Hewlett-Packard 4145B Semiconductor Parameter Analyzer OPERATION MANUAL

c

E!a HEWLETT

Silicon

Repair

PACKARD

Information

- Contact

Us

920-955-3693 www.siliconinvestigations.com

HP 4145B

SEMICONDUCTOR

PARAMETER ANALYZER

SERIAL NUMBERS

This manual applies directly to instruments with serial number 283OJ- and above.

With changes described in Section VII, Se.rvice

Manual also applies to instruments with serial numbers prefixed 2608J-.

For additional important information about serial tion I, this manual.

Microfiche Part No. 04145-90360

Copyrighta Hewlett-Packard Co. ‘1986. 1989 translation without prior written permission is prohibited, except as allowed under the copyright laws. or

Printed: April 1989

Model 41458

Table of Contents

TABLL OF CONTENTS

Page Section Section Title

I GENERAL INFORMATION l-l. l-4. l-11. l-13. l-16. l-21. l-23. l-25. l-27.

Introduction . . . . . . . . . . . . . l-l

Description . . . . . . . . . . . . . . l-2

Specifications . . . . . . . . . . .

Safety Considerations . . . . l-3 l-3

Instruments Covered by

Manual . . . . . . . . . . . . . . . . l-3

Options . . . . . . . . . . . . . . . . . . l-4

Accessories Supplied

Accessories Available'::::

;I;

Warranty Limitation for

Accessories . . . . . . . . . . . l-4

II INSTALLATION

2-l.

2-3.

2-5.

2-6.

2-8.

2-10.

2-12.

2-16.

2-19.

2-21.

2123.

2-24.

2-26.

Introduction

Initial

. . . . . . . . . . . . .

Inspection . . . . . . .

22-i

-

Preparation for Use . . . . . . 2-l

Power Requirements . . . . . . . 2-l

Line Voltage and Fuse

Selection . . . . . . . . . . . . . 2-l

Line Frequency Filter . . . . 2-l

Power Cable . . . . . . . . . . . . . . 2-2

Operating Environment . . . . 2-2

Installation Instructions.

Installation of Options

2-2

907, 908 and 909 . . . . . . 2-2

Storage and Shipment . . . . . 2-4

Environment . . . . . . . . . . . . . . 2-4

Packaging . . . . . . . . . . . . . . . . 2-4

III OPERATION

3-l.

3-3.

3-5.

3-7.

Ei.

3-13.

3-15.

3-17.

3-20.

3-22.

3-24.

3-26.

Introduction . . . . . . . . . . . . . 3-l

Panel Features . . . . . . . . . . . 3-2

Micro Flexible Disc

Handling . . . . . . . . . . . . . . 3-10

CRT Display . . . . . . . . . . . . . . 3-10

Self Test . . . . . . . . . . . . . . . . 3-12

Error Messages/Error Codes 3-12

Initial Control Setting . . 3-18

User-Area Filing

Operations . . . . . . . . . . . . 3-18

Arithmetic Capabilities . . 3-19

Source and Measurement

Channels . . . . . . . . . . . . . . 3-21

Protection against t

Hazardous Voltage

Exceeding 42V . . . . . . . . . 3-21

Source/Man itor

Units (SMU) . . . . . . . . . . . 3-22

Voltage Sources (Vs) and

Voltage Monitors (Vm) . 3-22

Title Page

3-58.

3-60.

3-62.

3-64.

3-66.

3-68.

3-70.

3-72.

3-74.

3-76.

3-78.

3-80.

3-32.

3-34.

3-38.

3-40.

3-42.

3-45.

3-47.

3-50.

3-52.

3-54.

3-56.

3-88.

3-90.

3-92.

3-94.

3-96.

3-98.

3-100.

3-110.

3-112.

3-114.

3-116.

3-118.

3-120.

3-28.

3-30.

3-82.

3-84.

3-86.

3-122.

3-124.

3-126.

Measurement Ranges and

Resolution ............

Resolution and Format for

Displayed Data and Data

Output ................

Compliance .. . ............

Sweep Measurement ........

3-22

3-26 z-:f

-

Time Domain Measurement . . 3-31

Integration Time ......... 3-32

Auto-Calibration .........

Display Pages ............

3-32

3-33

Page Control ............. 3-33

MENU PAGE ................ 3-35

CHANNEL DIFINITION PAGE . . 3-35

3-35 SOURCE SETUP PAGE ........

MEAS & DISP MODE SETUP

PAGE ..................

GRAPHICS PAGE ............

3-35

3-35

LIST DESPLAY PAGE ........

MATRIX DISPLAY PAGE ......

3-35

3-35

SCHMOO PLOT PAGE ......... 3-35

AUTO-SEQUENCE SETUP PAGE . 3-36

OUTPUT SEQUENCE SETUP PAGE 3-36

USER FILE CATALOG PAGE ... 3-36

OPERATION ..... 3-36

DIAGNOSTICS PAGE .........

SOFTKEY PROMPTS (SKP) ....

SYSTEM MESSAGES ..........

TIME DOMAIN MEASUREMENT

SETUP .................

DUT CONNECTION .........

DUT Connection Using the

16058A ................

DUT connection Using the

3-36

3-36

3-36

3-80

..3-8 2

3-82

Connector Plate .......

SMU OSCILLATION ..........

FLOATING MEASUREMENT .....

GUARDING .................

PLOT .....................

PRINT ....................

3-86

3-88

3-90

3-90

3-91

3-94

APPLICATIONS PACKAGE ....

MEASUREMENT EXAMPLE .....

HP-16 INTERFACE .........

CONNECTION TO HP-IB .....

3-95

3-98

3-101

3-101

HP-IB STATUS INDICATORS . 3-101

LOCAL KEY ............... 3-101

HP-IB CONTROL SWITCH .... 3-101

HP-IB INTERFACE

CAPABILITIES ......... 3-102

HP-IB CONTROL MODES ..... 3-102

Remote Program Codes and

Parameter Setting .... 3-103

HP-GL CONTROL 3-112 i

.

Table of Contents

Section

TABLE OF CONTENTS

Page Title

3-128.

3-130.

3-132.

3-134.

3-136.

3-138.

3-140.

3-142.

3-144.

3-146.

3-148.

3-150.

3-152.

3-155.

3-157.

3-159.

3-161.

3-163.

HP-GL COMMANDS ..........

DEVICE CLEAR ............

3-112

3-116

DATA OUTPUT ............. 3-116

IDENTIFICATION OUTPUT ... 3-116

SERVICE REQUEST STATUS

BYTE .................

Programing Guide for

41456 ................

3-118

3-120

PLOT/PRING Operation

Using HP-IB Controller 3-125

External Display ........

Disc Initializing .......

Operating System Copy ... 3-128

DISC COPY ............... 3-129

FILE TRANSFER ...........

3-126

3-127

3-130

3-132 Data File Structure .....

BOAT System Sector ......

File Comment Sector .....

3-132

3-132

Setup Data Sector ....... 3-132

Measurement Data Sector . 3-133

Reading Data Files ...... 3-133

Model 41458