HP 4140b User's manual

HP 4140b User's manual
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OPERATION AND SERVIC
4140B
pA METER/DC VOLTAGE SOURCE
TILA MY Ay,
vi ANUAL
г
HEWLETT
PACKARD
gory df
Table of Contents
Section
[
II
[II
ii
TABLE OF CONTENTS
Title
GENERAL INFORMATION ..ecconarcenceas
“11.
-14.
1-1
1-4,
1-9.
1-1
1-1
1-19,
1-21.
1-23.
1-25.
1-27,
Introduction ...e.econrecaroo
Description ....e..ecreaccurreos
Specification ,.e.ecosrorvene
Safety Considerations .......
Instruments
Covered by Manual ...ee ....
Options ...cocrrrorecoreroce
Option 907, 908 or 909 ...
Option 910 Extra Manual ..
Accessories Supplied .......
Accessories Available ......
Introduction .....e.e.esarcce.
Initial Inspection ....e.....
Preparation for Use ......e..e.
Power Requirements ...e..e.
Line Voitage and Fuse
Selection .....e.esecacos
Power Cable ....econeoacaoo
Operating Environment .....
Installation Instructions .
Installation of
Options 907, 908 and 909,
, Storage and Shipment ........
Environment ......ecosereo .
Packaging ..... ass a 010060
OPERATION Lau a caen ass 000 m0 000005
3-1.
3-3.
3-5.
3-8.
3-10
3-12
La) Ск) Cas
+ +
1
= |
]
3-21.
3-23.
3-25.
3-27.
3-29.
3-31.
co сл +
* * .
Introduction ..e..ereconcaoareo
Panel FeaturesS ..eoco.conacaaco
Self Test ..ecrsvccovernaveroo
Initial Control Settings ....
. Measurement Function ......e..
. pA {Pico-Ampere) Meter
Section ...coraoneaoorenues
pA Meter Display ..eceonona
Current Measurement Ranges.
Integration Time
and Data Qutput ....... .
External Triggering ..... .
Zero Offset for
Current Measurement ....
pA Meter |
Operating Instructions .
VS (Voltage Source) Section.
YS Section Display ......e.
VS Section Qutput Modes ..
3-3
3-14
3-14
3-14
Ils din dE TF oa wl,
Section Title Page
3-33 VS Section
Operating Parameters .,. 3-1%
3-35 Voltage Output
and Display of VS ...... 3-15
3-37 Output Voltage Range ..... 3-19
3-39 Current Limit ,..esccrano. 3-18
3-41 VS Section |
Operating Instructions . 3-19
3-43, 1-V Measurement .....onecaco 3-22
3-45 [-V Measurement
Data Output ..000000a num 3-24...
3-47, I-V Measurement
Operating Instructions . 3-27
3-49, C-V Measurement 2........... 3-2¢
3-51. C-V Measurement |
Data Output ......eeoncoa 3-29
3-53. C-Y Measurement Range .... 3-2!
3-55. C-V Measurement
Zero OffSet .....eerenc. 3-32
3-57, C-V Measurement
in Percent .....ececooreo 33.
3-59. C-V Measurement |
- Operating Instructions , 3-33.
3-61. DUT Connection .......ese.... 3-4
3-63. DUT Connection Using | ce
the Wafer Prober ....... 3-44
3-65. Annunciations ......... canes 3-47
3-67. Analog Output 1020000000 3-4
3-69. Control Capabilities for |
Analog Output ...ee e... 3-49
3-71. HP-IB Interface .....ee..ono. 3-52,
3-73. Connection to HP-IB ...... 3-5 |
3-75, HP-IB Status Indicators .. 3-5 :
3-77. Local Key ..eresasrorodeao 3-52
3-79. HP-IB Control Switch ..... 3-57:
3-81. HP-IB Interface
Capabilities of 41408 .. 3-5...
3-83. Remote Program Code ...... 3-53 :
3-85. Parameter Setting ........ 3-5
3-87. Data Output .............. 3-5
3-89. I.-C Measurement Value and
YA Output Voltage ...... 3-56
3-91 Parameter Output ......... 3-5
3-93 Key Status Data .....ee... 3-E
3-95, Service Request
Statu Byte ,.....eesocaeo 3ER.
3-97, High Speed I (HSI)
Function .....e.n.eceueuoo o
3-99. Programming Guide |
for 41408 .......eoeoc... 3-7
Number
mt me mod a
1
HF La La) NY eet
- " - + “
iy
Title
Specifications LL.
General Information ..........
Available Options .,..........
Accessories Avilable .........
Application Ranges
Of Accessories .............
Automatic Control Settings ,..
Current Measurement
Integration Time ,..........
VS Section Output Modes ......
VS Section
Uperating Parameters .......
Inhibitation of Controls and
Operating Parameters (when
VS Section ig Operating) ..
C-V Measurement Accuracy eco.
41408 Annunciations ..........
Analog Output Data at
1/C OUTPUT Connector .......
Analog Output Data at
VA OUTPUT Connector ........
» A-=Y Recorder
Pen Position Control sereono
. HP-IB Interface Capabilities ..
. Remote Program Coda necrera.
. Program Code for
Parameter Setting ...e......
. Accuracy and Data Output
Interval in HSI Function ,
« Sample Program Using
HP 9825A or 98354
Calculator LL
Recommended
Test Equipment ...,.........
Auto Setting Modes for
Performance Tests and
Adjustment... e... |
* a
Output Voltage Accuracy Test ...
Current Measurement
Accuracy Test ..............
+
LIST OF TABLES
Page
1-4
1-11
1-13
1-14
1-13
mr dtp tet A LA rp tm ..
a ATA
Number
1-1,
LIST OF ILLUSTRATIONS
Title Page
Model 4140B and
Supplied Accessories ...e see. 1-1
Line Voitage and Fuse
Selection 1.420000 0 a 800000 2-1
Power Cables Sunplied .......”.e.. 2-2
Rack Mount Kit 20.100000 au 0 0 6 2-3
Front Panel Реафигез .........,., 3-2
Rear Panel Features ....e_eveo.. 3-6
Octal Codes of Control Keys .... 3-8
Lass Significant Zero .......?”.e. 3-9
Integration Time and Data Output
(when I TRIG is Set to INT) . 3-11
pA Meter Section Operating
Instructions (when FUNCTION
is Set to I) LL. 4.00 00000
Relationship between Output
Voltage and Display for A”
(Single Staircase Wave) ...
Relationship between Output
Voltage and Display for y
(Double Staircase Wave) ... 3-17
Relationship between Output
Voltage and Display for /
(Single Ramp Wave)
т о4 ово о то +
, Relationship between Output
Voltage and Display for /X
(Double Ramp Wave) ....... . 3-18
. Output Voltage Range
of Staircase Wave
E AEREA
. YS Section Operating
Instructions (when FUNCTION
is Set to 1).............. ‚ 3-20
. Relationship between I-V Meas-
urement and Displays for „”
{Single Staircase Wave) ... 3-23
. Relationship between !-V Meas-
urement and Displays for yu
(Double Staircase Wave) ... 3-23
, Relationship between !-V Meas-
urement and Displays for /
(Single Ramp Wave)
. Relationship between 1-V Meas-
urement and Displays for /\_
(Double Ramp Wave)
EF AFF Aw
, 1-V Function
Operating Instructions
“ E € + #
List of ITlustrations
Number Title Page
3-18. Relationship between C-V
Measurement and Displays for
/ {Single Ватр Wave} .... 3-30
3-19, Relationship between C-V
Measurement and Displays for
/\ (Double Ramp Wave) .... 3-30
3-20, Relationship between Calculated
Capacitance Value and Current
Measurement Range ......... 3-31]
3-21. Suitable Current Measurement
Range for C-V Measurement ... 3-32
3-22. C-V Measurement Accuracy ...... 3-34
3-23. C-V Function -
Operating instructions ...... 3-38
3-24, Effects of Leakage Current
and External Noise ....e..eeoó. 3-41
3-25, Effects of the Low-Guard
Method ......._ec_esdsccareacoo 3-41
3-26, DUT Connections with
Each Accessory ....... PUTO 3-42
3-27. DUT Connection Examples ....... 3-43
3-28. DUT Connections on Wafers
at the Prober Station ....... 3-45
3-29, Analog Output [|
Operating Instructions ...... 3-50
3-30, HP-IB Control Switch ........e. 3-52
3-31, Status Bytes of the 47408 ..... 3-58
3-32, Data Cutput Format of the
HSI (High Speed I)
FUNCETON .....resaccarenerco 3-59
3-33, Sample Program 1
Using 9825A/9835A ..Ñ..Ñ....... 3-61
3-34. Sample Program 2
Using 98255/9835A ,.......... 3-62
3-35. Sample Program 3
Using 98254/9835A ,...e.e.... 3-63
3-36, Sample Program 4
Using 9825A/9835A ........... 3-64
3-37. Sample Program 5 |
Using 9825A/9835A ...... seco. 3700
4-1. Voltage Output
Accuracy Test Setup .........e. 4-4
4-2. Current Measurement Accuracy
Test Setup ...e.ceescoroncaecoo 4-6
4 Model 41408
*
1.1, INTRODUCTION
i —
E 1.2, This Operating Manual contains the in-
# formation required to install, operate and
test the Hewlett-Packard Mode! 41408 DA Meter
/DC Voltage Source. Figure 1-1 shows the in-
strument and supplied accessories, This sec-
tion covers the instrument identification,
tions and other basic information. To order
an additional manual, use. the part number
listed on manual title page.
1.3. Also listed on the title page 15 а
microfiche part number. This number can be
used to order 4 x 6 inch microfilm transpar-
à encies of the manual. Each microfiche con-
tains up to 98 photo-duplicates of the manual
sages. The microfiche package also inciudes
à the latest Manual Changes supplement as wel]
- as pertinent Service Notes.
description, options, accessories, specifica-
Section !
Paragraphs 1-1 to 1-5
SECTION |
GENERAL INFORMATION
1-4, DESCRIPTION.
1-5, The HP MOdel 41408 pA Meter/DC Voltage
Source comprises a high stability pA Meter
with 107*A (max.) resolution coupled with
two programmable DC voltage sources to ensure
useability in many application areas. The pA
meter has a basic accuracy of 0.5% over
wide measurement ranges (+0.001 x 107124 ~
£1,999 x 107%A) enabling stable pA current
measurement at 107'SA f(x] count). This is
achieved by employing a new unique, variable,
digital, integration method. This stable and
fast (less than 35ms at 1InA) measurement
technique is very useful, not only for the
measurement of the small leakage currents of
semiconductor devices and the static charac-
teristics of FET's, but also for making insu-
lation resistance/leakage, current/absorption
measurements/analyses of capacitance and in-
sulation materials, One of the two program-
41408
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Figure. 1-1.
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L Section |
Paragraphs 1-6 to 1-13
mable DC voltage sources (YA) can operate not
only as a programmable DC voltage source, but
also as a unique staircase (7 , m ) and
accurate ramp (en /X) generator. The DC
Voltage Source has an output range of +100V
in 100mY steps or +10V in 10mV steps, and the
ramp rate can be set from 0.001V/s to 1V/s at
0.001V/s resolution. ~ The sweeps of the
staircase and ramp functions operate, both in
the AUTO sweep mode with a pause key (for
changing step voltage and sweep direction
й during measurement) and in the MANUAL sweep
N mode with down (© ) and up (© ) keys. Each
у | programmable DC voltage source (VA and VB)
| | has a current limiter to avoid damaging the
DUT by excessive current.
1-6. A key capability of the 4140 is its
ability to make accurate I-V/C-V measurements.
h Measurement timing can be automatically syn-
| chronized between the DC Voltage Source and
| the pA Meter section. The start, stop and
A step voltages can be set from -100V to +100Y
‘ at 100mV resolution (from -10V to +i0V at
10mV resolution). The hold/step delay time
can also easily be set depending upon the
characteristics of the material being tested,
| A11 these capabilities are featured in the HP
- : | 4140B itself which, up to now, has required
/ an extensive instrument system. Static char-
acteristics of semiconductors, diodes and
FET's, the analysis of MIS construction, and ..
the measurement of the threshold voltages of
FET's in addition to 1 minute value measure-
ments for insulation resistances (resistance
values of approximately 0.52v10%?2 can be
calculated from the I-V measured values) can
be made easily, quickly, and efficiently with.
f
r
|
о the 41408. With the 41408 it is especially
- easy to make a quasi-static C-V measurement
(a capacitance measurement utilizing a ramp-
wave) which is usually employed as one of the
measurements when. trying to improve semicon-
ductor quality. The 4140A measures capaci-
tance value by the following formula:
I (measured current value)
C= dv/dt (ramp rate)
e
o —% This is possible with the 41408 because both
а, the desired setting of the ramp voltage and
| - the capacitance measurement are completely
I Te ‘synchronized, and the calculated capacitance
A 7 value (0.0~1999pF) or percent change {0.0% ~
Ple $ 10... 199.94) VS Cox (the capacitance of oxide
odio 5. Film) and the appropriate ramp voltage value
y a. are simultaneously displayed.
Mode | E
1.7. The 41408 employs certain artic
functions which make the best use of th
telligence capability of its microprocessur
For example, its zero offset current capab
ity cancels leakage current of test leads
fixtures, and its zero offset capacitance ce
pability cancels stray capacitances. от $
leads and fixtures for accurate current À
capacitance measurements. - The self-test em
pability checks ROM's, RAM's, displays, inc
cators and control keys of the 41408 auton
ically when the 41408 is turned to ON or |
SELF TEST front panel key is pushed, Ti
measurement parameters of the 41408 (VA =
VB ==,START V, STOP V, STEP V, HOLD TIME,
dt, STEP DELAY TIME and Cox) are stored
the 41408 memory and can be used repeatediy
1-8. The 41408 provides Analog Output Ч
can be used to output analog data to an
Recorder and to trace I-V/C-V curves. |
41408 also provides HP-IB Interface for
mote control and data output via the +
In addition, four ‘unique accessories
available for making a wide range of unive
sal measurements, ВЕ |
1-9. SPECIFICATIONS
1-10. Complete specifications of - the о
"41408 pA Meter/DC Voltage Source are givenw
Table 1-1. These specifications are the pe
formance standards or limits against why
the instrument is: tested. The test or)
dure for the specifications are covered
Section IV Performance Test. Table 1-2 lis
general information. General information
not specifications but 15 typical Cari
istics included as additional information f
the operator. When the 41408 pA reci
Voltage: Source is shipped from the fact
it meets the specifications listed За Г
1-1. | |
1-11. SAFETY CONSIDERATIONS |
1-12. The Model 41408 pA Meter/DC Volt:
Source has been designed to conform tof
safety requirements of an IEC (Internatid
Electromechanical Committee) Safety Cias:
instrument (provided with a protective ea
terminal), and is shipped from the factor
a safe condition.
1-13. This operating manual contains infor
tion, cautions, and warnings which ns
followed by the user to ensure safe opera:
and to maintain the instrument in a saf
dition. - |
La
aja
INSTRUMENTS COVERED BY MANUAL.
¡- 14.
E PRES A serial number plate is attached to
E the rear of the instrument. The serial num-
E per is in the form: XXXXJXXXX. It is in
E to parts, the first four digits and the
# jetter are the serial prefix and the last
E rive digits are the suffix. The prefix is
E the same for all identical instruments; it
À changes only when a change is made to the
E instrument. The suffix however, is assigned
Ë strument. The contents of this manual apply
Æ to instruments with the serial number prefix
E (es) listed under SERIAL NUMBERS on the ti-
I tie page.
printing of this manual may have a serial
f number prefix that is not listed on the title
E page. This unlisted serial number prefix in-
dicates that the instrument is different from
À those described in this manual. The manual
E seguentially and is different for each in-
| 1.15. An instrument manufactured after the
. Section |
Paragraphs 1-14 to 1-18
for this newer instrument is accompanied by a
yellow Manual Changes supplement. This sup-
plement contains "change information” that
explains how to adapt the manual to the newer
instrument,
1-17. In addition to change information, the
supplement may contain information for cor-
recting errors in the manual. To keep this
manual as current and accurate as possible,
Hewlett-Packard recommends that you periodi-
cally request the latest Manual Changes sup-
plement. The supplement for this manual is
identified with the manual print date and
part number, both of which appear on the
manual title page. . Complimentary copies of
the supplement are available from Hewlett-
Packard. | |
1-18. For information concerning a serial
number prefix that is not listed on the title
page or in the Manual Changes supplement,
contact your nearest Hewlett-Packard office.
1-3
Section | | | PUS à
Table 1-1 | |
Table 1-1, Specifications (sheet 1 of 7).
“+ | “TUE ча
Measurement Functions: I-V, C-V and !
I: For independent operations as universal pA Meter/Programmable Voltage
Source | .
: 1-Y characteristic measurement using staircase/ramp wave
: Quasi-Static C-V characteristic measurement using ramp wave
Voltage Source: Two separate sources (VA and VB)
YA: +100Y, function generator/programmable source
VE: +100V, programmable DC voltage source
Function VA | VB
LA, AN
с-\ и оо И =
I FA, NE
Voltage Sweep: Auto (pause available)/Manual
Warm=up Timer “> hour
GENERAL
Operating Temperature: 0°C to 40°C
Relative Humidity: <70% at 40°C
Power: 100/120/220V£10%, 240V-10%+5%, SOHZ/60HZ 45%, max. 135VA with any option.
Dimensions: 426mm x 177mmH x 498mmD
Weight: Approx. 14.4kg
Accessory Furnished: 16053A Test Leads (1 set), 16055A Test Fixture.
ue на
sar A Е" о ОЕ
Section 1
Table 1-1
Table 1-1. Specifications (sheet 2 of 7).
CURRENT MEASUREMENT
Display: 3-1/2 digit, 99,9% overrange.
Measurement Range: +0.001x107}2A a £1.999x107%A, 1 ranges, auto/manual range
selection.
Measurement Accuracy/ Integration Time:
Range(A) Measurement integration Time ms) **
| ‚Ассигасу* SHORT | MED | LONG
102.10 | + (0.5 + 2 )
- 20 80 320
10710 + (2+2) -
10-11 + (5+3) 80 | 320 | 1280
102% | +(5+8) | 160 | 640 | 2560
* +(% of rdg + counts), 23% + 590, <70% humidity, integration time...LONG,
filter...ON. | |
** at 50HZ line frequency (x 5/6 at 60Hz operation).
7
***. Zero offset is performed.
Voltage Burden: <10uV at full scale.
“Internal Electromotive Force: <100uV at 23% + 5%,
Maximum Input:
Hi-Lo (peak value): —+2V at 102x107 A range.
| Ш +30V at 107* « 107 A range.
| £120V at 107% ~ 107*%A range.
Lo-Guard: +200V.
… Zero Offset: Cancels leakage current of test Teads/ fixtures.
„7 * Offset Ranges: 0 ^ £100fA.
"Trigger: INT/EXT or MAN.
High Speed ! Data Output: Outputs current measurement data with max. 4ms inter-
vals. (Refer to reference data for accuracy).
“Input Terminal: Triaxial BNC (HP Part No.: 1250-0687).
1-5
a. Sar =
Section |
Table 1-1
Table 1-1. Specifications{sheet 3 of 7).
DC VOLTAGE SOURCE (Va AND V8)
Output Mode:
VA: ~~ 5 FU > JS ‚ИМ, == , OFF
VB: === a OFF |
Voltage Range: 0 v+10.00V, 0 v+100.0V, 2 ranges (autoranging only),
Max. Current Capacity: 10тА.
Sweep Control: Auto (pause available)/man., up/down manually available in hold.
Operating Parameters Setting Ranges:
Start/Stop/DC Voltage: 0 v10.00Y in 0.01V steps, 0 v +100.0V in 0.1V steps
Step Voltage: +0.01Y v £10.00V in 0.01V steps (0.1V step at 10V of absolute
value of output voltage)
Hold Time: 0 ^ 199.95 1п 0.15 steps, 0 ~ 1999s in ls steps.
Step Delay Time: 0 ~ 10.00s in 0.01s steps, O ~ 100.0s in O0.1s steps.
Ramp Rate (dV/dt): 0.001V/s ~ 1.000V¥/s in 0.001V/s steps.
Accuracy: at (23% + 5%)
Qutput Voltage 7, AA, =}:
+1QV: +(0,07% + T1mV).
+100V: (0,09% + Tomy),
Accuracy of Ramp Voltage” : -5 y or 1+
HOLD TIME (s) + Zs
1075 x START Voltage (V)
HOLD TIME (S) + 25
£(0,2% + 80,М/$) -
- - if ‘absolute setting value for START or STOP Voltage > 10V,
Linearity:
{0.1% + ——2-0003V/s y. 0.001 x START Voltage (V) y
FAUT RAMP RATE (V/s) - RAMP RATE (V/s) x (HOLD TIME (s) + 2s) ©
v0.29 + — 0:0083W/5 y 0.001 x START Voltage (V) - y
EL9.62 + RAMP RATE (V/s)’ - RAMP RATE (V/s) x (HOLD TIME (s) + 2s) ®
- - if absolute setting value for START or STOP voltage > 10V.
* : 1, Temperature Change: $ 3.6 C/hour.
2. Time after start of rampzZs.
1-6
Section I
Table 1-1
Table 1-1. Specificationsisheet 4 of 7).
start Stop Voltage (only for / , J\}: =20mV
(+200mV ‚.. > 10V of absolute setting value for START or STOP voltage),
_> Display of Output Voltage (only for /7 ,/X): #(0.07% + 1 emy)
(+0.09% + 160mV) ‚... 2 10V of absolute setting value for START or STOP
voltage), | |
Step Delay/Hold Time: Accuracy is dependent on accuracy of line frequency
(50Hz or 60Hz).
Current Limit: 107*A, 1073A or 107%A=10%.
Output Terminals: .BNC, L-GND,
C-V MEASUREMENT
Calculation Equation ...... C(F) = measured current value (A)/ramp rate (V/s)
Measurement Range: 0.0pF ~ 199.9pF, 200pF ~ 1995pF, 2 ranges of Auto range.
% change Display: Capacitance change is displayed as a % of the initial setting
value of Cox (100%). о
% Display Range: 0.0% ~ 199.9%. |
Cox Setting Range: О.1рР ^ 199.9рЕ, 200nF v 1999pF,
Capacitance Calculation Accuracy: Depends on accuracies of both current meas-
urement and linearity of ramp wave
(refer to paragraph 3-53).
Zero Offset: Cancels stray capacitances of test Teads/ fixtures.
Offset range: 0% 100pF.
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a я
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a MIU
Lu -
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“ -
Section I
Table 1-1
model 4140
Table 1-1. Specifications(sheet 5 of 7).
Analog Output:
Output Data: VA, I and C
Output Voltage:
OTHER
Output Data
Output Voltage (Resolution)
VA +1 0V
+#10.1V ~ =100V
0 ~ #1,000V (ImV/count)
*1,01 » +10,00V {10mV/count)
I Full Scale
: +5V (5mV/count)
C Fuil Scale
100pF
1000pF
100% (% Display)
0.5V (0.5mV/count)
5V (BmV/count)
Accuracy: +(0.5% + 20my)
function
5Y (5mV/count)
— Low Pass Filter: OFF, 0.225 + 20% and 15 + 20% applied to both VA and I/C
Data Output
Pen Lift Output: TTL low level {£0.8V) during sweep period in I-V/C-V
Recorder Scale Output: Upper right/lower left scale output for location
| adjustment of recorder
Key — VA output 1/C output
U.R. Either maximum voltage value Full scale value of
(Upper Right) | of START or STOP voltages. (+) plus sign.
Lake Either minimum voltage value Full scale value of
(Lower Left) of START or STOP voltages, (-) minus sign. OV (OpF)
| | | for C-V measurement .
ZERO ov
1-8
HP-IB Interface: IEEE 488-1975, ANSI. STANDARD MC 1.1
Interface Functions: SHI AHI T5 L4 SRI RLI DCI DT]
Remotely Controllable Functions: Measurement Function, Current Range, Lower
Limit of Auto Mode, Integration Time, I Trig, Filter, Voltage Sweep Con-
trol, Current Limit, Voltage of Ya/Ys, Setting Times and Self Test.
Data Output: Measured Data (I, C and VA),
| Voltage Settings (VA, VB),
Setting Times,
Setting Value of Cox and,
Front Panel Key Status.
: : "
Section !
Table 1-1
Table 1-1. Specifications(sheet 6 of 7).
«OPTIONS
Option 907: Front Handle Kit (5061-0090).
Option 908: Rack Flange Kit (5061-0078).
Option 909: Rack and Handle Kit (5061-0084).
Option 910: Extra Manual.
ACCESSORIES AVAILABLE
16053A: Test Leads (furnished with the 41408)
One triaxial (male) - triaxial (male) cable, two BNC (male) = BNC
(male) cables, and connection plate with female connectors (one — ”
triaxial and two BNC) are furnished, Each cable is 1 meter long.
Useful for connecting user designed prober station/measurement
fixture. |
15054A: Connection Selectors
Selects connection of low lead for pA Meter section as in following
figure. Used in conjunction with the 16053A.
T— EERE > a e phpbb shh e e ede Weis hewn a e Weer mad bist TREE WETTER TET EEE EAE ARAL
I
| = — ео фе
@® ©), =
16055A: Test Fixture for General Device Measurements (furnished with the 41408)
For stable pA current measurements with electrostatic/iight shielded
hood. Alligator ¢lips/T0-5 socket with connection plates for easy
connection to actual devices,
16056A: Current Divider (10:1)
Extends 107%A range to 107A (use only on 107%A range).
Section |
Table 1-]
Table 1-1. Specifications (sheet 7 of 7).
Other Accessories/Recommended Stock Parts:
Male {
Descriptions HP Model/Part Number
HP-IB Cable 0.5m 106310
Im 106314
2m 100318
4m 10631C
Triaxial Connector Female 1250-0687
- 1250-1413
16053-24001
16053-24002
BNC Connector Femaie
‘ Male
1250-1279
1250-0408
16055A Accessories
Connection Plate with Alligator Clip
Connection Plate with T0-5 Socket (10pins)
Alligator Clips (Sea)
Connection Leads for T0-5 Socket (5ea)
TO-5 Socket (8pins)
T0-5 Socket {10pins)
Т0-5 Socket (12pins)
16055-65001
16055-65002
16055-65003
16055-65004
1200-0238
1200-0239
1200-0240
Triaxial Cable (approx Im)
16053-61002
BNC-BNC Cable {approx Im)
16053-61003
Connection Plate for the 16053A
16053-61001
EE
ma sis Mia MANTA... SR co GREE rer :
Section |
Table 1-2
Table 1-2. General Information (sheet 1 of 3).
CURRENT MEASUREMENT
Typical Response time: 0 90%, FILTER...OFF.
Measurement Response Time Measurement ~ Response Time
Range (A) CE 2p | C= 2nF Range (A) C<2pF | C= 2nF
2. 1-5 | |
107° ~ 10 sims 107%, 107!! <50ms <200ms
107$ , 1077 <3ms .
“id <
107%, 1072 <15ms 10 <600ms
"CY" = capacitance value of test leads/fixtures.
When FILTER is ON, add 60ms (at 50Hz) or 50ms (at 60Hz).
Common Mode Rejection Ratio: 2120dB {£2 counts).
Current Measurement Accuracy:
- INTEGRATION TIME High Speed
L RANGE (A) | FILTER ——emomf Г MEDIUM | LONG | I Data Out
ON *(0.5+3 *(0.5+2) | #(0.5+2
ar 1078 ) | #(0.5+2) | #(0.5+2)
OFF £{0.5+4) | £(0.5+3) | #(0.5+2) (0.546)
10-3 ON +(0.5+3) | £(0.5+3) | #(0.5+2) |
OFF +(0.5+10) #(0.5+7) | £{0.5+3) +(0.5+10)
ON | =(2+4) | +(243) | #(242) | _— |
1079
OFF | +(2+10) | *(2+7) | £(2+3) (2410)
101 ON | +(5+10) | &(5+4) |=(53)- | ___—— 1
OFF | +(5+30) £(5+15) | +(5+10) +(5+100)
107i24x ÓN +{5+20) E(5+10) 1 +(5+8) |
OFF £(5+30) +(5+15) | +(5+10) +(5+100)
* +(% of reading + counts) at 23°C + 5%, <70% humidity.
** Zero offset is performed. |
Minimum Data Output Trigger Cycle:
VA | C=V I-V
==, 25ms
50ms
#4
S/N
Section I
Table 1-2
E | | | | Table 1-2. General Information (sheet 2 of 3),
I Data Output Trigger:
E | TRIGGER I Function : High Speed ! Data Output
o INT, approx. 200ms approx. 10ms*
|
ENT. , . > ms
- | zintegration Time. :
: МАМ. *** + 3ms
3 * At 50Hz line frequency (x5/6 at 60Hz operation).
Hs | ** Triggered when the logic signal (2 lus) goes to "0"
| (short or < 1002 of resistance) from "1*,
i *** Triggered by HOLD/MAN. key.
X Current Measurement Ranging Time (ms):
3 a Optimum Range (A)
Е (A) 1107 11073 197 I195 110 | 1977 107% 1107? 110 7% | 1071311072?
3 > | Ш
- 10 340 | 960 [1300 | 1920 | 2260 | 3080 | 3420 | 4940 | 5280 | 7760
E 1073 20
a 340 620 960 | 1580 | 1820 | 2740 | 3080 | 4600 | 4940 17420
10%, | 320 | 300 a
| 640 | 620 340 | 960 | 1300 12120 | 2460 | 3980 | 4320 | 6800
560 | 640 | 340 6201 950 | 1780 | 2120 | 3640 | 3980 | 6460
1078 640 | 620 320 | 300
| 960 | 940 | 640 | 620 340 1160 | 1500 | 3020 1 3360 | 5840
10-7 | 660 | 640 | 340 | 320 | 20
980 | 960 | 660 | 640 | 340 820 1160012580 | 3020 | 5500
1078 960 | 940 | 640 | 620 | 3201 300
1280 11260 | 960 | 940 | 640 | 620 340 | 1860 1 2200 4680
108 980 | 960 | 660 | 640 | 340 | 320 20
1300 11280 980 960 | 660 | 640 340 1520 | 1860 | 4340
10719 1480 [1460 [1160 {17140 | 840 820 520 |! 500
1800 [1780 [1480 11460 | 1169 111409 | 840 | 820 340 12820
10-11 | 1500 11480 | 1180 {1160 | 860 | 840 | 540 | 520 | 20
| 1820 ¡1800 1500 ¡1480 11180 +1160 | 860 1 840 | 1300 2480
19-12 270% ¡2680 | 2380 12360 | 2060 | 2040 11740 1720 | 1220 | 1200
3020 ¡3000 2700 | 2680 | 2380 1 2360 | 2060 | 2040 | 2500 | 3760
Each value is the ranging time from the start range to the optimum range.
All values are in milliseconds. Times to the right of the diagonal line
are downward ranging times. Times to the left of the diagonal line are
upward ranging times (the. upper values are ranging times when the internal
current measurement circuit is saturated, and the lower values are when it
isn't saturated).
Table 1-2
Section |
Paragraphs 1-19 to 1-28
General Information (sheet 3 of 3).
o
Г ee ET
ол
1
vo
+
Ё .
= Н
Output Resistance: < 19.
Output Inpedance:
Program Speed (#7, F4, #1:
Ranging: approx. 30ms.
DC VOLTAGE SOURCE
< 10 at 10Hz, < 1002 at 100Hz.
Approx. 2.5ms{1V/ms through rate)
A
1.19. OPTIONS.
1-20, Available Options for the Model 41408
are listed in Table 1-3. | |
Table 1-3. Available Options.
Option | Description
907 Front Handie Kit
908 Rack Flange Kit
909 Rack Flange and Front Handle Kit
910 Extra Manual
1-21, Option 907 + 908 or 909,
1-22, Option 907, 908 or 909 provides the me-
chanical parts neccessary for rack mounting.
Installation procedures for these options are
detailed in Section II,
1-23, Option 910 Extra Manual.
1-24, Option 910, Extra Manual, provides an
extra copy of the Operating and Service
Manual.
1-25, ACCESSORIES SUPPLIED.
1-26, Figure 1-1 shows the HP Model 41408 pA
Meter/DC Voltage Source, Model 16053A Test
Lead, Model 160554 Test Fixture and power
cord (HP Part No. 8120-1378). The 16053A,
the 16055A and the power cord are furnished
accessories.
1-27. ACCESSORIES AVAILABLE.
1-28. For convenience and ease of measurement,
four styles of accessories are available,
Photos and descriptions of accessories are
given in Table 1-4 and application ranges of
accessories are given in Table 1-5.
A WARRING
DO NOT USE 16055A TEST FIXTURE WITH
16054A CONNECTION SELECTOR. HAZARD-
QUS VOLTAGE MAY EXIST ON LOW LEAD
TERMINAL EVEN IF 160554 LOW LEAD
CONNECTION SELECT ‘SWITCH IS SET TO
GND POSITION WHEN 16054A LOW LEAD.
CONNECTION SELECT SWITCH IS SET TO
ya OR vg POSITION.
Table 1-5. Application Ranges of Accessories.
Mode | Current Range In Combination
16053A о. o
All ranges: I :
16054A 10° CANTO “A
16055A | 6 o
16056A | 107%A range bdo
La e PERO y
Table 1-4
‘Table 1-4, Accessories Available (Sheet 1 of 2).
Mode]
Description
16053A Test Lead (Furnished with the 41408)"
, TT
axial Cable (1), BNC Cable (2), and Se
Plate, и 1
Triaxial Cable (HP P/N 16053-61002): E
Triaxial cable with triaxial male connectors.
im length. |
BNC cable (HP P/N 16053-61003): ver
Coaxial cable with BNC male connectors. Im length
Connection Plate (HP P/N 16053-61001): e
Connection Plate with triaxial (1) and BNC (2)
female connectors,
Useful for connecting prober station, neasurenend
fixture designed by user and other 41408 accessos
ries.
16054A Connection Selector ‘
Selects connection of low Tead for 41408 pA "ete!
section, Used in conjunction with the 16053A.
Internal connections are approximately. as follows
— ВАНН rl!
rh
Section |
Table 1-4
Table 1-4. Accessories Available (Sheet 2 of 2).
Model — | Description
— E | - 16055A Test Fixture (Furnished with the 41408)
= | Used for general device measurements, For stable
pA current measurements with electrostatic/iight
shielded hood. Furnished accessories, used in
conjunction with the 16053A, include the following:
Descriptions | HP P/N
Connection plate with alligator | 16055-65001
clip |
Alligator clips (Sea) — 16055-65003
Connection plate with TO-5 16055-65002
socket
Connection leads for TO-5 sock- | 16055-65004
et (Sea) |
TO-5 Socket { 8 pins) 1200-0238
10-5 Socket (10 pins) | 1200-0239
T0-5 Socket (12 pins) | 1200-0240
16056A Current Divider
Extends 1072A range to 107A. Useable only on
107%°A range.
1-15
E inspection and damage claims,
Section li
Paragraphs 2-1 to 2-9
SECTION il
INSTALLATION
5.1, INTRODUCTION
2.9, This section provides installation in-
“ructions for the Model 41408 pA Meter/DC
Voltage Source and its accessories. This
section also includes information for initial
preparations
for using the 41408 and packaging, storage
and shipment.
2.3, INITIAL INSPECTION
2.4, Inspect the snipping container for dam-
age. If the shipping container or cushioning
material is damaged, it should be kept until
the contents of the shipment have been
checked for completeness and the instrument
has been checked mechanically and elecirical-
ly. The contents of the shipment should be
as shown in Figure 1-1; procedures for check-
ing electrical performance are given in
Section IV. If the contents are incomplete,
if there is mechanical damage or defects, or
if the 41403 does not pass the Performance
Tests, notify the nearest Hewlett-Packard
office, If the shipping container is damaged,
or the cushioning material shows signs of
stress, notify the carrier as well as.your
Hewlett-Packard office. Keep the shipping
materials for carrier's inspection. The HP
office will arrange for repair or replacement,
at HEP option, without waiting for claim set-
tiement. |
WARNING
TO AVOID HAZARDOUS ELECTRICAL SHOCK,
DO NOT PERFORM ELECTRICAL TESTS WHEN
THERE ARE SIGNS OF SHIPPING DAMAGE TO
ANY PORTION OF THE OUTER ENCLOSURE
(COVERS, PANELS, OR METERS).
2-5, PREPARATION FOR USE
2-6. Power Requirements.
2-7. ¡ne 41404 requires a power source of
100, 120, 220Vac +10%, or 240Vac +5% -10%, 50,
60Hz 5% single phase, Power consumption is
less than 135VA. |
2-8. Line Yoltage and Fuse Selection.
2-3, Figure 2-1 provides instructions for
line voitage and fuse selection. The line
voltage selection switch and the proper fuse
are factory installed for 100 or 120Vac oper-
ation.
100V OPERATION 220V OPERATION
| 20 Ve
120Y OPERATION 240Y OPERATION
ZA !- 100V - = —100V- =
220. | zecv~ |
2 240V~ — = 240V Ay -
204 ——
m HOCH mn me
[2 I
« 100V ~ =
[ev
\
240 Vu —i ZA
120V~ =)
11m DAOV A —
120VA =]
FUSE SELECTION
Operating Fuse Fuse
voltage ratings Part No.
100V 1,25A
120V | Stow Blow | 2110-0305
220V | 0.6A
240 STow Blow | 2110-0016
Figure 2-1. Line Voltage and Fuse Selection.
2-1
Ice
TEA
E. ME LA
SELECTION li
Figure 2-2
Model 419
py N WHITE .
vente
| Brack
|| he + EGREEN/YELLOW
E Ум WHITE
HP Part No, 8120-1378
NEMA 5-15P
Color: JADE GRAY
Furnished for countries
other than those listed
below,
E GREEN
HE 1 RED
=
N BLACK
E e E RED
‘BN rue È GREEN
0
! LIGHT BLUE ни
| E GREEN,
J YELLOW NE
| кон RE
L BROWN
E e anna
vu = Ta E GAEEN/YELLOW
*
= MUA Tee NO LIGHT BLUE
HP Part No, 8120-1369
AS-C112, N.Z2,5,5. 198
Color: GRAY.
250V, 6A
for Australia, New Zealand, etc,
HP Part No. 8120-1351
BS 1363A
Color: MINT GRAY
250V, БА
for Great Britain, South Africa,
India, Rhodesia, Singapore, etc,
1 ETA NTC
N LIGHT BLUE
E GREEN/YELLOW
L BROWN
N LIGHT BLUE
$ | N
YELLOW
| deal UA
L BROWN
HP Part No, 8120-1889
CEET-VII
Color: MINT GRAY
250V, 6A
for East/West Europe,
iran, ete,
Note E: Earth Or safety ground.
L: Line of active conductor.
N: Neutral or identified conductor,
Figure 2-2. Power Cables Supplied,
UE моде} 41408
power Cable.
@ 7.11, This
M .,-ce-vire Power cable.
№ _,,ropriate ac power receptacle, this cable
ES nds the instrument cabinet. The type of
E cable plug shipped with each instrument
depends on the country of destination. Refer
1 +0 Figure 2-2. for power cable part numbers
E and plus configurations available.
instrument is equipped with a
Note
codes for
check local electrical
selec-
proper plug (attachment cap)
tion for your area.
ИЕ 2.12, Operating Environment.
| 2.13, Temperature. The instrument may be
operated at temperatures from 0°C to 40°C.
When connected to an
Section Il
Paragraphs 2-10 to 2-18
2-14, Humidity. The instrument may be oper-
ated in environments with numidities up to
70% at 40°C. However, the instrument should
be protected from temperature extremes which
cause condensation within the instrument,
2-15. Installation Instructions.
2-16. The HP Model 41408 can be operated on
the bench or in a rack mount, The 41408 is
ready for bench operation as shipped from the
factory. For bench operation, a two-leg in-
strument stand 15 used. For use, the instru-
ment stands are designed to be pulled towards
the front of instrument.
2-17. Installation of Options 907,
908 and 909.
2.18. The 47408 can be installed in a rack
and be operated as a component of a measure-
ment system. Rack mounting information for
the 41408 is presented in Figure 2-3.
Option Kit Part Number Parts Included Part Number Q'ty Remarks
907 Handle Kit Front Handle 5060-9900 2
5061-0090 Trim Strip 5060-8897 2 |
48-32 x 3/8 Screw 2510-0195 8 9,525mm
908 Rack Flange Kit | Rack Mount Flange | 5020-8863 2
5061-0078 28-32 x 3/8 Screw 2510-0193 8 9, 525mm
309 Rack Flange & Front Handle 5060-9900 2
Handle Kit Rack Mount Flange 5020-8875 2
5061-0084 #8-32 x 3/8 Screw 2510-0194 8 15.875mm
Figure 2-3.
Remove adhesive-backed trim strips © from
sides at right and left front of instru-
ment.
HANDLE INSTALLATION: Attach front handle (3)
to sides at right and left front of in-
strument with screws provided and attach
trim strip(1)to handle.
RACK MOUNTING: Attach rack mount flange (9)
to sides at right and left front of in-
strument with screws provided,
HANDLE AND RACK MOUNTING: Attach front
handle (7) and rack mount flange (8) together
to sides” at right and left front of in-
strument with screws provided.
When rack mounting (3 and 4 above), re-
move ali four feet.
Rack Mount Kit.
2-3
wpe 5 °
FATE
Paragraphs 2-19 to 2-24
2-19, STORAGE AND SHIPMENT
2-20. Environment,
2-21. The instrument may be stored or shipped
in environments within the following limits:
Temperature ........ree... -40°C to +75%
HUmidity ......e.e e... Up to 95% at +45%
The instrument should also be protected “from
temperature extremes , which could cause con-
densation within the instrument.
2-22, Packaging.
2-23. Original Packaging. Containers and
materials identical to those used in factory
packaging are available through Hewlett.
Packard offices. If the instrument is being
returned to Hewlett-Packard for servicing,
attach a tag indicating the type of service
required, return address, model number, and
full serial number. Also, mark the container
FRAGILE to ensure careful handling. In any
correspondence, refer to the instrument by
model number and full serial number,
2-26, Other Packaging. The following general
instructions should be used for re-packing
with commercially available materials:
2-4
MFIOGE | 4] 4
я
Wrap instrument in heavy paper or po
tic. (If shipping to Hewlett-Pac
office or service center, attach Le
indicating type of service requires
return address, model number and fy
serial number.) E
Use strong shipping container. A day
ble-wail carton made of 350-pound tec,
material is adequate. i
Use a layer of shock-absorbing materia
/0 to 100mm (3 to 4 inches) thi,
around all sides of the instrument ой
provide firm cushioning and to preven
shifting inside container. Protec
control panel with cardboard. |
Seal shipping container securely,
Mark shipping container FRAGILE to en
sure careful handling. :
In any correspondence, refer to instru
ment by model number and full serial
number. a
7 = nue LU EST . .
E . = = - г „+ 1 7k Lake s a PTE sr
SODIO , EAE IA = a ; и , re pa a e EA acs NR ppp FE == mr ema a ralla pp ur ie le Ra Todt re rT
TERE A Bik] NN oa E чет " > EEE AAA Tre Tr et Er are RS IE M TO REET Frm phares a | == . а м = SE Hin SE 2 7
= = TRENT TATE PATA LATA A Td LT Yop PIE NERO NE A CR EAT ERA AE ANTE TTT JOE A ms EPA ETE ART TR Eu
41408
i 3-1, INTRODUCTION.
E 3.2, This section provides the operating in-
x structions for acquainting the user with the
E Model 4140B pA Meter/DC Voltage Source, In-
E structions
E functions. |
| and option information are
measurement
self test,
included in this
precautions given
should be carefully ob-
for panel controls,
operating procedures,
section. Operating
throughout the text
served.
WARNING
BEFORE THE INSTRUMENT IS SWITCHED ON,
ALL PROTECTIVE EARTH TERMINALS, EX-
TENSION CORDS, AUTO- TRANSFORMERS AND
DEVICES CONNECTED TO IT SHOULD BE
CONNECTED TO A PROTECTIVE EARTH
GROUNDED SOCKET. ANY INTERRUPTION OF
THE PROTECTIVE EARTH GROUNDING WILL
CAUSE A POTENTIAL SHOCK HAZARD THAT
COULD RESULT IN PERSONAL INJURY,
ONLY FUSES OF THE SPECIFIED TYPE AND
OF THE REQUIRED RATED CURRENT SHOULD
BE USED. DO NOT USE REPAIRED FUSES
OR SHORT CIRCUITED FUSEHOLDERS, 10
DO SO COULD CAUSE A SHOCK OR FIRE
HAZARD,
CAUTION
BEFORE THE INSTRUMENT IS SWITCHED ON,
THE LINE VOLTAGE SWITCH ON THE REAR
PANEL MUST BE SET FOR THE VOLTAGE OF
THE POWER SOURCE OR DAMAGE TO THE IN-
STRUMENT MAY RESULT.
3-3. PANEL FEATURES.
3-4, Front and rear panel features are de-
scribed in Figures 3-1 and 3-2. Description
Other detailed information for panel displays
and controls is covered starting in paragraph
3-5. SELF TEST,
2-6. The 41408 has the following self test
Fun
1) A Program Memory Test
2} pA Meter Test
3) A Display Test
numbers match the numbers on the illustration.
Section 111
Paragraphs 3-1 to 3-7
SECTION Ii!
OPERATION
These tests are automatically performed each
time the LINE button is pushed to turn the
instrument on. In addition, these tests are
enabled when SELF TEST key is pushed. Under
this latter condition, the tests are per-
formed repeatedly while SELF TEST lamp is 11%.
These tests can also be enabled by a remote
program via the HP-IB, |
(1) Program Memory Test.
During the Self Test mode, the instru-
ment checks the internal program memo-
ry. If an abnormality is detected, the
instrument displays one of nine error
messages (E-] v E-9), Seven of the
error messages (E-1 v E-7) indicate an
abnormality in the ROM (Read Only Memo-
ry} and the other two error messages
(E-8 or E-9) indicate an abnormality in
the RAM (Random Access Memory). Suffix
numbers are the same as those for ROM
or RAM,
(2) pA Meter Test.
This test verifies basic operation of
the instruments pA Meter section. If
an abnormality is detected, the instru-
ment will display an error message
(E-P) on the 1-C DISPLAY,
(3) Display Test.
During the Self Test mode, ail front
. panel indicator lamps and all segments
of numeric and character displays are
illuminated, When the instrument 15
turned on, the current setting of the
HP-IB address switches is displayed on
the 1.C DISPLAY for approximately |
second.
3-7. When 41408 1$ set to Self Test mode by
the SELF TEST key, the 4140B has an addition-
al Self Test function (a Control Key Test).
If each control key is normal, the I.C DIS-
PLAY displays an octal code as shown in Fig-
ure 3-3, when a control key is pushed.
3-1
| Mode] à
Figure 3-1
—
CREA Lal NENE m
en О) О
го ® 299 ees
T
© à OO ©®
© LINE ON/OFF Switch: Turns instrument ® I-C Display: Current or capacitance
on and readies instrument for measure- value, including decimal point and sig"
ment. | is displayd as a maximum 3-1/2 digi
| | decimal number from 0000 to 1999, 1,
O HP-IB Status Indicator and LOCAL Key: the measurement value exceeds full
LED Tamps for SRQ, LISTEN, TALK, and- count on the selected range, an ove...
REMOTE indicate status of interface be- flow annunciation appears, a
tween the 41408 and HP.IB controller, |
LOCAL key enables front panel control (5) Exponential Display for Current Meas-
instead of remote control from HP.IB . Urement: Current measurement exponen
line, Refer to paragraphs 3-71 thru (-210-12 in eleven ranges) is display
3-100. ed when FUNCTION(8)is set to I or I-V,
(3) ZERO Offset Key: This Key is used to (7) Capacitance Measurement or Percent Ke:
compensate for pA Meter offset errors, Unit Indicator: "pF" indicator is il.
Current or capacitance value on I-C luminated in general C-V measurements.
display (5) is stored when button is When percent key is pushed, percent in.
pressed, — The stored offset value is dicator is illuminated and IC DISPLA!
subtracted from subsequent measurement (5) 15 in percent. |
values. Refer to the paragraph 3-23. |
FUNCTION Select Key: These keys select
(4) Trigger Lamp: Turns on in synchroniza- measurement functions as follows,
tion with measurement or data output
on I-C DISPLAY (5) When FUNCTION (8) is I: For independent operations
set to I and I TRIG (17) ds set to INT, as universal pA meter and DC
the Tamp flashes repeatedly at approxi- voltage source.
mately 200ms. I-V: I-V characteristics measure-
ment using staircase or ramp
wave, |
C-V: Quasi-Static C-V characteris--
tics measurement using ramp
wave, |
Ho 5 Figure 3-1. Front Panel reatures (sheet 1 of 5),
UE 41408 Section III
E Figure 3-1
def ANGE Select Key: These keys select (iD) 1 TRIG Select Key: These keys select
© rhe current measurement ranging method. trigger mode for triggering measurement
In AUTO mode (when LED lamp is lit), or ! Data Output when FUNCTION is set
optimum range for the current value is to las follows:
automatically selected. In MANUAL mode
(when LED lamp is not 1it), measurement INT: This key provides internal
range remains the same even when the trigger which enables instru-
current value 1s changed. Manual rang- ment to output current data
ing is done by pressing adjacent DOWN measurement repeated at 200ms
(6) ) or UP (& ) key. Also, pressing {approximate) rate.
LIMIT key after pressing the Blue key
(8) sets the lower limit of AUTO mode | EXT/MAN: In external/manual trigger
SXNGE. When a lower límit other than | mode, a trigger signal 1s
10712A is set, the LED lamp will flash. — provided by not only appiy-
Refer to paragraph 3-16. | — ing to EXT TRIGGER input on
| rear panel, but also by
Note | pressing this key,
Pressing DOWN (9) ) or UP
( @) key sets the ranging
mode to Manual even if the
ranging mode was set to Note
AUTO. |
o | A 4140B can be triggered by
(0) INTEGRATION TIME Select Key: These a trigger command (GET),
keys select digital integration time regardless of mode setting
in accordance with the following table of 1 TRIG.
“for the various measuring conditions:
Range{A) Integration Time (ms )* © I INPUT Connector: This connector 15 а
| triaxial female connector for connect-
ing unknown current source, test Tead,
or test fixture,
Short Medium Long
107241010 20(16.7) | 80(66.7) | 320(266.7)
GROUND Terminal: This terminal is con-
nected to chassis ground of instrument
“and can be used as ground terminal in
measurements which specifically require
use of a guard.
1071 | 80(66.7) 320(266.7) 1280(1066.7)
107% 1160(133.3) |640(533.3)|2569(2133.3)
“Note: at 50 (60)Hz line frequency.
(1) FILTER Key: An internal filter for re-
jecting ac noise can be set to ON/OFF
by pressing this key. When the filter
is OFF, LED lamp is flashing.
Figure 3-1. Front Panel Features (sheet 2 of 5).
25e * LEA ;
— y = ы - A ==
Ra RR я TALA . ‚
Section IT!
Figure 3-1
(5)
(29)), output voltage
PE
Et AMDB ph METER / DE VOLTAGE SOURCE
LATE]
| PIÉ CURRENT LIMIT 1Al
“эт E.
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YA, VB Lamps: These lamps indicate
voltage value of the VS DISPLAY (18) 15
VA or VB, Usually, VA lamp is ilTumi-
nated. When VA is set to OFF and VB is
set to ON (VS Mode key(2)), VB lamp is
illuminated,
VS (Voltage Source)
voltage value, including decimal point
and sign, is displayed as a maximum
3-1/2 digit decimal number from 0000
to 1900 (the number of digits change
depending on instrument contro? set-
tings). Usually, output voltage YA
value is displayed. When VA is set to
OFF and VB is set to ON (VS Mode Key
YB value is dis-
played. In addition, when Y OUTPUT
lamp is not lit, this display can be
used to display parameter values. If
the input parameter value exceeds its
limit value, and overflow annunciation
appears, If the 4140A is swept at in-
correct parameter settings, an illegal
annunciator appears. |
Display: Output
(Dunit Indicator Tamps: These lamps in-
dicate unit of VS DISPLAY (i) as fol
tows: _
y: Output Voltage, — (Va or Ya),
START Y, STOP Y, STEP Y, д
$: HOLD TIME, STEP DELAY TIME,
v/s: dv/dt.
pF: Cox.
(OV OUTPUT Lamp: When the DC Voltas
Source is operating, this lamp is lit.
(19) CURRENT LIMIT Lamps and Select Keys
These lamps indicate output curren.
limit of VA or VB. If output current
goes to limit value, this lamp flashes
Select keys select output current lim
it of VA or VB to 100LA, ImA or 10mA, ©
(29) V SHEEP AUTO START (SET ==) key: Thi
Key is used to start auto sweep when Y;
is set to sweep mode and sets DC volt-
age Of VB. When Vp is set to DC (==
mode, this key is used to set DC volt
ages for VA or Ve,
3-4
Figure 3-1. Front Panel Features (sheet 3 of 5).
Ee я
Section II!
Figure 3-1
Î cep MAN (PAUSE), STEP DOWN (©)
SWEET DE ue (©) Keys: MAN (PAUSE)
and is usually used to start manual
ке) When VA is operating in auto
веер mode this key is used as the
a sweep pause control. The key
can change the sweep from auto (when
jamp is not lit) to manual mode
en LED jamp is lit) or from manual
to auto. The STEP DOWN and STEP UP
— keys are used for manual sweep.
| @ v sweep ABORT (RESET = ) Key: This
| key is used to abort all operations of
the DC Voltage Source.
(z3) ENTER Key: When this key is pushed af-
ter the value of the parameter 1s set
with the PARAMETER select (2) and DATA
25) keys, the set value is stored in the
AT40A, + The VS DISPLAY (16) indication
flashes once when this key is pushed.
(24) Blue Key: Functions in blue letters
(Cox, SELF TEST, Á-Y RECORDER) are ef-
fective after this key is pushed.
(7) DATA Keys: — These keys are used to in-
put parameter values. They are made
up of numeric (019), decimal and minus
keys,
(®) X-Y RECORDER Control Keys: These keys
are used to control pen position of the
X-Y recorder connected to ANALOG OUTPUT
connectors on rear panel and include:
LL: Moves pen position to lower
left of sweep area.
Sets both outputs to OV,
UR: Moves pen position to upper
right of sweep area. |
These control keys are effective after
Biue key is pushed. |
(2) SELF TEST Key “and Lamp: This key 1s
used to set 41408 to Self Test mode.
Lamp is lit during Self Test mode oper-
ation. This key is effective after the
Slue key (2) is pused. Refer to para-
graph 3-5, ‘
(28) PARAMETER Select Keys:
These Keys are
used to set and monitor measurement
parameters
for
When V OUTPUT Lamp (18)is 1it,
ters can not be set.
DC Voltage Source.
Parame-
Parameters can be
monitored when these Keys are pushed:
5 YA Mode
START Y:
STOP Y:
STEP Y:
HOLD TIME:
dV/dt:
Cox:
STEP DELAY
TIME:
e VB Mode
Hidro,
vk lan
Figure 3.1. Front Panel Features (sheet 4 of 5).
DC Voltage (V) of no
sweep mode.
Start voltage (М) of
sweep mode,
Stop voltage (Y) of
sweep mode.
Step voltage (Y) of
sweep mode.
Hold time (s) of start
and stop voltages of
the sweep mode,
Rate of change of ramp
wave voltage.
Reference capacitance
value (C oxide) (pF) of
a C-V measurement in
percent. This key 15
effective after Blue
key is pushed.
Delay time(s) of each
step of staircase wave.
DC Voltage (Y).
3-5
Section 11!
Figures 3-1 and 3-2
mrp
VS (Voltage Source) Mode Lamps and Se- o VB Mode
lect Keys: These lamps indicate VS
mode settings as follows: == (DC): DC voltage is outputted:
> VA Mode | о OFF: Ys is not operating.
/ {Single Ramp Wave): Output volt- | |
age is changing continuously (dv/ — Select keys select VA and VB mode in
dt) from start voltage to stop accord with following table:
voltage. —
VA VB |
/\ (Double Ramp Wave): Output volt- FUNCTION - О
age is changing continuously (dv/ | NI A === | OFF | === [OFF E
dt) from start voltage to stop — ©
voltage, Successively, output I 0!:0/6 0,0 O O ©
voltage is returned to start _
voltage at same ramp rate. 1-\ ОО |@ | О| хх ОО |
#7 {Single Staircase Wave): Output GV @ 0 xjx x| x [OO
voltage is changed step-by-step , , a |
in step voltage fashion from A This mode is not used. o |
start to stop voltage. ©: Initial Settings. |
{4 (Double Staircase Wave): Output (30) V QUTPUT Connectors: These connectors -
voltage is changed in step-Dby- are BNC female connectors to connect |
sten voltage fashion from start unknown samples, test leads or test
‘to stop voltage. Successively, fixtures.
output voltage is returned to - |
start voltage by same step voit- | | и
age. | a
=== (DC): DC voltage is outputted. | |
OFF: VA is not operating.
Figure 3-1. Front Panel Features (sheet 5 of 5).
` FALE LLP IRR HDC TIN =
WY STE DL ARTS, HAT A En ET
Fi Pure amp peter GFF
TAN ET LAS AA TAGE
ww _
CE A a eta EP ET
WHE, AL FREE. Е
LEGAL Ts aE kL
é
"о
НЫ
= a.
He %
<
Te mit
Em
Atos can ‘2
FL un ne a A pi
Figure 3-2. Rear Panel Features (sheet 1 of 2).
3-6
FE HET FASER
pres er QUE вы гос
- NO reve rT
ME AC a MA,
NASE NE
4 Е i sde] 2140 В
Section II!
Figure 3-2
cL TER TIME CONST Select Switch: This
O FILE selects filter rise time (OFF,
0.225 OY 15) for optimizing analog out-
put.
OL QUTPUT Connector: Analog output
data of 41408 VA OUTPUT is output from
this connector in accordance with the
following tablet
[va (w) IVA OUTPUT (Y) RESOLUTION |
ps
0.00 v£10.00 0.000 ~x1.000 ImV/count
— TEE .
+19,1 w£100.0 +1,01 n=10.00 | 10mV/count
Lee
1/0 OUTPUT Connector: Analog output
data of 41408 IC DISPLAY is output
from this connector in accordance with
+he following table:
1 OUTPUT (Y) |
E DISPLAY
RESOLUTION |
0.0004 8.935
| 0~ £1999
5mv/ count |
(5)HP-1B Control Switch:
()PEN LIFT Connector: PEN LIFT control
signal for an X-Y recorder connected to
the 4140B, is output from this connec-
tor, When Va OUTPUT and 1/C OUTPUT
connectors are outputting analog output
data, this connector outputs a LOW
level TTL signal (PEN DOWN), At other
times, this connector outputs a HIGH
‘level TTL signal (PEN UP).
This switch se-
lects HP-IB address, data output format,
and interface capability. Refer to
paragraph 3-79.
($) HP-1B Connector: An HP-IB cable can be
connected for intercommunication with
other HP-IB devices through the bus
line cable. |
(DEXT TRIGGER Connector: This connector
‘is used for externally triggering pA
Meter by inputting an external trigger
signal when FUNCTION is set to I.
TRIGGER switch on front panel should be
set to EXT. Refer to paragraph 3-21.
(LINE Input Receptacle: AC power cord
is connected to this receptacie and to
AC power line.
(3) VOLTAGE SELECTOR Switch:
- Em | - | These switch-
C DISPLAY C OUTPUT (V2 RESOLUTIO es select the CEE operating
a Ш power voltage 100, 120, 220V +10% or
0.0+199,9 | 0.0000 ~0.9995)500,/ count ower MONT 48 п 662). Refer to
20001999 | 1.000 9.995 |- 5mv/count |. paragraph 2-6.
(0) FUSE Holder: Instrument power line
a fuse is installed in this holder. Re-
5 pisPLaY | % OUTPUT (V) | RESOLUTION | fer to paragraph 2-5.
0.0199.3 0,000 9,995 Sr count |
ee
Figure 3-2.
Rear Panel Features (sheet 2 of 2).
Mode?
Paragraphs 3-8 to 3-11
CURRENT LIMIT [a]
sod TEL
BEE
> RI.
BOE
w | TRIG + FILTER
IT ETA MAN
|
Figure 3-3. Octal Codes of Control Keys,
3-8. INITIAL CONTROL SETTINGS, * C measurement Unit indicator is set t
РА,
3-9. One of the convenient functions which
facilitate ease of Opération is the automatic 3-10, MEASUREMENT FUNCTION.
initial contro] setting performed after the |
instrument is turned on. Initial panel con- 3-11. The 41408 has three measurement func
trol functions are automatically set as fol. tions which are: | и
ÎOWS : | о :
| I: For independent Operations as a yk
FUNCTION Lo... ou. savent eee cac aa LL, I versal pA Meter and DC voltage Sourc
L RANGE Les a 111 2020... AUTO | |
Lower Limit of AUTO Mode ..,,..... 107124 I-y: Ty characteristics measurement us:
INTEG TIME ener eee III LONG Staircase and Ramp wave,
CILTER Lecce see ET EE se... ON : |
I TRIG ......... Cesu es ae nes ec nus au à ENT C-V: Quasi-Static C-V Characteristic
VA einen] etes ces nee una css 4 measurement using Ramp wave, |
УВ orenorreccoren, EE es au. OFF
PARAMETERS vec. All parameters are () The Paragraphs that follow give basic infor-
SELF TEST... Cereal abana... OFF mation on the PA Meter and DC Voltage Source
Ty на heen 0 when FUNCTION js set for I, I-V and C-V meas.
C ZERO OFFSET ,...... кооооонвветвьев ввовы 0 urement, |
CURRENT LIMIT в 10044
Additionally, when FUNCTION 15 changed, panel
control functions are automatically set as in
Table 3-17,
Table 3-1, Automatic Control Settings,
FUNCTION
CONTROLS
iy.
OFF
=
C-V#
[ TRIG OFF
YA
LC
“current measurement
—
2.12, ph (PICO-AMPERE) METER SECTION,
2.13, The pA Meter section operates as an in-
pendent, highly stable universal pA Meter
7107! A max) when FUNCTION is set to I. When
is set to I-V, accurate current-
voltage measurements can be made with the
taircase or ramp wave of the DC Voltage
ee Leg - the timing between the pA Meter and
eT tage Source can be automatically syn-
chronized, When FUNCTION is set to C-V, ас-
curate I-V measurements are made using the
ramp wave, and capacitance is calculated from
the measured current value and the ramp rate
(dV/dt); the result is displayed on the I-C
DISPLAY. Independent operation as a univer-
sal pA Meter 1s described in paragraphs 3-12
thru 3-20. These paragraphs should be read
even if only I-V or C-V measurements are to
be made. Instructions for !-V measurements
are given in paragraphs 3-43 thru 3-48. For
(-V measurements, paragraphs 3-49 thru 3-60
should be read.
3-14. pA Meter Display.
3-15. The primary display, sub-display and
two LED lamps provide visual data outputs of
resuit or the result of
capacitance calculations. The primary dis-
play (1-C DISPLAY) provides a readout of cur-
rent measurement value, calculated capaci-
tance value or the capacitance value as a
percent of the reference value (Cox) as a
maximum 4 digit decimal number with decimal
point. If measurement overflows, an alpha-
betic annunciation (either O-F, COF or POF)
is displayed (refer to paragraph 3-65), The
sub-disnlay provides the exponent of the cur-
rent measurement (-2 to -12 in eleven ranges)
when FUNCTION is set to I or I-V. Two LED
lamps serve as the unit indicators for the
capacitance measurement. These lamps indicate
that the value of the I-C DISPLAY is the cal-
culated capacitance (pF) or the capacitance
value in percent referenced to a capacitance
value (Cox). In a C-V measurement, lesser
significant digit data of the calculated ca-
racitance is displayed when the current meas-
urement data has few significant digits. In
an TC DISPLAY, the lesser significant digit
data 15 represented by a small zero (®) fig-
ure to differentiate it from a more signifi-
“ant digit which is represented by a large
zero (MA Jas shown in Figure 3-3.
Less Significant Zero.
Significant Zero.
Figure 3-4. Less Significant Zero.
Section III
Paragraphs 3-12 to 3-17
The display for the pA Meter displays the
following parameter values in like manner [to
those described above):
Measuring Current ....... 40.001 x 10712A
м 1,999 x 1077A,
Calculated Capacitance .. 0,0pF 1199,9pF,
200pF n1999pF.
Capacitance in Percent .., 0.0% ~199, 9%.
3-16. Current Measurement Ranges.
3-17. The pA Meter of the 4140B can measure
currents from 107'*A to 107%A in 11 ranges.
tach range allows a 99.9% overrange of the
1000 full scale count (maximum 1999 counts),
The 41408 has two range modes, AUTO and
MANUAL, to select the optimum range for the
various current measurements, When I RANGE
is set to AUTO, an optimum range .is auto-
matically selected for each measurement. If
the internal measurement circuit is saturated
or the I-C DISPLAY count (refer to paragraph
3-18) exceeds 1999, the measurement range is
automatically changed up. If the I.-C DISPLAY
count is less than 150, the measurement range
is changed down by the AUTO ranging system.
Also, using the following procedure, a lower
limit for AUTO range can be set:
(1) Select the desired lower limit usina
the DOWN (©) or UP ( ()) key.
(2) Press the Blue key and then press AUTO.
This sets the present I RANGE as the
lower limit of the AUTO range mode.
At lower limit, the measurement range will
not change down even if the I-C DISPLAY count
is less than 150.
Note
When range mode is set to AUTO, the
¿ED lamp in the AUTO key will be
Tit, If a lower limit other than
107 **A ds set, this LED lamp will
flash.
When the I RANGE is set to MANUAL, the meas-
urement range will not change even if the
measured current changes, If the DOWN (© )
or UP (©) key is pressed while I RANGE is
set to AUTO, the 1 RANGE will change to
MANUAL and the measurement range will change
accordingly. If the internal. measurement
circuit is saturated when I RANGE is set to
MANUAL , MENE «i117 be displayed on the
I-C DISPLAY, or if the measured value 15 over
1999 ceunts, will be displayed on
the I-C DISPLAY. Ranging times, the time the
instruments takes to change from one range to
another, are given in Tabie 1-2.
CA
, Élus LR mere = =
e к д ая EE .. C5,
rr. rrr A L . п .
№
Section III
Paragraphs 3-18 to 3-22
3-18. Integration Time and Data Output.
3-19. The raw current measurement of the
4140B pA Meter section is made by making suc-
cessive approximations between the reference
voltage (using a high speed D-A converter)
and a voltage proportional to the measured
current. This raw current measurement 15 5уп-
chronized with the line frequency. Thus,
the raw current measurement interval of the
41408 is 10(8.3)ms at 50(60)Hz line frequency
and this measurement continues from the time
the 41408 is turned ON until it ig turned OFF,
These raw current measurement data are dig-
itally integrated and this result is output
to the I-C DISPLAY,
current measurement data selected for digital
integration (2% 256) is fixed by the INTEG
TIME select key on the front panel. The in-
tegration time of the 41408 РА Meter section
is the product of the number of raw current
measurement data selected for digital inte-
gration and the current measurement interval.
The 41408 has nine integration times as given
in Table 3-2 which are selected by measure-
ment range and unknown condition.
. ment interval
tion time,
tion time and the data output when FUNCTION
is set to I-V or Cy js described in
Table 3-2, Current Measurement
Integration Times.
Integration Time (ms )*
Range (A)
Short Medium Long
107% & 10719 20(16,7) 80(66.7) 320(266.7)
107 | 80(66.7) 320(266.7) | 1280(1066.7)
107° 1160(133. 3) 640(533.3) | 2560(2133.3)
*Note: at 50 (60)Hz Tine frequency.
3-20. When FUNCTION is set to I and I TRIG is
set to INT, digital integration is made using
raw Current measurement data already avail-
able when the I Trigger is received as shown
in Figure 3-5, Therefore, I! data Output is
completed as soon as the I Trigger is re-
ceived. The I Trigger interval requires only
10(8.3)ms which js the raw current measure-
and is not related to integra-
The relationship between integra-
para-
graph 3-47 or 3-53,
- 3-10
The number of the raw
Model 4:
iter
Note
When the I TRIG is set to EXT/MAN, —...
digital integration is made using
the raw current measurement data
after the trigger signal is re-
ceived, Therefore, ‘in this case,
the measurement time (from receiv-
ing the trigger signal to qutput-
ting current measurement data) 15
the sum of the intecration time and
na processing time {approximately
ms).
3-21. External Triggering.
3-22. The 4140B pA Meter section can be trig.
gered by an external trigger signal for cur.
rent measurement, To trigger the 474
externally, set 4140R front.panel controls :
follows:
The external triggering device should be cor
nected to EXT TRIGGER connector (BNC femal
type) on rear panel, ~The 47408 can be trig-
gered by a TTL level signal that changes from
HIGH (+5V) to LOW (OV). Trigger pulse wi.
must be greater than Jus. Triggering eu.
also be done by alternately shorting (or with
resistance Tower than 1002) and opening the
center conductor of the EXT TRIGGER connecto
to ground (chassis), -
Note
The center conductor of the EXT
TRIGGER connector is normally HIGH
(no input). |
Note
Triggering can be also done by
trigger command (GET) or remote
Program code "Е" via the HP-IR.
Refer to Figure 3-33.
1
Eo CN
TR x?
; y Re. TT
+: Fla = .
Н
| 41408
Section Ill
Paragraphs 3-23 to 3-26
A ANAANANAANAAAAAAAANANAANAAA
« vine 0— TUT UV UV VU UV VU VV VV VU VV UV NV
boyd
poy 3 .
Wea surement AT a
Current Ë |
И | |
° шо
] Data о TT >
utput Trigger i
° a y let Trigger {| 2nd Trigger Y ird Trigger
то Ce To лу A l
Previous Measurement Output Data
Di Display
ist Trigger Output Data
End Trigger Gutout Data
3rd Trigger Gutout Data
ty: Integration Time (refer to Table 3-2)
Ta: approximately 200ms
*: at the 50Hz jina frequency (B.3ms at the S0kz),
Figure 3-5. Integration Time and Data Output (When I TRIG 1s Set to INT).
3-23. Zero Offset for Current Measurement.
3-24, The 41408 has a zero offset function
which can be used to cancel the offset error
of an undesired input current (e.g. leakage
current of test leads/test fixtures) to mini-
mize measurement error, How to perform zero
offset is described in Figure 3-6. The cur-
rent measurement offset limit is 0 v JOOfA
and the zero offset function can be used oniy
at the 107%A range, If ZERO OFFSET key is
pushed when measurement range is other than
107*2A, this action is ignored. The zero
Offset value is set to OfA when the 41408 is
turned ON. When the ZERO offset key is
pushed, the value of the I-C DISPLAY adds to
Zero offset value.
Note
The zero offset can also be done by
remote program code "Z" via the
НР-1В.
3-25. рА Meter Operating Instructions (when
FUNCTION is set to I).
3-26. Instructions for operating the pA Meter
of the 4140B (when FUNCTION is set to I) are
given in Figure 3-6.
IT
| т TE - net"
i be Lid) 4 dd Mode 414
Figure 3-6
triaxial (male) - triaxial (male) cable
— To DUT
PROCEDURE:
(1) Turn 41408 OFF. |
(2) Connect test lead or test fixture (e.g
Figure 3-6,
3-12
. triaxial (male) - triaxial
(male) cable of 16053A Test Lead (HP Part No. : 16053-61002)) to INPUT
connector of 41408
(3) Turn 41408 ON. | ;
(4) At turn-on, Self Test о? 41408 145 performed automatically (refer to
paragraph 3-5),
Note
The 4140B requires a one hour warm up time to
satisfy all specifications listed in Table 1-1.
(5) The pA Meter section of 41408 is automatically set as follows:
FUNCTION oo eT
I RANGE ........ re etre AUTO
Lower Limit of AUTO Mode ............. 10-24
INTEG TIME Loire aan. LONG
FL ER i re cee ON
1 ОТКТ6 LLeca ace sa 000 wa casa au cena aa. INT
! ZERO OFFSET LL... aa sea aan ea aa. 0 fA
Confirm that the I.C Data Output Trigger lamp is flashing,
Select desired integration time with the INTEG TIME key on front panel
refer to paragraph 3-18)
)
)
) Connect nothing to test leads or to test fixture (open).
) 107°°A measurement range, set I-C DISPLAY to 0.00=107'*A
When using the
With ZERO offset key (refer to paragraph 3-23),
Note
The measured current at the 107!2A range is
à very small value (10 An 10715A), - There.
fore, any leakage current generated by
changing test lead connection, test fixture
Or unknown current source, increases the er-
ror of the measurement at the 107'%A range.
To avoid this condition, do a zero offset
after the I-C DISPLAY has settled (allow more
than five minutes),
PA Meter Section Operating Instructions (when FUNCTION is set to 1)(
sheet 1 of 2).
Section II!
Figure 3-6
i .
Eo
A
— pr
PE.
E "a
LE
i EF
d+
(10) Connect unknown current source to the test lead or test fixture.
Note
Specific information on DUT connection 1s
described in paragraph 3-61.
(11) The pA Meter of 47408 will automatically display measured value of un-
known.
Note
The display value of a measurement on the
107:2A range may be unstable immediately af-
ter connecting unknown current Source because
of the leakage currents described above,
Note
If the approximate value of the unknown cur-
rent source is known, the ranging time can be
eliminated from the measurement time by set-
ting the current measurement range to hoid on
the desired range by using the DOWN ( E) or
UP (©) keys. Measurement time can also be
reduced by setting the lower limit of AUTO
mode to prevent changing down to unnecessary
lower ranges.
Note
When the 41408 is turned ON, an internal
FILTER for rejecting ac noise is set to ON.
As shown in Table 1-2, when this FILTER is ON,
response time and ranging time are 60ms (for
50Hz line frequency) or 50ms (at the 60Hz)
longer than when the FILTER is OFF. 1o re-
duce response time and ranging time, turn the
FILTER OFF. When the FILTER is OFF, the LED
lamp of the selected INTEG TIME key will
flash,
The equivalent circuit of the pA Meter section in the 41408 is shown below:
08 (д) Нее | INPUT connector
Figure 3-6. pA Meter Section Operating Instructions -
(when FUNCTION is set to 1) (sheet 2 of 2).
y
DES eee aa 1
Section II!
Paragraphs 3-27 to 3-32
3-27, VS (VOLTAGE SOURCE) SECTION.
3-28, The VS section of the Mode! 41408 oper-
ates as two independent programmable voltage
sources: VA and Va, One of the programmable
DC voltage sources, Va , can operate, not
only as a programmable DC voltage source, but
also as a unique staircase {( , /4) or ac-
curate ramp (/ , /X) generator. In addi-
tion, accurate I-VY measurements, with the
staircase or ramp waves (the timing of either
of which can be automatically synchronized
between the pA Meter section and the DC Volt-
age Source section), can be done in the I-V
section. In the C-V function, accurate C-V
measurements using the ramp wave and calcu-
lating the capacitance from the current meas-
urement value and ramp rate (dV/dt), can be
done, Paragraphs 3-27 thru 3-42 describe in-
dependent operation as two programmable volt-
age sources, These paragraphs should be read
even if only an I-V or C-V measurement is to
be made. Instructions for I-V measurements
are given in paragraphs 3-43 thru 3-48. For
C-V measurements, paragraphs 3-49 thru 3-60
should be read,
3-29. VS Section Display.
3-30. A numeric display and thirteen indica-
tor lamps provide visual data outputs of out-
put voltages and operating parameters. The
VS DISPLAY provides a readout of output volt-
ages or operating parameters as a maximum 3-]
Mode?
/2 digit decimal number with decimal.”
If the input parameter value exceeds À‘
imum limit value, an overflow annunci--
(0-F) appears, If the 4140B is swept a
correct parameter settings, an illegal a.
ciation (ILLE) appears. Va, Vg lamps ir
cate voltage value if the VS DISPLAY is =
YB. Unit indicator lamps indicate uni
measured values. Vp OUTPUT lamp is 115
the VS section is operating. CURRENT |]
lamps indicate output current limit of.
YB. If output current goes to limit v
this lamp flashes. The display for the
section displays the following values in)
manner (to those described above):
Output Voltage ........... 0.00V vx100.0
Operating Parameters
START V/STOP V/ == (DC) . 0.00V v+10.0
STEP V LL a a ea a aa eee uen à 0.017V 0 10,00
HOLB TIME iver... 0.08 ~ 1588
STEP DELAY TIME ......... 0.005 100,
dV/dt (Ramp Rate) ... 0.001V/s ~1.00V
CURRENT LIMIT ....... 107%A, T073A, 107%
3-31. VS Section Output Modes.
3-32. The VS section of the 41408 provi
two voltage sources, YA {programmab’
Voltage Source/Function Generator) a
(programmable DC Voltage Source). Each
tne voltage sources provide output modes
given in Table 3-3,
Table 3-3, VS Section Output Modes.
VS Mode
Description
VA 7 Simple ramp wave. Output voltage changes continuously |
(dV/dt) from start voltage to stop voltage,
Double ramp wave. Output voltage changes continuously |
(dV/dt) from start voltage to stop voltage. Succes- |
AN sively, output voltage is returned to start voltage at
same ramp rate (dV/dt),
Singie staircase wave. Output voltage changes step- |
> by-step from start voltage to stop voltage.
Double staircase wave. Output voltage changes step-
by-step from start voltage to stop voltage. Succes-
i sively, output voltage is returned to start voltage by
same step voltage,
== | DC voltage is output.
OFF Va is not operating.
YB
== DC voltage is output,
OFF VB is not operating.
Lal (D tod
21 41408
a vs Section Operating Parameters.
а
| The VS section of the 41408 provides
Ai operating parameters as given in Table
Values of these parameters can be in-
out using the following procedure:
(1) Press desired PARAMETER key,
(2) Set desired value with DATA keys. VS
DISPLAY displays setting vaiue.
3) Input displays parameter value with
ENTER key. Displayed parameter value
is flashed.
“Note
Parameter values can be set via HP-
IB (refer toc paragraph 3-85).
Note
If setting parameter value exceeds
the setting limit listed in Table
3-4, VS DISPLAY displays ( MARS
and this value is not input,
Section III
Paragraphs 3-33 to 3-36
3-35. Voltage Output and Display of VS.
3-36, The 41408 VS section outputs a voltage
and provides for its display by one of the
following methods depending on the VS output
mode:
Note
When the V5 section is operating
(when V QUTPUT lamp is 1it), no con-
trols or operating parameters can be
changed as noted in Table 3-5,
(1) DC (==):
The Va DC voltage, whose value is set
with the Va (PARAMETER) key, 15 out-
put from the YA OUTPUT connector with
the SET (==) key, Output voltage
value is displayed on the VS DISPLAY.
YA can be cancelled and set to OV with
RESET (=) key.
Table 3-4. VS Section Operating Parameters,
Setting Limits
Parameter Description
VA = DC Voltage. 10Y range:
- -10,.00\ +10. 00V
START Y Start voltage of staircase or ramb wave,
100V range:
STOP Y Stop voltage of staircase or ramp wave, -100.0V% +100, OV
STEP y* Step voltage of staircase or ramp wave. ~10,00V v+10.00V
HOLD TIME Hold time for start and stop voltages of 0.0sv 19995
staircase or ramp waves
dv/ dt Ramp rate. 0.001V/s% 1.000V/s
STEP DELAY Delay time for each voltage of staircase 0.005 ^+ 100.05
TIME wave, | |
VR = DC Voltage. 10V range:
-10.00V ~+10.00V
100V range:
~100.0V ~ +100.0Y
* Step voltage of the ramp wave means displayed step voltage of VS DISPLAY.
(STEP V)/(dV/dt) must be more than 50ms.
Step voltage value automatically rises to 0.1V resolution when absolute
value of output voltage is over 10 voits.
Нана Hale ET
SOL L'IUii O 1LL
Table 3-5
(2) Staircase Wave (7, y):
The Va output voltage is swept with set
operating parameters (START Y, STOP Y,
STEP Y, HOLD TIME, and STEP DELAY TIME)
There are two sweep control methods:
auto sweep and manual sweep:
(5 Auto Sweep:
The Va output voltage is swept auto-
matically according to the set operat-
ing parameters when the AUTO START key
is pushed, the relation between out-
put voltage and its display is given
in Figures 3-7 and 3-8. The. YA output
sweep can be stopped halfway and the
operating parameters (except for START
V/STOP V and integration time) can be
changed. When the Va output sweep is
completed, Va is automatically set to
OV. The Va output sweep can be can-
ceiled and set to OV at the nalfway
point with the ABORT key.
O Manual Sweep:
The Va output voltage is set to manual
sweep mode with MAN key. — The Va cut-
put voltage is swept at {ts operating
parameters (except for HOLD TIME/ STEP
DELAY TIME) in this mode using Step
Down (E) ) and Step Up (©) keys.
Output voltage js displayed on VS DIS-
. PLAY,
Note
The MAN (PAUSE) key changes the
Sweep mode from auto (LED lamp is
not lit) to manual (LED Татр is
lit) or from manual to auto.
(3)
моает д),
Ramp Wave (7 , Xx): и
The Va output voltage is swept auto
ically at its operating parameter!
(START Y, STOP Y, STEP V, HOLD TIME a,
dV/dt) when the AUTO START key is Push.,
ed. The relationship between Output
voltage and its display is given +”
Figures 3-9 and 3-10. The Va outpy
sweep can be stopped halfway, at Which
time its operating parameters (excent’
for START V/STOP V) can be changed,
when the Vp output sweep is complete
YA is automatically set to OY. The ya:
output sweep can be cancelled and set
to UV at the halfway point with th
ABORT key,
Note
The YA output voltage can be set
to START V and initially held at
this voltage with the PAUSE Key.
After the desired "wait" time, VA
output sweep can be restarted.
Note
V5 DISPLAY will display vp output
voltage during the time that VS
section is outputting voltage (ex- —
cept when YA is set to OFF). But
when VB is set to ===, both Va and -
VB sources are outputting voltages
at the same time. vg output volt-
age can be monitored with VR
Key.
‘Table 3-5, Inhibition of Controls and Operating Parameters
(When VS Section is Operating).
Controls
Operating Parameters
VS Sween Mode con = E omamrv [mona воем [аист 97 Ко ok
| FUNCTION |INTEG. TIME | YA | VB | () ООО ТОС
AUTO, == (DO) X A X | Xx xXx x 1 x 1 x | x ! x | x | x
MANUAL (PAUSE)! x A x|x [1010 «x 0!0|0|0 0
O: Can be changed.
X: Can not be changed,
pressing SET (==).
(M: Can not be changed during ramp wave.
If the changed value is to be used after restarting, press PAUSE after
Section II!
Figures 3-7 and 3-8
em мне mr am ние = Боны не кн ен ны SS TRS RS ESS CE ESS ES ETS ES AN a il dt
met mere
pp — p——
Ë ad
ee o
poe 20.1 [ step ÓRLAy TIME Ди
RANGING TIME HOLG TIME
+ 8th
fem tt
STEP DELAY TIME
pt HH mmm ны pn ме ja ml eb RARE wt VR pu a wwe AH AAT Am mmm HR осеннее неф ниш иен ен = ет с eT pm mm ri AH Отн mmm erm a hi SHA пен ih me mas u
Sth
qth
— a 4. ен hE Мен A o НН
/ STEP DELAY TIME
RANGING TIME
тет тт pe MT AT ттт Aa али — bl A pr ed Al Am Tr НН аня тб НН
START у |-- A
e o) dE
AE
; TEP DELAY TIME
: HOLD TIMÉ
VS DISPLAY IStISTART VI| 2nd Ird 4th | 5th | 6th | 7th | Bth | 9th 10th 111thísTOP vi ov
Figure 3-7 Relationship between Output Voltage and Display Tor + {Single Staircase Wave).
avi tith
STOP Y jm — rm mm sow mom = = нони = mk mn be он on
ФО енто SSSR
TTT RANGING STEP HOLD
TIME DELAY TIME
TIME
E) нана он ны т оне нею те нет i Ls — e MT тн нет мен im Sm AMET
= 10 не — = À e pra ns a сны оне о Не ни ое у ее Мм и ен жене мнт тет не п TT
| 2 20th
STEP DELAY TIME
RANGING TIME
| ist 21th
START М |= + mn sr svn лена аще = лей HoT ты т же ее зн ни mL нь жет = нем == ен! ни ое нее i —
| ] Lane 7 |
| | ; | | ; ! tis}
| HOLD Notes ” сте HOLD | |
TIME ¡DELAY DELAY | TIME
TIME TIME
ist € 41516171819 | 13415161 7118 20, 21th
VS DISPLAY t ov
(START Vina) 370 len col eniebien OEA EnesTOPVA oll epleen TP Ен стает
A
Figure 3-8. Relationship between Output Voltage and Display for Fx (Double Staircase Wave).
2-17
| Section III
Figures 3-9 and 3-10
3
/ Va (Y) — HOLD TIME
| 9th
i STOR Vom om am mom soi ds a a io am ce te Se te ee ee мен нм не MH HE om Sa tm a a
i J
HE Bth
1
STEP Y
; ¥ 7th
;
$ bth
Е
5th
3 ls o omy оне te mr cs wn ne fre i on st те i a ен re me om av A о +
E. |
F 4th |
; |
| |
3rd I
|
|
end
|
_ 15% | f |
Ре | | 1
| i !
| \ | |
HOLD TIME |
=
^ |
VS DISPLAY + T ) nd rd Ath 5 È t 8th 9th
` 15 [START V3 2 3 th BEN 7th (STOR v 3 ov
Figure 3-8. Relationship between Output Voltage and Display for и (Single Ramp Wave).
|
vat „нон TIME
STOP Vo or roe om om mm sires a ome ôth - ° |
BA AN. 7th
k
STEP V
/ Po 46h Ве
© Мите НН ее ее ty He ны ны не ин но ные не mm pi, mm MH did mink dik mbm mem mr RE me A они TA Sk Wh mm re hii pee ig HA he mT dm AT mas mo To. Sit зы Ae ak
3rd а\ d 9th
: | |
в
| 2nd 10th | |
E |
|
È
Г. 15% Y | 11th | |
Ë START V —— + pe 1 dt — es = és mn ! ы dt À |
: ] }
J | y
E Nono TIME Nono TIME | tls) |
E | - i
3 | |
| f
= |
Y VS DISPLAY Ist START vi 2nd 3rd Sth BthiGthisToP VI 7th 8th 3th 10th 11 T£h(sTART | ov 5 |
| Figure 3-10. Relationship between Output Voltage and Display for /N. (Double Ramp Wave).
| 3-18
AN
> Output Voltage Range.
The YS section of the 41408 provides
A output voltage ranges: a x] range
ov ~ 10.00v at the C.01V step) and a x10
O e (0.0Y 1 100.0V in 0.1Y steps). Range
rans ing is done automatically by the follow-
na methods (depending on VS output mode):
(1) DC == (VA and VB):
output voltage range is individually
selected depending on the value of the
parameter (VA== or Vg ==). The xl
range is selected when Va == (Vg==) is
0.007 w 10.00V. The x10 range is se-
rected when Vp == (Vg ==) is -100.0V v
-10.1V or +10.1Y v +100.0Y.
(2) Staircase Wave (7 , Y:
Qutput voltage range changes automat-
ically from x1 range to x10 range or
from x10 range to x1 range at 10.00V,
1f STEP V is set to 0.01V resoiution,
step voltage value is raised automat-
ically to 0.1V resolution on x10 range,
Note
When output voltage range 1s
changed from x1 range to x10 range
or from x10 range to x! range, out-
out voltage > is always set to
+10.00V {or -10.00Y) as shown in
Figure 3-11, The ranging time
needed is approximately 20ms (refer
to Figures 3-7 and 3-8),
/
f
+ HL2WV y
a
e 10.00v | x 10 range
+8.95V “а
+ 6.0
x 1 range
STEP Y = 0.15
/ x 10 range
Figure 3-11. Output Voltage Range of
Staircase Wave.
Section 11!
Paragraphs 3-37 to 3-42
(3) Ramp Wave ( /, /\):
Output voltage range is selected de-
pending on parameter values (START V
and STOP Y), The xl range is selected
with absolute values of START V and
STOP Y un to 10 volts. The x10 range
is selected when absolute values of
START Y or STOP Y exceeds 10 volts.
3-39, Current Limit,
3-40. The VS section of the 41408 can be used
not only as ‘independentiy programmable DC
voltage sources/function generator, but also
as a function generator synchronized to the
pA Meter section for I-V/C-V measurements.
1-V/C-V measurements are generally used to
make characteristic measurements and analyses
of semiconductor devices (e.g. diodes, FET's,
etc.) or of electronic devices (e.g. capaci-
tors, pc boards, cables, etc.). Some of
these devices may be damaged by excessive
current. Each of the programmable DC voltage
sources (Va and VB) has a current limiter to
avoid damaging the DUT by excessive current.
The individual current limiters can be set
for the current limit value (107%A, 107°A or
1072A). If the output current goes to the
limit value, an LED lamp on the front panel
flashes and the voltage source (VA or VB)
at this maximum value.
of the VS DISPLAY is
outputs current only
Qutput voltage value
then invalid.
3-41, VS Section Operating Instructions,
3-42. Instructions for operating the VS sec-
tion of the 41408 (when FUNCTION is set to I)
are given in Figure 3-12.
Section II! Model 4)
Figure 3-12
BNC (maie) - BNC (male) cable
/ To DUT
PROCEDURE
(1) Turn 4140B OFF,
(2) Connect test leads or test fixture (e.g. BNC (male) - BNC (male) cables
of 16053A Test Lead (HP Parts No, : 16053-61003)) to V OUTPUT connectors
of 41408.
(3) Turn 41408 ON.
(4) At turn-on, Self Test of 47408 is performed automatically (refer to
paragraph 3-5).
Note
The 4140B requires a one hour warm up time to satisfy all
Specifications listed in Table 1-1.
(5) The VS section of 41408 is set automatically as follows:
FUNCTION wettest eee seers eee ear,
VA EE и
YB ncaorooraseorecraceveseon errar reee neaocoreraecoro OFF
PARAMETER sésss<s eu tee sa news 200000000002 El] parameters are 0
VA CURRENT LIMIT LA. Le Lea aa e ea eee a aa ea en aan aa A AE 10-*A
VB CURRENT LIMIT LA LL ae ea a es ere nee aa da a aa a aa LL. 107*A
(6) Select desired VA and VR output modes with VS Mode Select keys on front
panel (refer to paragraph 3-31).
(7) Input values for VA operating parameters depend on selected Va output
modes as follows (refer to paragraph 3- 33):
== VA,
rx 1 START Y, STOP V, STEP Y, HOLD TIME, STEP DELAY TIME.
JO SN START V, STOP V, STEP V, HOLD TIME, dV/dt.
(8) Input value for УВ === when VB will also be used.
(9)
Set current limit values for YA and YB with CURRENT LIMIT Select Keys
(refer to paragraph 3-39),
¿
Sa i
HTH,
Figure 3-12.
3-20
VS Section Operating Instructions (when FUNCTION is set to 1) (
sheet 1 of 2),
408 | Section III
Figure 3-12
(10) Start voltage output with following keys for each VA setting (refer to
paragraph 3-35):
pi pa ANA ELA BAENA EE PENE тненая BET dm
AUTO
| Swee a
HED SWEET tv inv ws rasa srr srasssrrnsssssrorssnrsnveson
Manual SWEED ....ororerroecaracoraconrearrernyr dead rete s UN оне
(11) During the time that VS section is outputting voltage, the Y OUTPUT lamp
is lit,
Note
VS DISPLAY will display YA output voltage during the time
that VS section is outputting voltage (exept when VA is set
to OFF). But when VB is set to== , both VA and VB sources
are outputting voltages at the same time. VB output voltage
can be monitored with VB = key. |
The equivalent circuit of the VS (Voltage Source) section in the 41408
is shown below: |
© va OUTPUT connector
€) vs OUTPUT connector
WARNING
100Y MAX MAY EXIST ON THE CENTER CONDUCTOR OF BNC (FEMALE)
CONNECTORS OF. Va AND Vg.
(12) If Va is set to Auto Sweep, VA and VB are automatically set to abort con-
dition (OV) when auto sweep is completed. When VA is set to Manual Sweep
or ==, VA and VR can be set to abort condition (OV) with ABORT (RESET
ey.
Note
VA auto sweep can be stopped at the halfway point with the
ABORT key. |
мы ОНО ОНИ
Figure 3-12. VS Section Operating Instructions {when FUNCTION is set to I) (sheet 2 of 2).
3-21
ETT
Ps ACEO NT TO JRC.
Section Il
Paragraphs 3-43 to 3-46
3-43, I-V MEASUREMENT
3-44. The Mode! 41408 can automatically syn-
chronize measurement timing between the pÂ
Meter section and the VS (Voltage Source)
section when the FUNCTION is set to I-V, Ac-
curate I-V measurements with the staircase
(7. AM) or ramp (/, A) waves can be
made by taking advantage of the variable
digital integration (moving average method)
which is described in paragraph 3-18. Opera-
tions of the I-V measurement are described in
paragraphs 3-43 thru 3-48, For basic opera-
tional instructions of the pA Meter section,
refer to paragraphs 3-12 thru 3-26 and for
the VS section refer to paragraphs 3-27 thru
3-42,
3-45. I-V Measurement Data Output.
3-46, Measurement timing is automatically
synchronized between the pA Meter section and
the VS section in I-V measurements to assure
that the measurement is taken at the correct
timing. The methods for taking raw current
measurement data for digital integration of
the ph Meter section changes dependent on the
output modes of the VS section as follows:
(1) Staircase wave ( +, A):
Digital integration (refer to paragraph
3-18) or each step measurement is done,
using the raw current measurement data,
after VA goes to its step voltage,
Therefore, the relationship between the
1-V measurement and its data output (to
the I+C DISPLAY and VS DISPLAY fora
staircase wave will be as shown in
Figures 3-13 and 3-14,
3-22
(2) Ramp wave (7 , /X):
Mode?
Note
When FUNCTION is changed to
1-V, the invalid data annun-
ciation (mews) is displayed
on the 1»C DISPLAY.
-
Output voltage of the ramp wave Change,
continuously at a specific ramp rail
(dv/dt) so that digital intecratd®
(for each voltage step) is done usin
the raw current measurement data befor
and after VA goes to its step vol tag
(in equal periods above and below th
step voltage as fixed by the integra
tion time). Therefore, the relationship
between the I-V measurement and ul
data output (to the I-C DISPLAY andy
DISPLAY) for a ramp wave will be a
shown in Figures 3-15 and 3-16. |
When raw current measurement |
data for digital integration TS
is short, an invalid data an-
nunciation (mes is dis-.
piayed on the I-C DISPLAY,
This annunciation always ap-
pears just after changing
FUNCTION or after a para-
meter(s) is changed, or at
the START Y. If the STEP Y ds
set to a small value when the
ramprate (dV/dt) is set to a
fast value and the integra-
tion time is set to LONG,
this annunciation also ap-
pears at several step voltage
just after START Y,
Note
= del 41408 Section 111
Eee Figures 3-13 and 3-14
val Y:
ТОРУ!
- a | RANGING STEP INTEG
STEP Y TIME TIME TIME
+ |
|
|
}
i
\ UNTEG TIME
| | |
|
61) | 'STEP DELAY TIME
3rd
- (5 ha Ap min mn PE ver
tst | :
START У [7 qu |
har Lo ] Fa i tís)
HOLO SES Y RANGIRG — [INTES
TIME —. OELAY ; TIME | TIME
TIME
PC DISPLAY | tst | 2nd | are | АТА hth | Sin f 7th | &th | Gth 10th
+ i 1 ; —_—
| | |
| | |
Le vs DISPLAY stistars 7 2nd | 3rd ¿th | 5th bth 7th 8th | ath |10thisToP VI
Figure 3-13. Relationship between 1-V Measurement and Displays for ~~ (Single Staircase Wave).
START Y be one me mm mm on rm mn SEE
410 de — — ny — нее ен ное = i me НН НН pe
ве РС
ETT RANGING STEP HOLD INTEG
STEP Y TIME DELAY TIME TIME
у 7th 14th
— ен — US 3
UNTEG TIME
fin \sre DELAY TIME 15th
end
mu hd Le ge QE os eee te sm Sh то
- ist! | |
START Y =p e et orm are me wm i e UU LT AA NN TN TT
{
TT CET Ls)
TERS STE INT £6 | HOLD
HOLD STEP, RANGIN CINTES DELAY TIME | TIME
TIME DELAY TIME | TIME TIME |
me TT |
< i 3 A | - |.
Pe DISPLAY 1st Fand 3rd | 4th | 5th | = 7tht 8th E 10th | 11th 1:2th 13th 14th 15thit6thit7chj 1Bth [roth 20th
i |
|| —
VS DISPLAY 15% | гов Ira! 4th Sth | Beh! 7thl 8th | 9th 10th | 11th hyoth 13th 14% 15th 36th 17th 18h Hoth 20th vi
| ISTART Vi “ | ESTOP VIÍESTOP VI | STAR A
(is
Figure 3-14. Relationship between I-V Measurement and Displays for my (Double Staircase Wave).
3-23
TA
FER Te
Model a,
Figures 3-15 and 3-16
STOR Y qee me — me e À ce te mr q a ma ns a re mr ; HOLD TIME
vatvi | -
o PTE TETE SES mm rm mm ни о i o ma re
INTEG TIME + Ax
| | - 4
START Y hd (= dt - |
~~ Do Al
} i res
| | tís)
| HOLD TIME | |
16 DISPLAY CARA — | ist | and | 3rd | ath | se 6th '
— T |
VS DISPLAY START у ist | 2nd | 3rd | 4th Sth | 6th A
Figure 3-15, Relationship between I-V Measurement and Displays for / (Single Ramp Wave),
Vaiv) Hoo TIME :
STOP Y fe—— e еее не нее o ee ed | |
ee Bn 5th
STEP Y |
o 3rd 6th
|
© [ре те Mn Mn a re a ae nn TINT a неее e — me ms
dy dy
Znd th
ist 8th
< INTEG TIME + Y
START Y ham | pe ——t — ee e —— -
Hs |
—— | т
ме |
| HOLD TIME | ного rime ES)
NC DISPLAY AE fan | Ist | 2nd | 3rd 4th | sen | 6th | 7th | ath
— 7
|
__ | | | .
VS DISPLAY | START у | ist | 2nd 3rd 4th | Sth | 6th 7th 8th
Figure 3-16,
Relationship between I-V Measurement and Displays for /X (Double Ramp Wave)
3-24
E 0B Section III
3 de! 48 Paragraphs 3-47 and 3-48
Te ry Measurement Operating Instructions.
om i |
ting instructions for taking an !-
48. 0pere ave given in Figure 3-17.
1 3 Y gpasuremen
16055A Test Fixture
Г
16053A
Test Leads
O O
| rm e
PROCEDURE:
(1) Turn 4140B OFF.
(2) Connect 16055A Test Fixture to I INPUT and Y OUTPUT connectors of the
41408 with 16053A Test Leacs.
Figure 3-17. 1-V Function Operating Instructions (sheet 1 of 4).
3-25
EAT
Section III Model cu
Figure 3-17
16055A Test Fixture
The 16055A can be used for stable pA current measurements of general de-
vices with the electrostatic/light-shielded hood. DUT can be connected
easily with alligator-clips or with the T0O-5 type sockets which are
furnished accessories of the 160554 (refer to Table 1-4 for photos and
part numbers of accessories).
LOW lead connection of pA Meter section in the 4140B is selected with
16055A LOW LEAD CONNECTION select switch as follows:
o YA , VB |
LOW HIGH
e GND :
LOW HIGH YA or VB
CAUTION
FOR SAFETY, THE 16055A SETS
VOLTAGE SOURCES (Vp, Ув AND
EXTERNAL) TO OFF BY A MICRO-
SWITCH WHEN THE HOOD IS
OPENED (AS ILLUSTRATED IN
FIGURE AT RIGHT). MICRO- |
SWITCH CONTACTS ARE LOW RE- |
SISTANCE CONTACTS. HOWEVER,
THIS RESISTANCE INCREASES
!
OFF
ON
O
WITH TIME, TO CLEAN CON-
TACT, DRIVE A CURRENT OF
0.1 TO TA THROUGH CONTACT, VA
OPEN AND CLOSE CONTACTS
ONCE OR TWICE. THE HEAT AND
ARCING WILL CLEAN CONTACTS.
Üben} Y/Y
Va oot og Va
EXT BIAS of oO EXT BIAS
INPUT OUPUT
A WARNING
DO NOT USE 160554 WITH HP MODEL 16054A CONNECTION SELECTOR.
A HAZARDOUS VOLTAGE MAY EXIST ON LOW LEAD TERMINAL EVEN IF
160554 LON LEAD CONNECTION SELECT SWITCH IS SET TO GND POSI-
rte E rn te EERE TREN
y NET ОтЕ E
т a arar ENEE Er. pr dun
A TA E y Ч
Ш.
; Fe
TE
! Е
12
M. 2
HEE.
rE
а
if
E
Е
TION WHEN 16054A LOW LEAD SELECT SWITCH IS SET TO YA OR YB
| POSITION, _ _ I —
Figure 3-17. I-V Function Operating Instructions (sheet 2 of 4).
3-26
‘mes
| 41408 Section II!
Figure 3-17
(3) Turn 41408 ÓN.
(4) At turn-on, Self Test of 41408 15 performed automatically (refer to
paragraph 3-5).
Note
The 41408 requires a one hour warm up time to satisfy all
specifications listed in Table 1-1.
(5) The 41405 is automatically set as follows:
FUNCTION LL 20000 00e anne se see 010000 .. 1
Ÿ RANGE 2.111240 0000000 nec caen ca 0005 AUTO
Lower Limit of AUTO Mode ...……….……... 10-24
INTEG TIME 2.200000 000000000000 0000000 INT
FILTER LL cc ana ana u a aa a 000000001000 000 ON
I TRIG Le 110000 na 000 sen 000000000000 INT
TE EN и
VB enorcoorcoreranreroocano reset TNT OFF
PARAMETER ...oorocacnone all parameters are O
I ZERO QFESET Le... 50000000 00000 reas О fA
C ZERO OFFSET ........... eeaneroconareo. 0 of
VA CURRENT LIMIT ....eeereceoreccerves 107 *A
VB CURRENT LIMIT ‚0.000000 00 ann nennen 107%A
(6) Confirm that the I-C Data Output Trigger lamp is flashing.
(7) Select desired integration time with the INTEG TIME keys on front panel
(refer to paragraph 3-18).
(8) Connect nothing to 16055A (Open).
(9) When using the 107°“A measurement range, set 1-C DISPLAY to 0.00 x 107*%A
with ZERO offset key (refer to paragraph 3-23).
(10) Set FUNCTION to I-V.
(11) Select desired current measurement range with I RANGE keys (refer to
paragraph 3-16),
(12) Select desired VA and VB output modes with VS Mode Select keys on front
panel (refer to paragraph 3-31). -
(13) Input values for VA operating parameters depending on selected VA output
mode as follows (refer to paragraph 3-33):
и и: START Y, STOP Y, STEP V, HOLD TIME, STEP DELAY TIME.
/ ‚ /N: START Y, STOP Y, STEP V, HOLD TIME, dv/dt.
(14) Input value for VB = (when VB is also to be used).
(15) Select current limit values of YA and YB with CURRENT LIMIT Select Keys
keys (refer to paragraph 3-39). |
(16) Select Low lead connection of PA Meter-section in the ATACA with 160554
LOW LEAD CONNECTION Select switch depending on kind of measurement.
Figure 3-17. I-V Function Operating Instructions (sheet 3 of 4).
—
3-27
SeCITON 111 Mode] -
Figure 3-17
(17) Connect DUT to 16055A with alligator clips or TO-5 socket depending on
kind of measurement.
(18) Start C-V measurement with following keys for each VA setting (refer to
fer to paragraph 3-35):
stanr
Auto Sweep .......... С)
Manual Sweep ........ ©
Connections for typical applicatons for I-V measurements are given below:
1. I-V Characteristic Measurement of FET:
| Lu a
"7 |
| +
2. Breakdown voltage Measurement of Diode:
“.
3. Threshold Voltage Measurement of FET:
Note
Specific information on DUT connection is
described. in paragraph 3-61,
Figure 3-17. I-V Function Operating Instructions (sheet 4 of 4).
3-28
MEASUREMENT.
тре Mode! 21408 can automaticaily syn-
measurement timing between the pA
section and the VS (Voltage Source)
E ES make Quasi-Static C-V character-
asurements when the FUNCTION 1s set
- accurate C-V measurements, using the
CBR Gee ram (/ , /\) waves and the high
E bil with its 107*°A max. TYe-
pei PA ES hade by taking advantage of
uments' variable digital integration
average method) described in para-
The capacitance value is caicu-
Fated from the following formula:
IRL oi
pe
I
_ I (measured current value)
C7 “dv/dt (ramp rate)
Ÿ c-y measurement operations are described in
a paragraphs 3-49 thru 3-60. For basic oper-
BE ational instructions of the pA Meter section,
"|: refer to paragraphs 3-12 thru 3-26 and for
#3 operation of the VS section refer to para-
a grephs 3-27 thru 3-42,
51, C-V Measurement Data Output
Е 3-52. Timing in C-V measurements is automati-
M cally synchronized between the pA Meter
E and the accurate ramp wave (J , A) by
© the VS section to assure that the measure-
ments are taken at the correct times. Output
voltage of the ramp wave changes continuously
et a specific ramp rate (dV/dt) so that dig-
ital integration (for each voltage step) 15
done using the raw current measurement data
before and after Va goes to its step voltage
(in equal periods above and below the step
voltage as fixed by the integration time).
Therefore, the relationship between the C-V
measurement and its data output (to the I-C
DISPLAY and VS DISPLAY) will be as shown in
Figures 3-18 and 3-19. |
Note
When the raw current measurement data
for digital integration is short, an
invalid data annunciation ( roms
ts displayed on the I-C DISPLAY.
nis annunciation always appears Just
after changing FUNCTION, after a pa-
rameter(s) is changed, or at the
START Y, If the STEP Y 1$ set to à
small value when the ramp rate (dV/dt)
is set to a fast value and the inte-
‘gration time is set to LONG, this an-
“nunciation also appears at several
| Section III
Paragraphs 3-49 to 3-54
+
step voltages just after START V. In
a C-V measurement, lesser significant
digit data of the calculated capaci-
tance is displayed when the number of
significant digits for the current
measurement data is less than the
total digits of the calculated capac-
itance, (refer to Figure 3-20). In an
IC DISPLAY, the lesser significant
digit data 15 represented by a small
zero figure (m ) to differentiate 11
from the more significant digit which
is represented by a large zero (IM)
as shown in Figure 3-4.
3-53, C-V Measurement Range
3-54, For a C-V measurement, the 41404 pro-
vides two measurement ranges, 0.0pFv199.9pF
in 0.1pF steps and 200pF~1999pF in Ipr steps.
Range changing is done automatically. In ad-
dition, a current measurement range, which 1s
an actual measurement range, is provided as
in Tor I-V measurements (refer to paragraph
3-16), IF the I-C DISPLAY count is over 1999
counts when the current measurement range is
held, the I-C DISPLAY displays an ETA
annunciation as in I or I-V measurements. If
the calculated capacitance value is over 1997
nF, the I-C DISPLAY displays an (
annunciation. If the calculated capacitance
value in percent is over 199.9% when the 1-C
DISPLAY js set to percent display, the IC
DISPLAY displays an ( PRIMES ) annunciation.
The relationship between tne calculated ca-
pacitance value and current measurement
ranges are shown in Figure 3-20. To make C-Y
measurements on the most suitable current
measurement range, use the following proce-
dures:
(1) Set the 41408 for C-V measurement (re-
fer to Figure 3-23).
(2) Set FUNCTION to I-V.
(3) At this time, the 41408 panel control
functions are automatically. set as
follows (refer to paragraph 3-8):
VA cena sans au 000000 Pa
(4) Set I RANGE to AUTO.
(5) Select desired vp output mode with VA
Mode Select key.
(6) Make an I-V measurement.
(7) Set current measurement range to maxi-
mum range for an IV measurement.
3-29
asian
Section III |
Figures 3-18 and 3-19
Vaiy}
STOR V - HOLD TIME
EEE deb Za wt Sn
dos Cul ie cr fH Ce ri NH PEJE ARA Г
Ex a a Ak i
Cee - A aaa a AER ATTE АН
rt]
AEE CACTI
START Y
E |
rm
LT
—r
=
HOLD TIME
IC DISPLAY RER UE se | 20d | 3rd | 4th | Sth | 6th
VS DISPLAY START V 15% 2nd 3rd 4th 5th 6th
| — ©
Figure 3-18. Relationship between C-V Measurement and Displays for 7 (Single Ramp Wave). |
|
УАСМ }
"неко ТЕМЕ Ë
STOP у eee eee ee ee a a an |
Y Sth |
STEP V |
| _— 3rd Sth
O fp —— ———]—— Ml A Nm a a
dy «dd TT
2nd 7th
ist êth |
<! INTEG TIME + QQ
START V fem < dt ml — las de \ . |
EE a. Cd dl
o i ну |
| HOLD TIME | | Tis)
E. HOLD TIME
INVALID |
IC DISPLAY DATA Y }. 4 15$ 2nd 3rd Ath 5h 6th Tth Sth
VS DISPLAY START V ist ¿nd 3rd dth - Sth Sth 7th | Ben ;
Figure 3-19. Relationship between C-V Measurement and Displays for /\ (Double Ramp Wave).
3-30
Section III
Figure 3-20
| RANGE : IDA
999
152% +
кю А 1000
коб
a [07%
200
= 3 HO PA
x КО ЗА 100.0
5 ` 5 x 10"PA
v o о’ЗА nn
DOG | u 0.0
0.010 x 1679
x 1079
LO
0.001 x 107%
0. 0.4 ;
0.00: GO. o. | 0.004 0.01 0.1 |
dv/dt (v/s) dv/dt {V/s)
1 RANGE: (CA ORANGE : ISA
199% - 1999
ala
1000
200
1000
- 1399 x EA
x KA >
10.0
1899 x 101
. E =i
- CUED x IC À ia
1.0
x SOTA 0.100 x 107%
0.
2.0! 0.01 Di
0.001 x FOTA O00! x 107% 0.010 x 10774
dv/dt (Y/s)] dv/àt {V/s}
(Note 1) Accuracies are specified in shaded areas only.
(Note 2) Numerics in each area mean digits of capacitance (current).
|
Figure 3-20. Relationship between Calculated Capacitance Value and Current Measurement Range.
3-31
BYTE TERI
Лиепая а
WE 0,
Paragraphs 3-55 and 3-56
(8) Set FUNCTION to C-V,
(9) At this time, the 41408 panel contro]
functions are automatically set as
follows (refer to paragraph 3-8):
C measurement
unit indicator «eo. DF
(10) If calculated capacitance value is to
be displayed in percent, set displayed
value of IC DISPLAY to percent change
with Percent key,
(11) Select desired Va output mode with Va
Mode Select Key.
(12) Start C-V measurement with AUTO START
key,
Note
These procedures are the most effec-
tive methods for setting up the most
suitable current measurement range
for C-V measurement, However, this
method may take a relatively long
time when the ramp rate (dY/dt) is
set to a slow value. IF the approxi-
- mate capacitance value of the DUT is
Known, . the most suitable current
range for a C-V measurement can be
selected by using Figure 3-21.
The accuracy of the 41408 C-V measurement is
determined by the accuracy of the bA Meter
current measurement and of the ramp rate
(dV/dt} accuracy of the ramp wave (from the
above equation). Calculated accuracies for
C-V measurements are given in Table 3-6 and
Figure 3-22. as reference data (not as speci-
fications).
3-55. C-V Measurement Zero Offset
3-56. In a C-V measurement, the 41408 has a
zero offset function for capacitance which is
independent of the zero offset function for a
Current measurement (refer to paragraph 3-23),
To minimize measurement error, the zero off-
set for C-V measurement can be used to cancel
the offset error caused by stray capacitance
in the test leads/test fixture, the method
for doing a zero offset is described in Fig-
ure 3-23, Offset limit for a C-V measurement
is 0.0 v 100.0pF. The zero offset value is
set to OpF when the 41408 is turned to ON.
When the ZERO offset key is pushed, the value
of the I.C DISPLAY adds to the zero offset
value.
3-32
MOAR 4
1399
1GQO
100.0
C (pF}
0.091 00 Gi
dv/dt (V/s)
TTT AM Wr Tas sa,
Figure 3-21. Suitable Current Measurement
Ranges for C-V Measurements.
Note
A zero offset can also be done by
remote program code "Z" via the HP-IB.
Fp ra erm
rares = pri Te
. = æ
ER rT mp
Section 111
Paragraphs 3-57 to 3-60
Table 3-6. C-V Measurement Accuracy.
“atout | Capacitance Current dv/dt (V/s)
Voltage |Measurement Measurement
range (V)|Range (PF) | Range (A) | 0.001» 0,01 | 0,01 v0.1 0.1 ~ 1
| 107° TT +((2.2+ 2003)
ое ann m CT AV dr dVídi
1 er 0.001 0.3
100.0 19 pa (052 + Tai J Na
-12 0.001 0.08
+ 10 10 + ((5.2 + 35747 + a >
ре T4, 0.001 2
10 | = и UOTE TE ST
~10 pa 0.001 +, 0.2
| 1000 10 Pra | (22 +57 Hava
+: 9,001,,8.23_
10 E (5.2437 70) dv/ct) |
—12 ; 0.001 +, 0.008
1 0 E((5.2+ dV/dt + Avid: UU —
10 TT 0.008 2
10 Cee T £2.24 yar Va
—
| —11 — | … … 0.008 0.3
100.0 10 т = (C52 +70)" avian)
+ 100 | «=
—12 ‚ 0.008 .… 0.08
10 ECOSZ va + avíar >
-9 TT ena, D008. 2
10 TT HOT + VÍA
~10 Вора 1002.24 2008 + 02
~11 0.008 0.03
10 £((52 +7) WET
3 2 | 0.008 +, 0.008
10 (524-737 7* Vía es
Note 1. =(% of reading + counts) at 23 C:
be specified oniy
Leakage current through resistance ©
Note 2.
Note 3.
Accuracies can
additional error.
3-57, C-V Measurement in Percent
3-58.
be displayed as
reference capacitance value).
The C-V measurement of the 41405
in percent is 0.0%2189.9% in 0.1% steps.
15 the capacitance of
construction.
> LUC Percent change VS Cox 15
most suitable display method for normalizing
the
and analyzing C-V characteristics of MIS con-
struction.
IpF steps,
Note
The Setting limit for Cox is 0.1
prn189,0pF in 0.1pF steps and 190pF~1800pF in
The Cox value can be set via the
HP-18 (refer to paragraph 3-85).
3-60.
5°C, < 70% humidity.
in shaded areas of Figure 3-20.
€ DUT and
test leads contributes
Note
setting of Cox value exceeds the
can If
percent change YS Cox {the setting limit described above, the V5
Display range DISPLAY displays an annunciation
Cox ( VENEME ) and the Cox value selected
an oxide film of MIS is not input.
Operating instructions
3.59. C-V Measurement Operating Instructions.
for a C-Y mea-
surement are given in Figure 3-23.
3-33
Ep
Arg
Section Ill
Figure 3-22
Y y: -iaV - +10v
С: 8.8pF - 159.907
Ро: 18-1808
358
320
258
©
©
C200
5
O
©
158
|
Ll
188
se Froid bb
+
2 ||!
091 81 .i 1
dYV/7dtY/s)
Vo: «2Y ~ +18V V : —igy ~ +18V
it a 4 Abit |
C: 8.0pF ~ 198.8pF TT 1358 С: 8.2pF - 183.8pF ZZ 1388
I «+ 187itA 2 1 : 1g-t2 Rr m— й
350 350
308 308
258 250
в »
+
£208 5280
S > \
= = N
“sg 158 <
ba e
Li u uN 4
108 21 122 x fr
> N Ni
a PT Free
sa He se .
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e = 8
281 „Bi „1 1 ‚Ri ‚Bi „4 4
dV/dt(V/s) dV/dt (Vrs)
\ -
; - 1
0. ag) a Marks men IGN
es mas mn tamer
ir
Da er
GE
EA
TERA
E
e RTE
= Ч
LP co lin я
CEE TE
PR TENA
io hrf Li
FTP
Fil
AC e PTA Ee
paar
- Eh MBA Fran 3
a a AE
Figure 3-22.
(-V Measurement
Accuracy (Sheet 1 of 4).
Frias
E 408 | Section II!
ASA 4 Figure 3-22
| — +18V : —18V - +10V
200pF - 1999pF me
: 1918 ————
ня (1 <
c : 288pF - 1895pF zz!
1 1978 AR ос
258
358
326
380
258
258
| A
EL 5 po
x ¢ 280 5 206
В — a 2
pir. o Ls
T Er | ö
e с { 158
Ш е 138 с
ыы Ll ta
E | 198 188
e 50
E
‚ei .
dYV7dt(V7s) dV/dt(Y7s)
Y : -1BV — +18Y Yo; -i2V - +18Y ag
Co: 200pF - 18SSpr ZZ 1888 Co: 28BpF = 1995pF —— 1888
I: 18711 A 206 { : 1867182 A ` 208
358 358 ‘
398 398.
258 258 `
7 #
€ €
288 © 208
9 6
о (J
fe L
0158 © sa
ha L
ui Li
188 108
50 sa
a 2
- 28! Gi .1 i ‚ 88! ‚а: al :
dv7dt(Y7=) dV/dt(V/s5)
NE LL
Figure 3-22. C-V Measurement Accuracy (Sheet 2 of 4).
2.75
Mode) 4,48
Ed
ti A ol
L
К Ы =o
ESE
e rE abr
Ня LEAN ‘
a
-160У — +100V
Vo:
Cor
los
350
388 .
250
+
206
VU
se
{ad
188
2.8pF - $98. 8pF
18-18 д
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o
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258
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s+unan
50
wl
40447
180
a
.i
dV/dt Vs)
Bi
„Bei
— Pr re,
4).
«CV Measurement Äccuracy (Sheet 3 of
Figure 3-22.
3-36
1
: La ee TTA ar ON -
1
AT ET ER a
OT SI TRA ER I
en RE PRA te Hr a pe er
ETE pe bg me bh MU
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FEEL O CR TR EE)
ATE, TT
a EE cir car Fri Вт теле pal FETE
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LÉ La PTE an, ee.
al ET or TE ERA PERRET EE el] LA PRICE
Déni aa
amo pe
COTE MEA
Tas emma 7 Ai
mode | 41408
Section II
Figure 3-22
TH — +100
; 200pF — 1SSSpF
183 A
a С} <
я
+
350
307
258
8
Error Counts
—
in
o
198
58
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dvrdti VY/s)
881 01
Error Counts
358
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258
: —-188Y — +!98V
{ СВерР О —
: 19-18 В
199SpF
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=
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o
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se
‚ 221 Bi ,
dV/dt{V/s)
it
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£40
1 1
: —<1BBV - +180V
: 200pF - 19599pF
: 19711 A
\
с
1
308
258
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=
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Error Counts
in
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188
sa
i
. 29: Lal .
dAV/dt{V/s}
Figure 3-22.
Vy : =:20Y - +108Y
C : ZBBpF — 188%pF
то: 18126
358
528
238
Errar Counts
188
|
C-V Measurement
Accuracy (Sheet 4 of 4).
Bi | .
dVv7dtiv/s)
A
—
PATA A PPh
PURA
IT
(63416
0
1 i
Section II!
Figure 3-23
16055A Test Fixture
A
| 1605 3A
Test Leads
O O =
PROCEDURE :
(1) Turn 41408 OFF.
(2) Connect 16055A Test Fixture to I INPUT and Y OUTPUT connectors of the
41408 with 16053A Test Lead.
(3) Turn 41408 ON. ï
(4) Self Test is performed automatically (refer to paragraph 3-5), Ш
| | E
|
Note
The 41408 requires a one hour warm up time to sat- |
isfy all specifications listed in Table 1-1.
(5) The 41408 is set automatically as follows: |
FUNCTION ....ooocorercocrorreceoo areas I
I RANGE ....eeccoreorcorirerrereccerea AUTO
Lower Limit of AUTO Mode .....eoeoero 10 742A
INTEG TIME Le cs ares cena anse scene 0000 INT |
FILTER ..e.cescosroare Lena nanas 000060010000 ON |
IT TRIG vevevnvnonsosnennnnensscesssssons INT
VA e enasecsrdarerarceroarezervoro were a... { : |
VB eorooracorococarocacronorrrirorenvero OFF
PARAMETER ...cenasocrnooo all parameters are O
1 ZERO OFFSET 2, ae 0 sa 006000000000 00000 OfA
C ZERO OFESET ...e.eeoreereoroccarreceno OpF
VA CURRENT LIMIT D... 00000 eus 0000500000 10-*A
VB CURRENT LIMIT LL. 0e sus 0eme 0000000000 107*A
(6) Confirm that the I.C Data Output Trigger lamp 15 flashing.
Figure 3-23. C-V Function Operating Instructions (sheet 1 of 3).
3-38 |
i -.
! ай
т. To
Tan
. el
. hora г.
:
LT Я por!
о 1 A]
. a re
у a
5:
fi:
- ВИ
Dr.
LI +
TOE
A rr
Br
. = De
st:
TT
I
fo,
ES
: =.
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: ERE
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1 Ei
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i К
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i
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ol
: E
Section Ill
Figure 3-23
7) Select desired current measurement range with I RANGE keys (refer to par-
agraph 3-53).
(8) Select desired integration time with the INTEG TIME keys (refer to para-
graph 3-18).
(9) Set FUNCTION to C-V.
(10) VA output mode is automatically set to / .
(11) Select desired VA and VB output modes with VS Mode Select keys (refer to
paragraph 3-31).
(12) Input values for VA operating parameters (START V, STOP V, STEP V, HOLD
TIME and dV/dt) (refer to paragraph 3-33).
(13) When calculated capacitance value is to be displayed in percent, input
value for Cox (refer to paragraph 3-57).
(14) If VB is to be used, input value for VB ==.
(15) Select current limit values of Va and Vg with CURRENT LIMIT Select keys
(refer to paragraph 3-39). |
(16) Select Tow lead connection of pA Meter section in the 41408 with 160554
LOW LEAD CONNECTION Select switch (depending on kind of measurement).
(17) Connect nothing to 16055A (Open).
(18) Start C-V measurement with AUTO START key on front panel.
(19) Set I-C DISPLAY to O0.0pF with ZERO offset key (refer to paragraph 3-55).
Note
Any residual capacitance which exists on test
leads or test fixture increases the error of the
C-V measurement. To avoid this condition, do a
ZERO offset under the same conditions as for an
actual measurement.
(20) When calculated capacitance value 1s to be displayed in percent, set
displayed value of I-C DISPLAY to percent change with percent Key.
(21) Connect DUT to 16055A with alligator clips or TO-5 socket depending on
kind of measurement. | |
(22) Start C-V measurement with AUTO START key.
Figure 3-23. C-V Function Operating Instructions (sheet 2 of 3).
3-39
Figure 3-23
Connection for Quasi-Static C-V characteristic measurement
MOS Diode:
VA
A
!
are given below:
Note
Specific information on DUT connection is
described in paragraph 3-61,
Figure 3-23. C-V Function Operating Instructions (sheet 3 of 3).
чоде! 41408
Bl.
2.02.
| e the following features
rent measur
(1)
OUT CONNECTION.
nh Meter/DC Voltage Source
tnat make pA cur-
ements reliable and efficient.
The 41408
integration times suitable to the cur-
rent measurement range and UNKNOWN con-
ditions can be selected via front panel
controls or RP-IB programming.
AC noise can be reduced by digital in-
tegration (moving average technique)
using the even raw current measurement
data synchronized with the line fre-
quency.
AC noise can also be reduced by the in-
ternal filter circuit.
The 16055A Test Fixture, with electro-
static/light-shielded hood, is provided
for measuring general devices.
age current ¿£ and external
Section Il!
Paragraphs 3-61 and 3-62
however, to realize stable low-current meas-
urements at TOA down to 107224, care must
be observed in DUT connection to minimize the
effects of leakage current in the measurement
systsem, external noise, light, etc. Figure
3-24 shows measurement errors caused by leak-
noisedn. The
errors can be reduced by employing a LOW-
guard method where the HIGH terminal (the
center conductor of the I INPUT connector) of
the pA meter 1s guarded by the LOW terminal
(the inner braid of the I INPUT connector) as
shown in Figure 3-25. The effects of exter-
nally generated noise and light can also be
reduced by measuring the DUT in the electro-
static/light-shielded box. Figure 3-26 shows
the connection methods using the 16053A +
16055А, 16053A + shielded box, 16053A +
16054A + shielded box. When using the 16053A
+ 16055A, shielding is accomplished using the
hood of the 16055A. Also, LON lead connec-
tion can be changed easily via “the LOW LEAD
CONNECTION switch on the 16055A, refer to
Figure 3-17. Figure 3-27 shows a typical DUT
connection using the 16053A + 16054A +
shielded box. Note the position of the LOW
LEAD CONNECTION switch on the 16054A. The
dotted lines show the connection method when
the 16054A is not used.
1H L L H
DUT-+—4 — O) O —— DIT —,
LT TTT L |
A + An £ ni y |
VA or VB X : y Ls Va or VB n | | y ik
En | En |
+ T A md T +
Figure 3-24, Effects of Leakage Current and External Noise. |
HAL LNH L,
DUT (A) (a) DUT
Lf + | AN
YA or vp or = (À YA or VB JT de m
© en En
Figure 3-25. Effects of the LOW-Guard Method.
3.41
a ee eer 0 .. o a. Sm mmm ae aa TA ATT TAR Fe « и TT
; i 1 1 ; ' DRE - melo
.. RE (8
cele TES en gh rd Pare
Shielded Rox
_ =
o f
‚=
e нина
|
!
E
1 4 } 1
Ï
OF
HIGH |
(3) 160534 + 160544 + Shielded Box
Figure 3.26, DUT Connections with Fach Accessory,
|
|
»
o
N mM
a =
© Ni ©
© = 2
: &
i
1
(2) 16053A + Shielded Вох
(1) 160534 + 160554
SELL ELE LL
Figure 3-26
3-42
I mA
pin aaa
(a
Section 111
Figure 3-27
a) ungrounded DUT Measurement
rement Example: High resistance
nes surement of the insulating materials,
condensers, etc.
connection:
Wiring:
|
16053 À Ц
a
AL an
| 66) Va
| | __
| =
ane Ч e
Smeided Box
TE пллыатет иене
(b) Grounded DUT Measurement
Measurement Example: Breakdown voltage
measurement of diode, Quasi- Static C-V
characteristics measurement of MOS diode»
etc.
Connection:
YA or VB
Shielded Box
Lo rrr rrr, mr ré A
Figure 3-27, DUT Connection Examples (sheet 1 of 2).
3-43
Paragraphs 3-63 and 3-64 ug
3-63. DUT Connection Using the Wafer Probe :
(с) Three Terminal DUT Measurement ;
3-64. The following rules must be cbse 1
Measurement Example: I-V characteris- when making pA measurements on wafers at GF
tics or threshold voltage measurement of brober station with the 47408, E
an FET. | is
| (1) The entire prober station should BE =~
Connection:
housed a shielded box (made fron TE Ш
plate, etc.) and the outer braids fof
| | the 41408 (both I INPUT and Y OUTPU |
HA should be connected to the shielded s4# |
«a |
UV to increase the shieding effect. e
o e - (2) The HIGH terminal of the pA Meter
Va or Va FT Yaor va should be guarded by the LOW temina |
T | at a point near the DUT, E 3
1 (3) The HIGH terminal of the pA Meter oF |
==
the wafer at the prober station shoul |
be sufficiently isolated. 1
Wiring: Figure 3-28 shows various connection method в
41408 for wafers at the prober station. В
“= — 4
>
>,
|
FERAL RATA
nd E
]
Е
2
|
© 1
BE
:
5 |
iis
as ea bra phd gr
le. o Epa: Ax
E at e ba SAO
mt Be ad TRAN
Ii
1
Pi
ii
. Pit
| IGOSTA | И
ЗЕ Pl
i i i
F |
ere pa rer — a AA
Shielded Box
RLY EEF BR Esa BL ce SE NES
Figure 3-27. DUT Connection Examples
{sheet 2 of 2).
3-44 a.
E
1
-
LEE Viren ea - Ts
Section 111
Figure 3-28
LT
(1) Both measu
rounded DUT Measurement
(1-2) Ung
connection:
ri AN M
CR / e,
|
va or VB = Ll LE
Wiring:
|
|
i
!
dd m
YA
a
ISCEDA
TO
LM
Va YE |
| HIGH |
E i
: |
; LOW Wafer
Chuck
fainter
| Stage
Shielded Box
rement terminals are on +he Wafer Surface.
(1-5) Grounded DUT Measurement
Connection:
YA Or VE HH
м
LLL LE L LLL
Us 4
—
; INPUT
+
ls
I
A
iSOS3A
i
>
11
E
|
Va xx VB
E
340€
|}
EE
EJ
Pi]
TT AA ama
™
TA IM MMT IT KE
N—
vu
Water ]
Chugh
13010107
51996
“ehielded Box
Figure 3-28. DUT Connections on Wafers at the Prober Station (sheet 1 of 2).
306
Section III
Figure 3-28
Connection:
+
(2-a) Ungrounded DUT Measurement
L
NS
Va or Ve 7 EEE
AN
N
t
|
ео e 1 INSUT E VA
E
|
|
i ]
{ }
i
|
pet
A 16054 A
Ta
р
mada нот
a
Y
7
e pg
нА
<
«
Ja
Î
z
El
C 4
— 1
me A
¡SOSA
3 i
рр,
AL TTT NM ee da sr an
RL] al
ce] VA
#
LOW /
Wafer
Chuck
ЕТ
Stage
Shielded Box
TA TY
LL AL
(2) One of the measurement terminals is on the Substrate.
(2-b) Grounded DUT Measurement
Connection:
OE
edd
VA © гв Ш
7
Wiring:
> INPUT
dh
то
E
E
4
|
i
|
{
i
я 16054 A =
I
Va
160 53A
1
i
a en me
=
5
Ci e
À ||
АЙ A ;
a]
<
ЧР
<
D
TT Ad Era os
<p da ot не
VA
HIGH
nr HA m
Wafer = -
Chuek —
leolaior
Siege
HE 45 HH wk lk
Shielded Box
Lar ir e ra LA LEE
E
rm
e
ES
Figure 3-28. DUT Connections
on Wafers at the Prober Station {sheet 2 of 2),
Е
o
A a
E
H
‘A
E
К,
3
re
EL
Eo
| В:
а
Eh и
Y В
eu
2r ow
0088
TEE
=
UE O
D
a a "o ui чьей -
(MES
THE
. — ¿1 PE
.
au. -
Ep gt 41408
Fo ‚£ control key parameters are set in-
[3-66 jy or when the measured current value
Eu gorrect'Y he upper range limit, the 4140A
Do erceeds one of the annunciations given in
à display” If one of these annunciations is
Ente 3-7-
E ecgisplayed.
o" in Table 3-7.
ES ¢ voltage Sources,
Tr.
he D
EE aps current
timit,
follow the correction procedures
In addition, if one
VA or VB, exceeds
its CURRENT LIMIT ‘amp
Section 111
Paragraphs 3-65 and 3-66
Table 3-7. 41408 Annunciations (Sheet 1 of 2).
(1)I-C DISPLAY Annunciations
Annunciations
Indicated Condition and
Control Settings
CORRECTION PROCEDURE i
Indicated Condition:
Measured current value ex-
ceeds upper range limint.
Control Settings:
section is saturated.
(1) FUNCTION ... I or I-V{(1-1) Set I RANGE to AUTO.
I RANGE ...... MANUAL
(1-2) If a range "hold" measurement is
being made, set maximum range
for auto range measurment as in
step (1-1) above.
(2) FUNCTION ........ C-V1(2-1) Set I RANGE to AUTO.
I RANGE ...... MANUAL
(2-2) 1f a range "hold" measurement is
being made, refer to paragraph
3-53.
(3) I RANGE ........ AUTO |(3-1) Change measurement condition.
The internal measurement | Perform the same correction procedure
circuit of the pA Meter | used for HENS
Indicated Condition:
Calculated capacitance val-
ue exceeds the upper limit
(1999pF),
Change measurement condition (ex.set
dV/dt to lower value).
Indicated Condition:
Calculated capacitance val-
ue in percent exceeds ¡ts
Increase the value of Cox.
upper limit (199.9%).
3-47
Section Ill
"ode! Au |
Table 3-7 8
1
a E:
НЕ В E :
: +3
Table 3-7. 41408 Annunciations (Sheet 1 of 2),
(2)YS DISPLAY Annunciations |
Annunciations Indicated Condition Correction Procedure
Parameter value exceeds up- Reset parameter value. Refer to Table
per limit. 3-4. В |
VA is swept when parameters|Reset parameter values. Refer to Table
are incorrectly set, 3-4.
il amyl VAE EN
bo rte aos ua o Eo bin EEE Pt ce CE A RA
TA EA PA ea hE AECE LOTE FE dr PEE = а
CINTA Re RECN SE hie |
| Ш RRE i RENE МНЕ TE pee
ile т Y - - 4
I dt AE
<p HiPath
TE } ee Lar a PA or VE TR DRE JR RE Te
od
BP pate ee
- 3-48
AREA Ra Е;
7, ANALOG OUTPUT.
; utput can be used to output
3 The Analog the pA Meter and DC Voltage
lod dat? - n Tables 3-8 and 3-9. When
iven 1
: 208 15 connected to an X-Y Recorder
- de ai p Model 7047A), the system can be used
+ {e.g H [-V/C-V curves. The procedures for
- te trae 41408 and an X-Y Recorder are given
A sf ng 3
| 6s. Control Cap
NT +:
ss e Analog Output nas three capabili-
- 570. De more easily, quickly and clearly
tie g 1-V/C-V curves. These capabilities
— fCgracin
“are:
abilities for Analog Output.
Pis au
i (1) Control of pen position on the X-Y Re-
corder.
With control keys LL, ZERO and UR, the
: 41408 is able to control the X-Y recorder
© pen position as in Table 3-10.
Section III
Paragraphs 3-67 to 3-70
Note
Control of the pen position can be
done by remote control via the HP-
IB. Refer to paragraphs 3-71 thru
3-100 for more specific information
on the HP-IB.
(2) Control signals for X-Y Recorder pen-
jift TTL controls.
When the X-Y Recorder ‘is provided with
pen Tift TIL controls, pen lift can be
done automatically by TTL signais output
from the PEN LIFT connector on the rear
of the 41408. This TTL signal dis High
(PEN UP) when Y QUTPUT lamp is lit, and
Low (PEN DOWN) when Y OUTPUT lamp is not
Tit.
Table 3-8. Analog Output Data at I/C OUTPUT Connector,
| Function | Value of I-C DISPLAY Analog Output Data (Y)| Resolution
| 1 0 ^ #1999 0.000 ^: = 9.935 5mV/count
| 0.0 v 199.9 0.0000 ^ 0.9995 500uV/count
| | - 200 v 1999 1.000 v 9.995 -— 5mV/count
| % 0.0 ~ 199,9 0.000 ~ 9,995 5mV/count
Table 3-9. Analog Output Data at VA OUTPUT Connector.
+10.7 ~ +100.0
Outputted Vp Voltage (V) Analog Output Data (v)] Resolution
0.00 ~ £10.00 0.000 ~ +1,000 1mV/count
+1,01 © 10,00 10mV/count
Va mm me mpg Ad
3-43
rigyre 3-24
(3) Low-pass filter
Analog Output data.
If the analog data output
siderable noise and the !
Strong curves,
are
provided in
for reducing noise on
includes con-
-V/C-V curves
the low-pass filters
the Analog Output Circuitry,
Table 3-10. X-Y Recorder Pen
Mode)
Can be used to reduce
allowing I-V/C-V curves
smoothly,
and I/C QUTPUT data.
can be changed
lect switch on the rear panel.
Position Control,
Key
| voltage Output
from VA OUTPUT Connector
et
Voltage Output
from I/C OUTPUT Connector
UR
(Upper Right)| y
eater voltage (START V or STOP
Voltage at plus full scale of I.¢
DISPLAY (+5y).
LL Lesser voltage (START y Or STOP [I-y: „5V (Voltage at minus full
(Lower Left) V). scale), ;
- CV: oy,
ZERO Ov. ov, |
the noise.
to be trac.
the filters apply to be
Filter ri
with FILTER TIME co
|
zn.
(
Sf
|
:
|
To YA OUTPUT Connector
To IC OUTPUT
Connecctor
В E La «|
1 Ги .
= - “
' Г Г ms Ty A
re LE
a " 3] E EC)
28 UE |
+ E | , =
‘ |
>
mad МЫ
Обе
EEE o
RH
se
|
BNC (male) dual banana plug cable
EQUIPMENT:
X-Y Recorder
BNC (male) -
* EEE aulas
aserirrocorarco HP 7047A etc.
Dual Banana Plug
Cable HP T1007A (Zea),
+ +...
Figure 3-29.
Analog Output Operating Instructions (sheet | of 2).
3-50
mode! 41403. Section Il!
Figure 3-29
I
| PROCEDURE:
(1) Turn 41408 and X-Y Recorder OFF.
| (2) Connect I/C OUTPUT connector on rear panel of 41408 to Y axis input termi-
y nals of X-Y Recorder and Va OUTPUT connector to X axis input terminals
with BNC (male) - dual banana plug cables.
vided with pen 1ift TTL controls, connect PEN LIFT
(3) When X-Y Recorder is pro
of 41408 to X-Y Recorder connector.
connector on rear panel
(4) Connect test leads or fixture (ex. 16053A Test Lead) to 41408.
(5) Turn 41408 and X-Y Recorder ON,
(6) Set front panel controls and parameters. Refer to Figure 3-17 for 1-V
measurement or Figure 3-23 for C-V maeasurement.
Note
The 41408 HOLD TIME parameter should be set after considering the
relationship between the pen position as the 41408 starts its
sweep measurement and the slewing speed/accieration of the X-Y
Recorder.
(7) Place chart paper on recorder platen.
[ (8) Install disposable pen in X-Y Recorder.
€ (9) Adjust zero position of X-Y Recorder.
Note
| | Voltages output from the VA and 1/C OUTPUT connectors are set
to 0V by the ZERO key on 41408 front panel. |
| (10) Set input ranges of X and Y axis for X-Y Recorder.
Note
check amplitude of I-V or C-V
When setting input ranges, |
LL (Lower Left) and UR (Upper
curve by using control keys,
Right).
(11) Connect DUT to test Teads or test fixture connected to the 4140B.
(12) Lower X-Y Recorder pen onto chart paper. If X-Y Recorder is provided
| with pen lift TTL controls, pen is lowered automatically when sweep meas-
13 urement is started (when V OUTPUT lamp is 11%).
|| (13) Start 4140B I-V or C-V measurement and make A-
C-V curve, |
(14) Lift X-Y Recorder pen from the chart paper when measurement is complete
and X-Y Recorder stops. If X=Y Recorder is provided with pen lift TTL
controls, pen is raised automatically when measurement is complete (when
Y OUTPUT lamp is extinguished).
Y Recorder trace of I-V or
Figure 3-29. Analog Output Operating Instructions (sheet 2 of 2). 5
3-51
Section Ill
Paragraphs 3-71 to 3-80
3-71, HP-IB INTERFACE.
3-72, The Mode! 4140B can be
trolled by means of the HP-IB, The HP-IB is
a carefully defined ‘instrumentation inter-
facing method tnat simplifies the integration
of instruments and a calculator, or computer,
into a system,
remotely соп-
Note
HP-IB is Hewlett-Packard's implemen-
tation of IEEE Std. 488-1975 Standard
Digital Interface for Programmable
Instrumentation.
3-73. Connection to HP-IB,
3-74, A 41408 may be connected into an HP-IB
bus configuration with or without a control-
ler (e.g. with or without an HP calculator).
In an HP-1B system without a controller, the
41408 can function as a Talk Only unit (refer
to paragraph 3-79).
3-75, HP-IB Status Indicators.
3-76, The HP-IB Status Indicators are four
LED lamps on the front panel. These lamps
show the status of the 41404 in an HP.I8 sys-
tem as follows:
SRO: SRO signal on HP-IB line from 41408
(refer to paragraph 3-95),
LISTEN: The 471408 is set to be listener.
TALK: The 4740B is set to be talker.
REMOTE; The 41408 is remotely controlled.
3-77. LOCAL Key,
3-78. The LOCAL key disables remote control
from HP-IB control and enables setting meas-
urement conditions at front panel controls
(pushbutton keys). REMOTE HP-IB status indi-
cator lamp turns off when LOCAL key is de-
pressed. This function can not be used when
the 41408 is set to local lockout status by
controller. -
3-79, HP-IB Control Switch,
3-80. The HP-IB Control Switch on
panel controls seven digits
bilities as follows:
the rear
and three capa-
(1) Bit 145: The HP-IB address is estab-
iished by these five digits of the
control switch.
3-52
a
Model 420%
(2) Bit 6 (delimiter form bit):
data as follows:
me
E
0: Format A (comma).
1: Format B (carriage return, lip
feed),
1
(3) Bit 7 (talk only bit): This bit deter. |
mines
are:
instrument capabilities whic:
0: Addressable
1: Talk Only
Note
The 4140B is set at the factory as
shown in Figure 3-30.
Aa
5
This b,
determines delimiter format of oytp,™§
Pepe Td
——— TALK ONLY
le [T= |~ ADDRESSABLE
m (T0 |-FMTA
ES] las
Ll .
C= .
ГЕ *
F3 | AImAODRESS
O
—— MTB
bit 145: 17
bit 6: Format A(comma).
bit 7: Addressable
Figure 3-30. HP-IB Control Switch.
Lo,
ja gy, HP-1B interface Capabilities of 41408.
A 2? Tne int a A
TB 15 specified by the interface func-
e ut into the device. The 41408 has
RENE interface functions as given in
| la.g3, Remote Progran Code.
2.84. Remote program codes for the 41408 are
y listed {in Table 3-12.
Section II!
Paragraphs 3-81 to 3-84
Table 3-11. HP-IB Interface Capabilities.
erface of a device connected 10
Code Interface Function*
(HP-IB Capabilities)
SH]** | Source Handshake.
АН! Acceptor Handshake,
75 Talker (basic talker, serial poll,
talk only mode, unaddress to talk
if addressed to listen).
14 Listener {basic listener,unaddress
0 listen if addressed to talk).
SR} Service Request,
RUI Remote/Local {with local lockout).
Del] . | Device Clear. | |
DT! Device Trigger.
* Interface functions provide the means
for a device to receive, process and
transmit messages over the bus.
#% The suffix number of the interface
code indicates the limitation of the
function capability as defined in
Appendix C of IEEE Std. 188-1975.
Table 3-12. Remote Program Code (sheet 1 of 3).
E : Control | Program Code | Description
FUNCTION I F1* Description of HSI (high speed I func-
tion) is provided in paragraph 3-97,
y FZ
C-V F3
HSI F4
RANGE HOLD ВАО
AUTO RAT *
mi
10 tan | RO2 RI2
-2
AUTO 107 AN, | HOZ Y HIZ*
| RANGE |
PE ETE Sf kb DE
mE NETO, . ..
| - | e SIE,
EDS " = La! т Dama? a = =
3-53
Section III
Mode] 41, )
Eo
Table 3-12
Table 3-12. Remote Program Code (sheet 2 of 3). ;
Control | Program Code “Description |
Он
INTEGRATION | SHORT I
TIME. - |
MEDIUM 12
LONG 13*
FILTER OFF JO
ON JT A Ш
I TRIG INT Т1* These codes are ysed only to set and not
{ for triggering. When FUNCTION is set to
EXT/MAN T2 F1 (I) or F4 (HSI), T1 is automatically
set,
C% Enable DF CO When FUNCTION is set to F3 (C-V), CO is
_ | automatically set,
% Cl
SWEEP = NT W4 is used when 41408 is set to AUTO
CONTROL | SWEEP Mode,
MANUAL W2 We, W5 and W6 are used when 41408 1$ set
to MANUAL SWEEP Mode,
PAUSE W3
RESTART W4
© W5
©) №
2 W7
YA MODE / AT When FUNCTION is set to FI (I), F2 (I-V)
or F4 (HSI), A3 js automatically set.
VAN A2
A АЗ* When FUNCTION is set to F3 (C-Y), Al is
automatically set.
PAY Ad
=== А5
OFF Аб
VB MODE === В]
OFF В2*
YA I LIMIT 100НА 11%
1 mA 12
10mA L3 N
3-54
CS ha ; PE E Loe lad Diao + LC > Na i ; ly A
pA pe ned
Mi a arrete
моде! 41408
Table 3-12.
Remote Program Code
Section Ill
Table 3-12
(sheet 3 of 3).
| Control Program Code Description
veg 1 LIMIT 100A MT *
ÎmA M2
10mA M3
ZERO SET Z
SELF TEST OFF SO*
ON Si
SRO MASK OrF DOF These program codes are used to control
bits 1 thru 3 of SRQ Status Byte as fol-
ON (1) DI Tows:
ON (2) D2 Bit 1: DATA READY
Bit 2: CURRENT LIMITER
ON (1, 2) D3 nit 3: AUTO SWEEP or SELF TEST END
ON (3) D4 Refer to Figure 3-31. for more specific
information on SRQ Status Byte.
ON (1, 3) DS
ON (2, 3) D6
ON (AIT) D7
TRIGGER E
KEY STATUS K
RECORDER LL XL
ZERO XZ
UR XR
* : power ON -
3-55
Section II!
Paragraphs 3-85 to 3-90
3-85. Parameter Setting,
3-86. А 41408 can be set to
(refer to Table 3-13) by
as follows:
XXENNNN, NNX
) (4)
(1) (2) (3
nine parameters
remote programming
(1) Program Code for Parameter Setting
(refer to Table 3-13).
(2) Setting Value (numeric or space).
(3) Delimiter: (semi-colon)
(comma)
ura
(4) Terminator
Table 3-13. Program Code
Tor Parameter Setting.
Parameter Program Code | Setting Value
VA == (y) PA „19,00% 10.00
-100.0 » 100.9
START V (V) PS -10.00 % 10.00
-100.0 ~ 100.0
STOP Y (Y) PT -10.00 v 10,00
„100.0 ~ 100.0
STEP Y (Y) PE -10.00 ^ 10.00
HOLD/ TIME (s) PH 0.1 x 1999
dV/dt (V/s) py -1.000n 1.000
Cox (pF) PC 0.1 ^ 1999
STEP DELAY PD 0.01 ~ 100.0
TIME (s)
YB === (V) PB -10.00 ^ 10.00
-100,0 > 100.0
3-56
3-87, Data Output.
A dea e EE
ar Ta fe HA ol .
AE ar я
fad tim TE me
3-88. Data output by the Model 47408 cong *
of:
te
Ly
=
23
(1) I-C Measurement Value and Vy butyl
Voltage, |
(2) Setting Parameter Output. 4
(3) Key Status, E
(4) Service Request Status Byte. A
In the following several nm ê
paragraphs, each
output data form is described.
ape ый
3-89. I-C Measurement Value and Va Output
Voltage. | - :
3-90. Two output formats are possible ih
the 41408: i
a. Format A y
To output either the I.-C measurement |
value or Va output voltage in a continu-g
ous string, the delimiter form bit (HP-ISE
control switch Bit 6) on the rear pane”.
is set to 0 (see paragraph 3-73), LL
this mode, data is output in the follow
ing format: À
_XXZN. NNNE-NN, A+NNN. NN
(1X2X3) (4) 6x6 (7) (3) |
Note
The 41408 is set at the factory for
output Format А.
Hr ah La dti in A MU A 0
В. Format 8
To break the data into two groups (limits.
line Tength) for output to certain pe-.
ripherals. such as the HP Model] E
Thermal Printer, the delimiter form DICE
on the rear panel is set to 1 (see para”:
graph 3-79), All data is then output in, _
the following format: |
. XXEN. NNNE-NN ER) TD
C2X3) (4) {8}
AxNNN.NN СВ ФР. |
0 ©
Ae en: eta a
romanes *
Ara EA
TA ES em pp me
E:
Fo
E.
HA
in
E
E
Arama pr EE ee
wade 41408
1) Space
(2) nata Status
No... Normal Data
0... Qver Flow
Y... No Data (only measurements
using ramp wave)
L ... Last Data (only in Auto Sweep
Mode)
(3) I and C Measurement Functions
.., Current Measurement
С ,.. Capacitance Measurement
Display) |
9 ... Capacitance
Display)
4
(pF
Measurement (%
(4) Value of I-C Measurement
(5) Comma
(6) Symbol of Vp Output Voltage
(7) Value of Va Output Voltage
(8) Data Terminator
Note
The 41408 sets EOI (End or Identi-
fy} Tine in the HP-1B to “7” when
я * is output.
Fach data.
Only last data.
3-81, Parameter Output.
3-92. Nine parameters can be set in the 41408
as given in Table 3-13 (refer to paragraph
3-85), Setting values of parameters can be
output in the following format by using their
program codes (refer to Figure 3-34).
_ XXENNNN. NNN
(1){23 (3) (4;
(1) Space
(2) Program cades for 4140B parameter
(3) Setting value of 4140B parameter
(4) Data Terminator
Section III
Paragraphs 3-91 to 3-94
3-93. Key Status Data.
3-94, This data is output from the 41408 when
program code "К" is used (refer to Figure
3-36). The data is output in the following
format: |
(1) $расе
(2)
(3)
(4)
(5)
(6)
(7)
(8)
F1 © F4: FUNCTION
RAO, RAT, RO? ~ R12: RANGE
11 ^ 13: INTEGRATION TIME
Tt ~ T3: I TRIGGER MODE _
CO, C1: C% Enable
AT ~ A6: Va MODE
81, B2: Vp MODE
Li vL3: YA I LIMIT
M1 ~ M3: yp I LIMIT
DO ~ D7: SRG MASK
(12) SO: SELF TEST (OFF)
HO2 ~ H12: LIMIT AUTO RANGE
JO, Ji: FILTER
Data Terminator
3-57
A pr с
. ALEA
Section Ill
Paragraphs 3-95 to 3-98
3-95, Service Request Status Byte.
3-96. The 4140B sends an RQS (Request Service)
signal whenever one of bits 1 thru 4, 6 or 8
is set. Figure 3-31 shows the Status Byte
makeup of 41408.
3-97. High Speed I (HSI) Function.
3-98. The 41408 has not only I, I-V ang a
functions but also has a High Speed I to
function. This facilitates high speed de
output of the current measurement,
function can be set only by remote pro
Bit 8
7
6
5
4
3
2
1
Information 0/1
0/1
0/1
0/1
0/1
0/1
0/1 1 0/1
Signal bit 7 (ROS signal) establishes whether o
Signal bits 1 thru 4, 6 or 8 identif
service request states of the 41408 are:
Fr not a service request exists,
(1) Bit 1: IF Data Ready is set to ON, this state 15 set when measurement
data is provided,
(2) Bit 2: When CURRENT LIMIT is operating (when LED lamp on front panel is
lit), this state is set.
(3) Bit 3: When SELF TEST or Auto-Sweep Measurement is completed, this state
is set.
Note
Bits | thru 3 are set when SRQ MASK (refer to Table 3-12) is
set to ON, |
(4) Bit 4: (1) When the 41408 receives an erroneous remote program code , this
State is set,
If the 41408 receives an illegal program when DC Voltage Source
is operating (when Y OUTPUT lamp on front panel is lit) , this
State is set, .
When parameter is set to a value over its setting limit (when VS
ISPLAY on front panel displays "0-F"), this state ig set.
If YA is swept when parameters are not set correctly {when VS
ISPLAY on front panel displays "ILLE™), this state is set,
on the 41408 receives trigger command when the FUNCTION is set
to I-Y or C-Y, this state is set. |
(5) Bit 6: If Self Test is faulty, this state is set.
(6) Bit 8: (When the 41408 receives a trigger signal before the last meas-
urement is completed, this state is set,
When the 41408 provides measurement data while the last meas-
urement data is being output, this state is set,
Signal bit 5 is independent of bit 7 (ROS Signal). When DC Voltage Source is
operating (when V QUTPUT lamp on front panel is Tit), this state is set,
y the character of the service request states.
in Pll, lel
3-58
Figure 3-31. Status Bytes of the 4140B,
ea
Fr em =
STE CR aa rr PRT
Mode 41408 Section 11!
a | Figure 3-32
Ш e (F4), and can not be set by front panel Table 3-14. Accuracy and Data Output
ontrols. When the 4140B is set to HSI func- Interval in HSI Function,
cion, the I-C DISPLAY on the front panel dis-
lays "H-1", The 4140B outputs current meas- | pata Output Interval (ms)
cement data via HP-IB as in Figure 3-32 when Range (A)| Accuracy
11408 is set to HSI function. This output internal External
data is the raw current measurement value La LAB Lin ea
dore it is digitally integrated (refer to | 110 4107" =(0,5+6,
acraph 3-18). This permits the 41408 in
Tes its function to output data at a higher 107 ¡E (0.5410)
speed than in its general I function. Accu- o 7
racy and data output intervals for the HSI 10. | E (2410)
function are shown in Table 3-14, Sample 1 a, (5+100)
program for HSI function using an HP Desktop 197% | NT
Computer 9825A/9835A is given in Figure 3-37.
ti
10(8,3)#*
JV
+
* *{% of reading + counts) at 23 C+5°C,< 70
humidity.
** at 50(60)Hz Tine frequency.
HSI(HIGH SPEED I) FUNCTION
Program code "F4" for the 4140В establishes not only the HSI (High Speed I)
function, but also starts data output from 4140B. When 41408 receives "F4" from
controller, the 4140B output is zero. Next, the 4140B sends an invalid byte (32
in decimal, space in ASCII) as the first byte. Beginning with the second byte,
411408 current measurement data in binary code is transmitted. Fach transmission
of current measurement data is made up of three bytes, which are:
ede Hee ek de doe de ok Seok ok dde dd Kk Fede kek Fedde dood
(1) (2) (3) (4) | (5)
(1) Space: Invalid data (00700000).
marais apr *
(2) Range: Range of the first measurement. 2(00000010) ~12(00001100).
(3), {4) Counts: Counts of the first measurement. ‘Typical -3600 ^ +3800,
This data is made up of two bytes (sixteen bits) and sent
in 2's complement,
(5) Range: Range of the second measurement. Subsequently, each measurement
cata transmission is made up of three bytes sent in the same
format as in (2) thru (4) above.
Note
when set to the HSI function, the 41408 does not send a data
terminator (e.g. ) nor does it set EOI (End or Identi-
fy) line in the HP-IB to "1", Therefore, the 41408 is sending
current measurement data during the time the 41408 is set to
HSI function. If 4140B is set to another function, HSI func
tion is aborted and stops data output. A sample program for
using HSI function is given in Figure 3-37,
Figure 3-32. Data Output Format of the HSI (High Speed 1) Function.
3-59
Section II!
Paragraphs 3-99 and 3-100
ar
Model 471406 j
3-99, Programming Guide for 4140B, Table 3-15. Sample Program Using HP 9825A ¡E
or 9835A Calculator E
3-100, Sample Programs for HP Model S825A/ a
9835A Desktop Computer are provided in Figure No.l Figure Description OU
3-33 thru 3-37. These programs are listed in —
Table 3-15. 1 3-33 Remote control of pA section il
| | and data output when 414014
Note | is set to I function. 1
Specific information for HP-IB pro- 2 3-34 Remote contro? of YS section $
gramming with the 9825A or 9835A arc | and parameter output whentE
provided in the 98254 or 98354 pro- 41408. LE
gramming manuals, | ——
3 3-35 Remote control and data out-18
Note — put when 41408 is set to I-yi§
| or C-V function. LÉ
The equipment required for these sam- —#
ple programs include: 4 3-36 How to use remote program 1€ >
ming code "К". - x
1. 4140B pA Meter/DC Voltage 5 3-37 Remote control and data pro- E
Source. | cessing when 41408 is set toi §
High Speed 1 (HSI) function.
2. 98034A HP-IB Interface Card.
3. 9825A Desktop Computer with
98210A String-Advanced Pro-
gramming ROM,
G8213A General 1/0 Extended
1/0 ROM,
or
9835A Desktop Computer with
98332A General 1/0 ROM.
3-60
ode)
41408
== =
Section li!
Figure 3-33
sample Program |
Description:
This program enables remote control of the pA Meter section and provides a
data output program when the 4140B ‘is set to I function. The program has
three capabilities:
(1) Control of the 41408 pA section via HP-IB.
(2) Trigger of the 41408 ph section via HP-IB.
(3) Data output from the 4140A via HP-IB,
98255 Program: C835A Program:
0: fits 10: FLOAT3
1: wrt717,"FIRATIZTZ" 20: OUTPUT717;"FIRATIST2"
| (132 13) (4) (12) 13) (4)
2: wrt717,"E" 30: QUTPUT71/7; "E" -
(5) (5)
3: геа717 ‚А, В 40: ENTER717;A,B
à: dspÂ,B:prtA,B 50: DISP A,B
5: enc 60: PRINT A,B
70: END
(1) Select code of 98034A.
(2) Address code of 41408.
(3) Sets 41408 to I function, -
141 Program codes for pA section of the 41408 (refer to Table 3-12).
(5) This line is equivalent to:
9825A: trg717
9835A: TRIGAER/I7
By using string variables, complete output information from the 41408 15 stored
by the following program:
G8Z5A Program: 3835A Program:
0: dimA$[30] 10: DIM A$[30]
1: wrt717,"FIRATI3T2" 20: QUTPUT/17;"FIRATI3TA"
2: wrt717,"E" 30: OUTPUT717; "E"
3: red717,AS 40: ENTER717:AS
à: dspAS;prtAS$ 50: DISP AS
5: end 60: PRINT AS
70: END
Figure 3-33. Sample Program 1 Using 9825A/9835A,
3-61
Section II]
Figure 3-34
Model à)
т.
a
ul
1
|
E
| :
Tm US
Sample Program 2,
Description:
This program enables remote control of the VS section
ties:
(1) Control of the 4140B VS Section via HP-IB,
(2) Auto sweep of the 41408 VS section via HP-IB,
(3) Parameter output from the 4140B via HP-IB,
9825A Program:
0: dimA$[307
1: wrt717,"F1A&B]12M3"
| (1) (2)
2: wrt717,"PS-10,PT10,PE1NPH2:PD.5,PB-50"
(3) (4) (3) (4}{3)(4) (3)(4) (3) (4) (3)
3: wrt717 "ps"
(5)
4: red717,A$
(5)
5: dspA$,prtas
6: Wrt717 М"
(6)
7: end
9835A Program:
10: DIM A$[30]
20: OUTPUT717;"FIA4B1L2M3"
(1) (2)
30: OUTPUT717;"PS-10;PT10,PEINPH2;PD. 5,P8-50"
(3) (4) (3)(4)(3)(4)(3)(4) (3) (4) (3)
40: OUTPUT717;"ps"
(5)
50: ENTER717:AS
(5)
60: DISP AS
70: PRINT A$
80: QUTPUTZ17 ; "WI"
(6)
90: END
Ш Sets 41408 to I function.
2
(3) Program codes for parameter setting of the 41408
(4) Parameter terminators for the 41408.
(5)
uously programmed.
(6) Statement for AUTO START of V SWEEP.
Figure 3-34. Sample Program 2 Using 9825A/9835A,
3-62
Program codes for the VS section of the 41408 (refer to Table 3-12
and provides parameter i
output when the 41408 is set to I function. The program has three Capabili-
). |
(refer to Table 3-13).
Statements on lines 3 and 4 (or 40 and 50) are used to
output setting |
value of the parameter for 41408. These statements sho
uid be contin-
моде! 41408 Section III
- Figure 3-35
Sample Program 3.
Description:
This program enables remote control and provides a data output program when
the 41408 is set to I-V or C-V function. The program has three capabilities:
(1) Control of I-V or C-V measurement of the 41408 via HP-~IB.
(2) Auto sweep of I-V or C-V measurement of the 41408 via HP-IB,
(3) Data output from the 4140B via НР-1В.
S825A Program:
0: dim A$ [100,30]
(1)
: wrt 717,"F3RA1IZA1BIL2M3"
wrt 717,"PS-1.1;PT1.1,PE.1NPH1;PV1,PB-50"
wrt 717,"W1" | -
: 1-1
‚ рей 717,А$ [1]
: jf ASLI,2,21="L":TI+1+I; imp -1
(2)
7: for J=l to I
8: prt AS[J]
9: next d
0: end
Où U1 Æ= Qu PQ =
1
08354 Program:
10: DIM AS(100) [30]
(1)
20: QUTPUT 717: "F3RATIZA1811 2M3"
30: OUTPUT 717;"PS-1.1;PT1.1,PE.1NPHI; PVT, PB-50"
40: OUTPUT 717 ;"W1"
50: “e
60; I=I]
70: ENTER 717; AS(I)
80: IF AS(I)[2,21# "1" THEN 60
(2)
90: FOR J=1 T
100: PRINT AS Si
110: NEXT J
120: END
0 1
J)
(1) Dimensions a string variable array that is larger than the number of
measurement points.
(2) When the 41408 is set to AUTO SWEEP, the second byte of last data 15
"I." (refer ot paragraph 3-89).
Figure 3-35. Sample Program 3 Using 9825A/9835A (sheet 1 of 2).
Lae ai 1 “E wv . il
Ve od nem
SECLIVUMN 11d
Mode) QUE:
Figures 3-35 and 3-36 3
The same results can be
obtained by using the following program, Lines 1 and
6 {or 20 and 80) have he
en altered to allow use of the SRQ Status Byte,
9825A Program:
Set
т wrt /17, "F3RATIZA1B1L2M3D4"
; if bit (2, rds (717) ) = 0; 1 +] > I; jmp-1
98354 Program:
20: OUTPUT 717; "F3RATIZATBIL2M3DA4"
75: STATUS 717; A
80: IF BIT (A, 2) = 0 THEN 60
First bit of the 41408 output data (space), just after the SRO Status Byte is Ш
Output to the controller, may be lost. Also, the Status Byte is cleared
3-64
within 10ms after it is output to the controller. Therefore, if the Status i
Byte is output within 10ms after the last output, the last state may remain. e
rigure 3-35. Sample Program 3 Using 9825A/9835A (sheet 2 of 2). 4
vo
Sample Program 4. ; :
Description:
The remote programming code "K"
can be used to recognize 41408 key settings,
This program shows how to use "К", | |
Note |
when the I RANGE is set to "RAI (AUTO)", key setting informa- Bi
tion for the I RANGE using "K" de "RATE. Therefore, the I 3
RANGE should be set to "RAO (MANUAL)" to recognize the true I
measuring range.
9825A Program: 9835A Program: о В Ч
0: dim A$[30] 10: DIM A$[30]
1: wrt 717,88" 20: OUTPUT 717;"K"
2: red 717,A$ | 30: ENTER 717:A$
3: dsp AS;prt AS 40: DISP A$
4: end 50: PRINT A$
| 60: END
Note
The statements on lines 1 and 2'for 20 and 30) should ba con-
tinuously programmed.
Note
The remote program code "K" can not be used while the self a
test is performed, Besides, if "K" is used when the measure. "e
ment data is provided, this data will be lost. ;
Figure 3-36. Sample Program 4 Using 9825A/9835A,
Sample Program 5,
Description:
This program enables remote control and
41408 is set to HSI (High Speed I) function. This program
ties:
(
(2) High speed I/O contro? between the 4140B and controller via HP-IB.
(3
) Control of the 47408 HSI function via HP-IB.
) Data processing for the 41408 HSI function via HP-IB,
Note
Data output interval of the HSI function is quite short (2,5
to 10ms). Therefore, general 1/0 programming (98254:
red, 9835A: OUTPUT, ENTER) can not be used.
1/0 programming can be used for the HSI function.
is provided in the 9825A or 9835A programming manuals,
9825A Program:
0:
«0
Zi
1 CF (FI >
co
11:
: next I
13:
: tfr 717, 47408", 3N+1
—
ent "Number ? ".N
1
{1}
buf 471408" , 3N+1,3 |
(2) a
wrt 717,"F4"
(3)
(4)
: rdb("4140B" }>S
(5)
: fmt 1,f6.3,c2,f2.0,c]
: for I=! to N
: rdb("4140B")—R
(6)
: rdb{"4140B")>H
(7)
: radb("41408")+L
10:
a
Tor(shf(H,-8),L >C
(8)
wrt 16,1,C/1000,"E-" В, "д"
end
is a data output program when
has three capabili-
Only high speed
High speed
1/0 programming with the 9825A and 9835A is slightly different
A sample program for HS] is given below. More specific infor-
mation for high speed 1/0 programming with the 9825A or 98354
Section III
Figrue 3-37
the
Figure 3-37. Sample Program 5 Using 9825A/9835A (sheet 1 of 2)
3-65
Section lil
Figure 3-37
PU 41408
9835A Program:
10:
20:
30:
40:
50:
60:
70:
60:
90:
100:
110:
120:
130:
140:
150:
OPTION BASE 1
INPUT "Number ? ",N
(1)
DIM A$[1000]
(2) |
OUTPUT 717 ;"F4"
(3)
ENTER 717 BFHS 3*N+1 NO FORMAT-AS
| 4)
S=NUM(A$[1,11)
(5)
IMAGE D.DDD,AA,DD
FOR I=1 TON
R=NUMCAS[3*(1-1)+2,3€(1-1)+21)
(6) |
H=NUM(AS[3*(I-1)+3,3*(I-1)+31)
(7)
LENUMCAS[3*(1-1)+4,3*(1-1)+41)
(8) | |
C=BINIOR(SHIFT(H,-8),L)
(9)
PRINT USING 70:C/1000,"E-",R
NEXT 1
END
(1) N: Number of data sent.
| |
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
9825A: Sets name (41408), size (3N+1) and type (high speed read/write
buffer) of the buffer for high speed 1/0.
9835A: Sets name (AS) and size (23N+1) of string variable for high
speed 1/0. |
Sets 41408 to HSI.
Sends measurement data from 41408 to controller.
Inputs first byte of measurement data from buffer to variable 5,
: Range of first measurement. |
: High byte of count of first measurement.
: Low byte of count of first measurement,
C: 16 data count bits make up H and C,
EAS
3-56
Figure 3-37, Sample Program 5 Using 9825A/9835A (sheet 2 of 2)
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