Pfeiffer HiPace 400 Operating

OPERATING INSTRUCTIONS

EN

Translation of the original instructions

HIPACE 400

Turbopump

Table of contents

2

Table of contents

1

2

3

4

5

About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.1 Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.3 Instructions in the text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.4 Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.5 Symbols used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.1 Pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.2 Pump features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.3 Variants . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.4 Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.1 Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.2 Rotor bearing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.3 Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2.1 Earthquake safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.2.2 Use of a splinter shield or protection screen . . . . . . . . . . . . . . . . . 14

5.2.3 Vibration damper. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.3 Mounting orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.4 Connecting the high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

5.4.1 Installation of ISO-K flange with ISO-K flange . . . . . . . . . . . . . . . 16

5.4.2 Installation of ISO-K flange with ISO-F flange. . . . . . . . . . . . . . . . 17

5.4.3 Installation of ISO-F with ISO-F flange . . . . . . . . . . . . . . . . . . . . . 18

5.4.4 Installation of CF- flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.5 Connecting the fore-vacuum side . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

5.6 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.1 Electronic drive unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.2 Earthing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.3 Power and electrical supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.4 Remote plug . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

5.7 Accessory connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

5.7.1 Air cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

5.7.2 Venting valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

5.7.3 Sealing gas connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.7.4 Heating jacket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.7.5 Water cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Table of contents

6

7

8

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.3.1 Operation without operating unit . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.3 Operation with DCU or HPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.4 Operation via fieldbus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4.1 Temperature monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4.2 Operation display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.1 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.2 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 30

7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

7.3.1 Rotation speed set value. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

11 Spare parts HiPace 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

12.1 HiPace 400, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

12.2 Differences at HiPace 400, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.2 HiPace 400, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.3 Differences at HiPace 400, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

13.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3

4

About this manual

1 About this manual

1.1

Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.

Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.

1.1.1

Applicable documents

HiPace 400, depending on the model

Operating instructions "Electronic drive unit TC 400", standard

Operating instructions "Electronic drive unit TC 400 PB", Profibus

Operating instructions "Electronic drive unit TC 400 E74", acc. Semi E74

Operating instructions "Electronic drive unit TC 400 DN", DeviceNet

Operating instructions "Electronic drive unit TC 400 EC", EtherCAT

Declaration of conformity

*also available via www.pfeiffer-vacuum.com

Operating instructions

PT 0203 BN*

PT 0244 BN*

PT 0302 BN*

PT 0352 BN*

PT 0452 BN*

Part of this document

1.2

Conventions

1.2.1

Safety instructions

The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:

DANGER

Imminent danger

Indicates an imminent hazardous situation that will result in death or serious injury.

WARNING

Possibly imminent danger

Indicates an imminent hazardous situation that can result in death or serious injury.

CAUTION

Possibly imminent danger

Indicates an imminent hazardous situation that can result in minor or moderate injury.

NOTICE

Command or note

Command to perform an action or information about properties, the disregarding of which may result in damage to the product.

1.2.2

Pictographs

About this manual

Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents

Warning of a displayed source of danger in connection with operation of the unit or equipment

Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents

Important information about the product or this document

1.2.3

Instructions in the text

 Work instruction: here you have to do something.

1.2.4

Abbreviations

DCU: Display

HPU:

Handheld Programming Unit

TC:

Electronic drive unit for turbopump

TPS: pack

1.2.5

Symbols used

The following symbols are used consistently throughout the diagrams:

High vacuum flange

V

Fore-vacuum flange

Vacuum flange of the backing pump

Exhaust flange of the backing pump

Electrical connection

Sealing gas connection

Venting connection

Cooling water connection

5

6

Safety

2 Safety

2.1

Safety precautions

Duty to inform

Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.

 The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump, the pumped medium and the entire system.

Installation and operation of accessories

Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

 For information on order numbers of components, see "Accessories".

 Use original accessory parts only.

NOTICE

Checking the safety system against excess rotation speed

To provide the functioning of the integrated safety system for avoiding excess rotation speed, the pump must run-up from the standstill at least once a year.

 Switch off the pump and await the complete standstill (rotation speed = 0 Hz).

 Run-up the pump according to this operating instructions.

WARNING

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.

 Make sure that the system is integrated in an emergency off safety circuit.

 Consult Pfeiffer Vacuum for special requirements.

WARNING

Danger due to lack of power disconnection device

Pump and electronic drive unit are not equipped with a power disconnection device. Installation of a user-supplied power disconnection device in accordance with SEMI-S2.

 Fit a circuit breaker with an interruption rating of min. 10,000 A.

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so you can disconnect it at any time.

● Do not expose any body parts to the vacuum.

● Observe all safety and accident prevention regulations.

● Regularly check the proper observance of all safety measures.

●

Power supply:

The turbopump power supply must apply to the requirements of double insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.

● A safe connection to the protective earthing conductor (PE) is recommended (protection class III).

Safety

● Do not loosen any plug connection during operations.

● Wait for the rotor to reach standstill before peforming work on the high vacuum flange.

● Keep leads and cables well away from hot surfaces (> 70 °C).

● Never fill or operate turbopump with cleaning agent.

● Do not operate the turbopump with open high vacuum flange.

● Do not carry out any unauthorized modifications or conversions to the pump.

● When returning the turbopump observe the shipping instructions.

2.2

Protective equipment

Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment. The owner, respectively the employer are obligated to provide an adequate equipment to any operating persons.

DANGER

Danger to health by hazardous substances during maintenance or installation

Depending on the process vacuum pumps, components or operating fluids can be contaminated by toxic, reactive or radioactive substances.

 Wear adequate protective equipment during maintenance and repairs or in case of reinstallation.

kg

WARNING

Risk of injury through falling objects

When transporting vacuum pumps by hand, there is a danger through loads slipping and falling down.

 Carry small and mid-size vacuum pumps two-handed.

 Carry vacuum pumps > 20 kg by a suitable lifting device.

 Wear safety shoes with steel toe cap according to directive EN 347.

CAUTION

Risk of injury through hot surfaces

Vacuum pumps can become hot during operation.

 Allow the pump to cool before maintenance and repairs.

 If necessary wear protective gloves according to EN 420.

CAUTION

Risk of injury through sharp edges

Rotor and stator disks of turbopumps have very sharp edges.

 Before any working wait for the complete standstill of the pump.

 Do not reach in the high vacuum flange.

 If necessary wear protective gloves according to EN 420.

2.3

Proper use

NOTICE

EC conformity

The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.

 Following installation into a plant and before commissioning, the operator must check the entire system for compliance with the valid EU directives and reassess it accordingly.

7

8

Safety

● The vacuum pump may only be used to generate a vacuum.

● Only operate the turbopump with an approved backing pump.

2.4

Improper use

Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially:

● installation of the pump with unspecified mounting material

● pumping of corrosive or explosive media

● pumping of condensing vapors

● pumping of liquids

● pumping of dusts

● operation with improper high gas throughput

● operation with improper high fore-vacuum pressures

● operation with improper gas mode

● operation with improper high levels of insulated heat input

● operation in improper high magnetic fields

● venting with improper high venting rates

● use of the vacuum pump to generate pressure

● operation of the devices in areas with ionizing radiation

● operation in potentially explosive areas

● use of the devices in systems in which impact-like stress and vibrations or periodic forces affect the devices

● use of accessories or spare parts, which are not named in this manual warranty seal

Closure seal

The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.

 Do not open the product within its warranty period!

 For process-related shorter maintenance intervals please contact the Pfeiffer Vacuum Service.

Transport and storage

3 Transport and storage

3.1

Transport

 Reuse the transport container of the vacuum pump.

– Transport or ship vacuum pumps in the original packing preferably.

 Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection.

 Keep the original protective covers.

 Always transport the turbopump in its upright position.

3.2

Storage

 Close the flange openings by using the original protective covers.

 Close further connection ports by using the corresponding protective covers.

 Store the pump only indoors at temperatures between -25 °C and +55 °C.

 In rooms with moist or aggressive atmospheres, the pump must be airproof shrinkwrapped in a plastic bag together with a bag of desiccant.

9

Product description

4 Product description

4.1

Product identification

4.1.1

Pump types

HiPace

(1)

400

(2) (3)

The product designation consists of a family designation (1), the size (2), which is oriented on the pumping speed, and if applicable the additional properties (3) of the pump.

1. Family designation 2. Model designation

HiPace 400 = Model designation of the pump related to its pumping speed class

3. Property designation none = Standard version

U = Upside-down installation orientation

C = Corrosive gas version

P = Process

M

= Active magnetic bearing

T = Temperature management system

E = High Efficiency

H = High Compression

I

= Ion implantation

4.1.2

Pump features

This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, second edition, including Amendment 1, or a later version of the same standard incorporating the same level of testing requirements.

For information about other certifications, if applicable, please see the signet on the product or:

● www.tuvdotcom.com

● TUVdotCOM-ID 0000021320

Characteristics

HV flange DN 160 ISO-K

HiPace 400

DN 160 ISO-F DN 160 CF-F

Flange material Aluminium Aluminium Stainless steel

To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.

D-35614 Asslar

Mod.:

HiPace 300

DN 100 ISO-K, 3P

M.-No.:

Ser. -No.:

PM P03 900

Oil:

S(N

2

): n,f:

---

260 l/s

60000 1/min, 1000 Hz

Weight: 6.7 kg

Made in Germany

Fig. 1: Example for a rating plate

4.1.3

Variants

● HiPace 400 with TC 400 and 24 V DC ± 5 %

● HiPace 400 with TC 400 and 48 V DC ± 5 %

4.1.4

Scope of delivery

● Turbopump with electronic drive unit

● Mating plug for the connection " remote

" on the TC 400 (type dependent)

● Mating plug for the connection "

E74

" on the TC 400 (type dependent)

● Protective cover for the high vacuum flange and the fore-vacuum flange

● Operating instructions

10

Product description

4.2

Function

The turbopump HiPace 400 forms a complete unit together with the electronic drive unit

TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may be used

(e.g.TPS or DCU).

8 4

17 remote 3 20 14 16

Fig. 2: View of HiPace 400 with TC 400

3

8

Pump lower part casing

Electronic drive unit TC 400

14 Cooling water connection

16 Sealing gas connection tion connection connec-

4.2.1

Cooling

● Water cooling

● Air cooling (optional)

In the case of excess temperature the electronic drive unit reduces the drive power automatically. Depending on the application and the HiPace different cooling variants are selectable.

4.2.2

Rotor bearing

Hybrid bearing TurboDrag pump

● High vacuum side: maintenance-free permanent magnetic bearing

● Fore-vacuum side: ceramic ball bearing

4.2.3

Drive


11

Product description

4.3

Range of application

The pump HiPace 400 must be installed and operated under the following ambient conditions:

Installation location

Protection category

Protection class

Temperature

Relative humidity

Atmospheric pressure

Installation altitude

Degree of pollution

Permissible surr. magnetic field

Overvoltage category

Connection voltage TC, depending on the variants weather protected (indoors)

IP 54

III

+5 °C to +35 °C with air cooling

+5 °C to +40 °C with water cooling max. 80 %, at T  31 °C, up to max. 50% at T  40 °C

750 hPa - 1060 hPa

2000 m max.

2

 6 mT

II

24 V DC ±5%

48 V DC ±5%

Remarks to ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible fore-vacuum pressure or at maximum gas throughput depending on the cooling method. The turbopump is intrinsically safe by a redundant temperature monitoring.

● By reducing the fore-vacuum pressure or gas throughput, the turbopump can be operated at higher ambient temperatures.

● If the maximum permissible operating temperature of the turbopump is exceeded, the electronic drive unit reduces drive power first and switches off then, if necessary.

12

Installation

5 Installation

WARNING

Danger from the turbopump being ripped off

If the rotor is suddenly blocked, torques of up to 4200 Nm could occur, which could cause the turbopump to be ripped off if it is not properly affixed. The energy that this would release could throw the entire pump or pieces from its interior through the room.

That would cause severe, possibly fatal, injuries as well as serious property damage.

 Carefully follow the installation instructions in this handbook.

 Only use approved original parts from Pfeiffer Vacuum (Accessories) for the installation.

Installation and operation of accessories

Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

 For information on order numbers of components, see "Accessories".

 Use original accessory parts only.

5.1

Preparatory work

When installing the pump, observe the following conditions:

● the ambient conditions specified for the range of application

● When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 °C.

● The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum.

● It is not allowed to operate the device in systems where impact-like stresses and vibrations or periodically forces occur.

 Ensure sufficient cooling for the turbopump.

 Where magnetic fields > 6 mT are involved, a suitable shielding must be used. Check installation location and consult Pfeiffer Vacuum if needed!

 The maximum permissible rotor temperature for the turbopump is 90 °C. If high temperatures arise for process reasons, the radiated heat input must not exceed 4.2 W.

Install suitable screening sheets, if necessary (design information on request).

5.2

Set-up

● Ensure the greatest possible cleanliness when installing any high vacuum parts. Unclean components prolong the pump-down time.

● All flange components must be grease-free, dust-free and dry at installation.

● The operating fluid reservoir is already installed and filled for the turbopump HiPace

400.

13

Installation

5.2.1

Earthquake safety

An earthquake can result in contact with the safety bearings. All forces occuring hereby are safely absorbed by the properly installed flange connections.

 Secure the vacuum chamber against shifting and tipping on customers side.

VACUUM CHAMBER

Fig. 3: Example: How to secure against shifting and tipping by external tremors

= Safety connection, implementation each by the customer

5.2.2

Use of a splinter shield or protection screen

Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vacuum flange protect the turbopump against foreign bodies coming from the chamber.

Thus, the pumping speed of the pump is reduced.

Splinter shield DN 100

Protection screen DN 100

Reduced volume flow rate in %

H

2

4

2

He

7

1

N

2

19

5

Ar

22

5

5.2.3

Vibration damper

WARNING

Danger from the turbopump and vibration damper being torn-off

In case of sudden blocking of the rotor, an applied vibration damper cannot compensate any of the occurring forces. There is a danger of the turbopump being torn-off and thereby resulting severest injuries and property damages. Applicable safeguards must be taken to compensate possible occurring torques.

 Definitely consult with Pfeiffer Vacuum.

 Do not exceed the max. permissible temperature at the vibration damper (100 °C).

14

Installation

5.3

Mounting orientation

When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for installation in any orientation.

 Support pipes in front of the vacuum pump or remove them. No force from the pipe system may be exerted on the fixed pump.

 To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps the fore-vacuum flange should always point vertically downward (± 25°).

VV

VV

25° max

Fig. 4: Recommended orientation of the fore-vacuum flange

The maximum axial loading capacity of the high vacuum flange is 1000 N (equals

100 kg). A one-sided load on the high vacuum flange is not permitted.

15

Installation

5.4

Connecting the high vacuum side

If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must be absorbed. Only the components listed in the following can be used to fasten the turbopumps to the high vacuum flange. The installation elements for turbopumps are special designs by Pfeiffer Vacuum. In all operating conditions, the tensile strength of the flange material must be at least 170 N/mm

2

.

 Secure the vacuum chamber against shifting and tipping on customers side.

DANGER

Danger to life - impermissible fastening

Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the fastening of pumps on a vacuum chamber with different flange variants.

 Use only the correct mounting kit from Pfeiffer Vacuum.

 Pfeiffer Vacuum will not accept any liability for all damages resulting from impermissible fastening.

NOTICE

Observe shape tolerances for the counter flange

Unevennesses of the customer supplied counter flange can lead to warping of the pump casing despite proper fastening. Leakiness and negative running characteristics can be the result.

 Do not exceed an evenness of max. 0.05 mm for the whole surface.

Mounting of ISO flanges

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or

ISO-K can lead to twisting despite proper installation.

● The tightness of the high vacuum flange is not at risk thereby.

5.4.1

Installation of ISO-K flange with ISO-K flange

For the installation the following components are exclusively authorized:

● the valid mounting kit of the Pfeiffer Vacuum accessories programme

● mounting materials including protection screen or splinter shield are optionally available

 Mind that the sealing surfaces are not damaged.

1) Connect the flanges according to the drawing and with the component parts of the mounting kit.

2) Use the required number of

16

claw clamps.

3) Tighten the claw clamps crosswise in three steps.

4) Tightening torque: 5, 15, 25 ±2 Nm

16

Installation

5.4.2

Installation of ISO-K flange with ISO-F flange

The connection types for installation of ISO-K to ISO-F flange are "hex screw and threaded hole," "stud screw and threaded hole," and "stud screw and through hole".




Hexagon screw and threaded hole


1) Put the collar flange over the high vacuum flange of the turbopump.

2) Insert the retaining ring into the groove of the high vacuum flange.

3) Fasten the turbo pump with collar flange and centering ring to the counter flange as shown in the graphic.

4) Use the required number of 8 hex screws with washer.

5) Screw hex screws 1.5 x d into the threaded holes.

– The tensile strength of the flange material must be at least 270 N/mm ating conditions.

2

in all oper-

6) Tighten the hex screws crosswise in three steps.

7) Tightening torque DN 160: 5, 10, 16 ± 1 Nm

Stud screw and threaded hole


1) Use the required number of 8 stud screws and nuts.

2) Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on the counter flange.




6) Tighten the nuts crosswise in three steps.


Stud screw and through hole





4) Use the required number of 8 stud screws and nuts.



17

Installation

5.4.3

Installation of ISO-F with ISO-F flange

The connection types for installation of ISO-F to ISO-F flange are "hex screw and threaded hole," "stud screw and threaded hole," and "stud screw and through hole".




Hexagon screw and threaded hole




8

hex screws with washer.

3) Screw hex screws 1.5 x d into the threaded holes.

– The tensile strength of the flange material must be at least 270 N/mm ating conditions.

2

in all oper-

4) Tighten the hex screws crosswise in three steps.





8

stud screws and nuts.

2) Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on the counter flange.








8

stud screws and nuts.



18

Installation

5.4.4

Installation of CF- flanges

NOTICE

Assembly of CF flanges!

Loss of sealing capability due to a lack of cleanliness when handling the sealing and CF flange.

 Assemble the sealing dry and oil-free.

 Always wear gloves when handling the components.

 Do not damage the surfaces and cutting edges.

The connection types for installation of CF to CF flange are "hexagon screw and through hole", "stud screw and threaded hole" as well as "stud screw and through hole".


● A copper seal

● protection screen or splinter shield are optionally

Hexagon screw and through hole

1) If used: Insert protective screen or splinter shield with the clamping lugs downward into the high vacuum flange of the turbopump.

2) Place the seal exactly in the hollow.

3) Connect the flanges using 16 hexagon-head screws (M8) with washers and bolts.

4) Tighten the screw connections circularly.

5) Tightening torque: 22 ± 2 Nm

6) After this, check the torque, since flowing of the sealing material may make it necessary to tighten the screws again.


1) Screw in the stud screws (

16

pieces, M8) with the shorter threaded end into the threaded holes of the counter flange.



4) Connect the flanges using washers and nuts.







3) Connect the flanges using

16

hexagon-head screws (M8) with washers and bolts.




19

Installation

5.5

Connecting the fore-vacuum side

Recommendation: As backing pump, use a suitable vacuum pump from the Pfeiffer

Vacuum programme.

WARNING

Damage to health due to poisonous gases

Process gases can damage health and contaminate the environment.

 Safely lead away the gas emission from the backing pump!

 Observe all safety recommendations of the gas producer.

20 20.1 20.2

20.3

20a

Fig. 5: Connecting the backing pump

20 Fore-vacuum

20a Backing pump

20.1

Centering ring

20.2

Clamping ring

20.3

Vacuum components

NOTICE

Design of the fore-vacuum connection regarding sudden twisting of the pump

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or

ISO-K can lead to twisting despite proper installation.

 Keep masses small, which can be installed directly to the pump.

 Connect flexible line elements directly to the turbopump, if necessary.

 With rigid pipe connections: Install bellows for attenuation of vibrations in the connection line.

 Connect the fore-vacuum line with small-flange components or threaded hose couplings. Do not narrow the free cross section of the fore-vacuum flange!

 The backing pump is connected electrically via a relay box.

 For connection and operation of the backing pump see its operating instructions.

Backing pump control

Backing pump control via electronic drive unit of the turbopump is possible using a relay box or respective connection cables of the accessory programme.

 Refer to the operating instructions of the respective accessory.

20

Installation

5.6

Connections to the turbopump

5.6.1

Electronic drive unit

Turbopumps with integrated electronic drive unit are designed for various applications.

Therefore different connection panels are available.

● TC 400 in standard version

● TC 400 PB for Profibus linking

● TC 400 E74 in dependence on specification SEMI E74

● TC 400 DN for DeviceNet linking

● TC 400 EC for EtherCAT linking

Detailed description for function, configuration and operation with the respective connection panel are given in the specific operating instructions for the electronic drive unit.

5.6.2

Earthing

Pfeiffer Vacuum recommends to connect an appropriate earthing wire to derive applicative interferences.

M4

Fig. 6: Installing the earthing connection

5.6.3

Power and electrical supply

For voltage supply of the electronic drive unit TC 400, only use original power supplies

(e.g. TPS 400 or DCU 400). Use of other power supplies only after consultation with Pfeiffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum accessories.

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so you can disconnect it at any time.

 Make sure that the voltage of the turbopump is valid.

HiPace V DC Drive unit

HiPace 400 24

HiPace 400 48

TC 400

TC 400

Power supply

TPS 310/311

TPS 400/401

Power supply with DCU

DCU 310

DCU 400

21

Installation

S1

TPS / DCU Electronicdrive unit

DC out

PM 061 352 -T DC in

 Switch off switch

S1

on the power pack (position "0").

 Insert the connection cable with the socket in the connection " DC in " on the electronic drive unit and close the bayonet lock.

 Insert the connection cable with the plug in the connection "

DC out

" on the power supply and close the bayonet lock.

5.6.4

Remote plug

The shipment includes a mating plug for the 26-pin connection with the designation

" remote

" on the TC 400. The mating plug bridges the following connections with the supply voltage (Pin 1), allowing the turbopump to operate without an additional operating unit or remote control:

● Pin 2, Enable venting "on"

● Pin 3, Motor pump "on"

● Pin 4, Pumping station "on"

● Pin 14, Remote access request

 Place and fix the mating plug on the connection " remote

" on the TC 400.

CAUTION

Automatic start

After bridging the contacts Pin 1, 3, 4, 14 on the connection " remote

" or using the mating plug supplied and

setting up the supply voltage, the turbopump will run up immediately.

 Switch on the mains supply on the turbopump immediately before operation.

5.7

Accessory connection

Up to 4 accessories can be connected to the electronic drive unit TC 400. M12 sockets with the designation " accessory

" are available for this purpose. The accessory connections have been preconfigured at the factory. If the units listed below are connected with the preconfigured connection, they are immediately ready for operation according to the factory settings. It is possible to connect other accessories; to do so, settings must be made on the electronic drive unit.

1 1

Y-Connector for Accessories

2 2

 To connect two units to one accessory connection, use the appropriate Y-Connector from the Pfeiffer Vacuum range of accessories.

 Connect the adapter to the appropriate red-coded connection on the TC 400.

 Settings can be made via the interfaces of the TC 400 ( remote

,

RS-485

,

Profibus

or

DeviceNet

).

Accessory connection Connection with Y-connector Preset accessory

Accessory A

Accessory A

Accessory B

Acc. A to Y-1

Acc. A to Y-2

Acc. B to Y-1

Air cooling unit

Backing pump

Venting valve

Accessory B Acc. B to Y-2 Casing heating unit

Table 1: Overview of factory preset accessory connections on the TC 400

22

Installation

5.7.1

Air cooling

As an option, turbopumps with the electronic drive unit TC 400 may be operated with air cooling up to an ambient temperature of +35 °C.

3a

3b

3c

3

Fig. 7: Connecting the air cooling

3 Pump lower part

3a Air cooling unit

3b Allen head screw

3c Counter-sunk screw

 Fix the air cooling unit to the holes of the turbopump using two screws.

 Plug in and fix the accessory’s control lead to the corresponding accessory connection port on the electronic drive unit.

 Default for air cooling is " accessory A1

".

5.7.2

Venting valve

The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or power failure.

The permissible connection pressure is max. 1500 hPa absolute.

18

17a

17

Fig. 8: Connecting the venting valve

18 Seal ring 17 Venting screw 17a Venting valve

 Unscrew the venting screw with seal ring from the venting connection.

 Screw in the venting valve with seal ring.


 Default for the venting valve is " accessory B1

".

 If neccessary install a venting gas supply (e.g. inert gas) to the intake (G 1/8") of the solenoid valve.

23

Installation

5.7.3

Sealing gas connection

The turbopump must be operated with sealing gas to protect it, such as in the case of unclean processes or high gas throughput. The supply is made via a sealing gas valve or alternatively via a sealing gas throttle without control. The activation of the control valve for the sealing gas connection is not pre-installed in the electronic drive unit and has to be configured via their interfaces.

The permissible connection pressure is max. 1500 hPa absolute.

● When operating the pump with more than 50 % of the maximum gas throughput, sealing gas must be used to ensure rotor cooling.

● The sealing gas flow rate amounts 12-15 sccm for the HiPace 400.

Sealing gas supply with control valve

16a

18 16

Fig. 9: Connecting the sealing gas valve

18 Seal ring 16 Locking screw 16a Sealing gas valve

 Unscrew the locking screw with seal ring out of the sealing gas connection.

 Screw the sealing gas valve with seal ring into the sealing gas connection.

 Insert the control cable of the accessory into a free accessory connector on the TC

400 and tighten.

 Make the settings and control via the interfaces of the electronic drive unit.

 Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet side (G 1/8") of the control valve.

Sealing gas supply without control valve

 Unscrew the locking screw with seal ring out of the sealing gas connection.

 Screw the sealing gas throttle with sealing ring into the sealing gas connection.

5.7.4

Heating jacket

The turbopump and vacuum chamber can be heated to reach the ultimate pressure more quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange in stainless steel design. The heating duration depends on the degree of contamination as well as the ultimate pressure to be reached and should be at least 4 hours.

NOTICE

Dangerous excess temperatures

Process-related high temperatures can result in impermissible excess temperatures and thus damage to the turbopump.

 Water cooling must be used when employing a casing heating or during operation with heated vacuum chambers.



Do not introduce any additional energy into the pump (see p. 27, chap. 6.1) .

24

Installation

CAUTION

Risk of burns

High temperatures arise when the turbopump or vacuum chamber are baked out. As a result, there is a danger of burns from touching hot parts, even after the casing heating is switched off!

 Thermally insulate heating jacket, pump housing and vacuum chamber, if possible during installation.

 Do not touch heating jacket, pump casing and vacuum chamber during bake out.

● When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 °C.

● The maximum permissible rotor temperature for the turbopump is 90 °C. If high temperatures arise for process reasons, the radiated heat input must not exceed 4.2 W.

Install suitable screening sheets, if necessary (design information on request).

2x 4d

4

H

4b

4a

4c

Fig. 10: Connecting the heating jacket

4a Heating jacket

4b Fixing screw

4c Heating relay box

4d Warning sticker

 Bend open the outer heating jacket on the tensioning strap and place it sidewards on to the cylindrical segment of the pump casing.

– Do not bend the heating straps!

– The heating jacket must seat completely on the casing segment.

 Fix the heating jacket with the fixing screw on the casing.

– Observe the tightening torque for the fixing screw!

Fixing screw

M5

M6

Tightening torque in cold condition

6 Nm

11 Nm

Tightening torque during the heating-up

7 Nm

12 Nm

Table 2: Tightening torques for fixing screws of heating jackets

Singular retightening after the cooling down

7 Nm

12 Nm


 Default for the casing heating is " accessory B2

".

 Establish the mains supply for the relay box according to the accessory operating instructions.

25

Installation

5.7.5

Water cooling

The turbopumps HiPace 400 with TC 400 have water cooling as standard equipment.

● In case of increased backing pressure (> 0.1 hPa) and/or operation with high gas throughputs, either air or water cooling may be used.

● Generally use water cooling if the ambient temperature is > +35 °C.

Cooling water requirements

Cooling water connection

Hose lines

Cooling water quality

Oxygen content max.

Chloride content max.

Water hardness max.

Socket connection

External diameter 8 mm

Internal diameter 6 mm

Consumption of potassium permanganate max.

Carbon dioxide content max.

Ammonia content max.

pH-value

Fore-line overpressure max.

Cooling water temperature

Cooling water consumption at max. gas throughput filtrated, mechanically clean, optically clear, no turbidity, no sediments, chemically neutral

4 mg/kg

100 mg/kg

10 °dH

12.53 °e

17.8 °fH

178 ppm CaC0

3

10 mg/kg undetectable undetectable

7 - 9

6000 hPa refer to "Technical Data" refer to "Technical Data"

Connecting to a cooling water system

14a

14c

14 14b

Fig. 11: Connecting the cooling water

14 Cooling water connection

14a Fore-line

14b Return line

14c Dirt trap

 Insert hoses for the water cooling fore- and return-line as far as they will go in one cooling water connection each.



Recommendation:

install dirt trap in the fore-line.

26

Operation

6 Operation

6.1

Commissioning

The following important settings are programmed in the electronic drive unit ex factory.

● Parameter [P:027] Gas mode: 0 = heavy gases

● Parameter

[P:700]

Set value max. run-up time monitoring: 8 min

● Parameter

[P:701]

Rotation speed switchpoint: 80% of the nominal roation speed

● Parameter [P:707] Set value in rotation speed setting mode: 65 % of the nominal rotation speed

● Parameter

[P:708]

Set value power consumption: 100 %

● Parameter

[P:720]

Venting rotation speed at delayed venting: 50 % of the nominal rotation speed

● Parameter [P:721] Venting time: 3600 s

 When water cooling is used: Open cooling water supply and check the flow.

 When sealing gas is used: Open the sealing gas supply and check the flow.

 Establish the mains for the power supply.

NOTICE

Risk of destroying the pump by inputting too much energy

Simultaneous loading by means of high drive power (gas flow rate, fore-vacuum pressure), high heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and may destroy the pump.

 Reduced limit values apply when combining these loads.

 If necessary consult with Pfeiffer Vacuum.

NOTICE

Danger of the pump being destroyed

Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.

 Ensure the gas mode is correctly set.

 Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

6.2

Operation modes

The following operation modes are available:

● Operation without operating unit

● Operation via " remote

" connection

● Operation via RS-485 and Pfeiffer Vacuum display and control units or PC

● Operation via field bus

6.3

Function description

WARNING

Danger due to open high vacuum flange

The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there is a danger of cut injuries and that the pump can be destroyed by objects falling into it.

 Never operate the pump with an open high vacuum flange.

27

Operation

6.3.1

Operation without operating unit

CAUTION

Automatic start

After bridging the contacts Pin 1, 3, 4, 14 on the connection " remote

" or using the mating plug supplied and

setting up the supply voltage, the turbopump will run up immediately.

 Switch on the mains supply on the turbopump immediately before operation.

 For operation without the control unit, the 26-pole D-Sub plug must be in the " remote

" connection on the TC 400.

 Switch on the supply voltage with switch S1 on the power supply.

After operating voltage is applied, the TC 400 performs a self-test to check the supply voltage. Once the self-test has been successfully completed on the TC 400, the turbopump and the backing pump - if connected - begin to operate.

6.3.2

Operation via "remote" connection

Remote control is possible via the 26-pin D-sub connector labelled " remote

" on the electronic drive unit. The accessible individual functions are mapped to "PLC levels".

 Consider the following manuals for the operation via remote control:

● Operating instructions "Electronic drive unit TC 400"

6.3.3

Operation with DCU or HPU

 Consider the following manuals for the operation via Pfeiffer Vacuum display and control units:

● Operating instructions "DCU"

● Operating instructions "HPU"

● Operating instructions "Electronic drive unit TC 400"

 Switch on the supply voltage with switch S1 on the power supply or on the DCU 400.

 Settings are possible via interface RS-485 by using DCU, HPU or PC.

6.3.4

Operation via fieldbus

Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible for electronic drive units with a corresponding field bus panel.

 Consider the following manuals for the operation via field bus:

● Operating instructions for the electronic drive unit with the respective connection panel

6.4

Monitoring of the operation conditions

6.4.1

Temperature monitoring

The drive power is reduced in case of impermissible motor temperature or impermissibly high housing temperature. This can cause falling below the rotation speed switchpoint and so result in turning off the turbopump.

28

Operation

6.4.2

Operation display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for operation with DCU or HPU.

LED Symbol LED status

Green Off

On, flashing

On, invers flashing

Display

Yellow

On, constantly

On, blinking

Off

On, constantly

Meaning currentless

"Pumping Station OFF", rotation speed ≤ 60 min

-1

"Pumping Station ON", set rotation speed not attained

"Pumping Station ON", set rotation speed attained

"Pumping Station OFF", rotation speed > 60 min

-1 no warning

Warning

Red Off

On, constantly no malfunction

Malfunction

Fig. 12: Behaviour and meaning of LEDs on the electronic drive unit

6.5

Switching off and venting

6.5.1

Switching off

After the turbopump is switched off, it must be vented to avoid contamination due to particles streaming back from the fore-vacuum area.

 Close the fore-vacuum: Switch off the backing pump or close a fore-vacuum valve.

 Switch off the turbopump on the control unit or via remote control.

 Venting (possibilities see below)

 For water cooling: Shut off the water supply.

6.5.2

Venting

Manually venting

 Open the venting screw (included) in the venting connection of the turbopump about one turn.

Venting with Pfeiffer Vacuum Venting Valve

 Enable venting via the functions of the electronic drive unit.

 Settings are possible via interface RS-485 by using DCU, HPU or PC.

Venting rotation speed Switch off the pumping station Mains power failure

1)

50 % of the nominal rotation Venting valve opens for 3600 s (1 h, speed works setting)

1) When mains power is restored the venting procedure is aborted.

Venting valve opens for

3600 s (1 h, works setting)

Basic information for the rapid venting

Venting of the vacuum chamber in two steps. Ask for details on individual solutions from

Pfeiffer Vacuum.

 Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.

– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size of the vacuum chamber.

– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.

 Then vent with an additional venting valve of any desired size.

29

Maintenance / replacement

7 Maintenance / replacement

WARNING

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to prevent danger to health through dangerous substances.

 Decontaminate affected parts before carrying out maintenance work.

NOTICE

Disclaimer of liability

Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or operating malfunctions due to improperly performed maintenance. The liability and warranty entitlement expires.

7.1

Maintenance intervals and responsibilities

● Clean the turbopump externally with a lint-free cloth and little industrial alcohol.

● Replace the operating fluid reservoir and electronic drive unit yourself.

● Change the operating fluid reservoir at least every 4 years.

● Change the turbopump bearing at least every 4 years.

– Contact Pfeiffer Vacuum Service.

● Clarify shorter maintenance intervals for extreme loads or impure processes with Pfeiffer Vacuum Service.

● For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacuum service location.

7.2

Replacing the operating fluid reservoir

WARNING

Poisoning hazard through contact with materials that damage health.

The operating fluid reservoir and parts of the pump may contain toxic substances from the pumped media.

 Dispose of operating fluid reservoir in accordance with the applicable regulations.

Safety data sheet on request or under www.pfeiffer-vacuum.com

 Prevent health hazards or environmental damage due to contamination by means of appropriate safety precautions.


Operating fluid filling

The operating fluid reservoir is sufficiently filled with operating fluid.

 Do not add additional operating fluid.

 Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.

 Remove the vacuum pump from the system, if necessary.


 Turn the turbopump over onto the closed high vacuum flange.

30

6

55

7


6

6 End cover

55 Allen head screw

7 Operating fluid reservoir

 Screw out the Allen head screws (3x) from the end cover at the bottom of the turbopump.

 Remove the end cover. Pay attention to the O-ring.

7

15

7b

7a

7 Operating fluid reservoir

7a Porex rod

7b Felt washer

15 Splash nut

 Remove the operating fluid reservoir out of the bearing cartridge.

 Using tweezers, pull out the Poroplast rods (9x).

 Remove impurities from the turbopump and the end cover with a clean, lint-free cloth.

Do not use any cleaning fluids!

 Using tweezers, insert the new Poroplast rods (9x).

 Install the new operating fluid reservoir in the bearing mounting of the turbopump with the felt side oriented toward the nozzle tip.

 For the HiPace turbopumps the operating fluid reservoir can be inserted completely into the bearing cartridge.

 Screw in the end cover with the new O-ring.

– Tightening torque:

2.5 Nm

.

31


7.3

Replacing the electronic drive unit

NOTICE

Damages to the pump and drive

Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.

 Never separate the electronic drive unit from the pump when the mains power is connected or the rotor is running.

Operating parameters of the electronic drive unit

The factory operating parameters are always preset with replacement shipments.

 The use of a HPU enables the storing and the reuse of an existing parameter record.

 Reset any individually changed application parameters.

 Refer to the manual "Electronic drive unit".

57 8

Fig. 13: Assembly / disassembly of the TC 400

8 Electronic drive unit 57 Allen head screw

 Do not exercise any mechanical load on the electronic drive unit.

 Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.

 Only separate the pump and the electronic drive unit from each other after disconnecting the supply voltage and the complete standstill of the pump.


 Unscrew Allen head screws (3x) from the electronic drive unit.

 Pull the electronic drive unit off the pump.

 Screw on and connect new electronic drive unit to the turbopump.

– Tightening torque:

2.5 Nm

.

7.3.1

Rotation speed set value

The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.

HiPace

300

400 / 700 / 800

Nominal rotation speed confirmation [P:777]

1000 Hz

820 Hz

 Adjust the parameter

[P:777]

according to the pump type.



Alternatively

: If no display and control unit is available, please use the "SpeedConfigurator" of the spare parts delivery.

32

Decommissioning

8 Decommissioning

8.1

Shutting down for longer periods

WARNING

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to prevent danger to health through dangerous substances.


If the turbopump should be shut down for longer than a year:


 Replace the operating fluid reservoir if necessary.

 Close the high vacuum flange of the turbopump.

 Evacuate turbopump via the fore-vacuum flange.

 Vent turbopump via the venting connection with oil-free, dry air or inert gas.


 Close further connection ports by using the corresponding protective covers.

 Place pump upright on rubber feet.

 Store the pump only indoors at temperatures between -25 °C and +55 °C.

 In rooms with moist or aggressive atmospheres, the pump must be airproof shrinkwrapped in a plastic bag together with a bag of desiccant.

8.2

Re-starting

NOTICE

Risk of damage to the pump following recommissioning

The operating fluid in the turbo pump has a limited shelf life. The length of its shelf life is as follows:

● max. 2 years without operation or

● a total of max. 4 years following periods of operation and nonoperation.

 Follow the maintenance instructions and inform Pfeiffer Vacuum.

 Check turbopump for contamination and moisture.

 Clean the turbopump externally with a lint-free cloth and little industrial alcohol.

 If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.

 Replace the operating fluid reservoir if necessary.

 If necessary, have the bearings replaced. Take into account the total running time.

 Installation and commissioning in accordance with the operating instructions.

8.3

Disposal

Products or parts thereof (mechanical and electrical components, operating fluids, etc.) may cause environmental burden.

 Safely dispose of the materials according to the locally applicable regulations.

33

Malfunctions

9 Malfunctions

If malfunctions on the pump occur, you will find possible causes and instructions for repair in the following table.

9.1

Rectifying malfunctions

Problem

Pump does not start; none of the built-in

LEDs on the TC 400 lights up

Pump does not start; green LED on the TC

400 is flashing

Pump does not attain the final rotational speed within the specified run-up time

Pump does not attain the ultimate pressure

Unusual noises during operation

Red LED on the TC 400 is on

Possible causes

● Electrical supply interrupted

● Operating voltage incorrect

● No operating voltage applied

● TC 400 defective

● At operation without control panel:

Pins 1-3, 1-4 or 1-14 are not connected on the "remote" connection

● At operation via RS-485: Bridge at Pin 1-

14 prevents control commands

● At operation via RS-485 (without mating plug): Parameters of the electronic drive unit not set

● Voltage drop in the cable too high

● Fore-vacuum pressure too high

● Leak

● Gas throughput too high

● Rotor runs hard, bearing defective

● Setpoint for run-up time to low

● Thermal overload:

– Lack of air ventilation

– Water flow too low

– Fore-vacuum pressure too high

– Ambient temperature too high

● Pump is dirty

● Vacuum chamber, pipes or pump are leaky

● Bearing damage

● Rotor damage

● Splinter shield or protective screen are loose

● Collective fault

Remedy

 Check plug contacts on the power supply

 Check supply lines on the power supply

 Check the output voltage (24 / 48 V DC) on the connection "DC out" of the power supply

 Check the plug contacts on the TC

 Apply correct operating voltage

 Observe the rating plate

 Apply operating voltage

 Exchange the TC 400

 Contact the Pfeiffer Vacuum Service

 Connect the pins 1-3, 1-4 or 1-14 on the "remote" connection

 Install the mating plug (scope of delivery) to the

"remote" connection.

 Remove the bridge betwenn pins 1 and 14 from the "remote" connection

 Remove the mating plug from the "remote" connection.

 Set parameters

[P: 010]

and

[P: 023]

"ON" via interface RS-485.

 Please refer to operating instructions of the electronic drive unit.

 Use a suitable cable

 Ensure function and suitability of the backing pump

 Perform leak detection

 Check sealings and flange fastenings

 Eliminate leaks

 Reduce process gas supply

 Check the bearing for noises


 Extend the run-up time via DCU, HPU or PC

 Reduce thermal loads

– Ensure adequate cooling

– Ensure the cooling water flow

– Lower the fore-vacuum pressure

– Adjust ambient conditions

 Bake out the pump

 Cleaning in case of heavy contamination

– Contact the Pfeiffer Vacuum Service

 Leak detection starting from the vacuum chamber

 Eliminate leaks



 Correct the seat of the splinter shield or the protective screen

 Observe the installation notes

 Reset by switching the mains OFF/ON

 Reset via pin 13 on the "REMOTE" connection

 Differentiated malfunction display is possible via

RS-485

1)


1)

If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Service.

34

Service

10 Service

Pfeiffer Vacuum offers first-class service!

● Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService

● Maintenance / repair in the nearby ServiceCenter or ServicePoint

● Fast replacement with exchange products in mint condition

● Advice on the most cost-efficient and quickest solution

Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service ).

Maintenance and repair in the Pfeiffer Vacuum ServiceCenter

The following steps are necessary to ensure a fast, smooth servicing process:

 Download the forms "Service Request" and "Declaration on Contamination".

1)

 Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address.

 Include the confirmation on the service request from Pfeiffer Vacuum with your shipment.

 Fill out the declaration on contamination and include it in the shipment (required!).

 Dismantle all accessories.

 Drain the operating fluid (applies for turbopumps with pumping speed > 800 l/s).

 Leave electronic drive on the pump.


 If possible, send pump or unit in the original packaging.

Sending of contaminated pumps or devices

No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. “Hazardous substances” are substances and compounds in accordance with the hazardous goods directive (current version). If pumps are contaminated or the declaration on contamination is missing, Pfeiffer Vacuum performs decontamination at the shipper's expense.

 Neutralise the pump by flushing it with nitrogen or dry air.

 Close all openings airtight.

 Seal the pump or unit in suitable protective film.

 Return the pump/unit only in a suitable and sturdy transport container and send it in while following applicable transport conditions.

Exchange unit

The factory operating parameters are always preset with exchange units. If you use changed parameters for your application, you have to set these again.

Service orders

All service orders are carried out exclusively according to our repair conditions for vacuum units and components.

1)

Forms under www.pfeiffer-vacuum.com

35

Spare parts HiPace 400

11 Spare parts HiPace 400

Item

7

8

93

Designation

Operating fluid reservoir


Mating plug "remote"

Order number Notes

PM 143 452 -T incl. Poroplast rods according to the rating plate depends on the connection panel

PM 061 378 -X with bridges

Pieces Order qty

1

1

1

7

8

Please also specify model number of the the rating plate when ordering accessories or spare parts.

36

Accessories

12 Accessories

12.1 HiPace 400, 48 V DC

Designation

Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring

Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring, protection screen, bracket screws

Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring, splinter shield, bracket screws

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with splinter shield, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with protection screen, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring, stud screws

Mounting kit for DN 100 ISo-K to ISO-F, with collar flange, coated centering ring with splinter shield, stud screws

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with protection screen, stud screws

Set of hexagon screws for through hole, DN 100 CF-F

Set of stud screws for tapped hole, DN 100 CF-F

Set of stud screws for through hole, DN 100 CF-F

Mounting kit for DN 100 ISO-F, including coated centering ring, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, protective screen, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, splinter shield, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, stud screws

Mounting kit for DN 100 ISO-F, including coated centering ring, protection screen, stud screws

Mounting kit for DN 100 ISO-F, including coated centering ring, splinter shield, stud screws

Centering ring with multifunction coating, DN 100 ISO-K/-F

Centering ring with multifunction coating and integrated protection screen, DN 100 ISO-K/-F

Centering ring with multifunction coating and integrated splinter shield, DN 100 ISO-K/-F

Vibration damper for HiPace 300/400, DN 100 ISO-K/F

Protection screen for DN 100 CF-F

Splinter shield for turbopumps, DN 100 CF-F

Vibration damper for HiPace 300/400, DN 100 CF-F

DN 100 ISO-K

PM 016 380 -T

PM 016 382 -T

PM 016 381 -T

PM 016 940 -T

PM 016 941 -T

PM 016 942 -T

PM 016 945 -T

PM 016 946 -T

PM 016 947 -T

PM 016 210 -U

PM 016 212 -U

PM 016 211 -U

PM 006 459 -X

TPS 400, power supply 48 V DC, for wall/standard rail fitting

TPS 401, power supply 48 V DC, 19" partial plug-in 3HU

DCU 400, Display control unit incl. power supply

Mains cable 230 V AC, CEE 7/7 to C13, 3 m

Mains cable 115 V AC, NEMA 5-15 to C13, 3 m

Mains cable 208 V AC, NEMA 6-15 to C13, 3 m

DCU 002, Display Control Unit

HPU 001, Handheld Programming Unit

Accessories package for HPU 001/PC

Connection cable for HiPace with TC 400/TM 700 to power supply

TPS/DCU 310/311/400/401

Backing pump relay box, single phase 20 A, for TC 400 and TCP 350,

M12 plug

Relay box, shielded, for backing pumps, 1-phase 7 A for TC 400/1200,

TM 700 and TCP 350, M12

PM 061 343 -T

PM 061 347 -T

PM C01 823

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZF

PM 061 348 -T

PM 051 510 -T

PM 061 005 -T

PM 061 352 -T

PM 061 375 -T

PM 071 284 -X

DN 100 CF-F

PM 016 690 -T

PM 016 866 -T

PM 016 734 -T

PM 016 336

PM 016 315

PM 006 488 -X

PM 061 343 -T

PM 061 347 -T

PM C01 823

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZF

PM 061 348 -T

PM 051 510 -T

PM 061 005 -T

PM 061 352 -T

PM 061 375 -T

PM 071 284 -X

DN 100 ISO-F

PM 016 450 -T

PM 016 452 -T

PM 016 451 -T

PM 016 455 -T

PM 016 457 -T

PM 016 456 -T

PM 016 210 -U

PM 016 212 -U

PM 016 211 -U

PM 006 459 -X

PM 061 343 -T

PM 061 347 -T

PM C01 823

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZF

PM 061 348 -T

PM 051 510 -T

PM 061 005 -T

PM 061 352 -T

PM 061 375 -T

PM 071 284 -X

37

Accessories

Designation

TVV 001 fore-vacuum safety valve, 230 V AC

TVV 001 fore-vacuum safety valve, 115 V AC

Heating jacket for HiPace 400/700/800 with TC 400, 230 V AC, safety plug

Heating jacket for HiPace 400/700/800 with TC 400, 208 V AC, UL plug

Heating jacket for HiPace 400/700/800 with TC 400, 115 V AC, UL plug

Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 400/

1200 and TM 700

TTV 001, dryer for venting turbopumps

Sealing gas valve, shielded for HiPace 300 with TC 400 and TM 700,

TCP 350

Sealing gas throttle for HiPace 300

Air cooling for HiPace 400/700 and 800 with TC 400

USB converter to RS-485 interface

Interface cable, M12 m straight/M12 m straight, 3 m

HiPace - ACP connection cable

Control cable for pumping stations 0.7 m

Y-Connector M12 to RS-485

Y-connector, shielded, M12 for accessories

RJ 45 interface cable on M12 for HiPace

Termination resistor for RS-485

Wall rail fitting for TPS 110/180/310/400

Front panel kit for TPS 401

Power separator for RS-485

TIC 010, Adapter for two sensors

RPT 010, Digital Piezo/Pirani Sensor

IKT 010, Digital Cold Cathode Sensor, low current

IKT 011, Digital Cold Cathode Sensor, high current

DN 100 ISO-K

PM Z01 205

PM Z01 206

PM Z01 291

PM Z00 121

PM Z01 312

PM Z01 317

PM Z01 303

PM 061 207 -T

PM 061 283 -T

PM 071 142 -X

PM 061 675 AT

P 4723 010

P 4723 013

PM 051 726 -T

PT 348 105 -T

PM 061 392 -T

PM 061 396 -T

PT 348 132 -T

PT R70 000

PT R71 100

PTR 72 100

PT R73 100

DN 100 CF-F

PM Z01 205

PM Z01 206

PM 061 369 -T

PM 061 370 -T

PM 061 371 -T

PM Z01 291

PM Z00 121

PM Z01 312

PM Z01 317

PM Z01 303

PM 061 207 -T

PM 061 283 -T

PM 071 142 -X

PM 061 675 AT

P 4723 010

P 4723 013

PM 051 726 -T

PT 348 105 -T

PM 061 392 -T

PM 061 396 -T

PT 348 132 -T

PT R70 000

PT R71 100

PTR 72 100

PT R73 100

DN 100 ISO-F

PM Z01 205

PM Z01 206

PM Z01 291

PM Z00 121

PM Z01 312

PM Z01 317

PM Z01 303

PM 061 207 -T

PM 061 283 -T

PM 071 142 -X

PM 061 675 AT

P 4723 010

P 4723 013

PM 051 726 -T

PT 348 105 -T

PM 061 392 -T

PM 061 396 -T

PT 348 132 -T

PT R70 000

PT R71 100

PTR 72 100

PT R73 100

12.2 Differences at HiPace 400, 24 V DC

Designation

TPS 310, mains pack for wall/standard rail fitting

TPS 311, mains pack 19" rack module 3HU

Front panel kit for TPS 311

DCU 310, Display control unit incl. power supply

DN 100 ISO-K

PM 061 342 -T

PM 061 346 -T

PM 061 395 -T

PM C01 822

DN 100 CF-F

PM 061 342 -T

PM 061 346 -T

PM 061 395 -T

PM C01 822

DN 100 ISO-F

PM 061 342 -T

PM 061 346 -T

PM 061 395 -T

PM C01 822

38

Technical data and dimensions

13 Technical data and dimensions

13.1 General

Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:

Maximum values refer exclusively to the input as a single load.

● Recommendations of PNEUROP committee PN5

● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuumpump performance - General description"

● ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics"

● Ultimate pressure: using a test dome and a 48 hrs. period of baking out

● Gas throughput: water cooling; backing pump = rotary vane pump (10 m

3

/h)

● Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C

● Integral leak rate: using a Helium concentration of 100 %, period 10 s

● Sound pressure level: Distance 1 m to the pump

Conversion table: pressure units mbar bar

mbar

bar

Pa

hPa

kPa

Torr

mm Hg

1

1000

0.01

1

10

1.33

Pa

1 · 10

-3

1

1 · 10

-5

1 · 10

-3

0.01

1.33 · 10 -3

100

1 · 10 5

1

100

1000

133.32

1 Pa = 1 N/m

2

Conversion table: gas throughput units

mbar·l/s

Pa·m

3

/s

sccm

Torr·l/s

atm·cm

3

/s mbar·l/s

1

10

1.69 · 10

-2

1.33

1.01

Pa·m

3

/s

0.1

1

1.69 · 10

-3

0.133

0.101

sccm

59.2

592

1

78.9

59.8

hPa

1

1000

0.01

1

10

1.33

Torr·l/s

0.75

7.5

1.27 · 10

-2

1

0.76

kPa

0.1

100

1 · 10

-3

0.1

1

0.133

Torr mm Hg

0.75

750

7.5 · 10

-3

0.75

7.5

1 atm·cm

3

/s

0.987

9.87

1.67 · 10

-2

1.32

1

13.2 HiPace 400, 48 V DC

Parameter

Flange (in)

Flange (out)

Pumping speed for Ar

Pumping speed for H

2

Pumping speed for He

Pumping speed for N

2

Compression ratio for Ar

Compression ratio for H

2

Compression ratio for He

Compression ratio for N

2

Gas throughput at full rotational speed for Ar

Gas throughput at full rotational speed for He

Gas throughput at full rotational speed for H

2

Gas throughput at full rotational speed for N

2

Fore-vacuum max. for Ar

Fore-vacuum max. for H

2

HiPace

®

400

DN 100 ISO-K

DN 25 ISO-KF / G 1/4"

320 l/s

445 l/s

470 l/s

355 l/s

> 1 · 10 11

4 · 10

5

3 · 10

7

> 1 · 10 11

3.5 hPa l/s

20 hPa l/s

> 14 hPa l/s

6.5 hPa l/s

11 hPa

6 hPa

HiPace

®

400

DN 100 CF-F

DN 25 ISO-KF / G 1/4"

320 l/s

445 l/s

470 l/s

355 l/s

> 1 · 10 11

4 · 10

5

3 · 10

7

> 1 · 10 11

3.5 hPa l/s

20 hPa l/s

> 14 hPa l/s

6.5 hPa l/s

11 hPa

6 hPa

HiPace

®

400

DN 100 ISO-F

DN 25 ISO-KF / G 1/4"

320 l/s

445 l/s

470 l/s

355 l/s

> 1 · 10 11

4 · 10

5

3 · 10

7

> 1 · 10 11

3.5 hPa l/s

20 hPa l/s

> 14 hPa l/s

6.5 hPa l/s

11 hPa

6 hPa

39


Parameter

Fore-vacuum max. for He

Fore-vacuum max. for N

2

Run-up time

Ultimate pressure according to PNEUROP

Rotation speed ± 2 %

Rotation speed variable

Power characteristic line in gas mode 1, vertex A

Power characteristic line in gas mode 1, vertex B

Power characteristic line in gas mode 0, vertex C

Power characteristic line in gas mode 0, vertex D

Power characteristic line in gas mode 2, vertex E

Power characteristic line in gas mode 2, vertex F

Sound pressure level

Relative humidity of air

Protection category

HiPace

®

400

13 hPa

11 hPa

2 min

< 1 · 10

-7 hPa

49200 min

-1

60-100 %

214/49200 W/min -1

240/42000 W/min -1

200/49200 W/min

-1

200/42000 W/min

-1

340/49200 W/min -1

350/46800 W/min

-1

 50 dB (A)

IP54

Connection pressure max. for venting/sealing gas valve 1500 hPa

Drive power max.

350 W

Operating voltage

Operating voltage power supply

Integral leak rate

48 (± 5 %) V DC

90-265 V AC

< 1 · 10 -8 Pa m 3 /s

HiPace

®

400

13 hPa

11 hPa

2 min

< 5 · 10

-10 hPa

49200 min

-1

60-100 %

214/49200 W/min -1

240/42000 W/min -1

200/49200 W/min

-1

200/4200 W/min

-1

340/49200 W/min -1

350/46800 W/min

-1

 50 dB (A)

5-85, non-condensing % 5-85, non-condensing % 5-85, non-condensing %

IP54

1500 hPa

350 W

48 (± 5 %) V DC

90-265 V AC

< 1 · 10 -8 Pa m 3 /s

HiPace

®

400

13 hPa

11 hPa

2 min

< 1 · 10

-7 hPa

49200 min

-1

60-100 %

214/49200 W/min -1

240/42000 W/min -1

200/49200 W/min

-1

200/42000 W/min

-1

340/49200 W/min -1

350/46800 W/min

-1

 50 dB (A)

IP54

1500 hPa

350 W

48 (± 5 %) V DC

90-265 V AC

< 1 · 10 -8 Pa m 3 /s

Power consumption max.

Current consumption max.

Shipping and storage temperature

Mounting orientation

Venting connection

Weight

Cooling method, standard

Cooling method, optional

Cooling water temperature

Cooling water consumption

Permissible irradiated thermal power max.

Permissible magnetic field max.

Interfaces

420 W

8.75 A

-25-+55 °C in any orientation

G 1/8"

11.6 kg

Water

Air

15-35 °C

100 l/h

4.2 W

6 mT

RS-485, Remote

420 W

8.75 A

-25-+55 °C in any orientation

G 1/8"

17.5 kg

Water

Air

15-35 °C

100 l/h

4.2 W

6 mT

RS-485, Remote

420 W

8.75 A

-25–+55 °C in any orientation

G 1/8"

12 kg

Water

Air

15-35 °C

100 l/h

4.2 W

6 mT

RS-485, Remote

13.3 Differences at HiPace 400, 24 V DC

Parameter

Flange (in)

Run-up time

Operating voltage

Power consumption max.

Current consumption max.

HiPace

®

400

DN 100 ISO-K

4 min

24 (± 5 %) V DC

300 W

12.5 A

HiPace

®

400

DN 100 CF-F

4 min

24 (± 5 %) V DC

300 W

12.5 A

HiPace

®

400

DN 100 ISO-F

4 min

24 (± 5 %) V DC

300 W

12.5 A

40

13.4 Dimensions

VV

DN 25 ISO-KF / G 1/4“

59

16.7° 30°

ø 8

117

VV

DN 25 ISO-KF / G 1/4“

ø 150

M8 (6x)

M8 (6x)

45°

45°

59

16.7°

Fig. 14: HiPace 400, DN 100 ISO-K

30°

ø 8

11

7

VV

DN 25 ISO-KF / G1/4"

ø 150

M8 (6x)

45°

45°

59

16.7°

Fig. 15: HiPace 400, DN 100 CF-F

30°

ø 8

116.9

ø 150

M8 (6x)

45°

45°

Fig. 16: HiPace 400, DN 100 ISO-F

145.5

145.5

145.5


HV

DN 100 ISO-K

HV

DN 100 CF-F

HV

DN 100 ISO-F

41

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions according to the following

EC directives

:

● Machinery 2006/42/EC (Annex II, no. 1 A)

● Electromagnetic Compatibility 2014/30/EU

The agent responsible for compiling the technical documentation is Mr. Helmut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

HiPace 400

Harmonised standards and national standards and specifications which have been applied:

DIN EN ISO 12100 : 2011-03

DIN EN 1012-2 : 1996

DIN EN 61000-3-2 : 2010

DIN EN 61000-3-3 : 2009

DIN EN 61010-1 : 2010

DIN EN 61326-1 : 2013

DIN EN 62061 : 2013

Signature:

Pfeiffer Vacuum GmbH

Berliner Straße 43

35614 Asslar

Germany

2016-04-25 (Dr. Ulrich von Hülsen)

Managing Director

VACUUM SOLUTIONS FROM A SINGLE SOURCE

Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service.

COMPLETE RANGE OF PRODUCTS

From a single component to complex systems:

We are the only supplier of vacuum technology that provides a complete product portfolio.

COMPETENCE IN THEORY AND PRACTICE

Benefit from our know-how and our portfolio of training opportunities!

We support you with your plant layout and provide first-class on-site service worldwide.

Are you looking for a perfect vacuum solution?

Please contact us:

Pfeiffer Vacuum GmbH

Headquarters • Germany

T +49 6441 802-0 [email protected]

www.pfeiffer-vacuum.com

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