Dwyer Series GFC Instruction manual

Technical Data Sheet No. TD9709M Rev. P
Date of issue:
December 2014
OPERATING MANUAL
FOR GFC MASS FLOW CONTROLLERS
P.O. Box 373
Michigan City, IN 46361 USA
Phone: (219) 879-8000
E-mail: [email protected]
Internet: http://www.dwyer-inst.com
CAUTION:
This product is not intended to be used in life support applications!
CAUTION:
K-Factors at best are only an approximation. K-Factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
Dwyer reserves the right to make changes to information and specifications in this
manual without notice.
TABLE OF CONTENTS
1.UNPACKING THE GFC MASS FLOW CONTROLLER..............................
1.1 Inspect Package for External Damage..................................................
1.2 Unpack the Mass Flow Controller.........................................................
1.3 Returning Merchandise for Repair........................................................
1
1
1
1
2. INSTALLATION...................................................................... 2
2.1 Primary Gas Connections..................................................................... 2
2.2 Electrical Connections........................................................................... 2
2.2.1 Valve Control Configuration............................................................ 5
2.2.2 Remote LCD Readouts.................................................................... 6
2.2.3 Panel Mounting Readouts............................................................... 6
3. PRINCIPLE OF OPERATION....................................................... 7
4.SPECIFICATIONS...................................................................... 7
4.1 CE Compliance......................................................................................10
4.2 Flow Capacities......................................................................................10
5. OPERATING INSTRUCTIONS.......................................................11
5.1 Preparation and Warm Up................................................................... 11
5.2 Flow Signal Output Readings............................................................... 12
5.3 Swamping Condition............................................................................ 12
5.4 Setpoint Reference Signal.................................................................... 13
5.5 Valve OFF Control (Open Collector NPN Compatible)............................14
5.6 Valve Test/Purge................................................................................... 14
6. MAINTENANCE.................................................................... 15
6.1 Introduction........................................................................................ 15
6.2 Flow Path Cleaning.............................................................................. 15
6.2.1
Cleaning the Inlet Filter Screen in GFC Models......................... 15
6.2.2
Valve Maintenance for GFC-1100-09, 2100-09 /1111, 1131,
16
1133 /2111, 2131, 2133, 1142 /2142 Models...........................
7. CALIBRATION PROCEDURES.......................................................18
7.1 Flow Calibration................................................................................... 18
7.2 Calibration of GFC-1100-09, 2100-09/ 1111, 1131, 1133 /2111,
19
2131, 2133, 1142 /2142 Models Mass Flow Controllers..........................
19
7.2.1
Connections and Initial Warm Up..................................................
20
7.2.2
Zero Adjustment............................................................................
20
7.2.3
SPAN Adjustment.........................................................................
20
7.2.4
Linearity Adjustment......................................................................
7.2.4.1 Disable Solenoid Valve in GFC-1100-09, 2100-09 /1111,
20
1131, 1133 /2111, 2131, 2133, 1142 /2142 Models.................
Connections and Initial Warm Up...............................................20
ZERO Adjustment...................................................................... 21
25% Flow Adjustment Using R33 Potentiometer....................... 21
10% Flow Adjustment................................................................ 21
25% Flow Adjustment (using R52 potentiometer)..................... 22
50% Flow Adjustment.................................................................22
75% Flow Adjustment................................................................ 22
100% Flow Adjustment.............................................................. 22
Valve adjustment........................................................................ 22
Valve Adjustment for GFC-1100-09, 2100-09 /1111, 1131,
1133 /2111, 2131, 2133, 1142 /2142 Models............................23
7.2.14
Close Loop Full Scale Flow Adjustment..................................... 23
7.2.15
10% Close Loop Flow Adjustment
(using R33 potentiometer)......................................................... 23
7.2.16
25% Close Loop Flow Adjustment
(using R52 potentiometer)......................................................... 23
7.2.17
Close Loop 25% Flow Adjustment
(using R33 potentiometer)......................................................... 23
7.2.18
Close Loop 50% Flow Adjustment............................................. 23
7.2.19
Close Loop 75% Flow Adjustment............................................. 24
7.2.20
Close Loop 100% Flow Adjustment............................................24
7.3
Calibration of GFC-1143 /2143, 1144 /2144, 1145 /2145
Mass Flow Controllers................................................................24
7.3.1
Connections and Initial Warm Up...............................................24
7.3.2
ZERO Adjustment...................................................................... 25
7.3.3
SPAN Adjustment....................................................................... 25
7.3.4
Linearity Adjustment.................................................................. 25
7.3.4.1 Open Motorized Valve in GFC-1143 /2143, 1144 /2144,
1145 /2145 Models.................................................................... 26
7.3.5
Connections and Initial Warm Up.............................................. 26
7.3.6
ZERO Adjustment....................................................................... 26
7.3.7
25% Flow Adjustment................................................................ 26
7.3.8
50% Flow Adjustment................................................................ 26
7.3.9
75% Flow Adjustment................................................................ 27
7.3.10
100% Flow Adjustment.............................................................. 27
7.3.11.
Valve adjustment....................................................................... 27
7.3.11.1 Valve Adjustment for GFC-1143 /2143, 1144 /2144,
1145 /2145 Models.................................................................... 27
7.3.12
Full Scale Flow Adjustment....................................................... 27
7.3.13
25% Flow Adjustment................................................................ 28
7.3.14
50% Flow Adjustment................................................................ 28
7.3.15
75% Flow Adjustment............................................................... 28
7.3.16
100% Flow Adjustment......................................................... 28
7.2.5
7.2.6
7.2.7
7.2.8
7.2.9
7.2.10
7.2.11
7.2.12
7.2.13.
7.2.13.1
7.4
7.4.1
7.4.2
7.4.3
LCD Display Scaling.............................................................. 28
Access LCD Display Circuit....................................................28
Adjust Scaling........................................................................29
Change Decimal Point............................................................29
30
8. TROUBLESHOOTING.............................................................
30
8.1 Common Conditions...........................................................................
8.2 General Troubleshooting Guide.........................................................31
8.3 GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133,
1142 /2142 Valve Related Troubleshooting.......................................33
8.4 Technical Assistance.........................................................................36
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................ 35
APPENDIX 1
COMPONENT DIAGRAM..................................................36
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)...............................38
APPENDIX 3
DIMENSIONAL DRAWINGS.............................................42
APPENDIX 4
WARRANTY......................................................................47
1.
UNPACKING THE GFC MASS FLOW CONTROLLER
1.1
Inspect Package for External Damage
CAUTION: Some of the IC devices used in the GFC are Electro Static
Discharge (ESD) sensitive and may be damaged by improper handling.
When wiring the interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent
inadvertent damage to the CMOS integral solid state circuitry. When 15
pins inter face D-connector is not used do not remove factory installed
ESD protection cover.
Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.
1.2
Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor or Dwyer directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3
Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Dwyer if
you purchased your Mass Flow Controller directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Dwyer reserves the right to charge a fee to the customer for equipment returned under warranty claims if the instruments are tested to be free from
warrantied defects.
Shipping charges are borne by the customer. Items returned “collect” will
not be accepted!
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
1
2.
INSTALLATION
2.1
Primary Gas Connections
Please note that the GFC Mass Flow Controller will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the
sensor.
Caution: It is the users responsibility to determine if the instrument is
appropriate for their OXYGEN application, and for specifying O2 cleaning
service if required. Dwyer is not liable for any damage or personal injury,
whatsoever, resulting from the use of this instrument for oxygen.
Attitude sensitivity of the Mass Flow Controller is ±15F. This means that the gas
flow path of the flow meter must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the GFC transducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants. Be sure to observe the direction
of gas flow as indicated by the arrow on the front of the meter when connecting
the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
Compression fittings should not be removed unless the meter is being cleaned or
calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system. (All GFC's are checked prior to shipment for leakage within stated limits. See specifications in this manual.)
2.2
Electrical Connection
CAUTION: Some of the IC devices used in the GFC are Electro Static
Discharge (ESD) sensitive and may be damaged by improper handling.
When wiring the interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent
inadvertent damage to the CMOS integral solid state circuitry. When
15 pins interface D-connector is not used do not remove factory
installed ESD protection cover.
2
CAUTION: WIRING THE GFC METER OR CHANGING NJ1
JUMPERS CONFIGURATION WITH THE POWER ON MAY RESULT
IN INTERNAL DAMAGE! PLEASE MAKE ALL WIRING CONNECTIONS
AND NJ1 JUMPERS INSTALLATIONS BEFORE SWITCHING ON
THE POWER.
Based on the GFC transducers model number it may require
different power supply voltage: ether 12Vdc, 24Vdc or universal
(any voltage between 12 and 26 Vdc). Before connecting power
supply check controller power supply requirements label located
on the controller back cover. If power supply requirements label
states that power supply requirements is 12 Vdc, do not connect
power supply with voltage above 15 Vdc. Exceeding specified
maximum power supply voltage limit will result in device
permanent damage.
The operating power input is supplied via the 15-pin “D” connector located at the
side of the flow transducer enclosure. On GFC's purchased without an LCD readout, a readout panel meter, digital multimeter, or other equivalent device is
required to facilitate visual flow readings.
A built in SETPOINT potentiometer is used for local control of the flow. Variable
analog 0 to 5 Vdc (or 4 to 20 mA) reference input is required for remote control.
3
PIN FUNCTION
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
0 to 5 VDC Flow Signal Common
0 to 5 VDC Flow Signal Output
Common
Open (Purge)
Common, Power Supply
(unassigned)
+12 Vdc (Optional +24 Vdc*) Power Supply
Remote Setpoint Input
4 to 20 mA Flow Signal Return (use with 14)
Remote Setpoint Common (use with 8)
+5VDC Reference Output for Remote Setpoint
Valve Off Control
Auxiliary +12 Vdc (Optional +24 Vdc*)
Power Output (For Loads <100 mA)
4 to 20 mA Flow Signal Output
Chassis Ground
1&2
0-5 Vdc OUTPUT
3&4
PURGE
3 & 12 VALVE OFF CONTROL
AUXILIARY +12 Vdc (Optional +24
5 & 13 Vdc*) POWER OUTPUT (FOR LOADS
<100 mA)
5&7
+12 Vdc (Optional +24 Vdc*) POWER
SUPPLY
8 & 10
0-5 Vdc OR 4-20 mA (FROM 3 WIRE LOOP
SOURCING DEVICE) REMOTE SETPOINT
9 & 14
4-20 mA OUTPUT (SOURCING, ONLY
FOR PASSIVE LOAD)
10 & 11 +5 Vdc CONTROL SOURCE
FIGURE 2-1 GFC 15-PIN “D” CONNECTOR CONFIGURATION
*Do not connect +24 Vdc power supply unless your GFC controller was ordered and
configured for 24 Vdc
CAUTION: BEFORE CONNECTING THE POWER SUPPLY CHECK
YOUR CONTROLLER MODEL NUMBER AND POWER SUPPLY
REQUIREMENTS LABEL LOCATED ON THE CONTROLLER BACK
COVER. DO NOT CONNECT 24 Vdc POWER SUPPLY UNLESS
YOUR GFC CONTROLLER WAS ORDERED AND CONFIGURED
FOR 24 Vdc. EXCEEDING THE SPECIFIED MAXIMUM POWER
SUPPLY VOLTAGE LIMIT MAY RESULT IN PERMANENT DEVICE DAMAGE.
Important Notes:
In general, “D” Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering
sequence on your mating connector may or may not coincide with the numbering
sequence shown in our pin configuration table above. It is imperative that you
match the appropriate wires in accordance with the correct sequence regardless
of the particular numbers displayed on your mating connector.
4
Make sure power is OFF when connecting or disconnecting any cables in the system.
The power input is protected by a 900mA (GFC-1100-09, 2100-09 /1111, 1131,
1133 /2111, 2131, 2133, 1142 /2142) or 1600mA (GFC-1143 /2143, 1144 /2144,
1145 /2145) M (medium time-lag) resettable fuse. If a shorting condition or polarity
reversal occurs, the fuse will cut power to the flow transducer circuit. Disconnect the
power to the unit, remove the faulty condition, and reconnect the power. The fuse will
reset once the faculty condition has been removed.
CAUTION: Fuse will not protect controller if power supply voltage
exceeds maximum voltage specified for a particular model.
Use of the GFC flow transducer in a manner other than that specified in this manual or
in writing from Dwyer, may impair the protection provided by the equipment.
NR7
LOCAL SET POINT
POTENTIOMETER
R34 ZERO
POTENTIOMETER
NJ1 CONTROL
CIRCUT JUMPERS
R52 10 or 25 %
R1 RESPONSE
TIME AJUSTMENT
R33
SPAN (10 or 25%)
R40 100%
R39 75%
R38 50%
FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS
2.2.1
Valve Control Configuration
There are three basic valve control options.
(a) LOCAL or REMOTE control.
(b) 0 to 5 VDC or 4 to 20 mA setpoint signal *Note: this only applies for the REMOTE control configuration.
(c) 2% cutoff active or not active. Note: 2% cutoff not available for GFC-1143 /2143,
1144 /2144, 1145 /2145.
5
When active, the 2% cutoff will shut off the power to the valve when a setpoint of
less than 2% of the full scale flow range is set. Figure 2-3 shows the jumper configurations for the three basic valve control options.
The factory default jumper settings are: LOCAL control, 2% cutoff, and 0 to 5 VDC.
Remote
Local
FUNCTION
0 to 5 Vdc 2% cutoff ON
0 to 5 Vdc 2% cutoff OFF
4 to 20 mA 2% cutoff ON
4 to 20 mA 2% cutoff OFF
2% cutoff ON
2% cutoff OFF
3 6
2 5
1 4
9 12 15
8 11 14
7 10 13
A B
C D
NJ1A
NJ1B
NJ1C
2-3
5-6
8-9
1-2
4-5
7-8
2-3
5-6
8-9
NJ1D
NJ1E
13 - 14
10 - 11
14 -15
13 - 14
10 - 11
14 - 15
13 -14
11 - 12
14 - 15
E
FIGURE 2-3, VALVE CONTROL CONFIGURATION JUMPERS
2.2.2
Remote LCD Readouts
GFC Mass Flow Controllers are available with optional remote reading LCD displays supplied with a three foot long wire to accommodate most applications. This
configuration includes the upper block element which serves as the LCD readout
mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters])
are available on request.
2.2.3
Panel Mounting Readouts
Another option for the GFC Mass Flow Controller is the Panel Mounting Remote
Readout.
In this configuration the LCD readout is supplied with a three foot long extension
wire, and no aluminum housing around the LCD. The LCD readout for panel
mounting includes a bezel with two plastic screws which conveniently fit into a rectangular cut-out for panel mounting (see Figure 2-4).
6
FIGURE 2-4 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING
3.
PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
GFC Mass Flow Controller models GFC-1100-09, 2100-09 /1111, 1131, 1133
/2111, 2131, 2133, 1142 /2142 also incorporate a proportionating solenoid valve
and models GFC-1143 /2143, 1144 /2144, 1145 /2145 a motorized valve. The
closed loop control circuit of the GFC continuously compares the mass flow output with the selected flow rate. Deviations from the setpoint are corrected by compensating valve adjustments, thus maintaining the desired flow parameters.
4.
SPECIFICATIONS
FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with
clean gases only. Never try to meter or control flow rates of liquids with any GFC's.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70 FF
(21.1 FC)] unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
7
ACCURACY:
GFC-110/111/113: ±1.0% F.S.
GFC-1143/1144/1145: See table below.
ACCURACY % FS
MODEL
GFC-1143/1144/1145
FLOW
RANGE
20-100%
ACCURACY
±1.5%
OPTIONAL ENHANCED ACCURACY % FS
MODEL
GFC-1143/1144/1145
0-20%
FLOW
RANGE
20-100%
±3%
ACCURACY ±1%
0-20%
REF DATA with ±1%
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/ FC.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: GFC-110/111: 300ms time constant; approximately 1 second to
within ±2% of set flow rate for 25% to 100% of full scale flow.
GFC-113/114: 600ms time constant; approximately 2 seconds to
within ±2% of set flow rate for 25% to 100% of full scale flow.
GFC-1143/1144/1145: 1800ms time constant; approximately 5 seconds to
within ±2% of set flow rate for 25% to 100% of full scale flow.
MAX GAS PRESSURE: 1000 psig (69 bars) GFC 110 and 113; 500 psig (34.5 bars) GFC
1143, 1144 and 1145. Optimum pressure is 20 psig (1.4 bars).
TURNDOWN RATIO: 40:1.
MAX DIFFERENTIAL PRESSURE: 50 psid (345 kPa) for GFC-110, 111, 113, 1143, 1144
1145 AND 40 psid (276 kPa) for GFC 1142.
GAS AND AMBIENT TEMPERATURE: 32 FF to 122 FF (0 FC to 50 FC). 14 FF to 122 FF
(-10 FC to 50 FC) - Dry gases only.
RELATIVE GAS HUMIDITY: Up to 70%.
MAXIMUM INTERNAL LEAK: 0.5% FS.
LEAK INTEGRITY: 1 x 10-7 sccs He max to the outside environment.
ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal to vertical;
standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0 to 5 Vdc (1000 Ω minimum load impedance) and 4 to 20
mA (0 to 500 Ω loop resistance, sourcing only for passive load); 20 mV peak to peak max
noise for GFC-110/111/113/114 and 100 mV peak to peak max noise for
GFC-1143/1144/1145.
8
COMMAND SIGNAL: Analog 0 to 5 Vdc (100 K minimum input impedance) or 4 to 20 mA
(250 Ω input impedance, use only with 3 wire 4-20 mA loop sourcing device). Contact
your distributor or Dwyer for optional RS232 or RS485 interfaces.
TRANSDUCER INPUT POWER :
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142:
Models with 12 Vdc power input: 12 Vdc, 650 mA maximum;
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142:
Models with 24 Vdc power input: +24 Vdc, 650 mA maximum;
GFC-1143 /2143, 1144 /2144 /1145 /2145:
Models with 12 Vdc power input: 12 Vdc, 800 mA maximum;
GFC-1143 /2143, 1144 /2144, 1145 /2145:
Models with 24 Vdc power input: 24 Vdc, 800 mA maximum;
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142:
Models with universal power input: any voltage between +12 and +26
Vdc, 650 mA maximum;
WETTED MATERIALS:
GFC-1100-09, 1111, 1131, 1133, 1142, 1143, 1144, 1145: Anodized aluminum, brass,
416 Stainless Steel and 316 stainless steel with VITON® O-rings seals; BUNA-N®, EPR or
KALREZ® O-rings are optional.
GFC-2100-09 /2111, 2131, 2133, 2142, 2143, 2144, 2145: 416 Stainless Steel and 316
stainless steel with VITON® O-rings seals; BUNA-N®, EPR or KALREZ O-rings are optional.
Dwyer makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers sole responsibility to select the model suitable for a particular gas based on
the fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS:
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133:
GFC-1142 /2142:
GFC-1143 /2143:
GFC-1144 /2144:
GFC-1145 /2145:
1/4" compression fittings. Optional: 6mm compression, 1/4" VCR®,
3/8" or 1/8" compression fittings.
3/8" compression fittings.
3/8" compression fittings.
1/2" compression fittings.
3/4" FNPT fittings. Optional: 3/4" compression fittings.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On aluminum or stainless steel models the LCD display is built into the upper block element
and may be tilted over 90 degrees for optimal viewing comfort. Remote or panel mounting
remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact your distributor or Dwyer when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFC
transducer 15-pin “D” connector.
9
4.1
CE Compliance
Any model GFC bearing a CE marking on it, is in compliance with the below
stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN
55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992.
4.2
Flow Capacities
FLOW RANGES
Table I GFC-1100-09, 2100-09 Low Flow Mass Flow Controllers*
CODE
mL/min [N2]
GFC-1101/2101
GFC-1102/2102
GFC-1103/2103
GFC-1104/2104
GFC-1105/2105
GFC-1106/2106
10
20
50
100
200
500
CODE
GFC-1107/2107
GFC-1108/2108
GFC-1109/2109
GFC-1110/2110
liters/min [N2]
1
2
5
10
Table III GFC-1142 /2142, 1143 /2143,
1144 /2144, 1145 /2145
High Flow Mass Flow Controllers*
Table II GFC-1111, 1131, 1133, 2111,
2131, 2133
Medium Flow Mass Flow Controllers*
CODE
liters/min [N2]
CODE
liters/min [N2]
GFC-1111/2111
GFC-1130/2130
GFC-1131/2131
15
20
30
GFC-1140/2140
GFC-1141/2141
GFC-1142/2142
60
80
GFC-1132/2132
GFC-1133/2133
40
50
100
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
TABLE IV APPROXIMATE WEIGHTS
MODEL
WEIGHT
SHIPPING WEIGHT
GFC-1100/ GFC-1110
1.9 lbs. (0.86 kg)
3.4 lbs. (1.54 kg)
GFC-2100/ GFC-2110 Stainless
2.25 lbs. (1.02 kg)
3.75 lbs. (1.70 kg)
2 lbs. (0.91 kg)
3.50 lbs. (1.59 kg)
2.5 lbs. (1.13 kg)
4 lbs. (1.81 kg)
GFC-1111, GFC-1133
GFC-2100, GFC-2133 Stainless
10
TABLE V PRESSURE DROPS
MAXIMUM PRESSURE DROP
MODEL
FLOW RATE
[liters/min]
GFC-1100-09, 2100-09
UP to 10
720
1.06
75
15
20
30
40
2630
1360
2380
3740
3.87
2.00
3.50
5.50
266
138
241
379
50
60
100
200
500
5440
7480
12850
7031
8437
8.00
11.00
18.89
10.00
12.00
551
758
1302
690
827
1000
10547
15.00
1034
GFC-1111, 1131, 1133
/2111, 2131, 2133
GFC-1142 /2142,
1143 /2143,
1144 /2144,
1145 /2145
[mm H2O]
5.
OPERATING INSTRUCTIONS
5.1
Preparation and Warm Up
[psid]
[mbar]
It is assumed that the Mass Flow Controller has been correctly installed and thoroughly leak tested as described in section (2). Make sure the flow source is OFF. Apply
power to the unit via the 15-pin “D” connector. Before connecting the power supply
check the controller power supply requirements label located on the controller back
cover. If the power supply requirements label states that power supply requirement is
12 Vdc, do not connect the power supply with voltage above 15 Vdc. Exceeding the
specified maximum power supply voltage limit will result in device permanent damage.
Allow the Mass Flow Controller to warm-up for a minimum of 15 minutes.
During initial powering of the GFC transducer, the flow output signal will be indicating
a higher than usual output. This is indication that the GFC transducer has not yet
attained it's minimum operating temperature. This condition will automatically cancel
within a few minutes and the transducer should eventually zero.
If after the 15 minutes warm-up period, the display still indicates a reading of less than
± 3.0 % of F.S., readjust the ZERO potentiometer [R34] through the access window.
Before zero adjustment it is good practice to temporarily disconnect the gas source, to
ensure that no seepage or leak occurs in to the meter.
CAUTION: Adjusting Zero Reading more than ± 3.0% F.S. from the
factory settings may affect device calibration accuracy. If such adjustment
is required it is recommended to perform controller recalibration to pre
serve device accuracy.
11
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
CAUTION
CAUTION: If the valve is left in the AUTO (control) or OPEN (PURGE)
mode for an extended period of time, it may become warm or even hot
to the touch. Use care in avoiding direct contact with the valve during
operation.
Do not run GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142
/2142 for extended periods of time with the valve in AUTO or PURGE mode without the flow of gas through the transducer. Doing so may result in up to 2% f.s.
shift in calibration.
5.2
Flow Signal Output Readings
The flow signal output can be viewed either on the LCD display, remote panel
meter, digital multimeter, or other display device used as shown in Figure 2-1.
If an LCD display has been ordered with the GFC, the observed reading is in
direct engineering units. Such as 0 to 10 sccm or 0 to 100 slpm (0 to 100% indication is optional). Engineering units are shown on the flow transducer's front
label.
Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are attained at the appropriate pins of the 15-pin “D” connector (see Figure 2-1) on the side of the GFC
transducer (see Figure 2-1).
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.
The default calibration is performed for 0 to 5 VDC input/output signal. If 4-20
mA output signal is used for flow indication on the GFC, which was calibrated
against 0 to 5 VDC input signal, the accuracy of the actual flow rate will be in the
specified range (+1.0% GFC 1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131,
2133, 1142/ 2142, +1.5% GFC 1143 /2143, 1144 /2144, 1145 /2145) of full scale,
but the total uncertainty of the output reading may be in the range of +2.5% of full
scale. Optional calibration for 4-20 mA output signal is available upon request at
time of order.
For optional RS232 or RS485 interfaces please contact your distributor or Dwyer.
5.3
Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a condition known as “swamping” may occur. Readings
of a “swamped” meter cannot be assumed to be either accurate or linear. Flow
must be restored to below 110% of maximum meter range. Once flow rates are
lowered to within calibrated range, the swamping condition will end. Operation of
the meter above 110% of maximum calibrated flow may increase recovery time.
12
5.4
Setpoint Reference Signal
GFC flow controllers have a built-in solenoid valve (GFC-1100-09, 2100-09 /1111,
1131, 1133 /2111, 2131, 2133, 1142 /2142) or motorized valve (GFC-1143 /2143,
1144 /2144, 1145 /2145) and allow the user to set the flow to any desired flow rate
within the range of the particular model installed. The solenoid valve is normally
closed when no power is applied.
The motorized valve can be in any position depending on the operation mode of
the GFC during disconnecting of the power. For example if the motorized valve
was left in the OPEN purge position after disconnecting power from the GFC it will
be in the OPEN position. It is the customers responsibility to provide a solution to
shut down the flow in case of a power outage. When power is applied for the
GFC-1143 /2143, 1144 /2144, 1145 /2145 the valve automatically closes within
the first ten seconds regardless of the set point and valve override signals.
Setpoints are controlled locally or remotely. Setpoints inputs respond to analog 0
to 5 Vdc or 4 to 20 mA reference voltages (default jumper setting is 0 to 5 Vdc).
Voltage is a linear representation of 0 to 100% of the full scale mass flow rate.
Response times to setpoint changes are 1 second (GFC-1100-09, 2100-09), 2
seconds (GFC 1111, 1131, 1133 /2111, 2131, 2133, 1142/ 2142) and 5 seconds
(GFC 1143 /2143, 1144 /2144, 1145 /2145) within 2% of the final flow over 25 to
100% of full scale.
For LOCAL flow control, use the built-in setpoint potentiometer located on the
same side as the solenoid valve of the GFC transducer. While applying flow to
the transducer, adjust the setpoint with an insulated screwdriver until the flow
reading is the same as the desired control point. [The display will only show the
actual instantaneous flow rate. There is no separate display for setpoint.]
For REMOTE control of the GFC, an analog reference signal must be supplied.
On pin 11 of the GFC transducer is a regulated and constant +5VDC output signal. This signal may be used in conjunction with a local setpoint potentiometer for
flow setting.
FIGURE 5-1 LOCAL SETPOINT POTENTIOMETER CONNECTIONS
13
It is recommended that a potentiometer between 5K to 10K ohm and capable of
at least 10-turns or more for adjustment be used. Use the control potentiometer
to command the percentage of flow desired.
Alternatively, a variable 0 to 5VDC or 4 to 20 mA analog signal may be applied directly to the SETPOINT and COMMON connections of the GFC transducer (see Figure
2-1). Be sure to apply the appropriate signal for the designated NJ1 jumper settings.
5.5
Valve OFF Control
(Open Collector NPN Compatible)
It may be necessary or desirable to set the flow and maintain that setting while
being able to turn the flow control valve off and on again. Closing of the valve
(without changing the setpoint adjustment) can be accomplished by connecting
pin 12 of the 15-pin “D” connector to COMMON (or power ground). When pin 12
is connected to COMMON, the solenoid valve is not powered and therefore will
remain normally closed regardless of the setpoint. The Motorized valve will be
given the command to close indicated by a green light on top of the unit).
Conversely, when the connection is left open or pin 12 remains unconnected the
valve remains active. The valve will remain active when the VALVE OFF pin
remains “floating”. This feature is compatible with open collector NPN transistor
switches, as found in DC output ports of programmable controllers and similar
devices.
The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and VALVE OFF pins of the GFC transducer. Toggling the switch on and off will allow for activating and deactivating the solenoid valve.
5.6
Valve Test/Purge
At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen. The GFC transducer is capable of a full open condition
for the valve, regardless of setpoint conditions. Connecting the OPEN (PURGE)
pin (pin 4 on 15-pin “D” connector) to ground will fully open the valve.
The Motorized Valve: Connect pins 3 and 4 to OPEN the motorized control
valve A red light on top of the valve will indicated an OPEN valve condition, normal for flow conditions.
,
NOTE: The motorized control valve stays OPEN even if power is
no longer applied. To CLOSE the Motorized Control Valve, connect pins
[3] and [12].
14
6.
MAINTENANCE
6.1
Introduction
It is important that the Mass Flow Controller/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part, of
a small capillary stainless steel tube, it is prone to occlusion due to impediments
or gas crystallization. Other flow passages are also easily obstructed. Therefore,
great care must be exercised to avoid the introduction of any potential flow impediment. To protect the instrument a 50 micron (GFC-1100-09, 2100-09) or 60 micron
(GFC-1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142) filter is built into the inlet
of the flow transducer. The filter screen and the flow paths may require occasional
cleaning as described below. There is no other recommended maintenance
required. It is good practice, however, to keep the meter away from vibration, hot
or corrosive environments and excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section (7). It is recommended that units are returned to Dwyer for repair service and calibration.
6.2
CAUTION : TO PROTECT SERVICING PERSONNEL IT IS MANDATORY
THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY
PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.
Flow Path Cleaning
Inspect visually the flow paths at the inlet and outlet ends of the meter for any
debris that may be clogging the flow through the meter. Remove debris carefully
using tweezers and blowing low pressure clean air or Nitrogen from the inlet side.
If the flow path is not unclogged, please return meter to Dwyer for servicing.
6.2.1
Do not attempt to disassemble the sensor. Disassembly will invalidate
calibration.
Cleaning the Inlet Filter Screen in GFC-1100-09,
2100-09 Models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Controller depends on
the gas and flow range of the instrument.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying before re-assembling.
15
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.
,
Note: Over tightening will deform and render the RFE defective.
It is advisable that at least one calibration point be checked after reinstalling the
inlet fitting - see section (7).
6.2.2
IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE, OR
REPAIR GFC-1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142 AND
GFC-1145 /2145 MODELS. DISASSEMBLY NECESSITATES RECALIBRATION.
Valve Maintenance for GFC-1100-09,
2100-09 /1111, 1131, 1133 /2111, 2131, 2133,
1142 /2142 Models
The solenoid valve consists of 316 and 416 stainless steel, and VITON® (or
optional EPR or KALREZ®) O rings and seals. No regular maintenance is required
except for periodic cleaning.
It is advisable that at least one calibration point be checked after re-installing the
inlet fitting - see section (7).
16
ADJUST. SCREW
NUT
O-RING
GUARD
TOP
COMPRESSION
SPRING
GUARD
SPIRAL SPRING
CORE
COIL
SPIDER SPRING
GUARD
BASE
STEM
SEAT-VITON
INSERT
O-RING
4-40
SOCKET
SCREW
ORIFICE
O-RING
VALVE
BODY
BLOCK
11-20-2013
FIGURE 6-1 SOLENOID VALVE
Various corrosive gases may demand more frequent replacement of VITON®
O-rings and seals inside the valve. Be sure to use an elastomer material, appropriate for your specific gas application. Contact your distributor or Dwyer for
optional sealing materials available.
Set the GFC into PURGE mode (see Figure 2-1), and attempt to flush through
with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully
opening the valve is to remove the plastic cap on top of the valve, and turn the set
screw counterclockwise until it stops. See section 7.3 for valve adjustment, to
return the valve to functional use.]
17
7.
,
7.1
CALIBRATION PROCEDURES
NOTE: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void
any calibration warranty applicable.
Flow Calibration
Dwyer Instruments' Flow Calibration Laboratory offers professional calibration
support for mass flow meters and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric calibrators incorporating liquid sealed frictionless actuators.
Generally, calibrations are performed using dry nitrogen gas. The calibration can
then be corrected to the appropriate gas desired based on relative correction [K]
factors shown in the gas factor table - see Appendix 2. A reference gas, other than
nitrogen, may be used to closer approximate the flow characteristics of certain
gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appropriate relative correction factor should be recalculated - see section (9).
It is standard practice to calibrate Mass Flow Controllers with dry nitrogen gas. It
is best to calibrate the GFC transducers to actual operating conditions. Specific
gas calibrations of non-toxic and non-corrosive gases are available at specific
conditions.Specific gas calibrations of non-toxic and non-corrosive gases are
available at specific conditions. Please contact your distributor or Dwyer for a price
quotation.
It is recommended that a flow calibrator of at least four times better collective
accuracy than that of the mass flow meter/controller to be calibrated be used.
Equipment required for calibration includes a flow calibration standard and a certified high sensitivity multimeter (which together have a collective accuracy of
±0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example:
metering needle valve) installed upstream from the Mass Flow Controller and a
pressure regulated source of dry filtered nitrogen gas (or other suitable reference
gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
18
NR7
LOCAL SET POINT
POTENTIOMETER
R34 ZERO
POTENTIOMETER
NJ1 CONTROL
CIRCUT JUMPERS
R52 10 or 25 %
R1 RESPONSE
TIME AJUSTMENT
R33
SPAN (10 or 25%)
R40 100%
R39 75%
R38 50%
FIGURE 7-1 GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF GFC)
7.2
Calibration of GFC-1100-09, 2100-09 /1111, 1131,
1133 /2111, 2131, 2133, 1142 /2142
GFC Mass Flow Controllers
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
GFC Mass Flow Controllers may be field recalibrated/checked for the same range
they were originally factory calibrated for. When linearity adjustment is needed, or
flow range changes are being made proceed to step 7.3. Flow range changes may
require a different Restrictor Flow Element (RFE). Additionally, a different
Solenoid Valve Orifice may also be required (see Table VI). Consult your distributor or Dwyer for more information.
7.2.1
Connections and Initial Warm Up
At the 15-pin “D” connector of the GFC transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) - (see Figure
2-1).
When using a remote setpoint for flow control, the appropriate reference signal
should also be connected to the 15-pin “D” connector at pins [8] and [10] - (see
Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior to
commencing the calibration procedure.
19
7.2.2
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage or
leak occurs into the meter, it is good practice to temporarily disconnect the gas source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at
zero flow.
7.2.3
SPAN Adjustment
Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any deviation. If the deviation is larger than ±10% of full scale reading, a defective condition may be present.
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓
✓
✓
✓
Occluded or contaminated sensor tube.
Leaking condition in the GFC transducer or the gas line and fittings.
For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table.
Temperature and/or pressure correction errors.
See also section (8) TROUBLESHOOTING. If after attempting to remedy the above conditions, a malfunction still persists, return the meter for factory service, see section (1).
At this point the calibration is complete. However, it is advisable that several additional points between 0 and 100%, such as 25%, 50%, and 75% flow be checked.
If discrepancies are found, proceed to step 7.3 for Linearity Adjustment.
7.2.4
Linearity Adjustment
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
7.2.4.1
Disable Solenoid Valve in GFC-1100-09, 2100-09
/1111, 1131, 1133 /2111, 2131, 2133, 1142
/2142 Models
Set the valve into PURGE mode. This step essentially bypasses the flow control
properties of the transducer. The unit will now act as a mass flow meter.
CAUTION: FOR GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111,
2131, 2133, 1142 /2142 If the valve is left in the AUTO (control) or
OPEN mode for an extended period of time, it may become warm or
even hot to the touch. Use care in avoiding direct contact with
the valve during operation.
20
7.2.5
Connections and Initial Warm Up
On the transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 VDC
(or pins [9] and [14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1).
If calibration to a new flow range or different gas is being performed, it may be
necessary to remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure.
Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.
7.2.6
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas
source.
Using the multimeter and the insulated screwdriver, adjust the ZERO LCD reading and 0 Vdc (or 4 mA respectively) analog output reading at zero flow by adjusting the zero potentiometer [R34] through the access window.
7.3.4
CAUTION: The minimum voltage on 0-5 Vdc output can be in the
range of 7 to 25 mV. Trying to reduce voltage below this level may
increase negative zero shift. This shift may be invisible on devices without LCD display. Stop R34 zero potentiometer adjustment if voltage on
0-5 Vdc output is in the range from 7 to 25 mV and does not decrease
any lower.
25% Flow Adjustment Using R33 Potentiometer
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 1.25VDC ±63mV (or 8mA
±0.25mA).
Using the flow regulator, adjust the flow rate until the output of the flow meter
reads 0.5 Vdc (or 5.6mA). Check the flow rate against the flow calibrator. If the
flow rate indicated by the calibrator is within 10% ± 1.5% of F.S. then skip paragraphs 7.2.8, 7.2.9 and proceed directly to paragraph 7.2.10, if not, perform 10%
flow adjustment according to paragraph 7.2.8.
21
LINEARIZER
FUNCTION
J1A (10
or 25%)
J1B
(50%)
J1C
(75%)
J1D
(100%)
Decrease
1-2
4-5
7-8
10 - 11
Increase
2-3
5-6
8-9
11 - 12
A
B C D
3
6
9 12
2
5
8 11
1
4
7 10
FIGURE 7-2 GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
CALIBRATION POTENTIOMETER AND JUMPERS
7.2.8
10% Flow Adjustment
Using the flow regulator, adjust the flow rate to 10% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 0.5 Vdc ±63mV (or 5.6mA
±0.25mA).
7.2.9
25% Flow Adjustment (using R52 potentiometer)
Using the flow regulator, adjust the flow rate to 25% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. The output
of the flow meter should read 1.25 Vdc ±63mV (or 8.0mA ±0.25mA). If the reading is outside of that range, place the jumper at [J1.A] as appropriate to increase
or decrease the signal. Adjust the setting for potentiometer [R52] by using the
insulated screwdriver through the access window, until reading is within specification.
7.2.10
50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50VDC ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.
7.2.11
75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1C] as appropriate to increase or decrease the signal.
Adjust the setting for potentiometer [R39] by using the insulated screwdriver
through the access window, until reading is within specification.
7.2.12
100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
22
should read 5.00VDC ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1C] as appropriate to increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification.
Repeat steps 7.2.7 to 7.2.12 at least once more.
7.2.13.
VALVE ADJUSTMENT
7.2.13.1
Valve Adjustment for GFC-1100-09, 2100-09
/1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
Discontinue the PURGE mode (set valve for the closed position). Apply an inlet
pressure of 5 psig, and atmospheric pressure at the outlet. If a small flow occurs,
turn the set screw on top of the solenoid valve clockwise until the flow through the
GFC just stops.
7.2.14
Close Loop Full Scale Flow Adjustment
Fully open the flow regulator upstream of the GFC. Increase the inlet pressure to
20 psig (25 psig for 1142 /2142). Apply a +5.00 VDC (100% full scale flow) setpoint reference. Using the calibrator check the flow rate. If necessary, adjust R33
to match the desired full scale flow rate. [In control mode, turning R33 clockwise
will decrease the flow. Conversely, turning R33 counterclockwise will increase the
flow through the GFC.]
7.2.15
10% Close Loop Flow Adjustment
(using R33 potentiometer)
If the J1A jumper is not installed in upper or lower position (paragraphs
7.2.8 and 7.2.9 were skipped) then skip this paragraph and paragraph 7.2.16.
Proceed directly to paragraph 7.2.17. Change the setpoint to 0.5 Vdc to control
at 10% of full scale flow. Check the flow rate indicated against the flow calibrator.
If the flow rate is not within ±0.75% of full scale, re-adjust the setting for potentiometer [R33], until the flow output is correct.
7.2.16
25% Close Loop Flow Adjustment
(using R52 potentiometer)
Change the setpoint to 1.25 Vdc to control at 25% of full scale flow. Check the flow
rate indicated against the flow calibrator. If the flow rate is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R52], until the flow output is correct.
7.2.17
Close Loop 25% Flow Adjustment
(using R33 potentiometer)
Change the setpoint to 1.25 VDC to control at 25% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R33], until the flow output is
correct.
23
7.2.18
Close Loop 50% Flow Adjustment
Change the setpoint to 2.50 VDC to control at 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R38], until the flow output is
correct.
7.2.19
Close Loop 75% Flow Adjustment
Change the setpoint to 3.75 VDC to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is
correct.
7.2.20
Close Loop 100% Flow Adjustment
Change the setpoint to 5.00 VDC to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R40], until the flow output is
correct.
Repeat steps 7.2.15 to 7.2.20 at least once more.
ORIFICE PART NUMBER
FLOW RATE [N2]
OR.020
10 to 1000 sccm
OR.040
1 to 5 slpm
OR.055
5 to 10 slpm
OR.063
10 to 15 slpm
OR.094
20 to 50 slpm
OR.125
50 to 100 slpm
TABLE II GFC SOLENOID VALVE ORIFICE SELECTION TABLE
7.3
Calibration of GFC-1143 /2143, 1144 /2144,
1145 /2145 Mass Flow Controllers
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument. GFC Mass Flow Controllers may
be field recalibrated/checked for the same range they were originally factory calibrated for. When linearity adjustment is needed, or flow range changes are being
made proceed to step 7.2.4. Flow range changes may require a different
Restrictor Flow Element (RFE). Additionally, a different Solenoid Valve Orifice may
also be required (see Table VI). Consult your distributor or Dwyer® for more information.
24
R34
ZERO
POTENTIOMETER
NJ1 CONTROL
CIRCUT JUMPERS
GFC-1143, 2143,
1144, 2144,
1145, 2145
LOCAL
SETPOINT
POTENTIOMETER
NR7
R1 RESPONSE
TIME ADJUSTMENT
R33
SPAN (25%)
R40 100%
R39 75%
R38 50%
FIGURE 7-3 GFC-1143 /2143, 1144 /2144, 1145 /2145 CALIBRATION
POTENTIOMETER AND JUMPER LOCATIONS (BACK OF GFC)
7.3.1
Connections and Initial Warm Up
At the 15-pin “D” connector of the GFC transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 Vdc (or pins [9] and [14] for 4 to 20 mA) - (see Figure
2-1). When using a remote setpoint for flow control, the appropriate reference signal should also be connected to the 15-pin “D” connector at pins [8] and [10] (see Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior
to commencing the calibration procedure.
7.3.2
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, temporarily disconnect the gas source. Using the
multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34]
through the access window for 0 Vdc (or 4 mA respectively) at zero flow.
7.3.3
SPAN Adjustment
Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any deviation. If the deviation is larger than ±10% of full scale reading, a defective condition may be present.
25
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓
✓
✓
✓
Occluded or contaminated sensor tube.
Leaking condition in the GFC transducer or the gas line and fittings.
For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table.
Temperature and/or pressure correction errors.
See also section (8) TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory service,
see section (1). At this point the calibration is complete. However, it is advisable
that several additional points between 0 and 100%, such as 25%, 50%, and 75%
flow be checked. If discrepancies are found, proceed to step 7.3.4 for Linearity
Adjustment.
7.3.4
Linearity Adjustment
All adjustments in this section are made from the outside of the meter, there is
no need to disassemble any part of the instrument.
7.3.4.1
Open Motorized Valve in GFC-1143 /2143,
1144 /2144, 1145 /2145 Models
Set the valve to PURGE mode by connecting pin [4] to pin [3], at the 15 pin
D-connector.
7.3.5
Connections and Initial Warm Up
Connect the multimeter to output pins [1] and [2] for 0 to 5 Vdc (or pins [9] and
[14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1). If calibration to
a new flow range or different gas is being performed, it may be necessary to
remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure.
Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.
7.3.6
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas
source. Using the multimeter and the insulated screwdriver, adjust the ZERO
potentiometer [R34] through the access window for 0 Vdc (or 4 mA respectively)
at zero flow.
7.3.7
25% Flow Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25%
of full scale flow. Check the flow rate indicated against the flow calibrator. Adjust
the setting for potentiometer [R33] by using the insulated screwdriver through
the access window, until the output of the flow meter reads 1.25 Vdc ±63mV (or
8mA ±0.25mA).
26
LINEARIZER
FUNCTION
J1A (50%)
J1B (75%)
J1C (100%)
Decrease
1-2
4-5
7-8
Increase
2-3
5-6
8-9
FIGURE 7-4 GFC-1143 /2143, 1144 /2144, 1145 /2145
CALIBRATION POTENTIOMETER AND JUMPERS
7.3.8
50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50 Vdc ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1A] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.
7.3.9
75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75 Vdc ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal.
Adjust the setting for potentiometer [R39] by using the insulated screwdriver
through the access window, until reading is within specification.
7.3.10
100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00 Vdc ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1C] as appropriate to increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification. Repeat steps
7.2.7 to 7.2.10 at least once more.
7.3.11.
VALVE ADJUSTMENT
7.3.11.1
Valve Adjustment for GFC-1143 /2143,
1144 /2144, 1145 /2145
Discontinue the PURGE mode (set valve for the Auto position). DO NOT adjust
the motorized valve for GFC-1143 /2143, 1144 /2144, 1145 /2145. The motorized
valve for these models has been pre-adjusted at the factory.
27
7.3.12
Full Scale Flow Adjustment
Fully open the flow regulator upstream of the GFC. Increase the inlet pressure to
20 psig. Apply a +5.00 Vdc (100% full scale flow) setpoint reference. Using the calibrator check the flow rate. If necessary, adjust R33 to match the desired full scale
flow rate. [In control mode, turning R33 clockwise will decrease the flow.
Conversely, turning R33 counterclockwise will increase the flow through the GFC.]
7.3.13
25% Flow Adjustment
Change the setpoint to 1.25 Vdc to control at 25% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R33], until the flow output is correct.
7.3.14
50% Flow Adjustment
Change the setpoint to 2.50 Vdc to control at 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R38], until the flow output is correct.
7.3.15
75% Flow Adjustment
Change the setpoint to 3.75 Vdc to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is correct.
7.3.16
100% Flow Adjustment
Change the setpoint to 5.00 Vdc to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R40], until the flow output is correct.
Repeat steps 7.3.13 to 7.3.16 at least once more.
7.4
LCD Display Scaling
It may be desirable to re-scale the output reading on the LCD readout supplied
with certain model GFC transducers. Re-calibration for a new flow range or different engineering units are two examples of when this may be necessary.
7.4.1
Access LCD Display Circuit
Carefully remove the LCD from the GFC or panel mounted surface. Remove the
aluminum housing on the side of the connection cable. Slide the LCD assembly
out of the aluminum housing.
28
7.4.2
Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 Vdc or 4 to 20 mA signal
at the 15-pin “D” connector, set the flow rate on the GFC to full scale flow (5
Vdc or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the
LCD printed circuit board to desired full scale flow reading.
7.4.3
Change Decimal Point
To change the decimal place on the LCD display readout, simply move the jumper
to the appropriate location on the 8-pin header block. The numbers are printed to
the side of the connections. Do not attempt to place more than one jumper for
decimal setting.
MAXIMUM SCALABLE DISPLAY READING
JUMPER POSITION
“0”
1999
“3”
199.9
“2”
19.99
“1”
1.999
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Controller/Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was
calibrated in accordance to your desired flow and pressure conditions for a given
gas or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
✓ Are all cables connected correctly?
✓ Are there any leaks in the installation?
✓ Is the power supply correctly selected according to requirements? When
several meters are used a power supply with appropriate current rating
should be selected.
✓ Were the connector pinouts matched properly? When interchanging with
other manufacturers' equipment, cables and connectors must be carefully
wired for correct pin configurations.
✓ Is the pressure differential across the instrument sufficient?
29
8.2
General Troubleshooting Guide
INDICATION
LIKELY REASON
REMEDY
lack of reading
or output
power supply off
check connection of power supply
fuse blown
disconnect transducer from
power supply; remove the
shorting condition or check
polarities; fuse resets automatically
filter screen
obstructed at inlet
flush clean or disassemble to
remove impediments or replace
occluded sensor tube
flush clean or disassemble to
remove impediments or return to
factory for replacement
pc board defect
return to factory for replacement
GFC-1100-09, 2100-09 /1111, 1131,
1133 /2111, 2131, 2133, 1142
/2142 valve adjustment wrong
re-adjust valve (section 8.3.3)
inadequate gas pressure
apply appropriate gas pressure
filter screen obstructed
at inlet
flush clean or disassemble to
remove impediments or replace
ground loop
signal and power supply
commons are different
inadequate gas pressure
apply appropriate gas pressure
cable or connector malfunction
check cables and all connections
or replace
setpoint is too low
(<2% of full scale)
re adjust setpoint or disable 2%
cutoff feature (section 2.2)
GFC-1100-09, 2100-09 /1111,
1131, 1133 /2111, 2131, 2133,
1142 /2142 valve adjustment
wrong
re-adjust valve
(section 8.3.3 below)
gas leak
locate and correct
pc board defective
return to factory for replacement
GFC-1100-09, 2100-09 /1111, 1131,
1133 /2111, 2131, 2133, 1142
/2142 valve adjustment wrong
re-adjust valve (see section 8.3.2
below)
flow reading
does not
coincide with
the setpoint
no response
to setpoint
unstable or
no zero reading
30
INDICATION
LIKELY REASON
REMEDY
full scale output
at “no flow”
condition or
with valve
closed
defective sensor
return to factory for replacement
gas leak
locate and repair
GFC-1100-09, 2100-09 /1111,
1131, 1133 /2111, 2131, 2133,
1142 /2142 valve adjustment
wrong
re-adjust valve (section
8.3.1 below)
gas metered is not the same as
what meter was calibrated for
use matched calibration
composition of gas changed
see K factor tables in APPENDIX 2
gas leak
locate and correct
pc board defective
return to factory for replacement
RFE dirty
flush clean or disassemble to
remove impediments
occluded sensor tube
flush clean or disassemble to
remove impediments or return to
factory for replacement
filter screen obstructed
at inlet
flush clean or disassemble to
remove impediments or replace
transducer is not
mounted properly
check for any tilt or change in the
mounting of the transducer;
generally, units are calibrated for
horizontal installation
(relative to the sensor tube)
GFC-1100-09, 2100-09 /1111,
1131, 1133 /2111, 2131, 2133,
1142 /2142 incorrect valve
adjustment
re-adjust valve (section 8.3.3)
pc board defect
return to factory for replacement
cable or connectors
malfunction
check cable and connectors
or replace
differential pressure too high
decrease pressure to correct level
insufficient inlet pressure
adjust appropriately
calibration off
GFC valve does
not work
in open position
31
INDICATION
LIKELY REASON
GFC valve does
not work in
closed position
8.3
REMEDY
GFC-1100-09, 2100-09 /1111,
1131, 1133 /2111, 2131, 2133,
1142 /2142 incorrect valve
adjustment
re-adjust valve (section 8.3.1)
pc board defect
return to factory for replacement
cable or connectors
malfunction
check cable and connectors
or replace
orifice obstructed
disassemble to remove
impediments or return to factory
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131,
2133, 1142 /2142 Valve Related Troubleshooting
8.3.1 INDICATION:
LIKELY REASON: REMEDY:
With “no flow
Valve is out of
conditions” (gas pipes adjustment and
are not connected to the leaking.
GFC) and valve closed
(pins 3 and 12 are
connected together)
LCD reading is zero,
but when 20 PSIG inlet
pressure is applied the
LCD reads more than
0.5% of full scale.
1. Adjust control set point to zero. Set
Valve mode to “CLOSE” position
(connect pins 3 and 12 on the 15 pins
D-connector together). This step is very
important!
2. Apply 20 PSIG inlet pressure.
3. See operating manual page 17
(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.
4. Using a screwdriver readjust adjustment
screw on the top of the valve to CW
(clock wise) direction until zero reading
on the display. Be very careful during
adjustment: make only 15 degree turn
each time and wait one minute due
to the sensor’s response time. If reading
is still high make another 15 degree turn.
Do not over adjust valve. If you made
more than 5 complete (360 degree)
turns and leakage still exists stop
adjustment. In this case unit has to be
returned to the factory for servicing.
5. This is not a shut off valve. It is normal
to observe up to 0.5 % of F.S. leakage.
6. Adjust hex nut cover on the top of the
solenoid valve.
7. Disable Valve “Close” mode,
apply 100% control set point and check
if reading can reach 100% reading.
32
8.3.2 INDICATION:
LIKELY REASON: REMEDY:
Differential pressure
across the GFC
controller is within
specification but LCD
reading and actual flow
are not stable (oscillate
1-4 times per second).
Valve
1. Make sure differential pressure across
compression
the GFC is within specification.
spring is over
2. Install control set point to 100% F.S.
adjusted and PID
This should remedy the oscillation
control cannot
conditions.
handle stable
3. See operating manual page 17
flow.
(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.
4. Using screwdriver readjust adjustment
screw on the top of the valve to CCW
(counter clock wise) direction until
reading on the display will be stable. Be
very careful during adjustment: make
only 15 degree turn each time and
wait about 15 seconds due to sensor’s
response time. If reading oscillates
make another 15 degree turn. Do not
over adjust valve. If you noticed that
flow rate is constant and more than
105% of full scale, it means you over
adjusted valve and it has leakage. In this
case make adjustment to CW (clock
wise) in order to fix this problem until
reading will go back to 100% full scale.
5. Adjust zero set point (or valve close
command), wait about 3 minutes and
check if valve is able to close.
6. This is not a shut off valve. It is normal
to observe up to 0.5 % of F.S. leakage.
7. Install hex nut cover on the top of the
solenoid valve.
33
8.3.3 INDICATION:
LIKELY REASON: REMEDY:
Differential pressure
across the GFC
controller is within
specification but flow
rate reading is more
than 1% F.S. below set
point value when 100%
set point is applied.
Valve
1. Make sure differential pressure across
compression
the GFC is within specification.
spring is over
2. Adjust control set point to 100% F.S.
adjusted and
This should remedy initial fault
controller does
conditions (flow reading is less than set
not have enough
point value and difference is more than
power to open
1% F.S.).
valve and reach 3. See operating manual page 17
100% F.S. flow.
(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.
4. Using screwdriver readjust adjustment
screw on the top of the valve to CCW
(counter clock wise) direction until
reading on the display will be equal to
the set point value. Be very careful
during adjustment: make only 15
degree turn each time and wait about
15 seconds due to sensors responds time.
If reading still below 100% make
another 15 degree turn. Do not over
adjust valve. If you noticed that flow
rate is constant and more than 105%
of full scale, it means you over adjusted
valve and it has leakage. In this case
make adjustment to CW (clock wise) in
order to fix this problem until reading
will go back to 100% full scale.
5. Install zero set point (or valve close
command), wait about 3 minutes and
check if valve is able to close.
6. This is not a shut off valve. It is normal
to observe up to 0.5 % of F.S. leakage.
7. Install hex nut cover on the top of the
solenoid valve.
,
NOTE: One common reason for proportional solenoid valve to be out of
adjustment: keeping control set point even very small (2% for example)
while disconnecting inlet pressure. In this case the valve becomes
overheated within 15 minutes and mechanical characteristics of the seat
insert and compression spring are compromised. Avoid this mode of
operation in the future.
For best results it is recommended that instruments are returned to the factory for
servicing. See section 1.3 for return procedures.
34
8.4
Technical Assistance
Dwyer Instruments will provide technical assistance over the phone to qualified
repair personnel. Please call our Technical Assistance at (219)-879-8000. Please
have your Serial Number and Model Number ready when you call.
9.
CALIBRATION CONVERSIONS FROM
REFERENCE GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
1
d X Cp
where d = gas density (gram/liter)
Cp
= coefficient of specific heat (cal/gram)
K gas =
Note: In the above relationship that d and Cp are usually chosen at the same
conditions (standard, normal or other).
If the flow range of a Mass Flow Controller remains unchanged, a relative K factor is used to relate the calibration of the actual gas to the reference gas.
K =
where Qa
Qr
Ka
Kr
=
=
=
=
Qa
Qr
=
Ka
Kr
mass flow rate of an actual gas (sccm)
mass flow rate of a reference gas (sccm)
K factor of an actual gas
K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
35
APPENDIX 1
COMPONENTS DIAGRAM
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
CONTROLLER PC BOARD (TOP SIDE)
36
COMPONENTS DIAGRAM
GFC-1100-09, 2100-09 /1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
CONTROLLER PC BOARD (BOTTOM SIDE)
37
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
CAUTION: K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
.5829
1.0000
.4346
.7310
1.4573
1.205
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.4036
.240
.352
.492
.1244
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
1.162
1.293
1.787
.760
1.782
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
.7382
.658
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584
.2016
.2016
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
1.964
1.964
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
Acetylene C2H2
Air
Allene (Propadiene) C3H4
Ammonia NH3
Argon Ar
Argon AR-1 (>10 L/min)
Arsine AsH3
Boron Trichloride BCl3
Boron Trifluoride BF3
Bromine Br2
Boron Tribromide Br3
Bromine PentaTrifluoride BrF5
Bromine Trifluoride BrF3
Bromotrifluoromethane (Freon-13 B1) CBrF3
1,3-Butadiene C4H6
Butane C4H10
1-Butene C4H8
2-Butene C4H8 CIS
2-Butene C4H8 TRANS
Carbon Dioxide CO2
Carbon Dioxide CO2-1 (>10 L/min)
Carbon Disulfide CS2
Carbon Monoxide C0
Carbon Tetrachloride CCl4
Carbon Tetrafluoride (Freon-14)CF4
Carbonyl Fluoride COF2
Carbonyl Sulfide COS
Chlorine Cl2
Chlorine Trifluoride ClF3
Chlorodifluoromethane (Freon-22)CHClF2
Chloroform CHCl3
Chloropentafluoroethane(Freon-115)C2ClF5
Chlorotrifluromethane (Freon-13) CClF3
CyanogenC2N2
CyanogenChloride CICN
Cyclopropane C3H5
38
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
1.00
.4357
.1947
.3538
.4252
.2522
.4044
.2235
.4271
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
2.43
2.05
.2421
.1792
1.722
.508
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
1.241
1.241
.1834
.3968
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
.1786
.1786
6.157
3.845
1.0106
1.35
1.9
3.419
3.419
3.419
.0899
.0899
.0899
Deuterium D2
Diborane B2H6
Dibromodifluoromethane CBr2F2
Dichlorodifluoromethane (Freon-12) CCl2F2
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH3)2SiCl2
Dichlorosilane SiH2Cl2
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4
1,1-Difluoroethylene (Freon-1132A) C2H2F2
Dimethylamine (CH3)2NH
Dimethyl Ether (CH3)2O
2,2-Dimethylpropane C3H12
Ethane C2H6
Ethanol C2H6O
Ethyl Acetylene C4H6
Ethyl Chloride C2H5Cl
Ethylene C2H4
Ethylene Oxide C2H4O
Fluorine F2
Fluoroform (Freon-23) CHF3
Freon-11 CCl3F
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-21 CHCl2F
Freon-22 CHClF2
Freon-113 CCl2FCClF2
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-C318 C4F8
Germane GeH4
Germanium Tetrachloride GeCl4
Helium He
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)
Hexafluoroethane C2F6 (Freon-116)
Hexane C6H14
Hydrogen H2-1
Hydrogen H2-2 (>10-100 L)
Hydrogen H2-3 (>100 L)
39
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
1.000
1.000
.764
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.75
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
.759
.0861
.1912
.3171
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.5328
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
3.610
1.627
1.206
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
.715
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H2Se
Hydrogen Sulfide H2S
Iodine Pentafluoride IF5
Isobutane CH(CH3)3
Isobutylene C4H8
Krypton Kr
Methane CH4
Methane CH4-1 (>10 L/min)
Methanol CH3
Methyl Acetylene C3H4
Methyl Bromide CH3Br
Methyl Chloride CH3Cl
Methyl Fluoride CH3F
Methyl Mercaptan CH3SH
Methyl Trichlorosilane (CH3)SiCl3
Molybdenum Hexafluoride MoF6
Monoethylamine C2H5NH2
Monomethylamine CH3NH2
Neon NE
Nitric Oxide NO
Nitrogen N2
Nitrogen Dioxide NO2
Nitrogen Trifluoride NF3
Nitrosyl Chloride NOCl
Nitrous Oxide N2O
Octafluorocyclobutane (Freon-C318) C4F8
Oxygen O2
Oxygen Difluoride OF2
Ozone
Pentaborane B5H9
Pentane C5H12
Perchloryl Fluoride ClO3F
Perfluoropropane C3F8
Phosgene COCl2
Phosphine PH3
40
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl3
Phosphorous Pentafluoride PH5
Phosphorous Trichloride PCl3
Propane C3H8
Propylene C3H6
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Dioxide SO2
Sulfur Hexafluoride SF6
Sulfuryl Fluoride SO2F2
Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F4
Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl3
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2
.2031
.161
8.36
ACTUAL GAS
Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl4
Trichloro Ethylene C2HCl3
Trimethylamine (CH3)3N
Tungsten Hexafluoride WF6
Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe
.0608
.2691
.32
.2792
.2541
.4616
.48
1.44
41
.508
.120
.163
.3710
.0810
.1241
.12054
.0378
8.848
8.465
5.95
2.639
13.28
4.772
2.788
5.858
APPENDIX 3
DIMENSIONAL DRAWINGS
2.38
0.95
DIMENSIONS: INCH [mm]
GFC-1100-09, 2100-09 MASS FLOW CONTROLLER
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion at
any time without notice. For certified dimensions please contact Dwyer.
42
2.38
0.95
5.98 [151.8]
4.88 [123.8]
3.94 [99.9]
1.38 [34.9]
0.63 [15.9]
5.19 [131.8]
*
0.63 [15.9]
7.21 [183.1]
7.33 [186.2]
1.25 [31.8]
0.28 [7.1]
1.85
[47.0]
2.69 [68.3]
0.69 [17.5]
6-32
* FOR HIGH FLOW MASS FLOW CONTROLLER ONLY
DIMENSIONS: INCH [mm]
GFC-1111, 1131, 1133 /2111, 2131, 2133, 1142 /2142
MASS FLOW CONTROLLER
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion
at any time without notice. For certified dimensions please contact Dwyer.
43
2.72 (69,1)
2.38
0.95
6.9" (175,3)
0.875 (22,2)
7" (177,8)
9.98 (253,5)
12.30 (312,4)
0.18 (4,6)
SAE/MS SWAGELOK
3/8 TUBE CONNECTOR
10-24 UNC 0.25
1.39 (35,3) 1.39 (35,3)
1" (25,4)
1" (25,4)
2.15 (54,6)
4.69 (119,1)
GFC-1143 /2143 MASS FLOW CONTROLLER
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion
at any time without notice. For certified dimensions please contact Dwyer.
44
control
ontrol
l
valve
50.00
CE
7.55
(191,8 mm)
flow
3.00
(76,2 mm)
3.00
(76,2 mm)
7.25 (184,1 mm)
10.24 (260,1 mm)
12.62 (320,5 mm)
2.50
(63,5 mm)
2 x 1/2 compression fittings
6.75 (171,5 mm)
* 1/4-20 UNC-2B
* For units purchased prior to August 15, 2012 thread size = 8-32 UNC-2B
GFC-1144 /2144 MASS FLOW CONTROLLER
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion
at any time without notice. For certified dimensions please contact Dwyer.
45
8.54
(217 mm)
control
valve
50.00
CE
4.00
(101,6 mm)
4.00 (101,6 mm)
3/4-14 NPT
(both sides)
7.30 (185,4 mm)
10.28 (261,1 mm)
3.00
(76,2 mm)
6.80 (172,7 mm)
1/4-20 UNC-2B
GFC-1145 /2145 MASS FLOW CONTROLLER
NOTE: Dwyer reserves the right to change designs and dimensions at its sole discretion
at any time without notice. For certified dimensions please contact Dwyer.
46
APPENDIX 4
WARRANTY
Dwyer Mass Flow Systems are warranted against parts and
workmanship for a period of one year from the date of purchase.
Calibrations are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is
assumed that equipment selected by the customer is constructed of
materials compatible with gases used. Proper selection is the
responsibility of the customer. It is understood that gases under pressure present inherent hazards to the user and to equipment, and it is
deemed the responsibility of the customer that only operators with
basic knowledge of the equipment and its limitations are permitted to
control and operate the equipment covered by this warranty. Anything
to the contrary will automatically void the liability of Dwyer and the
provisions of this warranty. Defective products will be repaired or
replaced solely at the discretion of Dwyer at no charge. Shipping
charges are borne by the customer.This warranty is void if the equipment is damaged by accident or misuse, or has been repaired or
modified by anyone other than Dwyer or factory authorized service
facility. This warranty defines the obligation of Dwyer and no other
warranties expressed or implied are recognized.
NOTE: Follow Return Procedures In Section 1.3.
TRADEMARKS
Buna®-is a registered trademark of DuPont Dow Elastometers.
Dwyer®-is a registered trademark of Dwyer Instruments.
Kalrez®-is a registered trademark of DuPont Dow Elastomers.
Viton®-is a registered trademark of Dupont Dow Elastomers L.L.C.
47