Rapid™ F 6 kW Remote Plasma Source
Specifications
PHYSICAL SPECIFICATIONS
Table 3-1 describes the physical specifications of the Rapid F 6 kW plasma source.
Table 3-1. Physical specifications
Description
Size
Weight
Clearance
Specification
25.6 cm (H) x 25.3 cm (W) x 45.7 cm (D)
10.1" (H) x 9.9" (W) x 18.0" (D)
Approximately 25 kg (55 lb)
10.16 cm (4
″
) required at front for cable connections
Mounting
Vacuum
Mechanical
Lifting Handles
Symmetric ISO NW 40 Split Clamp mating flanges with six #10-32 screw holes—top and bottom of unit (ISO NW 40 split clamps and #10-
32 x 5/8" screws supplied by user)
Six 1/4-20 threaded PEM fastener holes on each side panel 1/4-20 x 5/8" L hardware suggested for mounting to1/4" thick mechanical support or bracing)
10.16 cm (4
″
) required at front for cable connections
Two collapsible handles rated at 4 times the weight of the unit
Connector Specifications
AC input power
User (Analog Control) port
AE Bus host (RS-232) port
Water connectors
Male, 6-pin, Harting type, Han
®
6HSB
Female, 25-pin, shielded, subminiature-D
Female, 9-pin, shielded, subminiature-D
Two female SAE 5/16" straight thread
3
5707038-C Specifications 3-1
Advanced Energy
®
ELECTRICAL SPECIFICATIONS
Table 3-2 describes the electrical specifications of the Rapid F 6 kW plasma source.
Table 3-2. Electrical specifications
Description Specification
Input Power Specifications
Line voltage 208 VAC nominal (190 VAC to 229 VAC), 3
φ, with ground, phase insensitive
50/60 Hz nominal (47 Hz to 63 Hz) Line frequency
Line current 26 A nominal, 35 A maximum per phase
Ground leakage current 3.5 mA or less
Ground connection Chassis ground near AC connector suitable for ring lug connection
Overcurrent protection 30 A internal bus fuse
Overvoltage Use in an overvoltage category III environment
Warm-up delay
Approximately 60 s average for AC on (bus is charged)
Approximately 4 s for RF on (after bus is charged)
Load power specifications
Frequency
Minimum power under load
290 kHz to 650 kHz, limited to 290 kHz to
490 kHz for specified operation
Peak power under load 6000 W with variable duty cycle of no more than
50%, maximum allowed on-time of 300 s
1500 W
Accuracy
Linearity
Power leveling
±5% or 200 W of peak power rating, whichever is greater
±200 W or less from 1500 W to full-scale output
Internal load power leveling
Operational load Load determined by plasma impedance within operational range of about 3:1
Efficiency (line to load) Approximately 80% typical at full-rated power, nominal line
Zero set point Less than 1 W actual and readback when zero or negative set point or when interlock is not satisfied
3-2 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 3-2. Electrical specifications (Continued)
Description
Calibration means
Ignition
Power factor
Specification
Auxiliary secondary winding for non-plasma calibration via resistive/inductive load external to the unit
Ignition requires a low ionization voltage gas
(Argon preferred) at .5 to 2 Torr. After ignition, the process gases should be introduced within 90 seconds to prevent a current limit fault.
> 0.73
VACUUM SPECIFICATIONS
Table 3-3 describes the vacuum specifications for the Rapid F 6 kW plasma source.
Table 3-3. Vacuum specifications
Description
Leak rate
Plasma source wall surfaces
Vacuum seals
O-Ring grooves
Input/output vacuum fittings
Specification
He: < 10
-6
mbar-liter per second (converts to
<0.0006
Anodized aluminum, Class III Hardanodization with deionized water seal posttreatment
Chemraz
®
O-rings
Masked aluminum surfaces against O-ring surfaces
ISO NW 40 flanges
Note: If the source is stored for an extended period of time at atmospheric pressure, outgassing will occur when pumping down the source for the first time. To check for leaks upon installation, it is recommended that the source be pumped down to its base pressure and operated in Ar:O
2
mixtures to remove air contaminants and moisture.
5707038-C Specifications 3-3
Advanced Energy
®
COOLING SPECIFICATIONS
Table 3-5 provides cooling specifications. The source is air and water cooled by a single-series loop water flow path.
Table 3-4. Cooling specifications
Description
Air—internal exchange
Air—external exchange
Water temperature
Specification
Internal fans for localized cooling of critical components
External air exchange through perforations at critical locations and an exhaust fan (in the rear of the unit); maximum ambient air temperature =
40ºC
(104ºF)
+5ºC to +25
° C (+41ºF to +77° F)
Water flow rate
Note: Maximum water temperature at minimum flow rate and maximum ambient air temperature (+40
° C)
1.3 gpm to 2.0 gpm for derated power, on-time, and duty cycle
1.4 bar (20 psi) for 1.5 gpm, 1400 kPa, requires 7.6 lpm (2 gpm) at peak power (6 kW).
Minimum pressure
differential (supply to drain required to achieve specified minimum flow rates)
Maximum pressure rating
4.5 bar (65 psi), 450 kPa
Contaminates
The following specifications are recommended for the water used to cool the Rapid F 6 kW plasma source:
• pH between 7 and 9
• Total dissolved solids < 250 ppm
• Specific resistivity of 2500
Ω/cm or higher at
25
° C
• Total dissolved solids (TDS) as estimated by the following:
TDS
≤ 640,000
specific resistivity (
Ω/cm)
Note: Internal fans assist the thermal management of the unit.
3-4 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Under normal operation, the chassis case and cooling water reach temperatures hot enough to scald. Before touching the source or disconnecting the water cooling lines, allow the cooling water to flow for several minutes to remove stored thermal energy from the unit.
Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds.
ENVIRONMENTAL SPECIFICATIONS
Table 3-5 provides climatic specifications.
Install and operate this device only in a pollution degree 2 or better environment, which means an indoor location such as a computer room, office, or factory floor where only non-conductive pollution occurs during operation.
5707038-C Specifications 3-5
Advanced Energy
®
Table 3-5. Climatic specifications
Temperature Relative Humidity Air Pressure
Operating
5
°
C to +40
°
C 15% to 85%
1
<74.5 kPa
+41
°
F to +104
°
F +2 g/m
3
to +25 g/m
3
<745 mbar approximately 2500 m
(8203´) above sea level
<58.5 kPa
Storage
-25
°
C to +55
°
C 15% to 85%
1
-13
°
F to +131
°
F +2 g/m
3
to +25 g/m
3
<585 mbar approximately 4000 m
(13,124´) above sea level
<48.0 kPa
Transportation
-25
°
C to +55
°
C 15% to 85%
1
-13
°
F to +131
°
F +2 g/m
3
to +25 g/m
3
<480 mbar approximately 5000 m
(16.405´) above sea level
1
noncondensing
2
Maximum relative humidity when the unit temperature slowly increases, or when the unit temperature directly increases from -25°C to +30°C
3
Maximum absolute humidity when the unit temperature directly decreases from +70°C to
+15°C
PROCESS OPERATING SPECIFICATIONS
This section describes the operational specifications for the Rapid F 6 kW plasma
source. Table 3-6 shows the general operational parameters for the Rapid F 6 kW
plasma source.
Table 3-6. General operational parameters
Description
Vacuum pressure range
Power requirements
Process application s
Specification
0.5 Torr to 6 Torr for NF
3
processes up to 2.5 slpm with the appropriate gas feed apparatus for high gas flows.
1500 W to 6000 W as limited by thermal management, current, and voltage limits within the range
Remote delivery of gases for downstream chamber cleaning by the utilization of NF
3
as the feed gas
3-6 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 3-6. General operational parameters (Continued)
Description
Chemical compatibilities
Long-term stability
Specification
Fluorine-bearing gases, perfluorocarbon-bearing gases
(nondepositing) hydrogen, nitrogen, oxygen-bearing gases, and combinations thereof
No internal parts are consumable (consumables are defined as parts with a lifetime of less than 6000 hours of operation), with the exception of the source anodization. Drift in NF
3
dissociation efficiency within
6000 hours of operation = <2%
GAS PRESSURE AND OPERATING RANGE
The Rapid F 6 kW plasma source ignites in Ar gas and then transitions to pure NF
3
or
O
2
gas (AE also permits blends of NF
3
with Ar or O
2
with Ar dilution). The viable operating range of the Rapid F 6 kW plasma source in any given gas depends on power, pressure, and gas flow. These factors define the effective plasma resistance
into which the supply can deliver power. Figure 3-1 on page 3-8 illustrates the viable
operating range for the Rapid F 6 kW plasma source as restricted by the internal current and voltage limits of the power supply. You must provide a satisfactory power set point in order to maintain a stable power balance for the given gas-phase chemistry and operating pressure between these two limits. The power balance depends on gas chemistry and pressure but is independent of the viable impedance range of the Rapid
F 6 kW plasma source.
Note: The unit reaches a stable power balance when it disposes enough power into the plasma that the net rate of ion and electron production in the plasma body is equivalent to ion and electron volume and wall recombination. It may be difficult to maintain a stable power balance when the unit is operating in pure or diluted electronegative gases such as SF
6
, NF
3
, O
2
, or in various perfluorocarbon gases at low powers and high pressures.
Imposed on the operating range, Figure 3-1 shows examples of NF
3
discharge for
operation at the pressures and flow rates listed in Table 3-7 on page 3-9. At high
power levels and low pressures where the gas discharge is very conductive, the power
5707038-C Specifications 3-7
Advanced Energy
® supply’s current limit may restrict delivered power. At low power levels and high pressures where the discharge is more resistive, the power supply’s voltage limit may restrict delivered power.
3-8
Figure 3-1. Viable operating range of Rapid F 6 kW plasma source
On the graph, you can see lines that indicate a range of operation near the current limit in which the power supply enables the current limit time-out counter. In this range of operation, currents on the primary windings are exceptionally high and can lead to high heating losses. To protect the long term integrity of the windings, the unit derates the allowable on-time in this range of operation. This derating is a function of primary current and scales from 300 seconds (maximum) to 90 seconds (minimum). This range of high current operation is usually restricted to Ar ignition or the process transition steps immediately after Ar ignition. When the unit is operating is this range, the E21 error code flashes on the display panel, but output continues. If the unit continues to operate in this range for longer than the limit, the E21 error code stays on
Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source the display and the unit shuts output off. To avoid this fault and to avoid long-term operation in this part of the range, increase the increase the operation pressures of gas flows.
Table 3-7. Power, pressure, and gas flow examples for Figure 3-1
6
7
4
5
1
2
3
Number in
Figure 3-1
Pressure
12.0
10.0
6.5
3.0
3.5
3.0
1.0
(Torr)
NF
3
2000 / 0
2500 / 0
1500 / 0
0 / 500
/Ar
(sccm)
2800 / 5600
2000 / 4000
1500 / 0
Voltage (V)
87
75
94
82
86
75
32
Plasma
8 0.42
0 / 500 25
Plasma
Power (kW)
6.0
6.0
6.0
5.5
5.5
5.5
3.5 (current limited)
2.5 (current limited
Under typical operating conditions, the interaction between the plasma's resistive properties and the power supply’s control dynamics near the voltage limit will lead to disruption and loss of the discharge. Avoid operating the unit at or very close to the voltage limit. Also avoid pressure bursts, which may induce transient spikes or overshoots in plasma resistance.
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
5707038-C Specifications 3-9
Advanced Energy
®
Gas Operation Parameters
Table 3-8 provides gas operation specifications in fluorine (NF
3
).
Table 3-8. Gas operational specifications
Description Specification
Flows and dilutions
At least 2.5 slpm of NF
3
at up to 6 Torr at 6 kW
Dissociation efficiency
>98% dissociation of 2.5 slpm at 6 kW, as measured by mass spectroscopy
Gas quality
At least 2.5 slpm of NF
3
:Ar at 1:1 ratio up to 10 Torr at
6 kW
Operation in low-grade NF
3
(~95% pure) with no additional particulate formation
3-10 Specifications 5707038-C
