Installation, Setup, and Operation. Advanced Energy Rapid F 6kW
The Rapid F 6kW Remote Plasma Source is a compact and easy-to-mount system that provides flexibility and control of a wide range of reactive plasma chemistries. It is inductively coupled, with a closed-path, water-cooled metal manifold in which induced plasma currents act as a single-turn secondary to a ferrite-core transformer. This versatile unit is capable of providing power to plasmas over a wide range of flows and pressures.
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Rapid™ F 6 kW Remote Plasma Source
Installation, Setup, and
Operation
This chapter includes information about making connections to the unit, and provides steps for first time as well as normal operation.
INSTALLING
The following sections will aid you in installing your Rapid F 6 kW plasma source.
5
RISK OF DEATH OR BODILY INJURY
Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.
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Operating and maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment. Ensure that all appropriate safety precautions are taken.
Occasionally, a temporary conductivity caused by condensation occurs when the device is not operating. Operate only in noncondensing environments.
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Advanced Energy
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Unpacking
Unpack and inspect the unit carefully. Check for obvious physical damage. If none is apparent, proceed with the unit connections. If you do see signs of shipping damage, contact Advanced Energy Industries, Inc., and the carrier immediately. Save the shipping container for submitting necessary claims to the carrier.
Grounding
Do not attempt to turn on power until the chassis of the Rapid F 6 kW plasma source is tied to a local earth ground through a copper grounding strap that is sized in accordance with applicable requirements.
A suitable chassis ground connection made to the RFI ground stud (1/4 - 20 brass) on the front panel below the AC power input connection prevents or minimizes radio
frequency interference. See Figure 5-1 on page 5-3 for the location of the ground stud.
Spacing Requirements
Refer to Figure 5-1 on page 5-3 for unit dimensions. The fan exhaust grill at the rear
of the unit and all air vents require at least 1.9 cm (0.75") clearance for proper ventilation.
5-2 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
RFI ground stud
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Figure 5-1. Dimensions
Installation, Setup, and Operation 5-3
Advanced Energy
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Before Installing
Read the following recommendations and requirements before attempting to install the unit:
• Process gas flows must be shut off, disconnected, and disabled (lockout/tagout procedures are strongly recommended), and the source must be purged of all process gasses before working on this device or anything connected to it.
• Gas plumbing must be installed in accordance with applicable safety and environmental requirements.
• The Rapid F 6 kW plasma source requires the following standard vacuum connection for input and output gasses:
4 ISO KF 40 Flange (x2)
4 ISO KF 40 Centering Ring Assembly (x2)
4 ISO KF 40 split-ring bulkhead clamps (x2)
4 10-32 x 5/8" long stainless-steel screws and washers (x12)
• The following vacuum equipment is recommended for operation between 500 mT and 10 Torr:
4 A capacitance manometer vacuum pressure gauge rated for at least 10 Torr
4 An Ar flow controller rated for about 1.4 slpm
4 An NF
3
flow controller rated for about 2.5 slpm
4 An O
2
flow controller rated for about 1.0 slpm
4 A pumping system rated for 10 to 100 liter/second (effective pumping speed at the output of the process chamber or near a the throttle valve before the foreline of the pumping system)
4 A throttle valve with either integrated or manual control
Mounting the Unit
After unpacking the Rapid F 6 kW plasma source, prepare it for mounting by removing the protective end caps from the input and output flanges in a dust-free environment. Keep the end flanges free of dust and grease and use powder-free cleanroom gloves when handling the vacuum fittings.
The unit is designed to operate in any physical orientation (see Figure 2-2 on page 2-3
for typical installation). It is mounted to the top of the source assembly and shares its thermal management with the vacuum housing. Use the 1/4"-20 mounting fittings on
5-4 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source each face of the unit when installing. Use only 1/4-20 x 1/2 long stainless-steel or brass hardware to prevent deep intrusion of the mounting hardware into the source’s chassis.
Note: Use only ASM #326 O-rings for mounting the unit to existing vacuum hardware.
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Advanced Energy
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See Figure 5-2 for the location of the unit’s mounting holes.
5-6
Figure 5-2. Right side mounting holes
Note: These holes are intended for mounting the Rapid F 6 kW plasma source to your system. Do not use these assembly holes to mount additional hardware not associated with the product.
Note: Though the unit is operational in a variety of orientations, do not cantilever the source such that the full weight and torque of the unit is solely supported from
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source the ISO KF 40 fitting on either its input or output connection. The #10-32 screws used for the split flange fittings are insufficient to hold the weight and torque of the assembly. If the source must sit in a cantilevered orientation, it is possible to mount the source in an upright and vertical position on its bottom- side ISO KF 40 fitting with a user provided fixture. If the unit is oriented vertically, it is possible to support the full weight of the unit on the exit flange of the source.
Vacuum Connections
Interlock the Rapid F 6 kW plasma source operation against minimal water flow requirements and recommended peak vacuum pressure levels. Failure to do so could damage polymeric cooling lines or cause internal damage to the unit if operated at near atmospheric pressures.
Note: The Rapid F 6 kW plasma source has no water flow switch or pressure switch for internal interlocks or protection. It is the responsibility of the user to provide protection for water flow, operating pressure, and gas chemistry.
To avoid getting water in the source chamber, prepare and complete all vacuum connections prior to making water cooling connections.
The source has two ISO KF 40 vacuum connections for input and output gases.
1. Inspect the input and output ISO KF 40 flanges for scratches, dust, or debris before mounting. Do not allow any dust or foreign objects to enter the source’s vacuum interior during installation. If necessary, the sealing surfaces of the endflange fittings may be cleaned with isopropyl alcohol and lint-free clean wipes.
2. Once the Rapid F 6 kW plasma source is mounted and the vacuum connections
are sealed, vacuum pressure may be applied. (See “Troubleshooting and Global
Support” on page 6-1 if you suspect any significant vacuum leaks as a result of the
installation of the unit).
Note: When used for the first time, the source requires longer pumping time due to outgassing.
Connecting Cooling Water
The following section contains information on connecting cooling water to the Rapid
F 6 kW plasma source.
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Advanced Energy
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Interlock unit operation against minimal water flow requirements and recommended peak vacuum pressure levels. Failure to do so could damage polymeric cooling lines or cause internal damage to the unit if operated at near atmospheric pressures.
Because of the high volume of cooling water recommended, use the source only in a noncondensing environment. Condensing water vapor within the device can damage the unit.
Specifications” on page 3-5 for permissible range of water conductivity.)
Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds.
5-8
Avoid electrically conductive cooling water (such as salty or rusty water), which can compromise the isolation of electrically active components.
The Rapid F 6 kW plasma source is primarily water cooled, though internal fans assist the thermal management of the unit. To avoid getting water into the vacuum housing of the source, ensure that vacuum connections are made before making water connections. Do not operate the unit until water connections are made and cooling flow requirements are met. The Rapid F 6 kW plasma source requires two male SAE
The unit has no water flow interlock. While the source can protect itself and will register an over-temperature fault in the event of loosing adequate cooling water, it is strongly recommended that you provide a flow-switch interlock. Be certain to flow water in the correct direction to ensure the maximum available thermal protection and
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source range of operation in your installation and application. Do not allow water flow to drop below recommended levels or to exceed the maximum allowable water temperature.
The following steps explain how to connect cooling water lines to the unit.
1. Connect the input and output water fittings and tighten securely.
2. Turn on the water and verify that there are no leaks at the connections.
3. Check that the flow rate and input water temperature are within the specified
range (see “Cooling Specifications” on page 3-4) before operating the unit.
Note: Keep the cooling water flowing through the unit even when RF power is disabled, especially during cycled operation.
Connecting AC Input Power
The following section provides information on connecting AC power to the Remote
Power Source.
This device must be installed so that the input power connection is inaccessible to the user.
To provide the required over-current protection, you must install and operate this device with a 35 A (max) circuit breaker switch on the AC input. The circuit breaker must be easily accessible and near the device.
Do not connect any power to this unit without first connecting cooling water and ensuring there are no leaks.
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Supply wire must be approved to carry 35 A or greater and rated at least
300 Vac.
The unit has a 6", 6-pin, Harting Type, Han 6HSB, male, connector for AC input
power (See Figure 5-3.). The Rapid F 6 kW plasma source is phase insensitive.
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Advanced Energy
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Table 5-1 provides pin descriptions for the AC power connector.
4
5
6
1
2
3
Table 5-1. Pin descriptions
Pin Description
Phase
Phase
Phase
Not connected
Ground
Not connected
To connect to AC power, perform the following operations:
1. Remove the protective cover from the Harting connector by releasing the pressure-loaded side tabs. Save the cover in case the unit needs to be moved, stored, or shipped.
2. Ensure that the AC power circuit breaker to the connector is switched off (lockout and tagout procedures are strongly advised.). Connect a properly wired Harting female connector and lock it in place with the two pressure-loaded side tabs.
Note: Connect the unit to a balanced three phase AC line. Connection to an unbalanced line could negatively impact the dynamic performance of this device and its viable range of operation.
5-10
Figure 5-3. Input connector
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Connecting I/O and Auxiliary Connectors
On the Rapid F 6 kW plasma source, locate the user (Analog Control) port and secure a 25-pin, shielded, male, subminiature-D connector per the pin-out connections
described in Table 4-2 on page 4-2.
The AE Bus port is labeled RS-232. If required for your application, connect a 9-pin, female, shielded, sub-miniature-D connector to this port per the pin-out connections
described in Table 4-3 on page 4-9.
OPERATION
The following section provides information on protection and interlock, an overview of the Rapid F 6 kW plasma source’s operation, as well as instructions for first-time and normal use.
The Rapid F 6 kW plasma source has no chassis cover interlock. Do not attempt to operate the unit without the chassis cover properly affixed to the unit.
Interlock
The Rapid F 6 kW plasma source provides a system interlock through its 25-pin user
(Analog Control) port. When you close the interlock (pin 13 to pin 25), the AC power contactor is closed, making power available to the DC bus of the device’s switch mode power supply.
Plasma Source Operational Overview
The following section gives an overview of the Rapid F 6 kW plasma source’s operation.
Read all of the following instructions before proceeding with the initial operation of the Rapid F 6 kW plasma source.
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Advanced Energy
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This source was designed for ignition in pure Ar gas. Direct ignition in other gases could lead to unsuccessful start-up of the source or to damage or shortened lifetime of the anodized walls within the device.
Contact AE for range of operation for direct ignition in molecular gas mixtures.
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
The Rapid F 6 kW plasma source is designed to work with pure molecular gas mixtures; however, for ignition, the source requires an easily ionized noble gas such as argon (Ar). Thus, it is necessary to integrate the source’s operation with dynamic or sequential adjustment of gas flow, vacuum pressure, and power set point steps.
The test recipe described in “First Time Operation” illustrates the operation of the
source using Ar and O
2
. Use it during first-time operation to verify that the Rapid F 6 kW plasma source is installed and working properly.
Note: Very similar recipe steps can be adopted for operation in Ar with NF
3
or in Ar with O
2
:C x
F y
gas mixtures.
First Time Operation
The following procedures take you through the initial operation of the Rapid F 6 kW
plasma source. See Figure 2-2 on page 2-3 for a diagram of the installation used in the
test recipe.
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Rapid™ F 6 kW Remote Plasma Source
PROCEDURAL OVERVIEW
Figure 5-4 gives an overview of the test recipe.
Figure 5-4. Typical process sequence for normal operation
Power Up
!
!
Interlocked Idle State
!
!
User interlocks source with vacuum and cooling water flow.
Front panel response:
INTERLOCK LED: lit
AC POWER LED: lit
Source is ready to operate
Argon Gas Ignition
!
!
User supplies Ar gas with souce pressure of 0.2 to 1 Torr, sets power setpoint to >2 kW, and enables RF power.
Front panel response:
!
RF POWER LED: lit
If current readback is >1.0 A within 5 s, then ignition is successful and the PLASMA LED turns on.
!
!
!
Molecular Gas Addition/Transition
User adjusts power setpoint to desired level and introduces molecular gas to source with Ar discharge.
Front panel response:
!
RF POWER LED: lit
!
PLASMA LED: lit
Optional: After acheiving setpoint, remove Ar gas if not needed.
!
Process Run Time
User adjusts molecular gas mixture, pressure, and power setpoint as needed.
!
!
Source Off/Return to Idle State
User either turns off or resets gas flows and source power setpoint, returning the unit to idle state for next cycled operation.
Front panel response:
!
RF POWER LED: off
!
PLASMA LED: off
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5-14
PROCEDURE
Use the following steps to initially turn on and test the installation of the Rapid F 6 kW plasma source.
1. Ensure that you have installed the unit properly by following the preceding procedures.
2. Verify the vacuum integrity installation of the unit on the vacuum process chamber by examining base-pressure and leak-back pressure rates. Base vacuum pressures will depend upon your vacuum system capabilities.
3. Confirm that all power and control connections are secure.
4. Provide AC power to the unit. For approximately 60 s, the unit cycles through a front panel test sequence on the LEDs and alphanumeric display while the internal bus capacitors charge.
5. Close the connection between pins 13 and 25 on the user (Analog Control) port so that the unit is interlocked to cooling water flow and the working pressure.
Note: You must provide the sensing switches and logic for water flow and vacuum pressure.
6. Verify that the green INTERLOCK LED on the front panel is illuminated. After a brief delay, you will hear a click as the internal AC contactor closes. Shortly thereafter, the green AC POWER LED illuminates. The unit is now in its Idle-
Ready state.
7. Provide an Ar gas flow, establishing 0.2 to 1 Torr of pressure in the source.
Note: The use of long gas delivery lines, gas diffusers, diverters, or baffles could induce a pressure in the unit that is substantially higher than that measured in the vacuum process chamber.
Note: On first time installation, atmospheric air present in the gas lines may require several seconds of gas flow to purge.
8. Provide a set point of >2 to 4 kW (0 to 10 V full signal for 6 kW, user (Analog
Control) port pins 18 and 3).
Note: In order for ignition to occur, set point must be above 1 kW
9. Close the connection between pins 4 and 2 on the user (Analog Control) port to satisfy the RF enable condition. The green RF POWER LED on the front panel illuminates, and source responds in one of three ways:
Note: Code E21 may flash intermittently on the display screen during ignition.
This flashing does not indicate an error. Rather, it indicates that the unit has reached the current limit, which is normal during ignition. If the unit remains at the current limit for longer than 90 seconds, it will disable output and provide a steady display of E21 (not flashing) (for information
on resolving this condition, see Table 6-1 on page 6-4).
Installation, Setup, and Operation 5707038-C
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Rapid™ F 6 kW Remote Plasma Source
4 Ignition successful; power limited by user set point: the green PLASMA LED is illuminated continuously and the display reads the desired set point. (This limitation is bounded by the current limit of the power supply when attempting to power a highly conductive plasma load, as is often the case with high electron density Ar gas discharges.)
4 Ignition successful; power limited by current control limit of power supply: the green PLASMA LED flashes and the display reads between 2 and 3.5 kW.
(This limitation is bounded by the current limit of the power supply when attempting to power a highly conductive plasma load, as is often the case with high electron density Ar gas discharges.) This response occurs when the power to the plasma is limited to approximately 2.6 kW while your set point is >2.6 kW.
4 Ignition failure; Ar discharge did not ignite: the PLASMA LED is off and the front panel displays the “E07” (Ignition Fault) error code if this condition persists for more than 5 s. Reset the PLASMA ON ENABLE signal on the user
(Analog Control) port to clear the error. Return to step 7 and repeat with a
higher or a lower Ar pressure. See Table 6-1 on page 6-4 for more information
on error codes.
10. Increase the power set point to 4.5 to 6 kW while the Rapid F 6 kW plasma source is operating in pure Ar.
11. With the Ar still flowing, introduce O
2
into the process mix at an Ar:O
2
ratio of approximately 1.5:1 at a pressure of 1 to 2 Torr. (Alternatively you may use NF
3 at and Ar:NF
3
ratio of about 1:1.) One of two conditions will occur:
4 Transition to molecular gas mixture successful; power limited by user set
point: the green PLASMA LED is illuminated continuously. The power levels to within 200 W of your set point.
4 Transition to molecular gas mixture failure; loss of high power density
inductive mode: the power level displayed on the front panel drops below
1 kW, the green PLASMA LED turns off, and the front panel displays error code E24. Return to step 7 and repeat with a higher power set point or a lower vacuum pressure set point. (For more information on the E24 error code, see
Note: A sizable pressure burst could cause this failure. Check for any flow or high pressure overshoots due to under-damping of system flow controllers or throttle valves.
12. Optional Step: if your process does not require Ar dilution, you may choose to perform this step with first time operation. With a power set point of 5 to 6 kW, remove the Ar gas from the mixture. One of two conditions will occur.
4 Transition to a pure molecular gas mixture successful; power limited by user
set point: The green PLASMA LED is illuminated continuously. The delivered power should be within 200 W of your set point.
Installation, Setup, and Operation 5-15
Advanced Energy
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4 Transition to a pure molecular gas mixture failure; loss of high power density
inductive mode: the power level drops below 1 kW, the green PLASMA LED turns off, and the front panel displays error code E24. Return to step 7 and repeat with a higher power set point or a lower vacuum pressure set point. (For
more information on the E24 error code, see Table 6-1 on page 6-4.)
Normal Operation
The following section gives directions for the normal operation of the unit.
This unit is not intended for operation in chlorine bearing gases or any gases that may deposit insulating or conductive films. Examples of depositing gases include siloxanes, silanes, hydrocarbons, and any metal bearing precursor gas or vapor. Use of these gases could lead to damage of the internal vacuum housing of the unit.
This source was designed for ignition in pure Ar gas. Direct ignition in other gases could lead to unsuccessful start-up of the source or to damage or shortened lifetime of the anodized walls within the device.
Contact AE for range of operation for information on direct ignition in molecular gas mixtures.
5-16
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
Provided that the installation and first time operational tests are successful, normal operation should proceed per steps 7 through 14 in “First Time Operation.” However,
consult the following section, “Process Integration” before operation.
PROCESS INTEGRATION
The Ar:O
2
test recipe instructions and reference vacuum conditions should be treated as guidelines for typical dynamic operation. Because each vacuum system is configured for different pumping speeds and gas flow, you will need to develop your own process gas chemistry, pressure, flow, and transition steps. Provided that your flow controllers and vacuum hardware have satisfactory response times and relatively low dynamic pressure overshoot, the Rapid F 6 kW plasma source can be ignited and power-leveled for steady-state operation within a few seconds.
Installation, Setup, and Operation 5707038-C
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Rapid™ F 6 kW Remote Plasma Source
Current, voltage, and frequency limits are needed to protect the power supply. These electrical restrictions dictate the viable range of power and pressure for any given gas mixture. Though not all plasma and power conditions can be satisfied, the Rapid F 6 kW plasma source’s topology provides a compact means of delivering high power levels (6 kW) into a wide range of plasma conditions that would be more expensive and complicated with conventional segregated plasma source, matching network, and power supply approaches.
Note: See Appendix, “Selecting Gas Mixtures, Gas Pressures, and Power Levels” for
more information.
Note: Unless otherwise specified, AE does not warranty any process method or material composition results associated with the sale or application of this product.
Working Gas and Vapor Compatibility
The Rapid F 6 kW plasma source was designed for remote excitation and dissociation of reactive gas species in vacuum applications. The following guidelines apply to its application to plasma-based processes.
• This source was designed to ignite on Ar gas at pressure below ~1 Torr. Unless operated below 50 mT, Ar gas is generally recommended for reliable ignition of the source. (Other easily-ionizable noble gases may be used to ignite the source.)
• After ignition, the source may operate in either pure O
2
or NF
3
gases over a broad range of pressures. For example, the source may provide near-complete dissociation of NF3 gases at flows up to 2 Torr to 2.5 Torr at full power. The exact level of dissociation is a function of operating pressure and residence time of gases in the source. Higher pressure operation at a constant flow can provide more dissociation as the net residence time of the gas in the source is longer. However, the source and power supply have a finite viable plasma impedance range that will limit the pressure/flow range for stable operation with a given gas. Some attempts to increase the pressure range or apparent transport of reactive F species from the remote source to the chamber have been made by using Ar dilution of NF3. While
Ar dilutions can decrease the impedance of the plasma, such dilution does not change the viable plasma impedance range of the remote plasma source. For a
viable operating range of NF3 and NF3/Ar mixtures, see “Process Operating
• When the plasma is present in the unit, do not operate the device with depositing gases and vapors without a secondary oxidant or other gas additive that inhibits deposition within the source. For example, hydrocarbon and perfluorocarbon gases should be accompanied with appropriate level of O
2
or H
2
O.
• Depositing gases such as silane, siloxanes, silazanes, or any metal-bearing deposition precursors should never be disposed directly through the source.
Installation, Setup, and Operation 5-17
Advanced Energy
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• Gases that may be highly corrosive to the anodized aluminum walls of the vacuum chamber should never be disposed through the source. In particular, chlorinebearing gases should never be used.
Note: See “Process Operating Specifications” on page 3-6 for operational
specifications and working gases.
PREVENTIVE MAINTENANCE
Do not attempt to disassemble, re-work or perform repairs on the vacuum housing of the source, as it is integrated with the power supply.
Doing so could invalidate any warranty associated with this product or cause damage to the power supply or vacuum source components.
Note: There are no user-serviceable parts or components associated with this product.
Your Rapid F 6 kW plasma source has been designed to have minimal preventative maintenance that would require removing the source from its vacuum installation. For most applications that involve fluorine and oxygen bearing chemistries, deposits and wall contamination introduced by the process can be cleaned from the anodized aluminum walls by in-situ processes using other fluorine, hydrogen, or oxygen based gases or mixtures. Because the power supply and vacuum source are completely integrated into a single mechanical structure, you cannot disassemble and inspect the vacuum walls of the source assembly. As such, preventative maintenance is limited to inspection of the integrity of the source’s ISO KF 40 fittings and seals.
Note: An annual water pressure test at 19.5 bar (1950 kPa) for a duration of 1 minute is recommended.
5-18 Installation, Setup, and Operation 5707038-C

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Key features
- Compact and easy-to-mount
- Inductively-coupled
- Closed-path, water-cooled metal manifold
- Integrated mid-frequency (~400 kHz) 6 kW generator
- Provides flexibility and control of a wide range of reactive plasma chemistries
- 25-pin user (Analog Control) port
- 9-pin AE Bus (RS-232) port
- Internal AC line filter
- User-interlocked contactor