Dwyer Series GFM Instruction manual

Technical Data Sheet No. TD9411M Rev. L
Date of Issue:
July 2009
OPERATING MANUAL
FOR GFM MASS FLOW METERS
P.O. Box 373
Michigan City, IN 46361 USA
Phone: (219) 879-8000
FAX: (219) 879-9057
e-mail: [email protected]
Internet: http://www.dwyer-inst.com
CAUTION:
This product is not intended to be used in life support applications!
CAUTION:
K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
Dwyer reserves the right to make changes to information and specifications in this
manual without notice.
TABLE OF CONTENTS
1. UNPACKING THE GFM MASS FLOW METER......................................... 1
1
1.1 Inspect Package for External Damage.................................................
1
1.2 Unpack the Mass Flow Meter...............................................................
1
1.3 Returning Merchandise for Repair.......................................................
2. INSTALLATION....................................................................................... 1
2.1 Primary Gas Connections............................................................... 1
2.2 Electrical Connections..................................................................... 2
2.3.1 Remote LCD Readouts..................................................................... 4
2.3.2 Panel Mounting Readouts............................................................... 4
3. PRINCIPLE OF OPERATION.................................................................. 4
4. SPECIFICATIONS................................................................................... 5
4.1 CE Compliance................................................................................. 6
5. OPERATING INSTRUCTIONS................................................................. 8
5.1 Preparation and Warm Up................................................................ 8
5.2 Flow Signal Output Readings.......................................................... 8
5.3 Swamping Condition....................................................................... 9
6. MAINTENANCE........................................................................................ 9
6.1 Introduction..................................................................................... 9
6.2 Flow Path Cleaning.......................................................................... 9
6.2.1 Restrictor Flow Element (RFE)........................................................ 9
10
6.2.2 GFM-110 /111 models.........................................................................
10
6.2.3 GFM-1131 to 1142 models..................................................................
10
6.2.4 GFM-1144 /1145 models.....................................................................
7. CALIBRATION PROCEDURES................................................................. 11
7.1 Flow Calibration...............................................................................11
7.2 Calibration of GFM Mass Flow Meters..............................................12
7.2.1 Connections and Initial Warm Up.....................................................12
7.2.2 ZERO Adjustment.............................................................................12
7.2.3 SPAN Adjustment............................................................................ 13
13
7.3 Linearity Adjustment..........................................................................
7.3.1 Connections and Initial Warm Up....................................................13
7.3.2 ZERO Adjustment.............................................................................13
7.3.3 25% Flow Adjustment......................................................................14
7.3.4 50% Flow Adjustment......................................................................14
7.3.5 75% Flow Adjustment......................................................................14
7.3.6
7.4
7.4.1
7.4.2
7.4.3
100% Flow Adjustment....................................................................14
LCD Display Scaling.........................................................................14
Access LCD Display Circuit..............................................................14
Adjust Scaling..................................................................................15
Change Decimal Point......................................................................15
8. TROUBLESHOOTING............................................................................. 15
8.1 Common Conditions........................................................................15
8.2 Troubleshooting Guide.....................................................................16
8.3 Technical Assistance....................................................................... 20
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES.......................
21
APPENDIX 1
COMPONENT DIAGRAM....................................................... 22
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS).....................................23
APPENDIX 3
DIMENSIONAL DRAWINGS....................................................27
PARTS OF THE FLOW METER.............................................. 27
APPENDIX 4
WARRANTY.......................................................................... 28
1.
UNPACKING THE GFM MASS FLOW METER
1.1
Inspect Package for External Damage
Your GFM Mass Flow Meter was carefully packed in a sturdy cardboard carton,
with anti-static cushioning materials to withstand shipping shock. Upon receipt,
inspect the package for possible external damage. In case of external damage to
the package contact the shipping company immediately.
1.2
Unpack the Mass Flow Meter
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor or Dwyer directly.
When unpacking the instrument please make sure that you have all the items
indicated on the Packing List. Please report any shortages promptly.
1.3
Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Dwyer if
you purchased your Mass Flow Meter directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Dwyer reserves the right to charge a fee to the customer for equipment returned under warranty claims if the instruments are tested to be free from
warrantied defects.
Shipping charges are borne by the customer. Meters returned “collect” will not be
accepted!
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2.
INSTALLATION
2.1
Primary Gas Connections
Please note that the GFM Mass Flow Meter will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the
sensor.
1
CAUTION: GFM TRANSDUCERS SHOULD NOT BE USED FOR MONITORING
OXYGEN GAS UNLESS SPECIFICALLY CLEANED AND PREPARED FOR SUCH
APPLICATION.
For more information, contact your distributor or Dwyer.
Attitude sensitivity of the Mass Flow Meter is ±15. This means that the gas flow
path of the Flow Meter must be horizontal within those stated limits. Should there
be need for a different orientation of the meter, re-calibration may be necessary. It
is also preferable to install the GFM transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminant’s.
Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings (except GFM-1145) until the ends of the
properly sized tubings home flush against the shoulders of the fittings.
Compression fittings are to be tightened according to the manufacturer's instructions to one and one quarter turns. Avoid over tightening which will seriously damage the Restrictor Flow Elements (RFE's)!
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system. (All GFM's are checked prior to shipment for leakage within stated limits. See specifications in this manual.)
2.2
Electrical Connections
GFM transducers require a +12VDC (+24VDC optional) power supply with a minimum current rating of 200mA to operate. The operating power input is supplied
via the DC power jack or the 9-pin “D” connector located at the side of the flow
transducer enclosure. On GFM's purchased without an LCD readout, a readout
panel meter, digital multimeter, or other equivalent device is required to observe
the flow signal.
DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS YOUR GFM METER WAS
ORDERED AND CONFIGURED FOR 24Vdc.
2
FIGURE 2.a - 9-PIN “D” CONNECTOR PINOUTS FOR GFM TRANSDUCER.
PIN
FUNCTION
1
Remote LCD display signal
2
0 to 5 VDC output indication
3
0 to 5 VDC common
4
Power supply, positive
5
Power supply, common
6
Remote LCD display reference
7
(unassigned)
8
4 to 20 mA output indication
9
4 to 20 mA common
IMPORTANT NOTES:
In general, “D” Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the system.
When connecting power to the GFM mass flow meter via the DC power jack, do
not connect any power supply to the 9-pin 'D' Connector. The DC power jack has
a center positive polarity.
When battery use is required to power the GFM, use only the optional battery and
accompanying charger available from Dwyer.
The power input is protected by a 750mA M (medium time-lag) resettable fuse. If
a shorting condition or polarity reversal occurs, the fuse will cut power to the flow
transducer circuit. Disconnect the power to the unit, remove the faulty condition,
and reconnect the power. The fuse will reset once the faulty condition has been
removed.
Cable length may not exceed 9.5 feet (3 meters).
Use of the GFM flow transducer in a manner other than that specified in this manual or in writing from Dwyer, may impair the protection provided by the equipment.
3
2.3.1
Remote LCD Readouts
GFM Mass Flow Meters are available with optional remote reading LCD displays
supplied with a three foot long wire to accommodate most applications. This configuration includes the upper block element which serves as the LCD readout
mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters])
are available on request.
2.3.2
Panel Mounting Readouts
Another option for the GFM Mass Flow Meter is the Panel Mounting Remote
Readout. In this configuration the LCD readout is supplied with a three foot long
extension wire, and no aluminum housing around the LCD. The LCD readout for
panel mounting includes a bezel with two plastic screws which conveniently fit into
a rectangular cut-out for panel mounting (see Figure 2.b).
FIGURE 2.b - CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING.
3.
PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar
flow conduits are proportional to one another. Therefore, the flow rates measured
in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
4
4.
SPECIFICATIONS
FLOW MEDIUM: Please note that GFM 1101 thru 1145 Mass Flow Meters are designed to
work with clean gases only. Never try to meter or control flow rates of liquids with any GFM's.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70F F
(21.1F C)] unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY: ±1.5% of full scale, including linearity for gas temperatures ranging from 59F
F to 77F F (15F C to 25F C) and pressures of 5 to 60 psia (0.35 to 4.1 bars).
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale /FC.
PRESSURE COEFFICIENT: 0.01% of full scale /psi (0.07 bar).
RESPONSE TIME: 800 ms time constant; approximately 2 seconds to within ±2% of set
flow rate for 25% to 100% of full scale flow rate.
GAS PRESSURE: 1000 psig (69 bars) 10, 50 and 100 L/min; 500 psig (34.5 bars) 200,
500 and 1000 L/min; optimum pressure is 20 psig (1.4 bars).
GAS AND AMBIENT TEMPERATURE: 32F F to 122F F (0FC to 50FC).
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10- 7 sccs He max. to the outside environment.
ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical; standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0-5 VDC (1000 Ω minimum load impedance) and 4-20 mA
(0-500 loop Ω resistance); 20 mV peak to peak max noise.
Contact your distributor or Dwyer for optional RS232 or IEEE488 interfaces.
TRANSDUCER INPUT POWER: +12 VDC, 200 mA maximum; +24 VDC optional.
Power input is protected by a 750mA M (medium time-lag) resettable fuse, and a rectifier
diode for polarity protection.
WETTED MATERIALS:
GFM-110 thru 1145: Anodized aluminum, brass, and 316 stainless steel with
VITON® O-rings seals; BUNA-N®, NEOPRENE® or KALREZ® O-rings are optional.
GFM-1101 thru 1145: 316 stainless steel with VITON® O-rings seals; BUNA-N®, NEOPRENE®
or KALREZ® O-rings are optional.
5
Dwyer makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers' sole responsibility to select the model suitable for a particular gas based on the
fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS:
GFM-110 /111 /113
GFM-1142 /1143
GFM-1144
GFM-1145
-1/4"
-3/8"
-1/2"
-3/4"
compression fittings
compression fittings
compression fittings
FNPT fittings
LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On GFM 1101-1145 meters aluminum or stainless steel models the LCD display is built into
the upper block element and may be tilted over 90 degrees for optimal viewing comfort.
Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e. standard liters /minute [slpm], standard cubic centimeters /minute [sccm], standard cubic feet
/hour [scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of
order. Contact your distributor or Dwyer when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFM
transducer 9-pin “D” connector. [Cable length may not exceed 9.5 feet (3 meters)]
4.1
CE Compliance
Any model GFM bearing a CE marking on it, is in compliance with the below stated test standards currently accepted.
EMC Compliance with 89 /336 /EEC as amended; Emission Standard: EN
55011:1991, Group 1, Class B Immunity Standard: EN 55082-2:1992
6
FLOW RANGES
TABLE I GFM-110 /111 LOW FLOW MASS FLOW METERS*
CODE
GFM-1101 /2101
GFM-1102 /2102
GFM-1103 /2103
GFM-1104 /2104
GFM-1105 /2105
GFM-1106 /2106
scc/min [N2]
0 to 10
CODE
GFM-1107 /2107
std liters/min [N2]
0 to 1
0 to 20
0 to 50
0 to 100
0 to 200
0 to 500
GFM-1108 /2108
GFM-1109 /2108
GFM-1110 /2110
0 to 2
0 to 5
0 to 10
TABLE II GFM-113 MEDIUM FLOW MASS FLOW METERS*
CODE
std liters /min [N2]
GFM-1111 /2111
0 to 15
GFM-1130 /2130
20
GFM-1131 /2131
GFM-1132 /2132
30
40
GFM-1133 /2133
50
TABLE III GFM-1142 HIGH FLOW MASS FLOW METERS*
CODE
std liters /min [N2]
GFM-1140 /2140
60
GFM-1141 /2141
80
GFM-1142 /2142
100
GFM-1143 /2143
200
GFM-1144 /2144
500
GFM-1145 /2145
1000
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70F F (21.1FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
TABLE IV PRESSURE DROPS
MAXIMUM PRESSURE DROP
MODEL
FLOW RATE
[std liters /min]
[mm H2O]
[psid]
[mbar]
GFM-110
up to 10
25
0.04
2.5
15
63
0.09
6.4
20
300
0.44
30
30
800
1.18
81
40
1480
2.18
150
50
2200
3.23
223
GFM-1140
60
3100
4.56
314
GFM-1142
100
5500
8.08
557
GFM-1143
200
2720
4.0
280
GFM-1144
500
3400
5.0
340
GFM-1145
1000
6120
9.0
620
GFM-111 /113
7
5.
OPERATING INSTRUCTIONS
5.1
Preparation and Warm Up
It is assumed that the Mass Flow Meter has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF.
Apply power to the unit by plugging the power supply line into the DC power jack
(or 9-pin 'D' connector) on the side of the meter. If you are using your own power
supply, be sure it is between +12 and +15 VDC with at least 200 mA current
capacity. Allow the Mass Flow Meter to warm-up for a minimum of 15 minutes.
SUPPLYING DC POWER TO THE POWER JACK AND THE “D” CONNECTOR AT
THE SAME TIME WILL DAMAGE THE METER. DC POWER JACK POLARITY
IS CENTER POSITIVE.
During initial powering of the GFM transducer, the flow output signal will be indicating a higher than usual output. This is indication that the GFM transducer has
not yet attained it's minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually zero. If
after the 15 minutes warm-up period, the display still indicates a reading of less
than ± 3.0 % of F.S., readjust the ZERO potentiometer [R34] through the access
hole. Before zero adjustment it is good practice to temporarily disconnect the gas
source, to ensure that no seepage or leak occurs in to the meter.
5.2
IF AFTER THE 15 MINUTES WARM-UP PERIOD, THE DISPLAY INDICATES A
READING OF MORE THAN ±3.0 % OF F.S., THE UNIT HAS TO BE RETURNED
TO THE FACTORY FOR REPAIR.
Flow Signal Output Readings
Initiate a controlled gas flow after warm up. The flow signal output can be viewed
either on the LCD display, remote panel meter, digital multimeter, or other display
device.
If an LCD display has been supplied with the GFM, the observed reading is in
direct engineering units (0 to 100% indication is optional).
Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are attained at the appropriate pins of the 9-pin “D” connector (see Figure 2.a) on the side of the GFM
transducer.
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. By default calibration is done against 0 to 5 VDC output signal. If 4-20 mA output signal is used for flow indication on the GFM, which was
calibrated against 0 to 5 VDC, the total uncertainty of the reading may be in the
range of +2.5% of full scale. Optional calibration for 4-20 mA output signal is
available upon request at time of order. The full scale range and gas for which
your meter has been calibrated are shown on the flow transducers front label.
For optional RS232 or IEEE488 interfaces please contact your distributor or Dwyer.
8
5.3
Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter
is taking place, a condition known as “swamping” may occur. Readings of a
“swamped” meter cannot be assumed to be either accurate or linear. Flow must
be restored to below 110% of maximum meter range. Once flow rates are lowered
to within calibrated range, the swamping condition will end. Operation of the meter
above 110% of maximum calibrated flow may increase recovery time.
6.
MAINTENANCE
6.1
Introduction
It is important that the Mass Flow Meter /Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (GFM 1101 to 1111) or 60
micron (GFM 1131 thru 1142) filter is built into the inlet of the flow transducer. The
filter screen and the flow paths may require occasional cleaning as described
below. There is no other recommended maintenance required. It is good practice,
however, to keep the meter away from vibration, hot or corrosive environments
and excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section 7. It is recommended
that units are returned to Dwyer for repair service and calibration.
6.2
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY
INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED
OF TOXIC, BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE
CONTENTS.
Flow Path Cleaning
Before attempting any disassembly of the unit for cleaning, try inspecting the
flow paths by looking into the inlet and outlet ends of the meter for any debris that
may be clogging the flow through the meter. Remove debris as necessary. If the
flow path is not unclogged, then proceed with steps below.
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter for servicing.
6.2.1
NOTE: DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.
Restrictor Flow Element (RFE)
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Meter depends on the
gas and flow range of the instrument.
9
6.2.2
GFM-110 /111 Models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen
will now become visible. Push the screen out through the inlet fitting. Clean or
replace each of the removed parts as necessary. If alcohol is used for cleaning,
allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminant. If
necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths
by flowing clean dry gas through.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.
6.2.3
NOTE: OVER TIGHTENING WILL DEFORM AND RENDER THE RFE DEFECTIVE.
IT IS ADVISABLE THAT AT LEAST ONE CALIBRATION POINT BE CHECKED
AFTER RE-INSTALLING THE INLET FITTING-SEE SECTION (G).
GFM-1131 to 1142 Models
Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet side
of the meter. This will release the short square block containing the inlet compression
fitting.
The 60 micron filter screen will now become visible. Remove the screen. DO NOT
remove the RFE inside the flow transducer! Clean or replace each of the removed
parts as necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.
Re-install the inlet parts and filter screen. Be sure that no dust has collected on
the O-ring seal.
It is advisable that at least one calibration point be checked after re-installing the
inlet fitting - see section 7.
6.2.4
GFM-1144 /1145 Models
It is not recommended to open high flow models. However, if customer decides
to clean RFE, below procedure is suggested.
Unscrew the four socket head cap screws (10-24) at the inlet side of the meter.
This will release the short square block containing the inlet compression fitting.
(3/4" NPT for GFM-1145)
10
Remove the block and connected screens. Clean each of the removed parts as
necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.
Re-install the inlet parts. Be sure that no dust has collected on the O-ring seal.
It is advisable that at least one calibration point be checked after re-installing
the inlet fitting - see section 7.
7.
7.1
CALIBRATION PROCEDURES
NOTE: REMOVAL OF THE FACTORY INSTALLED CALIBRATION SEALS AND/OR
ANY ADJUSTMENTS MADE TO THE METER, AS DESCRIBED IN THIS SECTION,
WILL VOID ANY CALIBRATION WARRANTY APPLICABLE.
Flow Calibration
Dwyer Instruments' Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters, using precision calibrators under strictly controlled
conditions. NIST traceable calibrations are available. Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric
calibrators incorporating liquid sealed frictionless actuators.
Generally, calibrations are performed using dry nitrogen gas. The calibration can
then be corrected to the appropriate gas desired based on relative correction [K]
factors shown in the gas factor table - see Appendix 2. A reference gas, other than
nitrogen, may be used to better approximate the flow characteristics of certain
gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appropriate relative correction factor should be recalculated - see section 9.
It is standard practice to calibrate Mass Flow Meters with dry nitrogen gas at 70F
F (21.1F C), 20 psig (1.4 bars) inlet pressure and 0 psig (0 bar) outlet pressure. It
is best to calibrate the GFM transducers to actual operating conditions. Specific
gas calibrations of non-toxic and non-corrosive gases are available at specific
conditions. Please contact your distributor or Dwyer for a price quotation. It is recommended that a flow calibrator of at least four times better collective accuracy
than that of the Mass Flow Meter to be calibrated be used. Equipment required for
calibration includes a flow calibration standard and a certified high sensitivity multimeter (which together have a collective accuracy of ±0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example: metering needle valve)
installed upstream from the Mass Flow Meter and a pressure regulated source of
dry filtered nitrogen gas (or other suitable reference gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
11
FIGURE 7.A - CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS
7.2
Calibration of GFM Mass Flow Meters
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
GFM Mass Flow Meters may be field recalibrated /checked for the same range
they were originally factory calibrated for. When linearity adjustment is needed, or
flow range changes are being made proceed to step 7.3. Flow range changes
may require a different Restrictor Flow Element (RFE). Consult your distributor or
Dwyer for more information.
7.2.1
Connections and Initial Warm Up
At the 9-pin “D” connector of the GFM transducer, connect the multimeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20 mA)-(see Figure 2.a).
Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.
7.2.2
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or leak
occurs into the meter, it is good practice to temporarily disconnect the gas source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer
[R34] through the access window for 0 VDC (or 4 mA respectively) at zero flow.
12
7.2.3
SPAN Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 100% of
full scale flow. Check the flow rate indicated against the flow calibrator. If the deviation is less than ±10% of full scale reading, correct the SPAN potentiometer [R33]
setting by using the insulated screwdriver through the access window, to eliminate
any deviation. If the deviation is larger than ±10% of full scale reading, a defective
condition may be present.
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓
✓
✓
✓
Occluded or contaminated sensor tube.
Leaking condition in the GFM transducer or the gas line and fittings.
For gases other than nitrogen, recheck appropriate “K” factor from the Gas Factor Table.
Temperature and /or pressure correction errors.
See also section 8. TROUBLESHOOTING. If after attempting to remedy
the above conditions, a malfunction still persists, return the meter for
factory service, see section 1.1.
At this point the calibration is complete. However, it is advisable that several
additional points between 0 and 100%, such as 25%, 50%, and 75% flow be
checked. If discrepancies are found, proceed to step 7.3 for Linearity Adjustment.
7.3
Linearity Adjustment
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
7.3.1
Connections and Initial Warm Up
At the 9-pin “D” connector of the GFM transducer, connect the multimeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20 mA)-(see Figure 2.a).
If calibration to a new flow range or different gas is being performed, it may be necessary to remove any jumpers at J1, J2, and J3 before beginning linearizing procedure.
Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.
7.3.2
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or
leak occurs into the meter, it is good practice to temporarily disconnect the gas
source. Using the multimeter and the insulated screwdriver, adjust the ZERO
potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively)
at zero flow.
13
7.3.3
25% Flow Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the setting for potentiometer [R33] by using the insulated screwdriver through the access
window, until the output of the flow meter reads 1.25VDC ±63mV (or 8mA ±0.25mA).
7.3.4
50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50VDC ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.
7.3.5
75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J2] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R39] by using the insulated screwdriver through the
access window, until reading is within specification.
7.3.6
100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00VDC ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J3] as appropriate to increase or decrease the signal.
Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification.
Repeat steps 7.3.3 to 7.3.6 at least once more.
7.4
LCD Display Scaling
It may be desirable to re-scale the output reading on the LCD readout supplied
with certain model GFM transducers. Re-calibration for a new flow range or different engineering units are two examples of when this may be necessary.
7.4.1
Access LCD Display Circuit
Carefully remove the LCD from the GFM or panel mounted surface. Remove the
aluminum housing on the side of the connection cable. Slide the LCD assembly
out of the aluminum housing.
14
7.4.2
Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA signal at the 9-pin “D” connector, set the flow rate on the GFM to full scale flow (5
VDC or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the
LCD printed circuit board to desired full scale flow reading.
7.4.3
Change Decimal Point
To change the decimal place on the LCD display readout, simply move the jumper
to the appropriate location on the 8-pin header block. The numbers are printed to
the side of the connections. Do not attempt to place more than one jumper for
decimal setting.
JUMPER POSITION
“3”
“1”
MAXIMUM SCALABLE DISPLAY READING
1999
199.9
“2”
“3”
19.99
1.999
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Meter was thoroughly checked at numerous quality control points
during and after manufacturing and assembly operations. It was calibrated
according to your desired flow and pressure conditions for a given gas or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
Are all cables connected correctly? Are there any leaks in the installation? Is the
power supply correctly selected according to requirements? When several meters
are used a power supply with appropriate current rating should be selected.
Were the connector pinouts matched properly? When interchanging with other
manufacturers' equipment, cables and connectors must be carefully wired for correct pin configurations. Is the pressure differential across the instrument sufficient?
15
8.2
Troubleshooting Guide
INDICATION
lack of reading or output
unstable or no zero reading
LIKELY REASON
REMEDY
power supply off
check connection of power
supply
fuse blown
disconnect GFM transducer
from power supply; remove
the shorting condition or
check polarities;
fuse resets automatically
filter screen
obstructed at inlet
flush clean or disassemble
to remove impediments or
replace
occluded sensor tube
flush clean or or return to
factory for replacement
pc board defect
return to factory for replacement
power supply problem
check power supply for
appropriate output
gas leak
locate and correct
pc board defective
return to factory for replacement
full scale output at “no flow” defective sensor
condition or with valve
closed
gas leak
return to factory for replacement
calibration off
gas metered is not the
same as what meter was
calibrated for
use matched calibration
composition of gas
changed
see K factor tables in
APPENDIX 2
gas leak
locate and correct
pc board defective
return to factory for replacement
RFE dirty
flush clean or disassemble
to remove impediments
occluded sensor tube
flush clean or return to
factory for replacement
filter screen obstructed at
inlet
flush clean or disassemble to
remove impediments or replace
transducer
is not mounted properly
check for any tilt or change
in the mounting of the
transducer; generally, units
are calibrated for horizontal
installation
(relative to the sensor tube)
16
locate and correct
INDICATION
LIKELY REASON
REMEDY
No zero reading after 15
Embedded temperature has Readjust ZERO
minute warm up time and no been changed.
potentiometer R34 through
flow condition.
the access hole
(see page 12 for details).
No zero reading after 15
Power supply voltage is
minute warm up time and no less than 11.0 Vdc.
flow condition. Display
reading does not response
on zero adjustment.
Measure voltage on pins 4
and 5 of the 9 pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 Vdc, 250 mA
minimum is recommended).
No zero reading after 15
minute warm up time and
no flow condition. Display
reading does not response
on zero adjustment. But
analog output 0-5 Vdc can
be adjusted from 10mV up
to 0.5 Vdc with zero
potentiometer R34.
Wire is disconnected inside Carefully remove the LCD
of the LCD Display.
from GFM. Remove the aluminum housing on the side
of the connection cable. Side
the LCD assembly out of the
aluminum housing. Check
connection for all four wires.
If any wire is disconnected
restore connection and readjust zero potentiometer R34
to get zero reading on the
display (ensure gas source
is disconnected and no
seepage or leak occurs in to
the meter).
LCD Display remains blank
when unit is powered up.
But flow can be observed
on analog output 0-5 Vdc
(pis 2 and 3 of the
D-connector).
LCD Display connector is
not attached to the GFM or
connection is loose.
Check LCD connector
(remove and reinstall LCD
connector)
Wire is disconnected inside See instructions for pos. 3
of the LCD Display.
LCD Display remains blank Power supply is bad or
when unit is powered up. No polarity is reversed.
response on the flow from
analog output 0-5 Vdc
(voltage is less than 15 mV).
PC board is defective.
17
Measure voltage on pins 4
and 5 of the 9 pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 Vdc, 250 mA
minimum is recommended).
If polarity is reversed
(reading is negative) make
correct connection.
Return GFM to factory
for repair.
INDICATION
LIKELY REASON
REMEDY
LCD Display reading does
LCD Display is adjusted for
not correspond the correct wrong flow range or
flow range according analog engineering units.
output 0-5 Vdc signal.
Readjust LCD Display
scaling for required full scale
flow (see 7.4 on page 14).
LCD Display reading and
analog output 0-5Vdc
signal are fluctuate in wide
range during the flow
measurement.
Check external connections
to pins 2 and 3 of the
D-connector. Make sure the
load resistance is more
than 1000 Ohm.
Output 0-5 Vdc signal (pins
2 and 3 of the D-connector)
is shorted on the GND or
overloaded.
LCD Display reading does
Output 0-5Vdc schematic is
correspond the correct flow burned out or damaged.
range, but 0-5 Vdc output
signal does not change
(always the same reading
or around zero).
Return GFM to factory for
repair.
LCD Display reading and
0-5 Vdc output voltage do
correspond the correct flow
range, but 4-20 mA output
signal does not change
(always the same or
reading around 4.0 mA).
External loop resistance is
open or more than 500
Ohm.
Check external connections
to pins 8 and 9 of the
D-connector. Make sure the
loop resistance is less than
500 Ohm.
Output 4-20 mA schematic
is burned out or damaged.
Return GFM to factory for
repair.
Calibration is off (no more
than 3.0 % F.S.).
GFM has initial zero shift.
Shut off the flow of gas into
the GFM (ensure gas source
is disconnected and no
seepage or leak occurs in to
the meter). Wait for 15
minute. with no flow
condition and readjust zero
potentiometer R34 to get
zero reading on the display.
18
INDICATION
LIKELY REASON
REMEDY
LCD Display reading is
above maximum flow range
and output voltage 0-5 Vdc
signal is more than 5.5 Vdc
when gas flows through the
GFM.
Sensor under swamping
conditions (flow is more
than 10% above maximum
flow rate for particular
GFM).
Lower the flow through GFM
within calibrated range or
shut down the flow completely. The swamping condition will end automatically.
PC board is defective.
Return GFM to factory for
repair.
Gas flows through the GFM, The gas flow is too low for
particular model of GFM.
but LCD Display reading
and output voltage 0-5 Vdc
signal do not responds on
the flow.
GFM-110 /111 models: RFE
is not connected properly to
the inlet fitting.
Gas does not flow through
the GFM with inlet pressure
applied to the inlet fitting.
LCD Display reading and
output voltage 0-5 Vdc
signal show zero flow.
Check maximum flow range
on transducer's front panel
and make required flow
adjustment.
Unscrew the inlet compression fitting of the meter and
reinstall RFE (see 6.2.2 on
page 10). NOTE: Calibration
accuracy can be affected.
Sensor or PC board is
defective.
Return GFM to factory for
repair.
Filter screen obstructed at
inlet.
Flush clean or disassemble
to remove impediments or
replace the filter screen
(see 6.2 on page 9).
NOTE: Calibration accuracy
can be affected.
Gas flows through the GFM, Direction of the gas flow is
reversed.
but LCD Display reading
is negative and output
voltage 0-5 Vdc signal do
not responds on the flow
(reading near 10mV).
GFM is installed in the
installation with back pressure conditions and gas leak
exist in the system.
Check the direction of gas
flow as indicated by the
arrow on the front of the
meter and make required
reconnection in the installation.
Gas flows through the GFM, 5.00 Vdc reference voltage
but LCD Display reading is (green wire) is disconnected
inside of the LCD Display.
negative and does not
change according to gas
flow. Output voltage
0-5 Vdc signal corresponds
correct gas flow.
Carefully remove the LCD
from GFM. Remove the
aluminum housing on the
side of the connection cable.
Side the LCD assembly out
of the aluminum housing.
Check connection for green
wire (5.00 Vdc reference
voltage). If any wire is
disconnected restore connection.
19
Locate and correct gas leak
in the system. If GFM has
internal leak return it to
factory for repair.
INDICATION
LIKELY REASON
REMEDY
GFM is disconnected from
the source of the gas (no
flow conditions) but LCD
Display reading is
fluctuating in wide range.
Output voltage 0-5 Vdc
signal also fluctuating. The
power supply voltage is 12
Vdc and stable.
Sensor or PC board is
defective.
Return GFM to factory for
repair.
Reading on the LCD Display Decimal point jumper is
installed in wrong position
ten (hundreds) times less
on the LCD Display Circuit.
or more than actual gas
flow. Output voltage
0-5 Vdc signal corresponds
correct gas flow.
Carefully remove the LCD
from GFM. Remove the
aluminum housing on the
side of the connection cable.
Side the LCD assembly out
of the aluminum housing.
Reinstall jumper to the
appropriate location on the
8-pin header block
(see 7.4.3 on page 15).
For best results it is recommended that instruments are returned to the factory
for servicing. See section 1.3 for return procedures.
8.3
Technical Assistance
Dwyer Instruments will provide technical assistance over the phone to qualified
repair personnel. Please call our Technical Assistance at (219)-879-8000. Please
have your Serial Number and Model Number ready when you call.
20
9.
CALIBRATION CONVERSIONS FROM
REFERENCE GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
1
d X Cp
where d = gas density (gram /liter)
Cp
= coefficient of specific heat (cal /gram)
K gas =
Note: In the above relationship that d and Cp are usually chosen at the same
conditions (standard, normal or other).
If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is
used to relate the calibration of the actual gas to the reference gas.
K =
where Qa
Qr
Ka
Kr
=
=
=
=
Qa
Qr
=
Ka
Kr
mass flow rate of an actual gas (sccm)
mass flow rate of a reference gas (sccm)
K factor of an actual gas
K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
21
APPENDIX 1
COMPONENTS DIAGRAM
PHONE
JACK
9-PIN
“D”
CONNECTOR
DC POWER
JACK
GFM METERING PC BOARD
22
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
CAUTION: K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
.5829
1.0000
.4346
.7310
1.4573
1.205
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.658
.4036
.240
.352
.492
.1244
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.2016
1.162
1.293
1.787
.760
1.782
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
1.964
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
Acetylene C2H2
Air
Allene (Propadiene) C3H4
Ammonia NH3
Argon Ar (<=10 L/min)
Argon AR-1 (>=10 L/min)
Arsine AsH3
Boron Trichloride BCl3
Boron Trifluoride BF3
Bromine Br2
Boron Tribromide Br3
Bromine PentaTrifluoride BrF5
Bromine Trifluoride BrF3
Bromotrifluoromethane (Freon-13 B1) CBrF3
1,3-Butadiene C4H6
Butane C4H10
1-Butene C4H8
2-Butene C4H8 CIS
2-Butene C4H8 TRANS
Carbon Dioxide CO2 (<10 L/min)
Carbon Dioxide CO2-1 (>10 L/min)
Carbon Disulfide CS2
Carbon Monoxide C0
Carbon Tetrachloride CCl4
Carbon Tetrafluoride (Freon-14)CF4
Carbonyl Fluoride COF2
Carbonyl Sulfide COS
Chlorine Cl2
Chlorine Trifluoride ClF3
Chlorodifluoromethane (Freon-22)CHClF2
Chloroform CHCl3
Chloropentafluoroethane(Freon-115)C2ClF5
Chlorotrifluromethane (Freon-13) CClF3
CyanogenC2N2
CyanogenChloride CICN
Cyclopropane C3H5
23
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
Helium He (<50 L/min)
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)
Hexafluoroethane C2F6 (Freon-116)
Hexane C6H14
1.00
.4357
.1947
.3538
.4252
.2522
.4044
.2235
.4271
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
2.43
2.05
.2421
.1792
1.722
.508
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
1.241
1.241
.1834
.3968
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
.1786
.1786
6.157
3.845
Hydrogen H2-1 (<10-100 L)
Hydrogen H2-2 (>10-100 L)
Hydrogen H2-3 (>100 L)
1.0106
1.35
1.9
3.419
3.419
3.419
.0899
.0899
.0899
ACTUAL GAS
Deuterium D2
Diborane B2H6
Dibromodifluoromethane CBr2F2
Dichlorodifluoromethane (Freon-12) CCl2F2
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH3)2SiCl2
Dichlorosilane SiH2Cl2
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4
1,1-Difluoroethylene (Freon-1132A) C2H2F2
Dimethylamine (CH3)2NH
Dimethyl Ether (CH3)2O
2,2-Dimethylpropane C3H12
Ethane C2H6
Ethanol C2H6O
Ethyl Acetylene C4H6
Ethyl Chloride C2H5Cl
Ethylene C2H4
Ethylene Oxide C2H4O
Fluorine F2
Fluoroform (Freon-23) CHF3
Freon-11 CCl3F
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-21 CHCl2F
Freon-22 CHClF2
Freon-113 CCl2FCClF2
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-C318 C4F8
Germane GeH4
Germanium Tetrachloride GeCl4
24
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
1.000
1.000
.764
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.75
.0861
.1912
.3171
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.5328
3.610
1.627
1.206
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
.715
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
.759
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H2Se
Hydrogen Sulfide H2S
Iodine Pentafluoride IF5
Isobutane CH(CH3)3
Isobutylene C4H6
Krypton Kr
Methane CH4 (<=10 L/min)
Methane CH4-1 (>=10 L/min)
Methanol CH3
Methyl Acetylene C3H4
Methyl Bromide CH2Br
Methyl Chloride CH3Cl
Methyl Fluoride CH3F
Methyl Mercaptan CH3SH
Methyl Trichlorosilane (CH3)SiCl3
Molybdenum Hexafluoride MoF6
Monoethylamine C2H5NH2
Monomethylamine CH3NH2
Neon NE
Nitric Oxide NO
Nitrogen N2
Nitrogen Dioxide NO2
Nitrogen Trifluoride NF3
Nitrosyl Chloride NOCl
Nitrous Oxide N2O
Octafluorocyclobutane (Freon-C318) C4F8
Oxygen O2
Oxygen Difluoride OF2
Ozone
Pentaborane B5H9
Pentane C5H12
Perchloryl Fluoride ClO3F
Perfluoropropane C3F8
Phosgene COCl2
Phosphine PH3
25
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl3
Phosphorous Pentafluoride PH5
Phosphorous Trichloride PCl3
Propane C3H8
Propylene C3H6
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Dioxide SO2
Sulfur Hexafluoride SF6
Sulfuryl Fluoride SO2F2
Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F4
Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl3
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2
.2031
.161
8.36
ACTUAL GAS
Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl4
Trichloro Ethylene C2HCl3
Trimethylamine (CH3)3N
Tungsten Hexafluoride WF6
Uranium Hexafluoride UF6
Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
26
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
APPENDIX 3
DIMENSIONAL DRAWINGS
MODEL
DIMENSION (inch)
CONNECTION
Compression Fitting
(except model GFM 1145)
LCD VERSION
A
B
C/*C D/*D E/*E
NO LCD
F
G
H
GFM 1101 to 1109 1/4" Tube Outside Diameter 5.60 1.00 1.00 3.00 5.02 0.69 2.69 4.50
GFM 1111 to 1133 1/4" Tube Outside Diameter 5.98 1.37 1.25 4.13 6.15 0.69 2.69 4.88
5.98 1.37 1.25 4.13 6.27 0.69 2.69 4.88
GFM 1142
3/8" Tube Outside Diameter
GFM 1143
3/8" Tube Outside Diameter 6.60 2.00 1.75 6.69 8.83 0.99 4.69 5.50
GFM 1144
1/2" Tube Outside Diameter 7.60 3.00 3.00 7.25 9.67 2.250 6.750 6.50
GFM 1145
3/4" NPT Female
8.60 4.00 4.00 7.30
-
3.000 6.800 7.50
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion at any time
without notice. For certified dimensions please contact Dwyer.
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APPENDIX 4
WARRANTY
Dwyer Mass Flow Systems are warranted against parts and
workmanship for a period of one year from the date of purchase.
Calibrations are warranted for up to six months after date of
purchase, provided calibration seals have not been tampered with. It
is assumed that equipment selected by the customer is constructed
of materials compatible with gases used. Proper selection is the
responsibility of the customer. It is understood that gases under
pressure present inherent hazards to the user and to equipment, and
it is deemed the responsibility of the customer that only operators
with basic knowledge of the equipment and its limitations are
permitted to control and operate the equipment covered by this
warranty. Anything to the contrary will automatically void the liability
of Dwyer and the provisions of this warranty. Defective products will
be repaired or replaced solely at the discretion of Dwyer at no
charge. Shipping charges are borne by the customer.This warranty is
void if the equipment is damaged by accident or misuse, or has been
repaired or modified by anyone other than Dwyer or factory
authorized service facility. This warranty defines the obligation of
Dwyer and no other warranties expressed or implied are recognized.
NOTE: Follow Return Procedures In Section 1.3.
TRADEMARKS
Buna®-is a registered trademark of DuPont Dow Elastometers. Neoprene®-is a registered trademark of DuPont.
Dwyer®-is a registered trademark of Dwyer Instruments.
Viton®-is a registered trademark of Dupont Dow Elastomers L.L.C.
Kalrez®-is a registered trademark of DuPont Dow Elastomers.
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