
164
171
171
162
161
151
146
141
117
107
130
122
90
111
95
115
108
102
104
101
101
93
93
1194
1207
1214
930
546
860
860
860
723
860
860
880
860
860
432
780
531
713
620
642
611
660
685
629
483
625
562
510
435
501
523
530
495
500
457
445
430
358
325
400
372
273
338
289
350
327
310
316
300
300
282
282
1195
1208
1215
931
547
861
861
861
724
861
861
881
861
861
433
781
532
714
621
643
612
661
686
630
484
626
563
511
436
502
524
531
496
501
458
446
431
359
326
401
373
274
339
290
351
328
311
317
301
301
283
283
3609
3650
3671
2800
1651
2600
2600
2600
2187
2600
2600
2600
2600
2600
1305
2358
1604
2155
1874
1942
1849
2000
2072
1901
1459
1890
1700
1550
1320
1516
1581
1600
1500
1500
1381
1344
1300
1082
1000
1200
1123
824
1022
874
1060
1000
960
1000
910
900
853
860
3610
3651
3672
2801
1652
2601
2601
2601
2188
2601
2601
2601
2601
2601
1306
2359
1605
2156
1875
1943
1850
2001
2073
1902
1460
1891
1701
1551
1321
1517
1582
1601
1501
1501
1382
1345
1301
1083
1001
1201
1124
825
1023
875
1061
1001
961
1001
911
901
854
861
11100
10700
10000
7160
4210
8000
7400
7300
5610
6900
7200
8100
7200
7200
3340
6700
4850
5900
4770
5300
5100
5800
6000
5200
3800
5200
4500
4000
3400
4400
4400
4400
4000
4000
3800
3600
3600
3100
2520
3200
3010
2140
2800
2230
2800
2560
2530
2600
2420
2300
2300
2200
11101
10701
10001
7161
4211
8001
7401
7301
5611
6901
7201
8101
7201
7201
3341
6701
4851
5901
4771
5301
5101
5801
6001
5201
3801
5201
4501
4001
3401
4401
4401
4401
4001
4001
3801
3601
3601
3101
2521
3201
3011
2141
2801
2231
2801
2561
2531
2601
2421
2301
2301
2201
23100
22100
20200
14901
8761
16400
15000
15000
11701
14200
15000
16500
15000
15000
6960
14000
10100
12100
10000
11000
10400
12000
12200
10700
7920
10600
9400
8500
7060
9300
9300
9300
8400
8400
7900
7600
7500
6400
5250
6800
6400
4450
5900
4650
5800
5340
5400
5400
5100
4900
4900
4700
23101
x
20201
x
x
16401
15001
15001
x
14201
15001
16501
15001
15001
6961
14001
10101
12101
10001
11001
10401
12001
12201
10701
7921
10601
9401
8501
7061
9301
9301
9301
8401
8401
7901
7601
7501
6401
5251
6801
6401
4451
5901
4651
5801
5341
5401
5401
5101
4901
4901
4701
47000
x
41000
x
x
33000
30001
30001
x
29001
30000
33001
30000
30001
13901
28001
20201
24101
20001
22000
21000
24000
25000
21301
15801
21201
18301
17001
14101
18201
18201
18201
16401
16500
15501
15000
15000
12601
10501
13301
12600
8901
11701
9301
11501
10701
10601
10601
10101
9801
9801
9401
47001
x
41001
x
x
33001
x
x
x
x
30001
x
30001
x
x
x
x
x
x
22001
21001
24001
25001
x
x
x
x
x
x
x
x
x
x
16501
x
15001
15001
x
x
x
12601
x
x
x
x
x
x
x
x
x
x
x
90900
x
50001
x
x
66301
x
x
x
x
50001
x
50001
x
x
x
x
x
x
35401
33601
41801
41801
x
x
x
x
x
x
x
x
x
x
19001
x
23601
23601
x
x
x
20001
x
x
x
x
x
x
x
x
x
x
x
For reference only, consult Omega Engineering.
A-3
Appendix A: FMA-7400/7500 Series Gas Table
FMA-7400/7500 Series Devices
Table A-4 FMA-7400/7500 Series Gas Table - Codes 108-5022, Bins SA44 to SA50
SA44
Gas Symbol
Gas
Code
SA46
SA47
SA48
SA50
Gas Name
Elastomer seal FMA
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
SiCl4
C3H9N
SF6
C2F6
WF6
C3F8
C4F8
C3F6
C2HF5
CH2F2
CH6Si
(CH3)3SiH
C5F8
C4F6
C4F6-q)
C5F8O
Si3H9N
10%GeH4/H2
10%PH3/H2
4.5%PH3/N2
20%O2/He
5%H2/N2
1%B2H6/H2
1%PH3/H2
3%B2H6/N2
3%H2/N2
30%He/O2
30%O2/He
4%H2/He
4%H2/N2
5%B2H6/Ar
50%PH3/SiH4
10%O2/He
2%SiH4/N2
5%B2H6/N2
.8%B2H6/N2
10%PH3/He
2%B2H6/N2
10%GeH4/Ar
5%H2/He
5%B2H6/He
15%B2H6/H2
3%C2H4/He
10%B2H6/Ar
2.7%C2H4/He
1%GeH4/H2
.5%GeH4/H2
2%PH3/H2
3.9%H2/N2
108
109
110
118
121
128
129
138
155
160
185
190
266
270
297
354
368
509
516
528
536
542
557
563
595
597
603
604
606
607
615
632
649
653
654
662
674
695
698
762
766
820
878
881
897
898
910
916
930
Silicon Tetrachloride
Trimethylamine
Sulfur Hexafluoride
Hexafluoroethane (Freon-116)
Tungsten Hexafluoride
Perfluoropropane
Octafluorocyclobutane
Hexafluoropropylene
PENTAFLUOROETHANE (FREON-125)
Difluoromethane
Methylsilane (MONO)
Trimethylsilane (TMSi)
Octafluorocyclopentene
Hexafluoro-2-butyne
Hexafluoro Butadiene-1-3
Epoxyperfluorocyclopentene
Trisilylamine (TSA)
10%Germane/Hydrogen
10%Phosphine/Hydrogen
4.5%Phosphine/Nitrogen
20%Oxygen/Helium
5%Hydrogen/Nitrogen
1%Diborane Hydrogen
1%Phosphine/Hydrogen
3%Diborane/Nitrogen
3%Hydrogen/Nitrogen
30%Helium/Oxygen
30%Oxygen/Helium
4%Hydrogen/Helium
4%Hydrogen/Nitrogen
5%Diborane/Argon
50%Phosphine/Silane
10%Oxygen/Helium
2%SILANE/NITROGEN
5%Diborane/Nitrogen
.8%Diborane/Nitrogen
10%Phosphine/Helium
2%Diborane/Nitrogen
10%Germane/Argon
5%Hydrogen/Helium
5%Diborane/Helium
15%Diborane/Hydrogen
3%Ethylene/Helium
5%Diborane/Argon
2.7%Ethylene/Helium
1%Germane/Hydrogen
0.5%Germane/Hydrogen
2%Phosphine/Hydrogen
3.9%Hydrogen/Nitrogen
Perfluoroelastomer
Perfluoroelastomer
FKM,EPDM
FKM,Buna
FKM
FKM
FKM,Buna
FKM
FKM
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
MIX-Check components
57
79
78
72
51
51
51
61
78
175
112
63
45
58
53
41
61
261
276
281
361
281
271
274
271
281
302
346
401
281
354
191
381
281
263
281
371
281
351
401
351
231
376
321
378
276
281
276
281
172
240
237
218
150
154
154
184
235
533
340
189
134
176
160
122
181
800
813
880
1102
860
850
850
850
860
950
1060
1200
860
1084
580
1150
870
804
870
1100
870
1070
1200
1100
710
1150
1000
1158
850
860
850
860
173
241
238
219
151
155
155
185
236
534
341
190
135
177
161
123
182
801
814
881
1103
861
851
851
851
861
951
1061
1201
861
1085
581
1151
871
805
871
1101
871
1071
1201
1101
711
1151
1001
1159
851
861
851
861
520
720
715
658
460
465
465
556
711
1612
1050
572
406
533
500
369
560
2400
2500
2600
3331
2600
2510
2531
2500
2600
2800
3203
3600
2600
3278
1730
3500
2600
2500
2600
3400
2600
3300
3600
3300
2120
3500
3000
3502
2530
2600
2530
2600
521
721
716
659
461
466
466
557
712
1613
1051
573
407
534
501
370
561
2401
2501
2601
3332
2601
2511
2532
2501
2601
2801
3204
3601
2601
3279
1731
3501
2601
2501
2601
3401
2601
3301
3601
3301
2121
3501
3001
3503
2531
2601
2531
2601
1320
1910
1900
1750
1200
1200
1170
1470
1900
4300
2800
1530
1050
1400
1270
1000
1410
7200
7600
7200
10000
7400
7900
7800
7100
7400
8100
9700
11000
7400
8900
4800
10500
7300
7000
7300
10000
7200
8700
11000
10000
6500
10700
8100
10700
8000
8000
8000
7400
1321
1911
1901
1751
1201
1201
1171
1471
1901
4301
2801
1531
1051
1401
1271
1001
1411
7201
7601
7201
10001
7401
7901
7801
7101
7401
8101
9701
11001
7401
8901
4801
10501
7301
7001
7301
10001
7201
8701
11001
10001
6501
10701
8101
10701
8001
8001
8001
7401
2751
4000
4000
3700
2500
2500
2430
3050
4000
9000
5900
3200
2200
2900
2640
2100
3000
15000
15500
15000
21000
15100
16100
16000
14500
15100
17000
20000
23000
15100
18201
10000
22000
15000
14100
15000
21000
15000
18000
23000
21000
13300
22100
17000
22200
16200
16300
16200
15100
x
4001
4001
3701
2501
2501
2431
3051
4001
9001
5901
x
2201
x
2641
2101
3001
15001
15501
15001
21001
15101
16101
16001
14501
15101
17001
20001
23001
15101
x
10001
22001
15001
14101
15001
21001
15001
18001
23001
21001
13301
22101
17001
22201
16201
16301
16201
15101
x
8101
8000
7401
5001
5101
4901
6111
8001
18001
11601
x
4501
x
5271
4201
6001
30001
31001
30001
42001
31001
33001
32001
29001
30101
34001
40001
46001
30101
x
20001
44001
30001
28101
30001
43001
30001
36001
46001
42001
27001
45001
34001
45001
33001
33001
33001
30101
x
x
8001
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
12101
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
10%B2H6/He
939
10%Diborane/Helium
MIX-Check components
315
965
966
2918
2919
9000
9001
18400
18401
37001
x
x
30%C2H4/He
946
30%Ethylene/Helium
MIX-Check components
276
850
851
2551
2552
7800
7801
16000
16001
32001
x
x
10%H2/He
950
10%Hydrogen/Helium
MIX-Check components
381
1200
1201
3500
3501
10700
10701
22200
22201
45001
x
x
15%H2/B2H6
953
15%Hydrogen/Diborane
MIX-Check components
131
400
401
1200
1201
3400
3401
7100
7101
14001
x
x
17%CH4/CO2
958
17%Methane/Carbon Dioxide
MIX-Check components
211
650
651
2000
2001
5400
5401
11000
11001
22001
x
x
20%CH6Si/H2
962
20%Methylsilane (MONO)/Hydrogen
MIX-Check components
213
660
661
2000
2001
5900
5901
12000
12001
24001
x
x
50%CH3SiHCl2/H2
965
50%Dichloromethylsilane/Hydrogen
MIX-Check components
131
400
401
1200
1201
3100
3101
6600
6601
13001
x
x
20%GeH4/H2
978
20%Germane/Hydrogen
MIX-Check components
242
750
751
2240
2241
6600
6601
13500
13501
27001
x
x
0.5%B2H6/He
COS-Special
979
5022
0.5%Diborane/Helium
Carbonyl Sulfide (Special)
MIX-Check components
-
401
184
1200
562
1201
563
3700
1700
3701
1701
11000
4500
11001
4501
23000
9400
23001
9401
47001
18301
x
x
x
x
For reference only, consult Omega Engineering.
A-4
SA45
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a
period of 13 months from date of purchase. OMEGA’s WARRANTY adds an additional one (1) month
grace period to the normal one (1) year product warranty to cover handling and shipping time. This
ensures that OMEGA’s customers receive maximum coverage on each product.
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service
Department will issue an Authorized Return (AR) number immediately upon phone or written request.
Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no
charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser,
including but not limited to mishandling, improper interfacing, operation outside of design limits,
improper repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of
having been tampered with or shows evidence of having been damaged as a result of excessive corrosion;
or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating
conditions outside of OMEGA’s control. Components in which wear is not warranted, include but are not
limited to contact points, fuses, and triacs.
OMEGA is pleased to offer suggestions on the use of its various products. However,
OMEGA neither assumes responsibility for any omissions or errors nor assumes liability for any
damages that result from the use of its products in accordance with information provided by
OMEGA, either verbal or written. OMEGA warrants only that the parts manufactured by the
company will be as specified and free of defects. OMEGA MAKES NO OTHER WARRANTIES OR
REPRESENTATIONS OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF
TITLE, AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY
AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION OF
LIABILITY: The remedies of purchaser set forth herein are exclusive, and the total liability of
OMEGA with respect to this order, whether based on contract, warranty, negligence,
indemnification, strict liability or otherwise, shall not exceed the purchase price of the
component upon which liability is based. In no event shall OMEGA be liable for
consequential, incidental or special damages.
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a “Basic
Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in medical
applications or used on humans. Should any Product(s) be used in or with any nuclear installation or
activity, medical application, used on humans, or misused in any way, OMEGA assumes no responsibility
as set forth in our basic WARRANTY/DISCLAIMER language, and, additionally, purchaser will indemnify
OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the
Product(s) in such a manner.
RETURN REQUESTS/INQUIRIES
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE
RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED RETURN
(AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO AVOID
PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the return
package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent
breakage in transit.
FOR WARRANTY RETURNS, please have the
following information available BEFORE
contacting OMEGA:
1. Purchase Order number under which the product
was PURCHASED,
2. Model and serial number of the product under
warranty, and
3. Repair instructions and/or specific problems
relative to the product.
FOR NON-WARRANTY REPAIRS, consult OMEGA
for current repair charges. Have the following
information available BEFORE contacting OMEGA:
1. Purchase Order number to cover the COST
of the repair,
2. Model and serial number of the product, and
3. Repair instructions and/or specific problems
relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible. This affords
our customers the latest in technology and engineering.
OMEGA is a registered trademark of OMEGA ENGINEERING, INC.
© Copyright 2009 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied,
reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without the
prior written consent of OMEGA ENGINEERING, INC.
Where Do I Find Everything I Need for
Process Measurement and Control?
OMEGA…Of Course!
Shop online at omega.com SM
TEMPERATURE
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Wire: Thermocouple, RTD & Thermistor
Calibrators & Ice Point References
Recorders, Controllers & Process Monitors
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PRESSURE, STRAIN AND FORCE
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FLOW/LEVEL
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Air Velocity Indicators
Turbine/Paddlewheel Systems
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pH/CONDUCTIVITY
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pH Electrodes, Testers & Accessories
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DATA ACQUISITION
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ENVIRONMENTAL
MONITORING AND CONTROL
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Industrial Water & Wastewater Treatment
pH, Conductivity & Dissolved Oxygen Instruments
541B161AAO-12-12
M-5293/0513
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