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6
Safety
2 Safety
2.1
Safety precautions
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTICE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. Installation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any time.
● Do not expose any body parts to the vacuum.
● Observe all safety and accident prevention regulations.
● Regularly check the proper observance of all safety measures.
●
Power supply:
The turbopump power supply must apply to the requirements of double insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.
● A safe connection to the protective earthing conductor (PE) is recommended (protection class III).
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Table of contents
- 4 About this manual
- 4 1.1 Validity
- 4 1.1.1 Applicable documents
- 4 1.2 Conventions
- 4 1.2.1 Safety instructions
- 5 1.2.2 Pictographs
- 5 1.2.3 Instructions in the text
- 5 1.2.4 Abbreviations
- 5 1.2.5 Symbols used
- 6 Safety
- 6 2.1 Safety precautions
- 7 2.2 Protective equipment
- 7 2.3 Proper use
- 8 2.4 Improper use
- 9 Transport and storage
- 9 3.1 Transport
- 9 3.2 Storage
- 10 Product description
- 10 4.1 Product identification
- 10 4.1.1 Pump types
- 10 4.1.2 Pump features
- 10 4.1.3 Variants
- 10 4.1.4 Scope of delivery
- 11 4.2 Function
- 11 4.2.1 Cooling
- 11 4.2.2 Rotor bearing
- 11 4.2.3 Drive
- 12 4.3 Range of application
- 13 Installation
- 13 5.1 Preparatory work
- 13 5.2 Set-up
- 14 5.2.1 Earthquake safety
- 14 5.2.2 Use of a splinter shield or protection screen
- 14 5.2.3 Vibration damper
- 15 5.3 Mounting orientation
- 16 5.4 Connecting the high vacuum side
- 16 5.4.1 Installation of ISO-K flange with ISO-K flange
- 17 5.4.2 Installation of ISO-K flange with ISO-F flange
- 18 5.4.3 Installation of ISO-F with ISO-F flange
- 19 5.4.4 Installation of CF- flanges
- 20 5.5 Connecting the fore-vacuum side
- 21 5.6 Connections to the turbopump
- 21 5.6.1 Electronic drive unit
- 21 5.6.2 Earthing
- 21 5.6.3 Power and electrical supply
- 22 5.6.4 Remote plug
- 22 5.7 Accessory connection
- 23 5.7.1 Air cooling
- 23 5.7.2 Venting valve
- 24 5.7.3 Sealing gas connection
- 24 5.7.4 Heating jacket
- 26 5.7.5 Water cooling
- 27 Operation
- 27 6.1 Commissioning
- 27 6.2 Operation modes
- 27 6.3 Function description
- 28 6.3.1 Operation without operating unit
- 28 6.3.2 Operation via "remote" connection
- 28 6.3.3 Operation with DCU or HPU
- 28 6.3.4 Operation via fieldbus
- 28 6.4 Monitoring of the operation conditions
- 28 6.4.1 Temperature monitoring
- 29 6.4.2 Operation display via LED
- 29 6.5 Switching off and venting
- 29 6.5.1 Switching off
- 29 6.5.2 Venting
- 30 Maintenance / replacement
- 30 7.1 Maintenance intervals and responsibilities
- 30 7.2 Replacing the operating fluid reservoir
- 32 7.3 Replacing the electronic drive unit
- 32 7.3.1 Rotation speed set value
- 33 Decommissioning
- 33 8.1 Shutting down for longer periods
- 33 8.2 Re-starting
- 33 8.3 Disposal
- 34 Malfunctions
- 34 9.1 Rectifying malfunctions
- 35 Service
- 36 Spare parts HiPace
- 37 Accessories
- 37 12.1 HiPace 400, 48 V DC
- 38 12.2 Differences at HiPace 400, 24 V DC
- 39 Technical data and dimensions
- 39 13.1 General
- 39 13.2 HiPace 400, 48 V DC
- 40 13.3 Differences at HiPace 400, 24 V DC
- 41 13.4 Dimensions
- 42 Declaration of conformity