9.17.079

Instruction Manual
Vapor Delivery Module
Doc. no.: 9.17.079B
Date: 22-01-2015
ATTENTION
Please read this Instruction Manual carefully before installing and operating the instrument.
Not following the instructions could result in personal injury and/or damage to the equipment.
Bronkhorst®
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for
inaccuracies. The material in this manual is for information purposes only.
Bronkhorst High-Tech B.V.
January 2015
Symbols
Important information. Discarding this information could cause injuries to people or damage to the Instrument or
installation.
Helpful information. This information will facilitate the use of this instrument.
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Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must
be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales
representative.
Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the
equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a
report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items.
Do not discard spare or replacement parts with the packing material and inspect the contents for damage.
Refer to "Removal and return instructions" about return shipment procedures.
Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the
equipment to excessive temperatures or humidity.
Copyright
© 2015 Bronkhorst High-Tech B.V.
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors.
The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V.
reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular
persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this
document.
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Vapor Delivery Module
9.17.079
Bronkhorst®
Warranty
Bronkhorst products are warranted against defects in material and workmanship for a period of three years from the date of
shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage.
Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted
for one year or the balance of the original warranty, whichever is the longest.
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See also paragraph 9 of the Conditions of sales:
http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf
The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under
warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service
center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by
the customer.
Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables,
test leads, cracks, or breaks before each use.
The module and accessories must be used in accordance with its specifications and operating instructions otherwise the safety of
the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. In case of a defect please return the equipment to Bronkhorst High-Tech.
The
symbol on the module indicates that the user should refer to the operating instructions in the manual.
Surfaces near the
symbol may be hot.
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst High-Tech B.V..
Standard fuses, with applicable national safety approvals, may be used if the rating and type are simular. Other components that
are not safety related may be obtained from other suppliers as long as they are equivalent to the original component. (Note that
selected parts should be obtained only through Bronkhorst® to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call your local Bronkhorst® representative for support.
9.17.079
Vapor Delivery Module
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Bronkhorst®
Table of contents
1
......................................................................................................................................................................
6
Scope
of this manual
1.1
1.2
1.2.1
1.2.2
Introduction
......................................................................................................................................................................
and intended use
6
References
to other applicable documents
......................................................................................................................................................................
6
......................................................................................................................................................................
6
Related
documents
Software
tooling
......................................................................................................................................................................
6
......................................................................................................................................................................
7
Starting up
Check
......................................................................................................................................................................
properties
7
Rated
pressure test inspection
......................................................................................................................................................................
7
......................................................................................................................................................................
7
Install
module
Model
key
......................................................................................................................................................................
7
......................................................................................................................................................................
8
Technical specification
Physical
......................................................................................................................................................................
dimensions
8
Environmental
conditions
......................................................................................................................................................................
8
......................................................................................................................................................................
8
Ingress
protection class
Fluidic
connections
......................................................................................................................................................................
8
General
...................................................................................................................................................................... 8
Flow
ranges of used components
......................................................................................................................................................................
8
Capacities
...................................................................................................................................................................... 9
Pressure
rating
......................................................................................................................................................................
9
Piping
...................................................................................................................................................................... 9
Electrical
connections
......................................................................................................................................................................
9
Mains
...................................................................................................................................................................... 9
Tracing
...................................................................................................................................................................... 10
Pt100
......................................................................................................................................................................
tracing sensor
10
Communication
...................................................................................................................................................................... 10
RS232
.......................................................................................................................................................................
/ Propar
10
FLOW-BUS
....................................................................................................................................................................... 10
Connector
......................................................................................................................................................................
specifications
11
Hook-up
diagram
......................................................................................................................................................................
11
...................................................................................................................................................................... 12
Installation
Mounting
...................................................................................................................................................................... 12
Fluid
connections
......................................................................................................................................................................
12
Supply
......................................................................................................................................................................
pressure
12
Leak
......................................................................................................................................................................
check
12
Seals
...................................................................................................................................................................... 12
Purging
......................................................................................................................................................................
/ filling
13
Startup
without using vacuum
......................................................................................................................................................................
13
To
.......................................................................................................................................................................
fill the system
13
To
start the process
.......................................................................................................................................................................
14
To
.......................................................................................................................................................................
stop the process
14
How
to leave system overnight
.......................................................................................................................................................................
14
To
.......................................................................................................................................................................
empty and purge the system
14
Startup
......................................................................................................................................................................
with using vacuum
15
To
.......................................................................................................................................................................
fill the system
15
To
.......................................................................................................................................................................
start the process
15
2
2.1
2.2
2.3
2.4
3
3.1
3.2
3.3
3.4
3.4.1
3.4.2
3.4.3
3.4.4
3.5
3.6
3.6.1
3.6.2
3.6.3
3.6.4
3.6.4.1
3.6.4.2
3.7
3.7.1
4
4.1
4.2
4.3
4.4
4.5
4.6
4.6.1
4.6.1.1
4.6.1.2
4.6.1.3
4.6.1.4
4.6.1.5
4.6.2
4.6.2.1
4.6.2.2
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Vapor Delivery Module
9.17.079
Bronkhorst®
4.6.2.3
4.6.2.4
4.6.2.5
5
5.1
5.2
5.2.1
5.2.2
5.2.3
5.2.4
5.3
5.3.1
5.3.2
6
6.1
6.2
6.3
7
9.17.079
.......................................................................................................................................................................
16
To
stop the process
.......................................................................................................................................................................
16
How
to leave system overnight
To
empty and purge the system
.......................................................................................................................................................................
16
......................................................................................................................................................................
17
Operation
Power......................................................................................................................................................................
and warm-up
17
User
interface
......................................................................................................................................................................
17
...................................................................................................................................................................... 17
Buttons
Display
...................................................................................................................................................................... 17
......................................................................................................................................................................
18
Select
Instrument
Temperature
and flow setpoint
......................................................................................................................................................................
19
......................................................................................................................................................................
19
Operating
settings
Operation
example
......................................................................................................................................................................
20
......................................................................................................................................................................
21
Vaporpressure
of water
......................................................................................................................................................................
22
Troubleshooting
and service
Troubleshooting
...................................................................................................................................................................... 22
...................................................................................................................................................................... 23
Maintenance
Service
...................................................................................................................................................................... 23
......................................................................................................................................................................
24
Removal
and return instructions
Vapor Delivery Module
5
Bronkhorst®
1
Scope of this manual
1.1
Introduction and intended use
The Vapor Delivery Module is a compact integrated system to realize mass flow control of vapor. The Vapor Delivery Module is
intended to generate a predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately
controlled carrier gas flow with subsequent evaporation inside a temperature controlled chamber.
1.2
References to other applicable documents
Manuals and guides for digital instruments are modular. General instructions give information about the functioning and
installation of instruments. Operational instructions explain the use of the digital instruments features and parameters. Field bus
specific information explains the installation and use of the field bus installed on the instrument.
1.2.1
Related documents
- Instruction manual FLOW-BUS interface
(document nr. 9.16.024)
- Instruction manual RS232 interface with FLOW-BUS protocol
(document nr. 9.16.027)
- Instruction manual E-8000 Readout and Control System
(document nr. 9.17.076)
These documents Contain information for basic and advanced operation, more detailed product information and instructions
for troubleshooting.
1.2.2
Software tooling
For RS232 or FLOW-BUS operation the following Bronkhorst software is available.
FlowDDE
Software tool to interface between digital instruments and windows software
FlowView
Software tool to operate Bronkhorst digital instruments
Flowfix
Software tool for fieldbus connection of digital instruments
FlowPlot
Software tool for monitoring and optimizing digital instruments parameters
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6
Manuals and Software tooling can be found at: http://www.bronkhorst.com/en/downloads
Vapor Delivery Module
9.17.079
Bronkhorst®
2
Starting up
2.1
Check properties
Before installing a Vapor Delivery Module it is important to read the attached labels
and check:
Model key
Pressure rate
Temperature (ambient)
Power supply
Power
2.2
Rated pressure test inspection
Each Vapor Delivery Module is pressure tested to at least 1.5 times the working pressure of the process conditions stipulated by the
customer, with a minimum of 8 bar. Each Module is helium leak tested to at least 2•10-9 [mbar l/s] Helium outboard.
The tested pressure is stated on the module with a RED COLOURED sticker.
Before installation, make sure that the test pressure is in accordance with
normal safety factors for your application.
If there is no Pressure Testing Sticker on the module or if the test pressure is
not complying with your pressure requirements, the equipment should not
be mounted in the process line and be returned to the factory.
2.3
Install module
See chapter 4 for detail installation instructions.
Before switching on power, please check if all external electrical and communication (if necessary) connections are properly
connected.
2.4
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Model key
Vapor Delivery Module
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Bronkhorst®
3
Technical specification
3.1
Physical dimensions
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3.2
For overall dimensions please consult supplied dimensional drawing 7.05.901. This documents is available on:
http://www.bronkhorst.com/en/downloads or can be obtained by contacting our local sales & service
representatives
Environmental conditions
• Ambient temperature
• Relative humidity
• Height altitude
3.3
: 5°C - 40°C.
: Maximum relative humidity 80%, for temperatures up to 31°C decreasing linearly
to 50% relative humidity at 40°C.
: Up to 2000 m.
Ingress protection class
IP20, according IEC standard 60529.
3.4
Fluidic connections
3.4.1
General
The Vapor Delivery Module gas and liquid supply are equipped with compression type or face-seal-fittings. Normally these fittings
are BSP parallel threads types which have to be used in combination with elastomeric O-rings to seal to the Vapor Delivery Module.
Occasionally fittings are orbital welded to the VDM-Series.
For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting body and that
no dirt or dust is present on tube, ferrules or fittings.
For exact information on the fitting, please contact Swagelok for further instructions or documentation.
Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous
fluids are used.
3.4.2
1
Flow ranges of used components
Model
Heater
model
Thermal
power
SW-10n
W-100A
10 W
1...30 g/h liquid
0.1...4 ln/min gas
200°C
SW-20n
W-200A
100 W
10...120 g/h liquid
0.2...10 ln/min gas
200°C
Max. capacity1
Max temp.
Depends on liquid and process pressure; table based on water at 1 atmosphere.
For other liquids or pressure conditions please consult the manufacturer or your local sales representative.
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Vapor Delivery Module
9.17.079
Bronkhorst®
Capacities
3.4.3
Figure 1: Capacity SW-100 Vaporizer
3.4.4
Figure 2: Capacity SW-200 Vaporizer
Pressure rating
• Gas supply = max. 10 bar(g)
• Liquid supply = max. 10 bar(g)
• Vapor pressure = atmospheric
3.5
Piping
For optimal performance of the system it is recommend to have at least 10 pipe diameters distance between the angle and the
equipment inlets. The purge is rarely used in production environments, except for installation.
Be sure that piping is absolutely clean!
CAUTION - DO NOT install small diameter piping on high flow rates.
CAUTION - DO NOT mount abrupt angles directly to the inlet or outlet, especially for high flow rates.
3.6
Electrical connections
3.6.1
Mains
Model
Power
supply
(Vac)
Maximum power
(included tracing
§3.6.2)
Fuse primary heater
Fuse secondary
heater
Fuse main
SW-10n-n-50-a-nn-a
110 … 120
250VA 50-60 Hz
T2A I2t >30A
Littelfuse 0213002.MXP*
T4A
T2A
SW-10n-n-51-a-nn-a
110 … 120
550VA 50-60 Hz
T2A I2t >30A
Littelfuse 0213002.MXP*
T4A
T2A
SW-20n-n-50-a-nn-a
110 … 120
250VA 50-60 Hz
T2A I2t >30A
Littelfuse 0213002.MXP*
T4A
T2A
SW-20n-n-51-a-nn-a
110 … 120
550VA 50-60 Hz
T2A I2t >30A
Littelfuse 0213002.MXP*
T4A
T2A
SW-10n-n-30-a-nn-a
220 … 240
250VA 50-60 Hz
T1A I2t >10A
Littelfuse 0213001.MXP*
T4A
T1A
SW-10n-n-31-a-nn-a
220 … 240
550VA 50-60 Hz
T1A I2t >10A
Littelfuse 0213001.MXP*
T4A
T1A
SW-20n-n-30-a-nn-a
220 … 240
250VA 50-60 Hz
T1A I2t >10A
Littelfuse 0213001.MXP*
T4A
T1A
SW-20n-n-31-a-nn-a
220 … 240
550VA 50-60 Hz
T1A I2t >10A
Littelfuse 0213001.MXP*
T4A
T1A
* Littelfuse or equivalent
9.17.079
Vapor Delivery Module
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Bronkhorst®
For mains connection, use appropriate cabling with IEC 60320-1/C19 connector:
• Power cable with Euro Plug (EU) – Schurter #6051.2043 (art.nr.1.15.242)
• Power cable with Switzerland Plug (CH) (art.nr.1.15.243)
• Power cable with North America Plug (USA) – Schurter #6051.2041 (art.nr.1.15.244)
• Power cable with United Kingdom Plug (UK) – Schurter #6051.2048 (art.nr.1.15.245)
3.6.2
Tracing
Optionally, the Vapor Delivery Module can be provided with a trace temperature control. In this case, the VDM-Series is provide
with a tracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is not
supplied. The voltage at this tracing output is equal to the supply voltage of the Vapor Delivery Module.
For tracing connection, use appropriate cabling with IEC 60320-2-2/C14 plug (art.nr. 1.09.594). Make sure cabling is double
isolated.
The table below shows the maximum tracing power and the fuse amperage for the various models.
Model
Power supply (Vac)
Maximum tracing power
Fuse tracing heater
SW-10n-n-51-a-nn-a
110 … 120
300 VA 50-60 Hz
T2,5A
SW-20n-n-51-a-nn-a
110 … 120
300 VA 50-60 Hz
T2,5A
SW-10n-n-31-a-nn-a
220 … 240
300 VA 50-60 Hz
T1,25A
SW-20n-n-31-a-nn-a
220 … 240
300 VA 50-60 Hz
T1,25A
3.6.3
Pt100 tracing sensor
Optionally, the Vapor Delivery Module can be provided with a trace temperature control. In this case, the VDM-Series is provide
with a Pt100 inlet 4-pin M12 A-coded male connector. This connector is intended for connecting a two, three or four-wire Pt100.
Measurement current through the sensor is 0,5 mA.
For Pt100 connection, use appropriate cabling with M12 4-pin female connector (art.nr. 1.09.593).
Warning! Be sure that the temperature sensor is properly mounted with the tracing wire,
otherwise no temperature control is possible and hazardous situations may occur.
3.6.4
Communication
3.6.4.1
RS232 / Propar
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3.6.4.2
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For further instructions about the RS232 interface see manual 9.17.027 Manual 'RS232 interface with FLOW-BUS
protocol for digital instruments'. This manual is available at the download section of our website:
http://www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf
FLOW-BUS
For further instructions about the FLOW-BUS interface see manual 9.17.024 Manual 'FLOW-BUS interface for digital
instruments'. This manual is available at the download section of our website:
http://www.bronkhorst.com/files/downloads/manuals_english/917024manual_flowbus_interface.pdf
Vapor Delivery Module
9.17.079
Bronkhorst®
3.7
Connector specifications
3.7.1
Hook-up diagram
9.17.079
Vapor Delivery Module
11
Bronkhorst®
4
Installation
4.1
Mounting
The mounting position of the equipment is upright (Figure 1). Please take attention:
Avoid installation in close proximity of mechanic vibration and/or heat sources.
Avoid contact between hot surfaces of the enclosure with electrical cables and fluidic hoses/pipes.
Ventilation requires a minimum distance of 100 mm space from each side to a wall.
Make use of the protective earth pin (paragraph 3.7.1 connector 3) for grounding the connected tubing.
Use an appropriate cable.
Mount the equipment in such a way, that cables and mains switches can easily be reached and disconnected.
Figure 1
4.2
Fluid connections
For exact information on the fittings, please contact Swagelok for further instructions or documentation.
Please be aware when using Oxygen (O2) that the fittings mounted in the gas line should be absolutely oxygen clean.
4.3
Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, make sure that the pressure is
increased gradually and avoid pressure shocks in the system.
4.4
Leak check
Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are
used!
4.5
Seals
Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable. However,
it is a general guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there
is no liability for damages accruing from the use of this guide. The customer’s application will demand its own
specific design or test evaluation for optimum reliability. So check order documentation if the used seals are correct
for the process.
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Vapor Delivery Module
9.17.079
Bronkhorst®
4.6
Purging / filling
4.6.1
Startup without using vacuum
4.6.1.1
To fill the system
Procedure:
Actions:
A1
Purge all lines
Close V2, V3 and V7
Open V1, V4, V5 and V6
Give setpoint 100% to MFC
Give setpoint 0% to LFC
Purge for a long time.
A2
Setup carrier gas supply
Close V4
Open V3
A3
Fill the system with liquid.
Close V1
Open V2 briefly; allow mixing valve VDM to fill.
Wait until all gas bubbles left the system via Purge out
and V5, then close V5.
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
A4
9.17.079
The system is now ready for use.
Vapor Delivery Module
13
Bronkhorst®
4.6.1.2
To start the process
Procedure:
Actions:
B1
Set the heater at right temperature
Give set point to the heater; wait until the temperature is
stabilized
B2
Start gas flow
Give setpoint to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
B3
Start liquid flow
Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the process.
The pressure controller of the inert gas supply can influence
the stability of the liquid flow controller.
B4
4.6.1.3
Connect process
Open V7, close V6
To stop the process
Procedure:
Actions:
C1
Disconnect process
Open V6, close V7
C2
Stop liquid flow
Give setpoint = 0 to LFC
C3
Optional: Stop gas flow
Give setpoint = 0 to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
4.6.1.4
How to leave system overnight
Procedure:
D1
4.6.1.5
Actions:
Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
To empty and purge the system
Actions:
Procedure (1,2):
E1
Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
E2
Purge liquid out of lines
Open V1 and V5
E3
Purge lines with inert gas
Open V4, V6
Close V7
Give setpoint to MFC
E4
Optional: purge wit inert liquid
E5
Optional: Alter E3 and E4 for a few times
Connect inert liquid to inert gas supply, Proceed according
to E2
If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing
liquid in the system.
(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully
(preferably with inert liquid, E3, E4, E5) before opening the system.
(1)
- In case of non-pure liquids, place a filter upstream the liquid flow controller.
- Mount the Vapor Delivery Module upright.
14
Vapor Delivery Module
9.17.079
Bronkhorst®
4.6.2
Startup with using vacuum
4.6.2.1
To fill the system
Procedure:
Actions:
A1
Evacuate the lines “Vacuum”
Start pumps
A2
Evacuate all lines
Close: V1, V2, V3, V4, and V6
Make sure that “waste” and “process” are vacuum
Connect inert gas on carrier gas inle.
Open : V5 and V8
Give setpoint to gas and liquid control (the control valves
of the LFC and MFC open)
Pump for a long time
Remark: if the system is not completely dry follow
procedure of E3, E4, (E5)
A3
Purge line between inert gas source and valve V1
Open valve V1 briefly for some seconds.
A4
Purge line between process gas source and gas MFC
Give setpoint = 0 to LFM (mix valve closes)
Open valve V3 briefly for some seconds
A5
Pump down liquid supply
Open V2 for some time
Close V2
A6
Setup carrier gas
Close V8
Open V3
A7
Fill the system with liquid
Close V1
Open B2 briefly; allow mixing valve VDM to fill
Close V5
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
A8
Optional: degassing mixing valve
A9
The system is now ready for use
4.6.2.2
Open V5, a needle valve will be best, to avoid too much
liquid be pumped away
To start the process
Procedure:
Actions:
B1
Set the heater at right temperature
Give setpoint to the heater, wait until temperature is
reached
B2
Start gas flow
Give setpoint to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
B3
Start liquid flow
Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the process.
The pressure controller of the inert gas supply can influence
the stability of the liquid flow controller.
B4
9.17.079
Connect process
Open V7, close V6
Vapor Delivery Module
15
Bronkhorst®
4.6.2.3
To stop the process
Procedure:
Actions:
C1
Disconnect process
Open V6, close V7
C2
Stop liquid flow
Give setpoint = 0 to LFC
C3
Optional: Stop gas flow
Give setpoint = 0 to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
4.6.2.4
How to leave system overnight
Procedure:
D1
4.6.2.5
Actions:
Relief the supply pressure from the liquid- and
carrier gas lines
Close V2
Open V8 for some seconds
To empty and purge the system
Actions:
Procedure (1,2):
E1
Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
E2
Purge liquid out of lines
Open V1 and V4
E3
Purge lines with inert gas
Open V4 and V6
Close V7
Give setpoint to MFC
E4
Evacuate liquid lines (cont.)
Close V1
Open V8
E5
Optional: Repeat last two steps for a few times
If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing
liquid in the system.
(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully
(preferably with inert liquid, E3, E4, E5) before opening the system.
(1)
- In case of non-pure liquids, place a filter upstream the liquid flow controller.
- Mount the Vapor Delivery Module upright.
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5
Operation
5.1
Power- and warm-up
Before switching on the power, be sure that:
System is checked for leakage of gases and liquids
All connections have been made
Flow-set points are zero
No liquid has been spilled into the equipment
Switch on and then:
Allow 30 minutes (from switching on) to warm up (common for thermal flow controllers)
Wait until pre-set temperatures are reached. When the LED indicators turn blue,
temperatures are reached.
Make sure that the carrier gas is always flowing before the liquid flow setpoint is applied.
5.2
User interface
5.2.1
Buttons
The buttons have the following functions:
- Enter selected menu
- Enter edit mode
- Confirm selection/changes
- Menu selection up
- Select information field
- Next character in edit mode
- Up in table
- Menu selection down
- Select information field
- Previous character in edit mode
- Down in table
- Return to previous screen
- Undo, cancel and exit edit mode
- Switch content in the 'Custom readout 2' field
5.2.2
A
Top line
C
Custom readout 1
B
Measure readout
D
Custom readout 2
Display
The display is divided into 4 areas, ‘Measure readout’,
‘Custom readout 1’, ‘Custom readout 2’ and the 'Top line'.
The information in these areas can be configured by the user.
If an area contains a parameter which can be set or reset by
the operator, you can press
or
to select this parameter.
Press
to enter the edit mode or press
to return to the
‘Measure readout’ screen
B
.
If ‘Custom readout 1’ is disabled, you can only
switch between ‘Measure readout’ and ‘Custom
readout 2’.
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5.2.3
Select Instrument
The Vapor Delivery Modules contains liquid and gas flow
controllers. Also a temperature controller for evaporation and
optional trace heating is provided. These integrated
instruments have unique node addresses. Factory default
node addresses are:
Node address
Instrument
2
Readout and control (Display)
3
Temp. controlled evaporation device
4*
Trace heating temperature control
5
Liquid flow supply
6
Carrier gas supply
7*
Second carrier gas supply
8*
Dilution gas supply
* = if applicable
button until the
To enter the 'instrument' mode, press the
red line appears above 'Custom readout 2' than press
to
activate this field.
Security settings can be set to avoid unauthorised
access to this option.
The number of displays that have the same
instrument selected must not exceed 3.
The integrated Instruments will be indicated with their node
addresses. Press
or
to search for an instrument on the
bus. While the message “search” is displayed, the VDM is
searching for a valid node address and it will not show any
specific instrument info until an active node is found.
When an active node address is found, the VDM will show the
corresponding USERTAG or Serial Number in the 'Top line'. It
will also show the actual measure and, if applicable, the actual
setpoint.
Press
to select this instrument to be operated by the VDM
or press
to return to the previous selected instrument.
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Temperature and flow setpoint
5.2.4
Setpoint can only be edited when the setpoint parameter is
displayed in 'Custom readout 1' or 'Custom readout 2'.
To edit the setpoint press
to select the readout area in
which this parameter is displayed. Press
to enter the edit
mode, the first digit will lighten.
Security settings can be set to avoid unauthorised
access to the setpoint parameter.
Use
or
to change the digits, press
select the next digit.
to confirm and
You can change the setpoint edit mode into 'step'.
This enables you to change the setpoint using fixed
steps. See section 'Customize display info' in the
E-8000 manual (9.17.076) for more detailed
information.
After the last digit is confirmed by pressing
will be sent to the instrument.
, the setpoint
If the entered setpoint is ignored, check controller
mode. See section 'Controller mode' in the E-8000
manual (9.17.076) for more detailed information.
The
button can be used to exit the edit mode
and cancel the changes.
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5.3
This chapter explains the most important user interface options. For more information please check the E-8000
manual 9.17.076 at: http://www.bronkhorst.com/en/downloads
Operating settings
Make sure that the tracing and heating temperatures are well above the dew point of the desired vapor flow at the process
conditions.
Especially for tracing, the temperature is only controlled at a single location, while inadequate insulation may
introduce cold-spots at which condensation may occur.
Be aware that the temperatures (both heater and tracing) depend on the location of the sensor. Therefore, it is advised to set the
heater temperature approximately 20°C above the theoretical temperature.
In addition, it is advised to set the tracing temperature another 10°C higher.
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5.3.1
Operation example
Application
The Vapor Delivery Module can be used for generating certain humidity in a gas stream. Carrier gas and liquid (water) are
controlled to regulate the humidity. The water is mixed with the gas and consequently evaporated. The humidity at a certain
temperature corresponds with a certain ratio of gas and water, this ratio can be set by the flow controllers which are part of the
Vapor Delivery module.
Calculation example for setting of relative humidity
At atmospheric pressure, at 80°C, 2 ln/min Air has to be moistened. Which water flow is needed for a r.h. of 50%. The vapor
pressure of water at 80°C is 473.3 mbar according to FLUIDAT®.
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FLUIDAT® on the Net: Bronkhorst High-Tech's interactive Flow Calculations and routines generating Physical
Properties. Visit www.fluidat.com
Assumptions: Consider water vapor as an ideal gas, 1 mole of ideal gas at normal
conditions = 22.4 l, 1 mole of water is 18 g and 1 hour is 60 min.
1 atm. = 1013.25 mbar.
At 100% r.h., the (Mole)Ratio between gas and water is:
The MoleRatio:
So in a gas flow of 2 ln/min, the saturated vapor flow (100% r.h.) is:
[ln/min]
and in [g/h]:
[g/h]
At 50% r.h., the (Mole)Ratio between gas and water:
The MoleRatio:
so in a gas flow of 2 ln/min, the saturated vapor flow (50% r.h.) is:
and in [g/h]
[g/h]
Result: at 50% r.h., the water flow is 29.41 g/h.
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5.3.2
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Vaporpressure of water
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6
Troubleshooting and service
6.1
Troubleshooting
Symptom
Possible cause
No heating of heater, everything else works
(no ready heater LED after 10 minutes)
1. Mains switch turned off
Turn on mains switch
2. Fuse may be blown
Replace fuse
(check mains and heater fuse)
3. Defective temperature sensor
Return equipment
4. Heater defective
Return equipment
1. Fuse blown
Replace fuse
(check mains and tracing fuse)
2. Defective temperature sensor
Replace sensor
3. Defective tracing
Replace tracing
4. Inadequate insulation resulting
in thermal power loss
Improve insulation
1. Wrong controller mode LFC
Check controller mode LFC
2. No setpoint
Give Setpoint
1. Wrong controller mode MFC
Check controller mode MFC
2. No Setpoint
Give Setpoint
1. No gas supply
Check gas supply
2. No liquid supply
Check liquid supply
1. Mixture saturated, condensation
1. Increase setpoint Heater
2. Increase setpoint Tracing
3. Increase carrier gas flow
4. Decrease liquid flow
5. Any combinations of the
actions 1 – 4
2. No proper insulation of the
outlet piping
Improve insulation of piping
Significant pressure variations
on inlets
Reduce pressure variations by e.g.
adding pressure regulators or buffers
No heating of tracing, everything else works
(no ready heater LED after 30 minutes)
No Liquid flow
No Gas flow
No vapor stream
Liquid in process chamber
Irregular vapor stream
Action
In case of not functioning equipment: De-installation and returning of the equipment is recommended. See section 7 for the
relevant details.
Do not open or disassemble the equipment.
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Maintenance
6.2
Maintenance
No routine maintenance is required. In case of (other) maintenance which requires de-installation of the equipment, purge the
system first as specified in Section 4.6.1.5
Cleaning
For cleaning the exterior use a soft damp cloth.
6.3
Service
For current information on Bronkhorst High-Tech B.V. and service addresses please visit our website:
http://www.bronkhorst.com
Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your
application. Contact sales by e-mail:
[email protected]
For after-sales questions, our Customer Service Department is available with help and guidance.
To contact CSD by e-mail:
[email protected]
No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure
appropriate further action. Our experts can be reached at:
+31 573 45 88 39
Bronkhorst High-Tech B.V.
Nijverheidsstraat 1A
NL-7261 AK Ruurlo
The Netherlands
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7
Removal and return instructions
Instrument handlings:
Purge gas lines
When toxic or dangerous fluids have been used, the customer should pre-clean the instrument
Remove instrument from line
The instrument must be at ambient temperature before packaging
Insert the instrument into a plastic bag and seal the bag
Place the bag in a appropriate shipping container
Add documentation:
Reason of return
Failure symptoms
Contaminated condition
Declaration on Contamination form: 9.17.032
When returning material, always describe the problem and if possible the work to be done, in a covering letter.
It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument!
This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department. Take proper
care of packing, if possible use the original packing box.
Contaminated instruments must be dispatched with a completely filled in 'declaration on contamination form'. Contaminated
instruments without this declaration will not be accepted.
Important:
Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely:
NL801989978B01
If applicable, otherwise contact your distributor for local arrangements.
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The declaration on contamination form is available at the Bronkhorst download site:
http://www.bronkhorst.com/files/support/safety_information_for_returns.pdf
Vapor Delivery Module
9.17.079

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