LIQUI-FLOW > Introduction

LIQUI-FLOW > Introduction
LIQUI-FLOW
TM
Series L10 / L20 Digital Mass Flow Meters / Controllers for Liquids
> Introduction
Bronkhorst High-Tech B.V., the European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has more than 30 years experience in designing and ­manufac­turing
precise and reliable measurement and control devices. With a
wide range of instruments, Bronkhorst High-Tech offers ­innovative
­solutions for many different applications in many different ­markets.
The instruments are made to customers’ specification, in ­various
styles, suitable for use in laboratory, industrial environment,
­hazardous areas, semiconductor processing or analytical equipment.
> LIQUI-FLOWTM series L10 / L20
Bronkhorst High-Tech B.V. has been the pioneer in the field of
micro to low flow liquid metering instruments based on a thermal
measuring principle. The digital LIQUI-FLOWTM Mass Flow Meter
was designed to cover the range between 5 and 1000 g/h (Full Scale) in a compact instrument with a fast response. The Flow Meter is basically a stainless steel tube without any
moving parts or built-in obstructions. The heater/sensor assembly
is arranged around the tube and, by following the anemometric
­principle: a constant difference in temperature (ΔT) is created and
the energy required to maintain the ΔT is dependent of the mass
flow rate. Due to the benefits of the unique patented sensor, the
fluid will be warmed to a maximum of 5°C, thereby making the
L10/L20 series suitable for fluids with low boiling points.
> Liquid flow control
Flow control is achieved by integrating a control valve onto the
body of the Liquid Flow Meter, or by mounting it as a separate
component (in IP65 configuration). This control valve has a purge
connection on top of the sleeve that enables easy elimination of air
or gas when starting up the system. The electronic control function
forms part of the normal circuitry in the liquid flow meter, so the
need for an external controller is eliminated. For an alternative way
of liquid flow control, i.e. by using a close-coupled pump, please
see our leaflet ‘Liquid Dosing Systems’.
> Multi-Bus technology
Bronkhorst High-Tech developed their latest digital instruments
according to the “multi-bus” principle. The basic pc-board on
the instrument contains all of the general functions needed for
­measurement and control. It has analog I/O-signals and also an
RS232 connection as a standard feature. In addition there is the
possibility of integrating an interface board with DeviceNet™,
Profibus-DP®, Modbus-RTU, EtherCAT® or FLOW-BUS protocol.
> General LIQUI-FLOW® features
u fast and accurate measuring signal
u insensitive to mounting position
u very small internal volume
u suitable for liquids with low boiling points
u for laboratory and OEM applications
u also available for industrial applications, with IP65 housing,
ATEX Cat. 3, Zone 2
> Digital features
u DeviceNetTM, Profibus-DP®, Modbus-RTU, EtherCAT®
or FLOW-BUS slave
u RS232 interface
u alarm and counter functions
> Fields of application
u Semiconductor industry
u HPLC applications
u Chemical industry
u Food & Pharmaceutical industry
u Analytical laboratories
> Technical specifications
Measurement / control system
Accuracy, standard :±1% FS
(based on actual calibration)
Turndown
:L10 Series 1 : 20 (5 ... 100%)
L20 Series 1 : 50 (2 … 100%)
Reproducibility
:±0,2% FS typical H2O
Settling time (controller)
:< 2 seconds
Operating temperature
:5…50°C
Temperature sensitivity
:±0,1% FS/°C
Attitude sensitivity
:negligible
Warm-up time
:30 min for optimum accuracy;
10 min. for accuracy ±2% FS
Mechanical parts
L23 Mass Flow Meter for Liquids
Material (wetted parts)
:Stainless steel 316L / 320; other on request
Process connections
:1/8”, 1/4” or 6 mm OD compression
type; 1/8” or 1/4” face seal male;
other on request
> Models and flow ranges
Purge connection (controller)
:1/16” OD compression type
Liquid Mass Flow Meters; PN100 (pressure rating 100 bar)
Seals
:Kalrez-6375; other on request
Model min. flow max. flow
Ingress protection (housing)
:IP40 or IP65
L13 / L13I
0,25…5 g/h
5…100 g/h
L23 / L23I
2…100 g/h
20…1000 g/h
Electrical properties
Power supply
:+15…24 Vdc
Liquid Mass Flow Controllers; PN100 (P-max 100 bar)
Power consumption
:Meter: 100 mA;
Analog output/command
Digital communication
Model
min. flow
max. flow
Controller: 350 mA;
L13V12 / L13I+C2I
0,25…5 g/h
5…100 g/h
Add 50 mA for Profibus, if applicable
L23V12 / L23I+C2I
2…100 g/h
20…1000 g/h
:0...5 (10) Vdc or 0 (4)…20 mA
(sourcing output)
Indicated ranges are based on H2O.
:Standard: RS232
Options: Profibus-DP®, DeviceNetTM,
Modbus-RTU, EtherCAT®, FLOW-BUS
Higher pressure ratings are available on special request.
> Model number identification
Electrical connection IP40 configuration
Analog/RS232
:9-pin D-connector (male);
Profibus-DP®
:bus: 9-pin D-connector (female);
LNN VNN
-
A
A
A
-
NN
-
A
-
NNA
power: 9-pin D-connector (male);
DeviceNetTM
:5-pin M12-connector (male);
Modbus-RTU/FLOW-BUS
:RJ45 modular jack
Sensor code
Factory selected
L13 (I) Meter, max. 100 g/h
L23 (I) Meter, max. 1000 g/h
Electrical connection IP65 configuration
L13V12 Controller, max. 100 g/h
Internal seals
Analog/RS232
:8 DIN (male)
L23V12 Controller, max. 1000 g/h
K Kalrez (FFKM)
Profibus-DP®
:bus: 5-pin M12 (female); power: 8 DIN (male)
DeviceNetTM
Connections (in/out)
:5-pin M12 (male)
Communication (I/O)
EtherCAT®
: 2x RJ45 modular jack (in/out)
A
RS232 + analog (n/c control)
1 1/8“ OD compression type
Modbus-RTU/FLOW-BUS
:5-pin M12 (male)
B
RS232 + analog (n/o control)
2 1/4“ OD compression type
(n/c control)
3 6 mm OD compression type
8 1/4” Face seal male
9
D RS232 + DeviceNetTM Calibration
E
(n/o control)
References
M RS232 + Modbus-RTU (n/c control)
:Verified by NKO, the Dutch calibration
organisation, and traceable to Dutch and
RS232 + DeviceNetTM international standards.
P
Liquids
Q RS232 + Profibus-DP® (n/o control)
System
:Standard calibration: H2O or IPA (Isopropyl
Alcohol); for other liquids apply to factory.
:Precision laboratory balances.
Technical specifications subject to change without notice.
Other
N RS232 + Modbus-RTU (n/o control)
R
RS232 + Profibus-DP® (n/c control)
Supply voltage
D+15…24 Vdc
RS232 + FLOW-BUS (n/c control)
S
RS232 + FLOW-BUS (n/o control)
T
RS232 + EtherCAT®
(n/c control)
A 0…5 Vdc
U RS232 + EtherCAT® (n/o control)
B 0…10 Vdc
Analog output
F 0…20 mA sourcing
G 4…20 mA sourcing
> Dimensions and weights
Mass Flow Meter
IP65 Mass Flow Controller
Model
A
B
C
H
K
Weight (kg)
B
C
H
K
L
Weight (kg)
L13 (1/8” OD)
47
98
47
118
25
0,4
L13I+C2I (1/8” OD) 127
178
74
125
29
36
1,4
L23 (1/4” OD)
47
102
47
121
25
0,4
L23I+C2I (1/4” OD) 127
178
74
128
29
36
1,4
Dimensions in mm
Model
A
Dimensions in mm
> Industrial style LIQUI-FLOW® series
The LIQUI-FLOWTM series L10I/L20I digital Liquid Flow Meters /
Controllers for low flow ranges are equipped with a rugged
­‘industrial style’ (IP65) pc-board housing for use in industrial
­environments or even Zone 2 hazardous areas, due to their ATEX category 3 approval. The instruments operate on a thermal,
­thru-flow measuring principle. The flow meter can be connected to a control valve to form a closed control loop. The standard
direct acting valve (model C2I) is normally closed, has a pressure
­capability of 100 bar (1500 psi) and a purge connection for easy
elimination of air or gas.
1/16”
Mass Flow Controller
Model
A
B
C
H
K
L13V12 (1/8” OD)
77
128
47
118
25
Weight (kg)
0,7
L23V12 (1/4” OD)
77
132
47
121
25
0,7
Dimensions in mm
L23I Mass Flow Meter, IP65 configuration
IP65 Mass Flow Meter
Model
A
B
C
H
K
L
L13I (1/8” OD)
47
98
74
125
25
36
Weight (kg)
0,9
L23I (1/4” OD)
47
102
74
128
25
36
0,9
Dimensions in mm
IP65 Mass Flow Meter with close-coupled Control Valve
> Application examples
> Vaporizing
Verifying pumps
LIQUI-FLOW® flow meters are used in analytical applications in
combination with HPLC pumps, verifying the pump performance or
even, as shown in this example, close-coupled with a gear pump.
Using the integrated PID controller, the setpoint signal continuously
adjusts the rotation speed of the pump.
Liquid Delivery with Vapour Control
The CEM-System (Controlled Evaporation and Mixing) is an
­innovative Liquid Delivery System (LDS) that can be applied for
atmospheric or vacuum processes. The vapour generation system
consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device.
The system is suitable for mixing liquid flows of 0,25-1200 g/h
­resulting in ­saturated vapour flows of 50 mln/min up to 100 ln/min.
This ­vaporizer system can replace bubblers. New opportunities
­created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.
Option 2: flow validation
solvent
reservoir
solvent
reservoir
detector
Features
HPLC column
HPLC pump
pc
Option 1:
flow control
column heater
HPLC injection
valve
process sample in
liquid mass
flow meter/controller
uAccurately controlled gas/liquid mixture (mass flow)
uFast response
uHigh reproducibility
uHandles water, solvents, liquid mixtures
uVery stable vapour flow
uFlexible selection of gas/liquid ratio
uLower working temperature than conventional system
process sample out
GMP validation in food & pharma filling processes
In food and pharmaceutical applications critical filling ­processes
must be very accurately and, above all traceably documented. LIQUIFLOW® Series L10/L20 are particularly suitable for this task. The
main features of these digital instruments are: high precision, fast
response, compact design and a very small internal volume.
Vapour delivery applications
uCVD (Chemical Vapour Deposition), e.g. for hardening, thin film coating or planarization processes
uTesting/calibration of analyzers with reference gas vapor ­concentrations
uToxic gas effects on protective clothing
uAnalyzers with reference H2O vapour concentrations
uHumidification of fuels
uAnaesthetics
E-7100, control panels for:
Liquid flow Temperature Carrier gas
Batch filling process
mass flow meter
inverse flow
pump
3/2-way valve
filling process
Mixing valve
Flow meter
for liquids
filling process
Mass flow
controller
Gas
H2O
CEM
Heat
exchanger
filling process
Humidified
atmosphere
reactor,
chamber,
cell
Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands
T +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E [email protected]
E.L20.0812.H
©BHT2012-036
solvent
reservoir
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