Rapid™ F 6 kW Remote Plasma Source
Introduction
This manual documents how to install, operate, maintain, and troubleshoot the
Advanced Energy
®
Rapid F 6 kW plasma source. Retain this manual for future reference.
READ THIS SECTION!
To ensure safe operation, read and understand this manual before attempting to install or operate this unit. At a minimum, read the safety instructions and follow the safety
practices under the heading “Safety” on page 1-3.
INTERPRETING THE MANUAL
The following sections explain the type conventions, icons, and symbols that appear in this manual.
Type Conventions
Please note the following type conventions:
• Pin and signal names appear in capitalized italics (POWER_ON).
• New terms appear in italicized text.
• Unit labels (switches, indicators, and so on) appear in boldface text (MODIFY).
• Commands (162) and command names (set point) appear in boldface, lowercase text.
1
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Advanced Energy
®
Icons (Symbols)
This symbol represents important notes concerning potential harm to people, this unit, or associated equipment. Advanced Energy
®
includes this symbol in Danger,
Warning, and Caution boxes to identify specific levels of hazard seriousness.
This box identifies hazards that could result in severe personal injury or death.
This box identifies hazards or unsafe practices that could result in personal injury.
This box identifies hazards or unsafe practices that could result in product or property damage.
The following symbols may appear on the unit:
High voltage
Protective earth ground
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Rapid™ F 6 kW Remote Plasma Source
CE label
Non-ionizing radiation
Hot surface
Warning (refer to manual)
NRTL
Heavy object
SAFETY
Do not attempt to install or operate this equipment without proper training.
• Ensure that this unit is properly grounded.
• Ensure that all cables are properly connected.
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• Verify that input line voltage and current capacity are within specifications before turning on the power supplies.
• Use proper ESD precautions.
• Operate this device only within the specified range of vacuum pressures, powers, duty-cycles and gas chemistries.
• Do not attempt to disassemble the source assembly or its integrated power supply to clean or service the vacuum housing from potential process-related deposition.
• BE CAREFUL AROUND THIS EQUIPMENT
PRODUCT COMPLIANCE AND CONDITIONS
OF USE
The following sections include information about unit compliance and certification, including the conditions of use and installation required to be in compliance with the standards and directives.
Safety and Compliance Directives and Standards
Certain options of this unit have been tested for and comply with the following safety and electromagnetic compatibility (EMC) directives and standards and semiconductor industry guidelines:
Table 1-1. Electromagnetic Compatibility (EMC) Directives
Directive
89/336/EEC
Description
EC Council directive on the approximation of the laws of the
Member States relating to electromagnetic compatibility (EMC
Directive)
Table 1-2. Electromagnetic Compatibility (EMC) Standards
Standard Description
47 CFR Part 18 Code of Federal Regulations—Limits and methods of measurement of radio interference characteristics of industrial, scientific, and medical equipment
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Rapid™ F 6 kW Remote Plasma Source
Table 1-2. Electromagnetic Compatibility (EMC) Standards (Continued)
Standard Description (Continued)
EN 55011 Limits and methods of measurement of radio disturbance characteristics of industrial, scientific, medical (ISM) radio frequency equipment (Group 2, Class A) (CISPR 11)
EN 61000-6-2 Electromagnetic Compatibility - Generic Standards- Immunity for Industrial Environments
Table 1-3. Safety Directives
Directive
73/23/EEC
Description
EC Council directive on the harmonization of the laws of the
Member States relating to electrical equipment designed for use within certain voltage limits (LVD - Low Voltage Directive)
Table 1-4. Safety Standards
Standard
ANSI/ISA
82.02.01
CSA C22.2
No. 1010.1
EN 61010-1
Description
Safety standard for electrical and electronic test, measuring, controlling and related equipment—general requirements
(harmonized standard to IEC publication 61010-1)
Safety requirements for electrical equipment for measurement, control, and laboratory use
Safety requirements for electrical equipment for measurement, control, and laboratory use
Table 1-5. Semiconductor Industry Guidelines
Guideline
SEMI F47 Environmental, health, and safety guidelines for semiconductor manufacturing equipment
Description
This device must be installed and used only in compliance with the directives and standards listed in addition to VDE 0113, EN 60204 (IEC 60204), and applicable requirements.
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Advanced Energy
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Certification
Certain options of this product are certified by:
• Canadian Standards Association (CSA) (NRTL/C)
• CE marking is self-addressed by AE Compliance Engineering
• EMC measurements verified by TÜV Product Services
For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product.
Installation Requirements
Install this unit according to the following requirements.
The following section describes required steps to be taken before attempting installation.
Operating and maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment. Ensure that all appropriate safety precautions are taken.
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.
Conditions of Use
To comply with the stated directives and standards, you must meet the following conditions of use:
• Before making any other connection, connect the auxiliary protective earth ground stud on the front panel.
• Install and operate this device only in a pollution degree 2 or better environment, which means an indoor location such as a computer room, office, or factory floor where only non-conductive pollution occurs during operation.
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Rapid™ F 6 kW Remote Plasma Source
•
Use only clean, well-conditioned water with low conductivity (refer to Table 3-4 on page 3-4). High conductivity cooling water with high rust and salt content can
inhibit the reliable performance of this device.
• Operate this device under flows, vacuum pressures, and power levels declared in the specifications to avoid inadvertent or unintended vacuum arc issues due to high voltages when igniting a plasma in the source.
• Use only ASM #326 O-rings for mounting the Rapid F 6 kW plasma source to existing vacuum hardware.
• Use only shielded cables on the AE Bus (RS-232) port and the user (Analog
Control) port connectors.
• Install and operate this device in an over-voltage category III or better environment.
• To provide the required over-current protection, you must install and operate this device with a 35 A (max) circuit breaker switch on the AC input. The circuit breaker must be easily accessible and near the device.
• This device must be installed so that the input power connection is inaccessible to the user.
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