Controls, Indicators, and Interfaces. Advanced Energy Rapid F 6kW
The Rapid F 6kW Remote Plasma Source is a compact and easy-to-mount combination plasma source and integrated mid-frequency (~400 kHz) 6 kW generator. It provides flexibility and control of a wide range of reactive plasma chemistries at a number of critical points within the process stream. The Rapid F 6kW plasma source is inductively-coupled, with a closed-path, water-cooled metal manifold in which induced plasma currents act as a single-turn secondary to a ferrite-core transformer.
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Rapid™ F 6 kW Remote Plasma Source
Controls, Indicators, and
Interfaces
The Rapid F 6 kW plasma source provides two communication interfaces, the user
(Analog Control) port and the serial AE Bus (RS-232) port. You can also use AE’s
Virtual Front Panel (VFP) software interface to communicate with the unit. For more
information about VFP, see “Virtual Front Panel (VFP) Software Interface” on page 4-20.
The Rapid F 6 kW plasma source also has a passive front panel display with several
LEDs and a display panel. For more information, see “Indicators” on page 4-22.
USER (ANALOG CONTROL) PORT
On the unit, this connector is labeled Analog Control.
The following section provides the connector type, cabling requirements, signal characteristics, pin descriptions, and wiring diagrams for the Rapid F 6 kW plasma source’s user (Analog Control) port.
The unit’s 25-pin user (Analog Control) port provides analog and digital signals to remotely control and monitor the Rapid F 6 kW plasma source. It uses a 25-pin, shielded, male, subminiature-D connector.
4
Figure 4-1. User (Analog Control) port connector
Interface Cabling Requirements
The cable used to connect the unit’s 25-pin user (Analog Control) port to the system controller must be a shielded, 25-wire I/O cable. Twisted-pair wiring may be used but is not mandatory. Signal losses should be minimized by keeping the cable length as short as possible. The maximum recommended cable length between the Rapid F 6
5707038-C Controls, Indicators, and Interfaces 4-1
Advanced Energy
® kW plasma source and the controller is 10 meters (33´). To minimize interference from adjacent electrical equipment, the EMI shield in the cable should be terminated to ground at the plasma source end of the cable. Additionally, the chassis of the Rapid
F 6 kW plasma source must be tied to a local earth ground through a copper grounding strap that is sized in accordance with applicable requirements (local electrical code).
Signal Characteristics
Table 4-1 provides remote interface connector signal types.
Table 4-1. Remote interface connector signal types
Signal Type
Analog
Digital
Grounds
Description
Unless otherwise specified, all analog signals are 0 to 10 V.
Unless otherwise specified, all digital signals are 5 to 24 V, opto-coupled (open-collector signals with return lines nonreferenced to ground).
All ground lines are to chassis ground.
Pin Descriptions
Table 4-2 provides the connector pin descriptions for the user (Analog Control) port
interface.
Table 4-2. User (Analog Control) port pin descriptions
Signal
Pin
1
Related
Pin
Name
GROUND
Signal
Type
Analog output common
Description
2
3
4
18
PLASMA ON
ENABLE RETURN
RF POWER SET
POINT RETURN
Digital return
Analog output return
This pin is the return for all analog output lines. It is connected internally to pins 5 and 14 and the internal (chassis) ground of the unit.
This pin is the return for the
+24 VDC PLASMA ON
ENABLE signal (pin 4). See
This pin is the return for the RF
POWER SET POINT signal.
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Rapid™ F 6 kW Remote Plasma Source
9
10
11
12
13
6
7
8
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
4
Related
Pin
2
Name
PLASMA ON
ENABLE
Signal
Type
Digital input
Description
When a positive voltage of
+24 VDC is applied to this pin with respect to pin 2, the RF power to the plasma source module is enabled.
Note: The user must provide the
+24 Vdc. The current flow between pins 4 and 2 must be <30 mA.
5
GROUND
Analog output return
This pin is a return for analog outputs. This pin is connected to pins 1 and 14 and the internal
(chassis) ground of the unit. See
25
Not used
Not used
Not used
Not used
Not used
Not used
Not used
INTERLOCK
Interlock loop
14
ANALOG GROUND
Analog output common
This pin, when connected externally to pin 25, closes the interlock. Closure of the interlock enables the unit’s AC input power contactor. See
Note: RF power will not come on until the plasma on
enable command is given
(pin 4).
This pin is the return for all analog output lines. It is connected internally to pins 1 and 5 and internal (chassis) ground of the unit.
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®
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
15
Related
Pin
20
READY
Name Signal
Type
Digital output
Description
When the Rapid F 6 kW plasma source is successfully interlocked and AC power is ready, a low impedance is established between this pin and pin 20 (+24 V return).
16 20
PLASMA ON
Digital output
• low = true
• high = false
When a plasma exists within the source, a low impedance is established between this pin and pin 20 (+24 V return).
17
18
19
20
20
3
1, 5, or
14
17
FAULT
RF POWER SET
POINT
RF DELIVERED
POWER
+24 V RETURN
Digital output
Analog input
Analog output
Digital common
• low = true
• high = false
When an error code is displayed, a low impedance is established between this pin and pin 20 (+ 24
V return).
• low = true
• high = false
A 0 to 10 V signal applied to this pin linearly controls the RF power level requested by the user. 10 V = max rated output.
This 0 to 10 V signal provides a linearly-scaled readback of the power delivered into the internal plasma load. 10 V = max rated output.
This pin is the return for pins 15,
16, and 17.
21 Not used
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Rapid™ F 6 kW Remote Plasma Source
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
22
23
24
25
Related
Pin
13
Name
Not used
Not used
Not used
INTERLOCK
RETURN
Signal
Type
Interlock loop
Description
See pin 13.
User (Analog Control) Port Wiring Diagrams
Use these wiring diagrams in conjunction with the pin description in Table 4-2 to
interface the unit to your system controller. Each wiring diagram is divided with a dashed line into two sections:
• The left side of the dashed line (User) shows the necessary external connections.
• The right side of the dashed line (Unit) represents the Rapid F 6 kW plasma source’s internal circuitry.
Figure 4-2. Plasma on enable (pins 4 and 2)
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®
Figure 4-3. Interlock (pins 13 and 25)
Figure 4-4. Ready (pins 15 and 20)
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Rapid™ F 6 kW Remote Plasma Source
Figure 4-5. Plasma on (pins 16 and 20)
Figure 4-6. Fault (pins 17 and 20)
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Figure 4-7. RF power/set point (pins 18 and 3)
4-8
Figure 4-8. RF delivered power (pins 19 and 5)
Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
AE BUS HOST (RS-232) PORT
On the Rapid F 6 kW plasma source, this port is labeled RS232. The AE Bus (RS-
232) port uses a 9-pin, female, shielded, subminiature-D connector.
5707038-C
Figure 4-9. AE Bus (RS-232) port connector
The AE Bus (RS-232) port uses an RS-232 signal format and AE Bus communication
protocol. See “Communicating Through the AE Bus (RS-232) Port” on page 4-10 for
further details on the communications protocol. AE can also provide simple command host software.
The signals available at the AE Bus (RS-232) port conform to the RS-232 interface standards. The Rapid F 6 kW plasma source has an nonadjustable, factory-set baud rate of 19.2 kB.
Table 4-3. AE Bus (RS-232) port pin descriptions
Signal
Pin
Name Description
4
5
6
1
2
3
RESERVED
TXD
RXD
RESERVED
COM
RESERVED
Reserved for future use
RS-232 transmit data
RS-232 receive data
Reserved for future use
Data Common
Reserved for future use
7
8
9
*
RESERVED
RESERVED
Reserved for future use
Reserved for future use
RESERVED-(FACTORY)
Reserved for future use
Note: *Do not ground this factory reserved pin. Grounding this pin will disrupt the operation of the unit.
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®
Communicating Through the AE Bus (RS-232) Port
You can control the Rapid F 6 kW plasma source through the AE Bus (RS-232) port.
The AE Bus (RS-232) port on your Rapid F 6 kW plasma source uses the AE Bus communications protocol. The AE Bus communications protocol uses pure binary data. The transmission parameters are as follows:
• Odd parity
• One start bit, eight data bits, one stop bit
Low-order bytes (of the Data field) are transmitted before high-order bytes.
Two types of information are sent over the RS-232 link:
• Message packet
• Single byte packet (NAK or ACK)
WHAT IS THE MESSAGE PACKET?
The AE Bus message packet combines chunks of information in such a way that much information can be sent over communication lines at one time. Each packet contains four, or possibly five, types of information or “fields”:
• Header (contains the unit’s address and the length of Data field)
• Command
• Optional (supplements the Header field)
• Data (contains parameter setting or status, Command Status Response (CSR), or nothing)
• Checksum (aids in error checking)
Figure 4-10 shows the organization of these data fields in the AE Bus message packet.
The subsequent paragraphs describe each data field.
Command
0-FFh
Data (0-255 bytes)
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
Header
5-bit address
3-bit length
Optional
Figure 4-10. Graphic representation of a message packet
Checksum
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Rapid™ F 6 kW Remote Plasma Source
5707038-C
Header
This field contains two pieces of information: the first five bits contain the address, factory preset to 1, and the last three bits contain the length of the Data field. If the message packet originates with the host computer (master), the address specifies the packet's destination (to a Rapid F 6 kW plasma source, for example). If the packet is going to the host, the address specifies the packet's origin (from the Rapid F 6 kW plasma source). The address section of the Header field is five bits long (bits 3-7), which allows a total of 32 distinct addresses. Address 0 (zero) is reserved for the network broadcast address; when this address is used in a host-originated packet, all units receive the packet (but will not respond).
The remaining three bits (bits 0,1, and 2) tell the receiving unit how long the Data field is so that the unit can determine when the entire message has been received.
Note: The value in these bits should refer only to the number of actual data bytes. Do not include the checksum byte when calculating the value for these bits.
The header field (address and length) must be at the beginning of the message packet so that the receiving unit can compute the length of the packet after receiving the first byte.
Optional
This field exists to supplement the header field. The optional field contains a value only when the length bits in the header field contain a value of 7. (A value of 7 indicates that the data field contains more than 6 bytes of data.) Under those circumstances, the optional field contains a one-byte value (between 7 and 255) indicating the actual length of the data field.
Command
This field contains a one-byte value: 00h to FFh (0 to 255). If the message packet originates with the host computer, this value specifies the purpose of the message packet. If the message originates with the Rapid F 6 kW plasma source, the value
specifies the command to which it is responding. See Table 4-5 for a complete list of
host commands.
Data (Data Bytes)
The Data field can contain from 0 to 255 bytes of binary data, which are interpreted in various ways, depending on the value that appears in the command field. The data field typically contains data or a CSR, depending on what was requested. Since some commands do not require data, sometimes the data field contains no value.
If the value specified in the length bits of the header field is 0 to 6, the Rapid F 6 kW plasma source expects 0 to 6 bytes of data. However, if the value in the header field is
7, the Rapid F 6 kW plasma source looks for an additional eight-bit byte after the command field (the optional field) and expects 7 to 255 bytes of data (as specified by the optional field).
Controls, Indicators, and Interfaces 4-11
Advanced Energy
®
Host
Checksum
This one-byte field is the last one in the packet. The content depends on the value of each of the preceding fields. The transmitting unit determines this value by accumulating the XOR (exclusive-or) of all bytes of the packet up to, but not including, the checksum value. The receiving unit accumulates the XOR of all bytes of the packet, including the checksum. If the result is zero, the packet has likely been received intact.
Only after the checksum of a message packet is validated will the Rapid F 6 kW plasma source act on the message (which consists of the contents of the command, and if appropriate, the data fields).
IDEAL COMMUNICATIONS TRANSACTION
Figure 4-11 is a simplified graphic showing the steps in an ideal communications
transaction between a host computer and an Rapid F 6 kW plasma source.
Rapid F 6 kW
4-12
Figure 4-11. Communications transaction
First, the host computer sends a message packet to the Rapid F 6 kW plasma source.
The packet contains one of the following:
• A command that requests data or status information
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Rapid™ F 6 kW Remote Plasma Source
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• A command and data that change a parameter setting
• An executable command
The Rapid F 6 kW plasma source analyzes the checksum to verify that the message was received correctly.
If the address is incorrect (that is, if the message was not intended for the Rapid F 6 kW plasma source that received it), the unit does not respond to the host; the unit resets and resumes waiting for a message addressed to it. If the sum of the bytes in the packet (including the checksum) is not zero, the Rapid F 6 kW plasma source sends a negative acknowledgment (NAK) with a hex code of 15h to the host. If the message is intact, the unit sends an acknowledgment ACK with a hex code of 06h to the host.
If the Rapid F 6 kW plasma source receives a request for data or status information, it gathers and sends the requested information. Otherwise, it evaluates the incoming command and sends a message-packet that contains a 1-byte data value (CSR code) to the host (see “Command Status Response (CSR) Codes” that follow). CSR code 0 is sent when the command has been accepted.
If the host receives a NAK from the unit, the host either re-transmits the packet or does whatever else it has been programmed to do in this situation. If the host receives an ACK, it waits for the requested data or status information or for the CSR code telling it whether or not the new parameter was accepted. If the host receives no response within a reasonable period (usually 1 s), it takes whatever action it has been programmed to take.
Meanwhile, the unit has prepared a message packet with the requested information or appropriate CSR code, which it then transmits to the host. The host determines by means of the checksum if the message is complete. If the host detects an error in the transmission (by using the Checksum), it can request the packet be sent again by transmitting a NAK.
If the unit receives an ACK, it returns to the normal waiting state. If the unit receives a
NAK, it re-transmits the message packet. The unit continues to re-transmit in response to NAK transmissions until the host stops the cycle. If the unit receives no response, it assumes an ACK and returns to the waiting state.
COMMAND STATUS RESPONSE (CSR) CODES
When the Rapid F 6 kW plasma source sends a Command Status Response (CSR) code in response to a command, interpret the CSR (a one-byte response) code as
Table 4-4. CSR Codes
Value
0 Command accepted.
Meaning
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®
Table 4-4. CSR Codes
1
2
3
4
7
9
99
Command not accepted because the control mode is incorrect.
Command not accepted because the output is on.
Command not accepted because the output is off.
Command not accepted because it specifies a value that exceeds the limit for that parameter.
Command not accepted because one or more faults are active.
Command not accepted because the command’s data byte count is incorrect.
Command not implemented
AE BUS COMMAND SET
The following section describes the AE Bus commands used with the Rapid F 6 kW plasma source’s AE Bus (RS-232) port.
Table 4-5. AE Bus Commands
Command
1
RF off
2
RF on
8 set point
14 control transfer
Description
Requests RF output off; request is always honored regardless of which interface has control.
Requests RF output on; host control must have been selected.
Specifies the output set point level. Accepts a value of 0 to 6000 W.
Sets the active control mode of the Rapid F 6 kW plasma source (2 = AE Bus (RS-232) port, 4 = user (Analog Control) port).
(Read back with command 155)
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
1
0
2 data bytes
16-bit value
1 data byte
8-bit value
1
1
1
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Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command Description
39 set host heartbeat timeout
40
AE Bus (RS-
232) port timeout value
128 supply type
129 supply size
130 read mainframe software version number
Sets the time allowed between packets in milliseconds for the AE Bus (RS-232) port. If the unit receives no communication packets from the host computer for longer than this period, it disables output. Send a value of 0 to
65535 (0 disables the feature), representing milliseconds. The timer resolution is 100 ms; any portion of 100 ms will be truncated. This value defaults to zero on power-up.
• Set byte 1 = 1
• Bytes 2 and 3 set the heartbeat timeout value (LSB first).
Read back with command 139.
Sets the AE Bus (RS-232) port timeout value.
Accepts a value of 2 to 500, representing 0.02 to 5.0 s. Default = 0.5 s upon power up.
Requests the Rapid F 6 kW plasma source type; returning packet contains 4 ASCII characters (e.g. “IICP”).
Requests the output capacity of the Rapid F 6 kW plasma source; returning packet contains
6 ASCII characters.
Requests the version number of the mainframe software. The returning packet contains 7 ASCII characters—a 7-digit number. This command is used in conjunction with command 198 to obtain the version/ revision number of the mainframe software.
Number of
Host Data
Bytes
3 data bytes
One 8-bit value
One 16-bit value (LSB first)
Number of
Response
Data Bytes
1
(CSR only)
2 data bytes
16-bit value
0
0
0
1
4 data bytes
4 ASCII characters
6 data bytes
6 ASCII characters
7 data bytes
7 ASCII characters
5707038-C Controls, Indicators, and Interfaces 4-15
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Table 4-5. AE Bus Commands (Continued)
Command Description
139 report Host heartbeat timeout
Reports the time allowed between packets in milliseconds for the AE Bus (RS-232) port.
Reports values of 0 to 65535, representing milliseconds (0 indicates that the feature is disabled). The timer resolution is 100 ms, so any portion of 100 ms will be truncated. This value defaults to zero on power-up.
Send one data byte set with a value of 1.
Returns 2 data bytes indicating the timer setting, in milliseconds.
Set with command 39.
Requests the serial Host port timeout value, from 002 to 500, representing 0.02 to 5.00 seconds.
140 report Host timeout value
147 report output frequency
155 report control mode
Requests the output frequency of the unit in hertz. Returns 4 data bytes.
Requests control mode setting. Returns 1 data byte:
• 2 = AE Bus (RS-232) port
• 4 = user (Analog Control) port
Set with command 14.
Number of
Host Data
Bytes
1 data byte
8-bit value
Number of
Response
Data Bytes
2 data bytes
16-bit value
(LSB first)
0
0
0
2 data bytes
16-bit value
4 data bytes
64 bit value
LSB first
1 data byte
8-bit value
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Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command
162 report process status
5707038-C
Description
Requests report on process status; returning packet contains 4 data bytes.
• First status byte:
4 0 = Output power is on
4 1 = Output power is requested
4 2 = Output is at set point
4 3 = Supply is ready for use (no fault conditions)
4 4 = Interlock satisfied
4 5 = Overtemperature fault active
4 6 = Output on is disabled (held active by faults and output on requested)
4 7 = Bus over-voltage fault active
• Second status byte:
4 0 = Bus under-voltage fault active
4 1 = No plasma timeout fault active
4 2 = Plasma is on
4 3 = Overtemperature fault defeated
4 4 = No plasma time-out fault defeated
4 5 = Ignition voltage enabled
4 6 = Self-test enabled
4 7 = Self-test error
• Third status byte:
4 0 = Ignition signal defeated
4 1 = Bus undervoltage defeated
4 2 = Fan fault
4 3 = Fan fault defeated
4 4 = Unassigned
4 5 = Load out of range fault
4 6 = Load out of range fault defeated
4 7 = Com heartbeat time-out fault
• Fourth status byte:
4 0 = Duty cycle fault
4 1 = Current limit time-out fault
4 2 = Plasma wink-out fault
4 3 through 7 = unassigned
Controls, Indicators, and Interfaces
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
4 data bytes
8-bit values
4-17
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Table 4-5. AE Bus Commands (Continued)
Command Description
164 read set point/ regulation mode
Requests output set point level (set with command 8) and method of output regulation.
• First and second bytes = set point value
• Third byte = output regulation mode
Note: This byte always returns the same value (6). Conventional terms for power regulation have no meaning in this integrated power supply/plasma source.
Requests a snapshot of load power level.
167 read delivered power
198 read mainframe software revision level
Requests the revision level of the mainframe software. The returning packet contains three
ASCII characters—one letter, followed by a two-digit number. This command is used in conjunction with command 130 to obtain the version/revision of the mainframe software.
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
3 data bytes
16-bit value
8-bit value
0
0
2 data bytes
16-bit value
3 data bytes
3 ASCII characters
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Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command
212 report last nonzero error code
Description
Requests the last non-zero error code that
occurred. (See Table 6-1 on page 6-4 for error
codes.)
Note: The unit does not save this information when it powers off.
Returning values:
• 1 = Unassigned
• 2 = Unassigned
• 3 = Thermal limit exceeded
• 4 = Fan fault
• 5 = Bus undervoltage fault
• 6 = Bus over-voltage fault
• 7 = Plasma ignition timeout error
• 11 = Heartbeat time-out error
• 16 = Ambient thermistor error
• 19 = Ambient temperature too high
• 20 = Duty cycle fault
• 21 = Current limit time-out fault
• 24 = Plasma wink-out fault
Number of
Host Data
Bytes
1 data byte
8-bit value
Number of
Response
Data Bytes
4 data byte
32-bit value
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Table 4-5. AE Bus Commands (Continued)
Command
220 report statistical data
Description
Requests operational and cycle statistics recorded by unit.
Note: The unit saves this information in nonvolatile memory.
Send one data byte indicating the desired statistic
• 0 = Number of ignition cycles
• 1 = Minutes of AC on time
• 2 = Minutes of output on time
• 3 = Number of overtemperature faults
• 4 = Number of duty cycle faults
• 5 = Number of bus high faults
• 6 = Number of bus low faults
• 7 = Number of no ignition faults
• 8 = Number of heartbeat time-out faults
• 9 = Number of fan faults
• 10 = Number of current limit time-out faults
• 11 = Number of ambient thermistor faults
• 12 = Number of high ambient temperature faults
• 13 = Number of plasma lost faults
Returns 4 bytes, representing the value of the statistic.
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
4 data bytes
32-bit value
(LSB first)
VIRTUAL FRONT PANEL (VFP) SOFTWARE
INTERFACE
AE manufactures Virtual Front Panel (VFP), a software application that provides an easy way to communicate with a Rapid F 6 kW plasma source from a personal computer. VFP communicates with the unit through the AE Bus interface. It allows you to set unit operating parameters, turn RF output on and off, troubleshoot the unit
4-20 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source through fault status indicators, fingerprint new chamber set up, as well as build and optimize process settings. The following illustration shows an example of a VFP interface.
5707038-C
VFP software includes the following functions:
• Establish communication with a Rapid F 6 kW plasma source (through the AE
Bus interface on the plasma source)
• Change the control mode between VFP and the plasma source Analog Control port
• Set or change the unit set point within the operating range of the unit
• Turn RF output on and off
• Monitor multiple plasma source operating parameters at rates up to 100 ms; parameters that can be monitored include: connection status, set point, delivered power, frequency, voltage, current, plasma status, and fault status
Note: VFP allows you to monitor some of these parameters in both numerical format and on a line graph that charts the parameter over time.
• Log operational data for the plasma source including: time, delivered power, set point, frequency, voltage, current, and unit status
To order Rapid VFP or to receive a free, time-limited evaluation copy of the software,
contact AE. See “AE Global Customer Support” on page 6-10 for contact
information.)
Note: The documentation included with the software provides complete instructions for using the software to control and monitor a Rapid F 6 kW plasma source.
Controls, Indicators, and Interfaces 4-21
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®
INDICATORS
The front panel of the Rapid F 6 kW plasma source has a digital display and LEDs that indicate the unit’s status. The digital display provides an alphanumeric indication of delivered plasma power in kilowatts and registers error codes when faults occur. (See
Table 6-1 on page 6-4 for error codes and their descriptions). Five status LEDs allow
you to check the source’s status, verify its operation, and troubleshoot problems.
Table 4-6 provides detailed descriptions of the status LEDs and display.
Table 4-6. Indicators and displays
Indicator
AC POWER
Description
When lit, this green LED indicates that the AC mains contactor and the interlock loop are closed and thus AC power is available within the generator.
RF POWER
When off, this LED indicates that no AC power is being supplied to the power supply. However, power is still available and stored in the system.
When lit, this green LED indicates that the RF power enable state is satisfied and that RF power is being applied to the primary windings of the inductively-coupled plasma source.
When off, this LED indicates that no power is being supplied to the primary windings of the plasma source.
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Table 4-6. Indicators and displays (Continued)
Indicator
PLASMA
Description
This green LED has three modes of operation:
INTERLOCK
• Off: Indicates that no plasma is present because RF power is not being supplied.
• Continuous (solid): Indicates that RF power is being coupled to the plasma and that the supply is meeting the desired set point.
• Flashing: Indicates that the supply is unable to reach the desired set point.
4 The power supply is responding to a recent change in gas composition or pressure and is attempting to level power.
4 The plasma has failed to ignite (soon to be followed by
a fault and “E07” error; see Table 6-1 on page 6-4)
4 The plasma ignited, but then went out (unit will display
a E24 fault); see E24 in Table 6-1 on page 6-4 for more
information
4 The plasma body is too conductive and the supply is at its current limit as typically seen in high power Ar
discharges or low pressure discharges. See “Appendix
4 The plasma body is too resistive and the supply is at its voltage limit.
When lit, this green LED indicates that the user interlock condition is satisfied through the user (Analog Control) port.
This interlock should be tied to the vacuum status and the cooling water flow status to the unit.
When off, this LED indicates that the user interlock state has not been satisfied on the user (Analog Control) port.
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Table 4-6. Indicators and displays (Continued)
Indicator
FAULT
Description
When lit, this yellow LED indicates that a fault has occurred.
When a fault occurs, the RF power enable state is overridden and the RF POWER and PLASMA status indicators turn off, signifying that no RF power is being applied to the plasma source. The fault is accompanied by an error code displayed on
the digital readout. (See Table 6-1 on page 6-4 for error code
information.)
DISPLAY
Note: AC power is still active in the device even after a fault has registered.
This three digit (seven segment) alphanumeric display is used to display error codes (EXX) and the immediate power being delivered to the plasma load in kilowatts (X.XX). For more
information on the error codes, see Table 6-1 on page 6-4.
4-24 Controls, Indicators, and Interfaces 5707038-C
UNIT ILLUSTRATIONS
Front View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-12. Front view
Controls, Indicators, and Interfaces 4-25
Advanced Energy
®
Left Side View
4-26
Figure 4-13. Left side view
Controls, Indicators, and Interfaces 5707038-C
Right Side View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-14. Right side view
Controls, Indicators, and Interfaces 4-27
Advanced Energy
®
Top View
4-28
Figure 4-15. Top view
Controls, Indicators, and Interfaces 5707038-C
Bottom View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-16. Bottom view
Controls, Indicators, and Interfaces 4-29
Advanced Energy
®
4-30 Controls, Indicators, and Interfaces 5707038-C

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Key features
- Compact and easy-to-mount
- Inductively-coupled
- Closed-path, water-cooled metal manifold
- Integrated mid-frequency (~400 kHz) 6 kW generator
- Provides flexibility and control of a wide range of reactive plasma chemistries
- 25-pin user (Analog Control) port
- 9-pin AE Bus (RS-232) port
- Internal AC line filter
- User-interlocked contactor