Hewlett Packard HP 4145B Semiconductor Parameter Analyzer User manual

Improvi! Your Device Quality

The HP 4145B performs fast, accurate analysis of semiconductor devices to increase your productivity and improve your device quality. You can stimulate and measure voltage and current sensitive devices easily with the four Source Monitor Units (SMUs).

And to help you analyze data, the HP 4145B computes dc parameters like h,, and gm for you.

The HP versatile SMU-based architecture saves you valuable time and eliminates measurement instabilities caused by changing DUT connnections.

Each SMU can alternately act as a voltage source/ current monitor or current source/voltage monitor.

You can characterize a four-terminal device com- pletely without changing device connections - simply change the current/voltage operating mode.

Increase Productivity on the Bench or in a System

You can produce results from the start with the

HP 4145B. Use the powerful front panel keys for control and analysis in stand-alone bench-top applications. Or use the HP Auto

Sequence Programming to control measurements, data storage, and plotting functions without using a computer. And, since the HP 4145B is completely programmable, you can easily incorporate it into an automatic test system to increase your test throughput.

Shorten Your Design and

Analysis Times

The HP 4145B automates tedious data gathering during device characterization. When design changes are made, you can evaluate them quickly and efficiently, minimizing project delays and cost overruns.

At the touch of a button, the HP 4145B can position cursors and lines on the display, giving you direct readout of dc parameters like Early voltage and threshold voltage. You can position a marker anywhere on the curve and read out coordinates directly. Or zero in fast with “auto scale”, “zoom” and “move window“ commands.

HP 4145B Key Performance Features

Source Monitor Unit (SMU)

The HP 4145B provides you with four SMUs. Each

SMU can be used as a voltage source/current monitor or as a current source/voltage monitor.

SMU Range:

V: 33 mVdc to 1!1100.00 Vdc

I: +1 pAdc to klOO.0 mAdc

(3~50 fA resolution in current monitor mode)

Accuracy:

V: +0.15% to -1-(0.15% + 40 mV)

I: 50.4% to+1.8%

Measurement Speed

Make up to 150 measurements per second.

Voltage Monitor (VM)

Two voltage monitors are built into the

HP 4145B in addition to the SMUs.

Measuring Ranges: +~O.OOO Vdc and

+2.0000 Vdc

Accuracy: rtO..S% (2OV range) and

20.2% (2V range)

Resolution: +1 mV (2OV range) and

+lOO p V (2V range)

Voltage Source (VS)

Two voltage sources are available in addition to the SMUs.

Output Range: +2O.OOO Vdc

Accuracy: fOS%

Completely Evaluate Your Semiconductor Devices

The HP 4145B excels in both TEG (Test Element

Group) measurements performed on semiconductor wafers and in parameter extraction of simulation models in computer-aided design applications. You can also use the HP 4145B to characterize packaged devices with the supplied HP 16058A Test Fixture.

Applications include dc characterization of these semiconductors: l l l l

Bipolar Transistors

MOS structures, Junction FETs, GaAs FETs

Semiconductor Diodes

Photoelectric conversion devices (Photodiodes, l l

Phototransistors)

Light Emitting Devices (LEDs, GaAs Infrared

Emitting Diodes)

Operational Amplifiers l

Gated Diodes

0 Static Electricity Induced Transistors (SITS)

Easily Characterize Both Wafers and Packaged Devices

MOS Structure Parameter Analysis

Theoretical threshold voltage is a dc parameter of great significance. The HP 4145B reduces the time required to obtain this parameter. The ex- ample CRT display shows FET & - VGS and log ID - VGS on a plot with double Y axes.

Using the do - Vos plot and LINE function, you can read theoretical

VGS(th)

(X-intercept) as

2.40 volts. ID&h) is also read directly (marker readout) as

6.243

PA. You can perform this complete measurement and graphic analysis in less than two minutes.

Use the log ID - Vos plot to obtain Vos values at specific values of

ID.

You can read Vos values in numeric form with the HP interpolation functions. marker and

Parameters which can be analyzed include: l l

Threshold Voltage Bulk Potential Dependency

0 Extrapolated Threshold Voltage

Gain Factor (K) in Saturated/Non-Saturated l

Regions

Mutual Conductance Drain and Gate Voltage

Dependency l l l l

Body Factor Effect Multiplication Factor (M)

Punch-Through Voltage

PN Junction Break-Down Voltage

Channel Conductance-Gate Voltage

Characteristics

Direct Readout of Threshold Voltage Speeds MOS Analysis

Increase Your Efficiency During

Research and Development of New Materials

The HP 41458 provides your research lab with capabilities that will meet dc characterization requirements for present devices, and also provides you with functions needed for development of new materials.

The HP 4145B features eight different analysis methods. You can make readings using contactline, gradient, comparison, zoom and marker methods.

The calculation function has 11 arithmetic functions including LOG, EXP and A (differential calculation). You can also use two user-defined functions.

New materials which can be analyzed include: l

Gallium Arsenide Devices l l

Liquid Crystal Structures

Ceramic Semiconductors l l l

Amorphous Silicon Devices

Solar Cell Elements

Solar Cell Arrays

Bipolar Device Parameter Analysis

The HP 4145B is a valuable tool in bipolar integrated circuit design. You can simultaneously measure Ic - VBE and Ie - VBE . After each measurement, the HP 4145B automatically

COmpUteS and plots hfE vs. Ic on a log-log scale.

Quickly Extract Parameters for the Gummel-Poon Model

To analyze this data, you can position a straight line tangent to any point along the hFE - Ic curve.

Once the line is positioned, you .can read slope and

X intercept values directly on the CRT. Next, by performing a parallel shift on the tangent line, you can obtain numeric values of knee current

(1~) and maximum value of hFe

@FM) directly on the CRT.

These are parameters of the Gummel-Poon Model.

Parameters which can be analyzed include: l

DC Current Gain (hfs, hfa) -

COlleCtOr CUrrent

Characteristics l

Evaluation of Surface Recombination Current as Related to PN Junction Forward Bias

Characteristics l

Evaluation of Current Generation as Related to

PN Junction Reverse Bias Characteristics

* Breakdown Voltage (BVEBO, BVCBO, BVCEO, l l l l

BVcso )

Sheet Resistance

Resistivity

Collector-Emitter and Emitter-Base

Saturation Voltage

Collector Cut-Orf Current (1~~0, 1~130)

7

Automate Your Bench-Top Evaluation Procedures

You can program the HP 4145B to perform sequential measurements and output the results.

The AUTO SEQUENCE SETUP (shown at the right) is an automated procedure for characterization of

Ic, Is-VBE, hFe-Ic,

COlleCtOr CUrriM-VOkage of a bipolar transistor.

The auto sequence program initiates a measure- ment sequence, activates the plotter/printer for hard copy results and then stores measurement data in disc memory. Hard copy output is shown below.

+[,+]**+ AUTO SEQUENCE SET UP **++

1 GET P ICBVBE

2 SINGLE

3 PLOT 100.3600.3500.7000

Call up program from disc

Single Sweep

-Output

CRT display contents

3 g::: bEF \;~“;;~;:,“I,,

7 PLOT

100, 100.3500.3500

8 GET P NPNl

9 SINGLE

10 PAUSE

11 PLOT 3600.3600.7000,7000

12 GET P VCESAT

13 SINGLE

14 PLOT 3600. 100,7000.3500

15 PAGE

16 WAIT 60

17 PAINT o” disc

Allows viewing of results before output to plotter

Advance plotter page

Wait time before execution of next command

GRAPHICS PLOT I***+*

ME-It CHARACTERlST*CS

.-Up “,w”

““Y

+,

‘cy$.t

**it.***

I I

GRAPHICS PLOT ******

“CESAT-IC CHARACTERrSTtCS

I II I 1

Store Your Programs and Data on Flexible Discs

The HP 4145B uses double-sided, double-density microfloppy discs to store measurement data and programs. The furnished system disc contains the

HP operating system. Load the operating system into memory at power-on, then use any initialized disc to store your data. You can initialize discs and copy the operating system with the HP 4145B or an HP

9000

Series 200/300 computer.

Use any standard HP 3.5 inch disc such as the

HP 9219214. Each disc stores up to 630 Kbytes of information. Store approximately 240 programs or 105 data files on a single disc.

Analyze Your Data with an HP 9000 Series 200/300 Computer

Select From Five Different Display Modes to Suit Your Evaluation Purpose

You can use the Schmoo Plot for map-type displays when analyzing characteristics affected by two

The List Display shows you all measurement con- ditions, values and calculations in a list format. independent variables. Each characteristic value is represented by one of five different symbols. You can highlight a single symbol and display its numeric value with the cursor.

You can analyze semiconductor parameters changing as a function of time in the Time Domain.

Make measurements up to 85 minutes with a minimum interval of 10 ms. Use the graphic,

The Matrix Display is a numeric display of a characteristic affected by two variable parameters.

Rows are formed by up to 1024 VAR 1 values. of VAR 1 and VAR 2. matrix or list display modes.

Use the Graphic Display for simultaneous

Columns are formed by up to 6 VAR 2 values. display of two characteristics using double-axis

Matrix elements can be measured values or functions format. The Graphic Display gives you a quick grasp of overall device characteristics.

User Functions Can Calculate h,, = f and 1 = I, e hV/KT)

B

The HP 4145B provides you with two User

Functions in which II front-panel arithmetic oper- ators may be used. Values of User Functions are computed simultaneous with each measurement and displayed in the same manner as a measurement value.

The most common constants used in semicon- ductor analysis are also available on front-panel keys

(K: Boltzmann constant; q: electron charge; e: dielectric constant of a vacuum).

[hp]******

IC

( A) CUR5Off(-

1E+00

GRAPHICS PLOT ****I*

IC,IB-VBE CHARACTERISTICS

.430RV t 35.66nA , 35.&d :"(

)

A) lE+00 y-,~,-l

.DIY mm d-cad.

/dl" decade

/dl"

VBE .1000/d.v ( W

-1.000

IE-13

Easy-To-Use Menu and Page Format

Fill-in-the-Blank Programming

The PREV, NEXT and MENU keys make operation as simple as turning the pages of a book. Measure- ment setup can also be controlled by operating the

SOFTKEYS.

To program measurement setups simply key data into the blanks indicated by the display pointer

(b). After your program is completed, you can store it on the disc.

Eight Functions Give You Complete Analysis of Test Results

Marker gives digital readout anywhere on curve.

Cursor gives numeric readout anywhere on CRT.

Line shows direct readout of slope (gradient) plus X and Y intercepts.

Line Control changes line position.

Auto Retrieve displays measurement data in a different format.

STORE and RECALL provide comparison functions using an Overlay Display or Double-

Axis format.

Auto Scale optimizes graphic scaling.

Zoom Function expands or contracts the graphics plot.

.-

****** GRAPHICS PLOT *******

XC-“CE CHARAtTERISTICS

Selected area of a curve is

“ZOOMED” to increase resolution. Also LINE function is used for analysis.

SMUs (Source Monitor Units) Provide Reliable Measurements

With the HP SMU architecture, you can make a complete set of dc semiconductor wafer measurements with one probing. This eliminates instabilities caused by changing connections at the

DUT and adds up to highly reliable measurements.

The accompanying diagram shows four SMUs connected to a Field-Effect-Transistor (FET). In a drain current vs. drain voltage characteristics measurement, you set all SMUs in the voltage source/current monitor mode, SMUl and SMU2 operate as swept voltage sources. SMU2 monitors drain current. After completing this test, you can measure breakdown voltage. Simply change SMU2 to operate as a current source/voltage monitor and measure the breakdown voltage at the desired con- stant current.

System Expansion is Easy with HP-IB

The HP 4145B easily interfaces with other in- strumentation and controllers to construct a process evaluation system that best suits your needs. The accompanying diagram shows a complete semi- conductor evaluation system.

You can combine the HP 4145B and HP 4085M

Switching Matrix to make 1 pA and 1 mV resolution measurements at any of

48

DUT pins. Add the

HP 4280A 1 MHz C Meter/C-V Plotter to make

C-V and C-t measurements with 1 fF capacitance resolution. And the HP 4140B pA Meter gives you current resolution down to 1 fA.

The powerful HP 9000 Series 300 Technical

Computer controls the system. You can make high quality plots with the plotter including direct dumos df the display.

HP-IB is an implementation of IEEE-488 and

ANSI-MC 1.1 standards.

Plotter HP 4280A

1 MHz C Meter/

C-V Plotter

HP 41408 pA Meter/

DC Voltage Source c

HP 9000 Series 300

Computer

HP 4145B Semiconductor Parameter Analyzer

Expand

Your

Measurement Capabilities with this bemiconductor parameter fvatuation system

Accurately Measure Wafers and Packaged

You can connect the HP 4145B to a wafer prober and test devices in the wafer stage. After a device is packaged, use the supplied HP 16058A test fixture. The HP 16058A includes seven plug- in test modules for testing many different packages.

Shown here are the HP 16058A Test Fixture plus a supplied connector plate for adapting to prober shield boxes.

11

Specifications

MEASUREMENT

Source Monitor Unit (SMU) Characteristics

Each SMU can be programmed monitor current, or conversely voltage. Tables 1 and 2 specify sourcing parameters. to source voltage to source current both the measuring and and monitor and

Each SMU can also be programmed to COM mode. This sets voltage at 0 volts and current

“Reference Data” section compliance on page limit at 105 mA. See

13 for more information on SMUs.

SMU output/measurement resolution: dc volts = 4-l/2 digits, dc current = 4 digits. See Tables 1 and 2 for details. source output Voltage measurement resistance: > 1012fl input resistance/current

Voltage source output resistance/current input resistance: 0.4R. measurement

Maximum capacitive load: 1000 pF

Table 1

SMU Voltage Range, Resolution and Accuracy

~1

*IoUt is SMU output current in amps.

Table 2

SMU Current Range, Resolution and Accuracy

Variable 1: Variable 1 can be swept linearly or logarithmically.

Linear sweep is a staircase output of voltage or current.

Sweep parameters

These parameters include START, can be varied

STOP and STEP by the user. levels.

Log sweep is also a staircase, but at 10, 25 or 50 points per decade. The maximum number of data points is limited to 1024 for a single VAR 1 sweep or 1140 for a multiple sweep.

Time domain sweep is accessed when VAR 1 is not assigned a source function. An initial WAIT time and a time interval are specified. Wait time is specified up to 100s with reso- lution of 10 ms. Measurement with resolution interval of 10 ms. Maximum is specified number up to 10s of data points is 1024.

Variable 2: Variable 2 sweep is a staircase of steps. Variable 2 is incremented with specified after completion number of each

VAR 1 sweep.

Synchronously Variable (VAR VAR output provides a sweep synchronous proportional to a fixed with VAR 1 but at output ratio or offset relative levels to VAR 1.

The ratio is defined as VAR = a x VAR 1, where a is a fixed ratio of kO.01 to *lo. An offset is defined as

VAR

VAR

= b + VAR 1, where to exceed the maximum or voltage compliance. b is any value that will not cause allowable source current

Hold Time: Hold time is defined as the delay from appli- cation of initial output level to start of the first delay time.

See Figure 1. Hold time can be varied from 0 to 650s f (0.5% + 9 ms) with 10 ms resolution.

Delay Time: Delay time is defined as the delay time from application of step output level to start of measurement.

See Figure 1. Delay time can be set from 0 to 6.5s k

(0.1% + 5 x ms) with 1 ms maximum resolution. l N: number of monitor channels.

1

Figure 1. Sweep Sequence

3

J

HOLD Tik

\

DELAY

\

INTEG Tome

‘Vout IS

SMU output voltage in volts.

“50 fA resolution in current monitor mode.

1. Accuracy specifications are given es k % of reading when measuring or i- % of setting when sourcing.

2. Accuracy tolerances are specified at + 5”C, after a 40 minute warm-up time. with AUTO CAL on, and specified at the rear panel connector terminals referenced to SMU common.

Tolerances are doubled for the extended temperature range of to 4ooc.

3 Maximum current when SMUs are sourcing voltage.

4. Maximum voltage compliance when SMUs are sourcing current.

SMU Voltage/Current Compliance Limit:

Compliance voltage and current resolution are the same as listed in Table 1 and Table 2. An exception is that maximum compliance current resolution is 50 pA.

Compliance

Compliance voltage accuracy current accuracy is the same as listed in Table 1. is i- (1% of range + 10 pAI.

Voltage/Current Sweep Characteristics

Each SMU source can be swept using Variable 1 (VAR 1).

Variable 2 (VAR 2) or Synchronously Variable (VAR mode. t

Sweep Start

Note: *Settmg Value

No. of

Voltage Sources (VS) Characteristics

Output resistance:

Maximum capacitive

< 0.2n load: 1000 pF t

Sweep End

Output Voltage

Range

-+ 2ov

Table 3

VS Voltage Output Range

Also see “Reference Data” section

Resolution

1 mV

Accuracy

*(OS% of setting

+ 10 mV)

Max. Output

Current

10 mA

J

12

Ld

Voltage Monitors

(VM)

Characteristics

Input resistance: 1 MR i 1% paralleled by 100 pF f 10%

Table 4

VM Voltage Measurement Range

Also see “Reference Data” section

Measurement

Voltage Range

* 2v f20V

Resolution

100 /Iv

1 mV

Accuracy k (0.5% of reading + 10 mV) k (0.2% of reading + 10 mV)

Shared Characteristics of SMU, VS and

VM

Maximum allowable terminal voltage: 1OOV peak across SMU and

VM input terminals or SMU and Vs output terminals, or between those terminals from Common to Ground. and guard: and 42V maximum

DISPLAY

CRT Size: 152.4 mm (6 inch) diagonal CRT.

CRT Visible Area: 116 mm (4.6 inches) x 92 mm (3.6 inches).

Screen Resolution: 2048 x 2048 points.

External CRT Analog Output: X, Y and Z outputs of 0 to

1 Vdc into 3300 for X and Y, and 24Ofl for Z output, are available at rear panel BNC connectors.

DATA STORAGE

Micro Flexible Disc: 630k byte, double sided, double density

Available User Records: 2432

File Sizes:

Measurement

Measurement

Setup:

Data plus Setup:

Auto Sequence

Operating System:

Program:

5 records

23 records

4 records

254 records

ANALYSIS

Calculation

The HP 41458 does calculations displays 5 digits. with 7 digit resolution and

Constants Available on the Keyboard:

Keyboard constants are stored in memory as follows: q: Electron charge (1.602189 x lo-19 Coulomb) k: Constant (1.380662 x lo-23 J/OK) e: Dielectric constant of a vacuum (8.854185 x lo-12 F/m)

The following unit symbols are alsoavailableon m(lO-s), p(lO-s), n(lO-s), p(lO-12) the keyboard.

Analysis Functions:

Overlay Comparison: a graphical presentation

STORE and RECALL capabilities of results which can be stored permit and later recalled and superimposed on an existing display.

While in the Schmoo Display Mode, stored data and present data are alternately displayed, with the RECALL key acting as a toggle switch. Only one set of data can be stored.

Scaling information is not included.

Marker: In the Graphics superimposed

Display Mode a marker on both the X-Y1 and X-Y2 traces. may be

A numeric display of their coordinates is displayed.

Interpolate: In the Graphics Disply Mode a linear interpolation between two adjacent measurement

Interpolated values data points of X-Y1 and X-Y2 are displayed is provided. at maxi- mum display resolution of 2048 x 2048 points.

Cursor: In the Graphics intersection displayed. of moveable

Display vertical

Mode the coordinates and horizontal of the lines is

A cursor is available for both X-Y1 and X-Y2 graphs. In the List and Matrix Displays, a flashing arrow indicates a selected row of data. In the Schmoo Display, the Z-axis value of the intensified symbol is displayed.

Auto Scale: In the Graphics factors are automatically of measured data.

Display adjusted

Mode, to yield

X and Y scale optimum

Zoom Function (- - - - I 1): In the Graphics the ZOOM function expands by two or contracts area surrounding the cursor.

Display display

Mode, to l/2 the

Line: In the Graphics Display Mode, two variable slope lines can be displayed. These lines can be used as tangents determine slope and X and Y intercepts of dc characteristics to curves.

Move Window:

WINDOW

In the Graphics centers the display

Display around

Mode, the MOVE the cursor.

General Specifications

Self-Test Function:

When power is turned ON, the HP 4145E automatically sequences through a self-test that verifies operational status of major functional be actuated via HP-IB or via keyboard blocks. Self-test can operation.

Operating Temperature Range: +IO”C to

RH at 4O”C, permissible temperature maximum wet-bulb temperature change < l”C/5 min;

~70%

Power Requirements:

100/i 20/22ov i 10s; 240v - I 0% + 5%;

48 to 66 Hz; 270 VA max.

Dimensions:

426 mm (16.75 in)W x 235 mm (9.06 in)H x

612 mm (24.1 in)D

Weight:

27 kg (59 Ibs) approximately

33 kg (73 Ibs) includes mainframe for HP 4145A mainframe. and furnished accessories.

Reference Data

Reference data are typical values given for information purposes.

Source Monitor Unit (SMU)

Measurement Time: Measurement time + integration time. time = response time + rangin!

SMU response time includes setup and settling time plus wait time. Wait time is microprocessor controlled and dependent on current range, as shown in Table 5.

Table 5

SMU Response Time

Current Range Setup/Settling time SMU Wait Time

100 nA to 100 mA

1 nA and 10 nA

2.7

2.7 ms ms

0.2

47.5 ms ms

Ranging time is dependent during measurement. on number of ranges required

Lower ranges require more ranging time than the higher ranges. Ranging time can vary from 4 ms to 74 ms.

Integration line frequency time is 3.6 ms in SHORT,

(20 ms at 50 Hz); and 267 ms in LONG

60 Hz (320 ms at 50 Hz).

Example: minimum measurement

16.7 ms in MED at 60 Hz at time = 2.7 ms + 0.2 ms

+ 3.6 ms = 6.5 ms/point

Notes: 1. In the Graphics Display Mode, a CRT write time of

5.6 ms per point must be added to measurement

2. Delay time, if included in a measurement, time. must also be added to total measurement time.

Offset current of voltage measurement: 6 pA + 2 pA x (V&100).

Offset voltage of current measurement 10 mV + 0.40 x lout.

13

Noise Characteristics

Voltage source noise: 0.01% of range (rms).

Current source noise: 0.03% of range t 3 pA t 0.005 pA x

(rms).

Voltage monitor: 0.02% of range (peak to peak).

Current monitor: 0.3% of range t 10 pA (peak to peak).

*Cc is externally added capacitance to center conductor, and expressed from the guard in pF. terminal

Output Overshoot

Voltage source: 5 mV

Current source: < 1%

Current Range Switching

Range Increment: 0.01%

Transient of voltage

Noise range + 10 mV.*

Range decrement: 10 mV”.

Maximum internal guard to ground capacitance:

Guard potential offset: 1 mV

700 pF

Guard current induced voltage error: lOOn x Ia where Is is the guard current.

‘When switching between 10 nA and 100 nA ranges, add

120/(3 + C,) mV where CX is the load capacitance in pF.

Voltage Source

(VS)

Output noise: 6 mV rms

Voltage Monitor

(VM)

Noise level at input: 0.3 mV p-p on 2 V range*

3 mV p-p on 20 V range

*With integration time set to MED or LONG

Source Monitor Unit (SMU) and

Voltage Monitor (VM)

Noise rejection guidelines either 50 Hz or 60 Hz. are valid when

Normal mode noise rejection: 260 dB line frequency

Common mode noise rejection:

Current monitor: <2 PAN

‘With integration time set to MED or LONG is

Ordering Information

STANDARD CONFIGURATION

HP 41458 Semiconductor

Parameter Analyzer

ACCESSORIES FURNISHED

HP 16058A Test Fixture

04145-60001

0414561622

0414561630

0414561623

0414561501

Connector Plate

Triaxial Cable (3m), 4 ea.

BNC Cable (3m), 4 ea.

Shorting Connector

System Disc

OPTIONS

Option 907: Front Handle Kit

(HP P/N 5061-0091)

Option 908: Rack Flange Kit

(HP P/N 5061-0079)

Option 909: Rack and Handle Kit

(HP P/N 5061-0085)

Option 910: Extra Manual

(HP P/N 0414590000)

AVAILABLE ACCESSORIES

16267A File Transfer Software

HP 4145A Software (Special HP 4145A Operating transfers files from the HP 4145A to the HP 41458.

System)

16266A BS&DM* File Creation Software

Operates on the HP 9000 Series 200/300 Computers. Reads data from the HP 41458 disc and converts the data from

HP 41458 format to the BS&DM* format. (3.5 inch flexible disc.)

‘BS&DM is the Basic Statistics used in the HP 9882OA/B/C and Data Manipulation

Statistical Library. format

92192A 3-l/2” Double-sided Microfloppy (Box of 10)

HP 41458 Rear Panel includes 4 triax connectors for VS and VU, HP 16058A test fixture connector for SMUs, 2 each BNCs and HP-IB connector.

For more information, call your local HP sales office listed in the telephone directory white pages. Ask for the Electronic Instrument Department, orwriteto

Hewlett-Packard: U.S.A. - P.O. Box 10301, Palo Alto, CA 94303-0690. Europe - P.O. Box 999, 1160 AZ Amstelveen, The Netherlands. Canada - 6677

Goreway

Drive, Mississauga. L4V lM6, Ontario. Japan - Yokogawa-Hewlett-Packard Ltd., 3-29-21, Takaido-Higashi. Suginami-ku, Tokyo 168. Far East -

Hewlett-Packard Asia Headquarters, 47/F China Resources Building, 26 Harbour Road, Wanchai Hong Kong. Australasia - Hewlett-Packard

Ltd., 3141 Joseph Street, Blackburn, Victoria 3130 Australia. Latin America - Hewlett-Packard Latin America Headquarters.

Australia

3495 Deer Creek Rd., Palo Alto,

CA 94304. For all other areas, please write to: Hewlett-Packard Intercontinental Headquarters, 3495 Deer Creek Rd.. Palo Alto, CA 94304.

Data

Subject To Change

Printed in U.S.A.

2/86

02-5952-7838