Alicat Gas Flow Meter Manual

Operating Manual

M Series

MB Series

MS Series

Precision Gas Mass Flow Meters

Innovative Flow and Pressure Solutions

Notice:

Alicat Scientific, Inc. reserves the right to make any changes and improvements to the products described in this manual at any time and without notice. This manual is copyrighted. This document may not, in whole or in part, be copied, reproduced, translated, or converted to any electronic medium or machine readable form, for commercial purposes, without prior written consent from the copyright holder.

Note:

Although we provide assistance on Alicat Scientific products both personally and through our literature, it is the complete responsibility of the user to determine the suitability of any product to their application.

Alicat Scientific, Inc.’s Wide-Range Laminar Flow Element Patent: The wide-range laminar flow element and products using the wide-range laminar flow element are covered by U.S. Patent Number:

5,511,416. Manufacture or use of the wide-range laminar flow element in products other than Alicat

Scientific products or other products licensed under said patent will be deemed an infringement.

Limited Lifetime Warranty

Alicat Scientific, Inc. warrants to the original purchaser (hereinafter referred to as “Buyer”) that instruments manufactured by Alicat Scientific (hereinafter referred to as “Product”) shall be free from defects in materials and workmanship for the life of the Products.

Under this warranty, the Product will be repaired or replaced at manufacturer’s option, without charge for parts or labor when the Product is carried or shipped prepaid to the factory together with proof of purchase.

The foregoing shall constitute the exclusive and sole remedy in lieu of other remedies of the Buyer for any breach by Alicat Scientific of this warranty to the maximum extent permitted by law.

This warranty does not apply to any Product which has not been installed or used in accordance with the

Product operation and installation specifications provided to Buyer verbally or in writing by Alicat Scientific for the proper and normal use of the Product.

Buyer agrees hereunder that Alicat reserves the right to void any warranty, written or implied, if upon

Alicat’s examination of Product shall disclose to Alicat’s satisfaction that the Product failure was due solely, or in part, to accident, misuse, neglect, abuse, alteration, improper installation, unauthorized repair or improper testing by Buyer or agent of Buyer.

Alicat Scientific shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising out of, the sale, performance, or use of the Products covered by this warranty.

Alicat Scientific does not recommend, warrant or assume responsibility for the use of the Products in life support applications or systems.

Alicat’s warranties as herein above set forth shall not be enlarged, diminished or affected by, and no obligation or liability shall arise or grow out of Alicat’s rendering of technical advice in connection with

Buyer’s order of the Products furnished hereunder.

If Product becomes obsolete, Alicat Scientific, at its own discretion, reserves the right to repair the Product with available replacement parts or upgrade the Product to a current , commercially available version of the original Product. Should upgrading the Product be deemed necessary by Alicat, Buyer hereby agrees to pay an upgrade fee equal to seventy percent of the retail value of the replacement Product. Alicat

Scientific hereunder makes no claim that replacement Products will look, function or operate in the same or similar manner as the original product.

When a Product is returned to Alicat Scientific for recalibration this service is considered normal preventative maintenance. Recalibration of Product shall not be treated as a warranty service unless recalibration of Product is required as the result of repairs to Product pursuant to this Warranty.

Failure to recalibrate Product on a yearly basis will remove any and all obligations regarding repair or replacement of Product as outlined by this Warranty to Buyer from Alicat Scientific.

This Warranty is in lieu of all other relevant warranties, expressed or implied, including the implied warranty of merchantability and the implied warranty of fitness for a particular purpose, and any warranty against infringement of any patent.

Continued use or possession of Products after expiration of the applicable warranty period stated above shall be conclusive evidence that the warranty is fulfilled to the full satisfaction of Buyer.

Alicat makes no warranty as to experimental, non-standard or developmental Products.

Accessories purchased from Alicat are not covered by this warranty

.

Conformity / Supplemental Information:

The product complies with the requirements of the Low Voltage Directive 73/23/EEC and the EMC

Directive 89/336/EEC (including 93/68/EEC) and carries the CE Marking accordingly. Contact the manufacturer for more information.

09/28/2012 Rev.23 DOC-ALIMAN16

Thank you for purchasing an Alicat Gas Flow Meter.

Please take the time to read the information contained in this manual. This will help to ensure that you get the best possible service from your instrument. This manual covers the following Alicat Scientific instruments:

M Series Mass Gas Flow Meters

This includes M Series devices labeled as approved for CSA Class 1 Div 2 and

ATEX Class 1 Zone 2 hazardous environments. See pages 71 and 72 for Special

Conditions regarding the use of CSA/ATEX labeled devices.

MS Series Mass Gas Flow Meters

MS Series Flow Meters are for use with certain aggressive gases (see page 46).

MQ Series Mass Gas Flow Meters

MQ Series Flow Meters are for use with certain high pressure applications

(see page 50).

MB Series Portable Gas Flow Meters

All MB Series Portable Gas Flow Meters operate in accordance with the instructions found in this manual. Please see page 56 for information regarding battery replacement.

Unless otherwise noted, the instructions in this manual are applicable to all of the above instruments.

Full specifications for each device can be found on pages 38 through 50.

Please contact Alicat at 1-888-290-6060 or [email protected] if you have any questions regarding the use or operation of this device.

Many Alicat meters are built for specific applications. Two meters with the same flow range and part number may look and act quite differently depending upon the application the meter was built for. Care should be taken when moving a meter from one application to another.

3

TABLE OF CONTENTS

GETTING STARTED

MOUNTING

PLUMBING

POWER AND SIGNAL CONNECTIONS

INPUT SIGNALS

Analog Input Signal

RS-232 / RS-485 Digital Input Signal

OUTPUT SIGNALS

RS-232 / RS-485 Digital Output Signal

Standard Voltage (0-5 Vdc) Output Signal

Optional 0-10 Vdc Output Signal

Optional Current (4-20 mA) Output Signal

Optional 2nd Analog Output Signal

Information for Alicat TFT (Color Display) Instruments

DISPLAYS AND MENUS

MAIN

Gas Absolute Pressure

Gas Temperature

Tare

Volumetric Flow Rate

Mass Flow Rate

Flashing Error Message

SELECT MENU

GAS SELECT

COMMUNICATION SELECT

Unit ID

Baud

MISCELLANEOUS

Zero Band

Pressure Averaging

Flow Averaging

LCD Contrast

MANUFACTURER DATA

RS-232 or RS-485 Output and Input

Configuring HyperTerminal®

Tareing via RS-232 or RS-485

Changing from Streaming to Polling Mode

Gas Select

Collecting Data

Data Format

Sending a Simple Script File to HyperTerminal®

4

20

20

20

20

18

19

19

19

16

16

16

17

15

15

15

15

22

23

24

25

20

21

22

22

26

27

11

11

13

14

11

11

11

11

Page

6

6

7

8

9

9

10

TABLE OF CONTENTS

Operating Principle

Gas Viscosity

Other Gases

Volume Flow vs. Mass Flow

Volumetric Flow and Mass Flow Conversion

Compressibility

Standard Gas Data Tables

Gas Viscosities, Densities and Compressibilities at 25 o

C

Gas Viscosities, Densities and Compressibilities at 0 o

C

Troubleshooting

Maintenance and Recalibration

M Series Technical Specifications

M Series Dimensional Drawings

MS Series Technical Information

MS Series Dimensional Drawings

MQ Series Technical Information

PROFIBUS Technical Specifications

DeviceNet™ Technical Specifications

Option: Totalizing Mode

Option: Portable Meters and Gauges

Option: Remote Electronics

Option: Remote Panel Display

Accessory: BB9 Multi-Drop Box

Accessory: Flow Vision™ SC

Accessory: Flow Vision™ MX

Accessories

Eight Pin Mini-DIN Pin-Out

Locking Industrial Connector Pin-Out

DB9 Pin-Out Diagram

PROFIBUS Pin-Out

DB15 Pin-Out Diagrams

Information for CSA and ATEX Labeled Devices

62

63

64

65

71

59

59

60

62

56

57

57

58

50

51

52

55

38

42

46

47

33

34

35

37

Page

29

29

30

30

31

31

32

5

GETTING STARTED

Power Jack

8 Pin Mini-DIN

Display Screen

Inlet Connection Port

Outlet Connection Port

Flow Direction Arrow

Medium Mass Flow Meter

MOUNTING

M Series Gas Flow Meters have holes on the bottom for mounting to flat panels. See pages 42-45.

M Series Meters can usually be mounted in any position.

6

PLUMBING

Your meter is shipped with plastic plugs fitted in the port openings. To lessen the chance of contaminating the flow stream do not remove these plugs until you are ready to install the device.

Make sure that the gas will flow in the direction indicated by the flow arrow.

Standard M Series Gas Flow Meters have female inlet and outlet port connections. Welded VCR and other specialty fittings may have male ports.

The inlet and outlet port sizes (process connections) for different flow ranges are shown on pages 38-41.

Meters with M5 (10-32) ports have O-ring face seals and require no sealant or tape. Do not use tape with welded or o-ring fittings.

For non M5 (10-32) ports use thread sealing Teflon® tape to prevent leakage around the port threads.

Do not wrap the first two threads. This will minimize the possibility of getting tape into the flow stream and flow body.

Do not use pipe dopes or sealants on the process connections as these compounds can cause permanent damage to the meter should they get into the flow stream.

We recommend that a 20 micron filter be installed upstream of meters with full scale ranges of 1(S)LPM or less and a 40 micron filter be installed upstream of meters with full scale ranges above 1(S)LPM.

No straight runs of pipe are required upstream or downstream of the meter.

PRESSURE

Maximum operating line pressure is 145 PSIG (1 MPa).

If the line pressure is higher than 145 PSIG (1 MPa), use a pressure regulator upstream from the flow meter to reduce the pressure to 145 PSIG (1 MPa) or less.

Exceeding the maximum specified line pressure may cause permanent damage to the solid-state differential pressure sensor.

NOTE: Alicat MQ Series meters are built for certain high pressure applications and have a maximum line pressure of 320 PSIA (see page 50).

WARNING! Do Not subject the Meter’s Differential Pressure

sensor to upstream-downstream pressure differentials exceeding 10 PSID. While high static pressure will typically not damage the DP sensor, sudden pressure “spikes” can result in complete failure of the sensor.

A common cause of this problem is instantaneous application of high-pressure gas as from a snap acting solenoid valve either upstream or downstream of the meter. If you suspect that your pressure sensor is damaged please discontinue use of the meter and contact Alicat

7

POWER AND SIGNAL CONNECTIONS

Power can be supplied to your meter through either the power jack (power jack not available on CSA/ATEX approved devices) or the 8 pin Mini-DIN connector.

An AC to DC adapter which converts line AC power to DC voltage and current as specified below is required to use the power jack.

Meters require a 7-30 Vdc power supply with a 2.1 mm female positive center plug capable of supplying at least 100mA.

NOTE: 4-20mA analog output requires at least 15 Vdc.

3



6  7



8



Standard 8 Pin Mini-DIN Pin-Out

Pin Function

1 Inactive or 4-20mA Primary Output Signal

2

Static 5.12 Vdc or Secondary Analog Output (4-20mA, 5Vdc, 10Vdc)

or Basic Alarm

3 RS-232 Input Signal

Mini-DIN cable color

Black

Brown

4 Analog Input Signal

5 RS-232 Output Signal

6 0-5 Vdc (or 0-10 Vdc) Output Signal

7 Power In (as described above)

Red

Orange

Yellow

Green

Blue

8 Ground (common for power, communications and signals) Purple

Note: The above pin-out is applicable to all the flow meters and controllers with the

Mini-DIN connector. The availability of different output signals depends on the options ordered. Underlined Items in the above table are optional configurations that are noted on the unit’s calibration sheet.

CAUTION! Do not connect power to pins 1 through 6 as permanent

damage can occur!

It is common to mistake Pin 2 (labeled 5.12 Vdc Output) as the standard 0-5 Vdc

analog output signal. In fact Pin 2 is normally a constant 5.12 Vdc that reflects the system bus voltage and can be used as a source for the set-point signal.

For 6 Pin Locking Industrial Connector, DB9, DB15, PROFIBUS Pin-outs see pages 62 to 70.

8

INPUT SIGNALS

Analog Input Signal

Apply analog input to Pin 4 as shown on page 8.

For 6 Pin Locking Connector, DB9, DB15 and PROFIBUS Pin-outs see pages 62 to 70.

Standard 0-5 Vdc is the standard analog input signal. Apply the 0-5 Vdc input signal to pin 4, with common ground on pin 8.

Optional 0-10 Vdc: If specified at time of order, a 0-10 Vdc input signal can be applied to pin 4, with common ground on pin 8.

Optional 4-20 mA: If specified at time of order, a 4-20 mA input signal can be applied to pin 4, with common ground on pin 8.

NOTE: This is a current sinking device. The receiving circuit is essentially a 250 ohm resistor to ground.

NOTE: 4-20mA output requires at least 15 Vdc power input.

CAUTION! Do not connect this device to “loop powered’”

systems, as this will destroy portions of the circuitry and void the warranty. If you must interface with existing loop powered systems, always use a signal isolator and a separate power supply.

A remote tare can be achieved by momentarily grounding pin 4 to tare as shown above.

9



RS-232 / RS-485 Digital Input Signal

To use the RS-232 or RS-485 input signal, connect the RS-232 / RS-485 Output

Signal (Pin 5), the RS-232 / RS-485 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown below. (See page 23 for details on accessing

RS-232 / RS-485 input.)



5 4

 

  

3 2 1

1 2



3 4 5

9 8 7

Serial Cable End

6

6 7 8

PC Serial Port

9







2

1

4

















5

3

8

7

6

8 Pin MiniDIN Cable End

5

3

2

9 Pin Serial Connection

Pin Function

Ground

Transmit

Receive

8 Pin MiniDIN Connection

Function

Ground

Receive

Transmit

Pin

8

3

5

DB9 to Mini-DIN Connection for RS-232 / RS-485 Signals

10

8 Pin MiniDIN Connector

















                            

OUTPUT SIGNALS

RS-232 / RS-485 Digital Output Signal

To use the RS-232 or RS-485 output signal, it is necessary to connect the RS-232

/ RS-485 Output Signal (Pin 5), the RS-232 / RS-485 Input Signal (Pin 3), and

Ground (Pin 8) to your computer serial port as shown on page 8. (See page 22 for details on accessing RS-232 / RS-485 output.)

Standard Voltage (0-5 Vdc) Output Signal

M Series flow meters equipped with a 0-5 Vdc (optional 0-10 Vdc) will have this output signal available on Pin 6. This output is generally available in addition to other optionally ordered outputs. This voltage is usually in the range of 0.010

Vdc for zero flow and 5.0 Vdc for full-scale flow. The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.

Optional 0-10 Vdc Output Signal

If your meter was ordered with a 0-10 Vdc output signal, it will be available on

Pin 6. (See the Calibration Data Sheet that shipped with your meter to determine which output signals were ordered.) This voltage is usually in the range of 0.010

Vdc for zero flow and 10.0 Vdc for full-scale flow. The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.

Optional Current (4-20 mA) Output Signal

If your meter was ordered with a 4-20 mA current output signal, it will be available on Pin 1. (See the Calibration Data Sheet that shipped with your meter to determine which output signals were ordered.) The current signal is 4 mA at

0 flow and 20 mA at the meter’s full scale flow. The output current is linear over the entire range. Ground for this signal is common on Pin 8. (Current output units require 15-30Vdc power.)

Optional 2nd Analog Output Signal

You may specify an optional 2nd analog output on Pin 2 at time of order. (See the Calibration Data Sheet that shipped with your meter to determine which output signals were ordered.) This output may be a 0-5 Vdc, 0-10 Vdc, or

4-20 mA analog signal that can represent any measured parameter. With this optional output, a meter could output the mass flow rate (0-5 Vdc on pin 6) and the absolute pressure (0-5 Vdc on pin 2).

If your device is CSA/ATEX approved or equipped with the optional six pin industrial connector, please contact Alicat.



11



Purple (Ground)

Red

Yellow

Purple

Red

Yellow

Purple

Red

Yellow

5

4

3 2

Unit A

Unit B

Unit C

1

9

8

7

Female Serial Cable Front

6

Typical Multiple Device (Addressable) Wiring Configuration

The easiest way to connect multiple devices is with a Multi-Drop Box

(see page 58).

12

Information for Alicat TFT (Color Display) Instruments

Alicat TFT (color display) instruments have a high contrast back-lit LCD display.

TFT instruments operate in accordance with Alicat standard operating instructions for our monochrome menus and displays with the following differences.

Multi-Color Display Color Codes:

GREEN: Green labels identify the parameters and/or adjustments associated with the button directly above or below the label.

WHITE: The color of each parameter is displayed in white while operating under normal conditions.

RED: The color of a parameter is displayed in red when operating conditions for that parameter exceed 128% of the device’s specifications.

YELLOW: Yellow is the equivalent of the selection arrow on the monochrome display.

LCD Contrast:

LCD contrast is ranged from 1 to 11 on color displays with 11 being the greatest contrast.

Display On/Off:

Pushing the button under the Alicat name will turn the device display on or off.

This feature is not available on monochrome displays.

Technical Data for TFT (Color Display) Meters, Gauges and Controllers

The following specifications are applicable to Alicat TFT (color display) meters, gauges and controllers only. All other operating specifications are shown in the

Technical Data page for standard Alicat instruments. All standard device features and functions are available and operate in accordance with the Alicat operating manual provided with the device.

Specification

Supply Voltage

Supply Current

Meter or

Gauge

7 to 30 Vdc

80 mA @ 12Vdc

70 mA @ 24Vdc

Small Valve

Controller

12 to 30 Vdc

290 mA @ 12Vdc

200 mA @ 24Vdc

Large Valve

Controller

24 to 30 Vdc

780 mA @

24Vdc

13

DISPLAYS AND MENUS

The device screen defaults to Main display as soon as power is applied to the meter.

Main

PSIA

+13.60

+

.

#C

+21.50

+0.000

CCM

+0.000

SCCM

TARE V

SCCM

Air

MENU

The Main display shows pressure, temperature, volumetric flow and mass flow.

Pressing the button adjacent to a parameter will make that parameter the primary display unit.

By hitting the MENU button at the bottom right of the screen you will enter the Select Menu display.

Totalizer (option only)

ELAPSED

TIME

MASS

TOTAL

SCCM

+0.0

BACK

0000:00:00

RESET

SCCM

MENU

If your meter was ordered with the

Totalizer option (page 55), pushing the

MENU button once will bring up the

Totalizing Mode display. Pushing MENU a second time will bring up the Select

Menu display.

Select Menu

MISC MFG

DATA

RS232

COMM

Select Menu

From Select Menu you can change the selected gas, interact with your

RS-232 / RS-485 settings or read manufacturer’s data.

Push MAIN to return to the Main display.

GAS

SELECT MAIN

14

MAIN

PSIA

+13.60

#C

+21.50

TARE V

This mode defaults on power up, with mass flow as the primary displayed parameter.

The following parameters are displayed in the Main mode.

+

+0.000

CCM

.

+0.000

SCCM

SCCM

Air

MENU

Gas Absolute Pressure: This sensor references hard vacuum and reads incoming pressure both above and below local atmospheric pressure. This parameter is moved to the primary display by pushing the button above PSIA.

The engineering unit associated with absolute pressure is pounds per square inch absolute (PSIA). This can be converted to gage pressure (PSIG) by subtracting local atmospheric pressure from the absolute pressure reading:

PSIG = PSIA – (Local Atmospheric Pressure)

LN-UP LN-DN MODE

Gas Temperature: M Series flow meters measure the incoming temperature of the gas flow. The temperature is displayed in degrees Celsius (°C). This parameter is moved to the primary display by pushing the button above °C.

>#C

#K

#F

#R

CANCEL SET

Pushing the button again allows you to select 0C (Celsius), 0K (Kelvin), 0F (Fahrenheit) or 0R (Rankine) for the temperature scale.

To select a temperature scale, use the LN-UP and LN-DN buttons to position the arrow in front of the desired scale.

Press SET to record your selection and return to the MAIN display. The selected temperature scale will be displayed on the screen.

Tare: Pushing the TARE V button tares the flow meter and provides it with a reference point for zero flow. This is an important step in obtaining accurate measurements. It is best to zero the flow meter each time it is powered up. If the flow reading varies significantly from zero after an initial tare, give the unit a minute or so to warm up and re-zero it.

If possible, zero the unit near the expected operating pressure by positively blocking the flow downstream of the flow meter prior to pushing the TARE button.

Zeroing the unit while there is any flow will directly affect the accuracy

by providing a false zero point. If in doubt about whether a zero flow condition exists, remove the unit from the line and positively block both ports before pressing the TARE button. If the unit reads a significant negative value

15

when removed from the line and blocked, it was given a false zero. It is better to zero the unit at atmospheric pressure and a confirmed no flow condition than to give it a false zero under line pressure.

Volumetric Flow Rate: This parameter is located in the lower left of the display.

It is moved to the primary display by pushing the button below CCM in this example. Your display may show a different unit of measure.

Mass Flow Rate: The mass flow rate is the volumetric flow rate corrected to a standard temperature and pressure (typically 14.696 psia and 25°C).

This parameter is located in the lower middle of the display. It can be moved to the primary display by pushing the button below SCCM in this example. Your display may show a different unit of measure preceded by the letter S.

To get an accurate volumetric or mass flow rate, the gas being measured must be selected. See Gas Select, page 18.

MENU: Pressing MENU switches the screen to the Select Menu display.

Flashing Error Message: An error message (MOV = mass overrange,

VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange) flashes when a measured parameter exceeds the range of the sensor. When any item flashes, neither the flashing parameter nor the mass flow measurement is accurate. Reducing the value of the flashing parameter to within specified limits will return the unit to normal operation and accuracy.

If the unit does return to normal operation contact Alicat.

16

SELECT MENU

From Select Menu you can change the selected gas, interact with your

RS-232 / RS-485 settings or read manufacturer’s data.

Press the button next to the desired operation to bring that function to the screen.

ZERO

BAND

PRESS

AVG

FLOW

AVG

BACK

LCD

CONTRAST MAIN

Miscellaneous

MODEL

INFO

A L I C A T S C I E N T I F I C

Ph 520-290-6060

Fax 520-290-0109

BACK MAIN

Manufacturer Data

UNIT ID

A

BAUD

19200

BACK MAIN

Communications Select

MISC MFG

DATA

RS232

COMM

PSIA

+13.60

+

.

#C

+21.50

+0.000

CCM

+0.000

SCCM

TARE V

LN-UP LN-DN

C2H6 Ethane

H2 Hydrogen

He Helium

>N2 Nitrogen

N2O Nitrous Oxide

Ne Neon

CANCEL

MODE

SET

GAS

SELECT MAIN

Select Menu

Gas Select

Main

An explanation for each screen can be found on the following pages.

SCCM

Air

MAIN

17

GAS SELECT

LN-UP LN-DN

C2H6 Ethane

H2 Hydrogen

He Helium

>N2 Nitrogen

N2O Nitrous Oxide

Ne Neon

CANCEL

MODE

SET

Gas Select is accessed by pressing the button below GAS SELECT on the Select

Menu display.

To select a gas, use the LN-UP and

LN-DN buttons to position the arrow in front of the desired gas.

Press MODE and then PG-UP or PG-DN to view a new page in the gas list.

Press SET to record your selection and return to the MAIN display. The selected gas will be displayed on the screen.

Note: Gas Select may not be available on units ordered with a custom gas or blend.

C2H2

C2H4 i-C2H10

Kr

Xe

SF6

C-25

C-10

C-8

C-2

C-75

A-75

A-25

A1025

Air

Ar

CH4

CO

CO2

C2H6

H2

He

Alicat Standard Gas Select List

Air

Argon

Methane

Carbon Monoxide

Carbon Dioxide

Ethane

Hydrogen

N2

N2O

Ne

O2

Helium

Nitrogen

Nitrous Oxide

Neon

C3H8

Oxygen

Propane

n-C4H10

normal-Butane

Star29

P-5

Acetylene

Ethylene iso-Butane

Krypton

Xenon

Sulfur Hexafluoride

75% Argon / 25% CO2

90% Argon / 10% CO2

92% Argon / 8% CO2

98% Argon / 2% CO2

75% CO2 / 25% Argon

75% Argon / 25% Helium

75% Helium / 25% Argon

90% Helium / 7.5% Argon / 2.5% CO2

(Praxair - Helistar® A1025)

90% Argon / 8% CO2 / 2% Oxygen

(Praxair - Stargon® CS)

95% Argon / 5% Methane

18

COMMUNICATION SELECT

UNIT ID

A

BACK

UNIT ID

C

UP

C

BACK RESET A SET

DN

DN

BAUD

19200

UP

BACK SET

BAUD

19200

MAIN

Access Communication Select by pressing the button above RS232 COMM or RS485

COMM on the Select Menu display.

Unit ID – Valid unit identifiers are the letters A-Z and @. The identifier allows you to assign a unique address to each device so that multiple units can be connected to a single RS-232 or RS-485 computer port.

Press UNIT ID. Use the UP and DOWN buttons to change the Unit ID. Press SET to record the ID. Press Reset to return to the previously recorded Unit ID.

Any Unit ID change will take effect when

Communication Select is exited.

If the symbol @ is selected as the Unit

ID, the device will enter streaming mode

when Communication Select is exited.

See RS-232 Communications (page 23) for information about the streaming mode.

Baud – Both this instrument and your computer must send/receive data at the same baud rate. The default baud rate for this device is 19200 baud.

Press the Select button until the arrow is in front of Baud. Use the UP and DOWN buttons to select the baud rate that matches your computer. The choices are

38400, 19200, 9600, or 2400 baud.

Any baud rate change will not take effect until power to the unit is cycled.

19

MISCELLANEOUS

Miscellaneous is accessed by pressing the MISC button on the Select Menu display.

NOTE: All Miscellaneous changes are recorded when you exit Miscellaneous.

ZERO BAND refers to Display Zero Deadband. Zero deadband is a value below which the display jumps to zero. This deadband is often desired to prevent electrical noise from showing up on the display as minor flows or pressures that do not exist.

Display Zero Deadband does not affect the analog or digital signal outputs.

ZERO BAND can be adjusted between 0 and

3.2% of the sensor’s Full Scale (FS).

ZERO

BAND

BACK

UP

PRESS

AVG

LCD

CONTRAST

DOWN

0.0

FLOW

AVG

MAIN

SELECT

Press ZERO BAND. Then use SELECT to choose the decimal with the arrow and the

UP and DOWN buttons to change the value.

Press SET to record your value. Press CLEAR to return to zero.

Pressure Averaging and Flow Averaging

may be useful to make it easier to read and interpret rapidly fluctuating pressures and flows. Pressure and flow averaging can be adjusted between 1 (no averaging) and 256

(maximum averaging). These are geometric running averages where the number between 1 and 256 can be considered roughly equivalent to the response time constant in milliseconds. This can be effective at “smoothing” high frequency process oscillations such as those caused by diaphragm pumps.

CANCEL CLEAR

UP

CANCEL

DOWN

RESET

11

SET

SET

Press PRESS AVG. Then use SELECT to choose the decimal with the arrow and the

UP and DOWN buttons to change the value.

Press FLOW AVG. Then use SELECT to choose the decimal with the arrow and the UP and

DOWN buttons to change the value. Press

SET to record your value. Press CLEAR to return to zero.

Setting a higher number will equal a smoother display.

LCD CONTRAST: The display contrast can be adjusted between 0 and 30, with zero being the lightest and 30 being the darkest.

Use the UP and DOWN buttons to adjust the contrast. Press SET when you are satisfied.

Press CANCEL to return to the MISC display.

20

MANUFACTURER DATA

MODEL

INFO

A L I C A T S C I E N T I F I C

Ph 520-290-6060

Fax 520-290-0109

BACK MAIN

Manufacturer Data is accessed by pressing the MFG DATA button on the

Select Menu display.

The initial display shows the name and telephone number of the manufacturer.

Press MODEL INFO to show important information about your flow meter including the model number, serial number, and date of manufacture.

Press BACK to return to the MFG DATA display.

Push MAIN to return to the Main display.

MODEL: M-10SLPM-D

SERIAL NO: 80003

DATE MFG: 10/7/2012

DATE CAL: 10/9/2012

CAL BY: DL

SW REV: 2V62

BACK MAIN

21

RS-232 / RS-485 Output and Input

Configuring HyperTerminal®:

1. Open your HyperTerminal® RS-232 / RS-485 terminal program (installed under the “Accessories” menu on all Microsoft Windows® operating systems).

2. Select “Properties” from the file menu.

3. Click on the “Configure” button under the “Connect To” tab. Be sure the program is set for: 19,200 baud (or matches the baud rate selected in the

RS-232 / RS-485 communications menu on the meter) and an 8-N-1-None (8

Data Bits, No Parity, 1 Stop Bit, and no Flow Control) protocol.

4. Under the “Settings” tab, make sure the Terminal Emulation is set to ANSI or Auto Detect.

5. Click on the “ASCII Setup” button and be sure the “Send Line Ends with Line

Feeds” box is not checked and the “Echo Typed Characters Locally” box and the “Append Line Feeds to Incoming Lines” boxes are checked. Those settings not mentioned here are normally okay in the default position.

6. Save the settings, close HyperTerminal® and reopen it.

In Polling Mode, the screen should be blank except the blinking cursor. In order to get the data streaming to the screen, hit the “Enter” key several times to clear any extraneous information. Type “*@=@” followed by “Enter” (or using the RS-

232 / RS-485 communication select menu, select @ as identifier and exit the screen). If data still does not appear, check all the connections and com port assignments.

Tareing via RS-232 / RS-485:

Tare –Tareing (or zeroing) the flow meter provides it with a reference point for zero flow. This is a simple but important step in obtaining accurate measurements.

It is good practice to “zero” the flow meter each time it is powered up. A unit may be Tared by following the instructions on page 10 or it may be Tared via RS-232

/ RS-485 input.

To send a Tare command via RS-232 / RS-485, enter the following strings:

In Streaming Mode: $$V<Enter>

In Polling Mode: Address$$V<Enter> (e.g. B$$V<Enter>)

22

Changing From Streaming to Polling Mode:

When the meter is in the Streaming Mode (RS-485 units do not have a streaming

mode), the screen is updated approximately 10-60 times per second (depending on the amount of data on each line) so that the user sees the data essentially in real time. It is sometimes desirable, and necessary when using more than one unit on a single RS-232 line, to be able to poll the unit.

In Polling Mode the unit measures the flow normally, but only sends a line of data when it is “polled”. Each unit can be given its own unique identifier or address.

Unless otherwise specified each unit is shipped with a default address of capital

A. Other valid addresses are B thru Z.

Once you have established communication with the unit and have a stream of information filling your screen:

1. Type *@=A followed by “Enter” (or using the RS-232 / RS-485 communication select menu, select A as identifier and exit the screen) to stop the streaming mode of information. Note that the flow of information will not stop while you are typing and you will not be able to read what you have typed. Also, the unit does not accept a backspace or delete in the line so it must be typed correctly. If in doubt, simply hit enter and start again. If the unit does not get exactly what it is expecting, it will ignore it. If the line has been typed correctly, the data will stop.

2. You may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll of unit A and returns the values once. You may type A

“Enter” as many times as you like. Alternately you could resume streaming mode by typing *@=@ followed by “Enter”. Repeat step 1 to remove the unit from the streaming mode.

3. To assign the unit a new address, type *@=New Address, e.g. *@=B. Care should be taken not to assign an address to a unit if more than one unit is on the RS-232 / RS-485 line as all of the addresses will be reassigned. Instead, each should be individually attached to the RS-232 / RS-485 line, given an address, and taken off. After each unit has been given a unique address, they can all be put back on the same line and polled individually.

23

Gas Select – The selected gas can be changed via RS-232 / RS-485 input. To change the selected gas, enter the following commands:

In Streaming Mode: $$#<Enter>

In Polling Mode: Address$$#<Enter> (e.g. B$$#<Enter>)

Where # is the number of the gas selected from the table below. Note that this also corresponds to the gas select menu on the flow meter screen:

#

20

21

22

23

16

17

18

19

24

25

26

12

13

14

15

8

9

10

11

6

7

4

5

2

3

0

1

27

28

29

GAS

Air

Argon

Methane

Carbon Monoxide

Carbon Dioxide

Ethane

Hydrogen

Helium

Nitrogen

Nitrous Oxide

Neon

Oxygen

Propane normal-Butane

Acetylene

Ethylene iso-Butane

Krypton

Xenon

Sulfur Hexafluoride

75% Argon / 25% CO2

90% Argon / 10% CO2

92% Argon / 8% CO2

98% Argon / 2% CO2

75% CO2 / 25% Argon

75% Argon / 25% Helium

75% Helium / 25% Argon

90% Helium / 7.5% Argon / 2.5% CO2


90% Argon / 8% CO2 / 2% Oxygen


95% Argon / 5% Methane

For example, to select Propane, enter: $$12<Enter>

Star29

P-5 i-C2H10

Kr

Xe

SF6

C-25

C-10

C-8

C-2

C-75

A-75

A-25

Air

Ar

CH4

CO

CO2

C2H6

H2

He

N2

N2O

Ne

O2

C3H8 n-C4H10

C2H2

C2H4

A1025

24

Collecting Data:

The RS-232 / RS-485 output updates to the screen many times per second.

Very short-term events can be captured simply by disconnecting (there are two telephone symbol icons at the top of the HyperTerminal® screen for disconnecting and connecting) immediately after the event in question. The scroll bar can be driven up to the event and all of the data associated with the event can be selected, copied, and pasted into Microsoft® Excel® or other spreadsheet program as described below.

For longer term data, it is useful to capture the data in a text file. With the desired data streaming to the screen, select “Capture Text” from the Transfer Menu.

Type in the path and file name you wish to use. Push the start button. When the data collection period is complete, simply select “Capture Text” from the Transfer

Menu and select “Stop” from the sub-menu that appears.

Data that is selected and copied, either directly from HyperTerminal® or from a text file can be pasted directly into Excel®. When the data is pasted it will all be in the selected column. Select “Text to Columns...” under the Data menu in

Excel® and a Text to Columns Wizard (dialog box) will appear. Make sure that

“Fixed Width” is selected under Original Data Type in the first dialog box and click “Next”. In the second dialog box, set the column widths as desired, but the default is usually acceptable. Click on “Next” again. In the third dialog box, make sure the column data format is set to “General”, and click “Finish”. This separates the data into columns for manipulation and removes symbols such as the plus signs from the numbers. Once the data is in this format, it can be graphed or manipulated as desired.

For extended term data capture see: “Sending a Simple Script to HyperTerminal®” on page 27.

25

Data Format:

The data stream on the screen represents the flow parameters of the main mode in the units shown on the display.

For mass flow meters, there are five columns of data representing pressure, temperature, volumetric flow, mass flow and the selected gas. The first column is absolute pressure (normally in PSIA), the second column is temperature (normally in °C), the third column is volumetric flow rate (in the units specified at time of order and shown on the display), and the fourth column is mass flow (also in the units specified at time of order and shown on the display). For instance, if the meter was ordered in units of SCFM, the display on the meter would read 2.004

SCFM and the last two columns of the output below would represent volumetric flow and mass flow in CFM and SCFM respectively.

+014.70 +025.00 +02.004 +02.004 Air

+014.70 +025.00 +02.004 +02.004 Air

+014.70 +025.00 +02.004 +02.004 Air

+014.70 +025.00 +02.004 +02.004 Air

+014.70 +025.00 +02.004 +02.004 Air

+014.70 +025.00 +02.004 +02.004 Air

M Series Mass Flow Meter Data Format

Note: On units with the totalizer function the fifth column will be the totalizer value, with gas select moving to a sixth column.

26

Sending a Simple Script File to HyperTerminal®

It is sometimes desirable to capture data for an extended period of time. Standard streaming mode information is useful for short term events, however, when capturing data for an extended period of time, the amount of data and thus the file size can become too large very quickly. Without any special programming skills, you can use HyperTerminal® and a text editing program such as Microsoft®

Word® to capture text at defined intervals.

1. Open your text editing program, MS Word for example.

2. Set the cap lock on so that you are typing in capital letters.

3. Beginning at the top of the page, type A<Enter> repeatedly. If you’re using

MS Word, you can tell how many lines you have by the line count at the bottom of the screen. The number of lines will correspond to the total number of times the flow device will be polled, and thus the total number of lines of data it will produce.

For example: A

A

A

A

A

A will get a total of six lines of data from the flow meter, but you can enter as many as you like.

The time between each line will be set in HyperTerminal.

4. When you have as many lines as you wish, go to the File menu and select save.

In the save dialog box, enter a path and file name as desired and in the “Save as

Type” box, select the plain text (.txt) option. It is important that it be saved as a generic text file for HyperTerminal to work with it.

5. Click Save.

6. A file conversion box will appear. In the “End Lines With” drop down box, select

CR Only. Everything else can be left as default.

7. Click O.K.

8. You have now created a “script” file to send to HyperTerminal. Close the file and exit the text editing program.

9. Open HyperTerminal and establish communication with your flow device as outlined in the manual.

10. Set the flow device to Polling Mode as described in the manual. Each time you type A<Enter>, the meter should return one line of data to the screen.

11. Go to the File menu in HyperTerminal and select “Properties”.

12. Select the “Settings” tab.

27

13. Click on the “ASCII Setup” button.

14. The “Line Delay” box is defaulted to 0 milliseconds. This is where you will tell the program how often to read a line from the script file you’ve created. 1000 milliseconds is one second, so if you want a line of data every 30 seconds, you would enter 30000 into the box. If you want a line every 5 minutes, you would enter 300000 into the box.

15. When you have entered the value you want, click on OK and OK in the

Properties dialog box.

16. Go the Transfer menu and select “Send Text File…” (NOT Send File…).

17. Browse and select the text “script” file you created.

18. Click Open.

19. The program will begin “executing” your script file, reading one line at a time with the line delay you specified and the flow device will respond by sending one line of data for each poll it receives, when it receives it.

You can also capture the data to another file as described in the manual under

“Collecting Data”. You will be simultaneously sending it a script file and capturing the output to a separate file for analysis.

28

Operating Principle

All M Series Gas Flow Meters (and MC Series Gas Flow Controllers) are based on the accurate measurement of volumetric flow. The volumetric flow rate is determined by creating a pressure drop across a unique internal restriction, known as a Laminar Flow

Element (LFE), and measuring differential pressure across it. The restriction is designed so that the gas molecules are forced to move in parallel paths along the entire length of the passage; hence laminar (streamline) flow is established for the entire range of operation of the device. Unlike other flow measuring devices, in laminar flow meters the relationship between pressure drop and flow is linear. The underlying principle of operation of the 16

Series flow meters is known as the Poiseuille Equation:

Q = (P

1

-P

2

)�r 4 /8ηL

Where: Q

P

P

2 r

η

L

1

=

=

=

=

=

=

(Equation 1)

Volumetric Flow Rate

Static pressure at the inlet

Static pressure at the outlet

Radius of the restriction

(eta) absolute viscosity of the fluid

Length of the restriction

Since �, r and L are constant; Equation 1 can be rewritten as:

Q = K (∆P/η) (Equation 2)

Where K is a constant factor determined by the geometry of the restriction. Equation 2 shows the linear relationship between volumetric flow rate (Q) differential pressure (∆P) and absolute viscosity (η) in a simpler form.

Gas Viscosity: In order to get an accurate volumetric flow rate, the gas being measured must be selected (see Gas Select Mode, page 14). This is important because the device calculates the flow rate based on the viscosity of the gas at the measured temperature. If the gas being measured is not what is selected, an incorrect value for the viscosity of the gas will be used in the calculation of flow, and the resulting output will be inaccurate in direct proportion to the difference in the two gases viscosities.

Gas viscosity, and thus gas composition, can be very important to the accuracy of the meter. Anything that has an effect on the gas viscosity (e.g. water vapor, odorant additives, etc.) will have a direct proportional effect on the accuracy. Selecting methane and measuring natural gas for instance, will result in a fairly decent reading, but it is not highly accurate (errors are typically < 0.6%) because natural gas contains small and varying amounts of other gases such as butane and propane that result in a viscosity that is somewhat different than pure methane.

Absolute viscosity changes very little with pressure (within the operating ranges of these meters) therefore a true volumetric reading does not require a correction for pressure.

Changes in gas temperature do affect viscosity. For this reason, the M Series internally compensates for this change.

29

Other Gases: M Series Flow Meters can easily be used to measure the flow rate of gases other than those listed as long as “non-corrosive” gas compatibility is observed. For example, a flow meter that has been set for air can be used to measure the flow of argon.

The conversion factor needed for measuring the flow of different gases is linear and is simply determined by the ratio of the absolute viscosity of the gases. This factor can be calculated as follows:

Q og

= Q

1

[η

1

/ η og

]

Where: Q

1

η

1

Q

= Flow rate indicated by the flow meter

= Viscosity of the calibrated gas at the measured temp.

og

η og

= Flow rate of the alternate gas

= Viscosity of the alternate gas at the measured temp.

Say we have a meter set for air and we want to flow argon through it. With argon flowing through the meter, the display reads 110 SLPM. For ease of calculation, let us say the gas temperature is 25°C. What is the actual flow of argon?

Q og

Q

1

η

1

η og

= Actual Argon Flow Rate

= Flow rate indicated by meter (110 SLPM)

= Viscosity of gas selected or calibrated for by the meter at the measured temp.

= Viscosity of gas flowing through the meter at the measured temp.

At 25°C, the absolute viscosity of Air (η

1

) is 184.918 micropoise.

At 25°C, the absolute viscosity of Argon (η og

) is 225.593 micropoise.

Q og

Q

Q og og

= Q1 (η 1 / η og

)

= 110 SLPM (184.918 / 225.593)

= 90.17 SLPM

So, the actual flow of Argon through the meter is 90.17 SLPM. As you can see, because the

Argon gas is more viscous than the Air the meter is set for, the meter indicates a higher flow than the actual flow.

A good rule of thumb is: “At a given flow rate, the higher the viscosity, the higher the indicated flow.”

Volume Flow vs. Mass Flow: At room temperature and low pressures the volumetric and mass flow rate will be nearly identical, however, these rates can vary drastically with changes in temperature and/or pressure because the temperature and pressure of the gas directly affects the volume. For example, assume a volumetric flow reading was used to fill balloons with 250 mL of helium, but the incoming line ran near a furnace that cycled on and off, intermittently heating the incoming helium. Because the volumetric meter simply measures the volume of gas flow, all of the balloons would initially be the same size. However, if all the balloons are placed in a room and allowed to come to an equilibrium temperature, they would generally all come out to be different sizes. If, on the other hand, a mass flow reading were used to fill the balloons with 250 standard mL of helium, the resulting balloons would initially be different sizes, but when allowed to come to an equilibrium temperature, they would all turn out to be the same size.

This parameter is called corrected mass flow because the resulting reading has been compensated for temperature and pressure and can therefore be tied to the mass of the gas. Without knowing the temperature and pressure of the gas and thus the density, the mass of the gas cannot be determined.

30

Once the corrected mass flow rate at standard conditions has been determined and the density at standard conditions is known (see the density table at the back of this manual), a true mass flow can be calculated as detailed in the following example:

Mass Flow Meter Reading = 250 SCCM (Standard Cubic Centimeters/Minute)

Gas: Helium

Gas Density at 25C and 14.696 PSIA = .16353 grams/Liter

True Mass Flow = (Mass Flow Meter Reading) X (Gas Density)

True Mass Flow = (250 CC/min) X (1 Liter / 1000 CC) X (.16353 grams/Liter)

True Mass Flow = 0.0409 grams/min of Helium

Volumetric and Mass Flow Conversion: In order to convert volume to mass, the density of the gas must be known. The relationship between volume and mass is as follows:

Mass = Volume x Density

The density of the gas changes with temperature and pressure and therefore the conversion of volumetric flow rate to mass flow rate requires knowledge of density change. Using ideal gas laws, the effect of temperature on density is:

ρ a

/ ρ s

= T s

/ T a

Where: ρ a

T a

ρ

T s s

ºK

=

=

=

=

= density @ flow condition absolute temp @ flow condition in °Kelvin density @ standard (reference ) condition absolute temp @ standard (reference) condition in °Kelvin

ºC + 273.15 Note: ºK=ºKelvin

The change in density with pressure can also be described as:

ρ a

/ ρ s

= P a

/ P s

Where: ρ a

P a

ρ

P s s

=

=

=

= density @ flow condition flow absolute pressure density @ standard (reference ) condition

Absolute pressure @ standard (reference) condition

Therefore, in order to determine mass flow rate, two correction factors must be applied to volumetric rate: temperature effect on density and pressure effect on density.

Compressibility: Heretofore, we have discussed the gases as if they were “Ideal” in their characteristics. The ideal gas law is formulated as:

PV=nRT where: P = Absolute Pressure

V = Volume (or Volumetric Flow Rate) n = number moles (or Molar Flow Rate)

R = Gas Constant (related to molecular weight)

T = Absolute Temperature

Most gases behave in a nearly ideal manner when measured within the temperature and pressure limitations of Alicat products. However, some gases (such as propane and butane) can behave in a less than ideal manner within these constraints. The non-ideal gas law is formulated as:

PV=ZnRT

Where: “Z” is the compressibility factor. This can be seen in an increasingly blatant manner as gases approach conditions where they condense to liquid. As the compressibility factor goes down (Z=1 is the ideal gas condition), the gas takes up less volume than what one would expect from the ideal gas calculation.

31

This reduces to: Pa Va / Za Ta = Ps Vs / Zs Ts , eliminating R and n.

Alicat mass flow meters model gas flows based upon the non-ideal gas characteristics of the calibrated gas. The flow corrections are normally made to 25 C and 14.696 PSIA and the compressibility factor of the gas under those conditions. This allows the user to multiply the mass flow rate by the density of the real gas at those standard conditions to get the mass flow rate in grams per minute.

Because we incorporate the compressibility factor into our ‘full gas model’; attempts to manually compute mass flows from only the P, V, and T values shown on the display will sometimes result in modest errors.

Note: Although the correct units for mass are expressed in grams, kilograms, etc. it has become standard that mass flow rate is specified in SLPM (standard liters / minute), SCCM

(standard cubic centimeters / minute) or SmL/M (standard milliliters / minute).

This means that mass flow rate is calculated by normalizing the volumetric flow rate to some standard temperature and pressure (STP). By knowing the density at that STP, one can determine the mass flow rate in grams per minute, kilograms per hour, etc.

STP is usually specified as the sea level conditions; however, no single standard exists for this convention. Examples of common reference conditions include:

0°C

25°C

0°C

70°F

68°F

20°C and and and and and and

14.696 PSIA

14.696 PSIA

760 torr (mmHG)

14.696 PSIA

29.92 inHG

760 torr (mmHG)

M Series Flow Meters reference 25ºC and14.696 PSIA (101.32kPa) - unless ordered otherwise and specified in the notes field of the calibration sheet.

STANDARD GAS DATA TABLES: Those of you who have older Alicat products (manufactured before October 2005) may notice small discrepancies between the gas property tables of your old and new units. Alicat Scientific, Inc. has incorporated the latest data sets from

NIST (including their REFPROP 7 data) in our products’ built-in gas property models. Be aware that the calibrators that you may be using may be checking against older data sets such as the widely distributed Air Liquide data.

This may generate apparent calibration discrepancies of up to 0.6% of reading on well behaved gases and as much as 3% of reading on some gases such as propane and butane, unless the standard was directly calibrated on the gas in question.

As the older standards are phased out of the industry, this difference in readings will cease to be a problem. If you see a difference between the Alicat meter and your in-house standard, in addition to calling Alicat Scientific at (520) 290-6060, call the manufacturer of your standard for clarification as to which data set they used in their calibration. This comparison will in all likelihood resolve the problem.

32

Gas

Number

21

22

23

16

17

18

19

20

24

25

26

11

12

13

14

15

8

9

6

7

10

3

4

5

0

1

2

27

28

Short

Form i-C4H10

Kr

Xe

SF6

C-25

C-10

C-8

C-2

C-75

A-75

A-25

Air

Ar

CH4

CO

CO2

C2H6

H2

He

N2

N2O

Ne

O2

C3H8 n-C4H10

C2H2

C2H4

A1025

Star29

Long Form

Air

Argon

Methane

Carbon Monoxide

Carbon Dioxide

Ethane

Hydrogen

Helium

Nitrogen

Nitrous Oxide

Neon

Oxygen

Propane normal-Butane

Acetylene

Ethylene iso-Butane

Krypton

Xenon

Sulfur Hexafluoride

75% Argon / 25% CO2

90% Argon / 10% CO2

92% Argon / 8% CO2

98% Argon / 2% CO2

75% CO2 / 25% Argon



90% Helium / 7.5% Argon /

2.5% CO2


90% Argon / 8% CO2

/ 2% Oxygen


74.988

251.342

229.785

153.532

205.615

217.529

219.134

223.973

167.451

230.998

234.306

Viscosity*

25 deg C

14.696 PSIA

184.918

225.593

111.852

176.473

149.332

93.540

89.153

198.457

178.120

148.456

311.149

204.591

81.458

74.052

104.448

103.177

214.840

218.817

0.3146

1.6410

1.0003

0.9992

29 P-5 95% Argon / 5% Methane 223.483

*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter

1.5850

0.9993

(NIST REFPROP 7 database)

2.4403

3.4274

5.3954

6.0380

1.6766

1.6509

1.6475

1.6373

1.7634

1.2660

0.5306

Density**

25 deg C

14.696 PSIA

1.1840

1.6339

0.6569

1.1453

1.8080

1.2385

0.08235

0.16353

1.1453

1.8088

0.8246

1.3088

1.8316

2.4494

1.0720

1.1533

Compressibility

25 deg C

14.696 PSIA

0.9997

0.9994

0.9982

0.9997

0.9949

0.9924

1.0006

1.0005

0.9998

0.9946

1.0005

0.9994

0.9841

0.9699

0.9928

0.9943

0.9728

0.9994

0.9947

0.9887

0.9987

0.9991

0.9992

0.9993

0.9966

0.9997

1.0002

Gas Viscosities, Densities and Compressibilities at 25° C

33

Gas

Number

11

12

13

14

15

8

9

6

7

10

3

4

5

0

1

2

16

17

18

19

20

21

Short

Form

Air

Ar

CH4

CO

CO2

C2H6

H2

He

N2

N2O

Ne

O2

C3H8 n-C4H10

C2H2

C2H4 i-C4H10

Kr

Xe

SF6

C-25

C-10

Long Form

Air

Argon

Methane

Carbon Monoxide

Carbon Dioxide

Ethane

Hydrogen

Helium

Nitrogen

Nitrous Oxide

Neon

Oxygen

Propane normal-Butane

Acetylene

Ethylene iso-Butane

Krypton

Xenon

Sulfur Hexafluoride

75% Argon / 25% CO2

90% Argon / 10% CO2

Viscosity*

0 deg C

14.696 PSIA

172.588

209.566

103.657

165.130

137.129

86.127

83.970

186.945

166.371

136.350

293.825

190.555

74.687

67.691

97.374

94.690

68.759

232.175

212.085

140.890

190.579

201.897

Density**

0 deg C

14.696 PSIA

1.2927

1.7840

0.7175

1.2505

1.9768

1.3551

0.08988

0.17849

1.2504

1.9778

0.8999

1.4290

2.0101

2.7048

1.1728

1.2611

2.6893

3.7422

5.8988

6.6154

1.8309

1.8027

Compressibility

0 deg C

14.696 PSIA

0.9994

0.9991

0.9976

0.9994

0.9933

0.9900

1.0007

1.0005

0.9995

0.9928

1.0005

0.9990

0.9787

0.9587

0.9905

0.9925

0.9627

0.9991

0.9931

0.9850

0.9982

0.9987

22 C-8 92% Argon / 8% CO2 203.423

1.7989

0.9988

23

24

25

26

27

28

29

C-2

C-75

A-75

A-25

A1025

Star29

P-5

98% Argon / 2% CO2

75% CO2 / 25% Argon



90% Helium / 7.5% Argon

/ 2.5% CO2

(Praxair - Helistar®

A1025)

90% Argon / 8% CO2

/ 2% Oxygen


95% Argon / 5% Methane

208.022

154.328

214.808

218.962

201.284

203.139

207.633

1.7877

1.9270

1.3821

0.5794

0.3434

1.7918

1.7307

0.9990

0.9954

0.9995

1.0002

1.0002

0.9988

0.9990

*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter

(NIST REFPROP 7 database)

Gas Viscosities, Densities and Compressibilities at 0° C

34

TROUBLESHOOTING

Display does not come on or is weak.

Check power and ground connections. Please reference the technical specifications (pages 38-41) to assure you have the proper power for your model.

Flow reading is approximately fixed either near zero or near full scale regardless of actual line flow.

Differential pressure sensor may be damaged. Avoid installations that can subject sensor to pressure drops in excess of 10 PSID. A common cause of this problem is instantaneous application of high-pressure gas as from a snap acting solenoid valve upstream of the meter. If you suspect that your pressure sensor is damaged please discontinue use of the meter and contact Alicat.

Displayed mass flow, volumetric flow, pressure or temperature is flashing and message MOV, VOV, POV or TOV is displayed:

Our flow meters and controllers display an error message (MOV = mass overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange) when a measured parameter exceeds the range of the sensors in the device. When any item flashes on the display, neither the flashing parameter nor the mass flow measurement is accurate. Reducing the value of the flashing parameter to within specified limits will return the unit to normal operation and accuracy. If the unit does not return to normal contact Alicat.

Meter reads negative flow when there is a confirmed no flow condition.

This is an indication of an improper tare. If the meter is tared while there is flow, that flow is accepted as zero flow. When an actual zero flow condition exists, the meter will read a negative flow. Simply re-tare at the confirmed zero flow condition. Also note that while the meter is intended for positive flow, it will read negative flow with reasonable accuracy, but not to the full scale flow rate

(it is not calibrated for bi-directional flow) and no damage will result.

Meter does not agree with another meter I have in line.

Volumetric meters are affected by pressure drops. Volumetric flow meters should not be compared to mass flow meters. Mass flow meters can be compared against one another provided there are no leaks between the two meters and they are set to the same standard temperature and pressure. Both meters must also be calibrated (or set) for the gas being measured. M Series mass flow meters are normally set to Standard Temperature and Pressure conditions of 25° C and 14.696 PSIA. Note: it is possible to special order meters with a customer specified set of standard conditions. The calibration sheet provided with each meter lists its standard conditions.

When performing this comparison it is best to use the smallest transition possible between the two devices. Using small transitions will minimize lag and dead volume.

35

Flow flutters or is jumpy.

The meters are very fast and will pick up any actual flow fluctuations such as from a diaphragm pump, etc. Also, inspect the inside of the upstream connection for debris such a Teflon tape shreds.

Note: M Series meters feature a programmable geometric running average (GRA) that can aid in allowing a rapidly fluctuating flow to be read (see “Pressure Averaging” and

“Flow Averaging” page 20).

The output signal is lower than the reading at the display.

This can occur if the output signal is measured some distance from the meter, as voltage drops in the wires increase with distance. Using heavier gauge wires, especially in the ground wire, can reduce this effect.

RS-232 / RS-485 Serial Communications is not responding.

Check that your meter is powered and connected properly. Be sure that the port on the computer to which the meter is connected is active. Confirm that the port settings are correct per the RS-232 instructions in this manual (Check the RS-232 / RS-485 communications select screen for current meter readings).

Close Hyperterminal® and reopen it. Reboot your PC. See pages 10, 11 and 22 for more information on RS-232 / RS-485 signals and communications.

Slower response than specified.

M Series Meters feature a programmable Geometric Running Average

(GRA). Depending on the full scale range of the meter, it may have the GRA set to enhance the stability/readability of the display, which would result in slower perceived response time. Please see “Pressure Averaging” and “Flow

Averaging” on page 20.

Jumps to zero at low flow.

M Series Meters feature a programmable zero deadband. The factory setting is usually 0.5% of full scale. This can be adjusted between NONE and 3.2% of full scale. See page 20.

Discrepancies between old and new units.

Please see “Standard Gas Data Tables” explanation on page 32.

36

Maintenance and Recalibration

General: M Series Flow Meters require minimal maintenance. They have no moving parts. The single most important thing that affects the life and accuracy of these devices is the quality of the gas being measured. The meter is designed to measure CLEAN, DRY, NON-CORROSIVE gases. A 20 micron filter (50 micron for 50LPM and up) mounted upstream of the meter is highly recommended.

Moisture, oil, and other contaminants can affect the laminar flow elements and/or reduce the area that is used to calculate the flow rate. This directly affects the accuracy.

Recalibration: The recommended period for recalibration is once every year.

A label located on the back of the meter lists the most recent calibration date.

The meter should be returned to the factory for recalibration within one year from the listed date. Before calling to schedule a recalibration, please note the serial number on the back of the meter. The Serial Number, Model Number, and

Date of Manufacture are also available on the Model Info display (page 21).

Cleaning: M Series Flow Meters require no periodic cleaning. If necessary, the outside of the meter can be cleaned with a soft dry cloth. Avoid excess moisture or solvents.

For repair, recalibration or recycling of this product contact:

Alicat Scientific, Inc.

7641 N Business Park Drive

Tucson, Arizona 85743

USA

Ph. 520-290-6060

Fax 520-290-0109 e-mail: [email protected]

Web site: www.alicat.com

37

Technical Data for Micro-Flow and Ultra-Low Flow M Mass Flow Meters

0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale

The following specifications are for the standard configuration of the product. There are many options available.

Specification

Accuracy

High Accuracy Option

Accuracy: Bi-directional

Meters Only

Repeatability

Operating Range

Turndown Ratio

Typical Response Time

Standard Conditions

(STP)

Operating Temperature

Zero Shift

Span Shift

Humidity Range

Measurable Flow Rate

Maximum Pressure

Output Signal Digital

Output Signal Analog

Optional Output Signal

Secondary Analog

Electrical Connections

Supply Voltage

Mass Meter

Description

± (0.8% of Reading + 0.2% of Full Scale)

At calibration conditions after tare



± (0.8% of reading + 0.2% of total span

At calibration conditions after tare positive full scale to negative full scale)

± 0.2% Full Scale

1/2% to 100%

200 : 1

10

Full Scale

25ºC & 14.696PSIA

−10 to +50

0.02%

0.02%

0 to 100%

128%

145

Milliseconds (Adjustable)

Mass

Conditions

Reference

ºCelsius

Full Scale / ºCelsius / Atm


Non–Condensing

Full Scale

Mass Flow, Volume Flow,

Pressure & Temperature

Mass Flow

Mass Flow, Volumetric Flow

Pressure or Temperature

8 Pin Mini-DIN, DB9 or DB15

7 to 30 Vdc (15-30Vdc for 4-20mA outputs)

0.040 Amp (+ output current on 4-20mA)

PSIG

RS-232 Serial or RS-485

Serial or PROFIBUS or

DeviceNet™

1

0-5Vdc

0-5 Vdc or 0-10Vdc or 4-20mA

Supply Current

Mounting Attitude

Sensitivity

Warm-up Time

0% Tare after installation

Wetted Materials

2

< 1 Second

303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass

Reinforced Nylon, Aluminum.

1. If selecting PROFIBUS or DeviceNet™ no analog signal is available. PROFIBUS /

DeviceNet™ units do not have the display. See PROFIBUS or DeviceNet™ specifications for

PROFIBUS or DeviceNet™ supply voltages and currents.

2. If your application demands a different material, please contact [email protected] or 888-290-6060 for available options.

Mechanical Specifications

Full Scale Flow Mass

Meter

0.5SCCM to 1SCCM

2SCCM to 50SCCM

Mechanical

Dimensions

3.9”H x 2.4”W x 1.1”D

Process

Connections

1

M-5 (10-32) Female

Thread*

Pressure Drop

(PSID)

1.0

1.0

Units ≤50SCCM F.S. are shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female

2

NPT fittings. These adaptor fittings were selected for customer convenience in process connection. It should be noted that the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see Accessories for the 10-32 Male to 1/8”OD compression fitting.

1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings.

2. Venting to atmosphere. Lower Pressure Drops Available, please contact [email protected] or

888-290-6060.

0.5SCCM to 50SCCM approximate shipping weight: 0.8lb

38

Technical Data for Low Flow M Mass Flow Meters

0 to 100 SCCM Full Scale through 0 to 20 SLPM Full Scale


Specification

Accuracy



Meters Only

Repeatability

Operating Range

Turndown Ratio


Standard Conditions

(STP)


Zero Shift

Span Shift

Humidity Range


Maximum Pressure




Secondary Analog

Mass, Volumetric


Electrical Connections 8 Pin Mini-DIN, DB9 or DB15

Supply Voltage 7 to 30 Vdc (15-30Vdc for 4-20mA outputs)

Supply Current

Mounting Attitude

Sensitivity

Warm-up Time

Mass Meter

Description





± (0.8% of reading + 0.2% of total span

At calibration conditions after tare positive full scale to negative full scale)

± 0.2% Full Scale

1/2% to 100%

200 : 1

10

Full Scale

25ºC & 14.696PSIA

−10 to +50

0.02%

0.02%

0 to 100%

128%

145


Mass

Conditions

Reference

ºCelsius



Non–Condensing

Full Scale

Mass, Volume,


Mass Flow


0%

< 1

PSIG



DeviceNet™

1

0-5Vdc


Tare after installation

Second

Wetted Materials

2









Meter

Mechanical

Dimensions

Process

Connections

1

Pressure Drop

(PSID)

2

100SCCM to 20SLPM 4.1”H x 2.4”W x 1.1”D 1/8” NPT Female 1.0



888-290-6060.

100SCCM to 20SLPM approximate shipping weight: 1.0lb

39

Technical Data for Moderate Flow M Mass Flow Meters

0 to 50 SLPM Full Scale through 0 to 250 SLPM Full Scale


Specification

Accuracy



Meters Only

Repeatability

Operating Range

Turndown Ratio


Standard Conditions

(STP)


Zero Shift

Span Shift

Humidity Range


Maximum Pressure


Mass Meter

Description





± (0.8% of reading + 0.2% of total span positive full scale to negative full scale)


± 0.2%

1/2% to 100%

200 : 1

10

Full Scale

Full Scale

25ºC & 14.696PSIA


Mass Reference

Conditions

ºCelsius −10 to +50

0.02%

0.02%

0 to 100%

128%

145

Mass Flow, Volumetric Flow,




Non–Condensing

Full Scale

PSIG



DeviceNet™

1



Secondary Analog


Supply Voltage

Mass Flow

Mass Flow, Volumetric





0-5Vdc


Supply Current

Mounting Attitude

Sensitivity


Warm-up Time < 1 Second


Wetted Materials 2


1.If selecting PROFIBUS or DeviceNet™ no analog signal is available. PROFIBUS /






Meter

50SLPM

100SLPM

250SLPM

Mechanical

Dimensions

4.4”H x 4.0”W x 1.6”D

5.0”H x 4.0”W x 1.6”D

Process

Connections

1

1/4” NPT Female

1/2” NPT Female

Pressure Drop

(PSID)

2.0

2.5

2.1

2



888-290-6060.

50SLPM approximate shipping weight: 2.2 lb.



40

Technical Data for High Flow M Mass Flow Meters

0 to 500 SLPM Full Scale through 0 to 3000 SLPM Full Scale


Specification

Accuracy


1


Meters Only

Repeatability

Operating Range

Turndown Ratio


Standard Conditions

(STP)


Zero Shift

Span Shift

Humidity Range


Maximum Pressure




Secondary Analog


Supply Voltage

Mass Meter Description





± (0.8% of reading + 0.2% of total span positive full scale to negative full scale)


± 0.2%

1/2% to 100%

200 : 1

10

25ºC & 14.696PSIA

−10 to +50

0.02%

0.02%

0 to 100%

128%

145

Mass Flow, Volumetric Flow,


Mass Flow

Mass Flow, Volumetric Flow





Full Scale

Full Scale


Mass Reference

Conditions

ºCelsius



Non–Condensing

Full Scale

PSIG



DeviceNet™

1

0-5Vdc


Supply Current

Mounting Attitude

Sensitivity


Warm-up Time < 1 Second


Wetted Materials

3


1. High Accuracy option not available for units ranged over 500SLPM.







Meter

500SLPM

1000SLPM

1500SLPM

Mechanical

Dimensions

5.0”H x 4.0”W x 1.6”D

Process

Connections

1

3/4” NPT Female

3

Pressure Drop

5.5

6.0

9.0

2

(PSID)

2000SLPM

3000SLPM

5.3”H x 5.2”W x 2.9”D

5.3”H x 5.2”W x 2.9”D 1-1/4” NPT Female

5.0

7.1



888-290-6060.

3. A 1.25” NPT Female optional process fitting is available for 2000SLPM meters

500SLPM to 1500SLPM approximate shipping weight: 3.5lb

2000SLPM to 3000SLPM approximate shipping weight: 4.5lb

41







 



  







 





M Series:

0 – 0.5SCCM

0 – 1SCCM

0 – 2SCCM

0 – 5SCCM

0 – 10SCCM

0 – 20SCCM

0 – 50SCCM

















 















M Series:

0 – 100SCCM

0 – 200SCCM

0 – 500SCCM

0 – 1SLPM

0 – 2SLPM

0 – 5SLPM

0 – 10SLPM

0 – 20SLPM



42



M Series:

0 – 50SLPM

0 – 100SLPM









  































  











M Series:

0 – 250SLPM







43











  













M Series:

0 – 500SLPM

0 – 1000SLPM

0 – 1500SLPM





























  



 





M Series:

0 – 2000SLPM





44









  

 











   





M Series:

0 – 3000SLPM







45

Technical Data for Alicat MS Series Mass Flow Meters

Alicat MS instruments are built for use with aggressive gases. For the most part, these instruments maintain the specifications of equivalently ranged M Series devices.

Standard Compatible Gas List for MS Series Meters

0

1

2

3 Carbon Monoxide

8

9

10

11

14

15

6

7

4

5

16

17

Air

Argon

Methane

Carbon Dioxide

Ethane

Hydrogen

Helium

Nitrogen

Nitrous Oxide

Neon

Oxygen

Acetylene

Ethylene iso-Butane

Krypton

18 Xenon

19 Sulfur Hexafluoride

20 75%Ar / 25% CO2

21 90% Ar / 10% CO2

22 92% Ar / 8% CO2

Air

Ar

CH4

CO

CO2

C2H6

H2

He

N2

N2O

Ne

O2

12 Propane C3H8

13 normal-Butane n-C4H10

C2H2

C2H4

i-C4H10

Kr

Xe

SF6

C-25

C-10

C-8

23 98% Ar / 2% CO2

24 75% CO2 / 25% Ar

25 75% Ar / 25% He

26 75% He / 25% Ar

27

90% He / 7.5% Ar /

2.5% CO2

Helistar® A1025

90% Ar / 8% CO2 /

28

29

30

2% O2

Stargon® CS

95% Ar / 5% CH4

Nitric Oxide

32

33

Ammonia

Chlorine Gas

34 Hydrogen Sulfide

35

Star29

P-5

NO

31 Nitrogen Triflouride NF3

36

Sulfur Dioxide

Propylene

C-2

C-75

A-75

A-25

A1025

NH3

Cl2

H2S

SO2

In addition, the following gases are available upon request:

Nitrogen Dioxide to 0.5% in an inert carrier

Refrigerant gases to 100%

C3H6

NO2

If your application requires another gas or gas mixture, please contact

[email protected] or call 888-290-6060. We will do our best to accommodate your request.

Please refer to the Technical Data for the equivalently ranged M Series instrument for all operating specifications except:

Operating Range

Turndown Ratio

Wetted Materials

1% to 100% Full Scale

100 : 1

316LSS, FFKM (Kalrez) standard; Viton, EPDM, as needed for some gases.

The dimensions of MS instruments may vary from their standard M Series counterparts. Dimensional drawings for MS instruments are shown on pages 47-50.

46











 







 







MS Series:

0 – 0.5SCCM

0 – 1SCCM

0 – 2SCCM

0 – 5SCCM

0 – 10SCCM

0 – 20SCCM

0 – 50SCCM













 







 







MS Series:

0 – 100SCCM

0 – 200SCCM

0 – 500SCCM

0 – 1SLPM

0 – 2SLPM

0 – 5SLPM

0 – 10SLPM

0 – 20SLPM





47



MS Series:

0 – 50SLPM

0 – 100SLPM











  

















MS Series:

0 – 250SLPM

48

MS Series:

0 – 500SLPM

0 – 1000SLPM

0 – 1500SLPM

49

MS Series:

0 – 2000SLPM













  

 











MS Series:

0 – 3000SLPM

   







Technical Data for Alicat MQ Series Mass Flow Meters

Alicat MQ mass flow meters are for high pressure applications. The flow rate is dependent on the pressure in that lower pressures will yield lower flow rates.

The Q series devices are highly specialized and should only be ordered after consulting Alicat.

MQ flow meters are calibrated for operation at high pressure. Optimal performance is achieved at higher operating pressures.

Minimum Operating Pressure – 30PSIA

Maximum Operating Pressure – 320PSIA

NOTE: Volumetric flow is reduced as compared to mass range with a typical

50% reduction. This may vary based on application or customer requirements

Please refer to the Technical Data for the equivalently ranged M Series instrument for all operating specifications except:

Operating Range

Turndown Ratio

Wetted Materials

1% to 100%

100 : 1

Full Scale

316LSS, FFKM (Kalrez) standard; Viton, EPDM, as needed for some gases.

The dimensions of MQ instruments are equal to those of their MS counterparts.

Dimensional drawings for MS instruments are shown on page 45-47.

50

Technical Data for PROFIBUS Meters, Gauges and Controllers

NOTICE: The following specifications are applicable to Alicat PROFIBUS enabled meters, gauges and controllers only.

All other operating specifications are shown in the Technical Data page for standard Alicat instruments.

All standard device features and functions are available and operate in accordance with the standard Alicat Scientific device operating manual provided with the device.

Specification

Input /Output Signal Digital


Supply Voltage:

Supply Current

Meter or

Gauge

7 to 30 Vdc

80mA @ 12Vdc

65mA @ 24Vdc

Small Valve

Controller

DB9

12 to 30 Vdc

295mA @ 12Vdc

280mA @ 24Vdc

Power and Signal Connections:

Connect to the device using two DB9 connectors.

The female top connection is PROFIBUS.

The male connection on the side is power and

RS-232 or RS-485.

Pin out diagrams for all PROFIBUS enabled

Alicat devices are shown:

Large Valve

Controller

24 to 30 Vdc

780mA @ 24Vdc

5

9

TOP

1. NC

2. OPT GND

3. DP

4. RTS

5. DGD

6. VP

7. OPT 7 to 30VDC

8. DN

9. NC

1

6

Description

PROFIBUS DP

SIDE

1

6

1. NC

2. RS232RX

3. RS232TX

4. NC

5. GND

6. NC

7. 7 to 30VDC

8. GND

9. NC

5

9

1/8 NPT

Both Sides

.525

1.05

.35

.150

3.59

3.76

2.225

4.08

4.26

.35

.525

2 x 8-32 UNC

┬v

.350

.125

.925

MC-1SLPM-PROFIBUS

PROFIBUS MC1SLPM shown to provide PROFIBUS connector dimensions only. Flow body and valve dimensions will vary with range. Please see Alicat’s device specifications for complete dimensions.

PROFIBUS units do not have a display screen.

51

Information for Alicat DeviceNet™ Compatible Instruments

DeviceNet™ OVERVIEW

Alicat DeviceNet™ compatible instruments support the Predefined Master/

Slave Connection Set.

There are two connectors on the Alicat meter/controller. The DeviceNet™ standard M12 Micro Connector found on the top of the unit is required for

DeviceNet™ operations.

The other connector is a DB9 (on the side of the unit) provided for convenience and is not necessary for operation of the DeviceNet™ compatible Alicat meter/ controller. The DB9 connector can be used for RS-232 communication (see DB9 pin-out as shown Below).

DeviceNet™ CONNECTION

Utilizing the standard DeviceNet™ M12 micro connector allows the Alicat meter/controller to be easily attached to a DeviceNet™ network.

2

3

4

5

The pin out as defined in Volume Three of the DeviceNet™ Standard applies and is repeated here.

PIN

1

Description

Drain

Wire Color

Bare

V+ (24VDC)

V- (GND)

CAN-H

CAN-L

RED

BLACK

WHITE

BLUE

MAC ID

All devices on a DeviceNet™ must have unique MAC ID. Alicat units can either be programmed with a customer requested ID or they will be defaulted to 63.

In either case when an Alicat unit is attached to a DeviceNet™ and powered up it will send out a duplicate MAC request.

If there already is a device on the network with the same address, the Alicat device will decrement its address and try again until it finds an unoccupied address. Once it finds a unique address, it stores that address into its nonvolatile memory, enabling it to come back on at the same address.

To utilize the DB9 pinout on your DeviceNet™ compatible instrument, follow the pin-out diagram shown here.

Side

1

6

1. NC

2. RS232RX

3. RS232TX

4. NC

5. GND

6. NC

7. 7 to 30VDC

8. GND

9. NC

5

9

52

BAUD RATE

The following baud rates are available: 125K 250K 500K

The default baud rate is 125K Baud. You may specify the baud rate at the time of order.

The baud rate can be changed by using a set attribute single DeviceNet™ service request to the DeviceNet™ Object Class 03 Instance 01 Attribute ID 02.

A setting of 0 is 125K baud, 1 is 250K baud, and 2 is 500K baud. In order for a change of baud rate to take affect the unit will have to be power cycled.

SUPPORTED DEVICE TYPE: Mass Flow Controller Device Type 0x1A

SUPPORTED CLASSES: Identity Object Class 0x01

SUPPORTED ATTRIBUTES:

5

6

7

Attribute Services Description

3

4

1

2

Get

Get

Get

Get

Vendor ID

Device Type

Default Value

1174 (0x0496)

0x1A (Mass Flow)

Product Code See Product Codes

Revision (Maj, Min) 0x01,0x01

Get

Get

Get

Status

Serial Number

Product Name

0x00

0x########

Alicat Scientific Inc MFC

DeviceNet™ Object Class 0x03 DeviceNet™ Assembly Object Class 0x04

Connection Object Class 0x05 S-Device Supervisor Class 0x30

53





Technical Data for DeviceNet™ Meters, Gauges and Controllers

NOTICE: The following specifications are applicable to Alicat DeviceNet™ enabled meters, gauges and controllers only.

All other operating specifications are shown in the Technical Data page for standard Alicat instruments.

All standard device features and functions are available and operate in accordance with the standard Alicat operating manual provided with the device.

Specification

Input /Output Signal

Digital


Supply Voltage:

Supply Current



Meter or

Gauge

Small Valve

Controller

Large Valve

Controller



7 to 30 Vdc

80mA @ 12Vdc

65mA @ 24Vdc

M12 Micro Connector

12 to 30 Vdc 24 to 30 Vdc

295mA @ 12Vdc

280mA @ 24Vdc 780mA @ 24Vdc

  



Description

DeviceNet™

 





























 





Rev. No.

   



Description Date







































 complete dimensions.

   

DeviceNet™ units do not have a display screen.





  















Alicat Scientific, Inc.

2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745

520-290-6060 Ph. 520-290-0109 Fax









54

Option: Totalizing Mode

Meters and Controllers can be purchased with the Totalizing Mode option. This option adds an additional mode screen that displays the total flow (normally in the units of the main flow screen) that has passed through the device since the last time the totalizer was cleared.

The Totalizing Mode screen is accessed by pushing the TOTAL button on the MAIN display.

ELAPSED

TIME

MASS

TOTAL

SCCM

+0.0

0000:00:00

BACK RESET

SCCM

MENU

MASS TOTAL – The counter can have as many as six digits. At the time of order, the customer must specify the range. This directly affects the maximum count. For instance, if a range of 1/100ths of a liter is specified on a meter which is totalizing in liters, the maximum count would be 9999.99 liters. If the same unit were specified with a 1 liter range, the maximum count would be 999999 liters.

Rollover – The customer can also specify at the time of order what the totalizer is to do when the maximum count is reached. The following options may be specified:

No Rollover – When the counter reaches the maximum count it stops counting until the counter is cleared.

Rollover – When the counter reaches the maximum count it automatically rolls over to zero and continues counting until the counter is cleared.

Rollover with Notification – When the counter reaches the maximum count it automatically rolls over to zero, displays an overflow error, and continues counting until the counter is cleared.

ELAPSED TIME: The small numbers below the mass total show the elapsed time since the last reset in hours, minutes and seconds. The maximum measurable elapsed time is 6553.5 hours (about nine months). The hours count resets when

RESET is pushed, an RS-232 or RS-485 clear is executed or on loss of power. Press

ELAPSED TIME to show this as the primary display.

RESET – The counter can be reset to zero at any time by pushing the RESET button. To clear the counter via RS-232 or RS-485, establish serial communication with the meter or controller as described in the RS-232 or RS-485 section of the manual. To reset the counter, enter the following commands:

In Streaming Mode: $$T <Enter>

In Polling (addressable) Mode: Address$$T <Enter> (e.g. B$$T <Enter>)

55





Alicat Portable Meters and Gauges

Alicat Portable Flow Meters and Gauges use a common 9 Volt battery located in the top section of your meter.

Output signals from the flow meter are passed through the female connector on top of the flow meter. Turn the switch on top of the flow meter “off” when the meter is not in use.

Normal (9V alkaline) battery life is approximately 8 hours (30-40 hours with a

9V-lithium battery), however many factors can affect this.

Note: Alicat recommends the use of non-rechargeable 9V-lithium batteries in all

MB TFT (color display portable) meters and gauges.

Replace the battery as often as required. A yellow LED indicates low voltage and that the battery should be replaced.

A false signal can result when the voltage drops below its normally regulated level.

Alicat Portable Flow Meters and Gauges can also be powered by an optional AC/

DC plug-in wall adaptor. With the adaptor plugged into the flow meter, the battery is bypassed and the meter will operate solely off the adaptor power supply.

Replacing the Battery:

1. Remove the four Phillips head screws from the front cover and gently remove it as shown below.

2. Remove the 9V battery, pulling the top of the battery out first.

3. Disconnect the old battery from the harness and replace it with a new battery.

4. Install the new battery bottom end first and replace the back cover so that the cushioning pad presses directly down on the battery.

  

AC/DC Adaptor Port











Rev. No.



Description



Battery cover removal



Date

56















 





































  















Alicat Scientific, Inc.

2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745

520-290-6060 Ph. 520-290-0109 Fax









Option: Remote Electronics for High Line or Gas Temperatures

Some applications involve operating temperatures outside the standard Alicat device specifications. A solution using remote electronics is available. (This option is not applicable for liquid devices.)

The flow body’s components are minimized to only the required sensors. The flow data is sent to the microprocessor electronics up to

6 feet away from the sensor package.

Relocating the sensitive electronics allows for installation of the flow body in ambient temperatures as high as 85° Celsius with gas temperatures under 100°Celsius.

In these applications we recommend our custom gauge calibration at a gas temperature of up to 70°Celsius. This will reduce zero shift errors that occur when actual gas flow temperatures deviate substantially from the gas calibration temperature.

This configuration is also used in integrations that require a compact flow package at the installation point.

Option: Remote Panel Display

Our Remote Display option offers the flexibility of using

Alicat’s display with units that are embedded inside processes or instrument enclosures.

The Remote Display retains all of the same features as our standard display.

The Remote Display is ideal for:

● OEMs Remote Panel Mounting ● Embedded Systems

● Gas Panels

● Leak Detection Systems

● Fuel Cell Test Stations

● Artificial Environments

57

Accessory: BB9 Multi-Drop Box

The BB9 Multi-Drop Box makes it convenient to wire multiple flow and/or pressure devices to a single RS-232 or

RS-485 port. Now available with a USB interface!

The Multi-Drop Box has nine 8 pin mini-DIN ports available.

The ports are to be used with a standard double ended 8 pin mini-DIN (DC-62) style cable going from the box to each flow or pressure device.

A single DB9 D-SUB type connector (COM PORT) connects, using the included cable, to the serial connector on a PC or laptop.

All of the flow and/or pressure devices are powered via a terminal block on the front of the box.

If more than nine devices will be required, additional Multi-Drop Boxes can be daisy chained together with a double ended 8 pin mini-DIN cable plugged into any receptacle on both boxes.

BB9 Power Supply for Large Valve Controllers: The PS24VHC (Power Supply

24Vdc High Current) is a 6.5Amp 24Vdc power supply designed for running multiple large controllers on a BB9.

The 6.5Amp power supply can run as many as 8 large valve controllers, which makes it ideal for the BB9 and multiple large valve (or small valve / large valve combination) controllers on a BB9.

BB-9 Multi-Drop

Box

6.75

7.56

58

Ø .175 Thru 2 PL

Accessory: Flow Vision™ SC Software

Flow Vision™ SC

is an intuitive software interface to help your test cycles run smoother and shorten your engineering time!


lets you connect to and communicate with multiple Alicat units simultaneously. Now you can view virtual displays, control tabs, charts and data lines from every connected Alicat device on the same screen.


supports all RS-232 and RS-485 Serial communication functions, including: gas selection, tareing, set-point control, valve tuning

and flow averaging.

Session Saving: Save and reload your configuration data with confidence.

Script Building: Create scripts to adjust a controller’s set-point value at variable specified time intervals.

Charting: Chart as many parameters as you want off as many devices as you want, with color coding, zooming, and printing functionality.

Alarms: Create software alarms that will notify you of given parameter conditions.

Data Capture & Logging: Capture and log data to either a .csv file or a .txt file.

Improved Data Logging and Data Log File Splitting for easy to manage data.

Accessory: Flow Vision™ MX Software

Alicat’s New Flow Vision™ MX

software gives you an easy way to do

GAS BLENDING using Alicat Mass Flow Controllers and your own PC.

Flow Vision™ MX

software is a simple way to connect up to six Alicat mass flow controllers and create your own gas mix concentrations.

Using our inexpensive BB9-USB and a single USB connection you can:

• Create

your own gas blends

• Adjust

flow rates

• Save

your specific blend formulas.

All the controllers can be powered through the BB9-USB with a single power supply.

Just connect your unique gases to each controller, select the gas type either locally on the controller or through Flow Vision™ MX, manifold the flow outputs and create your gas mix.

59

Accessories

MD8DB9

DBC-251

510199

IC10

IC10-18G

IC20

IC24-18G

IC50

IC-102

USB-RS232

REMOTE

RD

PCASE

DC-61

DC-251

DC-301

DC-501

DC-751

DC-6RT

DC-62

DC-252

DC-502

DC-602

Part Number Description

FLOWVISIONSC Flow Vision™ SC software for interface with all Alicat instruments

FLOWVISIONMX Flow Vision™ MX software for gas blending

BB9 9 position Multi-Drop Box

BB9-I

PVPS24U

PS24VHC

9 position Multi-Drop Box, Industrial connectors

Universal 100-240 VAC to 24 Volt DC Power Supply Adapter

High current power supply for BB9 use with Large Valve Controllers

Industrial carry and storage case for portable meters/gauges

8 Pin Male Mini-DIN connector cable, single ended, 6 foot length





8 Pin Male Right Angle Mini-Din Cable, single ended, 6 foot length

8 Pin Male Mini-DIN connector cable, double ended, 6 foot length




8 Pin Male Mini-DIN to DB9 Female Adapter, 6 foot length

DB15 cable, single ended, 25 foot length

DB9 cable, double-ended female, 3 meter length

Industrial cable, 6 Pin, single ended, 10 foot length

18 gauge industrial cable, 6 Pin, single ended, 10 foot length


18 gauge industrial cable, 6 Pin, single ended, 24 foot length


Industrial cable, 6 pin double ended, 10 foot length

RS-232 to USB Converter

Remote Electronics with Display

Remote Panel Mount Display

60

1/4” - 3mm

1/4” - 4mm

1/4” - 6mm

1/4” - 8mm

1/4” - 12mm

1/2” - 1/8”

1/2” - 1/4”

1/2” - 3/8”

1/2” - 1/2”

1/2” - 3/4”

1/2” - 6mm

1/2” - 8mm

1/2” - 12mm

1/2” - 16mm

3/4” - 1/4”

3/4” - 1/2”

3/4” - 3/4”

3/4” - 12mm

3/4” - 16mm

MNPT to Compression Fittings

10-32 - 1/8”

10-32 - 1/4”

SS-200-1-0157

SS-400-1-0256

1/8” - 1/8”

1/8” - 1/4”

1/8” - 3/8”

1/8” - 1/2”

SS-200-1-2

SS-400-1-2

SS-600-1-2

SS-810-1-2

1/8” - 3mm

1/8” - 4mm

1/8” - 6mm

1/8” - 8mm

1/8” - 12mm

1/4” - 1/8”

1/4” - 1/4”

1/4” - 3/8”

1/4” - 1/2”

SS-3M0-1-2

SS-4M0-1-2

SS-6M0-1-2

SS-8M0-1-2

SS-12M0-1-2

SS-200-1-4

SS-400-1-4

SS-600-1-4

SS-810-1-4

SS-3M0-1-4

SS-4M0-1-4

SS-6M0-1-4

SS-8M0-1-4

SS-12M0-1-4

SS-200-1-8

SS-400-1-8

SS-600-1-8

SS-810-1-8

SS-1210-1-8

SS-6M0-1-8

SS-8M0-1-8

SS-12M0-1-8

SS-16M0-1-8

SS-400-1-12

SS-810-1-12

SS-1210-1-12

SS-12M0-1-12

SS-16M0-1-12

Accessories

Filters & Elements FNPT-MNPT

10-32 5μ

10-32 20μ

510053

510054

1/8” 20μ

1/4” 40μ

1/2” 40μ

3/4” 40μ

ILF-1/8-20

ILF-1/4-40

ILF-1/2-40*

ILF-3/4-40*

20μ element

40μ element

40μ element

ILFE20

ILFE40

ILFE40L*

Filters & Elements FNPT-FNPT*

10-32 5μ CF-303-20-316

*requires MNPT to MNPT coupler to interface with Alicat flow bodies

10-32 Male UNF to 1/8 FNPT Adapter

410133

Male M5 (10-32) Buna-N O-ring face seal to 1/8”Female NPT

61

Eight Pin Mini-DIN Connector Pin-Outs

If your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to reference the following pin-out diagram.

7 

Standard 8 Pin Mini-DIN Pin-Out

Pin Function

1 Inactive or 4-20mA Primary Output Signal

2


or Basic Alarm

3 RS-232 Input Signal


5 RS-232 Output Signal


Mini-DIN cable color

Black

Brown

Red

Orange

Yellow

Green

7 Power In (as described above) Blue

8 Ground (common for power, communications and signals) Purple

Note: The above pin-out is applicable to all the flow meters and controllers with the

Mini-DIN connector. The availability of different output signals depends on the options ordered. Underlined Items in the above table are optional configurations that are noted on the unit’s calibration sheet.

Locking Industrial Connector Pin-Outs

If your Alicat Instrument was ordered with a Six Pin Locking Industrial connection, please be sure to reference the following pin-out diagram.

A locking industrial connector is standard on all CSA/ATEX approved devices. It is also available as an option on all other Alicat instruments.

Pin Function

1 Power In ( + )

2 RS-232TX / RS-485 +

3 RS-232RX / RS-485 -

4 Remote Tare Meters (Ground to Tare)

Analog Set-Point Input (Controllers)

5 Ground (common for power,

communications and signals)

Cable Color

Red

Blue

White

Green

Black

6 Signal Out (Voltage or Current as ordered)

Brown

Six-pin Industrial Connector

2

1

3

6

4

5

Note: The above pin-out is applicable to all the flow meters and controllers ordered with the industrial connector. The availability of different output signals depends on the flow meter options ordered.

62

DB9 Pin-Outs

If your Alicat instrument was ordered with a DB9 connection, please reference the following pin-out diagram.

1



6



7



8



3



4



9



5



Standard DB9 Pin-Out Female Connector

Pin Function

1 Inactive or optional 4-20mA Primary Output Signal




or Basic Alarm

3 Serial RS-232RX or RS-485 -

4

Analog Input Signal [4-20mA, 5Vdc, or 10Vdc] (short to ground for remote tare function on non-controllers)

5 Serial RS-232TX or RS-485 +


7 Power In (+Vdc)

8 Ground (common for power, communications and signals)

9 Ground

Note: The above pin-out is applicable to all flow meters and controllers with the DB9 connector. The availability of different output signals depends on the options ordered. Underlined Items in the above table are optional configurations that are noted on the unit’s calibration sheet.

Do not connect RS-485 to RS-232 units. Check part number or contact factory to verify RS-485 functionality.

Due to variance in cable manufacturing, please identify proper wiring/pins via continuity check & color when using bare cut multi-strand cables.

63

PROFIBUS Pin-Outs

If your Alicat Instrument was ordered with a PROFIBUS connection, please be sure to reference the following pin-out diagram.

Power and Signal Connections:

Connect to the device using two DB9 connectors.

The female top connection is PROFIBUS.

The male connection on the side is power and RS-232 or RS-485.

Pin out diagrams for all PROFIBUS enabled Alicat devices are shown below.

SIDE

5

9

TOP

1. NC

2. OPT GND

3. DP

4. RTS

5. DGD

6. VP

7. OPT 7 to 30VDC

8. DN

9. NC

1

6

1

6

1. NC

2. RS232RX

3. RS232TX

4. NC

5. GND

6. NC

7. 7 to 30VDC

8. GND

9. NC

5

9

64

DB15 Pin-Outs

If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.

The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15 equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

2

DB15 – Pin-Out Alicat Style

5 8

8 5 2

9 11

13

15

Male Connector Front View

15 13

11 9

Female Connector Front View

Pin Number

1

2

3

6

7

4

5

Function

Ground

Primary Analog Signal Output

Ground

N/C

Power Supply (+Vdc)

N/C

N/C

8

9

10

11

12

13

14

Analog Tare (meters — when grounded)

Analog Set-Point Input (controllers)

Power Supply Common

Ground

Secondary Analog Signal Output / fixed 5.12Vdc

N/C

RS-232 RX (receive) or RS-485 –

Ground

15 RS-232 TX (send) or RS-485 +

Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.

NOTE: Pins 1, 3, 9, 10 and 14 are connected together inside of the device and are common grounding points.

N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).

65

DB15 Pin-Outs


The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15A equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

2

DB15A – Pin-Out “Aalborg” Style

3

5

7

8

8

7

5 3 2

9 12

15


15

12

9


Pin Number

1

2

3

6

7

4

5

8

Function

Ground


Analog Tare (meters — when grounded)*

Analog Set-Point Input (controllers)*

Ground

Power Supply Common

Ground

Power Supply (+Vdc)

RS-232 Tx (send) / RS-485, A (-) [receive]

13

14

15

9

10

11

12

Ground

N/C

N/C

Secondary Analog Signal Output / fixed 5.12Vdc*

N/C

N/C

RS-232 Rx (receive) / RS-485, A (+) [send]


* Added to allow for full use of features on Alicat devices, may not be present on host wiring



66

DB15 Pin-Outs


The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a

DB15B equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

2

DB15B – Pin-Out “Brooks” Style

5

8

8

5

2

9

11

14

15


15

14

11

9


Pin Number

1

2

3

4

5

6

7

8

Function

Ground


N/C

N/C

Power Supply (+Vdc)

N/C

N/C



Power Supply Common

12

13

14

9

10

11

Ground


N/C

N/C


15 RS-232 TX (send) or RS-485 +


NOTE: Pins 1, 9,and 10 are connected together inside of the device and are common grounding points.


67

DB15 Pin-Outs



DB15K equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

2

DB15K – Pin-Out “MKS” Style

5

7 8

8 7

5 2

9

13 14


14 13 9


Pin Number

1

2

3

4

5

6

7

Function

N/C


N/C

N/C

Power Supply Common

N/C

Power Supply (+Vdc)

8

9

10

11




*

N/C

Ground

12

13

Ground


*

14

RS-232 TX (send) or RS-485 +

*

15 Ground


NOTE: Pins 5, 11, 12 and 15 are connected together inside of the device and are common grounding points.


* Added to allow for full use of features on Alicat devices, may not be present on host wiring.

68

DB15 Pin-Outs


The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15H equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

DB15H – Pin-Out “Hastings H” Style

2

6 7

7

6 2

10

11

14 15


15

14

11 10


Pin Number

1

2

3

4

5

6

Function

N/C


*

N/C

N/C

Ground


Power Supply Common

N/C

10

11

12

13

7

8

9 N/C


Power Supply (+Vdc)

Ground

N/C

*

14



15 RS-232 TX (send) or RS-485 +

*


NOTE: Pins 5, 7 and 12 are connected together inside of the device and are common grounding points.



69

DB15 Pin-Outs



DB15S equipped Alicat. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.

2

DB15S – Pin-Out “Sierra” Style

8

8

2

9

11 12

13 14


14

13

12

11

9


Pin Number

1

2

Function

Ground


5

6

3

4

7

N/C

N/C

Ground

N/C

8

N/C



Power Supply Common 9

10

11

12

13

14

15

Ground


*


Power Supply (+Vdc)

RS-232 TX (send) or RS-485 +

*

Ground

*





70

Additional Information for Alicat CSA and ATEX Approved Devices

See the following page for Special Conditions regarding the use of these units!

II 3 G

EEx nA IIC T4

Class I, Div. 2 Group A, B, C and D T4

24 Vdc, 0.800A max

Class I, Zone 2 AEx nA IIC T4

WARNINGS:

EXPLOSION HAZARD – DO NOT DISCONNECT WHILE CIRCUIT IS

LIVE UNLESS AREA IS KNOWN TO BE NON-HAZARDOUS.

EXPLOSION HAZARD – SUBSTITUTION OF COMPONENTS MAY

IMPAIR SUITABILITY FOR CLASS I, DIVISION 2.

All Alicat CSA / ATEX approved devices are equipped with a locking 6 pin industrial connector.

The power and signal connections are shown below.

Pin Function

1 Power In ( + )

2 RS-232TX / RS-485 +

3 RS-232RX / RS-485 –


5 Ground (common for power,

communications and signals)

6 Signal Out (Voltage or Current as ordered)

Cable Color

Red

Blue

White

Green

Black

Brown

1

2

3

6

5

4

IC-10 Cable

Industrial Connector Overall Clearance

Minimum Removal Clearance

2.537

1.817

1.602

Ø .710

Pin#

1

2

3

4

5

6

Wire color

Red

Blue

White

Green

Black

Brown

.425

IC-10 Locking Industrial Cable

Clearance Requirements for

Industrial Connector

71

USE of Alicat instruments (M, MS, MC, MCS, MCR, MCRS, P, PS, PC, PCS, PCR and

PCRS product families only) in Class 1 Division 2 applications.

CSA certifies the use of this product for general use as well as use in hazardous locations as defined by Class 1 Division 2 Group A, B, C and D T4.

CSA certification is indicated by the product label as shown below and not by the statements in this, or any accompanying documentation.

Special Conditions:

To comply with CSA certification the following information is included in the product literature:

• When equipment is properly labeled, it is suitable in Class I, Division 2, Group A, B,

C and D, T4 o Tamb. -40°C to +50°C

• Electrical Rating 24Vdc, 0.800A max

• Instruments shall be powered by a CSA certified, UL listed, Class II external power supply suitable for the application

• Instruments shall be housed in an enclosure with a minimum IP54 rating or location providing equivalent protection

• Instrument’s final approval shall be provided by the local authority having jurisdiction

II 3 G

EEx nA IIC T4

Class I, Div. 2 Group A, B, C and D T4

24 Vdc, 0.800A max

Class I, Zone 2 AEx nA IIC T4

X – See manual for special conditions

WARNINGS:

EXPLOSION HAZARD – DO NOT

DISCONNECT WHILE CIRCUIT IS LIVE

UNLESS AREA IS KNOWN TO BE NON-

HAZARDOUS.

EXPLOSION HAZARD – SUBSTITUTION

OF COMPONENTS MAY IMPAIR

SUITABILITY FOR CLASS I, DIVISION 2.

Alicat Scientific, Inc.

Tucson, AZ USA

Tel: 520-290-6060 www.AlicatScientific.com

USE of Alicat instruments (M, MS, MC, MCS, MCR, MCRS, P, PS, PC, PCS, PCR and PCRS product families only) in applications requiring ATEX Certification.

Properly labeled Alicat instruments comply to the following ATEX standard:

II 3 G EEx nA IIC T4 (-40°C ≤ Ta ≤ +50°C)

The examination certificate was issued by the CSA in accordance with accepted practices and procedures. This confirms compliance with the

European ATEX Directive or Group II Category 3G equipment.

ATEX certification is indicated by the product label as shown above and not by the statements in this, or any accompanying documentation.

Special Conditions:

• Properly labeled equipment is only certified for use in ambient temperatures in the range of -40°C to +50°C only

• Electrical Rating 24Vdc, 0.800A max

• Instruments shall be powered by a CSA certified, UL listed, Class II external power supply suitable for the application

• Instruments shall be housed in an enclosure with a minimum IP54 rating or location providing equivalent protection

• Instrument’s final approval shall be provided by the local authority having jurisdiction

72

Alicat Gas Flow Meter Manual

Operating Manual

M Series

MB Series

MS Series

Precision Gas Mass Flow Meters

Innovative Flow and Pressure Solutions

GETTING STARTED

MOUNTING

PLUMBING

POWER AND SIGNAL CONNECTIONS

INPUT SIGNALS

Information for Alicat TFT (Color Display) Instruments

DISPLAYS AND MENUS

MAIN

SELECT MENU

+

.

GAS SELECT

COMMUNICATION SELECT

MISCELLANEOUS

MANUFACTURER DATA

Technical Data for Alicat MS Series Mass Flow Meters

Standard Compatible Gas List for MS Series Meters

Technical Data for Alicat MQ Series Mass Flow Meters

Accessory: Flow Vision™ SC Software

Flow Vision™ SC

Flow Vision™ SC

Flow Vision™ SC

Accessory: Flow Vision™ MX Software

Alicat’s New Flow Vision™ MX

Flow Vision™ MX

Accessories

Accessories

Eight Pin Mini-DIN Connector Pin-Outs

Locking Industrial Connector Pin-Outs

DB9 Pin-Outs

If your Alicat instrument was ordered with a DB9 connection, please reference the following pin-out diagram.

Do not connect RS-485 to RS-232 units. Check part number or contact factory to verify RS-485 functionality.

Due to variance in cable manufacturing, please identify proper wiring/pins via continuity check & color when using bare cut multi-strand cables.

PROFIBUS Pin-Outs

1. NC

2. OPT GND

3. DP

4. RTS

5. DGD

6. VP

7. OPT 7 to 30VDC

8. DN

9. NC

1. NC

2. RS232RX

3. RS232TX

4. NC

5. GND

6. NC

7. 7 to 30VDC

8. GND

9. NC

DB15 Pin-Outs

DB15 – Pin-Out Alicat Style

DB15 Pin-Outs

DB15A – Pin-Out “Aalborg” Style

DB15 Pin-Outs

DB15B – Pin-Out “Brooks” Style

DB15 Pin-Outs

DB15K – Pin-Out “MKS” Style

DB15 Pin-Outs

DB15H – Pin-Out “Hastings H” Style

DB15 Pin-Outs

DB15S – Pin-Out “Sierra” Style

Related manuals

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Whisper

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