NC Linear Scale Systems

Digital Scale and DRO System

Linear Encoder

NC Linear Scale Systems

Catalog No. E13005

Linear Encoders for

Numerical Motion/Position Control System

Integrated Production System for...

The Utsunomiya Operations Kiyohara Production Department presents a complete manufacturing environment where linear encoders for Mitutoyo measuring equipment as well as linear scales for the general market are produced. The whole production process including the manufacturing of glass scales for linear encoders, assembly of electronic components and products, and inspection is performed here. Conditions are continuously being optimized for further enhanced scale accuracy and even higher quality. The underground research laboratory at the Kiyohara Production Department has been specially designed and constructed to provide the environment required for the high-level scale graduation process as well as for high-accuracy measurements.

Located on a solid bedrock foundation nine meters underground, the facility maintains a stable and tightly controlled environment all year round. Temperature and humidity fluctuations as well as external vibrations are kept to an absolute minimum. In this laboratory, we produce master scales, perform accuracy evaluation, and pursue various kinds of research that provide the underpinning for the accuracy and quality of our linear scales.

Sputtering equipment

Topsoil

Styrofoam insulation

Bituminous waterproofing

Concrete slabs

Space above dropped ceiling

Laboratory space

Vibration-proof foundation

Underground research facility

Linear Encoder Accuracy

Calibration Technology

To assure high accuracy in linear encoders, a highly reliable calibration system is indispensable. The ultra-precision length measuring machine developed by Mitutoyo and installed in the underground research facility at the Kiyohara Production Department benefits from the highly stable underground environment. In addition, the light path of the laser interferometer used to measure lengths is placed in a vacuum to further eliminate any causes of uncertainty. The result is a linear encoder calibration system of world-leading precision, internationally recognized by mutual interlaboratory comparisons. In recognition of the high technological standard realized by this system, it received the Best Paper Award of the Japan Society of Precision Engineering in 2004 and the FA Paper Award of the FANUC FA and Robot Foundation in 2005.

Ultra-precision length measuring machine with vacuum laser interferometer

1

NC Linear Scale Systems

Detection Principle —————————————————— 3, 4

Applications ————————————————————— 5, 6

NC Linear Scale Systems – System Diagram —————— 7

NC Linear Scale Systems – Overview —————————— 8

Separate Type ST Series

ST36 ———————————————————— 9–12

ST24 ——————————————————— 13–16

ST46-EZA ———————————————— 17–20

ST422 ———————————————————21, 22

Assembly Type AT Series

AT100 ———————————————————— 23–26

AT402E ————————————————— 27–30

AT211 —————————————————— 31–36

AT203 —————————————————— 37–40

Interface Unit

PSU-200 ————————————————— 41, 42

PSU-250 ————————————————— 43, 44

Absolute Scale Unit ———————————————— 45, 46

ABS ST700 Compact Type Series ——— 47–52

ABS AT500 Series (0.005μm)

——————— 53–60

ABS AT500 Series (0.05μm)

———————— 61–68

ABS AT500E Series ——————————— 69–76

ABS AT300 Series ———————————— 77–80

Discontinued models and succession models ————— 81 specification compatibility tables

Handling linear scales ——————————————— 82, 83

Technical Information —————————————— 84–86

Linear Scale is a registered trademark of Mitutoyo Corporation for its linear encoder products.

Linear Scales from Mitutoyo are traceable to national standards

National standard

National Institute of Advanced Industrial

Science and Technology

National Metrology Institute of Japan

Universal Time Coordinated atomic clock and optical frequency comb generator

Secondary standard

Mitutoyo Utsunomiya Calibration Center

(JCSS Accredited Calibration Laboratory No.0031)

633nm molecular iodine absorption line length measurement machine with wavelength stabilized He-Ne laser

Working standard

Mitutoyo Utsunomiya Operations

633nm length measurement machine with wavelength stabilized He-Ne laser

Length measuring machine with optical interferometer (for scales)

Instrumental error

Linear Scale

Linear Scale Traceability System Chart

2

NC Linear Scale Systems System Diagram Applications


Detection Principle

Detection principle of the transmission photoelectric scale

(Assembly Type Linear Scale)

Collimator lens

Glass scale

Scale gratings

(20µm graduation pitch)

Light-receiving device

Light-emitting diode

(LED)


(Photodiode array)

20µm

(Photodiode array)

2-phase sinusoidal signals

Interpolation circuit


(LED) Collimator lens Glass scale

Resolution

2-phase square wave signals

The assembly type linear scale uses a graduated glass scale as measuring length reference. A light-emitting diode

(LED) and light-receiving device mounted on opposite sides of the scale serve to detect produce and detect changes in light intensity and output a value representing the displacement magnitude. Because the change in transmitted light intensity of the glass scale is converted into an electrical signal, the setup is called a transmission photoelectric system.

A parallel light beam generated by the LED and collimator lens is directed through the scale gratings. A light-receiving device consisting of a photodiode array on the other side of the scale receives the parallel light beam and produces interference fringes with a cycle that corresponds to the scale grating pitch. When the glass scale is displaced in the measuring direction, the interference fringes shift, and a 2-phase sinusoidal signal with a cycle that corresponds to the

20μm pitch of the scale gratings is output by the light-receiving device.

An interpolation circuit electrically divides the output sinusoidal signal, resulting in a square wave (pulse) signal representing the limiting resolution.

Detection principle of the reflective photoelectric scale (ST36, etc.)


(LEDy)


(Photodiode array)

Main scale

Collimator lens

Index scale

The separate type photoelectric linear scale also uses a graduated glass scale as measuring length reference. An LED and light-receiving device together with gratings on an index scale produce and detect changes in light intensity and output a value representing the displacement magnitude. Because the change in reflected light intensity of the glass scale is converted into an electrical signal, the setup is called a reflective type photoelectric system.

A parallel light beam generated by the LED and collimator lens is directed onto the index scale gratings and the glass scale gratings. The light reflected from the scale gratings produces interference fringes on the photodiode array of the light-receiving device. When the glass scale is displaced in the measuring direction, the interference fringes shift, and a sinusoidal signal with a cycle that is the same as, or one-half of, the scale grating pitch is output by the light-receiving device.

3

Detection principle of electromagnetic induction system (ABS ST700)

Basic operation principle of electromagnetic induction system

Coil A

L

I

V

∼

Coil B

[Figure 1] Electromagnetic induction system encoder principle

When a current (I1) that changes over time is passed through coil A, a magnetic flux is created in the vicinity of coil A.

This causes an inductive current (I2) to flow in coil B, in a direction that cancels out the magnetic field.

Magnetic permeability between coils is largely identical in air, water, or oil.

Electromagnetic induction type sensor has excellent water resistance and oil resistance.

P

Voltage (V)

Exciter coil

L

2 2

I

Displacement

Scale coil

Displacement magnitude

Multi-track design allows configuration of absolute encoder

Coils arranged at constant pitch on scale

P

[Figure 2] Electromagnetic induction scale detection principle

Electromagnetic induction is a phenomenon that occurs, for example, when two coils are arranged facing each other, as shown in Figure 1, and a time-varying current (I1) is passed through coil A. This will cause an induced current (I2) to flow in coil B, in a direction that cancels out the magnetic field.

The electromagnetic induction type linear scale uses this phenomenon to convert a displacement magnitude into an electrical signal. The operational principle of the sensor section is shown in Figure 2. A number of scale coils are arranged with precise spacing on the main scale. The moveable sensor section that detects displacement carries an exciter coil and a corresponding detector coil. A current is sent through the exciter coil, thereby creating a magnetic flux that induces a current in the facing scale coil. The magnetic flux created in turn by that current induces a current in the facing detector coil. The degree of inductive coupling between the coils changes according to the displacement magnitude of the sensor section, allowing a sinusoidal signal with a cycle that corresponds to the pitch of the scale coils to be obtained.

By using an electrical circuit that performs interpolation

(division) of this sinusoidal signal, displacement can be measured with fine resolution.


4

Applications


Semiconductor fabrication equipment

Dicing saw positioning

AT Series - Reference

Lithography equipment

Scanning stage positioning

Linear scales

ST Series - Reference

Linear scales

Electron microscope

Mask observation, circuit pattern measurement, defect inspection, etc.

Silicon wafer

XY table

(with integrated linear scales)

Electron beam

CCD camera

Work chamber

Monitor


Vacuum pump

XY テーブル駆動方式

5

Various NC machine tools

High-precision fully closed loop control

Sliding table

Workpiece

Cutting blade

AT Series - Reference


Electronic component inserter

High-speed, high-precision mounting of electronic components

Linear scale

Base

Linear scale


FPD inspection equipment

Defect inspection and repair position determination

Linear scales


6


NC Linear Scale Systems – System Diagram

Scale Unit

Incremental scale unit

Separate Type

With square wave signal / sinusoidal siqnal simultaneous output

High-accuracy type : ST36*

*1Vp-p differential sinusoidal signal output types also available.

Please contact us for details.

Standard type : ST24

Compact type : ST46-EZA, ST422

Assembly Type

With sinusoidal siqnal output

Absolute scale unit

Standard type

Slim spar type

Super slim spar type

Sealed type

General type

*1Vp-p differential type

With square-wave signal output

: AT103

: AT113

: AT112-F

: AT181

: AT402E *

Slim spar and high speed type : AT211

Standard type : AT203

*Please consult us regarding manufacture of 1Vp-p differential sinusoidal siqnal

output types.

Separate Type

Assembly Type

High environmental resistance type : ABS ST700 Compact

Standard type

Slim spar type

: ABS AT300

: ABS AT500

Interface Units

Pulse signal unit

Serial conversion unit

: PSU-200

: PSU-251/252

7

NC Linear Scale Systems – Overview

Scale name

(Code)

ST36B

ST36C

(ST36A)

(ST36D)

ST24B

ST24C

ST46-EZA

ST422

ABS ST700

Compact type

AT103

AT113

AT112-F

AT181

AT402E

Reference point

−

Absolute function

Main scale grating pitch

Signal output pitch

8μm

20μm

20μm

40μm

3.072mm

20μm

20μm

4μm

10μm

20μm

40μm

3.072mm

20μm

20μm

Signal unit No. of divisions Resolution

−

(PSU-200)

−

−

−

−

PSU-200

200

80

40

8

400

200

40

20

200

100

20

10

400

200

80

40

30720

8

4

20

10

200

100

80

40

0.1μm

0.2μm

0.25μm

0.5μm

1μm

2μm

2.5μm

5μm

0.05μm

0.1μm

0.5μm

1μm

0.2μm

0.5μm

1μm

5μm

0.01μm

0.02μm

0.05μm

0.1μm

0.05μm

0.1μm

0.5μm

1μm

0.1μm

− − −

Maximum response speed* 1

Minimum edge interval * 2

70mm/s

150mm/s

260mm/s

720mm/s

360mm/s

720mm/s

1200mm/s

1200mm/s

900mm/s

1800mm/s

2600mm/s

2600mm/s

1500mm/s

3600mm/s

5000mm/s

5000mm/s

125ns

125ns

250ns

500ns

50ns

125ns

250ns

5000mm/s −

800mm/s

1600mm/s

See page

P9 - 12

P13 - 16

P17 - 20

P21, 22

P47 - 52

2000mm/s

2000mm/s

*3

125ns

1Vp-p differential sine wave

P23 - 26

P27 - 30

AT211 20μm 20μm −

200

100

40

20

0.1μm

0.2μm

0.5μm

1μm

8

4

200

40

2.5μm

5μm

0.1μm

0.5μm AT203 20μm 20μm −

ABS AT500

ABS AT300

−

−

20μm

20μm

20μm

20μm

−

−

20

4096

400

400

1μm

0.005μm

0.05μm

0.05μm

*1 Maximum response speed of pulse output type uses the logical value (IC specification) with a margin of about 10%.

*2 For information on minimum edge interval, see "Explanation of Terms" on page 86.

The guaranteed value for minimum edge interval is +0%, -10%.

For some models, values other than shown above can also be selected.

*3 Maximum response speed is 2000mm/s for AT113 and 830mm/s (50m/min) for AT112, AT181, AT103-3250 and higher.

*4 Maximum response speed of H type with 0.005μm resolution is 1200mm/s.

710mm/s

1400mm/s

2000mm/s

333mm/s

1833mm/s

2000mm/s

2500mm/s

2000mm/s

*4

125ns

250ns

500ns

1000ns

250ns

−

−

P31 - 36

P37 - 40

P53 - 76

P77 - 80


8

Separate Type ST Series

Sinusoidal siqnal & Square-Wave Signal Output Scale Unit (High Accuracy Type)

ST36

Features

• High accuracy type, 0.5μm class (effective range up to 300mm)

• Has a thinner detector head (thickness 11.5mm).

• The maximum effective measurement length of 3000mm enables use on large machines.

• 4 different types available for each signal output specification.

• LED display function for indicating signal errors.

Specifications

Item

Detection method


Signal output pitch

Output signal

Code ST36A


ST36B ST36C

Reflective photoelectric linear encoder

8μm

4μm


(reset input type)



10 - 3000mm Effective range

Accuracy (20°C)

Effective range 10 to 300mm: ±0.5 μm

Effective range 350 to 500mm: ±1.0μm


Effective range 1100 to 3000mm: ±2.0μm/m

Thermal expansion coefficient

Maximum response speed

Scale reference point*

Power supply

Maximum current consumption

Operating temperature/humidity

Storage temperature/humidity

Alarm indication

120mA

*Maximum speed for scale reference point detection is 20mm/s.

( 8±1 ) ×10 −6 / °

1200mm/s (with sinusoidal siqnals output) (For 2-phase square wave signal types, see page 11)

With scale reference point (50mm pitch, 10 to 80mm: Center point)

5VDC±5%

250mA

0 to 40°C, 20 to 80% RH (no condensation)

-20 to 60°C, 20 to 80%RH (no condensation)

A scale alarm is indicated with an LED on the I/F box

ST36D

1Vp-p differential sinusoidal siqnals

190mA

Parts

Main scale (10 to 80)

Alarm reset transmission/reception signal circuit (B Type)

I/F box side Control device side

For a photocoupler For a relay


Detector head

AL (Anode)

AL (Cathode)

Scale retaining spring

Output connector

(included)

Head cable

Reset input

Connect the alarm reset input circuit so that the current is 3 to 10mA. Also, the device has an internal resistor (1.2kΩ), so by applying 5 to 12V with a pulse width of at least 10ms across AL (anode)-AL (cathode), the alarm can be reset. When applying 12V or more, add an external resistance to limit the current to within the range stated above.

I/F Box

9

Output signal waveform

• 2-phase sinusoidal signals (Type A, C)

Phase A

Output signal pitch 4µm

Vref

• 1Vp-p differential sinusoidal siqnals (Type D)

Output signal pitch = 4µm = 360°

Phase A

Phase B Vref

Phase XA

Phase difference 90°

(Typ)

• Scale reference point 200±100µm

V

PP

= 2V

V

OH

= 2.4V min.

PZ V

OL

= 0.4V max.

(Note) The phase difference between the PZ signal and the Phase A signal

(and the Phase B signal) are not defined.

• 2-phase square wave signals (Type B, C)

PA

V

OH

V

OL

PA

PB

PB

PZ

PZ t d

( V

OH

= 2.5V (min.)

V

OH

= 2.5V (max.)

t d

: Edge interval, resolution

)

Z-phase pulse width

200±100µm

(Note) The phase difference between the PZ signal and the PA signal / PB signal has no effect.

Phase B

Phase difference 90° ±10°

Phase XB

Phase Z

Phase XZ

180°±90°

= 100%

Vref

Vref

Vref

Vref

Vref

Vref

Output specification

1

9

Pin No.

7

8

9

5

6

3

4

1

2

10

11

12

13

14

15

15

8

1. Output connector specification (Type A, B, C)

• Output connector (pin type): RDAD-15P-LNA(05) (Hirose

Electric or equivalent)

• Applicable connector (standard accessory): D15-403N-110

(Technical Electron or equivalent)

Type A Signal

0V (GND)

0V (GND)

+5V

+5V

Phase A

Phase B

Vref

PZ (scale reference point)

N.C

Vref

N.C

N.C

N.C

N.C

F.G

Type B Signal

0V (GND)

0V (GND)

+5V

+5V

Reset input (anode)

Reset input (cathode)

Vref


ALM (alarm, negative logic)

PA

PA

PB

PB

PZ

F.G ( = 0V)

2. Output connector specification (Type D)

• Output connector (pin type): RDAD-15P-LNA(05) inch screws (Hirose

Electric or equivalent)

• Applicable connector (standard accessory): D15-403N-150 inch screws (Technical Electron or equivalent)

Type C Signal

0V (GND)

0V (GND)

+5V

+5V

Phase A

Phase B

Vref



PA

PA

PB

PB

PZ

F.G ( = 0V)

Type D Signal

Phase XA

Phase XB

Phase Z

+5V (V

DD

)

+5V (V

DD

)

N.C

N.C

N.C

Phase A

Phase B

Phase XZ

0V (GND)

0V (GND)

N.C

0V (GND)

10

Specification

Selection Method

• There is an extensive selection of specifications for ST36.

• Choose the appropriate numbers and letters below according to specification required.

If standard specifications (recommended items marked with / symbols below) meet your requirements, please order using the code numbers shown on page 12.

How to read the code

ST36 - - - -

Signal output

Code Output

C

D

A Sinusoidal signal

B Square wave signal + external reset input

Sinusoidal signal + Square wave signal

1Vp-p differential

Effective range

Code Effective range (mm) Code Effective range (mm)

0010 10 0900 900

0025

0050

25

50

1000

1100

1000

1100

0075

0080

0100

75

80

100

1200

1300

1400

1200

1300

1400

0150

0200

0250

0300

150

200

250

300

1500

1600

1700

1800

1500

1600

1700

1800

0350

0400

0450

0500

0600

0700

350

400

450

500

600

700

2000

2200

2400

2500

2600

2800

2000

2200

2400

2500

2600

2800

0800 800 3000 3000

Note: For the standard specification, the indicated effective range depends on the product code.

Example of standard specification

Effective range 10mm: ST36 -0010

Effective range 250mm: ST36 -0250

Scale reference point

Code

A

B

Z

Details

50mm pitch (100 to 3000)

Center point (10 to 3000)

Special position specification

Note: For reference positions in the effective range

of 10 to 80mm, [B: Center point] is the

standard specification.

Resolution / Minimum edge interval

Resolution

Minimum edge interval

0.01μm

0.02μm

0.05μm

0.1 μm

—

125ns 250ns 500ns 1000ns

A : 70mm/s

E : 150mm/s

J : 360mm/s

N : 720mm/s

B

K

P

F

: 30mm/s

: 70mm/s

: 180mm/s

: 360mm/s

C

G

Q

L

: 15mm/s

: 30mm/s

: 90mm/s

: 180mm/s

D

H

M

R

: 8mm/s

: 15mm/s

: 45mm/s

: 90mm/s

Z : When [Signal output] is [A][D], maximum response speed at Sinusoidal signal

-3 dB attenuation is 1.2m/s.

Note: The minimum edge interval varies 0 to -10% based on the operating environmental conditions.

Special codes

Code

None

Z

Details

Standard selection specification

Special specification

Note: If there are special details, please select Z.

Head cable length

Code

A

B

Z

Length

1m (High flex)

0.5m (High flex)

Special length specification (max. 2.5m)

Note: If there are special details, please select Z.

Alarm output

Code

H

S

◎ Z

Details

Alarm signal

High impedance

When [Signal output] is [A] or [D]

Direction

Code

1

2

◎ Z

Details

Normal: PA goes ahead

Reverse: PB goes ahead

When [Signal output] is [A] or [D]

Traveling direction of detector head

Reference point track

Head cable

PA

PA

PB

Scale track

V

OH

V

OL

PB t d

PZ

PZ

Z-phase pulse width

200±100µm

V

OH

= 2.5V (min.)

V

OL

= 0.5V (max.) t d


This is the waveform that results when the detector head moves as shown in the figure above.

11

Mounting dimensions

• 10 to 80mm (Adhesive fixing type) • 100 to 3000mm Unit: mm

A00001

No.

32±0.2

2

2×M3, depth 4

Head center point at scale reference point signal output

Center of detector L

1

/2

// 0.03

A

0.015

A

Mounting surface

ø2 (Hole for adjusting pin)

2×M3, depth 4

14.9±0.1

11.5 (0.6)

Center of detector

(20)

32±0.2

2×M3, depth 4

Overall length L

2

Effective range L

1

36

32±0.2

2

2

2×M3, depth 4

(20)

ø2 (Hole for adjusting pin)

// 0.03

0.015

A

A

Scale reference point mark

(50mm pitch)

Center of detector

Mounting surface

16.9±0.1

11.5 (0.6)

(L

2

-L

1

)/2

32±0.2

36

Effective range L

1

Overall length L

2

2

2.8±0.1

// 0.01/100

0.01/100

G

A

G: Machine guideway

4×R4

L

3

L

3

R4

4.8

+0.2

0

// 0.01/100

0.01/100

G

A

G: Machine guideway

35

25±0.2

5

2×M5, through hole

R4

4

(5)

Model ST36

06ABZ763

Mitutoyo Corporation

B No.

A00001

MADE IN JAPAN

68±0.2

80

2×ø4.5

Scale retaining spring A

35

25±0.2

5

No.

A00001

Head cable 1m (High flex)

(Up to 2.5 m available as custom order)

2×ø4.5

Scale retaining spring B

Dimensions of scale units

Order No.

* Code *

Effective

L range

1

(mm) L

Overall length

2

(mm)

Scale fixing pitch

L

3

(mm)

579-501-0

579-502-0

579-503-0

579-504-0

579-505-0

579-506-0

579-507-0

579-508-0

579-509-0

579-510-0

579-511-0

ST36 -10

ST36 -25

ST36 -50

ST36 -75

ST36 -80

ST36 -100

ST36 -150

10

25

50

75

80

100

150

30

45

70

90

100

140

190

–

–

–

–

–

50

75

ST36 -200 200 240 100

ST36 -250 250 290 60

ST36 -300 300 340

ST36 -350 350 390

75

85

579-512-0

579-513-0

579-514-0

579-515-0

579-516-0

ST36 -400 400 440 100

ST36 -450 450 490

ST36 -500 500 540

75

ST36 -600 600 640 100

ST36 -700 700 740

80

85

579-517-0 ST36 -800 800 840 100

Retaining spring A

–

–

–

–

–

1 pc.

1 pc.

1 pc.

1 pc.

1 pc.

1 pc.

Retaining spring B

–

–

–

–

–

1 pc.

2 pcs.

1 pc.

2 pcs.

1 pc.

2 pcs.

4 pcs.

4 pcs.

4 pcs.

4 pcs.

6 pcs.

6 pcs.

1 pc.

6 pcs.

1 pc.

8 pcs.

1 pc.

8 pcs.

* The above code numbers are for recommended items marked with / symbols.

If recommended specifications meet your requirements, use these code numbers to order.

* The and symbols in the tables above have the following meanings:

→A (2-phase sinusoidal signals) : →1

→B (2-phase square wave signals + reset input) : →2

→C (2-phase sinusoidal signals + 2-phase square wave signals) : →3

→D (1Vp-p differential) : →4

Order No.

* Code *

Effective

L range

1

(mm) L

Overall length

2

(mm)

Scale fixing pitch

L

3

(mm)

Retaining spring A

Retaining spring B

579-518-0 ST36 -900 900 940 90 1 pc.

10 pcs.

579-519-0 ST36 -1000 1000 1040 100 1 pc.

10 pcs.

579-520-0 ST36 -1100 1100 1140 90 1 pc.

12 pcs.

579-521-0 ST36 -1200 1200 1240 100 1 pc.

12 pcs.

579-522-0 ST36 -1300 1300 1340 130 1 pc.

10 pcs.

579-523-0 ST36 -1400 1400 1440 100 1 pc.

14 pcs.

579-524-0 ST36 -1500 1500 1540 125 1 pc.

12 pcs.

579-525-0 ST36 -1600 1600 1640 100 1 pc.

16 pcs.

579-526-0 ST36 -1700 1700 1740 120 1 pc.

14 pcs.

579-527-0 ST36 -1800 1800 1840 100 1 pc.

18 pcs.

579-528-0 ST36 -2000 2000 2040 100 1 pc.

20 pcs.

579-529-0 ST36 -2200 2200 2240 100 1 pc.

22 pcs.

579-530-0 ST36 -2400 2400 2440 100 1 pc.

24 pcs.

579-531-0 ST36 -2500 2500 2540 95 1 pc.

26 pcs.

579-532-0 ST36 -2600 2600 2640 100 1 pc.

26 pcs.

579-533-0 ST36 -2800 2800 2840 100 1 pc.

28 pcs.

579-534-0 ST36 -3000 3000 3040 100 1 pc.

30 pcs.

12


Sinusoidal siqnal & Square-Wave Signal Output Scale Unit (Standard Type)

ST24

Features

• Has a thinner detector head (thickness 11mm).


• 2 different types available for each signal output specification


Specifications

Item

Detection method


Signal output pitch

Output signal

Effective range

Accuracy (20°C)



Code

Scale reference point *

Power supply




Alarm indication

* Maximum speed for scale reference point detection is 20mm/s.

ST24B ST24C


20μm

10μm


(reset input type)

10 to 3000mm




Effective range 1100 to 3000mm: ±3.0 μm/m



(8±1) x10 −6 /°C

1200mm/s (with sinusoidal siqnal output)

(For 2-phase square wave signal types, see page 15)

With scale reference point (50mm pitch, 10 to 80mm: Center point)

5VDC±5%

250mA

0 to 40°C, 20 to 80%RH (no condensation)


LED illumination on the I/F box

Component parts


(With base)


(Float glass)


(Float glass)

Detector head

Alarm reset transmission/reception signal circuit (B Type)

I/F box side Control device side

For a photocoupler For a relay

AL (Anode)

AL (Cathode)


Output connector

I/F box

Reset input

Connect the alarm reset input circuit so that the current is 3 to 10mA. Also, the device has an internal resistor (1.2kΩ), so by applying 5 to 12V with a pulse width of at least 10ms across AL (anode)-AL (cathode), the alarm can be reset. When applying 12V or more, add an external resistance to limit the current to within the range stated above.

13


• 2-phase sinusoidal signals (Type C)

• Scale reference point

V

PP

= 2V ˙ .

(Note) The phase difference between the PZ signal and the Phase A signal

(and the Phase B signal) are not defined.


1

9 15

8 Output connector specification

• Output connector (pin type): RDAD-15P-LNA(05) (Hirose Electric or equivalent)

• Suitable (standard accessory): D15-403N-110 (Technical Electron or equivalent)

9

10

11

12

7

8

5

6

Pin No.

1

2

3

4

13

14

15

Type B Signal

0V (GND)

0V (GND)

+5V

+5V

Reset input (anode)

Reset input (cathode)

Vref

PZ


PA

PA

PB

PB

PZ

F.G

Type C Signal

0V (GND)

0V (GND)

+5V

+5V

Phase A

Phase B

Vref

PZ


PA

PA

PB

PB

PZ

F.G

PZ

PZ

PA

PA

PB

PB

• 2-phase square wave signals (Type B, C)

V

OH

V

OL t d

( V

OH

= 2.5V (min.)

V

OL

= 2.5V (max.)

t d


)

0.8±0.4mm

(Note) The phase difference between the PZ signal and the PA signal/PB signal has no effect.

14

Specification


• There is an extensive selection of specifications for the ST24.


If standard specifications (recommended items marked with / symbols below) meet your requirements, please use the code numbers shown on page 16 to order.


ST24 - - - -

Signal output

Code Output


C Sinusoidal signal + Square wave signal

Effective range

0150

0200

0250

0300

0350

0400

0450

0500

Code Effective range (mm) Code Effective range (mm)

0010 10 0900 900

0025

0050

25

50

1000

1100

1000

1100

0075

0080

0100

75

80

100

1200

1300

1400

1200

1300

1400

0600

0700

0800

150

200

250

300

350

400

450

500

600

700

800

1500

1600

1700

1800

2000

2200

2400

2500

2600

2800

3000

1500

1600

1700

1800

2000

2200

2400

2500

2600

2800

3000

Note: For the standard specification, the indicated effective range

depends on the product code.


Effective range 10mm: ST24 -0010

Effective range 250mm: ST24 -0250

Special codes

Code Details

None Standard selection specification

Z Special specification

Note: If there are special details,

please select Z.


Code

A

Length

1m

B 0.5m

Z Special length specification (max. 2.5m)

Alarm output

Code

H

S

Details

Alarm signal

High impedance

Direction

Code

1

2

Details

Normal: PA goes ahead


Head cable


Reference point track

Scale track

PA

V

OH

V

OL


Code

A

B

Z

Details

50mm pitch (100 to 3000)

Center point (10 to 3000)

Special position specification

Note: For reference positions in the effective range of 10 to

80mm, [B: Center point] is the standard specification.

PA

PB

PB t d

PZ

Scale shape

Code

A

B

C

Detail - Cross-section (Effective range)

Glass, separate: t4.8 x w22 (100 to 3000mm)

Glass, separate: t2.8 x w8 (10 to 80mm)

With aluminum base: t5.1 x w23 (10 to 80mm)

PZ

Z-phase pulse width

0.8±0.4mm

V

OH

= 2.5V (min.)

V

OL

= 0.5V (max.) t d


Note: This is the waveform that results when the detector

head moves as shown in the figure above.


Resolution


0.05μm

0.1μm

0.5μm

1 μm

—

125ns 250ns 500ns 1000ns

A : 360mm/s

E : 720mm/s

J : 1200mm/s

N : 1200mm/s

B

F

K

P

: 180mm/s

: 360mm/s

: 1200mm/s

: 1200mm/s

C

G

Q

L

: 90mm/s

: 180mm/s

: 900mm/s

:1200mm/s

D

H

M

R

: 45mm/s

: 90mm/s

: 450mm/s

: 900mm/s

Z : When [Signal output] is [A][D], maximum response speed at sine wave -3 dB attenuation is 1200mm/s.


15


ST24 Specifications

ST24 Mounting dimensions

• 10 to 80mm (Adhesive fixing type) * • 100 to 3000mm

2×M3, depth 6

2

Scale reference point signal output position

(Stroke center point)

2×M3, depth 6

32±0.1

36

32±0.2

// 0.05

A


(And subsequent separate points with 50mm pitch)

14.5±0.1

11 (0.7)

// 0.02

G

Mounting surface

(20)

2×M3, depth 6

2 32±0.1

2

2×M3, depth 6

Overall length L

2

Effective range L

36

32±0.1

1

001 B00

(20)

Effective range L

1

Overall length L

2

2.8

A

//

0.02

0.02

G G: Machine guideway

// 0.05

A

Mounting surface

16.5±0.1

11 (0.7)

Unit: mm

// 0.02

G

Scale fixing pitch L

3


Scale fixing pitch L

3

4×R4

+ 0


R4

4.8

A

//

0.02

0.02

G

G: Machine guideway

* For information on fixing methods for adhesive fixing type, see "Handling linear scales: Mounting scales" on page 82.

• 10 to 80mm (With base) Special Specification


(Stroke center point)

2×M3, depth 6

36

32±0.2

0.05 A

0.015 A

16.8±0.1

11 (0.7)

Head cable (1m)

(High flex)

(Up to 5m available as custom order)

6

Head cable can be separated from I/F box by removing cable flange screw and I/F cover screw.

2×M5, through hole

Head cable 1m (High flex)

R4

4

(5)

Model

Part No.

ST24/ST44

06ACA179

Mitutoyo

Corporation

C

68±0.2

80

B00001

MADE

IN

JAPAN

No.

B00001

L

4

No.

B00001

Effective range L

1

Overall length L

2

No.B00001

L

3

2×ø3.4

(5.1)

A

0.02

0.02 G

(2.8)

3.8

5.1

0.02 G

Effective range

L

1

(mm)

10

25

50

75

80

Overall length

L

2

(mm)

30

45

70

90

100

Scale fixing pitch

L

3

(mm) L

4

(mm)

15

25

7.5

10

40

60

70

15

15

15

21 5

2×ø4.5

25±0.2

1.5

0.4

35


2×ø4.5

25±0.2

35

1.5


0.4


Order No.

579-551-0

579-552-0

579-553-0

579-554-0

579-555-0

579-556-0

579-557-0

579-558-0

579-559-0

579-560-0

579-561-0

579-562-0

579-563-0

579-564-0

579-565-0

579-566-0

* Code *

Effective

L range

1

(mm) L

Overall length

2

(mm)

Scale fixing pitch

L

3

(mm)

ST24 - 10

ST24 - 25

ST24 - 50

ST24 - 75

10

25

50

75

30

45

70

90

ST24 - 80 80 100

ST24 -100 100 140

–

50

ST24 -150 150 190 75

ST24 -200 200 240 100

–

–

–

–

ST24 -250 250 290

ST24 -300 300 340

60

75

ST24 -350 350 390 85

ST24 -400 400 440 100

ST24 -450 450 490

ST24 -500 500 540

ST24 -700 700 740

75

80

ST24 -600 600 640 100

85

579-567-0 ST24 -800 800 840 100

Retaining spring A

Retaining spring B

–

–

–

–

– –

1 pc.

2 pcs.

1 pc.

2 pcs.

1 pc.

2 pcs.

–

–

–

–

1 pc.

4 pcs.

1 pc.

4 pcs.

1 pc.

4 pcs.

1 pc.

4 pcs.

1 pc.

6 pcs.

1 pc.

�

6 pcs.

1 pc.

6 pcs.

1 pc.

8 pcs.

1 pc.

8 pcs.

* The and symbols in the tables above have the following meanings:

→B (2-phase square wave signals + external reset input) : →2

→C (2-phase sinusoidal signals + 2-phase square wave signals) : →3

�

//

G

0.02/100

0.02/100

G

2

Order No.

* Code *

Effective

L range

1

(mm) L

Overall length

2

(mm)

Scale fixing pitch

L

3

(mm)

Retaining spring A

Retaining spring B

579-568-0 ST24 - 900 900 940 90 1 pc.

10 pcs.

579-569-0 ST24 -1000 1000 1040 100 1 pc.

10 pcs.

579-570-0 ST24 -1100 1100 1140 90 1 pc.

12 pcs.

579-571-0 ST24 -1200 1200 1240 100 1 pc.

12 pcs.

579-572-0 ST24 -1300 1300 1340 130 1 pc.

10 pcs.

579-573-0 ST24 -1400 1400 1440 100 1 pc.

14 pcs.

579-574-0 ST24 -1500 1500 1540 125 1 pc.

12 pcs.

579-575-0 ST24 -1600 1600 1640 100 1 pc.

16 pcs.

579-576-0 ST24 -1700 1700 1740 120 1 pc.

14 pcs.

579-577-0 ST24 -1800 1800 1840 100 1 pc.

18 pcs.

579-578-0 ST24 -2000 2000 2040 100 1 pc.

20 pcs.

579-579-0 ST24 -2200 2200 2240 100 1 pc.

22 pcs.

579-580-0

579-581-0

ST24 -2400

ST24 -2500

2400

2500

2440

2540

100 1 pc.

24 pcs.

95 1 pc.

26 pcs.

579-582-0 ST24 -2600 2600 2640 100 1 pc.

26 pcs.

579-583-0 ST24 -2800 2800 2840 100 1 pc.

28 pcs.

579-584-0 ST24 -3000 3000 3040 100 1 pc.

30 pcs.

0.4

// 0.01/200

// 0.2

G

G

4-R4

R4

�

B

//

0.01

0.02

G

G

�

// 0.01/200

0.01/200

G

G

ヘッドケーブル（1m） 6

ヘッドケーブルは,ケーブルフランジねじ,I/Fカバーねじを

外すことによりI/F Boxより分解可能。

2-M5 通シ

R4

4

（5）

Model

Part No.

ST24/ST44

06ACA179

Mitutoyo

Corporation

C

B00001

MADE

IN

JAPAN

68

±0.2

80

No.

B00001


Sinusoidal siqnal & Square-Wave Signal Output

Scale Unit (Compact Type)

ST46-EZA

Features

• Ultra-compact, high-accuracy separate type linear scale great for applications where space is limited.

• Detector head mounting and signal adjustment possible without oscilloscope. Setup indicator for checking signal strength. Auto-tuning function activated by push switch.

• I/F circuit integrated in connector shell reduces volume to

60% compared to conventional interface.

• Self-diagnosis function with USB connectivity facilitates signal strength checking and parameter setup.

• Can be used for metal tape scale manufacture.

System Configuration

Main scale

Detector unit

Output connector (included)

Feedback cable

Controller

Specifications

Item Code ST46-EZA

Detection method

Scale specifications


Output signal

Effective range

Accuracy (20°C)


Grating pitch: 20μm, Material: glass

20μm

Type B: 2-phase square wave signals, reference

point pulse, external reset input

Type C: 2-phase square wave signals, reference

point pulse, 2-phase sinusoidal signals

10 to 3000mm

Effective range 10 to 300mm: ±1μm



Effective range 1100 to 3000mm: ±3μm/m


Scale reference point


Power supply voltage


(8±1) x 10 -6 /°C

With scale reference point

(50mm pitch, 10 to 80mm: Center point)

2.6m/s (at sine wave amplitude -3dB)

5VDC±5%

250mA

Operating temperature/humidity 0 to 40°C, 20 to 80%RH (no condensation)

Storage temperature/humidity -20 to 60°C, 20 to 80%RH (no condensation)

PA

PB

PB

To be supplied by customer (feedback cable/controller)

Output signal waveform and specification

• 2-phase square wave signals

(Type B)

PA t d

V

OH

V

OL

PZ

V

OH

= 2.5V (min.)

V

OL

= 0.5V (max.)

PZ

Traveling direction of detector head t d


Z-phase pulse width

0.8±0.4mm


• Connector pin assignment

(Type B)

1 8

Applicable connector

(included)

HDAB-15S

9 15

Pin No.

1, 2

3, 4

5

6 Reset input AL (cathode) 13 PB (main signal pulse_Reverse phase)

7

F. G

9

Signal

0V (GND)

Pin No.

Signal

10 PA (main signal pulse_Normal phase)

+5V (Vcc) 11 PA (main signal pulse_Reverse phase)

Reset input AL (anode) 12 PB (main signal pulse_Normal phase)

NC

ALM (alarm)

14 PZ (reference point pulse_Reverse phase)

8 PZ (reference point pulse_Normal phase) 15

• 2-phase sinusoidal signals, 2-phase square wave signals

(Type C)

Phase A

Phase B

最小エッジ間隔 100∼800ns

V

DC

（注意）PZ信号とPA信号（又はPB信号）


V

DC

• Connector pin assignment

(Type C)

1 8

ピンNo.

1、2、13

3、4、11

5

6

7


(Typ)

0V 8

9

PA

PA

PB

10

信号名

PB

PZ

PZ

未使用

F.G

Vpp=2v V

DC

=V ref. (Vcc/2 = 2.5V)


(included)

HDAB-15S

9 15

Pin No.

1, 2

Signal

0V (GND)

Pin No.

Signal

10 PA (main signal pulse_Normal phase)

3, 4 +5V (Vcc) 11 PA (main signal pulse_Reverse phase)

5 Phase A (sinusoidal siqnal) 12 PB (main signal pulse_Normal phase)

6 Phase B (sinusoidal siqnal) 13 PB (main signal pulse_Reverse phase)

7 Vref ( Vcc / 2) 14 PZ (reference point pulse_Reverse phase)

8 PZ (reference point pulse_Normal phase) 15

9 ALM (alarm)

F. G

ピンNo.

1、2、13

3、4、11

5

6

7

信号名

0V

＋5V

PA

PA

PB

PB

PB

8

12、14

15

信号名

PB

PZ

PZ

Z-phase pulse width

F.G

0.8±0.4mm

適合コネクタ（CN4）：HDAB-15S（ヒロセ又は相当品（Dsubシリーズ）使用可） t d

V

OH

V

OL

V

OH

= 2.5V (min.)

V

OL

= 0.5V (max.) t d


17

※ 検出ヘッドが上図のように移動した際の波形です。 min.

max.

分解能： 0.05∼5μm

最小エッジ間隔 100∼800ns

1000μm

※最小エッジ間隔、分解能はI/F Box無いのSWにより設定。

（注意）PZ信号とPA信号（又はPB信号）との位相は関係しません。

Specification


• There is an extensive selection of specifications for the

ST46-EZA.


If standard specifications (recommended items marked with symbol below) meet your requirements, please order using the code numbers shown on pages 19 - 20.


ST46-EZA - -

Signal output

Code Details


C Sinusoidal signal + Square wave signal

Effective range

Code

0010

0025

0050

0075

0080

0100

0150

0200

0250

0300

0350

0400

Effective range (mm)

10

25

50

75

80

100

150

200

250

300

350

400

Code

0450

0500

0600

0700

0800

0900

1000

1100

1200

1300

1400

1500

Effective range (mm) Code

450

500

600

700

800

900

1000

1100

1200

1300

1400

1500

1600

1700

1800

2000

2200

2400

2500

2600

2800

3000


1600

1700

1800

2000

2200

2400

2500

2600

2800

3000

Note: For the standard specification, the indicated effective range depends on the product code.


Effective range 10mm: ST46EZA -0010

Effective range 250mm: ST46EZA -0250

Special codes

Code Details

None Standard selection specification

Z Special specification


Code

A

B

C

Z

Length

1m (standard)

0.5m

2m

Special length specification

(max. 2.5m)

Alarm output

Code

S

H

Details

Alarm signal

High impedance

Direction

Code

1

2

Details

Normal

Reverse

When the direction is normal, the sinusoidal signal, the 2-phase square wave output signal (Phase A, Phase B) and the reference point signal waveform are as shown below.

Traveling direction of detector head Scale track

Reference point/ Scale shape

Code Details (Effective range) Details - Cross-section (Effective range)

A 50mm pitch (100 to 3000mm) Glass, separate: t4.8 x w22 (100 to 3000mm)

B Center point (10 to 80mm) Glass, separate: t2.8 x w8 (10 to 80mm)

C Center point (10 to 80mm) With aluminum base: t5.1 x w23 (10 to 80mm)

Z Special position specification Special shape

Reference point mark

Phase A V

DC


Code

A

Resolution Minimum edge interval

100 ns


450 mm/s

R

S

P

Q

T

U

V

K

L

M

N

J

H

F

G

B

C

D

E

0.05 μm

0.1 μm

0.5 μm

1 μm

5 μm

200 ns

400 ns

800 ns

100 ns

200 ns

400 ns

800 ns

100 ns

200 ns

400 ns

800 ns

200 ns

400 ns

800 ns

100 ns

200 ns

400 ns

800 ns

100 ns

225 mm/s

112 mm/s

56 mm/s

900 mm/s

450 mm/s

225 mm/s

112 mm/s

2600 mm/s

2250 mm/s

1125 mm/s

562 mm/s

2600 mm/s

2600 mm/s

2250 mm/s

1125 mm/s

2600 mm/s

2600 mm/s

2600 mm/s

2600 mm/s

Phase B


(Typ)

PA

PA

PB

PB

PZ

PZ


Vpp=2v V

DC

Z-phase pulse width

0.8±0.4mm

t d

V

DC

V

OH

V

OL

V

OH

= 2.5V (min.)

V

OL

= 0.5V (max.) t d


18

ST46-EZA Scale unit mounting dimensions

• Effective range 10 to 80mm (No aluminum base) • Effective range 10 to 80mm (With aluminum base)

2×M2.5, depth 3

Unit: mm

2×M2.5, depth 3

26

±0.2

30

26

±0.2

// 0.05

A

7.5

12.1

±0.1

(1.8) 2×M2.5, depth 3

26

±0.2

30

26

±0.2

// 0.05

A

7.5

14.4

±0.1

(1.8)

// 0.02

G

2×M2.5, depth 3

// 0.02

G

Effective range L

1

Overall length L

2

2×R2.75

2.8

A

//

0.02

0.02

//

G

G: Machine guideway

0.02/100 G

Adhesive application section

Use silicon-based adhesive

KE441

S/N B0700001

L

3

Effective range L

1

Overall length L

2

2×R2.75

L

4

5.1

A

//

0.02

0.02

G

G: Machine guideway

(2.8)

Scale drawing

2×ø2.8

2×ø2.8

S/N B0700001

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan

63

25

// 0.02/100 G

0.02/100

2 0.4

Scale mounting diagram, recommended method (Scale = 2/1)


• 10 to 80mm (No aluminum base)

Order No.

Code

579-665-12 ST46EZAB-10B

579-666-12 ST46EZAB-25B

579-667-12 ST46EZAB-50B

579-668-12 ST46EZAB-75B

579-669-12 ST46EZAB-80B

579-665-22 ST46EZAC-10B

579-666-22 ST46EZAC-25B

579-667-22 ST46EZAC-50B

579-668-22 ST46EZAC-75B

579-669-22 ST46EZAC-80B

Effective range

L

1

(mm)

Overall length

L

2

(mm)

80

10

25

50

10

25

50

75

75

80

100

30

45

70

30

45

70

90

90

100

S/N B0700001

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan

63

25

• 10 to 80 mm (With aluminum base)

Order No.

Code

579-665-13 ST46EZAB-10C

579-666-13 ST46EZAB-25C

579-667-13 ST46EZAB-50C

579-668-13 ST46EZAB-75C

579-669-13 ST46EZAB-80C

579-665-23 ST46EZAC-10C

579-666-23 ST46EZAC-25C

579-667-23 ST46EZAC-50C

579-668-23 ST46EZAC-75C

579-669-23 ST46EZAC-80C

Effective range

L

1

(mm)

Overall length

L

2

(mm)

80

10

25

50

10

25

50

75

75

80

100

30

45

70

30

45

70

90

90

100

L

4

S/N B0700001

L

3

L

3

(mm)

70

15

25

40

15

25

40

60

60

70

2×3.4

L

4

(mm)

15

7.5

10

15

7.5

10

15

15

15

15

3.8

5.1

• Effective range 100 to 3000mm

2×M2.5, depth 3

Unit: mm

S/N B0000777

(20)

2×M2.5, depth 3

26

±0.2

Overall length L

2

Effective range L

1

30

26

±0.2

(20)

// 0.05

A

7.5

14.1

±0.1

(1.8)

//

B

0.02

G

Mounting pitch L

3

2×R2.75

Mounting pitch L

3

+0.5 0

4.8

A

//

0.02

0.02

G

G: Machine guideway

2×ø2.8

S/N B0700001

63

25

2×ø4.5

25

35

1.5

0.4

2×ø4.5

25

35

1.5

0.4

19


Order No.

*

579-670- 1

579-671- 1

579-672- 1

579-673- 1

579-674- 1

579-675- 1

579-676- 1

579-677- 1

579-678- 1

579-679- 1

579-680- 1

579-681- 1

579-682- 1

579-683- 1

579-684- 1

579-685- 1

579-686- 1

579-687- 1

579-688- 1

579-689- 1

579-690- 1

579-691- 1

579-692- 1

579-693- 1

579-694- 1

579-695- 1

579-696- 1

579-697- 1

579-698- 1

Code *

ST46EZA - 100A

ST46EZA - 150A

ST46EZA - 200A

ST46EZA - 250A

ST46EZA - 300A

ST46EZA - 350A

ST46EZA - 400A

ST46EZA - 450A

ST46EZA - 500A

ST46EZA - 600A

ST46EZA - 700A

ST46EZA - 800A

ST46EZA - 900A

ST46EZA -1000A

ST46EZA -1100A

ST46EZA -1200A

ST46EZA -1300A

ST46EZA -1400A

ST46EZA -1500A

ST46EZA -1600A

ST46EZA -1700A

ST46EZA -1800A

ST46EZA -2000A

ST46EZA -2200A

ST46EZA -2400A

ST46EZA -2500A

ST46EZA -2600A

ST46EZA -2800A

ST46EZA -3000A

Effective range

L

1

(mm)

100

150

200

250

300

350

400

450

500

600

700

800

900

1000

1100

1200

1300

1400

1500

1600

1700

1800

2000

2200

2400

2500

2600

2800

3000

Overall length

L

2

(mm)

940

1040

1140

1240

540

640

740

840

1340

1440

1540

1640

1740

1840

2040

2240

2440

2540

2640

2840

3040

340

390

440

490

140

190

240

290

Scale fixing pitch

L

3

(mm)

90

100

90

100

80

100

85

100

130

100

125

100

120

75

85

100

75

50

75

100

60

95

100

100

100

100

100

100

100


A

(pcs.)

1

* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.

→ B (2-phase square wave signals + external reset input): →1

→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2


B

(pcs.)

10

10

12

12

6

6

8

8

10

14

12

16

14

4

6

4

4

2

2

2

4

26

26

28

30

18

20

22

24

• Application program (Option, Part No.06AEF800)

Adjustment SW / CAL display / Reference point display

NC side

Connector control unit has setup indicator

Signal strength checking and parameter setup can be performed on a PC

(PC to be prepared by customer)

20


Sinusoidal signal & Square wave signal Output Scale Unit (Compact Type)

ST422

Features

• The maximum response speed is 5000mm/s.

(When resolution is 1μm and the minimum edge interval is 125ns)

• Compact detector unit control unit allow use in applications where space-saving design is important.



Specifications

Item Code

Detection method


Signal output pitch

Output signal

Effective range

ST422


40μm

40μm

Two 90° phase-shifted sinusoidal signals and two 90° phase-shifted square wave signals, scale reference point signal, alarm signal

10 to 3000mm

Accuracy (20°C)




Effective range 1100 to 3000mm: ±3.0μm/m




Power supply




(8±1) x10 −6 / °C

5000mm/s (depending on setting)

With scale reference point

(50mm pitch, 10 to 75mm: Center point)

5VDC±5%

200mA (Max)



Alarm indication

Head cable length

LED illumination on the I/F box

* For high flex type head cable, please contact us.

1m *

• I/F box output connector pin assignment

1 8

9 15

Output connector (pin type): RDAD-15P-LNA(05) (Hirose Electric or equivalent)

Suitable plug (standard accessory): D15-403N-110 (Technical Electron or equivalent)

Pin No.

Signal

7

8

9

5

6

3

4

1

2

10

11

12

13

14

15

0V (GND)

0V (GND)

+5V (Vcc)

+5V (Vcc)

Phase A (Sinusoidal signal)

Phase B (Sinusoidal signal)

Vref



PA

PA

PB

PB

PZ

F. G


• 2-phase sinusoidal signals

Phase A

Phase B


(Typ)

• Scale reference point


Vref

Vref

Vpp=2V Vref = 2.5V

200±100µm

PZ

(Note) The phase difference between the PZ signal and the Phase A signal (and

the Phase B signal) are not defined.

• 2-phase square wave signals

V

OH

PA

V

OL

PA

PB

21

PB

( t d

V

OH

= 2.5V (min.)

V

OL

= 2.5V (max.)

t d


)

PZ

PZ

(Note) The phase difference between the PZ signal and the PA signal/PB signal has no effect.

Z-phase pulse width

200±100µm

Maximum response speed

Maximum response speed depends on setting, as shown below.

Resolution

Setting

(number of divisions)


[+0, -10%]

5μm (8)

125ns

250ns

500ns

1000ns

1μm (40)

0.5μm (80)

125ns

250ns

500ns

1000ns

125ns

250ns

500ns

1000ns

125ns

Maximum response speed (mm/s)

(Scale pitch: 40μm)

5000

5000

3600

1800

5000

3600

1800

900

3600

1800

900

450

1500

0.2μm (200)

250ns

500ns

1000ns

700

300

150


ST422 Scale unit mounting dimensions

• ST422-10 to 350 (Adhesive fixing type) * 3 • ST422-400 to 3000

Unit: mm

Cable clamp

(L

2

-L


50mm pitch

1

)/2

10±1 * 1

4.7

* 2

No.09AAB211A

60001

4.6

4.6

25

30

Effective range L1

Overall length L2

Exposed portion of cable and cable clamp

Always ground to the machine using the cable clamp.

7.5

Direction to insert cable (1.2)

10.5±0.2

1.8

// 0.05

A A

// 0.05

G

2×M2.5, through hole

10

0.02

B

G: Machine guideway

3.5x6, slot

0.4

ø3.5

(L2-L1) /2

A

Cable clamp

10

3.5x6, slot

0.4

ø3.5

Cable clamp


50mm pitch

30

25

4.6 4.6

Exposed portion of cable and cable clamp

Always ground to the machine using the cable clamp.

7.5

Direction to insert cable

(1.2)

// 0.05

A

13.5±0.2

4.8

2×M2.5, through hole

L3

Retaining spring A

Effective range L

1

Overall length L

2

L3

B

Retaining spring B

Cable clamp

*1 When stroke is 100mm or longer

*2 One center point when stroke is 10 to 75mm

*3 For information on fixing methods for adhesive fixing type, see

"Handling linear scales Mounting scales" on page 82

4.7

ø2 ø6

Head cable (1m)

2×M5, through hole

R

4

(5)

4

25±0.2

35

0.4

2×ø4.5

Retaining spring A

1.5

25±0.2

35

0.4

1.5

2×ø4.5

Retaining spring B


Order No. Code

Effective range

L

1

(mm)

579-631 ST422-10

579-632 ST422-25

579-633 ST422-50

579-634 ST422-75

10

25

50

75

579-635 ST422-100 100

579-636 ST422-150 150

579-637 ST422-200 200

579-638 ST422-250 250

579-639 ST422-300 300

579-640 ST422-350 350

579-641 ST422-400 400

579-642 ST422-450 450

579-643 ST422-500 500

579-644 ST422-600 600

579-645 ST422-700 700

579-646 ST422-800 800

579-647 ST422-900 900

Overall length

L

2

(mm)

540

640

740

840

940

320

370

440

490

120

170

220

270

30

45

70

95

Scale fixing pitch

L

3

(mm)

Retaining spring A

Retaining spring B

80

100

85

100

90

—

—

100

75

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

1 pc.

4 pcs.

1 pc.

6 pcs.

1 pc.

6 pcs.

1 pc.

6 pcs.

1 pc.

8 pcs.

1 pc.

8 pcs.

1 pc.

10 pcs.

—

—

—

—

—

—

—

—

S.UP POWER

Part No.

09AAB215


SERIAL No. 60001

MADE IN JAPAN

68±0.2

80

SERIAL No. 60001

4×

R

4

Output connector (included)

Order No. Code

Effective range

L

1

(mm)

Overall length

L

2

(mm)

579-648 ST422-1000 1000 1040

579-649 ST422-1100 1100 1140

579-650 ST422-1200 1200 1240

579-651 ST422-1300 1300 1340

579-652 ST422-1400 1400 1440

579-653 ST422-1500 1500 1540

579-654 ST422-1600 1600 1640

579-655 ST422-1700 1700 1740

579-656 ST422-1800 1800 1840

579-657 ST422-2000 2000 2040

579-658 ST422-2200 2200 2240

579-659 ST422-2400 2400 2440

579-660 ST422-2500 2500 2540

579-661 ST422-2600 2600 2640

579-662 ST422-2800 2800 2840

579-663 ST422-3000 3000 3040

Scale fixing pitch

L

3

(mm)

Retaining spring A

Retaining spring B

95

100

100

100

100

100

100

100

100

125

100

120

100

90

100

130

1 pc.

10 pcs.

1 pc.

12 pcs.

1 pc.

12 pcs.

1 pc.

10 pcs.

1 pc.

14 pcs.

1 pc.

12 pcs.

1 pc.

16 pcs.

1 pc.

14 pcs.

1 pc.

18 pcs.

1 pc.

20 pcs.

1 pc.

22 pcs.

1 pc.

24 pcs.

1 pc.

26 pcs.

1 pc.

26 pcs.

1 pc.

28 pcs.

1 pc.

30 pcs.

22

Assembly Type AT Series

Sinusoidal signal Output Type Scale Unit

AT100 Series

AT103

AT113

+2.5V

AT112-F

AT181 Specifications

Item

Code AT103 AT113 AT112-F AT181


Detection method

Photoelectric type transmission linear encoder

Light source: Light-emitting diode

Light-receiving element: Phototransistor (Photodiode for AT112-F only)

6000mm

120m/min *4

Two 90° phase-shifted sinusoidal signals

20μm

20μm

1500mm 1020mm

(5+5L

0

/1000) μm, L

0

：Effective range (mm) * 2

120m/min 50m/min

With scale reference point (50mm pitch)

(8±1)×10 -6 / °C

5VDC±5%

600mm

70mA 60mA

0 to 45°C-20°C to 70°C

20 to 80%RH (no condensation)

70mA

None

IP53

5N max.

0.3m

None

IP54

6N max.

Standard accessory (The length is shown in the dimension chart for each type)

Output connector (pin type)

DA-15P-NR (JAE)

Applicable plug

DA-15S-NR(JAE) or equivalent

1

9 15

8

Output


Signal output pitch

Maximum effective measurement length

Accuracy (20°C) * 1

Maximum response speed * 3


Main scale thermal expansion coefficient



Operating/storage temperature

Operating/storage humidity (relative humidity)

Head cable length

Protection rating

Sliding force

Signal cable * 5

Pin No.

1

2

3

4

Signal

0V

0V

主信号（ A 相、 B 相）出力回路

+5V

+5V

5

6

7

8

9

μ PC844

10 Ω

＋

Phase A

主信号（ A 相、相）出力回路 Ω Phase B

Standard voltage

A 相

μ PC844

＋ 2.5V

μ PC844

ALM (Alarm)

10 - 14

15

＋ 2.5V

＋ 2.5V

10 Ω

μ PC844

10 Ω

REF

F. G

In the AT112-F series, Pin No. 9 is not used.

• Common specification

Not used

＋ 5V

＋ 5V

1K Ω

1K Ω

φ Z

AL

＋ 5V

＋ 5V

μ PC393

5.1K

Ω

μ PC393

φ Z

AL

5.1K

Ω

アラーム

アラーム

Output signal waveform

Extension cable (sold separately) * 5

Length

2m

5m

7m

Part No.

09AAA033A

09AAA033B

09AAA033C

Remarks

Conduit type

*1 Depending on the model, we also have high-accuracy types available. (See notes in the scale unit dimension chart.)

*2 For AT103-3250 and above, this is (5+8L

0

/1000) μm. For AT112-F, this is (3+3L

0

/1000) μm. L

0

: mm

*3 Depends on the control unit electrical unit to which it is connected.

*4 For AT103-3250 and above, this is 50m/min.

＋5V

*5 PVC sheathed signal cables and extension cables will be made to order.

Phase B 1k Ω

øZ

AL

Output signal

Signal output circuit

＋5V

Signal

Phase A

Phase B

Output signal waveform

20µm

20µm



Vpp=2V

Vpp=2V

20±10µm * 6

10 Ω Phase A

Phase B 1k Ω

+2.5V

10

AL

Ω

REF

5.1k

Ω

Alarm

µPC393

Scale reference point 20±10µm * 6

øZ

Phase B 1k Ω

*6 The reference point signal for AT103 and AT113 is

"70μm±10μm".

10 Ω Phase A

Phase B

+2.5V

＋5V

10

AL REF

+2.5V

5.1k

Ω

REF

Alarm

Alarm signal output circuit

＋5V

5.1k

Ω

µPC393

Alarm

µPC844

20μm Mounting dimensions

(Effective range:100 to 3000mm)

Vpp=2V

10 Ω

µPC844

REF

A

5.1k

Ω AT103

20μm

(Standard type)

37.5

20

Vpp=2V

10

Air supply hole (M5) 10

The scale reference points are output at a 50mm pitch from the end of the effective range (L

0

), which is shown with the � mark.

L

1

L

0

L

3

L

2

// 0.2 G

10

Scale unit

Mounting surface

Middle support

Mounting

Middle support

10 27 method A

10

B

L

4

6

20

L

6

L

5

A

L

6

Unit: mm

C

Adjustable

20μm

X

1.5±0.2

36

// 0.1 A

11 (hex) Countersunk, depth 5

Signal cable

47

42

60±0.2

90

7

G: Machine guideway

Countersunk, depth 6.5, reverse side has hex countersink, depth 5

// 0.2 G 7

Mounting method B

2.2

Middle support

A

Adjustable

10

Detector head mounting surface

View from X direction

Detector head mounting surface Scale unit

Mounting surface

23

• Dimensions L4, L5, and L6 indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 1000mm and more. (The position of the middle support is adjustable in the measuring length direction.)


AT103

Order No.

Code

539-111-30 AT103- 100

539-112-30 AT103- 150

539-113-30 AT103- 200

539-114-30 AT103- 250

539-115-30 AT103- 300

539-116-30 AT103- 350

539-117-30 AT103- 400

539-118-30 AT103- 450

539-119-30 AT103- 500

539-121-30 AT103- 600

539-123-30 AT103- 700

539-124-30 AT103- 750

539-125-30 AT103- 800

539-126-30 AT103- 900

539-127-30 AT103-1000

539-128-30 AT103-1100

539-129-30 AT103-1200

539-130-30 AT103-1300

539-131-30 AT103-1400

539-132-30 AT103-1500

539-133-30 AT103-1600

539-134-30 AT103-1700

539-135-30 AT103-1800

539-136-30 AT103-2000

539-137-30 AT103-2200

539-138-30 AT103-2400

539-139-30 AT103-2500

539-140-30 AT103-2600

539-141-30 AT103-2800

539-142-30 AT103-3000

1800

2000

2200

2400

2500

2600

2800

3000

1000

1100

1200

1300

1400

1500

1600

1700

Effective range

L

0

(mm)

100

150

200

250

300

350

400

450

500

600

700

750

800

900

1890

2100

2300

2500

2600

2700

2900

3100

1060

1160

1260

1360

1460

1560

1690

1790

Maximum travel length

L

1

(mm)

120

170

220

270

330

380

430

480

540

650

760

810

860

960

2018

2228

2428

2628

2728

2828

3028

3228

1188

1288

1388

1488

1488

1688

1818

1918

Mounting hole pitch

L

2

(mm)

248

298

348

398

458

508

558

608

668

778

888

938

988

1088

2038

2248

2448

2648

2748

2848

3048

3248

1208

1308

1408

1508

1608

1708

1838

1938

Overall length

L

3

(mm)

268

318

368

418

478

528

578

628

688

798

908

958

1008

1108

Middle support

L

4

(mm)

—

594

644

694

744

794

844

—

1314

1364

1414

1514

1614

Effective range (mm) Middle support

1000 - 1500 (1 place)

1600 - 2200

2400 - 3000

BC (2 places)

ABC (3 places)

Middle support

L

5

(mm)

—

—

610

650

670

740

800

1300

1340

1400

1500

1600

Middle support

L

6

(mm)

—

—

—

650

670

700

750

800

Signal cable length (m)

3

5

7

Note 1: For effective ranges of 100 to 2000mm, we also have the high-accuracy AT103F JIS Class 0 (3+3L

0

/1000) μm models available.

Note 2: The ultra-high-accuracy AT103S (2+2L

0

/1000) μm models for effective ranges of 100 to 500mm may be custom-ordered on request.

Note 3: The accuracy does not include quantizing error; L

0

is the effective range (mm).


(Effective range: 3250 to 6000mm)

AT103

(Standard type)

Mounting method

32.5

23

Mounting block A

L

4

60

L

6

L

6

L

5

L

6

2×ø8 (hole)

L

6

L

4

Mounting block

80

40

// 0.2 G

Unit: mm

(Adjustable) (Adjustable) (Fixed) (Adjustable) (Adjustable)

X

1.5±0.2

36

// 0.1 A

10

47

55.(max)

60±0.2

90

L

0

L

1

L

3

2×7 (hole), countersunk ø11, depth 6.5

(Detector head mounting hole pitch)

Reverse side has hex countersink, depth 5

10

// 0.2 G 10.3 (hex) Countersunk, depth 5

View from X direction


Order No.

Code

539-143-30

539-144-30

539-145-30

539-146-30

539-147-30

539-148-30

539-149-30

539-150-30

539-151-30

539-152-30

539-153-30

539-154-30

AT103-3250

AT103-3500

AT103-3750

AT103-4000

AT103-4250

AT103-4500

AT103-4750

AT103-5000

AT103-5250

AT103-5500

AT103-5750

AT103-6000

Note: Accuracy is (5+8L

0

/1000) μm.

Effective range

L

0

(mm)

3250

3500

3750

4000

4250

4500

4750

5000

5250

5500

5750

6000

Maximum travel length L

1

(mm)

3350

3600

3850

4100

4350

4600

4850

5100

5350

5600

5850

6100

Scale unit

Mounting surface

Overall length

L

3

(mm)

3470

3720

3970

4220

4470

4720

4970

5220

5470

5720

5970

6220

24


Mounting block

L

4

(mm)

135

160

125

110

135

160

85

120

125

130

135

110

Mounting block

L

5

(mm)

3200

3400

3720

4000

4200

4400

4800

4980

5220

5460

5700

6000

Mounting block

L

6

(mm)

800

850

930

1000

1050

1100

800

830

870

910

950

1000

Signal cable length

(m)

10

15

2 − 7 キリ、φ 11 ザグリ深 6.5

（検出ヘッド取付け穴ピッチ）

裏面六角ザグリ深 5

A



22

AT113

(Slim spar type)

9

28

The scale reference points are output at a 50mm pitch from the end of the effective range (L

0

), which is shown with the mark.

L

4

Mounting method A 9

L

2

L

1

L

0

// 0.2 G

9

1 Middle support

Middle support

L

5

12

ø5 (hole)

(Fixed)

B

1.5±0.4

// 0.1 A

19 1.5

47

14

Signal cable

7

Head cable (0.3m)

42 42

80±0.2

94

L

3

80±0.2

2×M6, through hole, countersunk ø9 on both sides, depth 4.5

Mounting method B

G: Machine guideway

// 0.2 G

1

Middle support

2×ø7, through hole

ø14, both sides countersunk, depth 6.5

17

12

B (Fixed)

ø5 (hole)

L

6

A

L

7

(Fixed)

A (Fixed)

L

7

18 2×M4×0.7, depth 5 Scale unit mounting surface

• Dimensions L

5

, L

6

, and L

7

indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 500mm and more. (The position of the middle support is adjustable in the measuring length direction.)


Effective range (mm) Middle support

500 - 1000 A (1 place)

1100 - 1500 BC (2 places)

Order No.

AT113

Code

539-201-30 AT113- 100

539-202-30 AT113- 150

539-203-30 AT113- 200

539-204-30 AT113- 250

539-205-30 AT113- 300

539-206-30 AT113- 350

539-207-30 AT113- 400

539-208-30 AT113- 450

539-209-30 AT113- 500

539-211-30 AT113- 600

539-213-30 AT113- 700

539-214-30 AT113- 750

539-215-30 AT113- 800

539-216-30 AT113- 900

539-217-30 AT113-1000

539-218-30 AT113-1100

539-219-30 AT113-1200

539-220-30 AT113-1300

539-221-30 AT113-1400

539-222-30 AT113-1500

Effective range

L

0

(mm)

100

150

200

250

300

350

400

450

500

600

700

750

800

900

1000

1100

1200

1300

1400

1500


L

1

(mm)

120

170

220

270

330

380

430

480

540

640

740

780

840

940

1040

1140

1240

1340

1440

1540

Mounting hole pitch

L

2

(mm)

258

308

358

408

468

518

568

618

678

778

878

918

978

1078

1178

1278

1378

1478

1578

1678

Mounting hole pitch

L

3

(mm)

242

292

342

392

452

502

552

602

662

762

862

902

962

1062

1162

1262

1362

1462

1562

1662

Overall length

L

4

(mm)

276

326

376

426

486

536

586

636

696

796

896

936

996

1096

1196

1296

1396

1496

1596

1696

Middle support

L

5

(mm)

—

339

389

439

459

489

539

589

—

Middle support

L

6

(mm)

331

381

431

451

481

531

581

Note 1: For effective ranges of 100 to 2000mm, we also have the high-accuracy AT113F JIS Class 0 (3+3L

0

/1000) μm models available.

Note 2: The ultra-high-accuracy AT113S (2+2L

0



0


—

—

Middle support

L

7

(mm)

—

—

430

460

490

530

560

Signal cable length (m)

3

5



AT181

(Sealed type)

2×M6, depth 8 (T groove + nut)

7 28 Mounting block

Rotational freedom 360°

Fixture for transportation

Cable connector

Rotational freedom 260°

Unit: mm

Unit: mm

C

(Fixed)

C (Fixed)

21

11 20

42

28 70

35 21

2×M6, depth 10 10

2×7 (hole)

Countersunk ø11, depth 6.5

20 min.0

max.L

1

7.5

8

3×7 (hole), countersunk ø11, depth 6.5

L

2

L

3

47

Scale reference points are output starting from here at 50mm pitch.

15 min.0

max.L

0

15

// 0.2

G

Signal cable

// 0.2 G

(7.5)

25

ø17

ø10.5

25

Dimensions AT111


Order No.

539-301

539-302

539-303

539-304

539-305

539-306

539-307

539-308

539-309

539-310

539-311

AT181

Code

AT181-100

AT181-150

AT181-200

AT181-250

AT181-300

AT181-350

AT181-400

AT181-450

AT181-500

AT181-550

AT181-600

Effective range

L

0

(mm)

100

150

200

250

300

350

400

450

500

550

600


L

1

(mm)

Note 1: We have no high-accuracy AT181F JIS Class 0 (3 + 3L 0 /1000) μm models.

Note 2: The accuracy does not include quantizing error; L 0 is the effective range (mm).

130

180

230

280

330

380

430

480

530

580

630

Mounting hole pitch

L

2

(mm)

255

305

355

405

455

505

555

605

655

705

755

Unit (frame) length

L

3

(mm)

270

320

370

420

470

520

570

620

670

720

770



AT112-F

(Super slim spar type)

Scale reference points are output starting from here at 50mm pitch.

L

2

L

1

6

35

// 0.2 G

(6)

A

Both sides countersunk, depth 5

15.4

Signal cable length

(m)

3

Unit: mm

3

12 56±0.2

80

9

L

0

2×M6×1

Both sides countersunk, depth 4.2

74±0.2

(25)

Head cable length 0.3m

2×M4×0.7 through hole, depth 6.5

42

G: Machine guideway

// 0.2 G

42

9

4.4

15 0.2±0.3

// 0.05 A

47

Signal cable length 3m


Order No.

539-251-10

539-252-10

539-253-10

539-254-10

539-255-10

539-256-10

539-257-10

AT112

Code

AT112- 50F

AT112- 70F

AT112- 120F

AT112- 170F

AT112- 220F

AT112- 270F

AT112- 320F

Effective range

L

0

(mm)

50

70

120

170

220

Mounting hole pitch

L

1

(mm)

143

163

213

263

313

Overall length

L

2

(mm)

155

175

225

275

325

539-258-10

539-259-10

539-260-10

539-261-10

539-262-10

539-263-10

539-264-10

539-265-10

539-266-10

AT112- 370F

AT112- 420F

AT112- 470F

AT112- 520F

AT112- 570F

AT112- 620F

AT112- 670F

AT112- 720F

AT112- 770F

270

320

370

420

470

520

570

620

670

720

770

363

413

463

513

563

613

663

713

763

813

863

375

425

475

525

575

625

675

725

775

825

875

539-267-10 AT112- 820F 820 913 925

539-268-10

539-269-10

AT112- 920F

AT112-1020F

920

1020

1013

1113

1025

1125

Note 1: The ultra-high-accuracy AT112S (2+2L

0



0


Note 3: For AT112-50F and 70F only, there is one scale reference point at the midpoint.

Signal cable length

(m)

3

26


1Vpp Differential Signal Output Type Scale Unit

AT402E

Features

• Ideal for machine tools for heavy cutting as well as linear motors.

• Has multi-point elastic fixing for excellent vibration resistance (200m/s 2 ),shock resistance (400m/s 2 ), and temperature characteristics.

• The adoption of the Absolute Interval Code has enabled a simplified, low-cost ABS system.

Specifications

Item Code

Cable configuration

Detection method

Base position of elongation due to temperature changes

Effective range

AT402E-A Type

3m single wire

AT402E-B Type

3m European CNC manufacturers' specification

Photoelectric linear encoder

AT402E-C Type

3m FANUC LTD. specification

Midpoint of the screws used for rigid fixing near the midpoint of the effective range.

Output signal

Signal output pitch


Accuracy (20°C)




140 to 3040mm

Signal: 1Vpp differential Sinusoidal signal, differential reference point pulse: Absolute Interval Code compatible

20μm

120m/min (with Sinusoidal signal amplitude of -3db)

Effective range 140 to 540mm : ±2μm

Effective range 640 to 940mm : ±3μm

Effective range 1040 to 3040mm : ±3μm/m

(8±1)×10 -6 / ºC

0 to 45°C 20 to 80% RH (no condensation)

-20 to 70°C 20 to 80% RH (no condensation)

200m/s 2 (55 to 2000Hz)

400m/s 2 (half-sine 11ms)

Vibration resistance

Shock resistance



5VDC±5%

120mA

Maximum sliding force

Protection rating

Air supply hole

Note 1: For details regarding the applicable system, please consult with the individual manufacturer.

4N

Equivalent to IP53

With air supply hole (end of scale frame/detector head)

Cable configuration

Ref.

Overall scale

Signal cable Ass’y

Signal cable Type A

Signal cable Type B

Signal cable Type C

27

Pin assignment

(1) Signal cable A (single wire specification)

Wire color

White

Black

Brown

Red

Orange

Signal

+5V

GND

Phase A

Phase XA

Phase B

Note 1: Ground the shield to the earth bar

Wire color

Yellow

Green

Blue

Shield

Signal

Phase XB

Phase Z

Phase XZ

FG

(2) Signal cable B (European CNC manufacturer's specification)

12-pin Type Connector without locking ring

Pin

2,12

10,11

5

6

8

Signal

+5V

GND

Phase A

Phase XA

Phase B

Pin

1

3

4

Shell

7,9

Signal

Phase XB

Phase Z

Phase XZ

FG

Not used

(3) Signal cable C (FANUC LTD. specification)

12-pin Type Connector

Pin

1,2

3,4

5

6

7

Signal

+5V

GND

Phase A

Phase XA

Phase B

Note 1: Connector used: RM15WTP-12P

Note 2: Applicable connector: RM15WTR-12S

(Hirose Electric or equivalent product)

Pin

8

9

10

11, shell

12

Signal

Phase XB

Phase Z

Phase XZ

FG

Not used


Signal period = 20µm = 360°

Phase A

Phase XA

Phase B

Phase 90 ± 10 °

Phase XB

Phase Z

Phase XZ

180°±90° nominai = 100%

Absolute Interval Code

Vref

Vref

Vref

Vref

Vref

Vref

Vref = 2.5±0.5V

Ref.

(19)

64±2

(45)

First reference point output position

5

ZP=20 ZP=20 ZP=20 ZP=20

Effective range


ZP=20

ZPn=10+0.02×n

Reference point signal output position

28

位相差 90 °± 10 °

X

AT402E scale unit mounting dimensions

R

//

� Surface of aluminum frame

0.1

G

0.05/500

35 P100

±0.2

L

2

= (L

0

/2) +65

6 (hole), through hole

Maximum effective length L

3

=L

0

+10

Elastically secured portion

Special leaf spring

(Effective range L

0

)

P100×n

(Aluminum frame)

M5×0.8, length 25

(spring washer and flat round washer)

S/N 7200001

AT402E

MADE IN JAPAN

Ref.

19

±2

5

ZP1 ZP2 ZP3 ZP4

=10.02 =10.04 =10.06 =10.08

ZP=20 ZP=20 ZP=20 ZP=20

P

//

* Mounting mating surface

0.1

G

0.05/500

Longitudinal direction

(Detector head)

25 40±0.2

90

Effective range L

0

Overall length L

1

= L

0

+119

ZPn=10+0.02×n

ZP=20

Absolute Interval Code

7

2×M5, depth 5

76±0.2

( 19 )

ø7, through hole

S/N 7200001

Kawasaki , JAPAN

[Notes]

1 .

G indicates the machine guideway.

2

3

.

P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface for mounting the detector head.

.

Q and R indicate the datum surfaces for mounting this linear scale.

View from X direction

Mounting example 1

G

* Surface of aluminum frame

27.6

( 14.8

)

13

Air purge

MS×0.8, depth 5

(Surface direction)

AIR

Vertical direction

Mounting example 2

// 0.1

R

Longitudinal direction

M6 nut

(

2±0.1

Clearance between the detector head and aluminum frame

) 37

//

S Mounting mating surface

0.1

P

* Longitudinal direction

* Vertical direction

AIR

Mounting example 3

AIR

M5 bolt

29

Code

AT402E-140

AT402E-240

AT402E-340

AT402E-440

AT402E-540

AT402E-640

AT402E-740

AT402E-840

AT402E-940

AT402E-1040

AT402E-1140

AT402E-1240

AT402E-1340

AT402E-1440

AT402E-1540

AT402E-1640

AT402E-1740

AT402E-1840

AT402E-2040

AT402E-2240

AT402E-2440

AT402E-2640

AT402E-2840

AT402E-3040


Effective range

L

0

(mm)

140

240

340

440

540

640

740

840

940

1040

1140

1240

1340

1440

1540

1640

1740

1840

2040

2240

2440

2640

2840

3040

Overall length

L

1

(mm)

259

359

459

559

659

759

859

985

1059

1159

1259

1359

1459

1559

1659

1759

1859

1959

2159

2359

2559

2759

2959

3159

L

2

(mm)

135

185

235

285

335

358

435

485

535

585

635

685

1085

1185

1285

1385

735

785

835

885

935

985

1485

1585


L

3

(mm)

150

250

350

450

550

650

750

850

950

1050

1150

1250

1350

1450

1550

1650

1750

1850

2050

2250

2450

2650

2850

3050 n (pcs)

5

6

7

8

2

3

4

9

10

11

12

13

21

23

25

27

14

15

16

17

18

19

29

31

AT402E-140

AT402E-240

AT402E-340

AT402E-440

AT402E-540

AT402E-640

AT402E-740

AT402E-840

AT402E-940

AT402E-1040

AT402E-1140

AT402E-1240

AT402E-1340

AT402E-1440

AT402E-1540

AT402E-1640

AT402E-1740

AT402E-1840

AT402E-2040

AT402E-2240

AT402E-2440

AT402E-2640

AT402E-2840

AT402E-3040

Codes and Order Numbers

Code

Scale unit + single wire cable 3m

(A Type)

Order No.

539-371-01

539-373-01

539-374-01

539-375-01

539-376-01

539-377-01

539-378-01

539-379-01

539-380-01

539-381-01

539-382-01

539-383-01

539-384-01

539-385-01

539-386-01

539-387-01

539-388-01

539-389-01

539-390-01

539-391-01

539-392-01

539-393-01

539-394-01

539-395-01

Scale unit + cable with European CNC manufacturer's connector 3m

(B Type)

Order No.

539-371-02

539-373-02

539-374-02

539-375-02

539-376-02

539-377-02

539-378-02

539-379-02

539-380-02

539-381-02

539-382-02

539-383-02

539-384-02

539-385-02

539-386-02

539-387-02

539-388-02

539-389-02

539-390-02

539-391-02

539-392-02

539-393-02

539-394-02

539-395-02

Scale unit + Cable with FANUC LTD. connector 3m

(C Type)

Order No.

539-371-03

539-373-03

539-374-03

539-375-03

539-376-03

539-377-03

539-378-03

539-379-03

539-380-03

539-381-03

539-382-03

539-383-03

539-384-03

539-385-03

539-386-03

539-387-03

539-388-03

539-389-03

539-390-03

539-391-03

539-392-03

539-393-03

539-394-03

539-395-03

30


Square-Wave Signal Output Type Scale Unit (Slim/High-speed types)

AT211

Mounting method: Multi-point fixing (excellent vibration and shock resistance)

Scale alarm display LED

Mounting method: Double-end fixing (space-saving type)


Features

• This is a slim, sealed scale that can be directly connected to the control unit.

• High speed response up to 120m/min, making it compatible with a wide range of resolutions from 0.1 to 5μm.

• The multi-point fixing type has excellent vibration resistance.

• Scale alarm display makes for easy maintenance.

• Wide range of specifications enables easy choice to best suit your application.

Single head cable type (no connector)

Specifications

Item

Effective range (L

0

)


Accuracy (20°C)

Code


Shock resistance

Air supply hole

Output signal

Type

Electrical specifications


Minimum resolution





Protection rating

Sliding force

Operating temperature

Storage temperature

Operating/storage humidity

Direction switching

Alarm function

Alarm detection

Alarm output

Alarm display

AT211

100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 750, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500 mm

50mm pitch, center point, left end, right end (fixed when shipped)

(3+3L

0

/1000) μm：(For L

0

：500mm, we can also fabricate a high-accuracy type: (2+2L

0

/1000) μm)：

200 m/s 2

L

0

: Effective range (mm)

(Conditions: 55 to 2000Hz) (Multi-point fixing type)

250 m/s 2 (Conditions: half-sine, 11ms) (Multi-point fixing type)

With air supply hole (Multi-point fixing type)

PA/PA, PB/PB, PZ/PZ

Conforms to RS422

20μm

0.1, 0.2, 0.5, 1, 2.5, 5μm (fixed when shipped)

125, 250, 333, 500, 1000ns (fixed when shipped)

5.4 to 120 m/min (Determined by minimum resolution and minimum edge interval)

5VDC±5%

200 mA

Equivalent to IP53 (when the user's manual is followed)

5N max.

0 to 45°C

-20 to 70°C

20 to 80%RH (no condensation)

Standard/Reverse (set when shipped)

Over-speed, scale signal error

Output for PA/PA, PB/PB, and PZ/PZ are all high-impedance

Red LED on NC side connector of signal cable turns on (this does not include single head cable types)

31

Mounting dimensions for multi-point fixing type

A

20

14.3

Scale unit mounting surface

// 0.1

G

( 4.8

)

AIR

L

2

100±0.2

Overall length L 3

100±0.2

// 0.1

G

100±0.2

Unit: mm

ø5 (hole), countersunk ø8.6 on both sides, depth 6

Fixing screw: Hex bolts M4×25

(4.8)

L

2

AT211

MADE IN JAPAN

0.5±0.2

// 0.1 A

19

(30)

G: Machine guideway

Air supply hole (M5)

(On both sides)

Head cable (L=0.3m or 1m)

80±0.2

94

Effective range L

0


1

2×M6×1.0, through hole


Coil spring

Possible to mount scale unit on this surface

(Reverse mounting direction)

2×M4×0.7, depth 5 80±0.2

// 0.2

G


(Standard mounting direction)

Flexible metal conduit

Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.

Signal cable

(L is 3, 5, or 7m)

( 47.4

)

( 56.4

)

( 50 )

// 0.1

G

0.03/100


Connector for feedback cable

(Included accessory)

User provides the cable and NC side connectors.

Mounting dimensions for multi-point fixing type

Scale unit

AT211- 100A

AT211- 150A

AT211- 200A

AT211- 250A

AT211- 300A

AT211- 350A

AT211- 400A

AT211- 450A

AT211- 500A

AT211- 600A

AT211- 700A

AT211- 750A

AT211- 800A

AT211- 900A

AT211-1000A

AT211-1100A

AT211-1200A

AT211-1300A

AT211-1400A

AT211-1500A

Effective range

L

0

(mm)

750

800

900

1000

1100

1200

1300

1400

1500

450

500

600

700

100

150

200

250

300

350

400


L

1

(mm)

780

840

940

1040

1140

1240

1340

1440

1540

480

540

640

740

120

170

220

270

330

380

430

End surface dimensions

L

2

(mm)

49.5

29.5

29.5

29.5

49.5

29.5

29.5

29.5

29.5

29.5

29.5

29.5

29.5

19.5

44.5

19.5

44.5

24.5

49.5

24.5

Overall length

L

3

(mm)

899

959

1059

1159

1259

1359

1459

1559

1659

599

659

759

859

239

289

339

389

449

499

549

No. of mounting holes on scale unit

(pcs)

9

10

11

12

13

8

9

6

7

14

15

16

17

4

4

3

3

5

5

6

32

Mounting dimensions for double-end fixing type

A

1

22 9

Middle support L 5

(30)

(50)

1.5±0.2

// 0.1

A

19

Coil spring

// 0.1

G

Middle support

// 0.1

G

B

(Fixed)

Overall length L 4

Mounting hole pitch L 2

A

(Fixed)

Middle support L 7

ø5 (hole)

Unit: mm

9

// 0.2

G

C

(Fixed)


AT211

7

14

Both sides countersunk, depth 6.5

17

80 ±0.2

94

Effective range L 0

Maximum travel length L 1

2×M6×1.0, through hole


Head cable (L=0.3m or 1m)

2×M4×0.7, depth 5

Mounting hole pitch L

3

80±0.2

// 0.2

G: Machine guideway

2×ø7, through hole

G ø14, both sides countersunk, depth 6.5

17

1

Middle support


B

(Fixed)

A

(Fixed)

ø5 (hole) C

(Fixed)


Middle support L

7

Middle support L

6

Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.

Signal cable

(L is 3, 5, or 7m)

(47.4) (56.4)

(50)





Mounting dimensions for double-end fixing type

Scale unit

AT211- 100B

AT211- 150B

AT211- 200B

AT211- 250B

AT211- 300B

AT211- 350B

AT211- 400B

AT211- 450B

AT211- 500B

AT211- 600B

AT211- 700B

AT211- 750B

AT211- 800B

AT211- 900B

AT211-1000B

AT211-1100B

AT211-1200B

AT211-1300B

AT211-1400B

AT211-1500B

Effective range

L

0

(mm)

1000

1100

1200

1300

1400

1500

700

750

800

900

400

450

500

600

100

150

200

250

300

350


L

1

(mm)

120

170

220

270

330

380

740

780

840

940

430

480

540

640

1040

1140

1240

1340

1440

1540

878

918

978

1078

568

618

678

778

Mounting hole pitch

(mm)

L

2

(mm) L

3

(mm)

258

308

242

292

358

408

468

518

342

392

452

502

1178

1278

1378

1478

1578

1678

1162

1262

1362

1462

1562

1662

862

902

962

1062

552

602

662

762

896

936

996

1096

586

636

696

796

1196

1296

1396

1496

1596

1696

Overall length

L

4

(mm)

276

326

376

426

486

536

Middle support (mm)

L

5

—

L

6

—

339 331

389 381

439 431

459 451

489 481

539 531

589 581

— —

L

7

—

430

460

490

530

560

• The number of middle supports attached depends on the effective range.


500 to 1000

1100 to 1500

Middle support

A (1 place)

B, C (2 places)

33

Cable pattern

(47.4)

(56.4)

(50)

(50)

(30)

Head cable

(L is 0.3 or 1m)





Signal cable

(L is 3, 5, or 7m)

Unit: mm

(47.4) (56.4)

(50)

(50)

(30)

Head cable

(L is 0.3 or 1m)




Signal cable

(L is 3, 5, or 7m)


(47.4)

(56.4)

(50) (30)

Scale alarm display LED Signal cable

(L is 3, 5, or 7m)




Head cable

(L is 0.3 or 1m)

(4)

(45)

Sheath / Oil-resistant PVC


(L is 3, 5, or 9m)

Wires (pre-soldered)

34

Specification


• There is an extensive selection of specifications for the AT211.


If you don't have a specification in mind, choose the option with the .

* For special applications not shown in the specifications, please contact us.

Additionally, we are also able to meet the 1VP-P Sinusoidal signal output specification.


AT211 - - -

Effective range list

Code

0100

0150

0200

0250

0300

0350

0400


100

150

200

250

300

350

400

Code

0450

0500

0600

0700

0750

0800

0900


450

500

600

700

750

800

900

Code

1000

1100

1200

1300

1400

1500


1000

1100

1200

1300

1400

1500

Mounting method

Code

A

B

Multi-point fixing

Double-end fixing


Code

1

2

3

4

50mm pitch

Center point

Left end

Right end

50mm pitch interval

When the scale reference point is at the left end

Pitch: 50

10

From the effective range mark

When the scale reference point is at the center point

(midpoint of effective range)

When the scale reference point is at the right end

10

AT211

Units: mm

Accuracy (20°C)

Code

S

H

(3+3L

0

/1000) μm

(2+2L

0

/1000) μm

Note 1: L

0


Note 2: Type H is used for effective ranges of 500mm or less.

Specification combination table

(resolution, response speed, and minimum edge interval)

Resolution (μm)


(ns) *

125 250 333 500 1000

0.1

0.2

0.5

1.0

2.5

5.0

A: 43 (710)

F: 86 (1400)

L:120 (2000)

—

—

—

B: 22 (360)

G: 43 (710)

M:110 (1800)

R:120 (2000)

—

—

C: 16 (260)

H: 32 (530)

N: 81 (1300)

S:120 (2000)

—

—

* Codes A to Y show the maximum response speed in m/min, values in ( ) are mm/s.

Note : The minimum edge interval varies 0 to -10% based on the operating environmental conditions.

D: 11 (180)

J : 22 (360)

E: 5.4 (90)

K: 11 (180)

P: 54 (900) Q: 27 (450)

T:110 (1800) U: 54 (900)

W: 120 (2000) X:120 (2000)

— Y:120 (2000)

35

(Example)

AT211 - 1 5 0 0 A 1 S - P 1 - A B

Effective range

1500mm

Mounting method

Multi-point fixing


50mm pitch

Accuracy

(3+3Lo/1000) μm

Direction

Standard: PA goes ahead

Resolution 0.5μm

Response speed 54m/min

Minimum edge interval: 500ns

Signal cable

Length3m

No flexible metal conduit

Head cable

Length 0.3m

With flexible metal conduit

Signal cable

Code

C

D

A

B

Length (L)

3m

3m

5m

5m

Flexible metal conduit * 1

Yes

No

Yes

E

F

G* 2

7m

7m

3m

No

Yes

No

No

H* 2

J* 2

X

5m

7m

No

No

No signal cable

*1 The cable is enclosed in a flexible metal conduit or else is PVC sheathed.

*2 The connector (CN3) for signal cables

G, H, and J are half-pitch connectors.

Not waterproof


Waterproof connector (special)

(CN5) (CN4)

Feedback cable

(Provided by user)

(CN3)

Signal cable

(CN2) (CN1)

Head cable

Included connector (when a signal cable is used)

Scale unit

MODEL

AT211

Connector for signal cable (CN3) (pin type)

1

9

8

15

Pin No.

1, 2, 13

3, 4, 11

5

6

7

Signal

0V

+5V

PA

PA

PB

Pin No.

8

9

10

12, 14

15

Signal

PB

PZ

PZ

Not used

F.G

Applicable connector (CN4):

HDAB-15S (Hirose Electric or equivalent product (D-sub series) may be used)

Output circuit specification

PA

Phase A

PA

PB

PA

PA

AM26C31

Phase B

PB

PB

PB t t t t

Phase Z

PZ

PZ

PZ

PZ

Minimum edge interval t = 125 to 1000ns

60±10µm

Head cable

A 0.3m

B 0.3m

C 1m

D 3m

E 4m

F 5m

H 7m

J 8m

K 9m


Connector (CN1)

Yes Special waterproof

No Special waterproof

No Special waterproof

No No

Not waterproof

(CN5) (CN4)

Feedback cable

(Provided by user)

Note: The cable is enclosed in a flexible

metal conduit or else is PVC sheathed.



Waterproof connector (special)

(CN3) (CN2) (CN1)

Signal cable Head cable

Included connector (when a signal cable is used)

Connector provided by user

(CN5)

Single wires Single head cable type (no connector)

Scale unit

Scale unit

MODEL

AT211

MODEL

AT211

4

45 L

Detector head

Head cable

ALM signal for single head cable type (no connector)

1k

Alarm circuit ALM

Equivalent to TC7S08 (Toshiba C-MOS)

High

Low (when alarm occurs)

Wire color

White, black

Brown, red

Orange

Yellow

Green

Signal

0V

+5V

PA

PA

PB

Wire color

Blue

Purple

Signal

AT211 PB

PZ


ALM

Direction

Code

1

2

Standard: PA goes ahead


AT211


Standard:

PA goes ahead

PA

PB

Reverse:

PA

PB goes ahead PB

* These are settings for when the scale is moving.

36

Standard:

PA goes ahead

PA

PB

Reverse:

PA

PB goes ahead PB

* These are settings for when the scale is moving.


Square Wave Signal Output Type Scale Unit (Standard type)

AT203

Features

• The maximum effective measurement length of 6000mm enables use on large machines (such as for LCD production).

• The travel length of the linear scale is output with 2-phase square wave signals, which can be used as a feedback signal for

NC machine tools.

• The pulse signal unit (PSU) is no longer needed, and the AT203 can be directly connected to the NC machine tool.

• The maximum response speed is 2000mm/s. (When resolution is 1μm and the minimum edge interval is 250ns)

Specifications

Item

Detection method

Output

Output method

Signal output pitch

Resolution

Effective range

Accuracy (20°C)

Code AT203

Photoelectric type transmission linear encoder

Two 90° phase-shifted square wave signals

Differential line driver

20μm

1, 0.5, 0.1μm (switched using DIP switches)

100 to 6000mm

Effective range 100 to 1500mm (3+3L

0

/1000) μm


0

/1000) μm


0

/1000) μm

L

0



Scale reference point pitch

Main scale thermal expansion coefficient



Operating/storage temperature

Operating/storage humidity (relative humidity)

Protection rating

Sliding force

Signal cable 3m (optional accessory) Part No.09AAA353B

Signal cable 5m (included accessory) Part No.09AAA353A

11 to 120m/min (Depends on the resolution and minimum edge interval) (See separate table)

50mm

(8±1) ×10 −6 /°C

5VDC±5% 　

250mA

0 to 45°C, -20 to 70°C (no condensation)

20 to 80% RH (no condensation)

Equivalent to IP53

5N max.

Pin assignment

Pin No.

1

2

3

6

7

4

5

12

13

14

15

10

11

8

9

Connector used: HDAB-15P (Hirose Electric)

Applicable selectable: HDAB-15S (Hirose Electric)

Function

0V

0V

+5V

+5V

PA

PA

PB

PB

PZ

PZ

+5V

N.C.

0V

N.C.

F.G


PA

PA

PB

PB t t: Minimum edge interval

PZ

PZ

70±10µm

37

Maximum response speed*


500ns

250ns

Resolution

Maximum response speed (m/min)

1 μm

110 (50)

120 (50)

The indicates the setting when shipped

* Values in ( ) are for effective ranges of 3250mm and more.

* The minimum edge interval varies 0 to -10% based on the operating environmental conditions.

0.5 μm

54 (50)

110 (50)

Direction

Internal DIP switches can be used to switch between the standard and reverse directions.

AT203 0.1 μm

11 (11)

22 (22)


AT203


AT203


Standard:

PA goes ahead

PA

PB

Reverse:

PB goes ahead

PA

PB

* This is in the standard direction when shipped.

AT203


Wiring example

Relay cable

5 PA

6 PA

Standard:

8

PB

9 PZ

10 PZ

3 +5V

Reverse:

PB goes ahead

1 0V

2 0V

13 0V

Shell F.G

15 F.G

PA

PB

PA

PB

(Note 1)

R1

R2

R1

R1

R2

R1

NC device

R1

R2

R1

+5V

(Note 2)

A

B

C

FG

R1 = 560

R2 = 150

Recommended receiver: SN75ALS195(TI)

Note 1 : When the shield has a drain wire, connect it to Pin 15.

Note 2 : Always ground the shield for relay cables by, for example, connecting it to an earth conductor.

38

AT203 scale unit mounting dimensions

• AT203-100 to 3000

A

20

37.5


X

1.5

±0.2

36

// 0.1

A

(46.3)

10

Signal cable

10

Unit: mm

Overall length L

3

Mounting hole pitch L

2


1

Effective range L

0

11.6

7

60

±0.2

90

// 0.2

G

AT203

MADE IN JAPAN

7

Countersunk, depth 6.5

G: Machine guideway

// 0.2

G

7

Scale unit

Mounting surface

単位： mm

Detector head mounting surface Scale unit

Mounting surface

View in X direction

Order No.

539-429-30

539-430-30

539-431-30

539-432-30

539-433-30

539-434-30

539-435-30

539-436-30

539-437-30

539-438-30

539-439-30

539-440-30

539-441-30

539-442-30

539-411-30

539-412-30

539-413-30

539-414-30

539-415-30

539-416-30

539-417-30

539-418-30

539-419-30

539-421-30

539-423-30

539-424-30

539-425-30

539-426-30

539-427-30

539-428-30

Code

AT203-1200

AT203-1300

AT203-1400

AT203-1500

AT203-1600

AT203-1700

AT203-1800

AT203-2000

AT203-2200

AT203-2400

AT203-2500

AT203-2600

AT203-2800

AT203-3000

AT203-100

AT203-150

AT203-200

AT203-250

AT203-300

AT203-350

AT203-400

AT203-450

AT203-500

AT203-600

AT203-700

AT203-750

AT203-800

AT203-900

AT203-1000

AT203-1100


L

1

(mm)

2300

2500

2600

2700

2900

3100

1260

1360

1460

1560

1690

1790

1890

2100

540

650

760

810

860

960

1060

1160

330

380

430

480

120

170

220

270

Effective range

L

0

(mm)

2200

2400

2500

2600

2800

3000

1200

1300

1400

1500

1600

1700

1800

2000

500

600

700

750

800

900

1000

1100

100

150

200

250

300

350

400

450

Mounting hole pitch

L

2

(mm)

2428

2628

2728

2828

3028

3228

1388

1488

1588

1688

1818

1918

2018

2228

668

778

888

938

988

1088

1188

1288

248

298

348

398

458

508

558

608

Overall length

L

3

(mm)

2448

2648

2748

2848

3048

3248

1408

1508

1608

1708

1838

1938

2038

2248

688

798

908

958

1008

1108

1208

1308

268

318

368

418

478

528

578

628

L

4

(mm)

1314

1364

1414

1514

1614

594

644

694

744

794

844

L

5

(mm) L

6

(mm)

610

650

670

740

800

1300

1340

1400

1500

1600

650

670

700

750

800

39

• AT203-100 to 3000

Middle support

Mounting surface method A

Middle support

10

B

L

4

20

6

L

6

L

5

L

6

A C

Adjustable

Unit: mm

2.1

Mounting surface method B

10

Middle support

B

L

4

20

6

L

6

L

5

L

6

A C

Adjustable

•Dimensions L

4

, L

5

, and L

6

indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 1000mm and more.

(The position of the middle support is adjustable in the measuring direction.)


1000 to 1500

1600 to 2200

2400 to 3000

Middle support

A (1 place)

B, C (2 places)

A, B, C (3 places)

• AT203-3250 to 6000

A

C1

32.5

23

7



80

60

L

4

2×ø8 (hole)

L

3

L

4


Overall length L

2

Mounting block

L

4

Rigidly fixed portion


L

4

// 0.2

G


7

AT203

MADE IN JAPAN

X

1.5±0.2

36

// 0.1

A

(46.3)

Signal cable

11.6

60±0.2

7

90

Effective range L

0


1


G: Machine guideway

// 0.2

G

View in X direction

Order No.

539-443-30

539-444-30

539-445-30

539-446-30

539-447-30

539-448-30

539-449-30

539-450-30

539-451-30

539-452-30

539-453-30

539-454-30

Code

AT203-3250

AT203-3500

AT203-3750

AT203-4000

AT203-4250

AT203-4500

AT203-4750

AT203-5000

AT203-5250

AT203-5500

AT203-5750

AT203-6000

Effective range

0

(mm)

3250

3500

3750

4000

4250

4500

4750

5000

5250

5500

5750

6000


1

(mm)

3350

3600

3850

4100

4350

4600

4850

5100

5350

5600

5850

6100

Overall length

2

(mm)

3464

3714

3964

4214

4464

4714

4964

5214

5464

5714

5964

6214

40


L

3

(mm)

1725

1850

1975

2100

2225

2350

2475

2600

2725

2850

2975

3100

L

4

(mm)

800

850

930

1000

1050

1100

800

830

870

910

950

1000

Scale unit

Mounting surface

No. of mounting blocks

5

7

Interface Unit

Pulse signal conversion unit

PSU-200

• The PSU-200 splits the sinusoidal signal output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions, and converts the signal to a square wave signal so that

NC feedback systems, measurement control devices, etc., can be used with linear scales in order to achieve highly accurate positioning.

System configuration

Mitutoyo linear scale PSU-200 Control device

CAL

ALM

O.S

PWR

PZ

P.E

N

P

U

T

I

T

P

U

T

O

U

Interface Unit PSU-200

Connector and indicator functions

No.

Name

(1) CAL light

(2) ALM light

(3) O.S. light

(4) PWR light

(5) PZ light

Function

Typically not used

Turns on when broken wires or short circuits are detected, or when a signal abnormality is detected.

Turns on when over-speed is detected.

Turns on only when power is supplied to the PSU. Power is supplied at

5VDC, from an external device.

Turns on when the scale goes past the reference point.

Turns on when the +5VDC power supply voltage from the external device

(6) P.E. light decreases, or if noise is detected.

(7) INPUT connector For connecting to the linear scale.

(8) OUTPUT connector Output connector for connecting to an external device.

Dimensions

Specifications

Item

Number of axes

Input

Output

Number of divisions

Function

Power supply

Current consumption

Storage temperature


Dimensions

Mass

Details of function

1 axis

Input connector DA-15S-NR (JAE) or equivalent

Input signal: 2-phase sinusoidal signals and standard voltage

Reference point signal, scale alarm signal

Output connector MR-20RM (Honda Tsushin)

Output signal: 2-phase square wave signals (Phase A, Phase B), reference point signal (Phase Z)

Alarm signal, alarm reset signal, photocoupler

4, 8, 10, 20, 40, 80, 100, 200 (chosen with switch)

Setting the number of divisions, setting the minimum edge interval, and maximum response speed

Detection of broken wires or short circuits and abnormalities (alarm), detection of signal errors (alarm)

Power supply voltage low alarm (warning light only), switching between high-impedance mode and alarm signal output mode.

Reference position detection light, hysteresis width settings (directly linked to No. of divisions), external alarm reset input (photocoupler), switching directions

5VDC±5%

200mA

-20°C to 70°C

0°C to 50°C

Width 160mm × Thickness 28mm × Depth 100mm

Approx. 620g

14

Unit: mm

(1)

(2)

(3)

(7)

CAL

ALM

O.S

PWR

PZ

P.E

P

T

U

N

I

(4)

(5)

(6)

(8)

T

P

T

U

O

U

28 2×ø4.5 (hole)

41

Output specifications


MR-20RM (Honda Tsushin Kogyo)

Applicable plug

Connector: MR20F (Honda Tsushin Kogyo)

Case: MR-20L (Honda Tsushin Kogyo)

Standard accessories

■

Pin No.

1 to 3

4 to 6

7

8, 9

10

11

12, 13

14

15

16

17

18

Signal

0V

+5V

ALM

N.C

RST (Anode)

RST (Cathode)

N.C

PZ

PZ

PA

PA

PB

最大応答速度について

20

7

14

1

Signal function

Signal GND

Power supply

Alarm output

Reset input

Phase Z output

Phase A output

Phase B output

Frame GND

No. of divisions

4

8

10

20

40

80

Setting Maximum response speed (m/min) Maximum input


62.5ns 120

125 ns 120

Scale pitch

4μm 10μm 20μm 40μm

250 ns 120

500 ns 120

1000 ns 60

62.5ns 120

125 ns 120

250 ns 120

500 ns 60

1000 ns 30

62.5ns 120

125 ns 120

250 ns 96

500 ns 48

1000 ns 24

62.5ns 120

125 ns 96

250 ns 48

500 ns 24

1000 ns 12

62.5ns

96

125 ns 48

250 ns 24

500 ns 12

1000 ns 6

62.5ns

48

125 ns 24

250 ns 12

500 ns

1000 ns

15

120

60

30

6

3

15

7.5

62.5ns

38.4

96

125 ns 19.2

48

240

120

60

30

240

120

60

30

240

120

60

300

150

75

300

300

150

300

300

300

300

300

300

300

100

200

250 ns

500 ns

9.6

24

4.8

12

1000 ns 2.4

6

62.5ns

19.2

48

125 ns

250 ns

500 ns

1000 ns

9.6

24

4.8

12

2.4

1.2

6

3

80

40

20

10

The maximum response speed is limited by the scale response speed.

5

The minimum edge interval varies 0 to -10% based on the operating environmental conditions.

80

40

20

10

50

25

12.5

160

50

25

200

100

50

400

200

100

500

400

200

100

500

400

200

100

500

250

125

500

500

250

500

500

60

30

384

192

60

480

240

120

960

480

240

120

960

480

240

120

96

48

24

12

96

48

24

192

30

15

192

96

30

240

120

60

480

240

120

60

480

240

120

60

48

24

12

6

48

24

12

96

600 1200

600 1200

600 1200

600 1200

300 600

600 1200

600 1200

600 1200

300

150

600

300

600 1200

600 1200

480

240

960

480

120 240

600 1200 frequency

(kHz)

500

500

500

42

Arrangement of cable connections

PSU-200 Control device

Connection cable

+ 5V

Phase A

PA

PA

16

17

R1

R2

R1

Phase B

PB

PB

18

19

R1

R2

R1

Phase Z

AL

Line driver

AM26C31: TI

PZ

PZ

AL

+ 5V

+ 5V

+ 5V

+ 5V

4

5

6

14

15

7

R1

R2

R1

2k Line receiver

AM26C32: TI

TTL

+ 5V R1 : 560

R2 : 110

0V

0V

0V For a relay

0V

1

2

3

+ V

TLP521 1.2k AL (Anode)

AL (Cathode)

10

11

Ry

Reset input - V

Shield

F.G

20

OUTPUT connector

For a photocoupler

+ V

• Connect the alarm reset input circuit so that the current is 3 to 10mA. Also, the device has an internal resistor

(1.2kΩ), so by applying 5 to 12V with a pulse width of at least 100ms across the AL (anode)-AL (cathode), the alarm can be reset. When applying 12V or more, add an external resistance to limit the current to within the range stated above.

• Connection of alarm reset input when using a photocoupler

PSU-200 Control device

+ V

TLP521 1.2k

10

11

Reset input - V

Interface Unit PSU-200

　　

Interface Unit

Serial conversion unit

PSU-250 Series

• The PSU-250 series interface unit converts the sinusoidal signal output by

Mitutoyo linear scales to a serial signal.

• The interface outputs serial data equivalent to 400 divisions from the signal

(sinusoidal).

• The PSU-251 can be connected to Mitsubishi Electric Corporation's MR-J4/MR-J3 series servo amplifier.

* 1

• The PSU-252 can be connected to Panasonic Corporation, Motor business unit's MINAS series servo amplifier.

* 1

Connector and indicator functions

No.

Name

(1) INPUT connector

(3) Terminal block

To connect the linear scale

(2) OUTPUT connector To connect the servo amplifier

(4) Shorting link

(5) PWR light

Function

Terminal block for input of 5VDC external power

Use when providing power from the servo amplifier.

Do not use when not providing power from the servo amplifier

Turns on when power is supplied to the PSU

Interface Unit PSU-250 Series

(1)

INPUT

(5) (2)

PWR

OUTPUT

(3) (4)

0V

+5V

VIN VOUT

Specifications

Order No.

Item

Number of axes

Input specifications

Output specifications

Number of divisions

Function

539-006

PSU-251

1 axis

539-007

PSU-252

1 axis

2-phase sinusoidal signals and standard voltage, reference signal, scale alarm signal

Maximum input frequency: 500kHz

Mitsubishi Electric Corporation MR-

J4/MR-J3 series

High-speed serial data * 1

Panasonic Corporation,

Motor business unit

MINAS-A5, A5L, A5N, A5NL series * 1

MINAS-A4, A4P, A4N, A4NL series * 1

400 divisions

Alarm detection: Broken wires, short circuits in the scale and abnormalities.

Alarm output: Status data is output through serial communication and the

PWR light blinks

Also, the PWR light turns on.

Power supply

Current consumption

Storage temperature


Power supply from the servo amplifier: 5VDC±5%

External power supply: 5VDC±5%

Power supply is selected with the shorting link for the terminal block used to supply external power.

To choose a servo amplifier or external power supply, please refer to the servo amplifier power specifications (in particular, the maximum supplied current) and the power supply specifications of the scale that is used.

150mA (not including the scale)

- 20°C to 70°C

0°C to 40°C

*1 For details regarding the applicable system, please consult with the individual manufacturer.

Resolution and maximum response speed when the scale is connected

Scale model Resolution Maximum response speed

AT103

AT113

AT112

AT181

ST36A

ST24C

ST46

ST422

0.05 μm 2000mm/s (830mm/s) * 2

0.05 μm

0.05 μm

0.05 μm

0.01 μm

0.025μm

0.05 μm

0.01 μm

2000mm/s

830mm/s

830mm/s

1200mm/s

1200mm/s

2600mm/s

5000mm/s

*2 Response speeds for effective ranges of 3250mm or more

43

　　


• When connecting an AT scale

Mitutoyo linear scale

• When connecting an ST scale

Control device

PSU-250

Model ST36A(2Vpp)

06ACA444


POWER ADJ.

A00001

* The signal cable is an optional accessory

Signal cable 2m: Part No.970712-2

3m: Part No.970712-3

5m: Part No.970712-5

Input specifications

• INPUT connector

·

Connector (socket type): RDAD-15S-LNA (Hirose Electric)

Applicable plug: HDAB-15P (Hirose Electric)

Pin No.

1, 2

3, 4

5

8

9

6

7

10 - 14

15

Signal

0V

+5V

PA

PB

Vref

PZ

AL

N.C

F.G

Signal function

Signal ground

Power supply

Phase A

Phase B

Standard voltage

Phase Z

Scale alarm

Not used

Frame ground

• Terminal block for input of external power

Pin No.

1

2

3

4

Signal

+5V OUT

+5V IN

0V

F.G

Signal function

+5V power output

+5V power input *

Signal ground

Frame ground

*

* When using the power supplied by the servo amplifier (supplied through output connector) short Pin Nos. 1 and 2 using the attached shorting link.

Dimensions

16.5±0.2


• OUTPUT connector

·

Connector (socket type) 10220-52A2VC(3M)

Applicable plug: 10120-3000VE(3M)

Pin No.

Signal

1, 2, 11, 12 0V

18, 19, 20 +5V

6, 8 - 10

7

17

3

4

5

13 - 16

N.C

RQ/DT Standard phase request/data

RQ/DT Reverse phase request/data

PA

PB

PZ

N.C

Signal function

Signal ground

+5V power

Not used

Test signal

Test signal

Test signal

Not used

48±0.2

6.6

Unit: mm

2×ø5 (hole)

Signal cable

PSU-250

Control device

POWER ADJ.

A00001

Interface Unit PSU-250 Series

27.5

60

44

Absolute Scale Unit

ABS ST700 Compact Type Series (glass scale type)

ABS AT500 Series


ABS ST700 Compact Type Series (scale base type)

Scale Format

Applicable Systems * 1

FANUC Ltd.

NC control device

Mitsubishi Electric Corporation

MITSUBISHI CNC Series


MELSERVO Series

Yaskawa Electric Corporation

, Series

Panasonic Corporation, Motor business unit

MINAS Series

Servo Amplifier supporting Mitutoyo ENSIS Interface

FS-i Series

Applicable amplifier

, POWER Mate i

0.005μm * 2

ABS AT555

: MDS-D/MDS-DH Series ABS AT545

MR-J4/MR-J3 Series

Servopack: SGDV, SGDS

MINAS-A5, A5L, A5N, A5NL Series

MINAS-A4, A4P, A4N, A4NL Series

Nikki Denso Co., Ltd. VC / VC / VPS Series

Servoland Corporation SVF Series

PMAC JAPAN Co., Ltd. UMAC-Turbo PMAC2

Other control device manufacturers

ABS AT545A * 3

—

—

—

ABS AT505

ABS AT505A

*1 For details regarding the applicable system, please consult with the individual manufacturer.

*2 For the AT300 series, 0.005μm resolution is possible to special order.

*3 Only for the MR-J4/MR-J3 series

Resolution

0.05μm

ABS AT553

ABS AT353

ABS AT543

ABS AT343

ABS AT543

ABS AT343

—

0.1μm

ABS ST758

ABS ST748

ABS ST748A

ABS ST788A

ABS AT573A ABS ST778A

ABS AT503A

ABS AT303A

ABS AT503

ABS AT303

ABS ST708A

Specifications

Series Scale Type

ABS ST700 Compact Type Series Separate Type

SC Type

ABS AT500 Series HC Type

HR/HL Type

Assembly Type

ABS AT300 Series Assembly Type

6000mm

2200mm

1000mm

350mm

3000mm


5m/s

2.5m/s

2.5m/s (1.2m/s *

2m/s (1.8m/s * 4 )

*4 Maximum response speed of 0.005μm resolution type

*5 L

0

=effective range (mm); scale base type accuracy for the ST700 compact type series

4 )

Accuracy (20°C) * 5

(5+5L

0

/1000) μm

(3+3L

0

/1000) μm

(2+2L

0

/1000) μm

(3+3L

0

/1000) μm

However, at 1600mm (or greater) stroke is (5+5L

0

/1000) μm

45

Absolute system, linear scale principle (e.g. ABS AT500 Series, ABS AT300 Series)

[Figure 1]

AT500

MADE IN JAPAN

COA

Signal period (No. of interpolations) Resolution

3768mm (512) 7.36mm

58.88mm

(512) 0.115mm

MED

FIN

0.92mm

(512) Approx. 1.8µm

OPT

20µm (400)

(4096)

0.05µm

0.005µm

3768mm

As shown in Figure1, when power is supplied to the linear scale the COA signal position is detected, and based on this the MED wavelength and position is detected.

In the same way, from the microprocessor that detects the FIN and OPT signal positions, an ultimate absolute value of resolution of 0.05μm/0.005μm is obtained.

Direction of absolute unit scale data increase

• ABS ST700 Compact Type Series • ABS AT500 Series • ABS AT300 Series

CL

AT500

CL

The data will increase when the detector moves in this direction.


AT303


46

CL

CL

検出器移動時データ増加方向検出器移動時データ増加方向

AT500

MADE IN JAPAN

MODEL

AT303

検出器移動時データ増加方向

Separate Type ABS ST Series

Absolute Scale Unit (High environmental resistance type)

ABS ST700 Compact Type Series

Features

• Absolute measurement with separate type scales

• Non-contact detection is optimal for high speed and high acceleration of linear motors, etc.

• Electromagnetic induction principle means scales are unaffected by contamination

• The detector head is approximately 1/3 the previous model size: 50mm (W) × 28mm (D) × 11mm (H)

• Cable outlets can be in four directions, with mounting holes on the top and sides

• Accuracy (5+5L/1000)μm (glass scale: (3+3L/1000)μm) is realized (previous models: (8+5L/1000) μm)

*L: Effective range (mm)

• Compatible with servo amplifiers from a range of companies (high-speed serial interfaces)

Scale base type

Series

Separate type Absolute linear scale

ABS ST700 compact type series (effective range 3m)

ABS ST700L compact type series (3.2m effective range 6m)

Interface specification* 1

0: For Mitutoyo ENSIS high-speed serial

ABS ST708A, ST708AL

4: Mitsubishi Electric Corporation high-speed serial

ABS ST748A, ST748AL

ABS ST748, ST748L

5: FANUC Ltd. high-speed serial

ABS ST758, ST758L

7: Panasonic Corporation, Motor business unit high-speed serial

ABS ST778A, ST778AL

8: Yaskawa Electric Corporation high-speed serial

ABS ST788A, ST788AL

Glass scale type


ABS ST7 0 8 A L - 100 A - R

Absolute type

A: Scale base type

C: Glass scale type

Effective range: 100mm to 6000mm

Blank: 100mm to 3000mm

L: 3200mm to 6000mm

Head cable outlets

R: Right

L: Left

U: Up

D: Down

Communication method

A: 2 wire

Blank: 4 wire

Detector head shape and resolution

8: Shape 50mm (W) × 28mm (D) × 11mm (H)

Resolution 0.1μm

9: Resolution 0.05μm (special order)

Applicable interfaces

Applicable interfaces * 1

FANUC Ltd. FS-i Series, POWER Mate i Series

Mitsubishi Electric Corporation MELSERVO MR-J4/MR-J3 Series

Mitsubishi Electric Corporation CNC Series MDS-D/MDS-DH Series

Yaskawa Electric Corporation Series, Series

Panasonic Corporation, Motor business unit MINAS-A5, A5L, A5N, A5NL Series, MINAS-A4, A4P, A4N, A4NL

Series

Mitutoyo Corporation ENSIS * 2

Nikki Denso Co., Ltd. VC / VC/ VPS Series

Servoland Corporation SVF Series


*1 For details (connectivity) regarding the applicable system, please consult with the individual manufacturer.

*2 ENSIS is a registered trademark of Mitutoyo Corporation.

47

Specifications

Item

Resolution

Detection method

Shape

Effective range (accuracy guarantee range)

Accuracy (20°C)

Maximum feed speed


Operating conditions

Storage conditions


Current consumption


Shock resistance

Head cable

Temperature

Humidity

Temperature

Humidity

Length/cable diameter

Connector

Scale Type Scale base type Glass scale type

0.1μm (0.05μm: special order)

Electromagnetic induction Absolute position detection method *

Separate type scale

100 to 3000mm / 3200 to 6000mm 100 to 1100mm

(3+3L/1000) μm L: Effective range mm (5+5L/1000) μm L: Effective range mm

5 m/s

(12.0±1.5) ×10

0 to 50°C

20 to 80%RH

-6 /°C

(when attached to material equivalent to steel)

(8±1.0) ×10 -6 /°C

−20 to 70°C

20 to 80%RH

5V±10% (at the detector head)

(Ripple and spike noise should not exceed 100mV)

270mA (Max.)

300m/s 2 (55 to 2000Hz)

500m/s 2 (half-sine, 11ms)

1m / ø3.8mm (high-flex cable)

1) D-sub (15-pin pin type) connector (not waterproof)

2) D-sub (9-pin socket type) connector (not waterproof): for ST788A

Up to 29m (head cable length included) (Please consult the user's manual)

1 location each on top and sides

4 sides (top, bottom, left, right) can be selected

CE mark standard

100m/s

150m/s

2

2

(55 to 2000Hz)

(half-sine, 11ms)

Maximum signal cable length

Detector mounting

Direction of cable outlet

EMC standard

Note: If considering using in an environment in which cutting fluid, etc., is used, please consult our nearest sales department.


Scale base Detector head Head cable 1m

Output connector

Feedback cable

Connector 2

(Option) Connector 3

Supplied by user

Servo Amplifier

Feedback cable

Yaskawa Electric Corporation serial cable can be used as the feedback cable for connecting to the

Yaskawa Electric Corporation servo amplifier.

Cable type number: JZSP-CLP70-E (03,05,10,15,20)

When wishing to connect a feedback cable to the

Mitsubishi Electric Corporation MR-J4/MR-J3 series, please reference the code numbers below and order from our company.

For the MR-J4/MR-J3 series 5m: No.06ACF117A

10m: No.06ACF117B


• ST788A (L)

Output connector (socket type)

D-sub 9-pin


17JE-23090-02 (D2C) (DDK)

5

9 6

1

Alternately, an equivalent product (D-sub series) can be used

Pin No.

Signal

7

8

5

6

3

4

1

2

+5V (V

+5V (V

N.C

CC

RQ/DT (S)

CC

0V (GND)

)

)

RQ/DT (/S)

N.C

N.C

9

Connector shell

0V (GND)

F.G

Note: Leave test terminals (Pin No. 7 and 8)

disconnected during use.

• ST748A (L), ST778A (L), ST708A (L)


D-sub 15-pin


HDAB-15S (Hirose Electric)

1

9 15

8


Pin No.

Signal

7

8

5

6

3

4

1

2

9

10

11

12

13

14

15

Connector shell

0V (GND)

0V (GND)

+5V

+5V

N.C

N.C

RQ/DT

RQ/DT

N.C

N.C

+5V

N.C

0V (GND)

N.C

F.G

F.G



• ST748 (L), ST758 (L)


D-sub 15-pin


HDAB-15S (Hirose Electric)

1

9 15

8


Pin No.

Signal

7

8

5

6

3

4

1

2

9

10

11

12

13

14

15

Connector shell

0V (GND)

0V (GND)

+5V

+5V

DT

DT

RQ

RQ

N.C

N.C

+5V

N.C

0V (GND)

N.C

F.G

F.G



48


• Scale base type (100 to 3000mm)

(10) L

4

±0.2

Scale base center position: L

2

50

42

±0.2

30

Scale base length: L

1

(L

3

±0.2) ×n

44

±0.2

2×M3×0.5, depth 5

Unit: mm

L

4

±0.2

(10)

Absolute Scale Unit ABS ST700 Series

2.4

±0.2

R4

Z×

4.6 (hole)

// 0.1 G

0.1/1000

G: Machine guideway

8

Scale base

Left: L

(Select)

Up: U

(Select)

Model

ST7*8A

S/N F0012345

Down: D

(Select)

Right: R

(Standard)

Cable outlet diagram

Model ST7 * 8A S/N F0012345

2×M3×0.5, depth 3

Detector head

Output connector shape

ST788A

+count

(45.3)

Distance from scale surface to detector head

Dimensions

Order No.

Code

Effective range

(mm)


(mm)

579-301* 8

579-302* 8

579-303* 8

579-304* 8

579-305* 8

579-306* 8

579-307* 8

579-308* 8

ST7 8 (A) -100A-*

ST7 8 (A) -200A-*

ST7 8 (A) -300A-*

ST7 8 (A) -400A-*

ST7 8 (A) -500A-*

ST7 8 (A) -600A-*

ST7 8 (A) -700A-*

ST7 8 (A) -800A-*

579-309* 8 ST7 8 (A) -900A-*

579-310* 8 ST7 8 (A) -1000A-*

579-311* 8 ST7 8 (A) -1100A-*

579-312* 8 ST7 8 (A) -1200A-*

579-313* 8 ST7 8 (A) -1300A-*

579-314* 8 ST7 8 (A) -1400A-*

579-315* 8 ST7 8 (A) -1500A-*

579-316* 8 ST7 8 (A) -1600A-*

579-317* 8 ST7 8 (A) -1700A-*

579-318* 8 ST7 8 (A) -1800A-*

579-319* 8 ST7 8 (A) -1900A-*

579-320* 8 ST7 8 (A) -2000A-*

579-321* 8 ST7 8 (A) -2100A-*

579-322* 8 ST7 8 (A) -2200A-*

579-323* 8 ST7 8 (A) -2300A-*

579-324* 8 ST7 8 (A) -2400A-*

579-325* 8 ST7 8 (A) -2500A-*

579-326* 8 ST7 8 (A) -2600A-*

579-327* 8 ST7 8 (A) -2700A-*

579-328* 8 ST7 8 (A) -2800A-*

579-328* 8 ST7 8 (A) -2900A-*

579-330* 8 ST7 8 (A) -3000A-*

The code indicates the interface specification (0,4,5,7,8).

The Order No. and the * code indicate the direction of the head cable (R, L, U, D).

The in the Order No. is as described below.

ST708A: 0

ST748A: 4

ST748: 3

ST758: 5

ST778A: 7

ST788A: 8

2500

2600

2700

2800

2900

3000

1700

1800

1900

2000

2100

2200

2300

2400

900

1000

1100

1200

1300

1400

1500

1600

500

600

700

800

100

200

300

400

2510

2610

2710

2810

2910

3010

1710

1810

1910

2010

2110

2210

2310

2410

910

1010

1110

1210

1310

1410

1510

1610

510

610

710

810

110

210

310

410

L

1

(mm)

2580

2680

2780

2880

2980

3080

1780

1880

1980

2080

2180

2280

2380

2480

980

1080

1180

1280

1380

1480

1580

1680

580

680

780

880

180

280

380

480

49

C/N. 579-***R08

M/N. ST7*8A-****A-R

L

2

(mm)

1290

1340

1390

1440

1490

1540

890

940

990

1040

1090

1140

1190

1240

690

740

790

840

490

540

590

640

290

340

390

440

90

140

190

240

Head cable: 1m

L

3

(mm)

80

130

180

230

200 n

2

4

6

8

10

12

14

(46.4)

S/N F0012345

// 0.05 G

0.05/1000

+0.1 -0.05

—

80

130

180

230

80

130

180

230

80

130

180

230

80

130

180

230

80

130

180

230

80

130

180

230

80

130

L

4

(mm)

No. of mounting holes

Z

3

5

7

9

11

13

15

17


• Scale base type (3200 to 6000mm)

(10) L

4

±0.2

Scale base center position: L

2

50

42

30

±0.2

Scale base length: L

1

(L

3

±0.2)×n

44

±0.2

2×M3×0.5, depth 5

Unit: mm

L

4

±0.2

(10)

2.4

±0.2

R4

Z×

4.6 (hole)

// 0.1 G

0.1/1000

G: Machine guideway

8

Scale base

Left: L

(Select)

Up: U

(Select)

Model

ST7*8AL

S/N F0212345

Down: D

(Select)

Right: R

(Standard)


Model

ST7*8AL S/N F0212345

2×M3×0.5, depth 3

Detector head


ST788AL

+count

(45.3)

C/N.

579-***R08

M/N. ST7*8AL-****A-R


Dimensions

Order No.

Code

Effective range

(mm)


(mm)

579-331* 8

579-332* 8

579-333* 8

579-334* 8

579-335* 8

579-336* 8

579-337* 8

579-338* 8

579-339* 8

579-340* 8

579-341* 8

579-342* 8

579-343* 8

579-344* 8

579-345* 8

ST7 8 (A) L-3200A-*

ST7 8 (A) L-3400A-*

ST7 8 (A) L-3600A-*

ST7 8 (A) L-3800A-*

ST7 8 (A) L-4000A-*

ST7 8 (A) L-4200A-*

ST7 8 (A) L-4400A-*

ST7 8 (A) L-4600A-*

ST7 8 (A) L-4800A-*

ST7 8 (A) L-5000A-*

ST7 8 (A) L-5200A-*

ST7 8 (A) L-5400A-*

ST7 8 (A) L-5600A-*

ST7 8 (A) L-5800A-*

ST7 8 (A) L-6000A-*

3200

3400

3600

3800

4000

4200

4400

4600

4800

5000

5200

5400

5600

5800

6000

3210

3410

3610

3810

4010

4210

4410

4610

4810

5010

5210

5410

5610

5810

6010

The code indicates the interface specification (0,4,5,7,8).

The Order No. and the * code indicate the direction of the head cable (R, L, U, D).

The in the Order No. is as described below.

ST708AL: 0

ST748AL: 4

ST748L: 3

ST758L: 5

ST778AL: 7

ST788AL: 8

L

1

(mm)

3280

3480

3680

3880

4080

4280

4480

4680

4880

5080

5280

5480

5680

5880

6080

L

2

(mm)

1640

1740

1840

1940

2040

2140

2240

2340

2440

2540

2640

2740

2840

2940

3040

Head cable: 1m

L

3

(mm)

200 n

18

20

20

22

22

24

14

16

16

18

24

26

26

28

28

(46.4)

S/N F0012345

L

4

(mm)

230

130

230

130

230

130

230

130

230

130

230

130

230

130

230

// 0.05 G

0.05/1000

+0.1 -0.05

Z

21

23

23

25

25

27

17

19

19

21

27

29

29

31

31


50

Glass scale

Cannot be used


• Glass scale type (100 to 1100mm)

Glass scale center position: L

3

Scale retaining spring pitch: L

4


Mitutoyo logo label Alarm LED

Glass scale total length L

2

Scale retaining spring pitch: L

4

Effective range L

1

50

44

±0.2


Unit: mm

// 0.1 G

0.1/1000

G: Machine guideway

2×M3×0.5, depth 3

Model ST7*8A

S/N F0012345

16

+count Detector head

4

25

35

2×ø4.5


0.4

1.5

5

Retaining spring spacer

25

35

2×ø4.5


0.4

1.5

Left: L

(Select)

Up: U

(Select)

Model

ST7*8A

S/N F0012345

Right: R

(Standard)

Down: D

(Select)



ST788A-C

(45.3)

Retaining spring spacer 22.5

±0.1


C/N.

579-***-08

M/N. ST7*8A-****A

Head cable length: 1m Serial label

(46.4)

// 0.05 G

0.05/1000


Dimensions

• Glass scale type (100 to 1100mm)

Order No.

579-351* 8

579-352* 8

579-353* 8

579-354* 8

579-355* 8

579-356* 8

579-357* 8

579-358* 8

579-359* 8

579-360* 8

579-361* 8

Code

ST7 8A-100C-*

ST7 8A-200C-*

ST7 8A-300C-*

ST7 8A-400C-*

ST7 8A-500C-*

ST7 8A-600C-*

ST7 8A-700C-*

ST7 8A-800C-*

ST7 8A-900C-*

ST7 8A-1000C-*

ST7 8A-1100C-*

Effective range

L

1

(mm)

100

200

300

400

500

600

700

800

900

1000

1100

The order No. and the * code indicate the direction of the head cable (R, L, U, D).

The order No. and the code specify the interface specification (0, 4, 5, 7, 8).

Note: A thin type (adhesive fixing specification) is available to special order.

L

2

(mm)

175

275

375

475

575

675

775

875

975

1075

1200

L

3

(mm)

87.5

137.5

187.5

237.5

287.5

337.5

387.5

437.5

487.5

537.5

600

L

4

(mm)

65

115

160

105

127.5

152.5

120

135

150

125

140

No. of scale retaining springs A

No. of scale retaining springs B

No. of retaining spring spacers

2 6

4 10

1

6

8

14

18

51

Signal Adjusting Method When Mounting ABS ST700 Series

• In order to perform signal adjustment and confirmation after the unit is mounted, conditioning is necessary using a PC and application software (ABS ST700 Signal Adjustment Program). (For conditioning, allow a travel distance of at least 60mm.)

The following settings and confirmation are possible with this software:

1) Scale signal automatic adjustment ➞ It is necessary to mount the scale base and detector head detector with specified dimensions.

2) Scale signal amplitude (signal strength) confirmation

3) Scale origin (absolute position data of zero) setting

4) Absolute position data confirmation

5) Error history clear

6 ABS resultant error checking (effective range 3200mm to 6000mm)

• Required items

PC *

Item

Conversion unit

Quantity

1

1

Details

DOS/V (Windows version)

USB-485(422)DS15P

(System Sacom Industry Corp.)

Connection cable A 1

Connection cable B 1

Application software

1

USB cable

RS-485 cable or RS-422 cable

ABS ST700 Signal Adjustment Program

Notes

Provided by user

Option

(bundle)

* This program requires a PC with the following operating environment.

PC: DOS/V with Pentium 200 MHz or faster (with USB port)

Memory: 64MB min. (128MB recommended)

Program size: 10MB

OS: Windows95 or later

Monitor: 256 colors, 800×600 or higher (1024×768 or higher is recommended)

USB: COM1 is normally used (other ports can also be used)

• Connection method

USB port

Connection cable A

（USB cable）

Feedback cable

(Supplied by user)

• “Conversion unit, application software” set

Set No.

Applicable model Conversion unit Connection cable B

06ADZ751 ST70 A, ST70 AL USB-485 DS15P (main unit) MIT cable

06ADT457 ST74 A, ST74 AL USB-485 DS15P (main unit) MEL-J4/J3 cable

A, ST77 AL

ST78 A, ST78 AL USB-485 DS15P (main unit) Y/MAT cable

06ADZ752 ST74 , ST74 L USB-422 DS15P (main unit) MDS cable

06ADR760 ST75 , ST75 L USB-422 DS15P (main unit) FUNAC cable

Head cable Detector head Scale base

PC

USB-485

（422）DS15P

Grounding

Connection cable B

（RS-485 cable or RS-422 cable） ABS ST700 Series

* To prevent the possibility of electric shock the device must be grounded.

* When using Part No.06ADZ751, connect the head cable and the connection cable B together.

* The conversion unit's power source is supplied via connection cable A from the PC USB port.

* In the “Applicable model” column, 1,2,3,4,8,9 apply to . Prepare the appropriate conversion unit and connection cable B for the scale to be used.

Compatibility of Detector Head and Main Scale

• Note that for the ST700 series (compact type) with an effective range 3000 mm or less or 3200 mm or more, the main scale and the detector head are different so they are not compatible.

• The communication standards are different for the ST7

(L) and ST7 A (L), so they are not compatible.

Main scale

For effective range of 3200mm to 6000mm

For effective range of 3000mm or less

Compatible

Not compatible

Compatible

Detector head

For effective range of 3200mm to 6000mm

For effective range of 3000mm or less


52

Absolute Scale Unit ABS A

Assembly Type ABS AT Series

Absolute Scale Unit (Slim Spar Type)


(Resolution 0.005μm)

Features ABS AT500-S Series

• This scale achieves the Absolute Linear Scale's highest level resolution of 0.005 μm

• The ABS AT500-S Series realizes vibration resistance of 196m/s 2 (20G) and shock-resistance of 343m/s 2

(35G), suitable for use with heavy cutting equipment and for high-speed machining.

• The ABS AT500-H Series has high repeatability, excellent temperature characteristics, and enables highly accurate and stable positioning.

• Slim shape is suitable for space-saving designs.

• Compatible with servo amplifiers from a range of companies (high-speed serial interfaces).


ABS AT5 5 - -

Effective range

Interface specification

Applicable systems

FANUC Ltd. control devices FS-i Series POWER Mate i

Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series

MDS-D/MDS-DH Series


MR-J4/MR-J3 Series

Scale code

ABS AT555

ABS AT545

ABS AT545A

ABS AT505

Amplifier compatible with the Mitutoyo ENSIS interface ABS AT505A

ABS AT500-H Series

Base position (the 'zero elongation' point) *

C: Midpoint of effective range

L: End of effective range (+ side end)

R: End of effective range (– side end)

Note: L and R are only for the high-accuracy type

* This refers to the fixed point on the scale around which clamping arrangements ensure that any expansion or contraction due to temperature change occurs.

Scale unit specifications

S: High-rigidity type

H: High-accuracy type

Note: ABS AT5 5


Blank: Full-duplex communication

A: Half-duplex communication

Note: For details regarding the applicable system, please consult with the individual manufacturer.

Scale configuration

ABS AT500-S Series

ABS AT5 5-SC

ABS AT5 5A-SC

(ABS zero point, base position)

Head cable 2m


ABS AT5 5-HC

ABS AT5 5A-HC

I/F Box

Signal cable 3m

AT545A signal cable 3m


Base position

ABS zero point

ABS AT5 5-HR

ABS AT5 5A-HR

Base position

ABS zero point

ABS AT5 5-HL

ABS AT5 5A-HL

53

Specifications

Item

Detection method

How to mount the scale unit

Base position

Code

High-rigidity type

ABS AT5 5-SC

Midpoint of effective range

ABS AT5 5-HC

High-accuracy type

ABS AT5 5-HL/HR

Electrostatic capacitance type / photoelectric type composite ABS linear encoder

Multi-point elastic fixing 3 or 5-point elastic fixing 3 or 4-point elastic fixing

End of effective range

HL: (+ side of absolute value)

HR: (– side of absolute value)

Effective range

Resolution


Accuracy (20°C)

100 to 2200mm

150m/min (2.5m/s)

(3+3L

0

/1000) μm

L

0


100 to 1000mm

0.005μm (20μm/4096) *

72m/min (1.2m/s)

(2+2L

0

/1000 ) μm

L

0


(8.5±0.5) x 10 -6 /°C

147 m/s 2 (15G) (55 to 2000Hz)

196m/s 2 (20G) (half-sine 11ms)

5VDC±5%

270mA (Max)

4N



Scale unit: Equivalent to IP53, I/F box: not waterproof

Scale alarm indicated by LED on I/F Box

2m

3m

100 to 350mm



Shock resistance






Protection rating

Alarm indication

Head cable length

Signal cable length

196 m/s

343m/s 2

2 (20G) (55 to 2000Hz)

(35G) (half-sine 11ms)

* Because the 20μm signal is divided by 4096, the actual value is 0.0048828125μm.When setting the minimum resolution on the controller, always enter the actual value.


(See instruction manual)

Configuration example 1

Scale unit

I/F Box

Signal cable

Connector A

Model

Part No.

AT5XX-X

06ACRXXX

Notes

1.

Connector A is to be prepared by the user.

(Control device)

2.

Connector A and the grounding conductor are to be connected by the user.

3.

In the above configuration, the maximum cable length is 10m for the head cable and 10m for the signal cable (total 20m).

(Specifications other than the standard cable length are special order.)

(Grounding conductor)


Connector B

Scale unit

I/F Box

Signal cable

Connector A

Model

Part No.

AT5XX-X

06ACRXXX signal cable length is 5m.

Model AT5XX-X

Notes

Head cable

Head cable

Part No.

Model

Part No.

06ACRXXX

AT5XX-X

06ACRXXX

1.

Connectors A/B/C and the feedback cable are to be prepared by the user.

Connector C

2.

Connectors A/B/C and the grounding conductor are to be connected by the user.

Feedback cable (Grounding conductor)

(Control device)

3.

When fabricating a feedback cable, ensure that the total cable length is 29m or less. However, the maximum head cable length is 10m and the maximum

ABS AT545A

Scale unit

I/F Box

Signal cable

Connector B Connector A

Model

Part No.

AT5XX-X

06ACRXXX

Model

Part No.

AT5XX-X

06ACRXXX

Model

Part No.

AT5XX-X

06ACRXXX

Notes

Head cable

1.

Connectors A/B and the feedback cable are to be prepared by the user.

Feedback cable


2.

Connectors A/B and the grounding conductor are to be connected by the user.

3.

A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable.

Model: MR-JCCBL M-H is the cable length (2 or 5m)

* When using the encoder cable, ensure that the total cable length is 10m or less.

* The feedback cable configuration depends on the system. Please contact Mitsubishi Electric Corporation for details.


MR-J4/MR-J3

54




• ABS AT555/AT545/AT505 (flying leads)

Wire color

Brown/Red

White/Black

Orange

Signal

+5V

GND

Yellow

Green

DT

DT

REQ

REQ Blue

Purple

Gray

Phase A

Phase B

Shield FG

Notes

1: Phase A and Phase B are used as test signals.

Keep them disconnected during use.

2: Connect the shield wire to the grounding conductor.

• ABS AT545A

Output connector (pin type): Tyco Electronics Japan

Mini-Universal Mate-N-Lock Connector 9P

172169-9 (Housing: Black)

Applicable connector: 172161-9 (Housing: Black)

Pin No.

1

2

4

5

7

8

9

3.6

Signal

MR (REQ/DT)

MRR (REQ/DT)

(DT)

(DT)

PS (+5V)

OV (GND)

F.G

N.C

1

7

3

9

• ABS AT505A (flying leads)

Wire color

Brown/Red

White/Black

Orange

Signal

+5V

GND

N.C

Yellow

Green

Blue

Purple

Gray

N.C

REQ/DT

REQ/DT

Phase A

Phase B

Shield FG

Notes




55

Cable dimensions

• ABS AT555/505

47.4

5.5

D-sub 15-pin (socket type)

19 14

80

XX CRX

X5-

06A

AT5 o.

Mod

23.1

ø16

68 4

43

ø6.5

Unit: mm

Head cable 2m

ø6.5

L = 3m

• ABS AT545A

40

3m

47.4

5.5

80

XX

X5-

CRX

AT5

06A o.

Mod

23.1

ø16

D-sub 15-pin (socket type) 68

2×M5, through hole

Hex socket headed screw M4×20 (spring washer)

4

19 14

43

Head cable 2m

ø6.5


56


Mounting dimensions (SC Type)

Unit: mm

R

* Aluminum frame

0.1

G

0.05/500

(4.8)

L

4

*

Q

* Aluminum

frame surface

Air purge M5×5

(Both)

Vertical direction

1±0.1

(Step between detector

head and aluminum frame)

15.7

23

S

0.1

R


1.5±0.2

(Gap between detector


* Adjusted with special jig


0.1 P


* Longitudinal direction (5.5)

* Longitudinal

direction

Interface box

(Note: Not waterproof)

80 (23.1)

Rigidly fixed portion

L

5

±0.3

(L

3

)

ø4.5, through hole, ø8.3 countersunk, depth 9

20±0.2

L

2

(P±0.2×n)

ø5, through hole

Hex socket headed screw M4×25

(small round plain washer, spring washer)

*Special leaf spring used (long dashed double-dotted line)

(Aluminum frame)

ABS zero point, base position

66±0.2

84

92

Effective range L

0

M6, through hole ø8 countersunk, depth 5




1

Aluminum frame

(Detector head)

Stainless steel bushing


(4.8)

2×M5, through hole


(spring washer)

68 4

Alarm display LED

Head cable

P * Mounting mating surface

0.1

G

0.05/500

Special leaf spring

Notes

1.




Details of elastically secured portion

2.


3.


SERIAL

No.

1234567 Dimensions

Effective range

L

0

(mm)

1100

1200

1300

1400

1500

1600

1800

2000

2200

500

600

700

800

900

1000

100

200

300

400


L

1

(mm)

1120

1220

1320

1420

1520

1620

1820

2020

2220

520

620

720

820

920

1020

120

220

320

420


• ABS AT555-SC

Order No.

539-761-50

539-763-50

539-765-50

539-767-50

539-769-50

539-771-50

539-773-50

539-775-50

539-776-50

539-777-50

539-778-50

539-779-50

539-780-50

539-781-50

539-782-50

539-783-50

539-785-50

539-786-50

539-787-50

Code

AT555- 100-SC

AT555- 200-SC

AT555- 300-SC

AT555- 400-SC

AT555- 500-SC

AT555- 600-SC

AT555- 700-SC

AT555- 800-SC

AT555- 900-SC

AT555-1000-SC

AT555-1100-SC

AT555-1200-SC

AT555-1300-SC

AT555-1400-SC

AT555-1500-SC

AT555-1600-SC

AT555-1800-SC

AT555-2000-SC

AT555-2200-SC

Overall length

L

2

(mm)

1225

1325

1425

1525

1625

1725

1925

2125

2325

625

725

825

925

1025

1125

225

325

425

525

Distance to center

L

3

(mm)

612.5

662.5

712.5

762.5

812.5

862.5

962.5

1062.5

1162.5

112.5

162.5

212.5

262.5

312.5

362.5

412.5

462.5

512.5

562.5

• ABS AT545/AT545A-SC

Order No.

539-731-

539-733-

539-735-

539-737-

539-739-

539-741-

539-743-

539-745-

539-746-

539-747-

539-748-

539-749-

539-750-

539-751-

539-752-

539-753-

539-755-

539-756-

539-757-

Code

AT545(A)- 100-SC

AT545(A)- 200-SC

AT545(A)- 300-SC

AT545(A)- 400-SC

AT545(A)- 500-SC

AT545(A)- 600-SC

AT545(A)- 700-SC

AT545(A)- 800-SC

AT545(A)- 900-SC

AT545(A)-1000-SC

AT545(A)-1100-SC

AT545(A)-1200-SC

AT545(A)-1300-SC

AT545(A)-1400-SC

AT545(A)-1500-SC

AT545(A)-1600-SC

AT545(A)-1800-SC

AT545(A)-2000-SC

AT545(A)-2200-SC

* The in the Order No. is as follows. AT545 : 50

AT545A: 51

L

4

(mm)

87.5

62.5

112.5

62.5

112.5

62.5

87.5

62.5

112.5

37.5

37.5

37.5

62.5

62.5

62.5

62.5

62.5

62.5

37.5

Mounting pitch

L

5

(mm)

1050

1200

1200

1400

1400

1600

1750

2000

2100

500

600

700

800

900

1050

150

250

350

400

P (mm)

175

200

175

200

175

175

200

150

175

125

150

175

200

150

175

75

125

175

200


Order No.

539-161-

539-163-

539-165-

539-167-

539-169-

539-171-

539-173-

539-175-

539-176-

539-177-

539-178-

539-179-

539-180-

539-181-

539-182-

539-183-

539-185-

539-186-

539-187-

Code

AT505(A)- 100-SC

AT505(A)- 200-SC

AT505(A)- 300-SC

AT505(A)- 400-SC

AT505(A)- 500-SC

AT505(A)- 600-SC

AT505(A)- 700-SC

AT505(A)- 800-SC

AT505(A)- 900-SC

AT505(A)-1000-SC

AT505(A)-1100-SC

AT505(A)-1200-SC

AT505(A)-1300-SC

AT505(A)-1400-SC

AT505(A)-1500-SC

AT505(A)-1600-SC

AT505(A)-1800-SC

AT505(A)-2000-SC

AT505(A)-2200-SC


AT505A: 51

No. of mounting holes n

10

10

12

8

8

8

8

6

6

4

4

6

6

4

4

2

2

2

2

57

Mounting dimensions (HC Type)

Q * Mounting block

surface

(Mounting block) (Mounting block)

29

8


Unit: mm

(Mounting block)

R * Aluminum frame surface

0.1

G

0.05/1000 (4.3)

8

Air purge M5×5

(Both)

11.6


1.6±0.1

Step between detector head and aluminum frame

22

24

S

ø7.5, through hole,

ø14 countersunk, depth 9.5




0.1 P



(5.5)

Interface box


80 (23.1)

L

5

±0.2

for L

5

and L

6

: ±0.3

L

4

±0.3

* Longitudinal

direction

L

6

±0.2

(Scale unit)

L

L

2

3

±0.3


L

6

±0.2

0.1 R


ø4.6



(small round plain washer,

spring washer)

66±0.2

84

92

M6, through hole, ø8 countersunk, depth 5



Effective range L

0


1

Detector head


(4.3)

2×M5, through hole


(spring washer)

68

P *

4

Alarm display LED

Head cable

Mounting mating surface

0.1

G

0.05/1000

Notes

1.


2.


3.


SERIAL

No.

1234567

Dimensions

Effective range

L

0

(mm)

700

750

800

900

1000

400

450

500

600

100

150

200

250

300

350


L

1

(mm)

420

470

520

620

120

170

220

270

320

370

720

770

820

920

1020

Overall length

L

2

(mm)

865

915

965

1065

1165

565

615

665

765

265

315

365

415

465

515

849

899

949

1049

1149

549

599

649

749

L

3

(mm)

249

299

349

399

449

499

L

4

(mm)

124.5

149.5

174.5

199.5

224.5

249.5

274.5

299.5

324.5

(374.5)

(424.5)

(449.5)

(474.5)

(524.5)

(574.5)

Mounting pitch

—

—

—

204.5

224.5

224.5

244.5

264.5

284.5

L

5

(mm)

—

—

—

—

—

—

200

225

230

260

290

—

—

—

170

L

6

(mm)

—

—

—

—

—

—


• ABS AT555-HC

Order No.

539-761-60

Code

AT555- 100-HC

539-762-60

539-763-60

539-764-60

539-765-60

539-766-60

539-767-60

539-768-60

539-769-60

539-771-60

539-773-60

539-774-60

539-775-60

539-776-60

539-777-60

AT555- 150-HC

AT555- 200-HC

AT555- 250-HC

AT555- 300-HC

AT555- 350-HC

AT555- 400-HC

AT555- 450-HC

AT555- 500-HC

AT555- 600-HC

AT555- 700-HC

AT555- 750-HC

AT555- 800-HC

AT555- 900-HC

AT555-1000-HC

• ABS AT545/AT545A-HC

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

539-737-

539-738-

539-739-

539-741-

539-743-

539-744-

539-745-

539-746-

539-747-

Code

AT545(A)- 100-HC

AT545(A)- 150-HC

AT545(A)- 200-HC

AT545(A)- 250-HC

AT545(A)- 300-HC

AT545(A)- 350-HC

AT545(A)- 400-HC

AT545(A)- 450-HC

AT545(A)- 500-HC

AT545(A)- 600-HC

AT545(A)- 700-HC

AT545(A)- 750-HC

AT545(A)- 800-HC

AT545(A)- 900-HC

AT545(A)-1000-HC


AT545A: 61


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

539-167-

539-168-

539-169-

539-171-

539-173-

539-174-

539-175-

539-176-

539-177-

Code

AT505(A)- 100-HC

AT505(A)- 150-HC

AT505(A)- 200-HC

AT505(A)- 250-HC

AT505(A)- 300-HC

AT505(A)- 350-HC

AT505(A)- 400-HC

AT505(A)- 450-HC

AT505(A)- 500-HC

AT505(A)- 600-HC

AT505(A)- 700-HC

AT505(A)- 750-HC

AT505(A)- 800-HC

AT505(A)- 900-HC

AT505(A)-1000-HC


AT545A: 61

58



Mounting dimensions (HR Type)

Air purge M5×5

(Both)


11.6

29

8 (Mounting block)

Q * Mounting

block surface


(Mounting block)

(4.3)

8


74.5±0.2 (L

5

)

Rigidly fixed portion

Cumulative tolerance for L5 and L6: ±0.3


ø4.6

Hex socket headed screw M4×25 (small round plain washer, spring washer)

L

2

L

3

±0.3

(L

4

)

L

6

±0.2

(Scale unit)

0.1 R


ø7.5, through hole, ø14 countersunk, depth 9.5



8

(4.3)

R

* Aluminum

frame surface

0.1

G

0.05/1000

Unit: mm

1.6±0.1


22

24

S

* Longitudinal

direction


0.1 P



(5.5)

Interface box


80 (23.1)

Base position

ABS zero point Gap between detector head and aluminum frame


66±0.2

84

92

Effective range L

0


1

(Detector head)

Mod

2×M5, through hole


(spring washer)

19 14

68 4

Alarm display LED

Head cable Notes

1.


2.


3.



0.1

G

0.05/1000

SERIAL

No.

1234567

Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

120

170

220

270

320

370

Overall length

L

2

(mm)

265

315

365

415

465

515

L

3

(mm)

249

299

349

399

449

499

Mounting pitch

L

4

(mm)

124.5

149.5

174.5

199.5

224.5

249.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT555-HR

Order No.

539-761-70

539-762-70

539-763-70

539-764-70

539-765-70

539-766-70

Code

AT555-100-HR

AT555-150-HR

AT555-200-HR

AT555-250-HR

AT555-300-HR

AT555-350-HR

• ABS AT545/AT545A-HR

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

Code

AT545(A)-100-HR

AT545(A)-150-HR

AT545(A)-200-HR

AT545(A)-250-HR

AT545(A)-300-HR

AT545(A)-350-HR


AT545A: 71


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

Code

AT505(A)-100-HR

AT505(A)-150-HR

AT505(A)-200-HR

AT505(A)-250-HR

AT505(A)-300-HR

AT505(A)-350-HR


AT505A: 71

59

Mounting dimensions (HL Type)

Unit: mm

Q * Mounting block (Mounting block) (Mounting block)

29

8

(Mounting block)

(Mounting block)

(4.3)

8



0.1

G

0.05/1000

Elastically secured portion Rigidly fixed portion Elastically secured portion

ø4.6


L

2

L

3

(L

4

)

L

6

±0.2

74.5±0.2 (L

5

)

(Scale unit)

0.1

R

Cumulative tolerance for L

5

and L

6

: ±0.3

(4.3)

8

Air purge M5×5

(Both)

11.6


1.6±0.1


22

24

S * Mounting mating surface

0.1 P



(5.5)





Interface box


80 (23.1)

* Longitudinal

direction

ABS zero point

66±0.2

84

92

Effective range L

0


1




(Detector head)

Base position

Mod

2×M5, through hole


(spring washer)

19 14

68 4

Alarm display LED

Head cable


0.1

G

0.05/1000

Notes

1.


2.


3.


SERIAL

No.

1234567

Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

120

170

220

270

320

370

Overall length

L

2

(mm)

265

315

365

415

465

515

L

3

(mm)

249

299

349

399

449

499

Mounting pitch

L

4

(mm)

124.5

149.5

174.5

199.5

224.5

249.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT555-HL

Order No.

539-761-80

539-762-80

539-763-80

539-764-80

539-765-80

539-766-80

Code

AT555-100-HL

AT555-150-HL

AT555-200-HL

AT555-250-HL

AT555-300-HL

AT555-350-HL

• ABS AT545/AT545A-HL

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

Code

AT545(A)-100-HL

AT545(A)-150-HL

AT545(A)-200-HL

AT545(A)-250-HL

AT545(A)-300-HL

AT545(A)-350-HL


AT545A: 81


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

Code

AT505(A)-100-HR

AT505(A)-150-HR

AT505(A)-200-HR

AT505(A)-250-HR

AT505(A)-300-HR

AT505(A)-350-HR


AT505A: 81


60




(Resolution 0.05μm)



Features ABS AT500-H Series

• High-performance Absolute Linear Scale with a resolution of 0.05μm and maximum response speed of 150 m/min.

• The ABS AT500-S Series realizes vibration resistance of 196m/s 2 (20G) and shock-resistance of 343m/s 2 (35G), suitable for use with heavy cutting equipment and for high-speed machining.

• The ABS AT500-H Series has high repeatability, excellent temperature characteristics, and enables highly accurate and stable positioning.




ABS AT5 3 - -

Effective range


Applicable systems



MDS-D/MDS-DH Series


MR-J4/MR-J3 Series

Panasonic Corporation, Motor business unit

MINAS-A5, A5L, A5N, A5NL Series

MINAS-A4, A4P, A4N, A4NL Series

Amplifier compatible with the Mitutoyo ENSIS interface

Nikki Denso Co., Ltd. VCII/VC/VPS Series* 1

Servoland Corporation SVF Series* 1


Other machine types

Scale code

ABS AT553

ABS AT543

ABS AT543A

ABS AT573A

ABS AT503A

ABS AT503

*1 For connection to ABS AT503A

Note: ABS AT5 3




Note: For details regarding the applicable system, please consult with the individual manufacturer.

Base position (the 'zero elongation' point) *



R: End of effective range (– side end)

Note: L and R are only for the high-accuracy type

* This refers to the base point of fixed point on the scale around which clamping arrangements ensure that any expansion or contraction due to temperature change occurs.

Scale unit specifications

S: High-rigidity type




ABS AT5 3-SC

ABS AT5 3A-SC



ABS AT5 3-HC

ABS AT5 3A-HC

Head cable 2m

AT500

MADE IN JAPAN

Signal cable 3m

AT545A signal cable 3m

I/F Box


AT500

MADE IN JAPAN

Base position

ABS zero point

ABS AT5 3-HL

ABS AT5 3A-HL

AT500

MADE IN JAPAN

Base position

ABS zero point

ABS AT5 3-HR

ABS AT5 3A-HR

AT500

MADE IN JAPAN

61

Specifications

Item

Detection method


Code

Base position

Effective range

Resolution


Accuracy (20°C)



Shock resistance






Protection rating

Alarm indication

Head cable length

Signal cable length

High-rigidity type

ABS AT5 3-SC


ABS AT5 3-HC

High-accuracy type

ABS AT5 3-HL/HR


Multi-point elastic fixing 3 or 5-point elastic fixing 3 or 4-point elastic fixing




L

0


196 m/s

343m/s

(3+3L

2

100 to 2200mm

2

0

/1000) μm

(20G) (55 to 2000Hz)

(35G) (half-sine 11ms)

100 to 1000mm

0.05μm

150m/min (2.5m/s)

(2+2L

0

/1000 ) μm

L

0


(8.5±0.5) x 10 -6 /°C

147 m/s 2 (15G) (55 to 2000Hz)


100 to 350mm

5VDC±5%

270mA (Max)

4N





2m

3m




AT500

MADE IN JAPAN

Scale unit I/F Box

Connector A

(Control device)

Notes

Head cable

1.

Connector A is to be prepared by the user.



2.

Connector A and the grounding conductor are to be connected by the user.

3.

In the above configuration, the maximum cable length is 10m for the head cable and 10m for the signal cable (total 20m).

(Specifications other than the standard cable length are special order.)

Scale unit I/F Box

Signal cable Connector A

Mitu

7 456 123

AT

Mitu

∃ ∃∃

Head cable

Signal cable

Connector C Feedback cable (Grounding conductor)

(Control device)

Scale unit I/F Box

Signal cable Connector A

Mitu

7

∃

456

∃∃

123

AT

(Control device)

Notes Head cable

1.

Connectors A/B/C and the feedback cable are to be prepared by the user.

Connector C Feedback cable (Grounding conductor)

2.

Connectors A/B/C and the grounding conductor are to be connected by the user.

3.

When fabricating a feedback cable, ensure that the total cable length is 29m or less. However, the maximum head cable length is 10m and the maximum signal cable length is 5m.

［ ABS AT543A ］


Scale unit I/F Box

Signal cable Connector B Connector A

Mitu

7

∃

456 123

∃∃

AT

Notes

Head cable

1.


2.

Connectors A/B and the grounding conductor are to be connected by the user.

3.


Mitu

I/F Box

Signal cable

Model: MR-JCCBL M-H is the cable length (2 or 5m)

Head cable

7 456

∃

123

∃∃

AT

* When using the encoder cable, ensure that the total cable length is 10m or less.

Feedback cable

Connector B

* The feedback cable configuration depends on the system. Please contact Mitsubishi Electric Corporation for details.


Connector A



MR-J4/MR-J3


MR-J4/MR-J3

62



• ABS AT553/AT543/AT503 (flying leads)

Wire color

Brown/Red

White/Black

Orange

Signal

+5V

GND

Yellow

Green

DT

DT

REQ

REQ Blue

Purple

Gray

Phase A

Phase B

Shield FG

Notes




• ABS AT545A


Mini-Universal Mate-N-Lock Connector 9P



Pin No.

1

2

4

5

7

8

9

3.6

Signal

MR (REQ/DT)

MRR (REQ/DT)

(DT)

(DT)

PS (+5V)

LG (GND)

F.G

50 L=3m

1

7

3

• ABS AT573A/AT503A (flying leads)

Wire color

Brown/Red

White/Black

Orange

Signal

+5V

GND

N.C

Yellow

Green

Blue

Purple

Gray

N.C

REQ/DT

REQ/DT

Phase A

Phase B

Shield FG

Notes




43

9

Round waterproof connector

L=2m

Signal cable (minimum bend radius R=50 [fixed], R=100 [moving])

PVC sheathed


• ABS AT553/AT543/AT573A/AT503 (A)

50

15

L=3m

13.4

19.4 0.8

80

103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])

PVC sheathed

43

40 31

4.5

Model

AT��

SERIAL

No.

1234567


MADE IN JAPAN

ALARM

71

±0.2

M6, through hole


Alarm display LED

Unit: mm


L=2m


PVC sheathed

13.4

19.4 0.8

80

103

40 31

4.5

Model

AT��

SERIAL

No.

1234567

Mitutoyo Corporation MADE IN JAPAN

ALARM

71

±0.2

Head cable (minimum bend radius R=50 [fixed], R=100 [moving])

PVC sheathed

M6, through hole


Alarm display LED

• ABS AT543A

Mini•Universal Mate-N-Lock Connector 9P (pin type)

Applicable housing: 172161-9 (Tyco Electronics Japan or equivalent)

40 L=3m 43


L=2m

13.4

19.4 0.8

80

103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])

PVC sheathed


PVC sheathed

40 31 Model

AT��

SERIAL

No.

1234567


MADE IN JAPAN

ALARM

Mini•Universal Mate-N-Lock Connector 9P (pin type)

4.5

Applicable housing: 172161-9 (Tyco Electronics Japan or equivalent)

40 L=3m 43

71

±0.2

M6, through hole


Alarm display LED


L=2m


PVC sheathed

13.4

19.4 0.8

80

103

40 31

Model

AT��

SERIAL

No.

1234567

Mitutoyo Corporation MADE IN JAPAN

ALARM

4.5

63 71

±0.2


PVC sheathed

M6, through hole


Alarm display LED

Mounting dimensions (SC Type)

Unit: mm

R

* Aluminum

frame surface

0.1

G

0.05/500

(4.8)

L

4


L

5

±0.2

(L

3

)

ø4.5, through hole, ø8.3 countersunk, depth 9



20±0.2

L

2

(P±0.2×n)

ø5, through hole



* Special leaf spring used (long dashed double-dotted line)

(Aluminum frame)


(4.8)

*

Q

frame surface

15.7

Air purge M5×5

(Both)


1±0.1

(Step between detector


23

0.1

R


* Longitudinal

direction


AT500

66±0.2

84

92




(Detector head)

Effective range L

0


1

Aluminum frame Stainless steel bushing


0.1 P

19.4

* Vertical direction 13.4


0.8

4.5

(103)

80

Alarm display LED

AT��

1234567


ALARM

P

71±0.2

M6, through hole




0.1

G

0.05/500

Special leaf spring



Details of elastically secured portion

Notes

1.


2.


3.


4.

For the values of L

0

to L

5

, P, n in the figure, refer to the table below.

1234567

Dimensions

Effective range

L

0

(mm)

900

1000

1100

1200

1300

1400

1500

1600

100

200

300

400

500

600

700

800

1800

2000

2200


L

1

(mm)

920

1020

1120

1220

1320

1420

1520

1620

520

620

720

820

120

220

320

420

1820

2020

2220

Overall length

L

2

(mm)

1025

1125

1225

1325

1425

1525

1625

1725

625

725

825

925

225

325

425

525

1925

2125

2325


• ABS AT553-SC • ABS AT543/AT543A-SC

Order No.

539-761-10

Code

AT553- 100-SC

539-763-10 AT553- 200-SC

539-765-10 AT553- 300-SC

539-767-10 AT553- 400-SC

539-769-10 AT553- 500-SC

539-771-10 AT553- 600-SC

539-773-10 AT553- 700-SC

539-775-10 AT553- 800-SC

539-776-10 AT553- 900-SC

539-777-10 AT553-1000-SC

539-778-10 AT553-1100-SC

539-779-10 AT553-1200-SC

539-780-10 AT553-1300-SC

AT553-1400-SC 539-781-10

539-782-10 AT553-1500-SC

539-783-10 AT553-1600-SC

539-785-10 AT553-1800-SC

539-786-10 AT553-2000-SC

539-787-10 AT553-2200-SC

Order No.

539-731-

539-733-

539-735-

539-737-

539-739-

539-741-

539-743-

539-745-

539-746-

539-747-

539-748-

539-749-

539-750-

539-751-

539-752-

539-753-

539-755-

539-756-

539-757-

Code

AT543(A)- 100-SC

AT543(A)- 200-SC

AT543(A)- 300-SC

AT543(A)- 400-SC

AT543(A)- 500-SC

AT543(A)- 600-SC

AT543(A)- 700-SC

AT543(A)- 800-SC

AT543(A)- 900-SC

AT543(A)-1000-SC

AT543(A)-1100-SC

AT543(A)-1200-SC

AT543(A)-1300-SC

AT543(A)-1400-SC

AT543(A)-1500-SC

AT543(A)-1600-SC

AT543(A)-1800-SC

AT543(A)-2000-SC

AT543(A)-2200-SC


AT543A: 11

Distance to center

L

3

(mm)

512.5

562.5

612.5

662.5

712.5

762.5

812.5

862.5

112.5

162.5

212.5

262.5

312.5

362.5

412.5

462.5

962.5

1062.5

1162.5

L

4

(mm)

62.5

37.5

87.5

62.5

112.5

62.5

112.5

62.5

37.5

37.5

37.5

62.5

62.5

62.5

62.5

62.5

87.5

62.5

112.5

• ABS AT573A-SC

Order No.

Code

539-871-11 AT573A- 100-SC

539-873-11 AT573A- 200-SC

539-875-11 AT573A- 300-SC

539-877-11 AT573A- 400-SC

539-879-11 AT573A- 500-SC

539-881-11 AT573A- 600-SC

539-883-11 AT573A- 700-SC

539-885-11 AT573A- 800-SC

539-886-11 AT573A- 900-SC

539-887-11 AT573A-1000-SC

539-888-11 AT573A-1100-SC

539-889-11 AT573A-1200-SC

539-890-11 AT573A-1300-SC

539-891-11 AT573A-1400-SC

539-892-11 AT573A-1500-SC

539-893-11 AT573A-1600-SC

539-895-11 AT573A-1800-SC

539-896-11 AT573A-2000-SC

539-897-11 AT573A-2200-SC

Mounting pitch

L

5

(mm)

900

1050

1050

1200

1200

1400

1400

1600

150

250

350

400

500

600

700

800

1750

2000

2100

64

P (mm)

150

175

175

200

150

175

175

200

75

125

175

200

125

150

175

200

175

200

175


8

8

8

8

6

6

6

6

10

10

12

4

4

4

4

2

2

2

2


Order No.

539-161-

539-163-

539-165-

539-167-

539-169-

539-171-

539-173-

539-175-

539-176-

539-177-

539-178-

539-179-

539-180-

539-181-

539-182-

539-183-

539-185-

539-186-

539-187-

Code

AT503(A)- 100-SC

AT503(A)- 200-SC

AT503(A)- 300-SC

AT503(A)- 400-SC

AT503(A)- 500-SC

AT503(A)- 600-SC

AT503(A)- 700-SC

AT503(A)- 800-SC

AT503(A)- 900-SC

AT503(A)-1000-SC

AT503(A)-1100-SC

AT503(A)-1200-SC

AT503(A)-1300-SC

AT503(A)-1400-SC

AT503(A)-1500-SC

AT503(A)-1600-SC

AT503(A)-1800-SC

AT503(A)-2000-SC

AT503(A)-2200-SC


AT503A: 11



Mounting dimensions (HC Type)

Unit: mm

Q * Mounting block

surface


29

8


Air purge M5×5

(Both)


11.6

1.6±0.1


(Mounting block)

8

(4.3)


0.1

G

0.05/1000

L

5

±0.2

L


5

and L

6

: ±0.3

4

±0.3



L

2

L

3

±0.3

L

6

±0.2

(Scale unit)

L

6

±0.2

0.1 R


ø4.6

Hex socket headed screw M4x25


(4.3)

AT500

22

24

* Mounting mating

surface



0.1 P



13.4

19.4 0.8

4.5

* Longitudinal

direction

66±0.2

84

92

M6, through hole,

ø8 countersunk, depth 5



(Detector head)

Effective range L

0



1

(103)

80

AT��

1234567

ALARM


P

71±0.2

M6, through hole



Alarm display LED


0.1 G

0.05/1000

Notes

1.


2.

P indicates the mating surface for mounting the unit. S indicates the mating surface for mounting the detector head.

3.


4.

For the values of L

0

to L

6

in the figure, refer to the table below.

1234567

Dimension

Effective range

L

0

(mm)

500

600

700

750

800

900

1000

100

150

200

250

300

350

400

450


L

1

(mm)

520

620

720

770

820

920

1020

320

370

420

470

120

170

220

270

Overall length

L

2

(mm)

665

765

865

915

965

1065

1165

465

515

565

615

265

315

365

415

L

3

(mm)

649

749

849

899

949

1049

1149

449

499

549

599

249

299

349

399

L

4

(mm)

324.5

(374.5)

(424.5)

(449.5)

(474.5)

(524.5)

(574.5)

124.5

149.5

174.5

199.5

224.5

249.5

274.5

299.5

Mounting pitch

L

5

(mm)

—

204.5

224.5

224.5

244.5

264.5

284.5

—

—

—

—

—

—

—

—

L

6

(mm)

—

170

200

225

230

260

290

—

—

—

—

—

—

—

—


• ABS AT553-HC • ABS AT543/AT543A-HC

Order No.

Code

539-761-20 AT553- 100-HC

539-762-20 AT553- 150-HC

539-763-20 AT553- 200-HC

539-764-20 AT553- 250-HC

539-765-20 AT553- 300-HC

539-766-20 AT553- 350-HC

539-767-20 AT553- 400-HC

539-768-20 AT553- 450-HC

539-769-20 AT553- 500-HC

539-771-20 AT553- 600-HC

539-773-20 AT553- 700-HC

539-774-20 AT553- 750-HC

539-775-20 AT553- 800-HC

539-776-20 AT553- 900-HC

539-777-20 AT553-1000-HC

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

539-737-

539-738-

539-739-

539-741-

539-743-

539-744-

539-745-

539-746-

539-747-

Code

AT543(A)- 100-HC

AT543(A)- 150-HC

AT543(A)- 200-HC

AT543(A)- 250-HC

AT543(A)- 300-HC

AT543(A)- 350-HC

AT543(A)- 400-HC

AT543(A)- 450-HC

AT543(A)- 500-HC

AT543(A)- 600-HC

AT543(A)- 700-HC

AT543(A)- 750-HC

AT543(A)- 800-HC

AT543(A)- 900-HC

AT543(A)-1000-HC


AT543A: 21

• ABS AT573A-HC

Order No.

Code

539-871-21 AT573A- 100-HC

539-872-21 AT573A- 150-HC

539-873-21 AT573A- 200-HC

539-874-21 AT573A- 250-HC

539-875-21 AT573A- 300-HC

539-876-21 AT573A- 350-HC

539-877-21 AT573A- 400-HC

539-878-21 AT573A- 450-HC

539-879-21 AT573A- 500-HC

539-881-21 AT573A- 600-HC

539-883-21 AT573A- 700-HC

539-884-21 AT573A- 750-HC

539-885-21 AT573A- 800-HC

539-886-21 AT573A- 900-HC

539-887-21 AT573A-1000-HC


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

539-167-

539-168-

539-169-

539-171-

539-173-

539-174-

539-175-

539-176-

539-177-

Code

AT503(A)- 100-HC

AT503(A)- 150-HC

AT503(A)- 200-HC

AT503(A)- 250-HC

AT503(A)- 300-HC

AT503(A)- 350-HC

AT503(A)- 400-HC

AT503(A)- 450-HC

AT503(A)- 500-HC

AT503(A)- 600-HC

AT503(A)- 700-HC

AT503(A)- 750-HC

AT503(A)- 800-HC

AT503(A)- 900-HC

AT503(A)-1000-HC


AT503A: 11

65

Mounting dimensions (HR Type)

Q * Mounting

block surface

29

8

(Mounting block)

(Mounting block)

Unit: mm

(Mounting block)

Air purge M5×5

(Both)


11.6

(Mounting block)


8

(4.3)

Rigidly fixed portion Elastically secured portion

ø4.6


L

2

L

3

±0.3

74.5±0.2 (L

5

)

(L

4

)


5

and L

6

: ±0.3

L

6

±0.2

(Scale unit)

0.1

R


ø7.5, through hole, ø14 countersunk, depth 9.5


(small round plain washer, spring washer) (4.3)

R

* Aluminum

0.1 G

0.05/1000

AT500

1.6±0.1


22

24


0.1

P



* Longitudinal

direction

13.4

19.4

0.8

4.5

Base position

66±0.2

84

92

Effective range L

0




(Detector head)



1

(103)

80

AT��

1234567


ALARM

P

71±0.2

* Mounting

0.1

G

0.05/1000

M6, through hole



Alarm display LED

Notes

1.


2.


3.


4.

For the values of L

0

to L

4

and L

6


1234567

Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

120

170

220

270

320

370

Overall length

L

2

(mm)

265

315

365

415

465

515

L

3

(mm)

249

299

349

399

449

499

Mounting pitch

L

4

(mm)

124.5

149.5

174.5

199.5

224.5

249.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT553-HR • ABS AT543/AT543A-HR

Order No.

539-761-30

539-762-30

539-763-30

539-764-30

539-765-30

539-766-30

Code

AT553-100-HR

AT553-150-HR

AT553-200-HR

AT553-250-HR

AT553-300-HR

AT553-350-HR

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

Code

AT543(A)-100-HR

AT543(A)-150-HR

AT543(A)-200-HR

AT543(A)-250-HR

AT543(A)-300-HR

AT543(A)-350-HR


AT543A: 31

• ABS AT573A-HR

Order No.

Code

539-871-31 AT573A-100-HR

539-872-31 AT573A-150-HR

539-873-31 AT573A-200-HR

539-874-31 AT573A-250-HR

539-875-31 AT573A-300-HR

539-876-31 AT573A-350-HR


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

Code

AT503(A)-100-HR

AT503(A)-150-HR

AT503(A)-200-HR

AT503(A)-250-HR

AT503(A)-300-HR

AT503(A)-350-HR


AT503A: 31


66

Mounting dimensions (HL Type)

Air purge M5×5

(Both)


11.6

Q * Mounting

block surface

(Mounting block)

(4.3)

R

(Mounting block)



* Aluminum

frame surface

0.1 G

0.05/1000

(Mounting block)

29

8

(Mounting block)

ø4.6

Rigidly fixed portion Elastically secured portion


L

2

L

3

±0.3

(4.3)

8

(L

4

)

L

6

±0.2

74.5±0.2 (L

5

)

(Scale unit)

0.1

R


5

and L

6

: ±0.3

AT500

1.6±0.1


22

24

S

* Mounting

mating surface

0.1

P

13.4







19.4

0.8

(103)

80

* Longitudinal

direction

ø6

66±0.2

84

92




Detector head

Effective range L

0



1

Base position

4.5

P

AT��

1234567

ALARM


71±0.2

* Mounting

mating surface

0.1

G

0.05/1000

M6, through hole



Alarm display LED

Notes

1.


2.


3.


4.

For the values of L

0

to L

4

and L

6


1234567

Unit: mm


Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

120

170

220

270

320

370

Overall length

L

2

(mm)

265

315

365

415

465

515

L

3

(mm)

249

299

349

399

449

499

Mounting pitch

L

4

(mm)

124.5

149.5

174.5

199.5

224.5

249.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT553-HL • ABS AT543/AT543A-HL

Order No.

539-761-40

539-762-40

539-763-40

539-764-40

539-765-40

539-766-40

Code

AT553-100-HL

AT553-150-HL

AT553-200-HL

AT553-250-HL

AT553-300-HL

AT553-350-HL

Order No.

539-731-

539-732-

539-733-

539-734-

539-735-

539-736-

Code

AT543(A)-100-HL

AT543(A)-150-HL

AT543(A)-200-HL

AT543(A)-250-HL

AT543(A)-300-HL

AT543(A)-350-HL


AT543A: 41

• ABS AT573A-HL

Order No.

Code

539-871-41 AT573A-100-HL

539-872-41 AT573A-150-HL

539-873-41 AT573A-200-HL

539-874-41 AT573A-250-HL

539-875-41 AT573A-300-HL

539-876-41 AT573A-350-HL


Order No.

539-161-

539-162-

539-163-

539-164-

539-165-

539-166-

Code

AT503(A)-100-HL

AT503(A)-150-HL

AT503(A)-200-HL

AT503(A)-250-HL

AT503(A)-300-HL

AT503(A)-350-HL


AT503A: 41

67


Structural Features

• ABS AT500-S Series combines high vibration resistance with shock resistance

1. Example of vibration resistance characteristics 2. Vibration resistance

15

10

5

0

0

20


(ABS AT500-S resonance characteristics)

X-axis direction

Y-axis direction

Z-axis direction

500 1000 1500

Vibration frequency (Hz)

2000

Shock resistance characteristics

ABS AT500-S Previous type

30

25

20

15

10

20

0

0 10 20 30 40

Shock (G)

50 60 70

• ABS AT500-H Series combines outstanding thermal characteristics with high repeatability

1. Structural concept 2. Example of thermal characteristics

Aluminum frame

Fixing block

Stability of base position

(ABS AT500-H)

Center

(Middle block)

Parallel leaf spring function

Flexible mechanism

Frame elongation

Fixed Flexible mechanism Fixed

10 ABS AT500-S Previous type 40

8 30 35

6 25 30

4

20

25

2

15

0

10

- 2

0

20

20

15

10

10 20 30 40

0 Elapsed time (h)

0 10 20 30 40 50 60 70

Note: This refers to the fixed point on the scale around which clamping arrangements ensure that any expansion or contraction due to temperature change occurs.


68



ABS AT500E

(Resolution 0.005μm/0.05μm)

ABS AT500E Series

Features

• High-performance Absolute Linear Scale with 0.005μm/0.05μm resolution and high maximum response speed (72m/min,

150m/min).

• The ABS AT500E Series realizes vibration resistance of 147m/s 2 (15G) and shock-resistance of 343m/s 2 (35G), suitable for use with heavy cutting equipment and for high-speed machining.

• The ABS AT500E Series has high repeatability, excellent temperature characteristics, and enables highly accurate and stable positioning.




ABS AT5 E - - H

Effective range


Applicable systems



Applicable amplifier: MDS-D/MDS-DH Series

Scale unit specifications


Scale code

ABS AT555E (Resolution 0.005μm)




Base position for elongation of scale *



R: End of effective range (- side end)

* This refers to the fixed point on the scale around which clamping arrangements ensure that any expansion or contraction due to temperature change occurs.



ABS AT5 E-HC


(ABS zero point) (Base position)

ABS AT5 E-HL

(Base position) (ABS zero point)

ABS AT5 E-HR

|ÑhiH® 8 u : hƒ

öü† 8 u´¨

á}‚i ; h <=

69

（ ABS 原点、基点位置）

ヘッドケーブル 2m

I/F Box

信号ケーブル 3m

AT545A 信号ケーブル 3m

（ ABS 原点、基点位置）

（基点位置）

（基点位置）

（ ABS 原点）

（ ABS 原点）

Specifications

Item

Detection method


Code ABS AT5 E-HC ABS AT5 E-HL/HR


3, 5 or 7-point elastic fixing 3 or 4-point elastic fixing

Base position

Effective range

Resolution



100 to 1220mm

0.05μm/0.005μm (20μm/4096) * 1

150m/min (Resolution 0.05μm)

72m/min (Resolution 0.005μm)

(2+2L/1000)μm L: Effective range (mm)

(8.5±0.5) x 10 -6 /°C

147 m/s 2 (15G) (55 to 2000Hz)


DC5V±5%

270mA (Max)

4N








100 to 350mm

Accuracy (20°C)



Shock resistance






Protection rating

Alarm indication

*1 : Because the 20μm signal is divided by 4096, the actual value is 0.0048828125μm. When setting the minimum resolution on the controller, always enter the actual value.

System configuration example (cable length)

(1) ABS AT5 3E

Unit: mm

AT��

Mitu

ø43


47.4

Shielded wire

Single wire

Head cable L

1

Minimum bend radius R=50 (fixed),

R=100 (moving)

Signal cable L

2


R=100 (moving)

D-sub 15P (pin type)

Feedback cable

L

3

(2) ABS AT5 5E


47.4

Shielded wire

Single wire

Feedback cable

L

3

Model

Part No.

AT5XX-X

06ACRXXX

Head cable L

1


R=100 (moving)

Signal cable L

2


R=100 (moving)



70


Allowable cable length for feedback cable L

3

(power supply voltage 5.0V)

1) Head cable L

1

= 2m (recommended standard length)

Signal cable L

2

Allowable length of cable L

3

(Max.)

Total cable length

3m (06ACT652A)

24m

29m

5m (06ACT652B)

19m

29m

8m (06ACT652C)

11m

21m

10m (06ACT652D)

- (N/A)

12m

2) Head cable L

1

= 5m


3

(Max.)

Total cable length

3m (06ACT652A)

21m

29m

5m (06ACT652B)

19m

29m

Signal cable L

2

8m (06ACT652C)

11m

24m

10m (06ACT652D)

- (N/A)

15m

3) Head cable L

1

= 10m

信号ケーブル L

2


3

(Max.)

Total cable length

3m (06ACT652A)

16m

29m

5m (06ACT652B)

14m

29m

Notes

1: Feedback cable part numbers 7m: 06ACD238B , 9m: 06ACD238C , 10m: 06ACD238A , 12m: 06ACD238D

2: Feedback cable material: PVC sheathed (standard) or high-flex type (special order)

3: Signal cable (output side): single wire (standard) or D-sub 15P (special order)

4: Applicable connector for D-sub 15P: HDAB-15S (Hirose Electric or equivalent)

8m (06ACT652C)

11m

29m


• Signal cable with flying leads

Wire color

Brown/Red

White/Black

Orange

Signal

+5V

GND

Yellow

Green

Blue

Purple

Gray

SD

SD

REQ

REQ

Phase A

Phase B

Shield FG

Notes




• Signal cable with D-sub connector

Pin No.

1, 2, 13

3, 4, 11

5

6

9

10

7

8

15, Shell

12, 14

Signal

GND

+5V

SD

SD

REQ

REQ

Phase A

Phase B

FG

Not used

Notes



2: Applicable connector: HDAB-15S (Hirose Electric or

equivalent).

1 8

10m (06ACT652D)

- (N/A)

20m

9 15

ABS zero point, base position and count direction

Reference point mark Reference point mark


Increase in serial data

Reference point mark Reference point mark


AT500E


• ABS AT553E/AT543E

50

15

L=3m 43

Round waterproof connector L=2m

Unit: mm


PVC sheathed


PVC sheathed

13.4

19.4

0.8

80

103

40 31

4.5

Part No. 09AAB751A

71

±0.2

2×M6, through hole


Alarm display LED

• ABS AT555A/AT545E

47.4

50 42

3m

D-sub 15-pin (socket type)

2×M5, through hole

Hex socket headed screw M4 ×20 (spring washer)

5.5

80

06ACRXXX

AT5XX-X

Part No.

Model

23.1

68 4

43

Head cable 2 m Absolute Scale Unit ABS A

72

　


Mounting dimensions (HC Type) (Resolution 0.05µm)

29

8

Q *Mounting

block surface

Mounting block Mounting block Mounting block Mounting block

Unit: mm

Air purge M5×5

(Both)

24

11.6

Mounting block

8

(4.3)

R

//

—

*Aluminum frame surface

0.1 G

0.05/1000


L

2

L

3±0.3


L

4±0.3

L

5±0.2


5

and L

6

: ±0.3

L

6±0.2 x n1

(Scale unit)

L

6±0.2 x n1


// 0.1

R


ø4.6



R8.25

*Vertical direction

0

±0.1

Step between detector head and mounting block

23.6

ø9.5, through hole

S

//

*Mounting mating surface

0.1

P

*Vertical direction

*Longitudinal direction

13.4

19.4

0.8

Part No. 09AAB751A

80

(103)

4.5

//

P

71

±0.2

*Mounting mating

surface

0.05/1000

*Longitudinal

direction

Gap between detector head and aluminum frame

56

±0.2

84

92

Effective range L

0

(Detector head)



1

Head cable

Notes

1.


2.

P indicates the mating surface for mounting the unit.

S indicates the mating surface for mounting the detector head.

M6, through hole


Alarm display LED

3.


4.

For the values of L

0

to L

6


(4.3)

Dimensions

Effective range

L

0

(mm)

500

550

600

650

700

750

800

900

100

150

200

250

300

350

400

450

1000

1120

1220


L

1

(mm)

705

755

805

905

505

555

605

655

305

355

405

455

105

155

205

255

1005

1125

1225

Overall length

L

2

(mm)

651

701

751

801

851

901

951

1051

251

301

351

401

451

501

551

601

1151

1274

1371


• ABS AT553E-HC

Order No.

Code

539-761-22 AT553E- 100-HC

539-762-22 AT553E- 150-HC

539-763-22 AT553E- 200-HC

539-764-22 AT553E- 250-HC

539-765-22 AT553E- 300-HC

539-766-22 AT553E- 350-HC

539-767-22 AT553E- 400-HC

539-768-22 AT553E- 450-HC

539-769-22 AT553E- 500-HC

539-770-22 AT553E- 550-HC

539-771-22 AT553E- 600-HC

539-772-22 AT553E- 650-HC

539-773-22 AT553E- 700-HC

539-774-22 AT553E- 750-HC

539-775-22 AT553E- 800-HC

539-776-22 AT553E- 900-HC

539-777-22 AT553E-1000-HC

539-778-22 AT553E-1120-HC

539-779-22 AT553E-1220-HC


Order No.

Code

539-731-22 AT543E- 100-HC

539-732-22 AT543E- 150-HC

539-733-22 AT543E- 200-HC

539-734-22 AT543E- 250-HC

539-735-22 AT543E- 300-HC

539-736-22 AT543E- 350-HC

539-737-22 AT543E- 400-HC

539-738-22 AT543E- 450-HC

539-739-22 AT543E- 500-HC

539-740-22 AT543E- 550-HC

539-741-22 AT543E- 600-HC

539-742-22 AT543E- 650-HC

539-743-22 AT543E- 700-HC

539-744-22 AT543E- 750-HC

539-745-22 AT543E- 800-HC

539-746-22 AT543E- 900-HC

539-747-22 AT543E-1000-HC

539-748-22 AT543E-1120-HC

539-749-22 AT543E-1220-HC

L

3

(mm)

835

885

935

1035

635

685

735

785

435

485

535

585

235

285

335

385

1135

1255

1355

Mounting pitch

L

4

(mm) L

5

(mm)

317.5

(342.5)

(367.5)

(392.5)

(417.5)

(442.5)

(467.5)

(517.5)

117.5

142.5

167.5

192.5

217.5

242.5

267.5

292.5

(567.5)

(627.5)

(677.5)

—

177.5

197.5

197.5

217.5

217.5

237.5

257.5

—

—

—

—

—

—

—

—

277.5

227.5

217.5

L

6

(mm)

200

225

230

260

—

165

170

195

290

200

230

—

—

—

—

—

—

—

—


1

1

1

1

1

1

0

1

1

2

2

0

0

0

0

0

0

0

0

73

　

Mounting dimensions (HC Type) (Resolution 0.005µm)

29

8

Q * Mounting

block surface

Mounting block Mounting block


Air purge M5×5

(Both)

24

11.6

Mounting block

8

(4.3)

R8.25


R

//

—

* Aluminum frame surface

0.1

G

0.05/1000


L

4±0.3

L

5±0.2

Cumulative tolerance

5

and L

6

: ±0.3

L

6±0.2 x n1

(Scale unit)

L

2

L

3±0.3



L

6±0.2 x n1

// 0.1 R


ø4.6



0

±0.1


23.6

ø9.5, through hole

S

//


0.1 P



* Longitudinal

direction


56

±0.2

84

92

Effective range L

0

4.6 7.8

(Detector head)



1

(4.3)

Unit: mm

(5.5)

2×M5, through hole

Hex socket headed screw

M4x20 (spring washer)

Dimensions

Effective range

L

0

(mm)

500

550

600

650

700

750

800

900

100

150

200

250

300

350

400

450

1000

1120

1220


L

1

(mm)

705

755

805

905

505

555

605

655

305

355

405

455

105

155

205

255

1005

1125

1225

80

68

06ACRXXX

Model

Part No.

(23.1)

Interface box


Head cable

4

Alarm display LED

//


0.1 G

0.05/1000

Overall length

L

2

(mm)

651

701

751

801

851

901

951

1051

251

301

351

401

451

501

551

601

1151

1274

1371

L

3

(mm)

835

885

935

1035

635

685

735

785

435

485

535

585

235

285

335

385

1135

1255

1355

Notes

1.


2.



3.


4.

For the values of L

0

to L

6


Mounting pitch

L

4

(mm) L

5

(mm)

317.5

(342.5)

(367.5)

(392.5)

(417.5)

(442.5)

(467.5)

(517.5)

117.5

142.5

167.5

192.5

217.5

242.5

267.5

292.5

(567.5)

(627.5)

(677.5)

—

177.5

197.5

197.5

217.5

217.5

237.5

257.5

—

—

—

—

—

—

—

—

277.5

（227.5）

（217.5）

L

6

(mm)

200

225

230

260

—

165

170

195

290

200

230

—

—

—

—

—

—

—

—


1

1

1

1

1

1

0

1

1

2

2

0

0

0

0

0

0

0

0



Order No.

Code

539-761-62 AT555E- 100-HC

539-762-62 AT555E- 150-HC

539-763-62 AT555E- 200-HC

539-764-62 AT555E- 250-HC

539-765-62 AT555E- 300-HC

539-766-62 AT555E- 350-HC

539-767-62 AT555E- 400-HC

539-768-62 AT555E- 450-HC

539-769-62 AT555E- 500-HC

539-770-62 AT555E- 550-HC

539-771-62 AT555E- 600-HC

539-772-62 AT555E- 650-HC

539-773-62 AT555E- 700-HC

539-774-62 AT555E- 750-HC

539-775-62 AT555E- 800-HC

539-776-62 AT555E- 900-HC

539-777-62 AT555E-1000-HC

539-778-62 AT555E-1120-HC

539-779-62 AT555E-1220-HC


Order No.

Code

539-731-62 AT545E- 100-HC

539-732-62 AT545E- 150-HC

539-733-62 AT545E- 200-HC

539-734-62 AT545E- 250-HC

539-735-62 AT545E- 300-HC

539-736-62 AT545E- 350-HC

539-737-62 AT545E- 400-HC

539-738-62 AT545E- 450-HC

539-739-62 AT545E- 500-HC

539-740-62 AT545E- 550-HC

539-741-62 AT545E- 600-HC

539-742-62 AT545E- 650-HC

539-743-62 AT545E- 700-HC

539-744-62 AT545E- 750-HC

539-745-62 AT545E- 800-HC

539-746-62 AT545E- 900-HC

539-747-62 AT545E-1000-HC

539-748-62 AT545E-1120-HC

539-749-62 AT545E-1220-HC

74


Mounting dimensions (HR Type) (Resolution 0.05 µm/0.005 µm)

Q

Mounting block

* Mounting block surface

29

8



Air purge M5×5

(Both)

24

11.6

Mounting block

8

(4.3)

67.5

R8.25

±0.2

(L


5

)


5

and L

6

: ±0.3

R

//

—


0.1 G

0.05/1000

L

2

L

3±0.3

L

6±0.2

(Scale unit)


// 0.1

R


(L

4

)

ø4.6



(4.3)

0

±0.1


23.6

S

// 0.1

P



ø9.5, through hole


* Longitudinal

direction

Base position


56

±0.2

84

92

Effective range L

0

(Detector head)



1

Unit: mm

13.4

19.4

0.8

(103)

80

Head cable

(5.5)

4.5

Part No. 09AAB751A

71

±0.2

M6, through hole



Alarm display LED

2×M5, through hole



P

//


0.1

G

0.05/1000

80

06ACRXXX

Model

Part No.

(23.1)

Interface box

(Note: Not waterproof) Head cable

4

Alarm display LED

68

Notes

1.


2.



3.


4.

For the values of L

0

to L

6



Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

150

155

205

255

305

355

Overall length

L

2

(mm)

251

301

351

401

451

501

L

3

(mm)

235

285

335

385

435

485

Mounting pitch

L

4

(mm)

117.5

142.5

167.5

192.5

217.5

242.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT553E-HR

Order No.

Code

539-761-32 AT553E-100-HR

539-762-32 AT553E-150-HR

539-763-32 AT553E-200-HR

539-764-32 AT553E-250-HR

539-765-32 AT553E-300-HR

539-766-32 AT553E-350-HR


Order No.

Code

539-731-32 AT543E-100-HR

539-732-32 AT543E-150-HR

539-733-32 AT543E-200-HR

539-734-32 AT543E-250-HR

539-735-32 AT543E-300-HR

539-736-32 AT543E-350-HR


Order No.

Code

539-761-72 AT555E-100-HR

539-762-72 AT555E-150-HR

539-763-72 AT555E-200-HR

539-764-72 AT555E-250-HR

539-765-72 AT555E-300-HR

539-766-72 AT555E-350-HR


Order No.

Code

539-731-72 AT545E-100-HR

539-732-72 AT545E-150-HR

539-733-72 AT545E-200-HR

539-734-72 AT545E-250-HR

539-735-72 AT545E-300-HR

539-736-72 AT545E-350-HR

75

Mounting dimensions (HL Type) (Resolution 0.05µm/0.005µm)

Q * Mounting

block surface


29

8

Mounting block


Air purge M5×5

(Both)

24

11.6

Mounting block

8

(4.3)

R

//

—


0.1 G

0.05/1000

ø4.6




(Scale unit)

L

2

L

3±0.3

R8.25

0

±0.1


23.6

ø9.5, through hole

//


0.1

P



* Longitudinal

direction


56

±0.2

84

92

L

6±0.2

Effective range L

0


1


Detector head

(L

4

)



// 0.1

R

Cumulative tolerance

5

and L

6

: ±0.3

67.5

±0.2

(L

5

)

Base position

(4.3)

Unit: mm

13.4

19.4

0.8

(103)

80

(5.5)

Head cable

4.5

Part No. 09AAB751A

71

±0.2

M6, through hole



Alarm display LED

2×M5, through hole



//


0.1

G

0.05/1000

80

06ACRXXX

Model

Part No.

(23.1)

Interface box

(Note: Not waterproof) Head cable

4

Alarm display LED

68

Notes

1.


2.



3.


4.

For the values of L

0

to L

6


Dimensions

Effective range

L

0

(mm)

100

150

200

250

300

350


L

1

(mm)

105

155

205

255

305

355

Overall length

L

2

(mm)

251

303

351

401

451

501

L

3

(mm)

235

285

335

385

435

485

Mounting pitch

L

4

(mm)

117.5

142.5

165.5

192.5

217.5

242.5

L

6

(mm)

—

100

130

160

190

220


• ABS AT553E-HL

Order No.

539-761-42

Code

AT553E-100-HL

539-762-42 AT553E-150-HL

539-763-42 AT553E-200-HL

539-764-42 AT553E-250-HL

539-765-42 AT553E-300-HL

539-766-42 AT553E-350-HL


Order No.

Code

539-731-42 AT543E-100-HL

539-732-42 AT543E-150-HL

539-733-42 AT543E-200-HL

539-734-42 AT543E-250-HL

539-735-42 AT543E-300-HL

539-736-42 AT543E-350-HL


Order No.

539-761-82

Code

AT555E-100-HL

539-762-82 AT555E-150-HL

539-763-82 AT555E-200-HL

539-764-82 AT555E-250-HL

539-765-82 AT555E-300-HL

539-766-82 AT555E-350-HL


Order No.

Code

539-731-82 AT545E-100-HL

539-732-82 AT545E-150-HL

539-733-82 AT545E-200-HL

539-734-82 AT545E-250-HL

539-735-82 AT545E-300-HL

539-736-82 AT545E-350-HL


76


Absolute Scale Unit (Standard Type)



Features ABS AT300 Series

• Complete absolute type linear scales.

• Easy operation because no recalibration is required at startup or after a power failure.

• Suitable for position feedback in machinery requiring high-accuracy, high-speed control.



ABS AT3 -

Effective range


Applicable systems



Applicable amplifier: MDS-D/MDS-DH Series

Scale code

ABS AT353

ABS AT343


MR-J4/MR-J3 Series

ABS AT343A

Amplifier compatible with the Mitutoyo ENSIS interface

Nikki Denso Co., Ltd. VCII/ VC/ VPS Series * 1

Servoland Corporation SVF Series * 1


Other machine types

ABS AT303A

ABS AT303

* 1 For connection to ABS AT303A

* ABS AT3 3




* For details regarding the applicable system, please consult with the individual manufacturer.

Specifications

Item

Detection method

Effective range

Resolution


Code

Accuracy (20°C)



Shock resistance






Protection rating

Signal cable length *

* The AT343A signal cable is sold as an option.

0.2 m: No.09BAA598A

2 m: No.09BAA598B

3 m: No.09BAA598C

ABS AT353/AT343(A)/AT303(A)


100 to 3000mm

0.05 μm

120m/min (2m/s)

100 to 1500mm: (3+3L

0

/1000) μm

1600 to 3000mm: (5+5L

0

/1000) μm

L

0


(8.0±1) x 10 -6 /°C

98m/s 2 (10G) (half-sine,11ms)

147 m/s 2 (15G) (55 to 2000Hz)

DC5V±5%

250mA (Max)

5N



Equivalent to IP53

5m

77


• ABS AT353/AT343/AT303

Output connector (pin type): HDAB-15P (Hirose Electric)

Applicable connector (included): HDAB-15S (Hirose Electric)

Alternately, an equivalent product (D-sub series) can be used.

Pin No.

1

2

3

6

7

4

5

8

9

10

11

12

13

14

15

Connector shell

Si g nal

0V (GND)

0V (GND)

+5V

+5V

DT

DT

REQ

REQ

Phase A (for testing)

Phase B (for testing)

+5V

N.C

0V (GND)

N.C

F.G

F.G

Note: Phase A and Phase B are used as test signals.


• ABS AT343A


Mini•Universal Mate-N-Lock Connector 9P



Pin No.

1

2

3

6

7

4

5

8

9

Si g nal

MR (RQ/DT)

MRR(RQ/DT)

N.C

(DT)

(DT)

N.C

P5 (+5V)

LG (GND)

F.G



1

7

1

9 15

8

3

9

• ABS AT303A

Output connector (pin type): HDAB-15P (Hirose Electric)

Applicable connector (included): HDAB-15S (Hirose Electric)

Alternately, an equivalent product (D-sub series) can be used.

Pin No.

1

2

3

6

7

4

5

8

9

10

11

12

13

14

15

Connector shell

Si g nal

0V (GND)

0V (GND)

+5V

+5V

—

—

REQ/DT

REQ/DT

Phase A (for testing)

Phase B (for testing)

+5V

N.C

0V (GND)

N.C

F.G

F.G



1

9 15

8



• ABS AT353/AT343/AT303/AT303A

MODEL

AT343A

Signal cable 5m

• ABS AT343A

Connector A

D-sub 15P (included)

Feedback cable

Connector B

Connector A

MODEL

AT343A

Connector B

Signal cable (option)

0.2, 2, 3m

Feedback cable

Control device

Notes

1.

Connector B and the feedback cable are to be prepared by the user.

2.

Connectors A/B and the grounding bar are to be connected by the user.

3.

When fabricating a feedback cable, ensure that the total cable length is 25m or less.

Mitsubishi Electric

Corporation

MR-J4/MR-J3

Notes

1.


2.

Connectors A/B and the grounding bar are to be connected by the user.

3.


MR-J4/MR-J3 series compatible model: MREKCBL M-H indicates the cable length (2, 5, 10m)

* Depending on the signal cable length, the encoder cable length is restricted as follows.

Signal cable 0.2 m: 2, 5, 10m

Signal cable 2m: 2, 5m

Signal cable 3m: 2m

* The feedback cable configuration depends on the system. Please contact Mitsubishi Electric

Corporation for details.


MODEL

AT332

信号ケーブル2m

コネクタA

丸形防水15P（付属品）

コネクタB

フィードバックケーブル

ファイナック株式会社殿

制御装置 FS-iシリーズ、

POWER Mate i

78

A

32.5

23

エア−供給口（

（両端部に有り）

M5 ）

7

スケ−ル本体取付け面

検出ヘッド取付け面

32.5

23

エア供給口（ M5


） 7

スケ−ル本体取付面

検出ヘッド取付面

（

X 1.5

± 0.2

1.5

± 0.2

36

36

// 0.1

A

信号ケ−ブル /5m

（メタルフレキ仕様）

/ / 0.1 A

46.3

）

全長 L

2

取付けブロック固定ピッチ L

3


4


4

80

60 ± 0.2

80

60 ± 0.2

2-

φ

8

2×

ø8

弾性固定部

全長 L 2

取付ブロック固定ピッチ L 3

取付ブロック固定ピッチ L 4

取付けブロック

完全固定部

取付ブロック固定ピッチ

弾性固定部

L 4

取付ブロック

完全固定部弾性固定部

/ / 0.2

SERIAL

No.

G

// 0.2

G

7

7

MADE IN JAPAN

（ 42 ）

60 ± 0.2

90

7

11.6

0

60 ±

90

0.2

L

1

有効測定長

最大移動長

L 0

L 1

7

11.6

座グリ深

座グリ深 6.5

6.5

G: マシンガイド




A



X

1.5

± 0.2


Mounting dimensions [ABS AT353/AT343(A)/AT303(A)]

• Effective range 100 mm to 250mm

Mounting block fixing pitch L

3

Overall length L

2


4

A

A


32.5

23

32.5

23


(at both ends)

エア供給口（ M5 ）


7

7 80

L

3

80

60 ± 0.2

全長 L

2

2-ø

8

2×

ø8


取付ブロック

完全固定部

/ / 0.2

G

L 4



MADE IN JAPAN

X

(46.3)

(42)

1.5 ±0.2

1.5

± 0.2

36

//

36

0.1

/ / 0.1 A

A

Signal cable / 5m

(Flexible metal type)

7

11.6

60 ±

90

0.2

90

L

L

0

1

0


1

7

SERIAL

No.

7


7

弾性固定部

/ / 0.2

Unit: mm

Countersink depth 6.5

6.5

G: Machine guideway


X

検出ヘッド取付面スケ−ル本体取付面

• ABS AT343A signal cable

• Effective range 300mm to 3000mm

A

32.5

23


(at both ends)

7

1.5

± 0.2

36

// 0.1

A

（ 46.3

）

Signal cable

(PVC sheathed type)

L (42)

*The signal cable has set options.

(Part No.09BAA598A - C: 0.2m, 2m, 3m)


3


4

Overall length L

2


4

80

60 ±0.2

2×ø

8


Mounting block

// 0.2

G



信号ケ−ブル /5m

（メタルフレキ仕様）

60 ± 0.2

90

有効測定長 L

0

最大移動長 L

1

7

11.6

座グリ深 6.5


// 0.2 G

7



SERIAL

No.

X

MADE IN JAPAN

600

700

750

800

900

1000

150

200

250

300

350

400

450

500

1.5 ±0.2

170

220

270

330

380

430

480

540

650

760

810

860

960

36

// 0.1

A

Signal cable / 5m

(Flexible metal type)

(46.3)

(42)

7

11.6

60 ±0.2

90

Effective range L

0


1 Dimensions

Effective range

L

0

(mm)


L

1

(mm)

100 120

32.5

23

Overall length

L

2

(mm)

230

280

330

380

440

490

540

590

650

760

870

920

Mounting block pitch

L

3

(mm) L

4

(mm)

65

65

100

150

65

65

220

245

270

295

200

250

150

175

200

225

325

380

435

460

250

300

350

375


2

3

970

1070

1170

485

535

585

M5


）

400

450

取付けブロック固定ピッチ

500

7 80

60 ± 0.2

L

3

Effective range

L

0

(mm)

1100

1200

1300

1400

1500

1600

1700

1800

2000

2200

2400


L

1

(mm)

1160

1260

1360

1460

1560

1690

1790

1890

2100

2300

2500

Overall length

L

2

(mm)

1270

1370

1470

1570

1670

1800

1900

2000

2210

2410

2610

2500

2600

2800

全

2900

長 L

2

2710

2810

3010

3000

2

×

ø8

3050

取付けブロック

完全固定部

3210

// 0.2 G

L

4


1105

1205

1305

1355

1405

1505

1605

Mounting block pitch

L

3

(mm)

635

L

4

(mm)

275

685

735

300

325

785

835

900

950

1000

350

375

400

425

450

335

370

400

315

325

350

375

G: Machine guideway


弾性固定部

7

5

7

9

スケ−ル本体取付け面

検出ヘッド取付け面

79

SERIAL

No.

X

MADE IN JAPAN

（ 42 ）

X 矢視図

検出ヘッド取付け面スケ−ル本体取付け面




• ABS AT353

Order No.

539-541-30

539-542-30

539-543-30

539-544-30

539-545-30

539-546-30

539-547-30

539-548-30

539-549-30

539-551-30

539-553-30

539-554-30

539-555-30

539-556-30

539-557-30

Code

AT353- 100

AT353- 150

AT353- 200

AT353- 250

AT353- 300

AT353- 350

AT353- 400

AT353- 450

AT353- 500

AT353- 600

AT353- 700

AT353- 750

AT353- 800

AT353- 900

AT353-1000

Order No.

539-558-30

539-559-30

539-560-30

539-561-30

539-562-30

539-563-30

539-564-30

539-565-30

539-566-30

539-567-30

539-568-30

539-569-30

539-570-30

539-571-30

539-572-30

Code

AT353-1100

AT353-1200

AT353-1300

AT353-1400

AT353-1500

AT353-1600

AT353-1700

AT353-1800

AT353-2000

AT353-2200

AT353-2400

AT353-2500

AT353-2600

AT353-2800

AT353-3000

• ABS AT343/AT343A

Order No.

539-601-

539-602-

539-603-

539-604-

539-605-

539-606-

539-607-

539-608-

539-609-

539-611-

539-613-

539-614-

539-615-

539-616-

539-617-

Code

AT343(A)-100

AT343(A)-150

AT343(A)-200

AT343(A)-250

AT343(A)-300

AT343(A)-350

AT343(A)-400

AT343(A)-450

AT343(A)-500

AT343(A)-600

AT343(A)-700

AT343(A)-750

AT343(A)-800

AT343(A)-900

AT343(A)-1000

Order No.

539-618-

539-619-

539-620-

539-621-

539-622-

539-623-

539-624-

539-625-

539-626-

539-627-

539-628-

539-629-

539-630-

539-631-

539-632-

Code

AT343(A)-1100

AT343(A)-1200

AT343(A)-1300

AT343(A)-1400

AT343(A)-1500

AT343(A)-1600

AT343(A)-1700

AT343(A)-1800

AT343(A)-2000

AT343(A)-2200

AT343(A)-2400

AT343(A)-2500

AT343(A)-2600

AT343(A)-2800

AT343(A)-3000

* The in the Order No. is as follows. AT343 : 30

AT343A : 31

• ABS AT303/AT303A

Order No.

539-321-

539-322-

539-323-

539-324-

539-325-

539-326-

539-327-

539-328-

539-329-

539-330-

539-331-

539-332-

539-333-

539-334-

539-335-

Code

AT303(A)-100

AT303(A)-150

AT303(A)-200

AT303(A)-250

AT303(A)-300

AT303(A)-350

AT303(A)-400

AT303(A)-450

AT303(A)-500

AT303(A)-600

AT303(A)-700

AT303(A)-750

AT303(A)-800

AT303(A)-900

AT303(A)-1000

Order No.

539-336-

539-337-

539-338-

539-339-

539-340-

539-341-

539-342-

539-343-

539-344-

539-345-

539-346-

539-347-

539-348-

539-349-

539-350-

Code

AT303(A)-1100

AT303(A)-1200

AT303(A)-1300

AT303(A)-1400

AT303(A)-1500

AT303(A)-1600

AT303(A)-1700

AT303(A)-1800

AT303(A)-2000

AT303(A)-2200

AT303(A)-2400

AT303(A)-2500

AT303(A)-2600

AT303(A)-2800

AT303(A)-3000

* The in the Order No. is as follows. AT303 : Blank

AT303A: 01

80


Discontinued models and succession models specification compatibility

: Compatible

: Compatible (with limitations)

: Not compatible

Separate type ST scales

Discontinued models Current model

ST31A, ST32A

ST33C

ST41A/ST42A

ST41B/ST42B

ST52B

ST62C

ST34C

ST322

ST44B/ST44C

ST46

LHS21/23C

ST36A

ST36C

ST24C

ST24C/ST24B

ST422/ST46-EZA

ST422/ST46-EZA

ST36C

ST422

ST46-EZA

ST46-EZA

None

*1 Up/down pulse output cannot be supported.

Assembly type AT scales

Scale grating pitch

—

Output signal specifications

* 1

* 1

—

Accuracy

—

Mounting dimensions

—

Discontinued models Current model Scale grating pitch

AT2-N

AT2-FN

AT11-N

AT11-FN

AT12-N

AT12

AT81-C

AT21-C

AT21

AT25

AT102

AT111

AT212

AT103

AT113

AT112

AT181

AT211

AT211

AT103

AT113

AT211

*2 This can only be supported with an adapter when connected to an old counter.

*3 This must be checked for each scale effective range.

*4 Compatible with the output signal of the pulse signal unit


* 2

* 2

2 *

* 2

* 2

* 2

* 4

* 4

* 4

Accuracy

* 3

* 3

* 3

* 3

* 3

Mounting dimensions

Absolute scale unit

Discontinued models Current model Interface Resolution


AT3 2

AT500 series

ABS AT3 3

ABS AT500-S series

ABS AT500-H series

* 5

*5 You can control this by changing the NC parameter settings. For details, contact your NC manufacturer.

*6 Check that pins No. 9 and 10 of the AT353 output connector are not connected before you make the connection.

*7 The AT543A is compatible. Other current models have flying lead specifications.

Pulse signal units

Discontinued models Current model


PSU-1/2

FPSU03 series

FPSU05 series

FPSU10 series

FPSU4

FPSU21 series

PSU11

PSU12/13

PSU14

PSU21 series

PSU-100 series

PDS11

PSU-200 * 10

*

*

*

*

*

8

8

8

8

8

* 8

*8 Only the 2-phase square wave signals output specifications are compatible.

*9 Only the connector shape is compatible.

*10 When changing to the PSU-200, the scale may also have to be changed.

Power supply specifications

Mounting dimensions

Mounting dimensions

Output connector specification pin assignment

* 9

* 9

* 9

* 9

* 9

Note 1 : The compatibilities listed above refer to compatibility with the standard specifications.

Note 2 : When you change to a current model, check the direction before you make the connection. If the direction is different, the device may go out of control.

Note 3 : Contact us for information on models not listed here.


—


* 2

* 2

* 2

* 2

* 2

* 2


* 6

* 7

* 7

81

Handling linear scales

Mounting scales

1. AT scale mounting posture

The scale unit is designed so that it is difficult for contamination to enter the unit, but determine the mounting posture after considering the arrival directions of coolant and dust so that these substances do not come into direct contact with the aperture. Also, be sure to prepare a scale cover.

Coolant, dust, etc.

Coolant, dust, etc.

Rubber lip

3. Cautions regarding mounting the ST scale

(excluding the ABS ST700)

• Mount the main scale so that the detector head is facing the scale front surface (the surface on which rainbow colors are visible when light strikes the surface at an angle).

(Models that have the Mitutoyo logo on the main scale are mounted correctly when the logo can be read from the detector head side.)

• Ambient light entering from the back of the main scale will cause incorrect operation, so the scale mounting design must ensure that ambient light does not enter.

Horizontal mounting

Coolant, dust, etc.

Perpendicular mounting

Main scale

Mitu toyo

Direction from which the Mitutoyo logo can be read

Detector head

Vertical mounting

Coolant, dust, etc.

Coolant, dust, etc.

Coolant, dust, etc.

Recommended mounting direction

Do not install like this

Possible to install like this

*When using the device in an environment with coolant or cutting oil mist, do not mount the device in the vertical direction.

Possible to install like this

Do not install like this

2. Mounting the AT scale unit

As shown in the following figure, use dial gauges or similar devices close to the two effective range marks to check and adjust their parallelism with the machine guideway.

To adjust the parallelism: (1) move the mechanically movable parts such as the slide table to adjust the parallelism of the scale unit or (2) measure the position from the mechanism's guide rail or from a corresponding reference.

• Permissible parallelism value: Less than 0.1mm or less than 0.2mm

Main scale

Detector head

• Use a tool such as a lever type indicator or dial gage to move the head bracket and the scale mounting relatively in order to check whether the scale mounting surface has been prepared as shown in the mounting diagram.

• Use flexible adhesive with adhesive type scales.

We recommend that you use KE441T manufactured by

Shin-Etsu Chemical Co, Ltd.

• Remove the protective tape attached to the glass scale and detector head when you install the device.

0.01

G

0.01

G G indicates the machine guideway is the reference surface

Main scale

Mitu toyo

Effective range

Dial gauge

Up and down directions MOD

EL

AT2

Front and back directions

LIN

EAR

SC

ALE

Mitu toyo

Lever type dial gauge

Remove the scale protective tape

0.01

G

0.01

G G indicates the machine guideway is the reference surface

Main scale

Mitu toyo

Remove the scale protective tape

82

Handling linear scales

AT scale air supply

• One way to improve the environmental resistance (coolant resistance and dust resistance) of assembly type (AT) linear scales is to supply the scale unit with clean, compressed air through plastic tubing to one of the M5 screw holes that are present on both sides of the scale unit.

* The AT103, AT211, AT203, ABS AT500 series, and ABS AT300 series are standard-equipped with air supply apertures.

Feedback cable earth processing

Be sure to ground the shield of the feedback cable to an earth conductor (using an earth clamp, or similar) immediately before the control device. (See the following figure.)

Control device

Linear scale side

Connect shield to earth

Mitu toyo

Earth clamp for connection to earth conductor

Fixed reducer (No. 06ACJ155)

Piping

Note: Supplying air is an ancillary method. The mounting posture of the device is of primary importance. Be sure to properly orient the device as per the mounting posture described in the user's manual before you implement this method. Also, when supplying air, the air filter must be replaced periodically according to the contamination level of the air source in use. Note that a dirty filter continues to be used, malfunctions will be caused by dirt entering

1 Air dryer

2 Air filter

3 Oil mist filter

4 High-efficiency oil mist filter

5

Regulator

Tube (ø6) the scale (which is the opposite of the intended effect).

Air unit (option)

Special included accessories

As an option, you can purchase an air supply unit.

Air supply unit specifications

6 流量

調整弁

1. Air delivery

specifications

ISO 85731-1

Class1-4-1 or equivalent

Maximum particle diameter (μm)

Minimum pressure dew point (°C)

Oil concentration (mg/m3)

0.1

+3

0.01

Feedback cable

AT211

Air unit (No. 06ACJ154)

AT211

Shielded cable (braided)

Cut away part of the cable's

PVC sheathing to expose braiding

10

ø6

HE×10

M5×0.8

Unit: mm

特別付属品

(18)

181

(173)

119.6

(58) 40

2

Fixed reducer external dimensions

Linear scale

2. Air delivery

pressure

0.1MPa (approx. 1kgf/cm 2 )

Adjusted to the pressure stated above with a regulator described under "4. Air supply unit."

3. Airflow rate 10 to 20L/min (per axis)

By using a fixed reducer (06ACJ155), an airflow rate of 12.7L/min with a pressure of 0.1MPa can be supplied.

IN

ø6

Piping tube diameter

T joint

Linear scale

OUT

ø6

Piping tube diameter

Tube (ø6)


(specially ordered product)

Fixed reducer

Mitu toyo

Air unit (main unit)

4. Air supply to unit Do not supply air directly from a compressor. Be sure to supply dry, compressed air that has passed through an air drier and a main line air filter. The replacement

*Start supplying air to the scale approximately 30 minutes prior to the start of processing. We also recommend that you continue supplying

Fixed reducer (No. 06ACJ155) year.* Install the fixed reducer on the scale side. representative.

Piping conditions and on the environment.

Air equipment configuration

1 Air dryer

2 Air filter

3 Oil mist filter

4 High-efficiency oil mist filter

Main air unit

5

Regulator

No.

1

2

3

4

5

Name

Air dryer

Air filter

Oil mist filter

High-efficiency oil mist filter

Regulator

Fixed reducer *

Specifications

Maximum particle diameter (nominal filtration rating): 5μm

Maximum particle diameter (nominal filtration rating): 0.3μm

Secondary oil concentration: 0.1mg/m 3

Nominal filtration rating: 0.01μm; oil-removal ratio 99.999%

Secondary oil concentration: 0.01mg/m 3

Set pressure: 0.1 to 0.7MPa

Flow rate when pressure is 0.1MPa: 12.7L/min

* Use Mitutoyo-specified fixed reducers (No. 06ACJ154).

AT211

Fixed reducer

T joint

Fixed reducer

Tube (ø6)

AT211


Part No.

06ACJ154 Air unit

Name Remarks

Main unit

06ACJ162

06ACJ163

Included accessory set for three axes (three fixed reducers, one

20m ø6 urethane tube, and three T joints)


06ACJ155

06ACJ159

06ACJ160

06ACJ161

Fixed reducer

Air filter element

Mist separator element

Micro mist separator element

Maintenance parts

Note: One air unit can supply up to five axes. Therefore, there is an included accessory set that supports connections for up to two axes and an included accessory set that supports connections for up to three axes. If you combine these two sets, you can connect up to four or five axes.

83

Technical Information

Structure and features of the assembly type linear scale (AT)

1. AT series detector joint mechanism

(Adoption of simple joint structure offering high rigidity)

The detector head and slider (sensor) of the scale unit are connected by the joint shown in the following figure.

Because of this structure, if values are less than or equal to the scale mounting standard values, detector head mounting errors and parallelism differences between the scale unit and the machine guideway are absorbed, and normal operation is assured. Also, the simple and highly rigid structure provides superior durability.

Slider (sensor)

Coupling rod

Coupling spring

6. Maintenance of the seal

To maintain the dustproof property of the rubber seal and extend its life, apply a small amount of good-quality silicone grease (such as G-30L made by Shin-Etsu Chemical Co, Ltd.) to the contacting area of the rubber and detector head once a year. (The maintenance interval will vary slightly according to the operating conditions of the scale.)

Apply grease.

Scale unit

15mm max.

Detector head

Dustproof rubber

Soak cloth, paper, or other similar material in silicone grease, and then apply to the entire length of the contacting area.

Durability of cables used with the linear scale

The life expectancy of the linear scale cables has been tested using the methods shown below.

Test method A

Approx. 90°

A Tensile strength: Approx. 1N

Approx. 90°

Detector head

2. Advantage of special waterproof connectors

Adopting waterproof and oilproof connectors makes it possible to separate the signal cable. In turn, this makes installation and maintenance easy.

3. Signal cable conduit

Signal cables that are enclosed in a stainless-steel, spiral cover (conduit), for protection, are also available. The conduit will not rust or corrode, so these signal cables can be used over an extended period.

4. Adoption of rubber lip thrust method (Mitutoyo's proprietary technology)

The thrust part (see the following figure) pushes aside the rubber seal like a ship's keel pushes aside water.

B

R50

C

Test conditions Bend fulcrum

Hard-wired band

Bend angle: ±90°

Test speed: 30 times per minute

(For the number of bends, A, B, A, C, and then A represents one bend.)

Bend radius: R = 50mm

Evaluation standard value: 3,000,000 times

(No breaks in the signal wires or shield)

Test method B

Movable cable

One half sliding distance

500mm

Fixed cable

5. Adoption of specially formed urethane rubber lip with reinforcing wire

Resistance to oil and dust has been improved.

*Available with the AT103, AT203, ABS AT500, and ABS AT300.

*Can be specially ordered for the AT113 and AT211.

Without wire

With wire

4

3 Wire

2

1

Rubber lip shape

1 2 5 10 20 30 (Days)

Elongation of dustproof rubber against coolant exposure

84

Test conditions

Bend radius: R = 40mm

Speed: 2m/s

Travel distance: 1000mm

Scales

AT100 series

AT211

AT202

AT212

AT300 series

AT500 series

ST700 series

ST36

ST24

ST422

*1 Also including the head cable

*2 Testing still ongoing as of December 2008

Arc length

80mm

Test method

A

A

A

A

B

A

A

B

B

A

Signal cable test result

3 million times

3 million times

3 million times

3 million times

3 million times

3 million times

* 1

54 million times or more *

54 million times or more * 2

54 million times or more * 2

3 million times

2

Note 1 : The test data stated above does not represent guaranteed values.

Depending on the bend conditions, the number of times that the cables can bend without failure may be less than indicated.

Note 2: When bending cables, the recommended bend radius is 100mm or more.

Technical Information

Alarm functions

1. Detection of detector disconnection and short-circuit errors

Disconnection of and short circuits to 0V of the phase A and phase B signal lines from the linear scale as well as other similar errors are detected.

2. Detection of excess response speed of detector feed (over-speed)

The feed speed of the linear scale (detector) exceeding the maximum feed speed as well as other similar errors are detected.

3. Detection of input signal errors

The amplitude voltage, DC voltage, or phase difference of the phase A and phase B signals from the linear scale being outside of the corresponding allowable range as well as other similar errors are detected.

4. Drop in line voltage

The line voltage supplied to the linear scale, PSU, and other devices (particularly devices that use a DC power supply) dropping below the allowable range is detected as an error.

Alarm detection functions available with each product

(1) Alarm functions on the AT scales (sinusoidal signal output type) + PSU-200

PSU-200

Alarm function

Detected inside the scale Detected inside the PSU

Scale error Over-speed

Input signal error

Detection of scale errors

Disconnection or short circuit in signal cable

Scale code

AT103

AT113

AT112

PSU-200

PSU-250 series

PSU

PSU-200

(2) Alarm functions on the AT scales (square wave signal output type)

Alarm function

Detected inside the detector head (inside the I/F on the AT212)

PSU-200

Over-speed

Scale code

AT203

AT211

AT212

I/F

(3) Alarm functions on the ST scales (sinusoidal signal output type) + PSU-200

PSU

Scale code

ST36A

ST24

PSU-200

PSU-250 series

Alarm function

Detected inside the scale Detected inside the PSU

Scale error Over-speed

Input signal error

Detection of scale errors

I/F Disconnection or short circuit in signal cable

5. Detection of momentary power failures

A momentary power failure or voltage drop greater than the allowable range occurring in the power supply that is being supplied to the PSU, counter, or other device (devices that use an AC power supply) is detected as an error.

6. Detection of scale errors

Errors that occur inside the linear scale are detected.

7. Detection of detector circuit errors

Errors caused by the incremental count or absolute count in absolute linear scales are detected.

8. Detection of CPU errors (detection of internal errors)

For linear scales, counters, and other devices that use CPUs, the CPU stopping operating normally is detected as an error.

Note: The alarm functions vary according to the product. For details, see the alarm functions available with each product.

Also note that the allowable ranges used to detect alarms vary according to the product.

PSU-200

PSU

(4) Alarm functions on the ST scales (square wave signal output type)

Over-speed

I/F

Alarm function

Detected inside the I/F

Input signal error

Disconnection or short circuit in signal cable

Scale code

ST24B(C)

ST36

ST422

ST46-EZA

PSU-200

(5) Alarm functions on the absolute scales

Alarm function

Detected inside the I/F

Scale code

ABS ST700 series

ABS AT300 series

ABS AT500 series

Scale error

Overspeed

Input signal error

Detector circuit error

PSU

CPU error

I/F

85

Explanation of terms

Linear scale accuracy

(1) Linear scale accuracy

As shown in Figure 1, the linear scale accuracy is determined by using an accuracy inspection device to perform comparisons at fixed intervals between the value measured with the linear scale and the reference value according to a laser length measuring device.

The inspection environment temperature is 20°C, so the accuracy is at this temperature.

The inspections are performed with other inspection conditions and standard values that comply with Mitutoyo's internal standards.

PC Digital counter

Laser oscillator

Interferometer

Laser beam axis

Cube corner

Mounting bracket

Scale unit

Sliding table

[Figure 1] Linear scale accuracy inspection device, overview

The accuracy (error) at each measured point is determined according to the following formula.

Error = reference value of the laser length measuring device - value measured by the linear scale

Here, the words "accuracy" and "error" have the same meaning.

We refer to the plot on a graph of the error at each measured point in the effective range as an accuracy chart.

Based on this accuracy chart, the accuracy of the linear scale is noted as the range between the maximum error and minimum error. There are the following two notation methods.

(1) Note the size of the range between the maximum error and minimum error as 'a'.

The value 'a' shown in Figure 2-1 indicates the accuracy. This standard value is indicated using the conversion formula ( + L) μm. Here, L is the effective range (in mm) and and are coefficients that are set on each model.

For example, for a linear scale with an accuracy standard value of (3 + 3L/1000)

μm and an effective range L of 1000mm, 'a' is 6μm.

2) Note the size of the range between the maximum error and minimum error as '±a/2'.

The center value between the maximum error and minimum error is 0, the maximum value is noted as '+a/2', the minimum value is noted as '-a/2', and the size of the error range is noted as '±a/2'. This notation is mainly applied to ST scales.

In notations (1) and (2), 'a' in (1) and '±a/2' in (2) are the same accuracy standard value.

Linear scales use a straight-line scale that has fixed-pitch graduations as the reference to detect the amount of movement and the amount of change in position. By detecting graduations, a linear scale obtains 2-phase sinusoidal signals that have the same pitch as the graduations. The linear scale is designed so that it can perform readings with greater detail than the straight-line scale by interpolating this sine wave signal with an electronic circuit. Interpolation means that these 2-phase sinusoidal signals are interpolated, and the result is divided into pulse signals corresponding to the resolution. For example, if the graduation pitch is 20μm, readings can be performed with a resolution of 1μm.

Here, error within the graduation pitch range will occur according to the accuracy of this interpolation processing. This is called interpolation accuracy.

The accuracy standard value of a linear scale includes the aforementioned errors inspected at fixed intervals and interpolation accuracy.

Accuracy chart (error plot)

Error a

Accuracy: a (µm)

0

Effective range

X: Measurement position

[Figure 2-1] Accuracy notation method (1)

Error

0 ± a

2

Accuracy: ±a/2 (µm)

Effective range

X: Measurement position

[Figure 2-1] Accuracy notation method (2)

Serial interface

This refers to a communication channel in which digital data is transmitted sequentially 1bit at a time. While it has inferior real-time characteristics, the advantages are that it requires less wiring and has high reliability.

(This is the main communication method for feedback encoders.)

Line-driver output

This refers to signals that are output as square waves. A signal that has the inverted polarity of the output signal is generated, and the difference between these signals is set as the signal

(differential signal output). This complies with EIA standards RS-422 and RS-485.

RS-422

This was standardized by the Electronic Industries Alliance (EIA) of the U.S. It is one of the balanced type serial communications standards, and it has excellent noise reducing characteristics. The maximum transmission speed is 10Mbps, but limitations on the transmission speed arise as the cable length increases.

RS-485

This was standardized by the Electronics Industries Alliance (EIA) of the U.S. It is one of the balanced type serial communications standards, and it ranks higher than RS-422.

RS-422 is upwardly compatible with this standard. While RS-422 is a communication standard that supports point-to-point, multi-drop connections, this standard supports bus type multi-point connections and bidirectional communications.

Minimum edge interval

This refers to the minimum time between a rising edge or falling edge of a square wave being output (or input) and the next edge being output (or input). For square wave output type linear scales, even with the same resolution, the shorter the minimum edge interval, the faster the response speed.

Thermal expansion coefficient

This refers to the thermal expansion of an object in response to a change in temperature, which is measured as elongation per unit length for each 1°C increase in temperature of the material.

Full duplex communication and half duplex communication

Full duplex communication refers to a system in which devices (for example, a scale and a servo amplifier) each have two communication lines and can communicate with each other at the same time. On the other hand, half duplex communication refers to a system in which devices have a single communication line, so devices cannot communicate with each other at the same time, and communications can only be sent from a single device at any one time.

Full duplex communication

Scale Servo amplifier

Half duplex communication

Scale Servo amplifier

Transmission Reception

Reception Transmission

Transmission and reception

Transmission and reception

86

Protection rating definition

IP53 protection rating

Type Protection ratings: Summary

Protection rating for external objects

5: Dustproof type

Definition

It is not possible to completely prevent the entry of dust, but dust cannot enter in amounts that interfere with the operation of electrical devices or that pose a safety hazard.

Protection rating for water

3: Protected against spraying water

Water sprayed at an angle up to 60° from the vertical shall have no harmful effect.


Type


Protection ratings: Summary

5: Dustproof type

Definition

It is not possible to completely prevent the entry of dust, but dust cannot enter in amounts that interfere with the operation of electrical devices or that pose a safety hazard.


4: Protected against water splashes

Exposure to splashing water from all directions produces no harmful effect.


Type


Protection ratings: Summary Definition

6: Dustproof type Prevents the entry of dust.


4: Protected against water splashes.

Exposure to splashing water from all directions produces no harmful effect.


Type


Protection ratings: Summary Definition



5: Protected against water jets

Exposure to water projected from a nozzle from all directions produces no harmful effect.


Type Protection ratings: Summary


Definition



7: Protection against the effects of immersion in water

Ingress of water in a harmful quantity shall not be possible when the enclosure is temporarily immersed in water under defined conditions of pressure and time.

Note: For the test conditions used to evaluate the protection ratings, see IEC

60529:2001 and JIS C 0920.

Export permission by the Japanese government may be required for exporting our products according to the Foreign Exchange and Foreign Trade Law. Please consult our sales office near you before you export our products or you offer technical information to a nonresident.

Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as well as other technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs, dimensions and weights.

The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. Only quotations submitted by ourselves may be regarded as definitive.

Our products are classified as regulated items under Japanese Foreign Exchange and Foreign Trade Law. Please consult us in advance if you wish to export our products to any other country. If the purchased product is exported, even though it is not a regulated item (Catch-All controls item), the customer service available for that product may be affected. If you have any questions, please consult your local Mitutoyo sales office.

Mitutoyo Corporation

20-1, Sakado 1-Chome,

Takatsu-ku, Kawasaki-shi,

Kanagawa 213-8533, Japan

T +81 (0) 44 813-8230

F +81 (0) 44 813-8231 http://www.mitutoyo.co.jp

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