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Installation
5.2.1
Earthquake safety
An earthquake can result in contact with the safety bearings. All forces occuring hereby are safely absorbed by the properly installed flange connections.
Secure the vacuum chamber against shifting and tipping on customers side.
VACUUM CHAMBER
Fig. 3: Example: How to secure against shifting and tipping by external tremors
= Safety connection, implementation each by the customer
5.2.2
Use of a splinter shield or protection screen
Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vacuum flange protect the turbopump against foreign bodies coming from the chamber.
Thus, the pumping speed of the pump is reduced.
Splinter shield DN 100
Protection screen DN 100
Reduced volume flow rate in %
H
2
4
2
He
7
1
N
2
19
5
Ar
22
5
5.2.3
Vibration damper
WARNING
Danger from the turbopump and vibration damper being torn-off
In case of sudden blocking of the rotor, an applied vibration damper cannot compensate any of the occurring forces. There is a danger of the turbopump being torn-off and thereby resulting severest injuries and property damages. Applicable safeguards must be taken to compensate possible occurring torques.
Definitely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration damper (100 °C).
14
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Table of contents
- 4 About this manual
- 4 1.1 Validity
- 4 1.1.1 Applicable documents
- 4 1.2 Conventions
- 4 1.2.1 Safety instructions
- 5 1.2.2 Pictographs
- 5 1.2.3 Instructions in the text
- 5 1.2.4 Abbreviations
- 5 1.2.5 Symbols used
- 6 Safety
- 6 2.1 Safety precautions
- 7 2.2 Protective equipment
- 7 2.3 Proper use
- 8 2.4 Improper use
- 9 Transport and storage
- 9 3.1 Transport
- 9 3.2 Storage
- 10 Product description
- 10 4.1 Product identification
- 10 4.1.1 Pump types
- 10 4.1.2 Pump features
- 10 4.1.3 Variants
- 10 4.1.4 Scope of delivery
- 11 4.2 Function
- 11 4.2.1 Cooling
- 11 4.2.2 Rotor bearing
- 11 4.2.3 Drive
- 12 4.3 Range of application
- 13 Installation
- 13 5.1 Preparatory work
- 13 5.2 Set-up
- 14 5.2.1 Earthquake safety
- 14 5.2.2 Use of a splinter shield or protection screen
- 14 5.2.3 Vibration damper
- 15 5.3 Mounting orientation
- 16 5.4 Connecting the high vacuum side
- 16 5.4.1 Installation of ISO-K flange with ISO-K flange
- 17 5.4.2 Installation of ISO-K flange with ISO-F flange
- 18 5.4.3 Installation of ISO-F with ISO-F flange
- 19 5.4.4 Installation of CF- flanges
- 20 5.5 Connecting the fore-vacuum side
- 21 5.6 Connections to the turbopump
- 21 5.6.1 Electronic drive unit
- 21 5.6.2 Earthing
- 21 5.6.3 Power and electrical supply
- 22 5.6.4 Remote plug
- 22 5.7 Accessory connection
- 23 5.7.1 Air cooling
- 23 5.7.2 Venting valve
- 24 5.7.3 Sealing gas connection
- 24 5.7.4 Heating jacket
- 26 5.7.5 Water cooling
- 27 Operation
- 27 6.1 Commissioning
- 27 6.2 Operation modes
- 27 6.3 Function description
- 28 6.3.1 Operation without operating unit
- 28 6.3.2 Operation via "remote" connection
- 28 6.3.3 Operation with DCU or HPU
- 28 6.3.4 Operation via fieldbus
- 28 6.4 Monitoring of the operation conditions
- 28 6.4.1 Temperature monitoring
- 29 6.4.2 Operation display via LED
- 29 6.5 Switching off and venting
- 29 6.5.1 Switching off
- 29 6.5.2 Venting
- 30 Maintenance / replacement
- 30 7.1 Maintenance intervals and responsibilities
- 30 7.2 Replacing the operating fluid reservoir
- 32 7.3 Replacing the electronic drive unit
- 32 7.3.1 Rotation speed set value
- 33 Decommissioning
- 33 8.1 Shutting down for longer periods
- 33 8.2 Re-starting
- 33 8.3 Disposal
- 34 Malfunctions
- 34 9.1 Rectifying malfunctions
- 35 Service
- 36 Spare parts HiPace
- 37 Accessories
- 37 12.1 HiPace 400, 48 V DC
- 38 12.2 Differences at HiPace 400, 24 V DC
- 39 Technical data and dimensions
- 39 13.1 General
- 39 13.2 HiPace 400, 48 V DC
- 40 13.3 Differences at HiPace 400, 24 V DC
- 41 13.4 Dimensions
- 42 Declaration of conformity