Turbomolecular Pumps (англ.)

Turbomolecular Pumps (англ.)
179.01.01
Excerpt from the
Leybold Vacuum Full Line Catalog 2005
Product Section C09
Edition May 2005
C09
Turbomolecular Pumps
35 - 3200 l x s-1
vacuum
Back to Contents
Turbomolecular Pumps
Contents
General
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.03
Applications
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.12
Accessories
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.13
Products and Accessories
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.14
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.36
Electronic Frequency Converters
for Turbomolecular Pumps with Mechanical Rotor Suspension
. . C09.58
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.66
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.76
Electronic Frequency Converters
for Turbomolecular Pumps with Magnetic Rotor Suspension . . . . C09.94
Other Accessories
Vibration Absorber
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.102
Air Cooling Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.102
Flange Heater for CF High Vacuum Flanges . . . . . . . . . . . . . . . . . C09.103
Fine Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.103
Solenoid Venting Valve
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.104
Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.104
Purge Gas and Venting Valve
. . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.104
Accessories for Serial Interfaces RS 232 C and RS 485 C . . . . . . . C09.105
C09 2
Leybold Vacuum Full Line Catalog 2005
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General
Turbomolecular Pumps
General
The turbomolecular pumps from
Leybold generate a clean high and
ultra-high vacuum, are easy to
operate and are exceptionally
reliable. In connection with a well
rated backing pump, pressures
below 10-10 mbar (0.75 x 10-10 Torr)
can be attained.
Leybold offers two product lines:
1. TURBOVAC line
Turbomolecular pumps with
mechanical rotor suspension
2. TURBOVAC MAG line
Turbomolecular pumps with
magnetic rotor suspension
Each of the two product lines
contains “classic” turbomolecular
pumps as well as turbomolecular
pumps with a compound stage.
TURBOVAC TW 70 H turbomolecular pump
with mechanical rotor suspension and
dual compound stage
Leybold is one of the world’s leading
manufacturer of turbomolecular
pumps. Consequently, the
TURBOVAC and the TURBOVAC
MAG pumps are successfully used in
many applications. A list of the most
important ones is given in the table
“Applications” in the section
“General”.
Principle of Operation
The turbomolecular pump is a turbine
with blades. By the momentum
transfer from the rapidly rotating rotor
blades to the gas molecules their
initially non-directed thermal motion is
changed to a directed motion.
TURBOVAC TW 361 turbomolecular pump
with mechanical rotor suspension
Hence, the pumping process in a
turbomolecular pump results from the
directed motion of the gas molecules
from the inlet flange to the forevacuum port.
In the molecular flow range - i.e. at
pressures below 10-3 mbar (0.75 x
10-3 Torr) - the mean free path of the
gas molecules is larger than the
spacing between rotor and stator
blades (typically some tenths of a
millimeter). Consequently, the
molecules collide primarily with the
rotor blades with the result that the
pumping process is highly efficient.
In the range of laminar flow, i.e. at
pressures over 10-1 mbar (0.75 x
10-1 Torr) the situation is completely
different. The effect of the rotor is
impaired by the frequent collisions
between the molecules. Therefore, a
turbomolecular pump is not capable
of pumping gases at atmospheric
pressure thus necessitating the use
of a suitably rated forevacuum pump.
To create the directed motion of the
gas molecules, the tips of the rotor
blades have to move at high speeds.
Hence, a high rotational speed of the
rotor is required. In the case of
Leybold turbomolecular pumps the
rotor speeds vary from about
36,000 rpm for the larger rotor
diameters (e.g. TURBOVAC 1000
about 20 cm (7.87 in.)) to
72,000 rpm. for small rotor diameters
(e.g. TURBOVAC 50 about 6 cm
(2.36 in.))
MAG W 1500 CT turbomolecular pump
with magnetic rotor suspension and
compound stage
3 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
TURBOVAC Product Line
Characteristic Quantities
Pumping speed (volume flow rate),
S, [l x s-1]
The pumping speed for a given type
of gas depends on the diameter of
the rotor and the high vacuum flange,
the rotor/stator design, the rotor
speed and the molecular weight of
the gas.
The pumping speed S is a non-linear
function of the inlet pressure p1:
S = S(p1).
Gas throughput, Q, [mbar x l x s-1]
Gas throughput Q is linked to the
pumping speed S and the inlet
pressure p1 through the relationship
Q = Q(p1) = p1 · S(p1).
The maximum permissible gas
throughput Qmax is attained at the
maximum permissible inlet pressure
p1, max: Qmax = Q(p1, max).
Compression, K
For a given type of gas, compression
K is defined as the ratio between
forevacuum pressure pVV
(= pres-sure on the forevacuum side
of the turbomolecular pump) and the
highvacuum pressure pHV
(= pressure on the highvacuum side
of the turbomolecular pump):
k = k(pVV)
= pVV / pHV = pVV / pHV(pVV).
General
Compression depends very much on
the gas throughput: at a given forevacuum pressure, compression
increases when the gas throughput is
reduced.
Idle compression, K0
Idle compression K0 of a turbomolecular pump is defined as the
amount of compression of this pump
at “Zero” gas throughput. What is
problematic about this definition is
the fact that the demanded “Zero”
throughput can never be implemented in practice (finite leak rate, degassing of sealing components,
desorption from wall surfaces). Data
on idle compression need therefore
to be gained from measurements run
at extremely low throughputs.
Idle compression of a pump
equipped with metal seals is
significantly higher compared to the
same pump sealed with O-rings.
Ultimate pressure (base pressure),
pult , [mbar]
The ultimate pressure of a turbomolecular pump is defined as that
pressure which is attained in the test
chamber 48 hours after a 24 hour
degassing period of the measurement system.
The ultimate pressure will chiefly
depend on the foreline pump used
and the type of seal used at the highvacuum flange.
The TURBOVAC pumps are turbomolecular pumps with mechanical
rotor suspension which are used in
the pressure range from 10-1 mbar
(0.75 x 10-1 Torr) to 10-10 mbar
(0.75 x 10-10 Torr). Pumping speeds
for air vary from 35 l x s-1 (inlet
flange diameter = 40 mm (1.57 in.))
to 1,600 l x s-1 (inlet flange diameter
= 250 mm (9.84 in.)).
Through the compact design, the
most reliable ceramics ball bearings
and the simplicity of operation, this
line of pumps is used in all highvacuum and ultrahigh vacuum areas
of application.
In particular the TURBOVAC pumps
are very successfully operated in
mass spectroscopy applications, gas
and liquid chromatographic analysis,
CD, DVD and hard disk production,
manufacturing of large-surface
optical layers, and non-corrosive
semiconductor fabrication processes.
The most important advantages of
the TURBOVAC product line are:
■ Oil-free pumps for the generation
of clean high and ultra-high
vacuum conditions
■ Highly performance in any
orientation
■ Highly degree of operating
reliability
■ Easy to operate
■ Compact design
C09 4
Leybold Vacuum Full Line Catalog 2005
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General
Turbomolecular Pumps
Ceramic Ball Bearings
Technology
All TURBOVAC pumps are fitted with
ceramic ball bearings, i.e. ceramic
balls are running in steel races. The
bearings are lubricated for life by
grease.
Ceramic balls are lighter, harder and
smoother than balls made of steel.
Therefore, with ceramic balls the
wear on the races is significantly
reduced. Consequently, the lifetime of
the bearings, and hence the lifetime
of the pump, is increased.
The TURBOVAC pumps fitted with
grease-lubricated ceramic ball
bearings can be mounted in any
orientation. As the ball bearing is
encapsulated, the grease can not
enter the highvacuum space, even if
the pump is mounted up-side-down.
Components supplied
with the Turbomolecular
Pumps
Highvacuum Flange
KF, ISO-K and ISO-F models
■ Accessories need to be ordered
separately
ANSI Models
■ O-ring included in the delivery
CF Models
■ Without gaskets 1),
but with screws 2)
Forevacuum Port
■ Centering rings, O-rings and
clamps for all KF type forevacuum
flanges are included.
Purge / vent ports are blanked-off
1)
2)
For CF gaskets, see Product Section C15
Only for MAG pumps
TURBOVAC MAG
Product Line
The TURBOVAC MAG pumps are
turbomolecular pumps with
magnetic rotor suspension which
are used in the pressure range from
10-1 mbar (0.75 x 10-1 Torr) to
10-10 mbar (0.75 x 10-10 Torr).
Pumping speeds for air vary from
300 l x s-1 (inlet flange diameter
= 100 mm (3.94 in.)) to 2,000 l x s-1
(inlet flange diameter = 250 mm
(9.84 in.)).
The TURBOVAC MAG pumps are
mostly installed on semiconductor
processing lines like etching, CVD,
PVD and ion implantation, i.e. in
applications where corrosive gases
need to be pumped. Also electron
beam microscopy is an important
area of application for these pumps.
The most important advantages of
the TURBOVAC MAG product line
are:
■ Hydrocarbon-free pumps for the
generation of clean high and ultrahigh vacuum conditions
■ High performance in any orientation
■ High degree of operating reliability
■ Extremely low vibration
■ Designed for pumping of corrosive
gases
F1,2,3
A
B
C
D
E
F
F1
F2
F3
High-vacuum flange
Forevacuum flange
Venting flange
Purge gas flange
Water cooling connection
Electrical connection
Connection for DC motor
Connection for regulator
Connection for axial sensor
Flange designations used in this product section
5 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
Use of Turbomolecular
Pumps in the Area of
Semiconductor Processes
Use of Turbomolecular
Pumps in Analytical
Instruments
All modern analytical methods for
gas, liquid and plasma analysis – like
for example GC-MS, LC-MS and
ICP-MS – rely on mass spectrometers
and for this reason require adequate
highvacuum conditions. Also in
electron microscopes and many
surface analysis instruments the
production of a highvacuum is
essential.
In over 90 % of all highvacuum
applications, the turbomolecular
pump has been found to be ideal.
Thanks to the hydrocarbon-free
vacuum, most simple operation,
compact design and almost maintenance-free operation it has in most
cases displaced above all the
diffusion pump.
On the basis of decades of
experience and in cooperation with
research facilities and the manufacturers of analytical instruments,
General
Leybold has continually optimized its
products.
The new TURBOVAC wide range
series is a further innovative step
forward making available products
which are most flexible and reliable.
Owing to the modular concept the
user may
■ adapt his vacuum system
precisely to his requirements
■ perfectly integrate the components
within his system and
■ find the most cost-effective system
configuration for his needs.
In combination with backing pumps
like the TRIVAC or Scroll pump,
Leybold is able to offer the best
vacuum system optimized for all
major applications in the area of
analytical instrumentation.
In the semiconductor industry turbomolecular pumps are used on the
following processes, among others:
■ Etching
■ Sputtering
■ Ion implantation
■ CVD
■ Lithography.
In these applications pumping of
aggressive gases is often required.
This may necessitate the use of
pumps equipped with a purge gas
facility or a magnetic suspension in
order to avoid damaged bearings.
Especially during metal etching,
deposits may occur in the forevacuum space of the turbomolecular
pump. In order to prevent this the
pumps must be heated to a certain
temperature. Such temperature
controlled variants are optionally
available for the MAG 1500 C,
MAG 2000 C, MAG 2800 and
MAG 3200. In contrast to turbomolecular pumps with mechanical
bearings, magnetically levitated
pumps provide the advantage that
they prevent overheating of the
bearings at high gas flows and
effectively exclude any damage to
the magnetic bearings by aggressive
media.
In electron microscopes and in
lithographic equipment, low vibration
levels are exceptionally important.
For this reason magnetically levitated
turbomolecular pumps should be
used here.
The recommended backing pumps
are either dry compressing EcoDry
pumps or rotary vane pumps from
the TRIVAC range, possibly fitted with
the BCS system.
Entire high vacuum equipment of a CD/DVD coating system with TURBOVAC TW 250 S pumps
C09 6
Leybold Vacuum Full Line Catalog 2005
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General
Turbomolecular Pumps
Use of Turbomolecular
Pumps in the Area of
Coating Systems
Coating of optical and magnetic
storage media, optical components
as well as architectural glass requires
highvacuum conditions. This is the
only way to ensure that the formed
layers will be uniform and adhere to
the substrate.
The way in which the vacuum is
generated has a significant impact
on the quality of the coating. By
pumping the vacuum chamber down
to pressures in the range of
10-6 mbar (0.75 x 10-6 Torr),
interfering gas and water molecules
are removed from the processing
chamber. In the case of sputtering
the coating process is run in the
pressure range between 10-3 and
10-2 mbar (0.75 x 10-3 and
0.75 x 10-2 Torr), and in the case of
evaporation coating, pressures below
10-4 mbar (0.75 x 10-4 Torr) are
utilized.
The turbomolecular pump meets all
requirements of the customers as to
a hydrocarbon-free vacuum, very
simple operation, compact design
and almost maintenance-free
operation in an almost ideal manner.
The range of pumps from Leybold
includes
Research and
Development
des pumps with flange diameters
ranging from 40 mm to 250 mm
(1.57 in. to 9.84 in.) nominal width.
Thus the right pump is available for
each application, be it coating of
data memories (CD, DVD, hard
discs), coating of tools and coating of
precision lenses in the area of optical
components, displays or architectural
glass.
In the area of research, all types of
turbomolecular pumps from Leybold
are being used.
In the case of particularly stringent
requirements such as low vibration
levels, a TURBOVAC with magnetic
bearings should be selected; the
same applies to those applications in
which entirely hydrocarbon-free
pump systems are required.
Nuclear fusion technology
High performance glass coating plant
7 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
General
Pump / Converter Configurations for
TURBOVAC Product Line
P
Connecting cable,
20 m max.
FC
TURBOVAC 50,
TURBOVAC 151,
TURBOVAC 361,
TURBOVAC 600 C,
TURBOVAC 1000 C,
TURBOVAC 1100 C
Mains cable
PS
NT 10,
NT 20
P
DC cable,
20 m max.
Connecting cable,
5 m max.
Mains cable
PS
FC
TW 70 H,
TW 250 S,
TW 300, TW 300 H
P
24 V DC
TDS,
TD300
DC cable,
20 m max.
PS
FC
Mains cable
24 V DC
59 V DC
TW 70 H,
TW 250 S,
TW 300, TW 300 H,
TW 701
P
FC
Mains cable
PS
T 1600,
TW 1600
P= Pump
FC = Frequency Converter
PS = Power Supply
C09 8
Leybold Vacuum Full Line Catalog 2005
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General
Turbomolecular Pumps
Notes
9 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
General
Magnetic Bearings
Technology
The world-wide success of the
TURBOVAC MAG product line results
from more than 25 years of
experience of Leybold in the
development and manufacturing of
turbomolecular pumps with
magnetically levitated rotors.
In 1976 Leybold started the market
introduction of the famous
TURBOVAC 560 M. This was the first
magnetically levitated turbomolecular
pump which became commercially
available. Nowadays Leybold uses
two design principles for the
magnetic rotor suspension:
1. One axis with active bearing
The rotor is suspended by
permanent magnets and by
electromagnets. The TURBOVAC
340 M and the MAG 400 are fitted
with such a type of rotor
suspension.
MAG W 1300 C turbomolecular pump with magnetic rotor suspension and compound stage
C09 10
2. Five axes with active bearings
The rotor position is actively
controlled by electromagnets in all
5 degrees of freedom. The
TURBOVAC MAG 830/1300,
MAG 1500, MAG 2000, MAG 2200
and MAG 2800/3200 are equipped
with such a bearing system.
Leybold Vacuum Full Line Catalog 2005
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General
Turbomolecular Pumps
Pump / Converter Configurations for
TURBOVAC MAG Product Line
One axis with active bearing
TMP 340
NT 340 M
MAG 400
NT 340 MA
Five axis with active bearings
Analog Technology:
MAG 2000
MAG.DRIVE 2000
Digital Technology:
MAG.DRIVE digital
MAG 830/1300
MAG 1500
MAG 2200
MAG 2800/3200
11 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
General
7
TW 0 H
2
TW 50
S
30
TW 0
TW 300
7 H
TW 01
1
34 600
0
M
M
AG
M 4
AG 00
M 1 C/C
AG 50
0 T
M 2 C
AG 00 T
0
M W C/
AG 8 C
3 T
M W 0/1
AG 1 3
0
M W 500 0 C
AG 2 C
2
T
M W 00
AG 2 C
0
W 00
28 C/
00 CT
/3
20
0
C
/C
T
1,
60 361
0
C
10
00
11 C
00
T C
16
TW 00
15
50
Pu
m
ps
Application
Applications
Analytical Instruments
Mass spectrometers
■ ■
■ ■
Gas chromatography
(GC-MS)
■ ■
■
Liquid chromatography
(LC-MS)
■ ■
■ ■
Leak detectors
■
■
■
■ ■ ■
Quadrupol time of flight
(Q-TOF)
Matrix assisted laser
desorption time of flight
(MALDI-TOF)
Inductively coupled
plasma mass spectrometry
(ICP-MS)
Electron beam microscopy
■
■
■
■
■ ■
■
■
■
■
■
■
Coating
Data storage / optical
■
Data storage / magnetic
■ ■ ■ ■
■ ■ ■ ■
■ ■ ■ ■ ■
■ ■ ■
■ ■ ■
■ ■ ■
■ ■ ■ ■
■ ■ ■
Flat panel displays
Optical coating
Large area coating
Decorative coating
Metallization
Wear protection
Metallurgy
TV tube manufacturing
■
■ ■
■
■ ■
■ ■
■ ■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■ ■
R&D
(Research and Development)
Surface analysis
UHV / XHV systems
Particle accelerators
Fusion experiments
Space simulation
■
■ ■ ■
■
■
■ ■
■ ■
■
■
■
■ ■
■
■
■ ■ ■ ■
■ ■ ■ ■
■
■
■
■
■
■
■
Semiconductor Processes
Load locks and
transfer chambers
Etch
CVD
■ ■ ■ ■ ■
■ ■
■
■
PVD
Ion implantation
■
■
■ ■
■
■ ■ ■
■
■ ■
■ ■ ■
■ ■ ■ ■
■ ■ ■ ■ ■ ■ ■
■ ■ ■ ■ ■ ■ ■ ■
C09 12
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
Accessories
1,
60 361
0
C
10
00
11 C
00
T C
16
TW 00
7
TW 0 H
2
TW 50
S
3
TW 00
TW 300
7 H
TW 01
1
34 600
0
M
M
AG
M 40
AG 0
C
M 1 /C
AG 50 T
0
M
2 C
AG 00 T
0
M W C
AG 8 /C
30 T
M
AG W 1 /13
5 0
M W 00 0 C
AG 2 C
20 T
M
AG W 0 C
20
W 00
28 C
00 /C
/3 T
20
0
C
/C
T
15
50
Pu
m
ps
Accessories
Page
Frequency converters
NT 10
C09.58 ■
NT 20
C09.59
■ ■ ■ ■
NT 361
C09.60
■
TURBO.DRIVE S
C09.61
■ ■ ■ ■
TD 300
C09.62
■ ■ ■ ■
Power supply
PS 700
C09.63
■
Power supplies for
TD S / TD 300
C09.64
■ ■ ■ ■ ■
NT 340 M
C09.94
NT 340 MA
C09.96
MAG.DRIVE 2000
C09.98
MAG.DRIVE digital
■
■
■
■
C09.100
Vibration absorber
C09.102 ■ ■ ■ ■ ■ ■ ■ ■ ■ ■
Air cooling unit
C09.102 ■ ■ ■ ■
Flange heaters
for CF flanges
C09.103 ■ ■ ■ ■
Fine filter
C09.103 ■
Venting valves
C09.104 ■ ■ ■ ■ ■
Purge gas and
venting valve
C09.104
Power failure
venting valve
C09.104 ■ ■ ■ ■ ■
Water cooling
Accessories for
serial interfaces
RS 232 C and
RS 485 C
–
■
■ ■ ■
■
■
■ ■ ■ ■ ■
■ ■
■
■
■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■
■
■ ■ ■
■ ■ ■ ■ ■
■
C09.105
■ ■
■ ■ ■ ■
■ ■
■
■
13 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 50
Typical Applications
■ Leak detectors
■ Mass spectrometers
■ Electron beam microscopy
■ TV tube manufacturing
■ Load locks and transfer chambers
Technical Features
Top view
DN
A
■ Compact design
C
DN 10 KF *
■ Operation in any orientation
a
C
■ Cooling by convection is sufficient
for most applications
B
h
B
■ Air and water cooling can be
added easily
b
h2
h1
* drawn offset by 90°
Flange DN 10 KF, for DN 63 CF version only
Ød
DN 16 KF
DN
40 KF
63 ISO-K
63 CF
a
54.5
2.15
54.5
2.15
54.5
2.15
mm
in.
mm
in.
mm
in.
b
55
2.17
55
2.17
55
2.17
d
93
3.66
93
3.66
93
3.66
h
166
6.54
157.5
6.20
178
7.01
h1
71.5
2.81
71.5
2.81
71.5
2.81
h2
119
4.69
119
4.69
119
4.69
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Dimensional drawing for the TURBOVAC 50 with flange DN 63 CF
Advantages to the User
10 3
Pumping Speed
l x s -1
10
■ Space-saving
N2
He
H2
■ Easy to integrate into complex
vacuum systems
2
■ Low operating costs
10
10
■ Highly reliable operation also in
processes loaded with particles
1
0
10
-5
2
4
6 8
10
-4
10
-3
10
-2
Inlet Pressure
10
-1
10
0
mbar
10
1
Pumping speed as a function of the inlet pressure (TURBOVAC 50 with flange DN 63 ISO-K)
C09 14
Leybold Vacuum Full Line Catalog 2005
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without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 5 0
Technical Data
O-ring sealed
40 KF
O-ring sealed
63 ISO-K
Metal sealed
63 CF
Aluminum
Aluminum
Stainless steel
33
36
28
55
48
30
55
48
30
0.30
0.25
0.20
0.40
0.35
0.25
0.40
0.35
0.25
2 · 106
2 · 106
2 · 108
< 5 · 10-8 (< 3.75 x 10-8)
< 5 · 10-8 (< 3.75 x 10-8)
< 2 · 10-10 (< 1.5 x 10-10)
1 · 10-1 (< 0.75 x 10-1)
1 · 10-1 (< 0.75 x 10-1)
1 · 10-1 (< 0.75 x 10-1)
TRIVAC D 2,5 E
TRIVAC D 2,5 E
TRIVAC D 2,5 E
2
2
2
mm (in.)
10
10
10
Weight, approx.
kg
2
2
2
Max. power consumption
W
45
45
45
Ultimate pressure
W
15
15
15
Inlet flange
DN
Pump housing
Pumping speed at 10-3 mbar
N2
He
H2
I x s-1
I x s-1
I x s-1
Max. gas throughput 1) at 10-2 mbar
N2
mbar x I x s-1
He
mbar x I x s-1
H2
mbar x I x s-1
Max. compression when idle
N2
Ultimate pressure with TRIVAC D 2,5 E
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
Run-up time
to 95% of nominal speed
min
Cooling water connection (hose nozzles)
(for Part No. 854 08)
1)
for continuous operation when water-cooled
15 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
Ordering Information
T U R B O VA C 5 0
Inlet flange
DN 40 KF
DN 40 CF
DN 63 ISO-K
DN 63 CF
Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
Cooling method
Convection
Convection
Convection
Convection
Interface
–
–
–
–
Part
Part
Part
Part
No.
No.
No.
No.
854
853
854
854
00
99
01
02
Accessories, necessary for all pumps
Electronic frequency converter NT 10
090 - 140 V
180 - 260 V
Part No. 859 01
Part No. 859 00
Connecting cable NT 10 - pump
3 m (10.5 ft)
Part No. 121 08
Part No. 121 09
5 m (17.5 ft)
Accessories, optional
Air cooling unit
230 V AC
Part No. 854 05
Part No. 854 06
110 V AC
Water cooling kit
Part No. 854 08
Flange heater
63 CF, 230 V, 50 Hz
Part No. 854 04
Part No. 854 07
63 CF, 110 V, 60 Hz
Vibration absorber
DN 63 ISO-K
DN 63 CF
Part No. 800131V0063
Part No. 500 070
C09 16
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
17 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 151, 151 C
ClassicLine
Typical Applications
■ Leak detectors
■ Mass spectrometers
■ Data storage
■ Optical coating
■ R & D, e.g.
- UHV systems
- Particle accelerators
■ Load locks and transfer chambers
Technical Features
DN
A
■ Compact design
F
60°
C
a
78
2
a79
1
C
■ Operation in any orientation
76
a
30°
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
B
h
D
B
D
E
h3
126
h1
73
h
4
E
20°
h47
2
∅ø10
d1
136
l
Top view
76
b
ø132
∅d
DN
063 ISO-K
100 ISO-K
100 CF
mm
in.
mm
in.
mm
in.
151
151 C
h
h
h1
h2
h3
h4
a
a1
a2
b
d
d1
l
230
–
–
47 126 73
76
79
78
76 132 10 136
9.06
–
–
1.85 4.96 2.87 2.99 3.11 3.07 2.99 5.20 0.39 5.35
207 207 88
47 126 73
76
79
78
76 132 10 136
8.14 8.14 3.46 1.85 4.96 2.87 2.99 3.11 3.07 2.99 5.20 0.39 5.35
224
–
–
47 126 73
76
79
78
76 132 10 136
8.82
–
–
1.85 4.96 2.87 2.99 3.11 3.07 2.99 5.20 0.39 5.35
Dimensional drawing for the TURBOVAC 151 and 151 C
Advantages to the User
1000
■ Space-saving
500
Pumping
speed
Saugvermögen
Ixs
-1
■ Easy to integrate into complex
vacuum systems
200
100
■ Low operating costs
■ Highly reliable operation also in
processes loaded with particles
10
-6
10
2
4
6
N2
Ar
He
H2
8
10
-5
10
-4
10
-3
10
-2
mbar
10
-1
Intake Pressure
Einlass-Druck
Pumping speed as a function of the inlet pressure (TURBOVAC 151 with flange DN 100)
C09 18
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 1 5 1
Technical Data
Inlet flange
DN
100 ISO-K
100 CF
s-1
s-1
s-1
s-1
145
150
135
115
145
150
135
115
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
3
3
1.7
3
3
1.7
1 x 109
2x
8 x 102
1 x 109
2 x 104
8 x 102
< 1 x 10-10 (< 0.75 x 10-10)
< 1 x 10-10 (< 0.75 x 10-10)
Max. continuous inlet pressure 1)
mbar (Torr)
5 x 10-2 (4 x 10-2)
5 x 10-2 (4 x 10-2)
Max. foreline pressure for N2
5 x 10-1 (4 x 10-1)
5 x 10-1 (4 x 10-1)
from TRIVAC D 4 B to D 16 B
from TRIVAC D 4 B to D 16 B
Pumping speed
N2
I
I
I
I
Ar
He
H2
Max. gas throughput
N2
Ar
H2
x
x
x
x
Compression ratio
N2
He
H2
Ultimate pressure
104
mbar (Torr)
mbar (Torr)
Recommended forevacuum pump
Run-up time to 95% speed
min
≈2
≈2
Purge / vent port
DN
10 KF
10 KF
mm (in.)
10 (0.39)
10 (0.39)
kg (lbs)
8 (17)
88 (17)
680
480
680
480
Cooling water connection
(hose nozzles)
Weight, approx.
Max. power consumption
at ultimate pressure
1)
VA
VA
Water-cooled
19 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
Ordering Information
T U R B O VA C 1 5 1
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
Foreline flange
DN 25 KF
DN 25 KF
DN 25 KF
Cooling method
Water-cooled
Water-cooled
Water-cooled
Item
TURBOVAC 151
TURBOVAC 151 C
TURBOVAC 151
Part No. 856 31
Part No. 856 35
Part No. 856 32
Accessories, necessary for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
100 V AC
Part No. 857 20
Part No. 857 21
Part No. 857 22
Connecting cable NT 20 - pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
Part
Part
Part
Part
20 m (70.0 ft)
No.
No.
No.
No.
857
857
857
857
65
66
67
68
Accessories, optional
Air cooling unit
230 V AC
110 V AC
Part No. 855 31
Part No. 894 08
Flange heater 100 CF
230 V AC
110 V AC
Part No. 854 27
Part No. 854 28
C09 20
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
21 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 361, 361 C
ClassicLine
Typical Applications
■ Leak detectors
■ Mass spectrometers
■ Data storage
■ Optical coating
■ R & D, e.g.
- UHV systems
- Particle accelerators
■ Load locks and transfer chambers
Technical Features
DN
A
Top view
60°
a
a
h
ød
E
B
■ Operation in any orientation
l
F
C
C
h3
■ Compact design
b
30°
D
B
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
h1
h4
h2
D
E
a
ø d1
20°
DN
100 ISO-K
100 CF
160 ISO-K
160 CF
mm
in.
mm
in.
mm
in.
mm
in.
361
h
254
10
268
10.55
227
8.94
226
8.90
361
h
254
10
–
–
227
8.94
–
–
C
h1
88
3.46
–
–
88
3.46
–
–
h2
47
1.85
47
1.85
47
1.85
47
1.85
h3
135
5.31
135
5.31
135
5.31
135
5.31
h4
84
3.31
84
3.31
84
3.31
84
3.31
a
98
3.86
98
3.86
98
3.86
98
3.86
b
94
3.70
94
3.70
94
3.70
94
3.70
d1
10
0.39
10
0.39
10
0.39
10
0.39
l
166
6.54
166
6.54
166
6.54
166
6.54
Advantages to the User
■ Space-saving
Dimensional drawing for the TURBOVAC 361 and 361 C
■ Easy to integrate into complex
vacuum systems
■ Low operating costs
■ Highly reliable operation also in
processes loaded with particles
C09 22
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 3 6 1
Technical Data
Inlet flange
DN
100 ISO-K • 100 CF
160 ISO-K • 160 CF
s-1
s-1
s-1
s-1
345
350
340
340
400
–
380
370
mbar x I x s-1
mbar x I x s-1
7.5
7.5
–
–
1 x 109
6x
3 x 103
1 x 109
6 x 104
3 x 103
< 1 x 10-10 (< 0.75 x 10-10)
< 1 x 10-10 (< 0.75 x 10-10)
5 x 10-2 (3.75 x 10-2)
5 x 10-2 (3.75 x 10-2)
5 x 10-1 (3.75 x 10-1)
5 x 10-1 (3.75 x 10-1)
from TRIVAC D 16 B to D 25 B
from TRIVAC D 16 B to D 25 B
Pumping speed
N2
I
I
I
I
Ar
He
H2
Max. gas throughput
N2
Ar
x
x
x
x
Compression ratio
N2
He
H2
104
Ultimate pressure
mbar (Torr)
Max. continuous inlet pressure 1)
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
Run-up time to 95% speed
min
≈2
≈2
Purge / vent port
DN
10 KF
10 KF
mm (in.)
10 (0.39)
10 (0.39)
kg (lbs)
12 (26)
12 (26)
680
480
680
480
Cooling water connection (hose nozzle)
Weight, approx.
Max. power consumption
VA
at ultimate pressure
VA
1)
Water-cooled
10
-6
10
-5
10
-4
10
-3
10
-2
Torr
750
1000
500
cfm
500
Pumping speed
Ixs
-1
200
100
100
50
10
10
-6
10
2
4 6
N2
Ar
He
H2
8
10
-5
10
-4
10
-3
10
-2
mbar
10
-1
Intake Pressure
Pumping speed as a function of the inlet pressure (TURBOVAC 361 with flange DN 100)
23 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
Ordering Information
T U R B O VA C 3 6 1
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 ISO-K
DN 160 CF
Foreline flange
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF
Cooling method
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Item
TURBOVAC 361
TURBOVAC 361 C
TURBOVAC 361
TURBOVAC 361
TURBOVAC 361 C
TURBOVAC 361
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
856
856
856
856
856
856
70
75
71
72
77
73
Accessories, necessary for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
100 V AC
Part No. 857 20
Part No. 857 21
Part No. 857 22
Connecting cable NT 20 - pump
03 m (10.5 ft)
05 m (17.5 ft)
Part
Part
Part
Part
10 m (35.0 ft)
20 m (70.0 ft)
No.
No.
No.
No.
857
857
857
857
65
66
67
68
Accessories, optional
Air cooling unit
230 V AC
110 V AC
Part No. 855 31
Part No. 894 08
Flange heater 100 CF
230 V AC
110 V AC
Part No. 854 27
Part No. 854 28
Flange heater 160 CF
230 V AC
Part No. 854 37
Part No. 854 38
110 V AC
C09 24
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
25 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 600 C
ClassicLine
Typical Applications
■ Load locks and transfer chambers
■ Optical coating
■ Flat panel displays
■ R&D
Technical Features
Top view
DN
A
a
134
■ Compact design
124,5
a1
C 124,7
b1
E
d 225
b
178
C*
D*
E B
h5
105
97
h3
F
90°
h
B
E
b2
124,5
D
h1
175
h2
116
DN
■ Operation in any orientation
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
A
28
* drawn offset by 45°
h4
DN
h
160 ISO-K mm 317
in. 12.48
160 CF
mm 323
in. 12.72
h1
h2
h3
h4
h5
a
a1
b
b1
b2
175 116 97
28 105 134 124.5 178 124.7 124.5
6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90
175 116 97
28 105 134 124.5 178 124.7 124.5
6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90
ld
225
8.86
225
8.86
Advantages to the User
Dimensional drawing for the TURBOVAC 600 C
■ Installation in any orientation
■ Highly reliable due to hybrid
ceramic ball bearings
1000
Pumping speed
600
500
l x s-1
200
■ Life time lubrication and
maintenance-free
He
H2
N2
Ar
100
10 2
10 -6
468
10 -5
10 -4
■ Option: Purge gas facility
10 -3
10 -2mbar10 -1
Pressure
Pumping speed for different gases as a function of intake pressure
(TURBOVAC 600 C with flange DN 160 ISO-K)
C09 26
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 6 0 0 C
Technical Data
Inlet flange
DN
Pumping speed
N2
I x s-1
I x s-1
I x s-1
560
600
570
mbar x I x s-1
mbar x I x s-1
<4
<4
He
H2
Max. gas throughput
N2
Ar
160 ISO-K • 160 CF
Compression ratio
N2
He
H2
Ultimate pressure
> 109
2 x 104
1.1 x 103
mbar (Torr)
< 10-10 (< 10-10)
min-1
Speed
Run-up time
(frequency converter), approx.
36 000
min
Max. continuous inlet pressure 1)
(continuous)
mbar (Torr)
4
1 x 10-2 (0.75 x 10-2)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
for standard operation
1 x 10-1 (0.75 x 10-1)
TRIVAC D 25 B / 40 B
TRIVAC 40 B
for purge gas operation
Run-up time to 95% speed
min
3
Purge / vent port
DN
10 KF
Cooling water connection
(hose nozzles)
Weight, approx.
mm (in.)
10 (0.39)
kg (lbs)
17 (37.5)
Max. power consumption
VA
at ultimate pressure
VA
1)
680
480
Water-cooled
27 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
Ordering Information
TURBOVAC 600 C
Inlet flange
DN 160 ISO-K
DN 160 CF
Foreline flange
DN 40 KF
DN 40 KF
Cooling method
Water-cooled
Water-cooled
Item
TURBOVAC 600 C
TURBOVAC 600 C
Part No. 800150V0015
Part No. 800150V0017
Accessories, necessary for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
100 V AC
Part No. 857 20
Part No. 857 21
Part No. 857 22
Connecting cable NT 20 - pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
Part
Part
Part
Part
20 m (70.0 ft)
No.
No.
No.
No.
857
857
857
857
65
66
67
68
Accessories, optional
Air cooling unit
230 V AC
115 V AC
Part No. 855 41
Part No. 170 016
Flange heater 160 CF
230 V AC
110 V AC
Part No. 854 37
Part No. 854 38
C09 28
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
29 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 1000 C
ClassicLine
Typical Applications
■ Evaporation and sputtering
systems
■ Metallurgy
■ Research systems
141
A
DN
Technical Features
Upper view
1)
D
h
d241
133
a1
d258
1
E
C
1)
91
h42)
83
D
1)
E B 94
h2
F 99 2)
1)
111
h
10812)
F
1)
200 CF/40 KF
1)
250 ISO-K/40 KF
1)
250 ISO-K/63 KF
2)
mm
in.
mm
in.
mm
in.
mm
in.
h
348
13.70
336
13.23
307
12.09
310
12.20
h1
108
4.25
108
4.25
108
4.25
111
4.37
h2
99
3.90
99
3.90
99
3.90
94
3.70
h3
121
4.76
121
4.76
121
4.76
121
4.76
b
141
A
DN
2)
(C) α
E
h3
121
153 1)
a 2)
140
DN
160 CF/40 KF
45°
B α
h4
83
3.27
83
3.27
83
3.27
91
3.58
DN 40 KF,
cast base flange
DN 63 KF,
screwed in
a
140
5.51
140
5.51
140
5.51
153
6.02
a1
133
5.24
133
5.24
133
5.24
133
5.24
b
141
5.55
141
5.55
141
5.55
141
5.55
ld
241
9.49
241
9.49
241
9.49
241
9.49
■ Robust rotor design
■ Operation in any orientation
■ Highest pumping speed and
throughput
l d1
258
10.16
258
10.16
258
10.16
258
10.16
Dimensional drawing for the TURBOVAC 1000 C
Advantages to the User
10000
■ Installation in any orientation
Pumping speed
l x s -1
1500
1000
500
■ Highly reliable due to hybrid
ceramic ballbearings
TURBOVAC 1000 C
■ Standard model:
Venting flange, water cooling
200
100
10 2
10 -6
4 68
10 -5
■ Options:
Air cooling, purge gas facility
10 -4
10 -3
10 -2 mbar 10 -1
Pressure
Pumping speed for air as a function of intake pressure (TURBOVAC 1000 C with DN 250 flange)
C09 30
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 1 0 0 0 C
Technical Data
Inlet flange
DN
Pumping speed
N2
He
H2
I x s-1
I x s-1
I x s-1
Compression ratio
N2
He
H2
Ultimate pressure to DIN 28 400
mbar
(Torr)
min-1 (rpm)
Speed
160 ISO-K / 160 CF
200 CF
250 ISO-K
850
880
900
1100
975
970
1150
1000
1000
> 109
5 x 104
2 x 103
> 109
5 x 104
2 x 103
> 109
5 x 104
2 x 103
< 10-10
(< 0.75 x 10-10)
< 10-10
(< 0.75 x 10-10)
< 10-10
(< 0.75 x 10-10)
36.000
36.000
36.000
Run-up time (frequency converter)
min
4
4
4
Run-up time NT 20, approx.
min
9
9
9
Type of bearing
Hybrid ceramic ball bearings
Type of lubrication
Installation orientation
Cooling
Hybrid ceramic ball bearings Hybrid ceramic ball bearings
Grease
Grease
Grease
Any
Any
Any
Water (air)
Water (air)
Water (air)
Weight, approx.
kg (lbs)
25 (55.1)
25 (55.1)
25 (55.1)
Recommended backing pump
for standard operation
for purge gas operation
TRIVAC
TRIVAC
D 25 B / D 40 B
D 40 B / D 65 B
D 25 B / D 40 B
D 40 B / D 65 B
D 25 B / D 40 B
D 40 B / D 65 B
TURBOVAC 1000 C
Ordering Information
Inlet flange
DN 160 CF
DN 200 CF
DN 250 ISO-K
DN 250 ISO-K
Foreline flange
DN 40 ISO-K
DN 40 ISO-K
DN 40 ISO-K
DN 63 ISO-K
Cooling method
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Interface
–
–
–
–
Part
Part
Part
Part
No.
No.
No.
No.
855
117
855
855
35
64
36
39
Accessories, necessary for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
Part No. 857 20
Part No. 857 21
Connecting cable NT 20 - pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
No.
No.
No.
No.
857
857
857
857
65
66
67
68
Accessories, optional
Air cooling unit
115 V AC
Part No. 170 016
31 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 1100 C
ClassicLine
Typical Applications
■ Data storage
■ Flat panel displays
■ Optical coating
■ Large area coating
■ R & D, e.g.
- Fusion experiments
- Space simulation
■ Load locks and transfer chambers
DN
Technical Features
Top view
A
b
E
h1
a
ød
h
C
h6
D
45°
(C)
F
h5
B
E
B
E
h3
h2
h4
45° 45°
a1
DN
200 ISO-K
mm
in.
mm
in.
250 ISO-K
h
325
12.80
310
12.20
h1
h2
h3
h4
h5
214 231 111 94
63
8.43 9.09 4.37 3.70 2.48
200 217 111 94
63
7.87 8.54 4.37 3.70 2.48
■ Operation in any orientation
■ Highest pumping speed and
throughput
D
F
■ Robust rotor design
h6
a
a1
b
d
28.5 133 153 141 258
1.12 5.24 6.02 5.55 10.16
28.5 133 153 141 258
1.12 5.24 6.02 5.55 10.16
■ Integrated control system for
monitoring the temperature of the
bearings
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Dimensional drawing for the TURBOVAC 1100 C
10
10
Ixs
-5
10
-4
10
-3
10
-2
10
-1
Torr
750
■ Easy to integrate into complex
vacuum systems
-1
10
Advantages to the User
■ Space-saving
4
3
Pumping Speed
■ High productivity
10
■ Low operating costs
2
■ Highly reliable operation also in
processes loaded with particles
1
10 8
6
4
2
10
0
10
-5
2
4
6 8 -4
10
N2
Ar
H2
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed as a function of the inlet pressure (TURBOVAC 1100 C with flange DN 250)
C09 32
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 1 1 0 0 C
Technical Data
Inlet flange
Pumping speed
N2
Ar
He
H2
Max. gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
x
x
x
x
DN
200 ISO-K
250 ISO-K
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
830
760
750
600
1050
980
850
630
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
25
15
25
30
25
15
25
30
1 x 105
1 x 105
1 x 104
1 x 105
1 x 105
1 x 104
Compression ratio
N2
Ar
H2
Ultimate pressure
mbar (Torr)
< 3 x 10-10 (< 2.2 x 10-10)
< 3 x 10-10 (< 2.2 x 10-10)
Max. foreline pressure for N2
mbar (Torr)
0.1 (0.075)
0.1 (0.075)
TRIVAC D 65 B / EcoDry M15/20
TRIVAC D 65 B / EcoDry M15/20
Recommended forevacuum pump
Run-up time to 95% speed
min
9
9
Purge / vent port
DN
10 KF
10 KF
mm (in.)
10 (0.39)
10 (0.39)
kg (lbs)
22 (48)
22 (48)
V AC
42
42
VA
400
400
Cooling water connection
(hose nozzles)
Weight, approx.
Supply voltage
Max. power consumption
TURBOVAC 1100 C
Ordering Information
Inlet flange
DN 200 ISO-K
DN 250 ISO-K
Foreline flange
DN 63 ISO-K
DN 63 ISO-K
Cooling method
Water-cooled
Water-cooled
Interface
–
–
Part No. 894 83
Part No. 894 80
Accessories, necessary for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
Part No. 857 20
Part No. 857 21
Connecting cable NT 20 - pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
Purge / vent valve, DN 16 KF
24 V DC; 0.6 mbar x I x s-1 = 36 sccm
No.
No.
No.
No.
857
857
857
857
65
66
67
68
Part No. 121 33
Note for the North and South American Continents: For special application we recommend the TURBOVAC 1000 C. Please contact your sale office
33 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage
TURBOVAC T 1600 / T 1601
Typical Applications
■ Data storage
■ Flat panel displays
■ Optical coating
■ Large area coating
■ R & D, e.g.
- Fusion experiments
- Space simulation
Technical Features
ød
ød
■ Frequency converter and power
supply integrated
h3
h2
h2
■ Robust rotor design
h3
h1
h1
■ Operation in any orientation
h
h
■ Highest pumping speed and
throughput
a
62°
a
176
6.93
176
6.93
176
6.93
mm
in.
mm
in.
mm
in.
250 ISO-F
250 CF
5°
5.62
0°
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
3.5
12
Top view
ø d1
ø d1
DN
200 ISO-F
15°
■ Purge gas and venting valve
integrated
d
d1
h
h1
h2
h3
285
308
393
342
277
255
11.22 12.13 15.47 13.86 10.91 10.04
335
308
425
369
304
228
13.19 12.13 16.73 14.53 11.97 8.98
304
308
413
357
292
243
11.97 12.13 16.26 14.06 11.50 9.57
■ For special outside influences
(only T 1601)
Dimensional drawing for the TURBOVAC T 1600
10
10
Pumping Speed
Ixs
-5
10
-4
10
-3
10
-2
10
-1
1
Torr
10
■ Space-saving
4
■ Easy to integrate into complex
vacuum systems
-1
10
Advantages to the User
3
■ High productivity
10
■ Low operating costs
2
8
6
■ Highly reliable operation also in
processes loaded with particles
4
2
10
1
10
-5
2
4
6 8 -4
10
N2
Ar
He
H2
10
-3
10
-2
10
-1
1
mbar
10
Inlet Pressure
Pumping speed as a function of the inlet pressure (TURBOVAC T 1600 with flange DN 250)
C09 34
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T 1 6 0 0 / T 1 6 0 1
Technical Data
Inlet flange
Pumping speed
N2
Ar
He
H2
Max. gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
x
x
x
x
DN
200 ISO-F
250 ISO-F • 250 CF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
1100
960
1150
690
1550
1410
1300
720
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
30
20
30
20
30
20
30
20
Compression ratio
N2
Ar
He
H2
5
1
1
2
x
x
x
x
105
106
104
102
5
1
1
2
x
x
x
x
105
106
104
102
Ultimate pressure
mbar (Torr)
< 3 x 10-10 (< 2.2 x 10-10)
< 3 x 10-10 (< 2.2 x 10-10)
Max. foreline pressure for N2
mbar (Torr)
0.5 (0.375)
0.5 (0.375)
TRIVAC D 65 B + RUVAC WA 501
TRIVAC D 65 B
EcoDry M
TRIVAC D 65 B + RUVAC WA 501
TRIVAC D 65 B
EcoDry M
Recommended forevacuum pump
(alternatively)
Run-up time to 95% speed
min
< 10
< 10
Purge / vent port
DN
G 1/4"
G 1/4"
G 3/8"
G 3/8"
40 (88)
40 (88)
100 - 240
100 - 240
700
700
Cooling water connection
Weight, approx.
kg (lbs)
Supply voltage
V
Max. power consumption
VA
TURBOVAC T 1600
Ordering Information
Inlet flange
DN 200 ISO-F
DN 200 ISO-F
DN 250 ISO-F
DN 250 ISO-F
DN 250 ISO-F
DN 250 CF
Foreline flange
DN 40 KF
DN 40 KF
DN 40 KF
DN 40 KF
DN 63 ISO-K
DN 40 KF
Cooling method
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Interface
–
Profibus
–
Profibus
–
–
No.
No.
No.
No.
No.
No.
800040V1144
800040V2144
800040V1444
800040V2444
800040V1544
800040V1844
Part No. 200 18 515
Purge filter
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Accessories for RS 232 C and RS 485 C interfaces
TURBOVAC T 1601
Ordering Information
Inlet flange
DN 250 ISO-F
Part
Part
Part
Part
Part
Part
Foreline flange
DN 40 KF
Cooling method
Water-cooled
Interface
Profibus
Part No. 800040V4444
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Accessories for RS 232 C and RS 485 C interfaces
35 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC TW 70 H
Typical Applications
■ Mass spectrometers
■ Electron beam microscopy
■ Leak detectors
■ R & D, e.g.
- UHV systems
■ Load locks and transfer chambers
Technical Features
Top view
ød
■ Integrated or external frequency
converter
26°
■ Compact design
h
■ Operation in any orientation
26°
■ High foreline tolerance
a
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
h1
ø d1
DN
63 ISO-K
mm
in.
mm
in.
63 CF
a
111
4.37
111
4.37
h
145
5.71
169
6.65
h1
22
0.87
22
0.87
d
95
3.74
113.5
4.47
d1
95
3.74
95
3.74
Dimensional drawing for the TURBOVAC TW 70 H
10
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
Advantages to the User
Torr
■ Space-saving
3
■ Easy to integrate into complex
vacuum systems
N2
Ar
Pumping speed
Ixs
-1
10
2
10
1
10
0
He
H2
■ Allows the use of down-sized
forevacuum pumps
■ Low operating costs
10
■ Highly reliable operation
-5
2
4
6 8
10
-4
10
-3
10
-2
10
-1
10
0
mbar
10
1
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 36
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T W 7 0 H
Technical Data
Inlet flange
DN
Pump housing
Pumping speed at 10-5 / 10-3 mbar
N2
Ar
H2
He
x
x
x
x
s-1
s-1
s-1
s-1
Max. gas throughput 1) at 10-1 mbar
N2
mbar x I x
Ar
mbar x I x
H2
mbar x I x
He
mbar x I x
s-1
s-1
s-1
s-1
I
I
I
I
Max. compression when idle
N2
Ar
H2
He
Ultimate pressure
with two-stage oil-sealed
rotary vane vacuum pump
TRIVAC D 2,5 E
mbar (Torr)
with dry compressing
scroll vacuum pump SC 5 D
mbar (Torr)
with diaphragm pump
DIVAC 0.8 T
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
two-stage oil-sealed
rotary vane vacuum pump
diaphragm pump
oil-free scroll vacuum pump
O-ring sealed
63 ISO-K
Metal sealed
63 CF
Aluminum
Stainless steel
60
56
40
52
/
/
/
/
56
54
38
50
60
56
40
52
/
/
/
/
56
54
38
50
1.9
2.4
1.3
1.9
1.9
2.4
1.3
1.9
1 x 108 at 14 mbar
1 x 107 at 14 mbar
4 x 103 at 0.2 mbar
2 x 105 at 2 mbar
1 x 1010 at 10 mbar
< 5 x 10-8 (< 3.75 x 10-8)
< 2 x 10-10 (< 1.5 x 10-10)
≤ 0.05 (≤ 0.04)
< 5 x 10-9 (< 3.75 x 10-9)
20 (15)
20 (15)
TRIVAC D 2,5 E
DIVAC 0,8 T
SC 5 D
TRIVAC D 2,5 E
DIVAC 0,8 T
SC 5 D
1.5
1.5
2 x G 1/8"
2 x G 1/8"
3.0 (6.62) / 2.3 (5.08)
3.0 (6.62) / 2.3 (5.08)
24
24
150 / 30
150 / 30
Run-up time to 95%
of nominal speed
min
Cooling water connection (option)
Weight, approx. with / without
frequency converter
kg (lbs)
Supply voltage
V DC
Max. power consumption
Run up / ultimate pressure
1)
W
for continuous operation when water-cooled
37 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
Ordering Information
TURBOVAC TW 70 H
TW 70 H with integrated frequency converter TURBO.DRIVE S
Inlet flange
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 CF
DN 63 CF
Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
Camozzi coupling 1)
Camozzi coupling 1)
DN 16 KF
DN 16 KF
Cooling method
Air-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Interface
RS 485 C
RS 232 C
RS 485 C
RS 485 C
RS 485 C
RS 232 C
RS 485 C
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
800002V1235
800002V1236
800002V1435
800002V1215
800002V1415
800002V2236
800002V2435
Interface
–
–
–
–
Part
Part
Part
Part
No.
No.
No.
No.
800002V1934
800002V1234
800002V1914
800002V2934
TW 70 H without frequency converter TURBO.DRIVE S
Inlet flange
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 CF
Foreline flange
DN 16 KF
DN 16 KF
Camozzi coupling 1)
DN 16 KF
Cooling method
Convection
Air-cooled
Convection
Convection
For operation, one frequency converter TURBO.DRIVE S is necessary
Electronic frequency converter TURBO.DRIVE S with heat sink
RS 485 C interface
RS 232 C interface
Connecting cable (TURBO.DRIVE S - pump)
1 m (03.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)
Part No. 800070V0006
Part No. 800070V0005
Part No. 152 47
Part No. 864 40
Part No. 864 50
Accessories, necessary for all pumps
START/STOP switch for manual operation of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300
Part No. 152 48
see chapter
“Turbomolecular Pumps
with Mechanical Rotor Suspension”,
para. “Electronic Frequency Converters”
Accessories, optional
Water cooling unit with 2 x G 1/8" connection
including 2 hose nozzles G 1/8", OD 8 mm for water hose,
2 gaskets (copper) 10 x 14 x 1
Part No. 800135V0001
Air cooling unit (uses V DC from pump connection)
Part No. 800136V0001
Flange heater 63 CF
230 V, 50 Hz
110 V, 60 Hz
Part No. 854 04
Part No. 854 07
Splinter guard
DN 63 ISO-K (course)
DN 63 CF (course)
Part No. 200 17 170
Part No. 200 17 171
Part No. 887 20
DN 63 CF (fine)
Vibration absorber
DN 63 ISO-K
Part No. 800131V0063
Part No. 500 070
DN 63 CF
Accessories for serial interfaces RS 232 C and RS 485 C
1)
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Quick coupling for plastic vacuum hoses with an OD of 10 mm. We recommend polyamide hoses
C09 38
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
TW 70 H with integrated frequency converter TURBO.DRIVE S
24 V DC cable
with shield,
20 m (70.0 ft) max.
Mains
Power supply unit
e.g.
TURBO.POWER 300
TURBO.CONTROL 300
TW 70 H and external frequency converterTURBO.DRIVE S
Mains
Power supply unit
e.g.
TURBO.POWER 300
TURBO.CONTROL 300
24 V DC cable
with shield,
20 m (70.0 ft) max.
Frequency converter TURBO.DRIVE S with heat sink
Connecting cable, 5 m (17.5 ft) max.
The modular concept
Ø 95
DN 63 ISO-K
123
ø95
123
148
155
Cable
length
400 mm
155.5
50.5
105
71
48°
Ø 95
48°
64
TURBO.DRIVE S
63
2°
111
106
100
2°
150
106
123
26°
101
26°
2°
Part No. 800002V1235
TW 70 H with DN 63 ISO-K flange,
air-cooled,
foreline connection DN 16 KF,
with frequency converter
26°
64
26°
26°
Part No. 800002V1231
TW 70 H with DN 63 ISO-K flange,
water-cooled,
foreline connection DN 16 KF,
with frequency converter
71
Part No. 800002V1234
TW 70 H with DN 63 ISO-K flange,
air-cooled,
foreline connection DN 16 KF,
without frequency converter
Selected dimensional drawings for the TURBOVAC TW 70 H versions
39 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC 250 S
Typical Applications
■ Analytical instruments
■ Coating
■ R&D
DN 100 ISO-K
DN 100 CF
DN 100 ISO-K
DN 100 CF
mm
in.
mm
in.
b
20
0.79
20
0.79
b1
22
0.87
22
0.87
d
d1
h
160 146.6 175
6.29 5.77 6.89
160 146.6 175
6.29 5.77 6.89
mm
in.
mm
in.
h1
37
1.46
37
1.46
h2
14
0.55
14
0.55
h3
4
0.16
4
0.16
h4
20
0.79
20
0.79
Technical Features
Upper view
■ Integrated or external frequency
converter
7,5°
120°
105°
■ Compact design
h5
40
1.57
40
1.57
■ Efficient air-cooling system
integrated
d1
M4
DN
h
h1
h5
b b1
d
h2
h3 h4
Dimensional drawing for the TURBOVAC 250 S without frequency converter
Advantages to the User
102
-1
■ Highest pumping speed and
throughput for N2 and Ar
10
0
■ Highest reliability in operation
S
D
16
B
25
RB
D
T
8
R
TU
B
C
VA
O
10-2
TW
IV
A
C
10-1
T
R
IV
A
C
Throughput
1
10-3
10-4
10-5 -5
10
ECODRY M
50 Hz
10-4
10 -3
10-2
10-1
1
mbar
10
Inlet pressure
Operation diagram for nitrogen for TURBOVAC TW 250 S
C09 40
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C 2 5 0 S
Technical Data
Inlet flange
Pumping speed at
N2
Ar
H2
He
10-5
DN
100 ISO-K / 100 CF
s-1
s-1
s-1
s-1
230
210
80
150
mbar
I
I
I
I
x
x
x
x
Max. gas throughput, max.
N2
Ar
H2
He
3.7
1.6
1.1
2.4
Compression ratio
N2
mbar
mbar
mbar
mbar
x
x
x
x
l
l
l
l
x
x
x
x
s-1
s-1
s-1
s-1
at
at
at
at
10-1
10-2
10-1
10-1
mbar
mbar
mbar
mbar
3.0 x 107 at 3 mbar
1.0 x 107 at 6 mbar
5.0 x 102 at 0.2 mbar
3.2 x 103 at 0.7 mbar
Ar
H2
He
Ultimate pressure with two-stage oil-sealed
rotary vane pump
mbar (Torr)
< 2 x 10-8 (< 1.5 x 10-2)
Max. permissible backing pressure for N2
mbar (Torr)
3 (2.25)
Operating speed
min-1
(rpm)
Run-up time, approx.
51.600
min
3
Forevacuum connection
DN 16 KF
Venting connection
Weight
without frequency converter
with frequency converter
Thread M 5
kg (lbs)
kg (lbs)
5.0 (11.0)
5.8 (12.6)
Recommended forevacuum pumps
TRIVAC
Diaphragm pump
with an ultimate pressure < 3 mbar
and a pumping speed at 3 mbar
TRIVAC (at purge gas operation)
D 2.5 E
upon request
D8B
41 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
Ordering Information
TURBOVAC 250 S
TURBOVAC 250 S with integrated frequency converter TDS
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 100 CF
Cooling method
Water-cooled
Water-cooled
Air-cooled
Air-cooled
Air-cooled
Air-cooled
Air-cooled
Splinter guard
–
Course
Course
–
–
–
–
Frequency converter
TDS / PB
TDS / PB
TDS / PB
TDS / RS 232 C
TDS / RS 485 C
TDS / RS 232 C
TDS / RS 485 C
Part No. 114 37
Part No. 800150V0016
Part No. 800150V0009
Part No. 800150V0011
Part No. 800150V0013
Part No. 800150V0012
Part No. 800150V0014
TURBOVAC 250 S without integrated frequency converter TDS
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
Cooling method
Air-cooled
Air-cooled
Splinter guard
Course
Course
Frequency converter
–
–
For operation, one frequency converter TDS is necessary
Electronic frequency converter TDS without heat sink
with RS 485 C interface
with RS 232 C interface
Part No. 113 52
Part No. 800150V0007
Part No. 800070V0003
Part No. 800070V0002
Connecting cable TDS – pump
1 m (3.5 ft)
Part No. 152 47
see chapter
“Turbomolecular Pumps
with Mechanical Rotor Suspension”,
para. “Electronic Frequency Converters”
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300
Accessories, necessary for all pumps
Venting valve mounting kit
Part No. 863 20
Power failure venting valve
220/240 V AC
24 V AC
Part No. 280 71
Part No. 280 85
Venting valve
220/240 V AC
110/120 V AC
24 V AC
24 V AC
Part
Part
Part
Part
No.
No.
No.
No.
280
280
280
280
70
72
73
74
Accessories, optional
Water cooling unit with 2x G 1/8" connection
including 2 hose nozzles G 1/8", OD 10 mm for water hose,
4 gaskets, 2 blank-off plugs
Part No. 800135V0002
Air cooling unit (uses V DC from pump connection)
Part No. 800 000 249
Flange heater
100 CF, 230 V, 50 Hz
100 CF, 110 V, 60 Hz
Part No. 854 27
Part No. 854 28
Splinter guard
DN 100 ISO-K/CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 160 ISO-K
DN 160 CF
Part No. 800132V0101
Part No. 800132V0102
Part No. 200 00 307
Part No. 200 17 247
Vibration absorber
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
Part No. 800131V0100
Part No. 500 071
Part No. 500 073
Part No. 500 072
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Accessories for serial interfaces RS 232 C and RS 485 C
C09 42
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
43 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC TW 300
Typical Applications
■ Mass spectrometers
■ Production of thin films
■ CD and DVD coating
■ R & D, e.g.
- UHV systems
- Particle accelerators
■ Load locks and transfer chambers
Top view
Ø a2
Ø a1
DN
Technical Features
■ Integrated or external frequency
converter
■ Compact design
■ Operation in any orientation
h1
h
h2
■ Highest pumping speed for
Nitrogen and Argon
h3
■ Highly effective air-cooling unit
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
a
b1
b
l
DN
100 ISO-K
a
160
6.30
160
6.30
160
6.30
mm
in.
mm
in.
mm
in.
160 ISO-K
100 CF
a1
130
5.12
180
7.09
151.5
5.96
a2
171
6.73
202
7.95
–
–
h
217
8.54
221
8.70
219.4
8.64
h1
h2
h3
b
b1
l
243 50
55 154 77 186
9.57 1.97 2.17 6.06 3.03 7.32
247.5 50
55 154 77 186
9.74 1.97 2.17 6.06 3.03 7.32
–
50
55 154 77 186
–
1.97 2.17 6.06 3.03 7.32
Dimensional drawing for the TURBOVAC TW 300
10
10
Pumping Speed
Ixs
-5
10
-4
10
-3
10
-2
10
-1
10
0
Torr 750
3
-1
■ Space-saving
■ Easy to integrate into complex
vacuum systems
N2
Ar
■ High foreline tolerance allows the
use of down-sized forevacuum
pumps
He
H2
2
10 8
6
10
Advantages to the User
4
■ High productivity
2
■ Low operating costs
1
10
-5
2
4
6 8
10
-4
10
-3
10
-2
10
-1
10
0
mbar
10
1
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 44
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T W 3 0 0
Technical Data
O-ring sealed
100 ISO-K
O-ring sealed
160 ISO-K
Metal sealed
100 CF
Pump housing
Aluminum
Aluminum
Stainless steel
Pumping speed 1) at 10-5 / 10-3 mbar
N2
I x s-1
Ar
I x s-1
H2
I x s-1
He
I x s-1
240
230
140
230
240
230
140
230
Inlet flange
DN
Ultimate pressure (for CF pumps)
with two-stage oil-sealed
rotary vane vacuum pump
TRIVAC D 2,5 E
mbar (Torr)
with dry compressing
scroll vacuum pump
SC 15 D
mbar (Torr)
with diaphragm pump
DIVAC 2.5 VT
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
two-stage oil-sealed
rotary vane vacuum pump
dry compressing scroll vacuum pump
/
/
/
/
240
230
125
220
< 2 x 10-8 (< 1.5 x 10-8)
/
/
/
/
240
230
125
220
< 2 x 10-8 (< 1.5 x 10-8)
240
230
140
230
/
/
/
/
240
230
125
220
< 2 x 10-10 (< 1.5 x 10-10)
≤ 0.016 (≤ 0.012)
< 4 x 10-9 (< 3 x 10-9)
< 10 (water-cooled)
< 10 (water-cooled)
< 5 (air-cooled)
TRIVAC D 2,5 E
SC 15 D
TRIVAC D 2,5 E
SC 15 D
TRIVAC D 2,5 E
SC 15 D
Run-up time to 95%
of nominal speed
min
4
4
4
Purge / vent port
DN
16 KF
16 KF
16 KF
2x G 1/8"
2x G 1/8"
2x G 1/8"
6.8 (15.0) / 6.0 (13.2)
6.8 (15.0) / 6.0 (13.2)
6.8 (15.0) / 6.0 (13.2)
24
24
24
150 / 30
150 / 30
150 / 30
Cooling water connection (option)
Weight, approx. with / without
frequency converter
kg (lbs)
Supply voltage
V DC
Max. power consumption
Run up / ultimate pressure
1)
W
for continuous operation when water-cooled
45 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
Ordering Information
TURBOVAC TW 300
TW 300 with integrated frequency converter TD 300
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 ISO-K
Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
Cooling method
Air-cooled
Water-cooled
Water-cooled
Water-cooled
Air-cooled
Interface
RS 485 C
RS 232/422 C
RS 232/422 C
RS 485 C
RS 485 C
Part No. 800170V2105
Part No. 800170V2106
Part No. 800170V2103
Part No. 800170V2108
Part No. 170 222
Interface
–
–
Part No. 800170V2101
Part No. 800011V0003
TW 300 without frequency converter TD 300
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
Foreline flange
DN 16 KF
DN 16 KF
Cooling method
Convection
Air-cooled
For operation, one frequency converter TD 300 is necessary
Electronic frequency converter TD 300 without heat sink
with Profibus
with RS 485 C interface
with RS 232/422 C interface
Connecting cable TD 300 – pump
1 m (03.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)
Part No. 800072V0004
Part No. 800072V0003
Part No. 800072V0001
Part No. 152 47
Part No. 864 40
Part No. 864 50
Accessories, necessary for all pumps
START/STOP switch for manual operation of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300
Part No. 152 48
see chapter
“Turbomolecular Pumps
with Mechanical Rotor Suspension”,
para. “Electronic Frequency Converters”
Accessories, optional
Water cooling unit with 2x G 1/8" connection
including 2 hose nozzles G 1/8", OD 10 mm for water hose,
4 gaskets, 2 blank-off plugs
Part No. 800135V0002
Air cooling unit (uses V DC from pump connection)
Part No. 800 000 249
Flange heater
100 CF, 230 V, 50 Hz
100 CF, 110 V, 60 Hz
Part No. 854 27
Part No. 854 28
Splinter guard
DN 100 ISO-K/CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 160 ISO-K
DN 160 CF
Part No. 800132V0101
Part No. 800132V0102
Part No. 200 00 307
Part No. 200 17 247
Vibration absorber
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
Part No. 800131V0100
Part No. 500 071
Part No. 500 073
Part No. 500 072
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Accessories for serial interfaces RS 232 C and RS 485 C
C09 46
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
TW 300 (cooled by convection)
with integrated frequency converter TD 300
Power supply unit
Mains
24 V DC
e.g.
cable, 20 m
(70.0 ft) max. TURBO.POWER 300
TURBO.CONTROL 300
TW 300 (cooled by convection)
without integrated frequency converter TD 300
TD 300 with heat sink
Power supply unit
Dr
ive
Mains
(X3)
Connecting
cable,
5 m (17.5 ft) max.
HE
DC
(X4)24 V
AT
SIN
24 V DC
e.g.
cable, 20 m
(70.0 ft) max. TURBO.POWER 300
TURBO.CONTROL 300
K
TW 300 (with air cooling)
with integrated frequency converter TD 300
Power supply unit
Mains
24 V DC
e.g.
cable, 20 m
(70.0 ft) max. TURBO.POWER 300
TURBO.CONTROL 300
TW 300 (with air cooling)
without integrated frequency converter TD 300
TD 300 with heat sink
Power supply unit
Dr
Connecting
cable,
5 m (17.5 ft) max.
ive
Mains
(X3)
HE
DC
(X4)24 V
AT
SIN
K
24 V DC
e.g.
cable, 20 m
(70.0 ft) max. TURBO.POWER 300
TURBO.CONTROL 300
The modular concept
47 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC TW 300 H
Typical Applications
■ Mass spectrometers
■ R & D, e.g.
- UHV systems
- Particle accelerators
■ Load locks and transfer chambers
Top view
Ø a2
Ø a1
DN
Technical Features
■ Integrated frequency converter
■ Compact design
■ Operation in any orientation
h1
■ High pumping speed and
compression for light gases
h
h2
■ Highly effective air-cooling unit
h3
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
a
b1
b
l
DN
100 ISO-K
mm
in.
mm
in.
100 CF
a
a1
a2
h
h1
h2
h3
b
b1
l
160 130 171 217 243 50
55 154 77 186
6.30 5.12 6.73 8.54 9.57 1.97 2.17 6.06 3.03 7.32
160 151.5 – 219.4 –
50
55 154 77 186
6.30 5.96
–
8.64
–
1.97 2.17 6.06 3.03 7.32
Dimensional drawing for the TURBOVAC TW 300 H
10
10
Pumping Speed
Ixs
-5
10
-4
10
-3
10
-2
10
-1
10
0
Advantages to the User
Torr
■ Space-saving
3
-1
■ Easy to integrate into complex
vacuum systems
N2
Ar
■ High foreline tolerance allows the
use of down-sized forevacuum
pumps
He
H2
10
2
■ Low operating costs
10
1
10
-5
2
4
6 8
10
-4
10
-3
10
-2
10
-1
10
0
mbar
10
1
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 48
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T W 3 0 0 H
Technical Data
Inlet flange
DN
Pump housing
Pumping speed at 10-5 / 10-3 mbar
N2
Ar
H2
He
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
Ultimate pressure (for CF pumps)
with two-stage oil-sealed
rotary vane vacuum pump
TRIVAC D 2,5 E
mbar (Torr)
with dry compressing
scroll vacuum pump
SC 15 D
mbar (Torr)
with diaphragm pump
DIVAC 2.5 VT
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
two-stage oil-sealed
rotary vane vacuum pump
dry compressing scroll vacuum pump
O-ring sealed
100 ISO-K
Metal sealed
100 CF
Aluminum
Stainless steel
240
240
160
240
/
/
/
/
240
240
140
230
< 1 x 10-8 (< 0.75 x 10-8)
240
240
160
240
/
/
/
/
240
240
140
230
< 1 x 10-10 (< 0.75 x 10-10)
≤ 0.016 (≤ 0.012)
< 1 x 10-9 (< 0.75 x 10-9)
< 10 (water-cooled)
< 5 (air-cooled)
TRIVAC D 2,5 E
SC 15 D
TRIVAC D 2,5 E
SC 15 D
Run-up time to 95%
of nominal speed
min
4
4
Purge / vent port
DN
16 KF
16 KF
2x G 1/8"
2x G 1/8"
6.8 (15.0) / 6.0 (13.2)
6.8 (15.0) / 6.0 (13.2)
24
24
150 / 30
150 / 30
Cooling water connection (option)
Weight, approx. with / without
frequency converter
Supply voltage
kg (lbs)
V DC
Max. power consumption
Run up / ultimate pressure
W
49 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
Ordering Information
TURBOVAC TW 300 H
TW 300 H with integrated frequency converter TD 300
Inlet flange
DN 100 ISO-K
DN 100 CF
DN 100 CF
DN 100 CF
Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
Cooling method
Air-cooled
Air-cooled
Air-cooled
Water-cooled
Interface
RS 485 C
RS 485 C
RS 232 C
RS 485 C
Part No. 800170V2107
Part No. 800170V2102
Part No. 800170V2104
Part No. 170 257
Accessories, necessary for all pumps
START/STOP switch for manual operation of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300
Part No. 152 48
see chapter
“Turbomolecular Pumps
with Mechanical Rotor Suspension“,
para. “Electronic Frequency Converters”
Accessories, optional
Water cooling unit with G 1/8" connection
including 2 hose nozzles G 1/8", OD 10 mm for water hose,
4 gaskets, 2 blank-off plugs
Part No. 800135V0002
Air cooling unit (uses V DC from pump connection)
Part No. 800 000 249
Flange heater
100 CF, 230 V, 50 Hz
100 CF, 110 V, 60 Hz
Part No. 854 27
Part No. 854 28
Splinter guard DN 100 ISO-K/CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
Part No. 800132V0101
Part No. 800132V0102
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
Vibration absorber
DN 100 ISO-K
DN 100 CF
Part No. 800131V0100
Part No. 500 071
Accessories for serial interfaces RS 232 C and RS 485 C
see chapter “Turbomolecular Pumps”,
para. “Accessories”
C09 50
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
TW 300 H (cooled by convection)
with integrated frequency converter TD 300
Power supply unit
Mains
24 V DC
cable, 20 m
(70.0 ft) max.
e.g.
TURBO.POWER 300
TURBO.CONTROL 300
TW 300 H (with air cooling)
with integrated frequency converter TD 300
Power supply unit
Mains
24 V DC
cable, 20 m
(70.0 ft) max.
e.g.
TURBO.POWER 300
TURBO.CONTROL 300
The modular concept
51 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC TW 701
Typical Applications
■ Mass spectrometers
■ Data storage
■ Flat panel displays
■ R & D, e.g.
- UHV systems
- Particle accelerators
■ Load locks and transfer chambers
ød1
l
ød
Technical Features
l1
■ Integrated frequency converter
h1
■ Operation in any orientation
b
h
h2
h3
■ High foreline tolerance allows the
use of down-sized forevacuum
pumps
ød2
■ Highly effective air-cooling unit
Top view
b1
DN160 ISO-K
mm
in.
mm
in.
DN 160 CF
b
228
8.98
228
8.98
b1
219
8.82
219
8.82
d
180
7.09
–
–
d1
150
5.91
150
5.91
■ Highest pumping speed and
throughput für Nitrogen und Argon
d2
h
h1
h2
h3
l
180
–
–
285 115 264
7.09
–
–
11.22 4.53 10.39
180 295
12
–
115 264
7.09 11.61 0.47
–
4.53 10.39
l1
223
8.78
223
8.78
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Advantages to the User
Dimensional drawing for the TURBOVAC TW 701
■ Space-saving
10
10
Ixs
10
-4
10
-3
10
-2
10
-1
10
0
Torr
750
4
-1
10
Pumping Speed
-5
10
10
10
■ High productivity
N2
Ar
He
H2
3
■ Easy to integrate into complex
vacuum systems
■ Low operating costs
■ Highly reliable operation
2
1
0
10
-5
10
-4
10
-3
10
-2
10
-1
1
mbar
10
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 52
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T W 7 0 1
Technical Data
Inlet flange
Pumping speed
N2
Ar
He
H2
Max. gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
x
x
x
x
DN
160 ISO-K
160 CF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
680
600
530
330
680
600
530
330
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
12
5 (water-cooled)
7
2.5
12
5 (water-cooled)
7
2.5
Compression ratio
N2
Ar
He
H2
8
1
1
2
x
x
x
x
108
108
106
104
8
1
1
2
x
x
x
x
108
108
106
104
Ultimate pressure
mbar (Torr)
< 5.0 x 10-9 (< 3.75 x 10-9)
< 1.5 x 10-10 (< 1.1 x 10-10)
Max. foreline pressure for N2
mbar (Torr)
14 (10.5)
14 (10.5)
TRIVAC D 65 B
SC 30 D
TRIVAC D 65 B
SC 30 D
Recommended forevacuum pump
Run-up time to 95% speed
min
≈5
≈5
Purge port
DN
16 KF
16 KF
2x G 1/8" (internal threads)
2x G 1/8" (internal threads)
19 (42)
19 (42)
V DC
59
59
W
500
500
Cooling water connection
Weight, approx.
Supply voltage, nominal
kg (lbs)
Max. power consumption
53 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
Ordering Information
TURBOVAC TW 701
TW 701 with integrated frequency converter
Inlet flange
Foreline flange
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 CF
DN 25 KF
DN 160 CF
DN 25 KF
DN 200 CF
DN 25 KF
(incl. splinter guard)
Cooling method
Interface
Air-cooled
RS 232 C
Water-cooled
RS 232 C
Air-cooled
RS 485 C
Water-cooled
RS 485 C
Water-cooled
RS 232 C + Profibus
Air-cooled
RS 485 C
Water-cooled
RS 485 C
Water-cooled
RS 232 C
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
800051V0121
800051V0025
800051V0024
800051V0023
800051V0122
800051V0027
800051V0026
800051V0022
see chapter
“Turbomolecular Pumps
with Mechanical Rotor Suspension“,
para. “Electronic Frequency Converters”
Power supply unit TURBO.CONTROL 700
Accessories, optional
Splinter guard
DN 160 ISO-K
DN 160 CF
Part No. 200 00 307
Part No. 200 17 247
Flange heater 160 CF
230 V AC
110 V AC
Part No. 854 37
Part No. 854 38
Vibration absorber
DN 160 ISO-K
Part No. 500 073
Part No. 500 072
DN 160 CF
Part No. 864 45
OEM power supply, 59 V DC
59 V DC cable
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
No.
No.
No.
No.
200
200
200
200
12
12
12
15
729
730
731
064
Plug with integrated START/STOP switch
Part No. 152 48
Purge gas and venting valve, 24 V DC; 0.6 mbar x I x s-1 = 36 sccm
(purge gas pressure, abs.; 1.5 to 6 bar)
Part No. 121 33
see chapter “Turbomolecular Pumps”,
para. “Accessories”
Accessories for serial interfaces RS 232 C and RS 485 C
Accessories, for the water connection
Part
Part
Part
Part
Part
Part
Adaptor G (BPS) 1/8" – G (BPS) 1/4" pipe
Gasket
Adaptor G (BPS) 1/8" – 10 mm (0.39 in.) hose nozzle
Gasket
Adaptor G (BPS) 1/8" – NPT 1/8"
Gasket
C09 54
No.
No.
No.
No.
No.
No.
200
224
200
230
200
238
91
01
18
02
12
20
671
207
366
106
742
110
(2x
(2x
(2x
(2x
(2x
(2x
required)
required)
required)
required)
required)
required)
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Notes
55 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension
with Compound Stage
TURBOVAC TW 1600
Typical Applications
■ Data storage
■ Flat panel displays
■ Optical coating
■ Large area coating
■ R & D, e.g.
- Fusions-Experimente
- Space simulation
- UHV applications
Technical Features
ød
b
h1
h2
b1
■ Frequency converter and power
supply integrated
h4
h3
■ Robust rotor design
■ Operation in any orientation
h
a
■ Highest pumping speed and
throughput
57°
■ Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Top view
61,5°
ø d1
DN
200 ISO-F mm
inch
250 ISO-F mm
inch
250 CF
mm
inch
a
15°
15°
15°
15°
5.6°
5.6°
a
178
7.01
178
7.01
178
7.01
b
190
7.48
190
7.48
190
7.48
b1
d
d1
h
h1
h2
156 285 308 425 349 315
6.14 11.22 12.13 16.73 13.74 12.40
156 335 308 398 322 288
6.14 13.19 12.13 15.67 12.68 11.34
156 304 308 413 337 303
6.14 11.97 12.13 16.26 13.27 11.93
h3
277
10.91
249
9.80
264
10.39
h4
256
10.08
228
8.98
243
9.57
■ Purge gas and venting valve
integrated
■ High foreline tolerance
Advantages to the User
Dimensional drawing for the TURBOVAC TW 1600
■ Space-saving
10
10
Pumping Speed
Ixs
-5
10
-4
10
-3
10
-2
10
1
Torr
10
4
-1
10
-1
■ Easy to integrate into complex
vacuum systems
■ High productivity
N2
Ar
■ Low operating costs
3
■ Operation with dry backing pumps
10
2
8
6
4
2
10
1
10
-5
2
4
6 8 -4
10
10
-3
10
-2
10
-1
1
mbar
10
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 56
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
T U R B O VA C T W 1 6 0 0
Technical Data
Inlet flange
DN
Pumping speed
N2
I x s-1
I x s-1
Ar
Max. gas throughput
N2
Ar
mbar x I x s-1
mbar x I x s-1
Compression ratio k0
for O-ring sealed pumps
N2
Ar
200 ISO-F
250 ISO-F • 250 CF
1000
820
1420
1200
7.4
6.8
7.4
6.8
1 x 107
1 x 107
3 x 108
3x
108
Ultimate pressure
mbar (Torr)
< 3 x 10-10 (< 2.25 x 10-10)
< 3 x 10-10 (< 2.25 x 10-10)
Max. foreline pressure for N2
mbar (Torr)
8 (6)
8 (6)
TRIVAC D 65 B + RUVAC WA 501
DIVAC 4.8 VT
SOGEVAC SV 25
SC 30 D
TRIVAC D 65 B + RUVAC WA 501
DIVAC 4.8 VT
SOGEVAC SV 25
SC 30 D
Recommended forevacuum pump
(alternatively)
Run-up time to 95% speed
min
< 10
< 10
Purge / vent port
DN
G 1/4"
G 1/4"
G 3/8"
G 3/8"
kg (lbs)
40 (88.3)
40 (88.3)
V AC
100 - 240
100 - 240
700
700
Cooling water connection
Weight, approx.
Supply voltage
Max. power consumption
W
TURBOVAC TW 1600
Ordering Information
Inlet flange
DN 200 ISO-F
DN 250 ISO-F
DN 250 CF
Foreline flange
DN 40 KF
DN 40 KF
DN 40 KF
Cooling method
Water-cooled
Water-cooled
Water-cooled
Interface
Profibus
Profibus
Profibus
Purge filter
Part No. 800041V2144
Part No. 800041V2444
Part No. 800041V2844
Part No. 200 18 515
Accessories for serial interfaces RS 232 C and RS 485 C
see chapter “Turbomolecular Pumps“,
para. “Accessories“
57 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters
TURBOTRONIK NT 10
Technical Features
■ For operating the TURBOVAC 50
turbomolecular pump
■ Controls and indicators on the
front panel
■ Bench top unit
■ Inputs for remote control and
process controller
■ Also for rack mounting (1/4 19",
3 HU)
■ Freely assignable relays (e.g. to
control the backing pumps)
TURBOTRONIK NT 10
Technical Data
Mains connection, 50 - 60 Hz
V
90 - 140/180 - 260
Max. output voltage
V
3 x 150
Overload current limit
A
0.22
Permissible ambient temperature
Dimensions (W x H x D)
°C (°F)
0 to +40 (+32 to +104)
mm (in.)
106 x 128 x 233 (4.17 x 5.04 x 9.17)
kg (lbs)
1.5 (3.3)
Weight, approx.
Ordering Information
TURBOTRONIK NT 10
090 - 140 V (with US plug)
Part No. 859 01
180 - 260 V (with EURO plug)
Part No. 859 00
Connecting cable pump - converter
3 m (10.5 ft)
5 m (17.5 ft)
Part No. 121 08
Part No. 121 09
C09 58
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters Turbomolecular Pumps with Mechanical Rotor Suspension
TURBOTRONIK NT 20
Technical Features
Advantages to the User
■ For operating the TURBOVAC
151 (C), 361 (C), 600 C and
1100 C turbomolecular pump
■ Remote control and process
control via analog and
programmable control inputs and
outputs
■ Front panel with membrane
keypad and LCD
■ Connection for backing pump,
venting valve, flange heater and
air cooler
■ Operation direct at the unit or via
interface
■ Floating connection of external
monitoring devices via a terminal
strip on the rear
TURBOTRONIK NT 20
Technical Data
Main connection, 50 - 60 Hz; selectable
V
85 to 265
Max. output voltage
V
3 x 42
Overload current limit
A
5
Permissible ambient temperature
Dimensions (W x H x D)
Weight, approx.
°C (°F)
0 to +45 (+32 to +113)
mm (in.)
213 x 129 x 320 (1/2 19“, 3 HU)
(8.39 x 5.08 x 12.60 (1/2 19“, 3 HU))
kg (lbs)
7 (15.4)
Ordering Information
100 V (with US plug)
TURBOTRONIK NT 20
Part No. 857 22
2)
120 V (with US plug)
Part No. 857 21
230 V (with EURO plug)
Part No. 857 20
Connecting cable pump – converter
03 m (10.5)
05 m (17.5)
10 m (35.0 ft)
20 m (70.0 ft)
1)
2)
Part
Part
Part
Part
No.
No.
No.
No.
857
857
857
857
65
66
67
68
1)
1)
1)
1)
1)
If NT 20 is being ordered to replace NT 150/360, NT 151/361, then an NT 20 cable must also be ordered.
(NT 20 has a round connector on back panel for the connection of the cable, the other controllers used a rectangular connector instead.)
Not suitable for driving the TURBOVAC 1100 C
59 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters
Only available for purchase in North and South America
TURBOTRONIK NT 361
Technical Features
■ For operating the TURBOVAC 361
turbomolecular pumps
■ Sensing of the pump model via a
resistance code
■ Operation via pushbuttons
■ Terminal strip for remote control
and display functions
TURBOTRONIK NT 361
Technical Data
Mains connection, 60 Hz
V
120
Max. power consumption
during run-up
VA
750
Power consumption
during normal operation, approx.
VA
130
Max. output voltage / run-up current V / A
Overload current limit
Nominal frequency
Permissible ambient temperature
Dimensions (W x H x D)
A
3.5
Hz
833/750
°C (°F)
0 to +40 (32 to +104)
mm (in.)
210 x 129 x 288 (8.27 x 5.08 x 11.34)
kg (lbs)
8.5 (18.7)
Weight, approx.
Ordering Information
120 V (with US plug)
Connecting cable pump - converter
3 m (10.5 ft)
5 m (17.5 ft)
3 x 45 / 5.5
TURBOTRONIK NT 361
Part No. 854 72-6
Part No. 857 60
Part No. 857 61
C09 60
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters Turbomolecular Pumps with Mechanical Rotor Suspension
TURBO.DRIVE S (TDS)
for TW 70 H and TW 250 S
Technical Features
b1
■ Compact size
b
b2
l
h
h1
Driv
e (X
■ RS 232 C, RS 485 C or Profibus
interface
3)
HE
DC
(X 24 V
4)
AT
SIN
K
b
b1
b2
h
h1
mm 100 18.1 63.8 50
40
in. 3.94 0.71 2.51 1.97 1.57
TURBO.DRIVE S (front side)
l
100
100
Dimensional drawing for the TURBO.DRIVE S
(rear side)
■ Configurations
- as a separate frequency
converter
- integrated within turbomolecular
pump
■ Remote control via remote control
interface
■ Flexible mounting
■ Cost-effective supply of 24 V DC
power
Technical Data
TURBO.DRIVE S
Input
Voltage
V DC
Max. continuos current
A
Max. continuos power consumption W
24 ± 5%
7
170
Ambient temperature
Dimensions (W x H x D),
including heat sink
Weight
°C (°F)
+10 to +45 (+50 to +113)
mm (in.)
100 x 90 x 100 (3.94 x 3.54 x 3.94)
kg (lbs)
0.7 (1.55)
Serial interface
Ordering Information
TURBO.DRIVE S
with RS 232 C interface
with RS 485 C interface
with Profibus
with RS 232 C interface
and heat sink
with RS 485 C interface
and heat sink
Connecting cable TDS - pump
1 m (03.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)
START/STOP switch (for manual operation)
Hat rail adaptor as mounting aid
Accessories for RS 232 C
and RS 485 C interfaces
RS 232 C, RS 485 C or Profibus
TURBO.DRIVE S
Part No. 800070V0002
Part No. 800070V0003
Part No. 800070V0004
Part No. 800070V0005
Part No. 800070V0006
Part No. 152 47
Part No. 864 40
Part No. 864 50
Part No. 152 48
Part No. 800110V0003
see chapter “Turbomolecular Pumps”,
para. “Accessories”
61 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters
TURBO.DRIVE 300 (TD 300)
for TW 70, TW 250 S, TW 300 and TW 300 H
Technical Features
b1
■ Compact size
b
b2
l
h
h1
Driv
e (X
■ RS 232/422 C or RS 485 C
interface
■ Configurations
- as a separate frequency
converter
- integrated within turbomolecular
pump
3)
HE
DC
(X 24 V
4)
AT
SIN
K
Option
TURBO.DRIVE 300 (front side)
b
b1
b2
h
h1
mm 100 18.1 63.8 50
40
in. 3.94 0.71 2.51 1.97 1.57
l
100
100
■ Remote control via remote control
interface
■ Flexible mounting
Dimensional drawing for the TURBO.DRIVE 300
(rear side)
■ Cost-effective supply of 24 V DC
power
Technical Data
TURBO.DRIVE 300
Input
Voltage
V DC
Max. continuos current
A
Max. continuos power consumption W
24 ± 5%
7
170
Ambient temperature
Dimensions (W x H x D)
Weight
°C (°F)
mm (in.)
100 x 90 x 100 (3.94 x 3.54 x 3.94)
kg (lbs)
0.7 (1.55)
Serial interface
Ordering Information
TURBO.DRIVE 300
with RS 232/422 C interface
with RS 485 C interface
with Profibus
Connecting cable TD 300 - pump
1 m (03.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)
START/STOP switch (for manual operation)
Hat rail adaptor as mounting aid
Accessories for RS 232 C
and RS 485 C interfaces
+5 to +45 (+41 to +113)
RS 232/422 C or RS 485 C
TURBO.DRIVE 300
Part No. 800072V0001
Part No. 800072V0003
Part No. 800072V0004
Part No. 152 47
Part No. 864 40
Part No. 864 50
Part No. 152 48
Part No. 800110V0003
see chapter “Turbomolecular Pumps”,
para. “Accessories”
C09 62
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters Turbomolecular Pumps with Mechanical Rotor Suspension
Power Supply PS 700 for TW 701
Turbomolecular Pumps
Technical Features
h1
3 x M4
AIRFLOW
l1
■ 59 V DC OEM power supply for
screw fixing in electrical cabinets
h
h1
b1
l2
b
b2
4 x M4
l
b b 1 b 2 h h1
l
l1
l2
mm 63 15 30 105 11 227 197 18
in. 2.48 0.59 1.18 4.13 0.43 8.94 7.76 0.71
Dimensional drawing for the power supply PS 700
Technical Data
Power Supply PS 700
Input
Mains voltage
V DC
Max. continuos power consumption W
85-265
850
Output
Voltage, nominal
V DC
Max. continuos current
A
Max. continuos power consumption W
59
13
750
Ambient temperature
Dimensions (W x H x D)
°C (°F)
0 to +70 (+32 to +158)
mm (in.)
227 x 63 x 127 (8.94 x 2.48 x 5.0)
kg (lbs)
2 (4.4)
Weight
Ordering Information
Power Supply PS 700
OEM power supply 59 V DC
Part No. 864 45
59 V DC cable TW 700 – power supply
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
Mains cable for OEM power supply,
2 m (7 ft)
with EURO plug
with US plug, 220 V AC
with US plug, 115 V AC (7.5 ft)
No.
No.
No.
No.
200
200
200
200
12
12
12
15
729
730
731
064
Part No. 800102V0001
Part No. 800102V1001
Part No. 992 76 513
START/STOP switch for TURBO.DRIVE S
(for manual operation)
Part No. 152 48
Note:
See the TPC and TSC controllers in the Product Section C10 “Turbomolecular Pump Systems” for additinal controllers for the TURBOVAC TW 300 and TW 700
63 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters
Power Supply Units for TURBO.DRIVE S,
TURBO.DRIVE 300 and TW 700/701
246
211
211
53
266
Front view
315
5
Ø4
213
263
315
START
4
111
213
198,1
263
START
128,4
1
0
NORMAL
116
70
Front view
122,4
ERROR
START
111
STOP
POWER
198,1
START
128,4
1
0
NORMAL
STOP
POWER
122,4
ERROR
TURBO.CONTROL 300/700
TURBO.CONTROL 300/700
Ø
Ø
3,2
3,2
Dimensional drawing for the power supply
TURBO.POWER 300
Dimensional drawing for the power supply
TURBO.CONTROL 300
Dimensional drawing for the power supply
TURBO.CONTROL 700
Technical Features
Technical Features
Technical Features
■ Cost-effective supply of 24 V DC
power for TURBO.DRIVE S and
TURBO.DRIVE 300
■ For supplying 24 V DC power to
the TURBO.DRIVE S and
TURBO.DRIVE 300
■ For supplying 56 V DC power to
the TW 700/701
■ Plug & play
■ Plug & play
■ Bench top unit or for cabinet
mounting
■ Bench top unit or for cabinet
mounting
■ Mains switch
■ START/STOP switch for the turbomolecular pump
■ Remote control via remote
interface
■ Status indicating LEDs and status
relays
C09 64
■ Plug & play
■ Bench top unit or for cabinet
mounting
■ Mains switch
■ START/STOP switch for the turbomolecular pump
■ Remote control via remote
interface
■ Status indicating LEDs and status
relays
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters Turbomolecular Pumps with Mechanical Rotor Suspension
Power Supply
Technical Data
TURBO.POWER 300
TURBO.CONTROL 300
TURBO.CONTROL 700
85-264 V / 50/60 Hz
300
85-264 V / 50/60 Hz
300
85-264 V / 50/60 Hz
805
24
8.4
24
8.4
56
8.5
0 to +40 (+32 to +104)
0 to +40 (+32 to +104)
0 to +40 (+32 to +104)
mm (in.)
116 x 53 x 260
(4.57 x 2.09 x 10.24)
213 x 129 x 320
(8.39 x 5.08 x 12.6)
213 x 129 x 320
(8.39 x 5.08 x 12.6)
kg (lbs)
1.5 (3.3)
1.5 (3.3)
2.5 (5.52)
Input
Mains voltage
Max. power consumption
Output
Voltage, nominal
VA
V DC
Max. continuos current
Ambient temperature
Dimensions (W x H x D)
Weight
A
°C (°F)
Ordering Information
Power supply
TURBO.POWER 300
TURBO.CONTROL 300
TURBO.CONTROL 700
DC cable
frequency converter - power supply unit
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
Power Supply
TURBO.POWER 300
TURBO.CONTROL 300
TURBO.CONTROL 700
Part No. 800100V0002
–
–
–
Part No. 800100V0001
–
–
–
Part No. 800101V0001
24 V DC power cable
Part No. 800094V0100
Part No. 800094V0300
Part No. 800094V0500
Part No. 800094V1000
Part No. 800094V2000
24 V DC control cable
Part No. 800091V0100
Part No. 800091V0300
Part No. 800091V0500
Part No. 800091V1000
Part No. 800091V2000
56 V DC control cable
Part No. 800093V0100
Part No. 800093V0300
Part No. 800093V0500
Part No. 800093V1000
Part No. 800093V2000
Mains cable, 3 m (10.5 ft)
with EURO plug
with US plug 6-15 P, 220 V AC
with US plug, 115 V AC (7.5 ft)
Part No. 800102V0002
Part No. 800102V1002
Part No. 992 76 513
Part No. 800102V0002
Part No. 800102V1002
Part No. 992 76 513
Part No. 800102V0002
Part No. 800102V1002
Part No. 992 76 513
Hat rail adaptor as mounting aid
Part No. 800110V0003
–
–
20 m (70.0 ft)
65 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage
TURBOVAC 340 M
Typical Applications
■ Gas analysis systems
■ Particle accelerators
■ Electron beam microscopy
■ Research instruments and systems
ød
DN 100
C
A
Technical Features
b1
60°
F
B
■ Magnetic suspension
ød1
60°
h
B
F1
F2
h6
E
■ Low noise and vibration levels
b
D
■ Installation in any orientation
a
h2
h4 h5
■ Absolutely free of any lubricants
E
a1
C
h3
■ Convection cooling
Top view
F3
■ Purge gas design
h1
DN
100 ISO-K
a
99
3.90
99
3.90
99
3.90
99
3.90
mm
in.
mm
in.
mm
in.
mm
in.
100 CF
160 ISO-K
160 CF
a1
101
3.98
101
3.98
101
3.98
101
3.98
b
101
3.98
101
3.98
101
3.98
101
3.98
b1
50
1.97
50
1.97
50
1.97
50
1.97
d
178
7.01
178
7.01
178
7.01
178
7.01
d1
28
1.10
28
1.10
28
1.10
28
1.10
h
311
12.24
322
12.24
311
12.24
308
12.13
h1
12
0.47
12
0.47
12
0.47
12
0.47
h2
162
6.38
162
6.38
162
6.38
162
6.38
h3
109
4.29
109
4.29
109
4.29
109
4.29
h4
123
4.84
123
4.84
123
4.84
123
4.84
h5
114
4.49
114
4.49
114
4.49
114
4.49
h6
80
3.15
80
3.15
80
3.15
80
3.15
Advantages to the User
Dimensional drawing for the TURBOVAC 340 M
■ Maintenance-free
10
10
Pumping Speed
Ixs
-6
10
-5
10
-4
10
-3
10
-2
Torr
0.075
3
-1
10
■ No batteries are required because
of integrated generator mode in
case of power
2
8
6
4
2
10
1
10
N2
H2
-6
2
4
6 8
10
-5
10
-4
10
-3
10
-2
mbar
10
-1
Inlet Pressure
Pumping speed of the TURBOVAC 340 M (100 and 160 ISO-K/CF) as a function of the inlet pressure
C09 66
Leybold Vacuum Full Line Catalog 2005
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without Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C 3 4 0 M
Technical Data
100 ISO-K • 100 CF
160 ISO-K • 160 CF
I x s-1
I x s-1
240
270
320
370
min-1
51 600
51 600
1 x 107
6.4 x
1 x 103
1 x 107
6.4 x 104
1 x 103
Inlet flange
DN
Pumping speed
N2
H2
Speed
Compression ratio
N2
He
H2
104
Ultimate pressure
mbar (Torr)
< 10-9 (< 0.75 x 10-9)
< 10-9 (< 0.75 x 10-9)
Max. foreline pressure for N2
mbar (Torr)
5 x 10-1 (3.75 x 10-1)
5 x 10-1 (3.75 x 10-1)
TRIVAC D 16 B
Scroll
TRIVAC D 16 B
Scroll
Recommended forevacuum pump
Run-up time
min
3.5
3.5
forevacuum flange
DN
25 KF
25 KF
Purge / vent port
DN
10 KF
10 KF
not required
not required
16 (35)
16 (35)
Cooling water connections (hose nipple)
Weight, approx.
kg (lbs)
Ordering Information
TURBOVAC turbomolecular pump
with highvacuum connection flange
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
T U R B O VA C 3 4 0 M
Part
Part
Part
Part
No.
No.
No.
No.
855
855
855
855
80
81
82
83
Accessories for all pumps
Flange heater
DN 100 CF, 230 V
DN 160 CF, 230 V
DN 160 CF, 110 V
Part No. 854 27
Part No. 854 37
Part No. 854 38
Electronic frequency converter
TURBOTRONIK NT 340 M
100 V
120 V
230 V
Part No. 857 31
Part No. 857 30
Part No. 857 29
Connection line
see TURBOTRONIK NT 340 M
67 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage
TURBOVAC MAG 400 C/CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD and
Ion Implantation
■ Gas analysis systems
■ Particle accelerators
■ Electron beam microscopy
■ Research instruments and systems
■ Load locks and transfer chambers
ød
DN 100
Technical Features
E
A
■ Magnetic suspension
b1
60˚
b
F
h
B
C
B
a1
F1
D
■ Low noise and vibration levels
■ Installation in any orientation
60˚
h1
h3
F2
h4 h5
■ Optimized corrosion-resistant
advanced rotor design
a2
D
h2
a
E
a
mm 100
in. 3.94
■ Patented KEPLA-COAT® for rotor
and stator to prevent corrosion
F3
a1
114
4.49
a2
111
4.37
■ High temperature and high stress
tolerance material
Top view
b
186
7.32
b1
50
1.97
d
178
7.01
h
300
11.81
h1
162
6.38
h2
109
4.29
h3
123
4.84
h4
114
4.49
h5
80
3.15
■ Temperature management system
(TMS) for etch application
Dimensional drawing for the TURBOVAC MAG 400 CT
Advantages to the User
1000
■ Maintenance-free
Pumping Speed
Ixs
-1
■ Optimized vacuum performance
■ Resistant against corrosive gases
and process by-products
100
■ Robust against shock-venting
■ Temperature control for metal etch
10
8
6
■ No deposition of etch by products
due to TMS
N2
4
H2
2
1
10
-4
2
4
6
8
10
-3
10
-2
10
-1
10
mbar
Inlet Pressure
Pumping speed of the TURBOVAC MAG 400 C/CT as a function of the inlet pressure
C09 68
Leybold Vacuum Full Line Catalog 2005
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without Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
Inlet flange
DN
Pumping speed according to PNEUROP
N2
I x s-1
H2
I x s-1
min-1
Speed (high / low)
Compression ratio
N2
H2
400 C
400 CT
100 ISO-K
100 ISO-K
240 1)
240 1)
174 1)
180
1)
51 600 / 43 860
51 600 / 43 860
2 x 106
2 x 106
5 x 102
5x
102
Ultimate pressure according to DIN 28 400
mbar (Torr)
< 10-9 (< 0.75 x 10-9)
< 10-9 (< 0.75 x 10-9)
Max. foreline pressure for N2
5 x 10-1 (3.75 x 10-1)
5 x 10-1 (3.75 x 10-1)
TRIVAC D 65 BCS
Scroll
TRIVAC D 65 BCS
Scroll
mbar (Torr)
Recommended forevacuum pump
Run-up time to 95% speed
min
3.5
3.5
forevacuum flange
DN
25 KF
25 KF
Purge / vent port
DN
10 KF
10 KF
mm (in.)
7.5 (0.30)
7.5 (0.30)
kg (lbs)
16 (35)
16 (35)
Cooling water connections
(hose nipple)
Weight, approx.
Ordering Information
T U R B O VA C M A G
400 C
400 CT
Part No. 894 62
Part No. 894 63
TURBOTRONIK NT 340 MA (120 V)
Part No. 857 32
Part No. 857 32
Connection line motor, 3 m (10.5 ft)
Part No. 859 10
Part No. 859 10
Connection line bearing, 3 m (10.5 ft)
Part No. 859 11
Part No. 859 11
–
see TURBOTRONIK
Part No. 855 48
Part No. 855 49
Part No. 174 17
Part No. 855 48
Part No. 855 49
Part No. 174 17
Part No. 200 91 240
Part No. 200 91 240
TURBOVAC MAG turbomolecular pump
Electronic frequency converter
Accessories for the temperature control
Purge gas and venting valve
110 V, 50/60 Hz
230 V, 50/60 Hz
024 V DC, 5 W
Seal kit
1)
Applies at a speed of 51 600 min-1
69 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage
TURBOVAC MAG 1500 CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
■ Load locks and transfer chambers
Technical Features
■ Active 5-axis magnetic bearing
system
■ Patented KEPLA-COAT® for rotor
and stator to prevent corrosion
■ Low noise and vibration levels
■ Operation in any orientation
26°
■ Advanced rotor design for high
throughput
ød
a2
70
ød1
ød2
h5
°
a1
°
60
b
h4
h3
Heatband
ød3
h1
ød6
h2
ød5
b2
3 0°
h
b1
a5
h6
a4
60
°
a3
a
ød4
Top view
200 ISO-F
250 ISO-F
200 ISO-F
250 ISO-F
mm
in.
mm
in.
mm
in.
mm
in.
d3
262
10.31
262
10.31
d4
d5
d6
h
175 285 243 307
6.89 11.22 9.57 12.09
175 285 243 307
6.89 11.22 9.57 12.09
h1
296
11.65
296
11.65
■ Bearing and temperature system
are controlled digitally
b
b1
b2
d
d1
d2
182
3
150 285 260 213
7.17 0.12 5.91 11.22 10.24 8.39
182
3
150 335 310 213
7.17 0.12 5.91 11.22 12.20 10.28
h2
279
10.98
279
10.98
h3
231
9.09
231
9.09
Advantages to the User
■ Maintenance-free
105°
a1
a2
a3
a4
a5
159 116.5 M8 x 15 32
9
6.26 4.59 M8 x 0.6 1.26 0.35
159 116.5 M8 x 15 32
9
6.26 4.59 M8 x 0.6 1.26 0.35
■ CT versions: Integrated
temperature management system
■ Intelligent power control system
DN 40 KF
h7
a
164.5
6.48
164.5
6.48
■ Integrated purge gas system
h4
200
7.87
200
7.87
h5
16
0.63
16
0.63
h6
h7
84
16
3.31 0.63
84
16
3.31 0.63
■ High throughput for all process
gases
■ High pumping speed at low
pressure
■ High foreline pressure tolerance:
up to 1.7 mbar (1.13 Torr)
■ High resistance against corrosive
gases
■ Robust against particles and
deposits
Dimensional drawing for the TURBOVAC MAG 1500 CT
■ Temperature control up to 90 °C
(194 °F) to avoid condensation
■ Lowest weight and size in its class
■ Application specific design
C09 70
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G 1 5 0 0 C T
Technical Data
Inlet flange
DN
200 ISO-F
250 ISO-F
1100
1150
920
1220
1220
1020
36 000
36 000
> 108
> 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
1.7 (1.2)
1.7 (1.2)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Pumping speed according to PNEUROP
N2
I x s-1
He
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m3/h
Run-up time
min
<6
<6
forevacuum flange
DN
40 KF
40 KF
Purge / vent port
VCR nut
1/4"
1/4"
Cooling water connection
(OD of tube)
mm (in.)
6.4 (0.25)
6.4 (0.25)
kg (lbs)
32 (70)
32 (70)
Weight, approx.
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG 1500 C/CT as a function of the inlet pressure
71 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G 1 5 0 0 C T
Ordering Information
Inlet flange
200 ISO-F
250 ISO-F
Part No. 400020V0002
Part No. 400021V0002
Part No. 400035V0011
Part No. 400035V0011
Part No. 400035V0013
Part No. 400035V0013
Part No. 121 36
Part No. 121 36
DN
TURBOVAC MAG turbomolecular pump
Electronic frequency converter
MAG.DRIVE digital
MAG.DRIVE digital
with Profibus interface
Plug-in control
without Compound Stage
Connecting cables converter – pump 1)
01.5
01.5
05.0
05.0
10.0
10.0
20.0
20.0
m
m
m
m
m
m
m
m
(5.25
(5.25
(17.5
(17.5
(35.0
(35.0
(70.0
(70.0
ft)
ft)
ft)
ft)
ft)
ft)
ft)
ft)
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
400036V0001
400037V0001
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
400036V0001
400037V0001
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
Seal kit
DN 250 metal
1)
Part No. 200 07 901
Part No. 200 07 901
further connecting cables can be found under MAG.DRIVE digital in the section “Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Frequency Converters”
C09 72
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Notes
73 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage
TURBOVAC MAG 2000 C/CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
■ Load locks and transfer chambers
Technical Features
■ Active 5-axis magnetic bearing
system
■ Patented KEPLA-COAT® for rotor
and stator to prevent corrosion
■ Low noise and vibration levels
■ Operation in any orientation
Only CT
■ Advanced rotor design for high
throughput
Top view
h5
ød
ød1
■ Integrated purge gas system
Only CT
■ CT versions: Integrated
temperature management system
ød4
h
h1
h2
30°
ød5
DN 40
h3
■ Maintenance-free
h4
■ High throughput for all etch gases
ød3
Only CT
■ High pumping speed at low
pressure
Only CT
mm
in.
d
d1
d2
335
310
335
13.19 12.20 13.19
d3
199
7.83
d4
284
11.18
d5
11
0.43
h
h1
h2
h3
303
272
318
386
11.93 10.71 12.52 15.20
h4
40
1.57
h5
16
0.63
■ Robust against particles and
deposits
10000
-1
■ Temperature management system
to avoid condensation
1000
Pumping Speed
■ High foreline pressure tolerance:
up to 2 mbar (1.5 Torr)
■ High resistance against corrosive
gases
Dimensional drawing for the TURBOVAC MAG 2000 C/CT
Ixs
Advantages to the User
■ Application specific design
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG 2000 CT (DN 250) as a function of the inlet pressure
C09 74
Leybold Vacuum Full Line Catalog 2005
Back to Contents
without Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
Inlet flange
DN
2000 C
2000 CT
250 ISO-F
250 ISO-F
1550
1780
1390
1550
1780
1390
28 800
28 800
> 108
> 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
1.6 (1.2)
1.6 (1.2)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Pumping speed according to PNEUROP
N2
I x s-1
He
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h
Run-up time
min
<8
<8
forevacuum flange
DN
40 KF
40 KF
Purge / vent port
VCR nut
1/4"
1/4"
Cooling water connection
(OD tube)
mm (in.)
6.4 (0.25)
6.4 (0.25)
kg (lbs)
68 (150)
68 (150)
Weight, approx.
Ordering Information
TURBOVAC MAG turbomolecular pump
T U R B O VA C M A G
2000 C
2000 CT
Part No. 894 16
Part No. 894 30
Part No. 400034V0011
Part No. 400034V0011
Part No. 121 36
Part No. 121 36
Electronic frequency converter
MAG.DRIVE 2000
Plug-in control
Connecting cables converter – pump
01.5 m (5.25 ft) BEARING
01.5 m (5.25 ft) DRIVE/TMS
05.0 m (17.5 ft) BEARING
05.0 m (17.5 ft) DRIVE/TMS
10.0 m (35.0 ft) BEARING
10.0 m (35.0 ft) DRIVE/TMS
20.0 m (70.0 ft) BEARING
20.0 m (70.0 ft) DRIVE/TMS
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
121
121
121
121
121
121
121
121
29
30
19
20
21
22
25
26
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
121
121
121
121
121
121
121
121
29
30
19
20
21
22
25
26
Seal kit
DN 250
Part No. 200 91 641
Part No. 200 91 641
75 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
TURBOVAC MAG W 830/1300 C
Typical Applications
■ Semiconductor processes, like
PVD and ion implantation
■ Transfer chambers
■ Particle accelerators
■ Research instruments and systems
■ Coaters
Technical Features
Top view
A
30°
20°
40°
■ Active 5-axis magnetic bearing
system
E
■ Digital monitoring of the bearing
system
ØN
ØB
O
F
P
Forevacuum
connection
ØC
■ Low noise and vibration levels
R
Q
■ Operation in any orientation
M8
50
■ Advanced rotor design for high
throughput
°
G
L
H
T
K
J
30°
ØD
M
30°
S
MAG W 830 C
MAG W 1300 C
MAG W 1300 C
MAG W 830 C
MAG W 1300 C
MAG W 1300 C
MAG W 1300 C
MAG W 830 C
MAG W 1300 C
MAG W 1300 C
Forevacuum flange
DN 40 KF
DN 40 KF
DN 40 KF / DN 25 KF
DN 40 KF / DN 25 KF
DN 40 KF
DN 40 KF
Inlet flange
160 ISO-F
160 ISO-F
200 ISO-F
250 ISO-F
250 ISO-F
250 ISO-F
mm
in.
mm
in.
mm
in.
A
B
C
225
262
260
8.86 10.31 10.24
285
262
260
11.22 10.31 10.24
335
262
260
13.19 10.31 10.24
mm
in.
mm
in.
mm
mm
F
353
13.9
306
12.05
306
12.05
G
72
2.83
72
2.83
72
2.83
H
50
1.97
50
1.97
50
1.97
J
113
4.45
113
4.45
113
4.45
K
35
1.38
35
1.38
35
1.38
L
109.5
4.31
109.5
4.31
109.5
4.31
mm
in.
mm
in.
mm
in.
O
103
4.06
103
4.06
103
4.06
P
114.7
4.52
114.7
4.52
114.7
4.52
Q
98
3.86
98
3.86
98
3.86
R
8.3
0.33
8.3
0.33
8.3
0.33
S
85
3.35
85
3.35
85
3.35
T
31
1.22
31
1.22
31
1.22
M
163
6.42
163
6.42
163
6.42
30°
D
175
6.89
175
6.89
175
6.89
■ Purge gas system
E
16
0.63
16
0.63
16
0.63
N
243
9.57
243
9.57
243
9.57
■ Intelligent power control system
Advantages to the User
■ Maintenance-free
■ High throughput for all process
gases
■ High pumping speed at low
pressure
■ High foreline pressure tolerance:
up to 2 mbar (1.5 Torr)
■ Lowest weight and size in its class
■ Application specific design
Dimensional drawing for the TURBOVAC MAG W 830/1300 C
C09 76
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
Inlet flange
DN
Pumping speed according to PNEUROP
N2
I x s-1
He
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
with convection cooling
with water cooling
W 830
W 830 C
W 1300
W 1300 C
160 CF
160 ISO-F
200 CF
200 ISO-F
250 ISO-F
760
900
740
700
650
300
1100
1200
920
1100
1050
920
1220
1180
1020
36 000
24 000
36 000
36 000
36 000
1.5 x 108
> 5 x 107
1.5 x 108
> 108
> 108
< 1 x 10-10
< 10-8
< 1 x 10-10
< 10-8
< 10-8
(< 0.75 x 10-10)
(< 0.75 x 10-8)
(< 0.75 x 10-10)
(< 0.75 x 10-8)
(< 0.75 x 10-8)
0.2 (0.15)
2.0 (1.5)
–
2.0 (1.5)
0.2 (0.15)
2.0 (1.5)
–
2.0 (1.5)
–
2.0 (1.5)
TRIVAC
D 65 BCS
TRIVAC
D 65 BCS
TRIVAC
D 65 BCS
TRIVAC
D 65 BCS
TRIVAC
D 65 BCS
mbar (Torr)
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h
Run-up time
min
< 3.7
< 4.0
< 6.0
< 6.0
< 6.0
forevacuum flange
DN
40 KF
40 KF
40 KF
40 KF
40 KF
Purge / vent port
DN
10 KF / 16 KF
10 KF / 16 KF
10 KF / 16 KF
10 KF / 16 KF
10 KF / 16 KF
mm (in.)
1/4"
1/4"
1/4"
6 (0.24)
6 (0.24)
kg (lbs)
30 (66.2)
32 (70.6)
30 (66.2)
32 (70.6)
32 (70.6)
Cooling water connection
(OD tube)
Weight, approx.
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 1300 C (DN 250) as a function of the inlet pressure
77 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
T U R B O VA C M A G
Ordering Information
W 830
W 830 C
W 1300
160 CF
160 ISO-F
200 CF
200 ISO-F
250 ISO-F
TURBOVAC MAG turbomolecular pump
Part No.
400100V0041
Part No.
400100V0005
Part No.
400110V0051
Part No.
400110V0011
Part No.
400110V0021
Electronic frequency converter
MAG.DRIVE digital
MAG.DRIVE digital
with Profibus interface
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
400035V0013
400035V0013
400035V0013
400035V0013
400035V0013
Plug-in control
Part No.
121 36
Part No.
121 36
Part No.
121 36
Part No.
121 36
Part No.
121 36
Purge gas valve
Part No.
121 33
Part No.
121 33
Part No.
121 33
Part No.
121 33
Part No.
121 33
Part No.
400036V0001
Part No.
400036V0006
Part No.
400036V0004
Part No.
400036V0002
Part No.
400036V0003
Part No.
400036V0001
Part No.
400036V0006
Part No.
400036V0004
Part No.
400036V0002
Part No.
400036V0003
Part No.
400036V0001
Part No.
400036V0006
Part No.
400036V0004
Part No.
400036V0002
Part No.
400036V0003
Part No.
400036V0001
Part No.
400036V0006
Part No.
400036V0004
Part No.
400036V0002
Part No.
400036V0003
Part No.
400036V0001
Part No.
400036V0006
Part No.
400036V0004
Part No.
400036V0002
Part No.
400036V0003
Part No.
400038V0001
Part No.
400038V0006
Part No.
400038V0002
Part No.
400038V0001
Part No.
400038V0006
Part No.
400038V0002
Part No.
400038V0001
Part No.
400038V0006
Part No.
400038V0002
Part No.
400038V0001
Part No.
400038V0006
Part No.
400038V0002
Part No.
400038V0001
Part No.
400038V0006
Part No.
400038V0002
Inlet flange
DN
W 1300 C
Connecting cable converter – pump 1)
01.5 m (5.25 ft) DRIVE/BEARING
03.0 m (10.5 ft) DRIVE/BEARING
05.0 m (17.5 ft) DRIVE/BEARING
10.0 m (35.0 ft) DRIVE/BEARING
20.0 m (70.0 ft) DRIVE/BEARING
Connecting cable for purge gas valve
01.5 m (5.25 ft) pump/coverter
03.0 m (10.5 ft) pump/coverter
10.0 m (35.0 ft) pump/coverter
1)
further connecting cables can be found under MAG.DRIVE digital in the section “Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Frequency Converters”
C09 78
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Notes
79 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
TURBOVAC MAG W 1500 CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
Technical Features
■ Active 5-axis magnetic bearing
system
■ Bearing and temperature system
are controlled digitally
■ Corrosion resistant
■ Low noise and vibration levels
■ Operation in any orientation
■ Compound rotor design for high
pumping speed and foreline
pressure
2 6°
ød
a2
h5
70
ød1
ød2
°
a1
°
60
h1
h4
h3
b1
ød6
■ Intelligent power control system
h2
ød5
b2
3 0°
h
Heatband
ød3
Advantages to the User
DN 40 KF
a5
h6
a4
60
°
a3
h7
a
ød4
105°
Top view
200 ISO-F
250 ISO-F
200 ISO-F
250 ISO-F
a
164.5
6.48
164.5
6.48
a1
159
6.26
159
6.26
a2
116.5
4.59
116.5
4.59
d2
d3
mm 213
in. 8.39
mm 261
in. 10.28
d4
262
10.31
262
10.31
d5
d6
h
h1
h2
175 285 243 307 296 279
6.89 11.22 9.57 12.09 11.65 10.98
175 285 243 307 296 279
6.89 11.22 9.57 12.09 11.65 10.98
mm
in.
mm
in.
a3
a4
M8 x 15 32
M8 x 0.6 1.26
M8 x 15 32
M8 x 0.6 1.26
a5
9
0.35
9
0.35
■ Integrated purge gas system
■ CT versions: Integrated
temperature management system
b
b
182
7.17
182
7.17
b1
3
0.12
3
0.12
b2
d
d1
150 285 260
5.91 11.22 10.24
150 335 310
5.91 11.22 12.20
h3
h4
h5
h6
h7
231 200 16
84 118
9.09 7.87 0.63 3.31 4.65
231 200 16
84 118
9.09 7.87 0.63 3.31 4.65
Dimensional drawing for the TURBOVAC MAG W 1500 CT
■ Maintenance-free
■ High throughput for all process
gases
■ High pumping speed at low
pressure
■ High foreline pressure tolerance:
up to 2.6 mbar (1.95 Torr)
■ High resistance against corrosive
gases
■ Robust against particles and
deposits
■ Temperature control up to 90 °C
(194 °F) to avoid condensation
■ Lowest weight and size in its class
■ Application specific design
C09 80
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G W 1 5 0 0 C T
Technical Data
Inlet flange
DN
Pumping speed according to PNEUROP
N2
I x s-1
He
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
250 ISO-F
200 CF
1100
1150
920
1220
1220
1020
1100
1150
920
36 000
36 000
36 000
> 108
> 108
> 108
< 10-8
< 10-8
< 10-10
(< 0.7 x 10-8)
(< 0.7 x 10-8)
(< 0.7 x 10-8)
2.6 (1.95)
2.6 (1.95)
2.6 (1.95)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
200 ISO-F
offering a pumping speed of 100 m3/h
Run-up time to 95% speed
min
<6
<6
<6
forevacuum flange
DN
40 KF
40 KF
40 KF
1/4"
1/4"
1/4"
Cooling water connection, hose nipple
(OD tube)
mm (in.)
6.4 (0.25)
6.4 (0.25)
6.4 (0.25)
Weight, approx.
32 (70.6)
32 (70.6)
32 (70.6)
Purge / vent port
VCR nut
kg (lbs)
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
10
-4
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 1500 CT (DN 250) as a function of the inlet pressure
81 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G W 1 5 0 0 C T
Ordering Information
Inlet flange
with Compound Stage
200 ISO-F
250 ISO-F
TURBOVAC MAG turbomolecular pump
Part No.
400026V0002
Part No.
400027V0002
Part No.
400030V0002
Electronic frequency converter
MAG.DRIVE digital
MAG.DRIVE digital
with Profibus interface
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
400035V0013
400035V0013
400035V0013
Part No.
121 36
Part No.
121 36
Part No.
121 36
Part No.
400036V0001
Part No.
400037V0001
Part No.
400036V0004
Part No.
400037V0004
Part No.
400036V0002
Part No.
400037V0002
Part No.
400036V0003
Part No.
400037V0003
Part No.
400036V0001
Part No.
400037V0001
Part No.
400036V0004
Part No.
400037V0004
Part No.
400036V0002
Part No.
400037V0002
Part No.
400036V0003
Part No.
400037V0003
Part No.
400036V0001
Part No.
400037V0001
Part No.
400036V0004
Part No.
400037V0004
Part No.
400036V0002
Part No.
400037V0002
Part No.
400036V0003
Part No.
400037V0003
Part No.
200 07 901
Part No.
200 07 901
Part No.
200 07 901
Plug-in control
Connecting cable converter – pump 1)
1.5 m (5.25 ft) DRIVE/BEARING
1.5 m (5.25 ft) TMS
05 m (17.5 ft) DRIVE/BEARING
05 m (17.5 ft) TMS
10 m (35.0 ft) DRIVE/BEARING
10 m (35.0 ft) TMS
20 m (70.0 ft) DRIVE/BEARING
20 m (70.0 ft) TMS
Seal kit
DN 250 metal
1)
DN
200 CF
further connecting cables can be found under MAG.DRIVE digital in the section “Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Frequency Converters”
C09 82
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Notes
83 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
TURBOVAC MAG W 2000 C/CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
Technical Features
■ Active 5-axis magnetic bearing
system
■ Patented KEPLA-COAT® for rotor
and stator to prevent corrosion
■ Low noise and vibration levels
■ Installation in any orientation
■ Compound rotor design for high
pumping speed and foreline
pressure
Only CT
Top view
h5
ød
■ Integrated purge gas system
ød1
Only CT
h
h1
■ CT versions: Integrated
temperature management system
ød4
h2
30°
h3
ød5
DN 40
■ Maintenance-free
■ High throughput for all etch gases
h4
ød3
■ High pumping speed at low
pressure
Only CT
Only CT
mm
in.
d
d1
d2
335
310
335
13.19 12.20 13.19
d3
199
7.83
d4
284
11.18
d5
11
0.43
h
h1
h2
h3
303
272
318
386
11.93 10.71 12.52 15.20
h4
40
1.57
h5
16
0.63
Dimensional drawing for the TURBOVAC MAG W 2000 C/CT
Ixs
■ High foreline pressure tolerance:
up to 5.3 mbar (4 Torr)
■ High resistance against corrosive
gases
■ Robust against particles and
deposits
10000
Pumping Speed
Advantages to the User
■ Temperature management system
to avoid condensation
-1
1000
■ Application specific design
100
N2
He
H2
10
8
6
4
2
1
10
-4
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 2000 CT (DN 250) as a function of the inlet pressure
C09 84
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
Inlet flange
DN
W 2000 C
W 2000 CT
250 ISO-F
250 ISO-F
1650
1800
1720
1650
1800
1720
28 800
28 800
> 108
> 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
3.5 (2.63)
3.5 (2.63)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Pumping speed according to PNEUROP
N2
I x s-1
He
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m3/h
Run-up time
min
<8
<8
forevacuum flange
DN
40 KF
40 KF
Purge / vent port
VCR nut
1/4"
1/4"
Cooling water connection
(OD tube)
mm (in.)
6,4 (0.25)
6.4 (0.25)
kg (lbs)
62 (137)
62 (137)
Weight, approx.
Ordering Information
TURBOVAC MAG turbomolecular pump
T U R B O VA C M A G
W 2000 C
W 2000 CT
Part No. 894 17
Part No. 894 31
Part No. 400034V0011
Part No. 400034V0011
Part No. 121 36
Part No. 121 36
Electronic frequency converter
MAG.DRIVE 2000
Plug-in control
Connecting cable converter – pump
01.5 m (5.25 ft) BEARING
01.5 m (5.25 ft) DRIVE/TMS
05.0 m (17.5 ft) BEARING
05.0 m (17.5 ft) DRIVE/TMS
10.0 m (35.0 ft) BEARING
10.0 m (35.0 ft) DRIVE/TMS
20.0 m (70.0 ft) BEARING
20.0 m (70.0 ft) DRIVE/TMS
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
121
121
121
121
121
121
121
121
29
30
19
20
21
22
21
26
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
121
121
121
121
121
121
121
121
29
30
19
20
21
22
21
26
85 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
TURBOVAC MAG W 2200 C
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
■ Coaters
Versions with CF high vacuum
connection
■ Particle accelerators
■ Research instruments and systems
Technical Features
ØA
■ Active 5-axis magnetic bearing
system
36.5
°
M
■ Bearing system are controlled
digitally
D
J
■ Low noise and vibration levels
K
45°
DN 40 KF
36°
L
ØB
E
H
■ Purge gas system
F
Upper View
ØC
250 ISO-F
mm
in.
mm
in.
A
285
11.22
335
13.19
B
317
12.48
317
12.48
■ Compound rotor design for high
pumping speed and foreline
pressure
8°
G
200 ISO-F
■ Operation in any orientation
■ Intelligent power control system
C
D
E
F
G
H
J
K
L
M
199 396 85.5 164.6 23
78 117 120 155 39
7.83 15.59 3.37 6.48 0.91 3.07 4.61 4.72 6.10 1.54
199 371 85.5 164.6 23
78 117 120 155 39
7.83 14.61 3.37 6.48 0.91 3.07 4.61 4.72 6.10 1.54
Dimensional drawing for the TURBOVAC MAG W 2200 C
Advantages to the User
■ Maintenance-free
■ High throughput for all process
gases
■ High pumping speed at low
pressure
■ High foreline pressure tolerance:
up to 2 mbar (1.5 Torr)
C09 86
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
W 2200 C
Inlet flange
200 ISO-F
250 ISO-F
250 CF
1600
1450
1650
2000
1900
1800
2000
1900
1800
29 400
29 400
29 400
> 1 x 105
> 1 x 105
3.5 x 105
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
< 1 x 10-10 (< 0.75 x 10-10)
–
2 (1.5)
–
2 (1.5)
0.1 (0.075)
1 (0.75)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
DN
Pumping speed according to PNEUROP
N2
I x s-1
Ar
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
with convection cooling
with water cooling
W 2200
mbar (Torr)
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m3/h
Run-up time to 95% speed
min
< 10
< 10
< 10
forevacuum flange
DN
40 KF
40 KF
40 KF
Purge / vent port
VCR nut
1/4"
1/4"
1/4"
Cooling water connection
(OD tube)
mm (in.)
1/2"
1/2"
1/2"
kg (lbs)
48 (106)
48 (106)
60 (132.45)
Weight, approx.
10000
I·s
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 2200 C (DN 250) as a function of the inlet pressure
87 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
T U R B O VA C M A G
Ordering Information
W 2200 C
W 2200
TURBOVAC MAG turbomolecular pump
Part No. 400081V0011
Part No. 400081V0021
Part No. 400081V0061
Electronic frequency converter
MAG.DRIVE digital
MAG.DRIVE digital
Part No. 400035V0011
Part No. 400035V0011
Part No. 400035V0011
Part No. 400035V0013
Part No. 400035V0013
Part No. 121 36
Part No. 121 36
with Profibus interface
Part No. 400035V0013
Part No. 121 36
Plug-in control
Connecting cable converter – pump 1)
01.5
03.0
05.0
10.0
20.0
1)
m
m
m
m
m
(5.25
(10.5
(17.5
(35.0
(70.0
ft)
ft)
ft)
ft)
ft)
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
400036V0001
400036V0008
400036V0004
400036V0002
400036V0003
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
400036V0001
400036V0008
400036V0004
400036V0002
400036V0003
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
400036V0001
400036V0008
400036V0004
400036V0002
400036V0003
further connecting cables can be found under MAG.DRIVE digital in the section “Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Frequency Converters”
C09 88
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Notes
89 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
TURBOVAC MAG W 2800/3200 C/CT
Typical Applications
■ All major semiconductor
processes such as Etch, CVD,
PVD and Ion Implantation
Versions with CF high vacuum
connection
■ Particle accelerators
■ Research instruments and systems
Technical Features
■ Active 5-axis magnetic bearing
system
TURBOVAC MAG W 2800 CT (left) and TURBOVAC MAG W 3200 CT (right)
■ Bearing and temperature system
are controlled digitally
Top view
■ Corrosion resistant
lA
lB
lC
■ Low noise and vibration levels
O
.5°
50
50,5 °
lM
F
lN
42°
M 8, 14 depth
lD
J
■ Compound rotor design for high
pumping speed and foreline
pressure
30 °
30°
H
E
42 °
°
02
1102
G
DN 40 KF
°
K
250 ISO-F
250 CF
320 ISO-F
250 ISO-F
250 CF
320 ISO-F
■ Integrated purge gas system
■ CT versions: Integrated
temperature management system
7°
13 °
137
L
■ Installation in any orientation
■ Intelligent power control system
Advantages to the User
mm
in.
mm
in.
mm
in.
A
335
13.19
305
12.01
425
16.73
B
310
12.2
284
11.18
395
15.55
C
261
10.28
268
10.55
318
12.52
D
369
14.53
369
14.53
369
14.53
E
408
16.06
422
16.61
363
14.29
mm
in.
mm
in.
mm
in.
K
199
7.83
199
7.83
199
7.83
L
196.5
7.74
196.5
7.74
196.5
7.74
M
353
13.9
353
13.9
353
13.9
N
415
16.34
415
16.34
415
16.34
O
32
1.26
32
1.26
32
1.26
F
176
6.93
176
6.93
176
6.93
G
89
3.50
89
3.50
89
3.50
H
361
14.21
361
14.21
361
14.21
J
293
11.54
248
9.76
248
9.76
■ Maintenance-free
■ High throughput for all process
gases
■ High pumping speed at low
pressure
■ High foreline pressure tolerance:
up to 2 mbar (1.5 Torr)
■ High resistance against corrosive
gases
■ Robust against particles and
deposits
■ Temperature control up to 90 °C
(194 °F) to avoid condensation
Dimensional drawing for the TURBOVAC MAG W 2800/3200 C/CT
■ Lowest weight and size in its class
■ Application specific design
C09 90
Leybold Vacuum Gesamtkatalog 2004
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
T U R B O VA C M A G
Technical Data
Inlet flange
W 2800 C
W 2800 CT
W 2800
W 3200 CT
250 ISO-F
250 ISO-F
250 CF
320 ISO-F
2650
2450
2100
2650
2450
2100
2650
2450
2100
3200
3000
2250
28 800
28 800
28 800
28 800
> 6 x 106
> 6 x 106
1 x 109
> 6 x 106
< 10-8
(< 0.75 x 10-8)
< 10-8
(< 0.75 x 10-8)
< 1 x 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
–
2 (1.5)
–
2 (1.5)
0.3 (0.23)
3 (2.25)
–
2 (1.5)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
DN
Pumping speed according to PNEUROP
N2
I x s-1
Ar
I x s-1
H2
I x s-1
min-1
Speed
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr)
Max. foreline pressure for N2
with convection cooling
with water cooling
mbar (Torr)
mbar (Torr)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m3/h
Run-up time
min
< 10
< 10
< 10
< 10
Forevacuum flange
DN
40 KF
40 KF
40 KF
40 KF
VCR nut
1/4"
1/4"
1/4"
1/4"
Swagelok tube
1/4"
1/4"
1/4"
1/4"
64 (141.3)
64 (141.3)
75 (165.6)
65 (143.5)
Purge / vent port
Cooling water connection
Weight, approx.
kg (lbs)
10000
I·s
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
10
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 3200 C (DN 250) as a function of the inlet pressure
91 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
with Compound Stage
T U R B O VA C M A G
Ordering Information
W 2800 C
W 2800 CT
W 2800
W 3200 CT
250 ISO-F
250 ISO-F
250 CF
320 ISO-F
TURBOVAC MAG turbomolecular pump
Part No.
400000V0001
Part No.
400000V0002
Part No.
400006V0071
Part No.
400003V0002
Electronic frequency converter
MAG.DRIVE digital
MAG.DRIVE digital
with Profibus interface
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
Part No.
400035V0011
400035V0013
400035V0013
400035V0013
400035V0013
Part No.
121 36
Part No.
121 36
Part No.
121 36
Part No.
121 36
Part No.
400036V0001
–
Part No.
400036V0001
Part No.
400037V0001
Part No.
400036V0008
Part No.
400037V0008
Part No.
400036V0004
Part No.
400037V0004
Part No.
400036V0002
Part No.
400037V0002
Part No.
400036V0003
Part No.
400037V0003
Part No.
400036V0001
–
Part No.
400036V0001
Part No.
400037V0001
Part No.
400036V0008
Part No.
400037V0008
Part No.
400036V0004
Part No.
400037V0004
Part No.
400036V0002
Part No.
400037V0002
Part No.
400036V0003
Part No.
400037V0003
Inlet flange
Plug-in control
Connecting cable converter – pump 1)
01.5 m (5.25 ft) DRIVE/BEARING
01.5 m (5.25 ft) TMS
03.0 m (10.5 ft) DRIVE/BEARING
03.0 m (10.5 ft) TMS
05.0 m (17.5 ft) DRIVE/BEARING
05.0 m (17.5 ft) TMS
10.0 m (35.0 ft) DRIVE/BEARING
DN
Part No.
400036V0008
–
Part No.
400036V0004
–
Part No.
400036V0002
10.0 m (35.0 ft) TMS
20.0 m (70.0 ft) DRIVE/BEARING
20.0 m (70.0 ft) TMS
Seal kit
DN 250 metal
1)
–
Part No.
400036V0003
–
Part No.
200 07 901
Part No.
200 07 901
Part No.
400036V0008
–
Part No.
400036V0004
–
Part No.
400036V0002
–
Part No.
400036V0003
–
Part No.
200 07 901
Part No.
200 07 901
further connecting cables can be found under MAG.DRIVE digital in the section “Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Frequency Converters”
C09 92
Leybold Vacuum Full Line Catalog 2005
Back to Contents
with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Notes
93 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
Electronic Frequency Converters
TURBOTRONIK NT 340 M
Technical Features
Advantages to the User
■ For operating the TURBOVAC
340 M turbomolecular pump
■ Convenient control and monitoring
facilities
■ Compact control unit 1/2 19", 3 HU
■ Remote control and process
control via analog and
programmable control inputs and
outputs
■ No batteries are required because
of integrated generator mode in
case of power failures
■ Connection for backing pump,
venting valve and flange heater
■ Front panel with membrane
keypad and LCD
■ RS 232 C interface
b
b1
mm
in.
b
213
8.39
b1
211
8.31
h
129
5.08
h1
4.5
0.18
mm
in.
l
316
12.44
l1
4.5
0.18
l2
130
5.12
l3
326
12.83
h
h2
111
4.37
h1
l3
h2
l2
l
l1
Dimensional drawing for the TURBOTRONIK NT 340 M
C09 94
Leybold Vacuum Full Line Catalog 2005
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Electronic Frequency Converters
Turbomolecular Pumps with Magnetic Rotor Suspension
Technical Data
NT 340 M
Mains connection, 50 - 60 Hz; selectable V
100/120/220/240, +10%/-15 %
Max. output voltage
V
860/733
Overload current limit
A
7
Permissible ambient temperature
Dimensions (W x H x D)
°C (°F)
0 to +45 (+32 to +113)
mm (in.)
213 x 129 x 340 (8.39 x 5.08 x 13.39)
kg (lbs)
7 (15.4)
Weight, approx.
Ordering Information
NT 340 M
100 V (mains cord with US plug)
Part No. 857 31
120 V (mains cord with US plug)
Part No. 857 30
230 V (mains cord with EURO plug)
Part No. 857 29
Connecting line leading to the
connection of the TURBOVAC 340 M
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
No.
No.
No.
No.
857
857
857
857
70
71
72
73
95 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
Electronic Frequency Converters
TURBOTRONIK NT 340 MA
Technical Features
Advantages to the User
■ For operating the TURBOVAC
MAG 400 C/CT turbomolecular
pump
■ Convenient control and monitoring
facilities
■ Compact control unit 1/2 19", 3 HU
■ No batteries are required because
of integrated generator mode in
case of power failures
■ Front panel with membrane
keypad and LCD
■ Remote control and process
control via analog and
programmable control inputs and
outputs
■ Connection for backing pump,
venting valve and flange heater
■ RS 232 C interface
■ Temperature control for Aluminum
etching processes
b
b1
h1
mm
in.
b
219
8.62
b1
211
8.31
b2
109.5
4.31
b3
198
7.80
b4
202
7.95
mm
in.
h
h1
132.5 122.5
5.22 4.82
h2
55
0.20
h3
99
3.90
h4
111
4.37
mm
in.
l
316
12.44
l1
4.5
0.18
l2
130
5.12
l3
326
12.83
l4
3
0.12
mm
in.
l5
12
0.47
l6
55
0.17
l7
38
1.50
l8
105
4.13
h
h3
d
d1
b2
b3
b4
h2
l4
l3
h4
l2
b
b1
h1
h
h3
d
b2
b3
b4
h2
l4
l3
h4
l7
l
l8
l1
d1
l5
l6
l
l1
l2
Dimensional drawing for the
TURBOTRONIK NT 340 MA
Dimensional drawing for the
TURBOTRONIK NT 340 MA
with TCU temperature control unit attached
C09 96
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters
Turbomolecular Pumps with Magnetic Rotor Suspension
Technical Data
TURBOTRONIK NT 340 MA
Mains connection, 50 - 60 Hz
V
Power consumption TURBOVAC
VA
VA
< 400
< 1000
V/A
50 / 7
V/A
± 16 / ± 7
including connected consumers
Max. output voltage
Motor / current limiting
Magnetic suspension /
Current limiting
Nominal frequency
Overload current limit
Permissible ambient temperature
Dimensions (W x H x D)
Weight, approx.
120, +10%/-15 %
Hz
860/733
A
7
°C (°F)
0 to +45 (+32 to +113)
mm (in.)
213 x 129 x 340 (8.39 x 5.08 x 13.39)
kg (lbs)
7 (15.4)
Ordering Information
TURBOTRONIK NT 340 MA
120 V (mains cord with US plug)
Part No. 857 32
Connecting line leading
to the connection of the
TURBOVAC MAG 400 C/CT
3 m (10.5 ft)
Part No. 857 70
Connecting lines to the
Heater (HEATER)
3 m (10.5 ft)
Valve (VALVE
3 m (10.5 ft)
Temperature control unit (I/O)
3 m (10.5 ft)
Pt 100
3 m (10.5 ft)
Accessories for the temperature control
Temperature control unit (TCU)
Temperature sensor Pt 100
Part No. 859 31
Part No. 859 33
Part No. 859 34
Part No. 859 39
Part No. 859 20
Part No. 859 22
97 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
Electronic Frequency Converters
MAG.DRIVE 2000
MAG.DRIVE 2000 with plug-in control
MAG.DRIVE 2000 without plug-in control
Advantages to the User
■ Designed to operate the
TURBOVAC MAG 2000 C/CT and
TURBOVAC MAG W 2000 C/CT
turbomolecular pumps
■ Easy operation through the
controls or the use of plug-in
control unit
■ Warning in case the pump is
running out of specification
■ Storing of all parameters in the
pump’s memory
■ Plug-in control
■ Small size and low weight
■ Communication to host computer
of the customer via serial interface
and conventional interface
possible, bus adapter optional
■ Integrated fan
■ Integrated temperature
management system
■ Setting of speed, temperature of
the basic flange and other
functions
mm
in.
b
213
8.39
b1
198
7.80
d
3.3
0.13
40°
h
113
4.45
h1
135
5.31
l1
b
h1
h2
h2
128
5.04
l
h3
l
122.4 455
4.82 17.91
l1
27
1.06
l2
l2
100
3.94
ød
l3
70
2.76
b1
h3
h
l3
Dimensional drawing for the MAG.DRIVE 2000
C09 98
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters
Turbomolecular Pumps with Magnetic Rotor Suspension
Technical Data
MAG.DRIVE 2000
Mains connection, 50/60 Hz
V
200 - 240, +10%/-15%
A
20
V
60
Current for connected consumers, max.
Max. output voltage
Nominal frequency
Permissible ambient temperature
Dimensions (W x H x D)
50/60
Hz
°C (°F)
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
Weight, approx.
Ordering Information
MAG.DRIVE 2000
Plug-in control
Connection line leading to the
bearing of the
TURBOVAC MAG (W) 2000 C/CT
01.5 m (5.25 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
motor/TMS of the
TURBOVAC MAG (W) 2000 C/CT
01.5 m (5.25 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
Connector for hardware interface
19" installation frame
MAG.DRIVE 2000
Part No. 400034V0011
Part No. 121 36
Part
Part
Part
Part
No.
No.
No.
No.
121
121
121
121
29
19
21
25
Part
Part
Part
Part
No.
No.
No.
No.
121
121
121
121
30
20
22
26
upon request
Part No. 161 00
99 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
Electronic Frequency Converters
MAG.DRIVE digital
MAG.DRIVE digital without plug-in control
MAG.DRIVE digital with plug-in control
Advantages to the User
■ Operation of turbomolecular
pumps with magnetically levitated
rotors:
TURBOVAC MAG W 830/1300 C,
TURBOVAC MAG W 1500 C/CT,
TURBOVAC MAG W 2200 C and
TURBOVAC MAG W 2800/3200
C/CT
■ Communication to host computer
of the customer via serial interface
and conventional interface
possible
■ Setting of speed, temperature of
the basic flange and other
functions
■ Warning in case the pump is
running out of specification
■ Easy operation through the
controls or the use of plug-in
control unit
mm
in.
b
213
8.39
b1
198
7.80
d
3.3
0.13
h
113
4.45
40°
h1
135
5.31
h2
128
5.04
l1
b
h1
h2
h3
l
122.4 455
4.82 17.91
l1
27
1.06
l2
l
l2
100
3.94
ød
■ Storing of all parameters in the
pump’s memory
■ Plug-in control
■ Small size and low weight
■ Integrated fan
■ Integrated temperature
management system magnetic
bearing control system
l3
70
2.76
b1
h3
h
l3
Dimensional drawing for the MAG.DRIVE digital
0°
0°
90°
270°
90°
270°
225°
180°
Connection
DRIVE/BEARING
Connection
TMS
180°
Overview connection lines
C09 100
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Electronic Frequency Converters
Turbomolecular Pumps with Magnetic Rotor Suspension
MAG.DRIVE digital
Technical Data
Mains connection, 50/60 Hz
V
200 - 240, +10%/-15%
Current for connected consumers, max.
A
20
Max. motor voltage
V
60
Nominal frequency
Hz
Permissible ambient temperature
°C (°F)
Dimensions (W x H x D)
Weight, approx.
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
MAG.DRIVE digital
Ordering Information
MAG.DRIVE digital
Part No. 400035V0011
MAG.DRIVE digital with Profibus interface
Part No. 400035V0013
Part No. 121 36
Plug-in control
Connection line leading to the
DRIVE/BEARING of the TURBOVAC MAG ... C/CT
Cable outlet
Cable outlet pump
frequency converter
DRIVE/BEARING
DRIVE/BEARING
PK
01.5 m (5.25 ft)
bended 225°
straight
straight
01.5 m (5.25 ft)
straight
straight
straight
03.0 m (10.5 ft)
straight
bended 180°
straight
03.0 m (10.5 ft)
bended 225°
straight
straight
03.0 m (10.5 ft)
straight
bended 270°
straight
05.0 m (17.5 ft)
bended 225°
straight
straight
05.0 m (17.5 ft)
straight
straight
straight
08.0 m (28.0 ft)
bended 225°
straight
straight
10.0 m (35.0 ft)
bended 225°
straight
straigh
20.0 m (70.0 ft)
bended 225°
straight
straight
23.0 m (80.5 ft)
bended 225°
straight
straight
30.0 m (105 ft)
bended 225°
straight
straight
Part
Part
Part
Part
Part
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
No.
No.
No.
No.
No.
400036V0001
400036V0007
400036V0006
400036V0008
400036V0009
400036V0004
400036V0010
400036V0005
400036V0002
400036V0003
400036V0012
400036V0011
Part
Part
Part
Part
Part
Part
Part
No.
No.
No.
No.
No.
No.
No.
400037V0001
400037V0007
400037V0008
400037V0004
400037V0005
400037V0002
400037V0003
TMS
(only for CT versions)
01.5
01.5
03.0
05.0
08.0
10.0
20.0
m
m
m
m
m
m
m
(5.25
(5.25
(10.5
(17.5
(28.0
(35.0
(70.0
ft)
ft)
ft)
ft)
ft)
ft)
ft)
Cable outlet
frequency converter
TMS
bended 225°
straight
bended 225°
bended 225°
bended 225°
bended 225°
bended 225°
Cable outlet pump
TMS
straight
straight
straight
straight
straight
straight
straight
Heater
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°
Purge / Vent (only for optional purge vent valve Part No. 121 33)
Cable outlet
Cable outlet pump
frequency converter
TMS
Purge
Vent
03.0 m (10.5 ft)
bended 225°
bended
bended
10.0 m (35.0 ft)
bended 225°
bended
bended
Connector for hardware interface
Part No. 400038V0006
Part No. 400038V0002
upon request
19" installation frame
Part No. 161 00
101 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Turbomolecular Pumps with Magnetic Rotor Suspension
Vibration Absorber
Vibration absorbers are used to
inhibit the propagation of vibrations
from the turbomolecular pump to
highly sensitive instruments like
electron beam microscopes, microbalances or analytical instruments.
Ordering Information
DN 063 ISO-K
66 mm (2.60 in.) long
Part No. 800131V0063
DN 063 CF
81 mm (3.19 in.) long
Part No. 500 070
DN 100 ISO-K
84 mm (3.31 in.) long
Part No. 800131V0100
100 mm (4.09 in.) long
Part No. 500 071
84 mm (3.31 in.) long
Part No. 500 073
104 mm (4.09 in.) long
Part No. 500 072
DN 160 ISO-K
DN 160 CF
Also an air cooling unit is available as
a retrofit kit for convection cooling of
the TURBOVAC 50 pump with air.
This kit can be easily fitted to the
pump in each case using the
mounting components contained in
the kit.
Vi b r a t i o n A b s o r b e r
Vibration absorber
DN 100 CF
Air Cooling Unit
Accessories
Technical Data
Air Cooling Unit
Rated power consumption of
the air cooling unit when connected to
TURBOVAC 50, 151/361
W
10.5
TURBOVAC 600 C
W
21.0
Ordering Information
Air Cooling Unit
230 V
110 V
TURBOVAC 50
Part No. 854 05
Part No. 854 06
TURBOVAC 151/361
Part No. 855 31
Part No. 894 08
TURBOVAC 600 C
Part No. 855 41 Part No. 170 016
Air cooling unit for
C09 102
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Accessories
Flange Heaters for CF
Highvacuum Flanges
Most TURBOVAC pumps can be
baked out in order to improve the
ultimate pressure attained in the UHV
range. Degassing of the turbomolecular pump will only be useful
when simultaneously baking out the
vacuum chamber.
Fine Filter
A fine filter integrated in the centering
ring protects the pump against
particles and dust on the highvacuum side.
Turbomolecular Pumps with Magnetic Rotor Suspension
Technical Data
Flange Heater
Rated power consumption of
the flange heater
DN 063 CF, DN 100 CF
W
100
DN 160 CF
W
150
Ordering Information
Flange Heater
230 V
110 V
DN 063 CF
Part No. 854 04
Part No. 854 07
DN 100 CF
Part No. 854 27
Part No. 854 28
DN 160 CF
Part No. 854 37
Part No. 854 38
Flange heater
Ordering Information
Fine Filter
Connection flange of the fine filter
DN 040 KF
Part No. 883 98
DN 063 ISO-K
Part No. 887 20
DN 100 ISO-K
Part No. 887 21
DN 160 ISO-K
Part No. 887 22
The following accessories are also
available:
Vacuum gauge COMBIVAC 2T
Part No. 230 000
(see Product Section C16)
Delayed venting unit
Part No. 500 441
(see Product Section C10)
103 C09
Leybold Vacuum Full Line Catalog 2005
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Turbomolecular Pumps
Solenoid Venting Valve
Accessories
Venting Valve
Technical Data
Drive voltage
V DC
24
W
4
DN
16 KF
Power consumption
Connecting flange
Weight, approx.
0.3 (0.66)
kg (lbs)
Ordering Information
Venting Valve
Solenoid venting valve,
normally closed
Part No. 800120V0011
Further vent valves available in US. Please contact your US sales office
Power Failure Venting
Valve
Technical Data
Power Failure Venting Valve
Drive voltage
V DC
24
W
4
DN
16 KF
Power consumption
Connecting flange
Weight, approx.
0.3 (0.66)
kg (lbs)
Ordering Information
Power Failure Venting Valve
Power failure venting valve,
normally open
Part No. 800120V0021
Further vent valves available in US. Please contact your US sales office
Purge Gas and Venting
Valve
Technical Data
Purge gas and venting valve
Connecting flange
Weight, approx.
DN
kg (lbs)
Ordering Information
10 KF
0.7 (1.55)
Purge gas and venting valve
Purge gas and venting valve, 230 V
0.2 mbar x l x s-1 (12 sccm)
0.4 mbar x l x s-1 (24 sccm)
Part No. 855 19
Part No. 855 29
Purge gas and venting valve, 110 V
Part No. 190 351 069
0.2 mbar x l x s-1 (12 sccm)
Purge Gas and Venting
Valve
Technical Data
Purge gas and venting valve
Connecting flange
Inlet
Outlet
1/4" pipe
pump specific or DN 16 KF
Purge gas pressure, abs.
Weight, approx.
bar
kg (lbs)
Ordering Information
1.5 to 6.0
0.5 (1.1)
Purge gas and venting valve
Purge gas and venting valve, 24 V DC
0.6 mbar x l x s-1 (36 sccm)
Part No. 121 33
Further 0.6 mbar x l x s-1 valves upon request
C09 104
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Accessories
Turbomolecular Pumps
Accessories for Serial Interfaces
RS 232 C and RS 485 C
Through these accessories many
control, monitoring and information
capabilities can be implemented in
connection with the electronic
frequency converters and turbomolecular pumps.
The following turbomolecular pumps
or electronic frequency converters
are supported:
TW 70 H / TURBO.DRIVE S
TW 250 S / TURBO.DRIVE S /
TURBO.DRIVE 300
TW 300, TW 300 H /
TURBO.DRIVE S / TURBO.DRIVE 300
TW 701
T 1600, TW 1600
Software
Ordering Information
Software
„Turbo.Drive Panel“, 3.5 in. floppy 1)
1)
Display Unit
Part No. 800110V0104
1)
The panel software can be downloaded from “www.leybold.com“
PC Software
PC software for Windows 95 or higher
Technical Features
■ Convenient graphical user interface
■ Several turbomolecular pumps
can be operated in parallel
■ Display, modify, save and compare
the parameter lists of the turbomolecular pumps
■ Integration of customer’s software
■ Recording parameter data over
time (for example, temperatures,
rotor frequency)
Ordering Information
PC software
„Turbo.Drive Server“, CD ROM 1)
1)
PC Software
Part No. 800110V0102
1)
The PC software can be downloaded from “www.leybold.com“
Adaptor RS 232 C/RS 485 C for Frequency Converter with RS 485 C Interface
Ordering Information
Adaptor RS 232 C/RS 485 C,
mains connection 220 V, 50 Hz, EURO plug
Adaptor RS 232 C/RS 485 C
Part No. 800110V0101
105 C09
Leybold Vacuum Full Line Catalog 2005
Back to Contents
Sales and Service Net Worldwide
Germany
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-221-347 1234
Fax:
+49-221-347 1245
[email protected]
Leybold Vacuum GmbH
Sales Area North/East
Branch office Berlin
Buschkrugallee 33
1. Obergeschoss
D-12359 Berlin
Phone: +49-30-435 609 0
Fax:
+49-30-435 609 10
[email protected]
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch office Munic
Karl-Hammerschmidt-Strasse 38
D-85609 Aschheim/Dornach
Phone: +49-89-357 33 90
Fax:
+49-89-357 33 933
[email protected]
[email protected]
Leybold Vacuum GmbH
Sales Area West
Branch office Cologne
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1270
Fax:
+49-221-347 1291
[email protected]
Leybold Vacuum GmbH
Service Center
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1439
Fax:
+49-221-347 1945
[email protected]
Leybold Vacuum GmbH
Mobile after sales service
Emil-Hoffmann-Straße 43
D-50996 Cologne-Suerth
Phone: +49-221-347 1765
Fax:
+49-221-347 1944
[email protected]
Leybold Vacuum
Dresden GmbH
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-351-88 55 00
Fax:
+49-351-88 55 041
[email protected]
www.leybold-dresden.de
Europe
Belgium
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax:
+32-2-720 83 38
[email protected]
Service:
Phone: +32-2-711 00 82
Fax:
+32-2-720 83 38
[email protected]
France
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. de Courtaboeuf, B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax:
+33-1-69 07 57 38
[email protected]
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès - B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone: +33-4-75 82 33 00
Fax:
+33-4-75 82 92 69
[email protected]
Great Britain
Leybold Vacuum UK Ltd.
Waterside Way, Plough Lane
GB-London SW17 0HB
Sales:
Phone: +44-20-8971 7000
Fax:
+44-20-8971 7001
[email protected]
Service:
Phone: +44-20-8971 7030
Fax:
+44-20-8971 7003
[email protected]
Italy
Leybold Vacuum Italia S.p.A.
8, Via Trasimeno
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax:
+39-02-27 20 96 41
[email protected]
Service:
Phone: +39-02-27 22 31
Fax:
+39-02-27 20 96 41
[email protected]
Field Service Base
Z.I.Le Capanne
I-05021 Acquasparta (TR)
Phone: +39-0744-93 03 93
Fax:
+39-0744-94 42 87
[email protected]
Hotline
Sales: +49-221-347 1234
Service: +49-221-347 1765
Asia
Netherlands
P.R. China
Japan
Leybold Vacuum Nederland B.V.
Computerweg 7
NL-3542 DP Utrecht
Sales and Service:
Phone: +31-346-58 39 99
Fax:
+31-346-58 39 90
[email protected]
[email protected]
Spain
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400, China
Sales and Service:
Phone: +86-22-2697 0808
Fax:
+86-22-2697 4061
Fax:
+86-22-2697 2017
[email protected]
Leybold Vacuum
Japan Co., Ltd.
Head Office
Tobu A.K. Bldg. 4th Floor
23-3, Shin-Yokohama
3-chome
Kohoku-ku, Yokohama-shi
Kanagawa-ken 222-0033
Sales:
Phone: +81-45-4713330
Fax:
+81-45-4713323
Leybold Vacuum España S.A.
C/. Huelva, 7
E-08940 Cornella de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 46 16
Fax:
+34-93-666 43 70
[email protected]
Service:
Phone: +34-93-666 49 51
Fax:
+34-93-685 40 10
Leybold Vacuum (Tianjin)
Equipment Manufacturing Co., Ltd.
Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400, China
Phone: +86-22-2697 0808
Fax:
+86-22-2697 4061
Fax:
+86-22-2697 2017
[email protected]
Leybold Vacuum
Japan Co., Ltd.
Osaka Branch Office
MURATA Bldg. 7F
2-7-53, Nihi-Miyahara
Yodogawa-ku
Osaka-shi 532-0004
Sales:
Phone: +81-6-6393-5211
Fax:
+81-6-6393-5215
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Chaoyang District
Beijing 100004, China
Sales and Service:
Phone: +86-10-6590-7607
Fax:
+86-10-6590-7622
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical S.C.
Tsukuba Minami Daiichi
Kogyo Danchi
21, Kasumi-no-Sato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298-89-2841
Fax:
+81-298-89-2838
Sweden
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax:
+46-31-68 39 39
[email protected]
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Switzerland
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-1-308 40 50
Fax:
+41-1-302 43 73
[email protected]
Service:
Phone: +41-1-308 40 62
Fax:
+41-1-308 40 60
America
USA
Leybold Vacuum USA Inc.
5700 Mellon Road
Export, PA 15632
[email protected]
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax:
+1-724-733-1217
Pacific, Mountain,
Alaskan & Hawaiian time zones
Phone: +1-480-752-9191
Fax:
+1-480-752-9494
Service:
Phone: +1-724-327-5700
Fax:
+1-724-733-3799
Leybold Vacuum (Tianjin)
International Trade Co., Ltd.
Shanghai Branch:
Add: No. 33, 76 Futedong San
Rd., Waigaoqiao FTZ ,
Shanghai 200131, China
Sales and Service:
Phone: +86-21-5064-4666
Fax:
+86-21-5064-4668
[email protected]
Leybold Vacuum (Tianjin)
Guangzhou Branch:
Add: G/F,#301 Building,
110 Dongguangzhuang Rd.
Tianhe District,
Guangzhou 510610, China
Sales:
Phone: +86-20-8723-7873
Phone: +86-20-8723-7597
Fax:
+86-20-8723-7875
[email protected]
India
Leybold Vacuum India Pvt Ltd.
A-215 Road No. 30
MIDC Wagle Industrial Estate
Thane(W) - 400 604 Maharashtra
India
Sales and Service:
Phone: +91-22-2581 2929
Fax:
+91-22-2581 2626
[email protected]
Korea
Leybold Vacuum Korea Ltd.
#761-4, Yulkeum-ri,
SungHwan-eup, Cheonan-City
Choongchung-Namdo,
330-807, Korea
Sales:
Phone: +82-41-580-4420
Fax:
+82-41-588-3737
Service:
Phone: +82-41-580-4415
Fax:
+82-41-588-3737
Singapore
Leybold Vacuum
Singapore Pte Ltd.
No.1, International
Business Park,
B1-20B, The Synergy
Singapore 609917
Sales and Service:
Phone: +65-66652910
Fax:
+65-65668202
[email protected]
Taiwan
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chung-Hsin Rd., Chu-Tung
Hsin-Chu, Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-5833988
Fax:
+886-3-5833999
LV_07316_2005
05.05
[email protected]
[email protected]
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-221 347- 0
Fax:
+49-221 347-1250
[email protected]
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