Semiconductor Switch Matrix Mainframes 707b 708b Six-slot and Single-slot Versions

Semiconductor Switch Matrix Mainframes 707b 708b Six-slot and Single-slot Versions
Semiconductor Switch Matrix Mainframes
Six-slot and Single-slot Versions
• Significantly faster commandto-connect speeds than earlier
Series 700 mainframes
• 708B mainframe controls a single
8×12 matrix card
• Compatible with the popular
plug-in cards designed for the
707A/708A mainframes
Semiconductor switch systems
Semiconductor switch systems
• 707B mainframe controls up to
six 8×12 matrix cards
• Support for both remote (via
LXI, USB, and GPIB interfaces)
and manual (via front panel)
• Integrates seamlessly with
the Model 4200-SCS for
semiconductor I-V and
C-V characterization via
GPIB interface
• Stores hundreds of switching
configurations and channel
patterns in non-volatile memory
for reuse
• LXI interface supports remote
programming and control
• Embedded TSP® processor and
TSP-Link Technology interface
make it easy to integrate Series
2600B System SourceMeter® SMU
instruments into a high speed,
self-contained tester
• 14 bits of digital I/O
Model 707B Six-slot Semiconductor Switch Matrix Mainframe
The six-slot Model 707B and single-slot Model 708B Semiconductor Switch Matrix Mainframes extend
Keithley’s decades-long commitment to innovation in switch systems optimized for semiconductor
test applications. These mainframes build upon the strengths of their popular predecessors, the
Models 707/707A and 708/708A, adding new features and capabilities designed to speed and simplify
system integration and test development. New control options and interfaces offer system builders
even greater flexibility when configuring high performance switching systems for use in both lab and
production environments. Just as important, both new mainframes are compatible with the popular
switch cards developed for the Models 707A and 708A, simplifying and minimizing the cost of switch
system migration.
Faster Command-to-Connect
High performance Model 707B and 708B semiconductor switch matrix mainframes slash the time
from command to connection, offering significantly faster test sequences and overall system throughput than Keithley’s earlier 707A and 708A mainframes.
• Support for semiconductor
device characterization and
process control monitoring
• Fully automated testing of
a wide range of electronic
components in both lab and
production environments
Model 708B Single-slot Semiconductor Switch Matrix Mainframe
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707BSix-slot semiconductor
switch mainframe
switch mainframe
Extended warranty, service, and
calibration contracts are available.
Accessories Supplied
Product Information CD-ROM:
Product Information CD
Quick Start Guide
Switching and Control
Product Information CD
Test Script Builder User Suite CD
CA-180-4A: CAT 5 Ethernet
Crossover Cable, 1m (3.3 ft)
CA-179-2A: CAT 5 Ethernet
Cable, 3m (10 ft)
CO-7: Line Cord
Rear Fixed Rack Mount
Hardware (707B only)
4299-6 7007-1
25-pin Female Digital I/O to 25-pin Male Cable,
3m (10 ft)
Digital I/O to Trigger Link Cable, 1m (3.3 ft)
Universal Full Rack Mount Kit (for Model 708B)
Double-shielded GPIB Cable, 1m (3.3 ft)
Double-shielded GPIB Cable, 2m (6.6 ft)
Semiconductor Matrix Card
High Voltage Semiconductor Matrix Card
Triax Fastening Tool
Rear Slide Rack Mount Kit (for Model 707B)
High Frequency, 2-pole, 4×12 Matrix Card
Low Current Matrix Card
IVI-COM and IVI-C Driver for C#, VB.NET, Visual C++, VB6, and
LabVIEW® Driver
Example TSP® Scripts
Test Script Builder
1-year Factory Warranty Extended to 3 Years
from date of shipment
1-year Factory Warranty Extended to 5 Years
from date of shipment
1-year Factory Warranty Extended to 3 Years
from date of shipment
1-year Factory Warranty Extended to 5 Years
from date of shipment
Six-slot and Single-slot Versions
Optimized for Easy Integration with Existing Test Systems
To minimize migration issues for current users of Model 707A and 708A mainframes, the Model 707B
and 708B are designed for command emulation with Models 707A and 708A. The 707B and 708B also
support the popular switch matrix cards developed for the Model 707A and 708A, so there’s no need
to purchase new cards to take advantage of the new mainframes:
• Model 7174A Low Current Matrix Card: This
8×12 card is designed for semiconductor research,
development, and production applications that demand
high quality switching of I-V and C-V signals. Its low
leakage and minimal dielectric absorption ensure that
key device measurements can be performed many
times faster than with earlier switching technologies.
Its superior low current performance makes it ideal
for use with both Models 2635B and 2636B System
SourceMeter® SMU Instruments for adding high speed
I-V source and measurement capabilities and for
accessing the I-V and C-V measurement capabilities of
the Model 4200-SCS Parameter Analyzer.
• Model 7072 Semiconductor Matrix Card: This 8×12
switch supports the low level and high impedance
measurements encountered in semiconductor
parametric tests on wafers and devices. It provides
two low current paths with just 1pA maximum offset
current for sensitive sub-picoamp measurements,
and two other paths optimized for measuring C-V
characteristics from DC to 1MHz. Four more high
quality signal paths with <20pA offset current
provide for general-purpose signal switching up to
100nA or 200V.
Semiconductor switch systems
Ordering Information
Semiconductor Switch Matrix Mainframes
• Model 7072-HV High Voltage Semiconductor
Matrix Card: Like the Model 7072, the 7072-HV is
designed to handle low level, high voltage, and high
impedance signals. It provides two signal paths capable
of switching 1300V with less than 1pA of offset current,
so it’s ideal for switching the high voltage signals
encountered in breakdown measurements or oxide
integrity testing. Two paths are optimized for C-V
measurements from DC to 1MHz or for switching low
currents with a common ground. Four additional high
quality signal paths with less than 20pA offset current
provide for signal switching to 200V.
• Model 7173-50 High Frequency, 2-pole, 4×12
Matrix Card: The Model 7173-50 provides 200MHz
bandwidth and a rise time of <2ns. Offset voltage is
<15μV per crosspoint, and offset current is <200pA.
Its combined AC and DC capabilities make it ideal
for mixed-signal applications, such as testing ADCs
or DACs, which involve measuring both digital and
analog signals.
For additional details and specifications on these
cards, refer to their individual data sheets, available on A Keithley applications engineer or
representative can help you choose the most appropriate
card or cards for a specific application.
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Semiconductor Switch Matrix Mainframes
Six-slot and Single-slot Versions
Semiconductor switch systems
In addition, the Models 707B and 708B offer a number of features to ensure their compatibility with
Keithley instrumentation already at work in labs and on test floors around the world. For example,
these semiconductor switch matrix mainframes are compatible with the Model 4200-SCS semiconductor Parameter Analyzer’s existing matrix driver and GPIB interface, which allows them to become
drop-in switch matrix replacements for many applications. The new mainframes also provide electrical performance that correlates closely with that of the Model 707A and Model 7174A switch card, the
previous industry-standard switching solution.
Suited for Both Lab and Fab
Like their predecessors, the Models 707B/708B are specifically designed for the requirements of
both semiconductor lab and production test environments, delivering ultra low current switching
performance using standard triax connectors and cables. For automating smaller test systems with a
limited number of pins and instruments, the Model 708B supports a single switch card with up to 8
rows and 12 columns (8×12). For applications requiring higher switch counts, the Model 707B can
accommodate up to six 8×12 cards, which can be connected via an internal backplane or jumpers to
form larger matrices. Both mainframes also support mixed signal switching for both DC and RF (up
to 200MHz) signals.
Choice of Manual Operation or Remote Programming
Both mainframes offer a variety of manual operation and remote programming functions via either
the front panel controls or a choice of interfaces. For example, for manual operation, such as when
experimenting with a new switching configuration, the updated front panel interface allows labeling
switch card rows (instruments) and columns (pins) alphanumerically, which simplifies keeping track
of what’s connected to each crosspoint. An LED crosspoint display makes it easy to identify whether a
specific channel is open or closed, as well as to
determine which slots are occupied and which
cards are currently in use. A two-line display
shows both error messages and user-defined
messages, and displays control menus and open/
closed channel messages.
An intuitive navigation/control knob allows
scrolling through and opening/closing channels. Key pad controls support scrolling through
menus, changing host interface settings, saving
and restoring instrument setups, and loading and running factory and user-defined test
scripts, etc.
Test system integrators can choose from several
instrument communication interfaces and tools
for remote programming and control of the
Model 707B or 708B:
• TSP-Link Technology is a high speed system
expansion and coordination interface that
simplifies linking instruments and switches
for faster inter-unit communication and
control. It provides a high speed, low
The Models 707B and 708B include a built-in Web interface that offers a quick and easy method to control the instrument remotely. Interactive
schematics of each card in the mainframe support point-and-click control for opening and closing switches.
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Semiconductor Switch Matrix Mainframes
Six-slot and Single-slot Versions
• With TSP-Link, there’s no need to add external triggers and remote communication cables to
individual units because all TSP-Link connected devices can be controlled from a single master
unit. Up to 16 Model 707B/708B chassis can be linked together to form a larger switching matrix
using TSP-Link. Each mainframe has two TSP-Link connectors to facilitate chaining instruments
together. They can also be used to connect Model 707B/708B semiconductor switch matrix
mainframes to other TSP-Link enabled instruments, such as Keithley’s Series 2600B System
SourceMeter® SMU instruments. Every piece of instrumentation connected via TSP-Link can be
controlled by a single master unit, just as though they were all housed in the same chassis.
• Like all instruments compliant with the LXI (LAN eXtensions for Instrumentation) standard,
the Models 707B and 708B have a built-in switch control Web page that is accessible via any
standard Web browser. In conjunction with a 10/100M Base-T Ethernet connection and LAN-based
triggering, this Web interface offers a quick and easy method to program switching patterns.
Interactive schematics of each card in the mainframe support point-and-click control for opening
and closing switches. A scan list builder is provided to guide users through the requirements
of a scan list (such as trigger and looping definitions) for more advanced applications. The Web
page’s point-and-click design provides easy switch system control, as well as basic switch system
troubleshooting and diagnostics capabilities.
• TSB (Test Script Builder) Embedded is an application with a reduced feature set that resides
in the mainframe and can be accessed through its web page. Like the full Test Script Builder
programming tool, it offers script-building functions and can be used to run example scripts
provided with the mainframe. It also includes a command line interface that can be used to issue
single-line ICL commands.
• For those replacing Keithley’s earlier 707A/708A mainframes and who prefer to minimize the
levels of changes to their test systems, the Models 707B and 708B offer a GPIB interface and
707A/708A DDC command emulation capabilities to simplify the migration process. These users
can incorporate the “B” models into their test systems without making any changes to their legacy
code or hardware interface. However, these users will not be able to take full advantage of many
of the throughput gains that TSP control provides, such as the new GPIB interface that allows you
to control additional GPIB-compatible instruments and systems.
• A rear panel Universal Serial Bus (USB) port allows a host computer to communicate with and
control the 707B/708B over a USB interface.
Optimized for Easy Integration with Series 2600B-Based Systems
The Models 707B and 708B are ideal companion products for systems that incorporate Series 2600B
instrumentation, such as Keithley’s ACS and S530 integrated test systems. These mainframes share
the same TSP, Lua scripting language, and TSP-Link interface as the Series 2600B and support an
ultra low current switch matrix (the Model 7174A) that complements the Model 2636B’s low current
sensitivity. The Models 707B/708B offer test s­ ystem builders a switch matrix that is fast, scriptable,
and works seamlessly with all Series 2600B models.
In common with Series 2600B SMU instruments, the Models 707B/708B provide system builders with
the advantages of the Keithley Test Script Builder (TSB) Integrated Development Environment (IDE).
TSB IDE is a programming tool provided on the CD that accompanies each mainframe. It can be used
to create, modify, debug, and store TSP scripts. It provides a project/file manager window to store
and organize test scripts, a text-sensitive program editor (like Visual Basic) to create and modify test
TSP code, and an immediate instrument control window to send GPIB commands and receive data
from the instrument. The immediate window allows viewing the output of a given test script and
simplifies debugging.
Advantages of TSP® Technology
for Switch Throughput
The test script processor (TSP) technology embedded in these upgraded
mainframes allows for distributed
processing and control rather than
relying exclusively on a central PC
to direct their operation, increasing test speed and lowering overall
test cost. The TSP is a full-featured
test sequence engine that allows
unprecedented control of the test
sequence. In addition to responding
to individual ICL commands, it can
store a user-defined test script or
sequence in memory and execute
it on command, which limits the
set-up and configuration time for
each step in the test sequence and
increases throughput by decreasing
communication time.
Test scripts are complete test
programs based on Lua, an easy-touse but highly efficient and compact
scripting language. Because test
scripts can contain any sequence
of routines that are executable
by conventional programming
languages (including decisionmaking algorithms and control of
the digital I/O), the mainframe can
manage the operation of entire
tests without sending readings
back to a PC for use in decision
making. The TSP can even access the
mainframe’s 14-bit digital I/O on the
fly, increasing throughput by allowing
instrument and binning equip­ment
such as handlers to run without PC
interference. This eliminates delays
due to GPIB traffic congestion and
greatly improves overall test times.
TSP control allows individual
switches and instruments or groups
of them to operate autonomously,
often eliminating the need for a
high-level PC system controller
altogether. This same proven TSP
technology has already been successfully incorporated into Keithley’s
innovative Series 2600B System
SourceMeter SMU instruments and
Series 3700A Multimeter/Switch
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Semiconductor switch systems
latency interface to other TSP (Test Script Processor)-based hardware, enabling simple multibox and multi-instrument software control, as well as simplified test system scaling as new
requirements evolve.
Semiconductor Switch Matrix Mainframes
Six-slot and Single-slot Versions
Supported Cards
8×12 Semiconductor Matrix 200V, 1A
8×12 HV Semiconductor Matrix 1300V, 0.1A
4×12, 2-pole, High-Frequency Matrix Card
8×12 Low-Current, High-Speed Matrix Card, with 3-lug
Triax Row and Column connects
Execution Speed
707B/708B specifications
Command: channel.close (‘ch_list’) or (‘ch_list’)
Single Command Execution Time (ms)
1. Time between the start of a single digio.writebit (1, 1), channel.close
(‘ch_list’) or (‘ch_list’) {which includes relay settle
time}, and digio.writebit (1, 0) command.
Maximum Trigger Rate (setups per second)1:
7072-HV: ≥65.
7173-50: ≥160.
7174A: ≥815.
Trigger in to start of Matrix Ready Pulse
(DDC Mode): ≤85μs.
Trigger in to trigger out: ≤0.5μs.
Trigger Timer accuracy: ≤0.5μs.
Ethernet: RJ-45 connector, 10/100BaseT, Auto-MDIX.
LXI Compliance: LXI Version 1.2.
Power Supply:
707B: 100V to 240VAC, 50Hz–60Hz, 210VA max.
708B: 100V to 240VAC, 50Hz–60Hz, 110VA max.
Relay Drive:
707B: 30W (6V at 5.0A) max. per slot, 162W (6V at 27A)
max. for all slots.
708B: 30W (6V at 5.0A) max.
Safety: Conforms to European Union Low Voltage Directive.
707B: 356mm high × 432mm wide × 574mm deep (14.0 in
× 17.0 in × 22.6 in).
708B: 90mm high × 432mm wide × 574mm deep (3.5 in ×
17.0 in × 22.6 in).
Dimensions with Card Installed:
707B: 356mm high × 432mm wide × 612mm deep (14.0 in
× 17.0 in × 24.1 in).
708B: 90mm high × 432mm wide × 612mm deep (3.5 in ×
17.0 in × 24.1 in).
Weight: 707B: 14.5kg (32 lbs). 708B: 7.3kg (16 lbs).
Shipping Weight: 707B: 27.2kg (60 lbs). 708B: 16.4 kg
(36 lbs).
Environment: For indoor use only.
Altitude: Maximum 2000 meters above sea level.
Operating: 0°– 50°C, 80% R.H. up to 35°C. Derate to 3%
R.H./°C, 35°– 50°C.
Storage: – 25°C to 65°C.
1. Includes scan.scancount = 100, scan.stepcount ≥3, channel.
connectrule = channel.OFF or 0, and relay settle time.
Model 708B rear panel
Model 707B rear panel
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707B/708B specifications
Emulation: 707A/708A Device Dependent Commands
(DDC). Since the architecture of the Model 707B/708B
differs from the Model 707A/708A, some commands are
different. Refer to notes in the 707B-901 Reference manual
for additional details.
Break Before Make: channel.connectrule= channel.
Make Before Break: channel.connectrule= channel.
None: channel.connectrule= channel.OFF or 0, the system
will close relays as it is able to without adhering to a rule.
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology.
USB 2.0 Device (rear panel type B): Full and high speed,
USBTMC compliant.
Digital I/O Interface
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Maximum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O
bit): 960µA.
Maximum Sink Current @ Maximum Logic Low
Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital
I/O pin): –11mA.
5V Power Supply Pin: Limited to 600mA, solid state fuse
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