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Dimensions of scale units
Order No.
*
579-670- 1
579-671- 1
579-672- 1
579-673- 1
579-674- 1
579-675- 1
579-676- 1
579-677- 1
579-678- 1
579-679- 1
579-680- 1
579-681- 1
579-682- 1
579-683- 1
579-684- 1
579-685- 1
579-686- 1
579-687- 1
579-688- 1
579-689- 1
579-690- 1
579-691- 1
579-692- 1
579-693- 1
579-694- 1
579-695- 1
579-696- 1
579-697- 1
579-698- 1
Code *
ST46EZA - 100A
ST46EZA - 150A
ST46EZA - 200A
ST46EZA - 250A
ST46EZA - 300A
ST46EZA - 350A
ST46EZA - 400A
ST46EZA - 450A
ST46EZA - 500A
ST46EZA - 600A
ST46EZA - 700A
ST46EZA - 800A
ST46EZA - 900A
ST46EZA -1000A
ST46EZA -1100A
ST46EZA -1200A
ST46EZA -1300A
ST46EZA -1400A
ST46EZA -1500A
ST46EZA -1600A
ST46EZA -1700A
ST46EZA -1800A
ST46EZA -2000A
ST46EZA -2200A
ST46EZA -2400A
ST46EZA -2500A
ST46EZA -2600A
ST46EZA -2800A
ST46EZA -3000A
Effective range
L
1
(mm)
100
150
200
250
300
350
400
450
500
600
700
800
900
1000
1100
1200
1300
1400
1500
1600
1700
1800
2000
2200
2400
2500
2600
2800
3000
Overall length
L
2
(mm)
940
1040
1140
1240
540
640
740
840
1340
1440
1540
1640
1740
1840
2040
2240
2440
2540
2640
2840
3040
340
390
440
490
140
190
240
290
Scale fixing pitch
L
3
(mm)
90
100
90
100
80
100
85
100
130
100
125
100
120
75
85
100
75
50
75
100
60
95
100
100
100
100
100
100
100
Scale retaining spring
A
(pcs.)
1
* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.
→ B (2-phase square wave signals + external reset input): →1
→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2
Scale retaining spring
B
(pcs.)
10
10
12
12
6
6
8
8
10
14
12
16
14
4
6
4
4
2
2
2
4
26
26
28
30
18
20
22
24
• Application program (Option, Part No.06AEF800)
Adjustment SW / CAL display / Reference point display
NC side
Connector control unit has setup indicator
Signal strength checking and parameter setup can be performed on a PC
(PC to be prepared by customer)
20
Separate Type ST Series
Sinusoidal signal & Square wave signal Output Scale Unit (Compact Type)
ST422
Features
• The maximum response speed is 5000mm/s.
(When resolution is 1μm and the minimum edge interval is 125ns)
• Compact detector unit control unit allow use in applications where space-saving design is important.
• The maximum effective measurement length of 3000mm enables use on large machines.
• LED display function for indicating signal errors.
Specifications
Item Code
Detection method
Main scale grating pitch
Signal output pitch
Output signal
Effective range
ST422
Reflective photoelectric linear encoder
40μm
40μm
Two 90° phase-shifted sinusoidal signals and two 90° phase-shifted square wave signals, scale reference point signal, alarm signal
10 to 3000mm
Accuracy (20°C)
Effective range 10 to 300mm: ±1.0μm
Effective range 350 to 500mm: ±2.0μm
Effective range 600 to 1000mm: ±3.0μm
Effective range 1100 to 3000mm: ±3.0μm/m
Thermal expansion coefficient
Maximum response speed
Scale reference point
Power supply
Maximum current consumption
Operating temperature/humidity
Storage temperature/humidity
(8±1) x10 −6 / °C
5000mm/s (depending on setting)
With scale reference point
(50mm pitch, 10 to 75mm: Center point)
5VDC±5%
200mA (Max)
0 to 40°C, 20 to 80%RH (no condensation)
-20 to 60°C, 20 to 80%RH (no condensation)
Alarm indication
Head cable length
LED illumination on the I/F box
* For high flex type head cable, please contact us.
1m *
• I/F box output connector pin assignment
1 8
9 15
Output connector (pin type): RDAD-15P-LNA(05) (Hirose Electric or equivalent)
Suitable plug (standard accessory): D15-403N-110 (Technical Electron or equivalent)
Pin No.
Signal
7
8
9
5
6
3
4
1
2
10
11
12
13
14
15
0V (GND)
0V (GND)
+5V (Vcc)
+5V (Vcc)
Phase A (Sinusoidal signal)
Phase B (Sinusoidal signal)
Vref
PZ (scale reference point)
ALM (alarm, negative logic)
PA
PA
PB
PB
PZ
F. G
Output signal waveform
• 2-phase sinusoidal signals
Phase A
Phase B
Phase difference 90°
(Typ)
• Scale reference point
Output signal pitch 40µm
Vref
Vref
Vpp=2V Vref = 2.5V
200±100µm
PZ
(Note) The phase difference between the PZ signal and the Phase A signal (and
the Phase B signal) are not defined.
• 2-phase square wave signals
V
OH
PA
V
OL
PA
PB
21
PB
( t d
V
OH
= 2.5V (min.)
V
OL
= 2.5V (max.)
t d
: Edge interval, resolution
)
PZ
PZ
(Note) The phase difference between the PZ signal and the PA signal/PB signal has no effect.
Z-phase pulse width
200±100µm
Maximum response speed
Maximum response speed depends on setting, as shown below.
Resolution
Setting
(number of divisions)
Minimum edge interval
[+0, -10%]
5μm (8)
125ns
250ns
500ns
1000ns
1μm (40)
0.5μm (80)
125ns
250ns
500ns
1000ns
125ns
250ns
500ns
1000ns
125ns
Maximum response speed (mm/s)
(Scale pitch: 40μm)
5000
5000
3600
1800
5000
3600
1800
900
3600
1800
900
450
1500
0.2μm (200)
250ns
500ns
1000ns
700
300
150
Note: The minimum edge interval varies 0 to -10% based on the operating environmental conditions.
ST422 Scale unit mounting dimensions
• ST422-10 to 350 (Adhesive fixing type) * 3 • ST422-400 to 3000
Unit: mm
Cable clamp
(L
2
-L
Scale reference point
50mm pitch
1
)/2
10±1 * 1
4.7
* 2
No.09AAB211A
60001
4.6
4.6
25
30
Effective range L1
Overall length L2
Exposed portion of cable and cable clamp
Always ground to the machine using the cable clamp.
7.5
Direction to insert cable (1.2)
10.5±0.2
1.8
// 0.05
A A
// 0.05
G
2×M2.5, through hole
10
0.02
B
G: Machine guideway
3.5x6, slot
0.4
ø3.5
(L2-L1) /2
A
Cable clamp
10
3.5x6, slot
0.4
ø3.5
Cable clamp
Scale reference point
50mm pitch
30
25
4.6 4.6
Exposed portion of cable and cable clamp
Always ground to the machine using the cable clamp.
7.5
Direction to insert cable
(1.2)
// 0.05
A
13.5±0.2
4.8
2×M2.5, through hole
L3
Retaining spring A
Effective range L
1
Overall length L
2
L3
B
Retaining spring B
Cable clamp
*1 When stroke is 100mm or longer
*2 One center point when stroke is 10 to 75mm
*3 For information on fixing methods for adhesive fixing type, see
"Handling linear scales Mounting scales" on page 82
4.7
ø2 ø6
Head cable (1m)
2×M5, through hole
R
4
(5)
4
25±0.2
35
0.4
2×ø4.5
Retaining spring A
1.5
25±0.2
35
0.4
1.5
2×ø4.5
Retaining spring B
Dimensions of scale units
Order No. Code
Effective range
L
1
(mm)
579-631 ST422-10
579-632 ST422-25
579-633 ST422-50
579-634 ST422-75
10
25
50
75
579-635 ST422-100 100
579-636 ST422-150 150
579-637 ST422-200 200
579-638 ST422-250 250
579-639 ST422-300 300
579-640 ST422-350 350
579-641 ST422-400 400
579-642 ST422-450 450
579-643 ST422-500 500
579-644 ST422-600 600
579-645 ST422-700 700
579-646 ST422-800 800
579-647 ST422-900 900
Overall length
L
2
(mm)
540
640
740
840
940
320
370
440
490
120
170
220
270
30
45
70
95
Scale fixing pitch
L
3
(mm)
Retaining spring A
Retaining spring B
80
100
85
100
90
—
—
100
75
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
1 pc.
4 pcs.
1 pc.
6 pcs.
1 pc.
6 pcs.
1 pc.
6 pcs.
1 pc.
8 pcs.
1 pc.
8 pcs.
1 pc.
10 pcs.
—
—
—
—
—
—
—
—
S.UP POWER
Part No.
09AAB215
Mitutoyo Corporation
SERIAL No. 60001
MADE IN JAPAN
68±0.2
80
SERIAL No. 60001
4×
R
4
Output connector (included)
Order No. Code
Effective range
L
1
(mm)
Overall length
L
2
(mm)
579-648 ST422-1000 1000 1040
579-649 ST422-1100 1100 1140
579-650 ST422-1200 1200 1240
579-651 ST422-1300 1300 1340
579-652 ST422-1400 1400 1440
579-653 ST422-1500 1500 1540
579-654 ST422-1600 1600 1640
579-655 ST422-1700 1700 1740
579-656 ST422-1800 1800 1840
579-657 ST422-2000 2000 2040
579-658 ST422-2200 2200 2240
579-659 ST422-2400 2400 2440
579-660 ST422-2500 2500 2540
579-661 ST422-2600 2600 2640
579-662 ST422-2800 2800 2840
579-663 ST422-3000 3000 3040
Scale fixing pitch
L
3
(mm)
Retaining spring A
Retaining spring B
95
100
100
100
100
100
100
100
100
125
100
120
100
90
100
130
1 pc.
10 pcs.
1 pc.
12 pcs.
1 pc.
12 pcs.
1 pc.
10 pcs.
1 pc.
14 pcs.
1 pc.
12 pcs.
1 pc.
16 pcs.
1 pc.
14 pcs.
1 pc.
18 pcs.
1 pc.
20 pcs.
1 pc.
22 pcs.
1 pc.
24 pcs.
1 pc.
26 pcs.
1 pc.
26 pcs.
1 pc.
28 pcs.
1 pc.
30 pcs.
22
Assembly Type AT Series
Sinusoidal signal Output Type Scale Unit
AT100 Series
AT103
AT113
+2.5V
AT112-F
AT181 Specifications
Item
Code AT103 AT113 AT112-F AT181
Output specification
Detection method
Photoelectric type transmission linear encoder
Light source: Light-emitting diode
Light-receiving element: Phototransistor (Photodiode for AT112-F only)
6000mm
120m/min *4
Two 90° phase-shifted sinusoidal signals
20μm
20μm
1500mm 1020mm
(5+5L
0
/1000) μm, L
0
：Effective range (mm) * 2
120m/min 50m/min
With scale reference point (50mm pitch)
(8±1)×10 -6 / °C
5VDC±5%
600mm
70mA 60mA
0 to 45°C-20°C to 70°C
20 to 80%RH (no condensation)
70mA
None
IP53
5N max.
0.3m
None
IP54
6N max.
Standard accessory (The length is shown in the dimension chart for each type)
Output connector (pin type)
DA-15P-NR (JAE)
Applicable plug
DA-15S-NR(JAE) or equivalent
1
9 15
8
Output
Main scale grating pitch
Signal output pitch
Maximum effective measurement length
Accuracy (20°C) * 1
Maximum response speed * 3
Scale reference point
Main scale thermal expansion coefficient
Power supply voltage
Maximum current consumption
Operating/storage temperature
Operating/storage humidity (relative humidity)
Head cable length
Protection rating
Sliding force
Signal cable * 5
Pin No.
1
2
3
4
Signal
0V
0V
主信号（ A 相、 B 相）出力回路
+5V
+5V
5
6
7
8
9
μ PC844
10 Ω
＋
Phase A
主信号（ A 相、 相）出力回路 Ω Phase B
Standard voltage
A 相
μ PC844
＋ 2.5V
μ PC844
ALM (Alarm)
10 - 14
15
＋ 2.5V
＋ 2.5V
10 Ω
μ PC844
10 Ω
REF
F. G
In the AT112-F series, Pin No. 9 is not used.
• Common specification
Not used
＋ 5V
＋ 5V
1K Ω
1K Ω
φ Z
AL
＋ 5V
＋ 5V
μ PC393
5.1K
Ω
μ PC393
φ Z
AL
5.1K
Ω
アラーム
アラーム
Output signal waveform
Extension cable (sold separately) * 5
Length
2m
5m
7m
Part No.
09AAA033A
09AAA033B
09AAA033C
Remarks
Conduit type
*1 Depending on the model, we also have high-accuracy types available. (See notes in the scale unit dimension chart.)
*2 For AT103-3250 and above, this is (5+8L
0
/1000) μm. For AT112-F, this is (3+3L
0
/1000) μm. L
0
: mm
*3 Depends on the control unit electrical unit to which it is connected.
*4 For AT103-3250 and above, this is 50m/min.
＋5V
*5 PVC sheathed signal cables and extension cables will be made to order.
Phase B 1k Ω
øZ
AL
Output signal
Signal output circuit
＋5V
Signal
Phase A
Phase B
Output signal waveform
20µm
20µm
Phase difference 90°
Phase difference 90°
Vpp=2V
Vpp=2V
20±10µm * 6
10 Ω Phase A
Phase B 1k Ω
+2.5V
10
AL
Ω
REF
5.1k
Ω
Alarm
µPC393
Scale reference point 20±10µm * 6
øZ
Phase B 1k Ω
*6 The reference point signal for AT103 and AT113 is
"70μm±10μm".
10 Ω Phase A
Phase B
+2.5V
＋5V
10
AL REF
+2.5V
5.1k
Ω
REF
Alarm
Alarm signal output circuit
＋5V
5.1k
Ω
µPC393
Alarm
µPC844
20μm Mounting dimensions
(Effective range:100 to 3000mm)
Vpp=2V
10 Ω
µPC844
REF
A
5.1k
Ω AT103
20μm
(Standard type)
37.5
20
Vpp=2V
10
Air supply hole (M5) 10
The scale reference points are output at a 50mm pitch from the end of the effective range (L
0
), which is shown with the � mark.
L
1
L
0
L
3
L
2
// 0.2 G
10
Scale unit
Mounting surface
Middle support
Mounting
Middle support
10 27 method A
10
B
L
4
6
20
L
6
L
5
A
L
6
Unit: mm
C
Adjustable
20μm
X
1.5±0.2
36
// 0.1 A
11 (hex) Countersunk, depth 5
Signal cable
47
42
60±0.2
90
7
G: Machine guideway
Countersunk, depth 6.5, reverse side has hex countersink, depth 5
// 0.2 G 7
Mounting method B
2.2
Middle support
A
Adjustable
10
Detector head mounting surface
View from X direction
Detector head mounting surface Scale unit
Mounting surface
23
• Dimensions L4, L5, and L6 indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 1000mm and more. (The position of the middle support is adjustable in the measuring length direction.)
Dimensions of scale units
AT103
Order No.
Code
539-111-30 AT103- 100
539-112-30 AT103- 150
539-113-30 AT103- 200
539-114-30 AT103- 250
539-115-30 AT103- 300
539-116-30 AT103- 350
539-117-30 AT103- 400
539-118-30 AT103- 450
539-119-30 AT103- 500
539-121-30 AT103- 600
539-123-30 AT103- 700
539-124-30 AT103- 750
539-125-30 AT103- 800
539-126-30 AT103- 900
539-127-30 AT103-1000
539-128-30 AT103-1100
539-129-30 AT103-1200
539-130-30 AT103-1300
539-131-30 AT103-1400
539-132-30 AT103-1500
539-133-30 AT103-1600
539-134-30 AT103-1700
539-135-30 AT103-1800
539-136-30 AT103-2000
539-137-30 AT103-2200
539-138-30 AT103-2400
539-139-30 AT103-2500
539-140-30 AT103-2600
539-141-30 AT103-2800
539-142-30 AT103-3000
1800
2000
2200
2400
2500
2600
2800
3000
1000
1100
1200
1300
1400
1500
1600
1700
Effective range
L
0
(mm)
100
150
200
250
300
350
400
450
500
600
700
750
800
900
1890
2100
2300
2500
2600
2700
2900
3100
1060
1160
1260
1360
1460
1560
1690
1790
Maximum travel length
L
1
(mm)
120
170
220
270
330
380
430
480
540
650
760
810
860
960
2018
2228
2428
2628
2728
2828
3028
3228
1188
1288
1388
1488
1488
1688
1818
1918
Mounting hole pitch
L
2
(mm)
248
298
348
398
458
508
558
608
668
778
888
938
988
1088
2038
2248
2448
2648
2748
2848
3048
3248
1208
1308
1408
1508
1608
1708
1838
1938
Overall length
L
3
(mm)
268
318
368
418
478
528
578
628
688
798
908
958
1008
1108
Middle support
L
4
(mm)
—
594
644
694
744
794
844
—
1314
1364
1414
1514
1614
Effective range (mm) Middle support
1000 - 1500 (1 place)
1600 - 2200
2400 - 3000
BC (2 places)
ABC (3 places)
Middle support
L
5
(mm)
—
—
610
650
670
740
800
1300
1340
1400
1500
1600
Middle support
L
6
(mm)
—
—
—
650
670
700
750
800
Signal cable length (m)
3
5
7
Note 1: For effective ranges of 100 to 2000mm, we also have the high-accuracy AT103F JIS Class 0 (3+3L
0
/1000) μm models available.
Note 2: The ultra-high-accuracy AT103S (2+2L
0
/1000) μm models for effective ranges of 100 to 500mm may be custom-ordered on request.
Note 3: The accuracy does not include quantizing error; L
0
is the effective range (mm).
Mounting dimensions
(Effective range: 3250 to 6000mm)
AT103
(Standard type)
Mounting method
32.5
23
Mounting block A
L
4
60
L
6
L
6
L
5
L
6
2×ø8 (hole)
L
6
L
4
Mounting block
80
40
// 0.2 G
Unit: mm
(Adjustable) (Adjustable) (Fixed) (Adjustable) (Adjustable)
X
1.5±0.2
36
// 0.1 A
10
47
55.(max)
60±0.2
90
L
0
L
1
L
3
2×7 (hole), countersunk ø11, depth 6.5
(Detector head mounting hole pitch)
Reverse side has hex countersink, depth 5
10
// 0.2 G 10.3 (hex) Countersunk, depth 5
View from X direction
Dimensions of scale units
Order No.
Code
539-143-30
539-144-30
539-145-30
539-146-30
539-147-30
539-148-30
539-149-30
539-150-30
539-151-30
539-152-30
539-153-30
539-154-30
AT103-3250
AT103-3500
AT103-3750
AT103-4000
AT103-4250
AT103-4500
AT103-4750
AT103-5000
AT103-5250
AT103-5500
AT103-5750
AT103-6000
Note: Accuracy is (5+8L
0
/1000) μm.
Effective range
L
0
(mm)
3250
3500
3750
4000
4250
4500
4750
5000
5250
5500
5750
6000
Maximum travel length L
1
(mm)
3350
3600
3850
4100
4350
4600
4850
5100
5350
5600
5850
6100
Scale unit
Mounting surface
Overall length
L
3
(mm)
3470
3720
3970
4220
4470
4720
4970
5220
5470
5720
5970
6220
24
Detector head mounting surface
Mounting block
L
4
(mm)
135
160
125
110
135
160
85
120
125
130
135
110
Mounting block
L
5
(mm)
3200
3400
3720
4000
4200
4400
4800
4980
5220
5460
5700
6000
Mounting block
L
6
(mm)
800
850
930
1000
1050
1100
800
830
870
910
950
1000
Signal cable length
(m)
10
15
2 − 7 キリ、φ 11 ザグリ深 6.5
（検出ヘッド取付け穴ピッチ）
裏面六角ザグリ深 5
A
Mounting dimensions
(Effective range: 100 to 1500mm)
22
AT113
(Slim spar type)
9
28
The scale reference points are output at a 50mm pitch from the end of the effective range (L
0
), which is shown with the mark.
L
4
Mounting method A 9
L
2
L
1
L
0
// 0.2 G
9
1 Middle support
Middle support
L
5
12
ø5 (hole)
(Fixed)
B
1.5±0.4
// 0.1 A
19 1.5
47
14
Signal cable
7
Head cable (0.3m)
42 42
80±0.2
94
L
3
80±0.2
2×M6, through hole, countersunk ø9 on both sides, depth 4.5
Mounting method B
G: Machine guideway
// 0.2 G
1
Middle support
2×ø7, through hole
ø14, both sides countersunk, depth 6.5
17
12
B (Fixed)
ø5 (hole)
L
6
A
L
7
(Fixed)
A (Fixed)
L
7
18 2×M4×0.7, depth 5 Scale unit mounting surface
• Dimensions L
5
, L
6
, and L
7
indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 500mm and more. (The position of the middle support is adjustable in the measuring length direction.)
Dimensions of scale units
Effective range (mm) Middle support
500 - 1000 A (1 place)
1100 - 1500 BC (2 places)
Order No.
AT113
Code
539-201-30 AT113- 100
539-202-30 AT113- 150
539-203-30 AT113- 200
539-204-30 AT113- 250
539-205-30 AT113- 300
539-206-30 AT113- 350
539-207-30 AT113- 400
539-208-30 AT113- 450
539-209-30 AT113- 500
539-211-30 AT113- 600
539-213-30 AT113- 700
539-214-30 AT113- 750
539-215-30 AT113- 800
539-216-30 AT113- 900
539-217-30 AT113-1000
539-218-30 AT113-1100
539-219-30 AT113-1200
539-220-30 AT113-1300
539-221-30 AT113-1400
539-222-30 AT113-1500
Effective range
L
0
(mm)
100
150
200
250
300
350
400
450
500
600
700
750
800
900
1000
1100
1200
1300
1400
1500
Maximum travel length
L
1
(mm)
120
170
220
270
330
380
430
480
540
640
740
780
840
940
1040
1140
1240
1340
1440
1540
Mounting hole pitch
L
2
(mm)
258
308
358
408
468
518
568
618
678
778
878
918
978
1078
1178
1278
1378
1478
1578
1678
Mounting hole pitch
L
3
(mm)
242
292
342
392
452
502
552
602
662
762
862
902
962
1062
1162
1262
1362
1462
1562
1662
Overall length
L
4
(mm)
276
326
376
426
486
536
586
636
696
796
896
936
996
1096
1196
1296
1396
1496
1596
1696
Middle support
L
5
(mm)
—
339
389
439
459
489
539
589
—
Middle support
L
6
(mm)
331
381
431
451
481
531
581
Note 1: For effective ranges of 100 to 2000mm, we also have the high-accuracy AT113F JIS Class 0 (3+3L
0
/1000) μm models available.
Note 2: The ultra-high-accuracy AT113S (2+2L
0
/1000) μm models for effective ranges of 100 to 500mm may be custom-ordered on request.
Note 3: The accuracy does not include quantizing error; L
0
is the effective range (mm).
—
—
Middle support
L
7
(mm)
—
—
430
460
490
530
560
Signal cable length (m)
3
5
Mounting dimensions
(Effective range: 100 to 600mm)
AT181
(Sealed type)
2×M6, depth 8 (T groove + nut)
7 28 Mounting block
Rotational freedom 360°
Fixture for transportation
Cable connector
Rotational freedom 260°
Unit: mm
Unit: mm
C
(Fixed)
C (Fixed)
21
11 20
42
28 70
35 21
2×M6, depth 10 10
2×7 (hole)
Countersunk ø11, depth 6.5
20 min.0
max.L
1
7.5
8
3×7 (hole), countersunk ø11, depth 6.5
L
2
L
3
47
Scale reference points are output starting from here at 50mm pitch.
15 min.0
max.L
0
15
// 0.2
G
Signal cable
// 0.2 G
(7.5)
25
ø17
ø10.5
25
Dimensions AT111
Dimensions of scale units
Order No.
539-301
539-302
539-303
539-304
539-305
539-306
539-307
539-308
539-309
539-310
539-311
AT181
Code
AT181-100
AT181-150
AT181-200
AT181-250
AT181-300
AT181-350
AT181-400
AT181-450
AT181-500
AT181-550
AT181-600
Effective range
L
0
(mm)
100
150
200
250
300
350
400
450
500
550
600
Maximum travel length
L
1
(mm)
Note 1: We have no high-accuracy AT181F JIS Class 0 (3 + 3L 0 /1000) μm models.
Note 2: The accuracy does not include quantizing error; L 0 is the effective range (mm).
130
180
230
280
330
380
430
480
530
580
630
Mounting hole pitch
L
2
(mm)
255
305
355
405
455
505
555
605
655
705
755
Unit (frame) length
L
3
(mm)
270
320
370
420
470
520
570
620
670
720
770
Mounting dimensions
(Effective range: 50 to 1020mm)
AT112-F
(Super slim spar type)
Scale reference points are output starting from here at 50mm pitch.
L
2
L
1
6
35
// 0.2 G
(6)
A
Both sides countersunk, depth 5
15.4
Signal cable length
(m)
3
Unit: mm
3
12 56±0.2
80
9
L
0
2×M6×1
Both sides countersunk, depth 4.2
74±0.2
(25)
Head cable length 0.3m
2×M4×0.7 through hole, depth 6.5
42
G: Machine guideway
// 0.2 G
42
9
4.4
15 0.2±0.3
// 0.05 A
47
Signal cable length 3m
Dimensions of scale units
Order No.
539-251-10
539-252-10
539-253-10
539-254-10
539-255-10
539-256-10
539-257-10
AT112
Code
AT112- 50F
AT112- 70F
AT112- 120F
AT112- 170F
AT112- 220F
AT112- 270F
AT112- 320F
Effective range
L
0
(mm)
50
70
120
170
220
Mounting hole pitch
L
1
(mm)
143
163
213
263
313
Overall length
L
2
(mm)
155
175
225
275
325
539-258-10
539-259-10
539-260-10
539-261-10
539-262-10
539-263-10
539-264-10
539-265-10
539-266-10
AT112- 370F
AT112- 420F
AT112- 470F
AT112- 520F
AT112- 570F
AT112- 620F
AT112- 670F
AT112- 720F
AT112- 770F
270
320
370
420
470
520
570
620
670
720
770
363
413
463
513
563
613
663
713
763
813
863
375
425
475
525
575
625
675
725
775
825
875
539-267-10 AT112- 820F 820 913 925
539-268-10
539-269-10
AT112- 920F
AT112-1020F
920
1020
1013
1113
1025
1125
Note 1: The ultra-high-accuracy AT112S (2+2L
0
/1000) μm models for effective ranges of 50 to 320mm may be custom-ordered on request.
Note 2: The accuracy does not include quantizing error; L
0
is the effective range (mm).
Note 3: For AT112-50F and 70F only, there is one scale reference point at the midpoint.
Signal cable length
(m)
3
26
Assembly Type AT Series
1Vpp Differential Signal Output Type Scale Unit
AT402E
Features
• Ideal for machine tools for heavy cutting as well as linear motors.
• Has multi-point elastic fixing for excellent vibration resistance (200m/s 2 ),shock resistance (400m/s 2 ), and temperature characteristics.
• The adoption of the Absolute Interval Code has enabled a simplified, low-cost ABS system.
Specifications
Item Code
Cable configuration
Detection method
Base position of elongation due to temperature changes
Effective range
AT402E-A Type
3m single wire
AT402E-B Type
3m European CNC manufacturers' specification
Photoelectric linear encoder
AT402E-C Type
3m FANUC LTD. specification
Midpoint of the screws used for rigid fixing near the midpoint of the effective range.
Output signal
Signal output pitch
Maximum response speed
Accuracy (20°C)
Thermal expansion coefficient
Operating temperature/humidity
Storage temperature/humidity
140 to 3040mm
Signal: 1Vpp differential Sinusoidal signal, differential reference point pulse: Absolute Interval Code compatible
20μm
120m/min (with Sinusoidal signal amplitude of -3db)
Effective range 140 to 540mm : ±2μm
Effective range 640 to 940mm : ±3μm
Effective range 1040 to 3040mm : ±3μm/m
(8±1)×10 -6 / ºC
0 to 45°C 20 to 80% RH (no condensation)
-20 to 70°C 20 to 80% RH (no condensation)
200m/s 2 (55 to 2000Hz)
400m/s 2 (half-sine 11ms)
Vibration resistance
Shock resistance
Power supply voltage
Maximum current consumption
5VDC±5%
120mA
Maximum sliding force
Protection rating
Air supply hole
Note 1: For details regarding the applicable system, please consult with the individual manufacturer.
4N
Equivalent to IP53
With air supply hole (end of scale frame/detector head)
Cable configuration
Ref.
Overall scale
Signal cable Ass’y
Signal cable Type A
Signal cable Type B
Signal cable Type C
27
Pin assignment
(1) Signal cable A (single wire specification)
Wire color
White
Black
Brown
Red
Orange
Signal
+5V
GND
Phase A
Phase XA
Phase B
Note 1: Ground the shield to the earth bar
Wire color
Yellow
Green
Blue
Shield
Signal
Phase XB
Phase Z
Phase XZ
FG
(2) Signal cable B (European CNC manufacturer's specification)
12-pin Type Connector without locking ring
Pin
2,12
10,11
5
6
8
Signal
+5V
GND
Phase A
Phase XA
Phase B
Pin
1
3
4
Shell
7,9
Signal
Phase XB
Phase Z
Phase XZ
FG
Not used
(3) Signal cable C (FANUC LTD. specification)
12-pin Type Connector
Pin
1,2
3,4
5
6
7
Signal
+5V
GND
Phase A
Phase XA
Phase B
Note 1: Connector used: RM15WTP-12P
Note 2: Applicable connector: RM15WTR-12S
(Hirose Electric or equivalent product)
Pin
8
9
10
11, shell
12
Signal
Phase XB
Phase Z
Phase XZ
FG
Not used
Output signal waveform
Signal period = 20µm = 360°
Phase A
Phase XA
Phase B
Phase 90 ± 10 °
Phase XB
Phase Z
Phase XZ
180°±90° nominai = 100%
Absolute Interval Code
Vref
Vref
Vref
Vref
Vref
Vref
Vref = 2.5±0.5V
Ref.
(19)
64±2
(45)
First reference point output position
5
ZP=20 ZP=20 ZP=20 ZP=20
Effective range
Maximum travel length
ZP=20
ZPn=10+0.02×n
Reference point signal output position
28
位相差 90 °± 10 °
X
AT402E scale unit mounting dimensions
R
//
� Surface of aluminum frame
0.1
G
0.05/500
35 P100
±0.2
L
2
= (L
0
/2) +65
6 (hole), through hole
Maximum effective length L
3
=L
0
+10
Elastically secured portion
Special leaf spring
(Effective range L
0
)
P100×n
(Aluminum frame)
M5×0.8, length 25
(spring washer and flat round washer)
S/N 7200001
AT402E
MADE IN JAPAN
Ref.
19
±2
5
ZP1 ZP2 ZP3 ZP4
=10.02 =10.04 =10.06 =10.08
ZP=20 ZP=20 ZP=20 ZP=20
P
//
* Mounting mating surface
0.1
G
0.05/500
Longitudinal direction
(Detector head)
25 40±0.2
90
Effective range L
0
Overall length L
1
= L
0
+119
ZPn=10+0.02×n
ZP=20
Absolute Interval Code
7
2×M5, depth 5
76±0.2
( 19 )
ø7, through hole
S/N 7200001
Kawasaki , JAPAN
[Notes]
1 .
G indicates the machine guideway.
2
3
.
P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface for mounting the detector head.
.
Q and R indicate the datum surfaces for mounting this linear scale.
View from X direction
Mounting example 1
G
* Surface of aluminum frame
27.6
( 14.8
)
13
Air purge
MS×0.8, depth 5
(Surface direction)
AIR
Vertical direction
Mounting example 2
// 0.1
R
Longitudinal direction
M6 nut
(
2±0.1
Clearance between the detector head and aluminum frame
) 37
//
S Mounting mating surface
0.1
P
* Longitudinal direction
* Vertical direction
AIR
Mounting example 3
AIR
M5 bolt
29
Code
AT402E-140
AT402E-240
AT402E-340
AT402E-440
AT402E-540
AT402E-640
AT402E-740
AT402E-840
AT402E-940
AT402E-1040
AT402E-1140
AT402E-1240
AT402E-1340
AT402E-1440
AT402E-1540
AT402E-1640
AT402E-1740
AT402E-1840
AT402E-2040
AT402E-2240
AT402E-2440
AT402E-2640
AT402E-2840
AT402E-3040
Dimensions of scale units
Effective range
L
0
(mm)
140
240
340
440
540
640
740
840
940
1040
1140
1240
1340
1440
1540
1640
1740
1840
2040
2240
2440
2640
2840
3040
Overall length
L
1
(mm)
259
359
459
559
659
759
859
985
1059
1159
1259
1359
1459
1559
1659
1759
1859
1959
2159
2359
2559
2759
2959
3159
L
2
(mm)
135
185
235
285
335
358
435
485
535
585
635
685
1085
1185
1285
1385
735
785
835
885
935
985
1485
1585
Maximum travel length
L
3
(mm)
150
250
350
450
550
650
750
850
950
1050
1150
1250
1350
1450
1550
1650
1750
1850
2050
2250
2450
2650
2850
3050 n (pcs)
5
6
7
8
2
3
4
9
10
11
12
13
21
23
25
27
14
15
16
17
18
19
29
31
AT402E-140
AT402E-240
AT402E-340
AT402E-440
AT402E-540
AT402E-640
AT402E-740
AT402E-840
AT402E-940
AT402E-1040
AT402E-1140
AT402E-1240
AT402E-1340
AT402E-1440
AT402E-1540
AT402E-1640
AT402E-1740
AT402E-1840
AT402E-2040
AT402E-2240
AT402E-2440
AT402E-2640
AT402E-2840
AT402E-3040
Codes and Order Numbers
Code
Scale unit + single wire cable 3m
(A Type)
Order No.
539-371-01
539-373-01
539-374-01
539-375-01
539-376-01
539-377-01
539-378-01
539-379-01
539-380-01
539-381-01
539-382-01
539-383-01
539-384-01
539-385-01
539-386-01
539-387-01
539-388-01
539-389-01
539-390-01
539-391-01
539-392-01
539-393-01
539-394-01
539-395-01
Scale unit + cable with European CNC manufacturer's connector 3m
(B Type)
Order No.
539-371-02
539-373-02
539-374-02
539-375-02
539-376-02
539-377-02
539-378-02
539-379-02
539-380-02
539-381-02
539-382-02
539-383-02
539-384-02
539-385-02
539-386-02
539-387-02
539-388-02
539-389-02
539-390-02
539-391-02
539-392-02
539-393-02
539-394-02
539-395-02
Scale unit + Cable with FANUC LTD. connector 3m
(C Type)
Order No.
539-371-03
539-373-03
539-374-03
539-375-03
539-376-03
539-377-03
539-378-03
539-379-03
539-380-03
539-381-03
539-382-03
539-383-03
539-384-03
539-385-03
539-386-03
539-387-03
539-388-03
539-389-03
539-390-03
539-391-03
539-392-03
539-393-03
539-394-03
539-395-03
30
Assembly Type AT Series
Square-Wave Signal Output Type Scale Unit (Slim/High-speed types)
AT211
Mounting method: Multi-point fixing (excellent vibration and shock resistance)
Scale alarm display LED
Mounting method: Double-end fixing (space-saving type)
Scale alarm display LED
Features
• This is a slim, sealed scale that can be directly connected to the control unit.
• High speed response up to 120m/min, making it compatible with a wide range of resolutions from 0.1 to 5μm.
• The multi-point fixing type has excellent vibration resistance.
• Scale alarm display makes for easy maintenance.
• Wide range of specifications enables easy choice to best suit your application.
Single head cable type (no connector)
Specifications
Item
Effective range (L
0
)
Scale reference point
Accuracy (20°C)
Code
Vibration resistance
Shock resistance
Air supply hole
Output signal
Type
Electrical specifications
Main scale grating pitch
Minimum resolution
Minimum edge interval
Maximum response speed
Power supply voltage
Maximum current consumption
Protection rating
Sliding force
Operating temperature
Storage temperature
Operating/storage humidity
Direction switching
Alarm function
Alarm detection
Alarm output
Alarm display
AT211
100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 750, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500 mm
50mm pitch, center point, left end, right end (fixed when shipped)
(3+3L
0
/1000) μm：(For L
0
：500mm, we can also fabricate a high-accuracy type: (2+2L
0
/1000) μm)：
200 m/s 2
L
0
: Effective range (mm)
(Conditions: 55 to 2000Hz) (Multi-point fixing type)
250 m/s 2 (Conditions: half-sine, 11ms) (Multi-point fixing type)
With air supply hole (Multi-point fixing type)
PA/PA, PB/PB, PZ/PZ
Conforms to RS422
20μm
0.1, 0.2, 0.5, 1, 2.5, 5μm (fixed when shipped)
125, 250, 333, 500, 1000ns (fixed when shipped)
5.4 to 120 m/min (Determined by minimum resolution and minimum edge interval)
5VDC±5%
200 mA
Equivalent to IP53 (when the user's manual is followed)
5N max.
0 to 45°C
-20 to 70°C
20 to 80%RH (no condensation)
Standard/Reverse (set when shipped)
Over-speed, scale signal error
Output for PA/PA, PB/PB, and PZ/PZ are all high-impedance
Red LED on NC side connector of signal cable turns on (this does not include single head cable types)
31
Mounting dimensions for multi-point fixing type
A
20
14.3
Scale unit mounting surface
// 0.1
G
( 4.8
)
AIR
L
2
100±0.2
Overall length L 3
100±0.2
// 0.1
G
100±0.2
Unit: mm
ø5 (hole), countersunk ø8.6 on both sides, depth 6
Fixing screw: Hex bolts M4×25
(4.8)
L
2
AT211
MADE IN JAPAN
0.5±0.2
// 0.1 A
19
(30)
G: Machine guideway
Air supply hole (M5)
(On both sides)
Head cable (L=0.3m or 1m)
80±0.2
94
Effective range L
0
Maximum travel length L
1
2×M6×1.0, through hole
ø9, both sides countersunk, depth 4.5
Coil spring
Possible to mount scale unit on this surface
(Reverse mounting direction)
2×M4×0.7, depth 5 80±0.2
// 0.2
G
Scale unit mounting surface
(Standard mounting direction)
Flexible metal conduit
Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.
Signal cable
(L is 3, 5, or 7m)
( 47.4
)
( 56.4
)
( 50 )
// 0.1
G
0.03/100
Scale alarm display LED
Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.
Mounting dimensions for multi-point fixing type
Scale unit
AT211- 100A
AT211- 150A
AT211- 200A
AT211- 250A
AT211- 300A
AT211- 350A
AT211- 400A
AT211- 450A
AT211- 500A
AT211- 600A
AT211- 700A
AT211- 750A
AT211- 800A
AT211- 900A
AT211-1000A
AT211-1100A
AT211-1200A
AT211-1300A
AT211-1400A
AT211-1500A
Effective range
L
0
(mm)
750
800
900
1000
1100
1200
1300
1400
1500
450
500
600
700
100
150
200
250
300
350
400
Maximum travel length
L
1
(mm)
780
840
940
1040
1140
1240
1340
1440
1540
480
540
640
740
120
170
220
270
330
380
430
End surface dimensions
L
2
(mm)
49.5
29.5
29.5
29.5
49.5
29.5
29.5
29.5
29.5
29.5
29.5
29.5
29.5
19.5
44.5
19.5
44.5
24.5
49.5
24.5
Overall length
L
3
(mm)
899
959
1059
1159
1259
1359
1459
1559
1659
599
659
759
859
239
289
339
389
449
499
549
No. of mounting holes on scale unit
(pcs)
9
10
11
12
13
8
9
6
7
14
15
16
17
4
4
3
3
5
5
6
32
Mounting dimensions for double-end fixing type
A
1
22 9
Middle support L 5
(30)
(50)
1.5±0.2
// 0.1
A
19
Coil spring
// 0.1
G
Middle support
// 0.1
G
B
(Fixed)
Overall length L 4
Mounting hole pitch L 2
A
(Fixed)
Middle support L 7
ø5 (hole)
Unit: mm
9
// 0.2
G
C
(Fixed)
Scale unit mounting surface
AT211
7
14
Both sides countersunk, depth 6.5
17
80 ±0.2
94
Effective range L 0
Maximum travel length L 1
2×M6×1.0, through hole
ø9, both sides countersunk, depth 4.5
Head cable (L=0.3m or 1m)
2×M4×0.7, depth 5
Mounting hole pitch L
3
80±0.2
// 0.2
G: Machine guideway
2×ø7, through hole
G ø14, both sides countersunk, depth 6.5
17
1
Middle support
Flexible metal conduit
B
(Fixed)
A
(Fixed)
ø5 (hole) C
(Fixed)
Scale unit mounting surface
Middle support L
7
Middle support L
6
Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.
Signal cable
(L is 3, 5, or 7m)
(47.4) (56.4)
(50)
Scale alarm display LED
Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.
Mounting dimensions for double-end fixing type
Scale unit
AT211- 100B
AT211- 150B
AT211- 200B
AT211- 250B
AT211- 300B
AT211- 350B
AT211- 400B
AT211- 450B
AT211- 500B
AT211- 600B
AT211- 700B
AT211- 750B
AT211- 800B
AT211- 900B
AT211-1000B
AT211-1100B
AT211-1200B
AT211-1300B
AT211-1400B
AT211-1500B
Effective range
L
0
(mm)
1000
1100
1200
1300
1400
1500
700
750
800
900
400
450
500
600
100
150
200
250
300
350
Maximum travel length
L
1
(mm)
120
170
220
270
330
380
740
780
840
940
430
480
540
640
1040
1140
1240
1340
1440
1540
878
918
978
1078
568
618
678
778
Mounting hole pitch
(mm)
L
2
(mm) L
3
(mm)
258
308
242
292
358
408
468
518
342
392
452
502
1178
1278
1378
1478
1578
1678
1162
1262
1362
1462
1562
1662
862
902
962
1062
552
602
662
762
896
936
996
1096
586
636
696
796
1196
1296
1396
1496
1596
1696
Overall length
L
4
(mm)
276
326
376
426
486
536
Middle support (mm)
L
5
—
L
6
—
339 331
389 381
439 431
459 451
489 481
539 531
589 581
— —
L
7
—
430
460
490
530
560
• The number of middle supports attached depends on the effective range.
Effective range (mm)
500 to 1000
1100 to 1500
Middle support
A (1 place)
B, C (2 places)
33
Cable pattern
(47.4)
(56.4)
(50)
(50)
(30)
Head cable
(L is 0.3 or 1m)
Scale alarm display LED
Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.
Signal cable
(L is 3, 5, or 7m)
Unit: mm
(47.4) (56.4)
(50)
(50)
(30)
Head cable
(L is 0.3 or 1m)
Scale alarm display LED
Connector for feedback cable
(Included accessory)
Signal cable
(L is 3, 5, or 7m)
User provides the cable and NC side connectors.
(47.4)
(56.4)
(50) (30)
Scale alarm display LED Signal cable
(L is 3, 5, or 7m)
Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.
Head cable
(L is 0.3 or 1m)
(4)
(45)
Sheath / Oil-resistant PVC
Single head cable type (no connector)
(L is 3, 5, or 9m)
Wires (pre-soldered)
34
Specification
Selection Method
• There is an extensive selection of specifications for the AT211.
• Choose the appropriate numbers and letters below according to specification required.
If you don't have a specification in mind, choose the option with the .
* For special applications not shown in the specifications, please contact us.
Additionally, we are also able to meet the 1VP-P Sinusoidal signal output specification.
How to read the code
AT211 - - -
Effective range list
Code
0100
0150
0200
0250
0300
0350
0400
Effective range (mm)
100
150
200
250
300
350
400
Code
0450
0500
0600
0700
0750
0800
0900
Effective range (mm)
450
500
600
700
750
800
900
Code
1000
1100
1200
1300
1400
1500
Effective range (mm)
1000
1100
1200
1300
1400
1500
Mounting method
Code
A
B
Multi-point fixing
Double-end fixing
Scale reference point
Code
1
2
3
4
50mm pitch
Center point
Left end
Right end
50mm pitch interval
When the scale reference point is at the left end
Pitch: 50
10
From the effective range mark
When the scale reference point is at the center point
(midpoint of effective range)
When the scale reference point is at the right end
10
AT211
Units: mm
Accuracy (20°C)
Code
S
H
(3+3L
0
/1000) μm
(2+2L
0
/1000) μm
Note 1: L
0
is the effective range (mm).
Note 2: Type H is used for effective ranges of 500mm or less.
Specification combination table
(resolution, response speed, and minimum edge interval)
Resolution (μm)
Minimum edge interval
(ns) *
125 250 333 500 1000
0.1
0.2
0.5
1.0
2.5
5.0
A: 43 (710)
F: 86 (1400)
L:120 (2000)
—
—
—
B: 22 (360)
G: 43 (710)
M:110 (1800)
R:120 (2000)
—
—
C: 16 (260)
H: 32 (530)
N: 81 (1300)
S:120 (2000)
—
—
* Codes A to Y show the maximum response speed in m/min, values in ( ) are mm/s.
Note : The minimum edge interval varies 0 to -10% based on the operating environmental conditions.
D: 11 (180)
J : 22 (360)
E: 5.4 (90)
K: 11 (180)
P: 54 (900) Q: 27 (450)
T:110 (1800) U: 54 (900)
W: 120 (2000) X:120 (2000)
— Y:120 (2000)
35
(Example)
AT211 - 1 5 0 0 A 1 S - P 1 - A B
Effective range
1500mm
Mounting method
Multi-point fixing
Scale reference point
50mm pitch
Accuracy
(3+3Lo/1000) μm
Direction
Standard: PA goes ahead
Resolution 0.5μm
Response speed 54m/min
Minimum edge interval: 500ns
Signal cable
Length3m
No flexible metal conduit
Head cable
Length 0.3m
With flexible metal conduit
Signal cable
Code
C
D
A
B
Length (L)
3m
3m
5m
5m
Flexible metal conduit * 1
Yes
No
Yes
E
F
G* 2
7m
7m
3m
No
Yes
No
No
H* 2
J* 2
X
5m
7m
No
No
No signal cable
*1 The cable is enclosed in a flexible metal conduit or else is PVC sheathed.
*2 The connector (CN3) for signal cables
G, H, and J are half-pitch connectors.
Not waterproof
Scale alarm display LED
Waterproof connector (special)
(CN5) (CN4)
Feedback cable
(Provided by user)
(CN3)
Signal cable
(CN2) (CN1)
Head cable
Included connector (when a signal cable is used)
Scale unit
MODEL
AT211
Connector for signal cable (CN3) (pin type)
1
9
8
15
Pin No.
1, 2, 13
3, 4, 11
5
6
7
Signal
0V
+5V
PA
PA
PB
Pin No.
8
9
10
12, 14
15
Signal
PB
PZ
PZ
Not used
F.G
Applicable connector (CN4):
HDAB-15S (Hirose Electric or equivalent product (D-sub series) may be used)
Output circuit specification
PA
Phase A
PA
PB
PA
PA
AM26C31
Phase B
PB
PB
PB t t t t
Phase Z
PZ
PZ
PZ
PZ
Minimum edge interval t = 125 to 1000ns
60±10µm
Head cable
A 0.3m
B 0.3m
C 1m
D 3m
E 4m
F 5m
H 7m
J 8m
K 9m
Flexible metal conduit
Connector (CN1)
Yes Special waterproof
No Special waterproof
No Special waterproof
No No
Not waterproof
(CN5) (CN4)
Feedback cable
(Provided by user)
Note: The cable is enclosed in a flexible
metal conduit or else is PVC sheathed.
Single head cable type (no connector)
Scale alarm display LED
Waterproof connector (special)
(CN3) (CN2) (CN1)
Signal cable Head cable
Included connector (when a signal cable is used)
Connector provided by user
(CN5)
Single wires Single head cable type (no connector)
Scale unit
Scale unit
MODEL
AT211
MODEL
AT211
4
45 L
Detector head
Head cable
ALM signal for single head cable type (no connector)
1k
Alarm circuit ALM
Equivalent to TC7S08 (Toshiba C-MOS)
High
Low (when alarm occurs)
Wire color
White, black
Brown, red
Orange
Yellow
Green
Signal
0V
+5V
PA
PA
PB
Wire color
Blue
Purple
Signal
AT211 PB
PZ
Traveling direction of detector head
ALM
Direction
Code
1
2
Standard: PA goes ahead
Reverse: PB goes ahead
AT211
Traveling direction of detector head
Standard:
PA goes ahead
PA
PB
Reverse:
PA
PB goes ahead PB
* These are settings for when the scale is moving.
36
Standard:
PA goes ahead
PA
PB
Reverse:
PA
PB goes ahead PB
* These are settings for when the scale is moving.
Assembly Type AT Series
Square Wave Signal Output Type Scale Unit (Standard type)
AT203
Features
• The maximum effective measurement length of 6000mm enables use on large machines (such as for LCD production).
• The travel length of the linear scale is output with 2-phase square wave signals, which can be used as a feedback signal for
NC machine tools.
• The pulse signal unit (PSU) is no longer needed, and the AT203 can be directly connected to the NC machine tool.
• The maximum response speed is 2000mm/s. (When resolution is 1μm and the minimum edge interval is 250ns)
Specifications
Item
Detection method
Output
Output method
Signal output pitch
Resolution
Effective range
Accuracy (20°C)
Code AT203
Photoelectric type transmission linear encoder
Two 90° phase-shifted square wave signals
Differential line driver
20μm
1, 0.5, 0.1μm (switched using DIP switches)
100 to 6000mm
Effective range 100 to 1500mm (3+3L
0
/1000) μm
Effective range 1600 to 3000mm (5+5L
0
/1000) μm
Effective range 3250 to 6000mm (5+8L
0
/1000) μm
L
0
: Effective range (mm)
Maximum response speed
Scale reference point pitch
Main scale thermal expansion coefficient
Power supply voltage
Maximum current consumption
Operating/storage temperature
Operating/storage humidity (relative humidity)
Protection rating
Sliding force
Signal cable 3m (optional accessory) Part No.09AAA353B
Signal cable 5m (included accessory) Part No.09AAA353A
11 to 120m/min (Depends on the resolution and minimum edge interval) (See separate table)
50mm
(8±1) ×10 −6 /°C
5VDC±5%
250mA
0 to 45°C, -20 to 70°C (no condensation)
20 to 80% RH (no condensation)
Equivalent to IP53
5N max.
Pin assignment
Pin No.
1
2
3
6
7
4
5
12
13
14
15
10
11
8
9
Connector used: HDAB-15P (Hirose Electric)
Applicable selectable: HDAB-15S (Hirose Electric)
Function
0V
0V
+5V
+5V
PA
PA
PB
PB
PZ
PZ
+5V
N.C.
0V
N.C.
F.G
Output signal waveform
PA
PA
PB
PB t t: Minimum edge interval
PZ
PZ
70±10µm
37
Maximum response speed*
Minimum edge interval
500ns
250ns
Resolution
Maximum response speed (m/min)
1 μm
110 (50)
120 (50)
The indicates the setting when shipped
* Values in ( ) are for effective ranges of 3250mm and more.
* The minimum edge interval varies 0 to -10% based on the operating environmental conditions.
0.5 μm
54 (50)
110 (50)
Direction
Internal DIP switches can be used to switch between the standard and reverse directions.
AT203 0.1 μm
11 (11)
22 (22)
Traveling direction of detector head
AT203
Traveling direction of detector head
AT203
Traveling direction of detector head
Standard:
PA goes ahead
PA
PB
Reverse:
PB goes ahead
PA
PB
* This is in the standard direction when shipped.
AT203
Traveling direction of detector head
Wiring example
Relay cable
5 PA
6 PA
Standard:
8
PB
9 PZ
10 PZ
3 +5V
Reverse:
PB goes ahead
1 0V
2 0V
13 0V
Shell F.G
15 F.G
PA
PB
PA
PB
(Note 1)
R1
R2
R1
R1
R2
R1
NC device
R1
R2
R1
+5V
(Note 2)
A
B
C
FG
R1 = 560
R2 = 150
Recommended receiver: SN75ALS195(TI)
Note 1 : When the shield has a drain wire, connect it to Pin 15.
Note 2 : Always ground the shield for relay cables by, for example, connecting it to an earth conductor.
38
AT203 scale unit mounting dimensions
• AT203-100 to 3000
A
20
37.5
Air supply hole (M5)
X
1.5
±0.2
36
// 0.1
A
(46.3)
10
Signal cable
10
Unit: mm
Overall length L
3
Mounting hole pitch L
2
Maximum travel length L
1
Effective range L
0
11.6
7
60
±0.2
90
// 0.2
G
AT203
MADE IN JAPAN
7
Countersunk, depth 6.5
G: Machine guideway
// 0.2
G
7
Scale unit
Mounting surface
単位： mm
Detector head mounting surface Scale unit
Mounting surface
View in X direction
Order No.
539-429-30
539-430-30
539-431-30
539-432-30
539-433-30
539-434-30
539-435-30
539-436-30
539-437-30
539-438-30
539-439-30
539-440-30
539-441-30
539-442-30
539-411-30
539-412-30
539-413-30
539-414-30
539-415-30
539-416-30
539-417-30
539-418-30
539-419-30
539-421-30
539-423-30
539-424-30
539-425-30
539-426-30
539-427-30
539-428-30
Code
AT203-1200
AT203-1300
AT203-1400
AT203-1500
AT203-1600
AT203-1700
AT203-1800
AT203-2000
AT203-2200
AT203-2400
AT203-2500
AT203-2600
AT203-2800
AT203-3000
AT203-100
AT203-150
AT203-200
AT203-250
AT203-300
AT203-350
AT203-400
AT203-450
AT203-500
AT203-600
AT203-700
AT203-750
AT203-800
AT203-900
AT203-1000
AT203-1100
Maximum travel length
L
1
(mm)
2300
2500
2600
2700
2900
3100
1260
1360
1460
1560
1690
1790
1890
2100
540
650
760
810
860
960
1060
1160
330
380
430
480
120
170
220
270
Effective range
L
0
(mm)
2200
2400
2500
2600
2800
3000
1200
1300
1400
1500
1600
1700
1800
2000
500
600
700
750
800
900
1000
1100
100
150
200
250
300
350
400
450
Mounting hole pitch
L
2
(mm)
2428
2628
2728
2828
3028
3228
1388
1488
1588
1688
1818
1918
2018
2228
668
778
888
938
988
1088
1188
1288
248
298
348
398
458
508
558
608
Overall length
L
3
(mm)
2448
2648
2748
2848
3048
3248
1408
1508
1608
1708
1838
1938
2038
2248
688
798
908
958
1008
1108
1208
1308
268
318
368
418
478
528
578
628
L
4
(mm)
1314
1364
1414
1514
1614
594
644
694
744
794
844
L
5
(mm) L
6
(mm)
610
650
670
740
800
1300
1340
1400
1500
1600
650
670
700
750
800
39
• AT203-100 to 3000
Middle support
Mounting surface method A
Middle support
10
B
L
4
20
6
L
6
L
5
L
6
A C
Adjustable
Unit: mm
2.1
Mounting surface method B
10
Middle support
B
L
4
20
6
L
6
L
5
L
6
A C
Adjustable
•Dimensions L
4
, L
5
, and L
6
indicate the recommended mounting positions for the middle supports included with scale units with an effective range of 1000mm and more.
(The position of the middle support is adjustable in the measuring direction.)
Effective range (mm)
1000 to 1500
1600 to 2200
2400 to 3000
Middle support
A (1 place)
B, C (2 places)
A, B, C (3 places)
• AT203-3250 to 6000
A
C1
32.5
23
7
Elastically secured portion
Air supply hole (M5)
80
60
L
4
2×ø8 (hole)
L
3
L
4
Elastically secured portion
Overall length L
2
Mounting block
L
4
Rigidly fixed portion
Elastically secured portion
L
4
// 0.2
G
Elastically secured portion
7
AT203
MADE IN JAPAN
X
1.5±0.2
36
// 0.1
A
(46.3)
Signal cable
11.6
60±0.2
7
90
Effective range L
0
Maximum travel length L
1
Countersunk, depth 6.5
G: Machine guideway
// 0.2
G
View in X direction
Order No.
539-443-30
539-444-30
539-445-30
539-446-30
539-447-30
539-448-30
539-449-30
539-450-30
539-451-30
539-452-30
539-453-30
539-454-30
Code
AT203-3250
AT203-3500
AT203-3750
AT203-4000
AT203-4250
AT203-4500
AT203-4750
AT203-5000
AT203-5250
AT203-5500
AT203-5750
AT203-6000
Effective range
0
(mm)
3250
3500
3750
4000
4250
4500
4750
5000
5250
5500
5750
6000
Maximum travel length
1
(mm)
3350
3600
3850
4100
4350
4600
4850
5100
5350
5600
5850
6100
Overall length
2
(mm)
3464
3714
3964
4214
4464
4714
4964
5214
5464
5714
5964
6214
40
Detector head mounting surface
L
3
(mm)
1725
1850
1975
2100
2225
2350
2475
2600
2725
2850
2975
3100
L
4
(mm)
800
850
930
1000
1050
1100
800
830
870
910
950
1000
Scale unit
Mounting surface
No. of mounting blocks
5
7
Interface Unit
Pulse signal conversion unit
PSU-200
• The PSU-200 splits the sinusoidal signal output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions, and converts the signal to a square wave signal so that
NC feedback systems, measurement control devices, etc., can be used with linear scales in order to achieve highly accurate positioning.
System configuration
Mitutoyo linear scale PSU-200 Control device
CAL
ALM
O.S
PWR
PZ
P.E
N
P
U
T
I
T
P
U
T
O
U
Interface Unit PSU-200
Connector and indicator functions
No.
Name
(1) CAL light
(2) ALM light
(3) O.S. light
(4) PWR light
(5) PZ light
Function
Typically not used
Turns on when broken wires or short circuits are detected, or when a signal abnormality is detected.
Turns on when over-speed is detected.
Turns on only when power is supplied to the PSU. Power is supplied at
5VDC, from an external device.
Turns on when the scale goes past the reference point.
Turns on when the +5VDC power supply voltage from the external device
(6) P.E. light decreases, or if noise is detected.
(7) INPUT connector For connecting to the linear scale.
(8) OUTPUT connector Output connector for connecting to an external device.
Dimensions
Specifications
Item
Number of axes
Input
Output
Number of divisions
Function
Power supply
Current consumption
Storage temperature
Operating temperature
Dimensions
Mass
Details of function
1 axis
Input connector DA-15S-NR (JAE) or equivalent
Input signal: 2-phase sinusoidal signals and standard voltage
Reference point signal, scale alarm signal
Output connector MR-20RM (Honda Tsushin)
Output signal: 2-phase square wave signals (Phase A, Phase B), reference point signal (Phase Z)
Alarm signal, alarm reset signal, photocoupler
4, 8, 10, 20, 40, 80, 100, 200 (chosen with switch)
Setting the number of divisions, setting the minimum edge interval, and maximum response speed
Detection of broken wires or short circuits and abnormalities (alarm), detection of signal errors (alarm)
Power supply voltage low alarm (warning light only), switching between high-impedance mode and alarm signal output mode.
Reference position detection light, hysteresis width settings (directly linked to No. of divisions), external alarm reset input (photocoupler), switching directions
5VDC±5%
200mA
-20°C to 70°C
0°C to 50°C
Width 160mm × Thickness 28mm × Depth 100mm
Approx. 620g
14
Unit: mm
(1)
(2)
(3)
(7)
CAL
ALM
O.S
PWR
PZ
P.E
P
T
U
N
I
(4)
(5)
(6)
(8)
T
P
T
U
O
U
28 2×ø4.5 (hole)
41
Output specifications
Output connector (pin type)
MR-20RM (Honda Tsushin Kogyo)
Applicable plug
Connector: MR20F (Honda Tsushin Kogyo)
Case: MR-20L (Honda Tsushin Kogyo)
Standard accessories
■
Pin No.
1 to 3
4 to 6
7
8, 9
10
11
12, 13
14
15
16
17
18
Signal
0V
+5V
ALM
N.C
RST (Anode)
RST (Cathode)
N.C
PZ
PZ
PA
PA
PB
最大応答速度について
20
7
14
1
Signal function
Signal GND
Power supply
Alarm output
Reset input
Phase Z output
Phase A output
Phase B output
Frame GND
No. of divisions
4
8
10
20
40
80
Setting Maximum response speed (m/min) Maximum input
Minimum edge interval
62.5ns 120
125 ns 120
Scale pitch
4μm 10μm 20μm 40μm
250 ns 120
500 ns 120
1000 ns 60
62.5ns 120
125 ns 120
250 ns 120
500 ns 60
1000 ns 30
62.5ns 120
125 ns 120
250 ns 96
500 ns 48
1000 ns 24
62.5ns 120
125 ns 96
250 ns 48
500 ns 24
1000 ns 12
62.5ns
96
125 ns 48
250 ns 24
500 ns 12
1000 ns 6
62.5ns
48
125 ns 24
250 ns 12
500 ns
1000 ns
15
120
60
30
6
3
15
7.5
62.5ns
38.4
96
125 ns 19.2
48
240
120
60
30
240
120
60
30
240
120
60
300
150
75
300
300
150
300
300
300
300
300
300
300
100
200
250 ns
500 ns
9.6
24
4.8
12
1000 ns 2.4
6
62.5ns
19.2
48
125 ns
250 ns
500 ns
1000 ns
9.6
24
4.8
12
2.4
1.2
6
3
80
40
20
10
The maximum response speed is limited by the scale response speed.
5
The minimum edge interval varies 0 to -10% based on the operating environmental conditions.
80
40
20
10
50
25
12.5
160
50
25
200
100
50
400
200
100
500
400
200
100
500
400
200
100
500
250
125
500
500
250
500
500
60
30
384
192
60
480
240
120
960
480
240
120
960
480
240
120
96
48
24
12
96
48
24
192
30
15
192
96
30
240
120
60
480
240
120
60
480
240
120
60
48
24
12
6
48
24
12
96
600 1200
600 1200
600 1200
600 1200
300 600
600 1200
600 1200
600 1200
300
150
600
300
600 1200
600 1200
480
240
960
480
120 240
600 1200 frequency
(kHz)
500
500
500
42
Arrangement of cable connections
PSU-200 Control device
Connection cable
+ 5V
Phase A
PA
PA
16
17
R1
R2
R1
Phase B
PB
PB
18
19
R1
R2
R1
Phase Z
AL
Line driver
AM26C31: TI
PZ
PZ
AL
+ 5V
+ 5V
+ 5V
+ 5V
4
5
6
14
15
7
R1
R2
R1
2k Line receiver
AM26C32: TI
TTL
+ 5V R1 : 560
R2 : 110
0V
0V
0V For a relay
0V
1
2
3
+ V
TLP521 1.2k AL (Anode)
AL (Cathode)
10
11
Ry
Reset input - V
Shield
F.G
20
OUTPUT connector
For a photocoupler
+ V
• Connect the alarm reset input circuit so that the current is 3 to 10mA. Also, the device has an internal resistor
(1.2kΩ), so by applying 5 to 12V with a pulse width of at least 100ms across the AL (anode)-AL (cathode), the alarm can be reset. When applying 12V or more, add an external resistance to limit the current to within the range stated above.
• Connection of alarm reset input when using a photocoupler
PSU-200 Control device
+ V
TLP521 1.2k
10
11
Reset input - V
Interface Unit PSU-200
Interface Unit
Serial conversion unit
PSU-250 Series
• The PSU-250 series interface unit converts the sinusoidal signal output by
Mitutoyo linear scales to a serial signal.
• The interface outputs serial data equivalent to 400 divisions from the signal
(sinusoidal).
• The PSU-251 can be connected to Mitsubishi Electric Corporation's MR-J4/MR-J3 series servo amplifier.
* 1
• The PSU-252 can be connected to Panasonic Corporation, Motor business unit's MINAS series servo amplifier.
* 1
Connector and indicator functions
No.
Name
(1) INPUT connector
(3) Terminal block
To connect the linear scale
(2) OUTPUT connector To connect the servo amplifier
(4) Shorting link
(5) PWR light
Function
Terminal block for input of 5VDC external power
Use when providing power from the servo amplifier.
Do not use when not providing power from the servo amplifier
Turns on when power is supplied to the PSU
Interface Unit PSU-250 Series
(1)
INPUT
(5) (2)
PWR
OUTPUT
(3) (4)
0V
+5V
VIN VOUT
Specifications
Order No.
Item
Number of axes
Input specifications
Output specifications
Number of divisions
Function
539-006
PSU-251
1 axis
539-007
PSU-252
1 axis
2-phase sinusoidal signals and standard voltage, reference signal, scale alarm signal
Maximum input frequency: 500kHz
Mitsubishi Electric Corporation MR-
J4/MR-J3 series
High-speed serial data * 1
Panasonic Corporation,
Motor business unit
MINAS-A5, A5L, A5N, A5NL series * 1
MINAS-A4, A4P, A4N, A4NL series * 1
400 divisions
Alarm detection: Broken wires, short circuits in the scale and abnormalities.
Alarm output: Status data is output through serial communication and the
PWR light blinks
Also, the PWR light turns on.
Power supply
Current consumption
Storage temperature
Operating temperature
Power supply from the servo amplifier: 5VDC±5%
External power supply: 5VDC±5%
Power supply is selected with the shorting link for the terminal block used to supply external power.
To choose a servo amplifier or external power supply, please refer to the servo amplifier power specifications (in particular, the maximum supplied current) and the power supply specifications of the scale that is used.
150mA (not including the scale)
- 20°C to 70°C
0°C to 40°C
*1 For details regarding the applicable system, please consult with the individual manufacturer.
Resolution and maximum response speed when the scale is connected
Scale model Resolution Maximum response speed
AT103
AT113
AT112
AT181
ST36A
ST24C
ST46
ST422
0.05 μm 2000mm/s (830mm/s) * 2
0.05 μm
0.05 μm
0.05 μm
0.01 μm
0.025μm
0.05 μm
0.01 μm
2000mm/s
830mm/s
830mm/s
1200mm/s
1200mm/s
2600mm/s
5000mm/s
*2 Response speeds for effective ranges of 3250mm or more
43
System configuration
• When connecting an AT scale
Mitutoyo linear scale
• When connecting an ST scale
Control device
PSU-250
Model ST36A(2Vpp)
06ACA444
Mitutoyo Corporation
POWER ADJ.
A00001
* The signal cable is an optional accessory
Signal cable 2m: Part No.970712-2
3m: Part No.970712-3
5m: Part No.970712-5
Input specifications
• INPUT connector
·
Connector (socket type): RDAD-15S-LNA (Hirose Electric)
Applicable plug: HDAB-15P (Hirose Electric)
Pin No.
1, 2
3, 4
5
8
9
6
7
10 - 14
15
Signal
0V
+5V
PA
PB
Vref
PZ
AL
N.C
F.G
Signal function
Signal ground
Power supply
Phase A
Phase B
Standard voltage
Phase Z
Scale alarm
Not used
Frame ground
• Terminal block for input of external power
Pin No.
1
2
3
4
Signal
+5V OUT
+5V IN
0V
F.G
Signal function
+5V power output
+5V power input *
Signal ground
Frame ground
*
* When using the power supplied by the servo amplifier (supplied through output connector) short Pin Nos. 1 and 2 using the attached shorting link.
Dimensions
16.5±0.2
Output specifications
• OUTPUT connector
·
Connector (socket type) 10220-52A2VC(3M)
Applicable plug: 10120-3000VE(3M)
Pin No.
Signal
1, 2, 11, 12 0V
18, 19, 20 +5V
6, 8 - 10
7
17
3
4
5
13 - 16
N.C
RQ/DT Standard phase request/data
RQ/DT Reverse phase request/data
PA
PB
PZ
N.C
Signal function
Signal ground
+5V power
Not used
Test signal
Test signal
Test signal
Not used
48±0.2
6.6
Unit: mm
2×ø5 (hole)
Signal cable
PSU-250
Control device
POWER ADJ.
A00001
Interface Unit PSU-250 Series
27.5
60
44
Absolute Scale Unit
ABS ST700 Compact Type Series (glass scale type)
ABS AT500 Series
ABS AT300 Series
ABS ST700 Compact Type Series (scale base type)
Scale Format
Applicable Systems * 1
FANUC Ltd.
NC control device
Mitsubishi Electric Corporation
MITSUBISHI CNC Series
Mitsubishi Electric Corporation
MELSERVO Series
Yaskawa Electric Corporation
, Series
Panasonic Corporation, Motor business unit
MINAS Series
Servo Amplifier supporting Mitutoyo ENSIS Interface
FS-i Series
Applicable amplifier
, POWER Mate i
0.005μm * 2
ABS AT555
: MDS-D/MDS-DH Series ABS AT545
MR-J4/MR-J3 Series
Servopack: SGDV, SGDS
MINAS-A5, A5L, A5N, A5NL Series
MINAS-A4, A4P, A4N, A4NL Series
Nikki Denso Co., Ltd. VC / VC / VPS Series
Servoland Corporation SVF Series
PMAC JAPAN Co., Ltd. UMAC-Turbo PMAC2
Other control device manufacturers
ABS AT545A * 3
—
—
—
ABS AT505
ABS AT505A
*1 For details regarding the applicable system, please consult with the individual manufacturer.
*2 For the AT300 series, 0.005μm resolution is possible to special order.
*3 Only for the MR-J4/MR-J3 series
Resolution
0.05μm
ABS AT553
ABS AT353
ABS AT543
ABS AT343
ABS AT543
ABS AT343
—
0.1μm
ABS ST758
ABS ST748
ABS ST748A
ABS ST788A
ABS AT573A ABS ST778A
ABS AT503A
ABS AT303A
ABS AT503
ABS AT303
ABS ST708A
Specifications
Series Scale Type
ABS ST700 Compact Type Series Separate Type
SC Type
ABS AT500 Series HC Type
HR/HL Type
Assembly Type
ABS AT300 Series Assembly Type
6000mm
2200mm
1000mm
350mm
3000mm
Maximum response speed
5m/s
2.5m/s
2.5m/s (1.2m/s *
2m/s (1.8m/s * 4 )
*4 Maximum response speed of 0.005μm resolution type
*5 L
0
=effective range (mm); scale base type accuracy for the ST700 compact type series
4 )
Accuracy (20°C) * 5
(5+5L
0
/1000) μm
(3+3L
0
/1000) μm
(2+2L
0
/1000) μm
(3+3L
0
/1000) μm
However, at 1600mm (or greater) stroke is (5+5L
0
/1000) μm
45
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